JPH0828539B2 - Electrostrictive effect element - Google Patents
Electrostrictive effect elementInfo
- Publication number
- JPH0828539B2 JPH0828539B2 JP63331123A JP33112388A JPH0828539B2 JP H0828539 B2 JPH0828539 B2 JP H0828539B2 JP 63331123 A JP63331123 A JP 63331123A JP 33112388 A JP33112388 A JP 33112388A JP H0828539 B2 JPH0828539 B2 JP H0828539B2
- Authority
- JP
- Japan
- Prior art keywords
- resin
- effect element
- electrostrictive effect
- metal plate
- thin metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、圧電アクチュエータに用いられる電歪効果
素子に関する。TECHNICAL FIELD The present invention relates to an electrostrictive effect element used in a piezoelectric actuator.
従来のこの種の電歪効果素子の製造方法について説明
する。A conventional method for manufacturing this type of electrostrictive effect element will be described.
まず、ペロブスカイト結晶構造をもつ多成分固溶体セ
ラミック粉末に有機バインダーを混合してグリンシート
化し、その上に銀電極導体層をペースト状に塗布した
後、数十層(例えば、64層)積層して撓結する。この撓
結体の側面には、銀電極導体層の端部が全層露出してお
り、くし歯形内部電極を形成するために、銀電極導体層
の端部を一方の側面において一層おきに絶縁処理し、他
方の側面については、絶縁層が形成されなかった銀電極
導体層の端部を絶縁処理する。そして、銀電極導体層を
一層おきに交互に接続し、2つのくし歯形内部電極を形
成する。このようにして得られた電歪効果を示す積層体
1にリード線5をハンダつけした後、電気絶縁性の樹脂
3を形成する。このようにして、第2図に示すような電
歪効果素子が得られる。First, an organic binder is mixed with a multi-component solid solution ceramic powder having a perovskite crystal structure to form a green sheet, and a silver electrode conductor layer is applied as a paste on the green sheet, and then dozens of layers (for example, 64 layers) are laminated. Be flexed. All the ends of the silver electrode conductor layer are exposed on the side surface of this flexible body, and in order to form a comb-shaped internal electrode, the ends of the silver electrode conductor layer are insulated on every other side by one layer. For the other side surface, the end portion of the silver electrode conductor layer on which the insulating layer is not formed is insulated. Then, the silver electrode conductor layers are alternately connected to form two interdigital internal electrodes. After the lead wire 5 is soldered to the laminate 1 having the electrostrictive effect thus obtained, the electrically insulating resin 3 is formed. In this way, the electrostrictive effect element as shown in FIG. 2 is obtained.
この電歪効果素子は、防湿用の樹脂が側面にのみ塗布
されて、上面と下面には塗布されておらず、素子の側面
と樹脂との界面が表面に露出している構造になっている
ため、湿気が、この界面を透過しやすく、素子表面に進
入し、そして素子は全面電極構造になっており、内部電
極が、数10〜100μmの間隔で表面に露出していること
から、先に示したような湿気の進入により、素子の耐電
圧が著しく低下するという欠点があり、素子の側面と樹
脂との界面の露出を防ぐため樹脂で全面を覆った場合に
は、樹脂の弾性により、上面と下面に塗布された樹脂
が、素子の変位を吸収してしまい、十分な変位を取り出
せないという欠点がある。この素子の側面と樹脂との界
面の露出を防ぐため、第3図に示すように、樹脂の替わ
りに、金属の薄板6を素子の上下端面に固着した電歪効
果素子がある。This electrostrictive effect element has a structure in which a moisture-proof resin is applied only to the side surface, not to the upper surface and the lower surface, and the interface between the side surface of the element and the resin is exposed on the surface. Therefore, moisture easily penetrates this interface and enters the element surface, and the element has a full-surface electrode structure, and the internal electrodes are exposed on the surface at intervals of several tens to 100 μm. There is a drawback that the withstand voltage of the element is significantly reduced due to the ingress of moisture as shown in (3), and when the entire surface is covered with resin to prevent the exposure of the interface between the side surface of the element and the resin, the elasticity of the resin causes However, the resin applied to the upper and lower surfaces absorbs the displacement of the element, and it is not possible to take out sufficient displacement. In order to prevent the interface between the side surface of the element and the resin from being exposed, as shown in FIG. 3, there is an electrostrictive effect element in which a thin metal plate 6 is fixed to the upper and lower end surfaces of the element instead of the resin.
上述した従来の電歪効果素子(第3図)は、次のよう
な欠点がある。The above-mentioned conventional electrostrictive effect element (FIG. 3) has the following drawbacks.
(1)素子の中心部と周辺部で変位に落差を生じ、上下
端面に固着された金属の薄板にこの落差による変形が加
わり、繰り返し変位させた場合には、金属の薄板が剥離
してしまい、寿命上の欠点がある。(1) There is a drop in displacement between the central portion and the peripheral portion of the element, and the thin metal plate fixed to the upper and lower end faces is deformed by this drop, and when repeatedly displaced, the thin metal plate peels off. , There is a drawback in life.
(2)また、端面に金属の薄板を固着することにより、
側面と樹脂との界面の露出を防ぐ構造になってはいる
が、界面の湿気の進入距離から見た場合、電気絶縁性の
樹脂の厚み分しかとれないため十分とは言えない。(2) Also, by fixing a thin metal plate to the end surface,
Although it has a structure that prevents the interface between the side surface and the resin from being exposed, it cannot be said to be sufficient because it can take only the thickness of the electrically insulating resin when viewed from the moisture penetration distance at the interface.
(3)さらに、素子に直接リード線を半田付けしている
ことから、取り扱い時にねじりや曲げなどの力がリード
線に加わり、断線してしまったり、また、断線してしま
ったリード線の補修もしにくいという欠点がある。(3) Furthermore, since the lead wire is soldered directly to the element, a twisting or bending force is applied to the lead wire during handling, resulting in disconnection, or repair of a lead wire that has been disconnected. It has the drawback of being difficult.
本発明の電歪効果素子は、圧電セラミック部材と内部
電極導体とが交互に積層された積層体を含む電歪効果素
子において、上記積層体の外部電極導体に一対のリード
端子が設けられ、上記リード端子の一部が突出するよう
な状態で、前記積層体の内部電極導体層が露出する4側
面に電気絶縁性の樹脂が被覆され、さらに上記樹脂も含
めて、上記電歪効果素子の上下端面に、キャップ状の金
属の薄板が固着されている。The electrostrictive effect element of the present invention is an electrostrictive effect element including a laminated body in which a piezoelectric ceramic member and an internal electrode conductor are alternately laminated, and a pair of lead terminals are provided on the external electrode conductor of the laminated body, In a state in which a part of the lead terminal is projected, the four side surfaces of the laminated body where the internal electrode conductor layers are exposed are coated with an electrically insulating resin. A cap-shaped thin metal plate is fixed to the end face.
素子の上下端面に固着する金属の薄板をキャップ状に
することにより、金属の薄板が端面だけでなく側面にお
いても接着されることから、繰り返し変位させた場合で
も、金属の薄板が剥離してしまうことがない。また、界
面の湿気の進入距離についてみた場合、キャップ状にす
ることにより、距離が十分にとれる。さらに、リード線
の取り出しについても、素子から直接リード線を取るの
ではなく、リード端子で素子から取り出し、そのリード
端子にリード線を取り付ける構造にすることにより、リ
ード線が断線してしまった場合でも修理が容易である。By forming a thin metal plate that adheres to the upper and lower end faces of the element into a cap shape, the thin metal plate adheres not only to the end faces but also to the side faces, so the thin metal plate peels off even when repeatedly displaced. Never. Further, regarding the distance of moisture ingress at the interface, a cap-like shape can provide a sufficient distance. In addition, when taking out the lead wire, instead of directly taking the lead wire from the element, take out from the element with the lead terminal and attach the lead wire to the lead terminal But it is easy to repair.
次に、本発明の実施例について図面を参照して説明す
る。Next, embodiments of the present invention will be described with reference to the drawings.
第1図は本発明の電歪効果素子の第1の実施例の縦断
面図である。FIG. 1 is a vertical sectional view of a first embodiment of the electrostrictive effect element of the present invention.
本実施例の電歪効果素子は、圧電セラミック部材と内
部電極導体とが積層された積層体1を含み、積層体1の
外部電極導体に一対のリード端子2が設けられ、リード
端子2の一部が突出するような状態で、積層体1の内部
電極導体層が露出する4側面に電気絶縁性の樹脂3が被
覆され、さらに樹脂3も含めて電歪効果素子の上下端面
にキャップ状の薄板4が固着されている。The electrostrictive effect element according to the present embodiment includes a laminated body 1 in which a piezoelectric ceramic member and an internal electrode conductor are laminated, a pair of lead terminals 2 is provided on the external electrode conductor of the laminated body 1, and one of the lead terminals 2 is provided. With the projecting portion, the four side surfaces of the laminated body 1 where the internal electrode conductor layers are exposed are covered with the electrically insulating resin 3, and the upper and lower end surfaces of the electrostrictive effect element including the resin 3 are cap-shaped. The thin plate 4 is fixed.
次に、この電歪効果素子の組立方法について説明す
る。Next, a method of assembling this electrostrictive effect element will be described.
従来の方法と同様な方法で作成された積層体1にリー
ド端子2をハンダ付けした後、積層体1を樹脂鋳込み用
治具に取り付け、エポキシ樹脂を注入して、170℃‐1
時間の条件で硬化させ、電気絶縁性の樹脂3を形成す
る。続いて、電気絶縁性の樹脂3が形成された積層体1
の上下端面に、エポキシ系接着剤を塗布した厚さ0.08mm
のキャップ状のステンレス製の薄板4を取り付け、治具
で押えつけながら、150℃‐30分の条件で硬化させて接
着する。以上により、第1図に示す電歪効果素子が得ら
れる。After soldering the lead terminals 2 to the laminated body 1 produced by the same method as the conventional method, the laminated body 1 is attached to a resin casting jig, epoxy resin is injected, and 170 ° C-1
The resin 3 is cured under the condition of time to form the electrically insulating resin 3. Subsequently, the laminated body 1 on which the electrically insulating resin 3 is formed
Thickness 0.08mm with epoxy adhesive applied on the top and bottom edges
The cap-shaped stainless steel thin plate 4 is attached, and while being pressed by a jig, it is cured and adhered under the condition of 150 ° C.-30 minutes. By the above, the electrostrictive effect element shown in FIG. 1 is obtained.
次に、第2の実施例について述べる。 Next, a second embodiment will be described.
第2の実施例が第1の実施例と異なる点は、積層体1
の上下端面に接着するキャップ状の金属の薄板に、厚さ
0.08mmのりん青銅製の薄板を用いている点である。The second embodiment is different from the first embodiment in that the laminated body 1
A thin metal plate in the shape of a cap that adheres to the upper and lower end surfaces of the
The point is that a thin 0.08 mm phosphor bronze plate is used.
本実施例では、キャップ状の金属の薄板としてりん青
銅を用いているが、同じ板厚の時には、ステンレスより
もりん青銅の方が、バネ定数が小さいことから、変位の
落差が大きくなるような場合には、利点がある。In the present embodiment, phosphor bronze is used as the cap-shaped thin metal plate, but when the plate thickness is the same, phosphor bronze has a smaller spring constant than stainless steel, so that the difference in displacement is large. In that case, there are advantages.
以上説明したように本発明は、電歪効果素子の電気絶
縁性の樹脂を含んだ上下端面に固着する金属の薄板をキ
ャップ状にすることにより、金属の薄板が、素子の端面
だけでなく、側面にも固着されることから、繰り返し変
位させた場合、従来10万回以上変位を繰り返すと、金属
の薄板が剥離していたものが、100万回以上変位を繰り
返しても、金属の薄板の剥離は起こらず、また、界面の
湿気の進入距離が長くなった結果、直流耐湿負荷寿命が
従来2500〜3000時間だったものが、4000時間以上、十分
信頼性が得られ、さらに、従来、リード線を素子に直接
半田付けして用いていた時には、リード折れなどで修理
不能の不良が多発していたが、リード端子を用いること
により、リード線が折れた場合でも修理が可能となり、
歩留りが向上する効果がある。As described above, the present invention has a cap-shaped thin metal plate that is fixed to the upper and lower end surfaces of the electrostrictive effect element containing the electrically insulating resin, so that the thin metal plate is not only the end surface of the element, Since it is also fixed to the side surface, when repeatedly displaced, the metal thin plate peeled off after repeated displacement of 100,000 times or more. Peeling did not occur, and as a result of the increased moisture penetration distance at the interface, the DC moisture resistance load life was 2500 to 3000 hours in the past, but 4000 hours or more, sufficient reliability was obtained, When the wire was directly soldered to the element, there were many failures that could not be repaired due to breakage of the lead, but by using the lead terminal, even if the lead wire is broken, it is possible to repair it.
It has the effect of improving the yield.
【図面の簡単な説明】 第1図は本発明の電歪効果素子の第1の実施例の縦断面
図、第2図および第3図は従来の電歪素子を示す縦断面
図である。 1……積層体、2……リード端子、3……電気絶縁性の
樹脂、4……キャップ状のステンレス製の薄板。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a vertical sectional view of a first embodiment of an electrostrictive effect element of the present invention, and FIGS. 2 and 3 are vertical sectional views showing a conventional electrostrictive element. 1 ... Laminated body, 2 ... Lead terminal, 3 ... Electrically insulating resin, 4 ... Cap-shaped stainless steel thin plate.
Claims (1)
互に積層された積層体を含む電歪効果素子において、前
記積層体の積層方向に沿った側面に設けられた一対の外
部電極導体にそれぞれリード端子が設けられ、前記積層
体の上下端面を除く側面全体を電気絶縁性の樹脂で被覆
するとともに前記リード端子の一部を前記樹脂から突出
させ、さらにキャップ状の金属薄板を前記積層体の上下
端面に固着するとともに前記キャップ状の金属薄板が前
記樹脂の前記上下端面近傍領域を覆うように前記樹脂に
も固着されていることを特徴とする電歪効果素子。1. An electrostrictive effect element including a laminated body in which a piezoelectric ceramic member and an internal electrode conductor are alternately laminated, wherein a pair of external electrode conductors are provided on side surfaces of the laminated body along a laminating direction. A lead terminal is provided, the entire side surface except the upper and lower end surfaces of the laminate is covered with an electrically insulating resin, and a part of the lead terminal is projected from the resin, and a cap-shaped thin metal plate is further provided on the laminate. An electrostrictive effect element, characterized in that the cap-shaped thin metal plate is fixed to the upper and lower end faces and is also fixed to the resin so as to cover a region near the upper and lower end faces of the resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63331123A JPH0828539B2 (en) | 1988-12-28 | 1988-12-28 | Electrostrictive effect element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63331123A JPH0828539B2 (en) | 1988-12-28 | 1988-12-28 | Electrostrictive effect element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02177485A JPH02177485A (en) | 1990-07-10 |
| JPH0828539B2 true JPH0828539B2 (en) | 1996-03-21 |
Family
ID=18240127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63331123A Expired - Lifetime JPH0828539B2 (en) | 1988-12-28 | 1988-12-28 | Electrostrictive effect element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0828539B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011016994A1 (en) * | 2009-07-27 | 2011-02-10 | Cts Corporation | Encapsulated ceramic element and method of making the same |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59218784A (en) * | 1983-05-26 | 1984-12-10 | Nippon Soken Inc | Laminated ceramic piezoelectric element |
| JPH06105800B2 (en) * | 1986-05-08 | 1994-12-21 | 日本電気株式会社 | Electrostrictive effect element |
-
1988
- 1988-12-28 JP JP63331123A patent/JPH0828539B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02177485A (en) | 1990-07-10 |
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