JPH0831390B2 - Method for manufacturing laminated porcelain capacitor - Google Patents
Method for manufacturing laminated porcelain capacitorInfo
- Publication number
- JPH0831390B2 JPH0831390B2 JP63271151A JP27115188A JPH0831390B2 JP H0831390 B2 JPH0831390 B2 JP H0831390B2 JP 63271151 A JP63271151 A JP 63271151A JP 27115188 A JP27115188 A JP 27115188A JP H0831390 B2 JPH0831390 B2 JP H0831390B2
- Authority
- JP
- Japan
- Prior art keywords
- dielectric layer
- laminated
- internal electrode
- base film
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、積層磁器コンデンサの製造方法に関するも
のである。Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a laminated ceramic capacitor.
従来の技術 近年、ラジオ,マイクロカセットレコーダ,電子チュ
ーナ,ビデオカメラ等の超小型,薄型軽量電子機器の発
展に伴い回路素子として使用されるコンデンサの小型,
大容量化が強く要求されるようになってきた。これらの
要求を満足する部品として積層磁器コンデンサが知られ
ている。積層磁器コンデンサの製造方法としては、先ず
誘電体粉末、バインダ、可塑剤、及び有機溶剤からなる
スラリーを用いてドクターブレード法により有機フィル
ム上に厚さ数十μmのセラミック誘電体層を設けてグリ
ーンシートを作成する。次にこのシート上に内部電極を
印刷したものを複数枚積み重ねた後、圧着により積層成
形体を作成し、しかる後チップ状に切断、焼成後、外部
電極を形成して作成される。(「絶縁誘導体セラミック
ス」CMC社発行塩崎忠 監修p211〜227 1985年) このような方法、すなわち第2図で示すようにベース
フィルム4の表面に誘電体層5を形成しその上に内部電
極6を印刷等により形成したシートを積層していくと、
内部電極6が重なりあった部分と誘電体層5のみの部分
では積層厚みが異なる。このため積層体を加圧し、厚み
を均一化する際に加えられた圧力の大きさが部分的に相
違することとなる。この積層体の圧力むらは高績層化に
なるほど大となる。第2図の構成からなるシートを用い
て作製した積層体をコンデンサチップに分割する切断工
程では、加圧力が小さい低密度の部分の機械的強度が弱
いために、切断刃の圧力によ変位量が大きくなり、クラ
ックや内部電極6はがれを生じていた。2. Description of the Related Art In recent years, with the development of ultra-compact, thin and lightweight electronic devices such as radios, microcassette recorders, electronic tuners, video cameras, etc., miniaturization of capacitors used as circuit elements,
Large capacity has been strongly demanded. A multilayer ceramic capacitor is known as a component satisfying these requirements. As a method of manufacturing a laminated porcelain capacitor, first, a ceramic dielectric layer having a thickness of several tens of μm is provided on an organic film by a doctor blade method using a slurry composed of a dielectric powder, a binder, a plasticizer, and an organic solvent. Create a sheet. Next, after stacking a plurality of sheets on which the internal electrodes are printed on this sheet, a laminated molded body is prepared by pressure bonding, and after that, it is cut into chips and fired, and then the external electrodes are formed. ("Insulation derivative ceramics", published by CMC, edited by Tadashi Shiozaki, p211 to 227, 1985) Such a method, that is, as shown in FIG. 2, a dielectric layer 5 is formed on the surface of a base film 4 and an internal electrode 6 is formed thereon. When sheets formed by printing are stacked,
The laminated thickness differs between the portion where the internal electrodes 6 overlap and the portion where only the dielectric layer 5 is formed. For this reason, the magnitude of the pressure applied when the laminated body is pressed to make the thickness uniform is partially different. The pressure unevenness of this laminated body becomes larger as the quality becomes higher. In the cutting process for dividing the laminated body produced by using the sheet having the structure shown in FIG. 2 into the capacitor chips, the mechanical strength of the low-density portion where the pressing force is small is weak. Was large, and cracks and peeling of the internal electrodes 6 were generated.
この点を改良するために第3図のようにベースフィル
ム等の支持体7に内部電極8を性した後、その上に誘電
体層9を形成することにより、誘電体層9面と内部電極
8層面が同一の面をなしているシートを作成し、このシ
ートを用いた積層磁器コンデンサの製法が提案されてい
る。(特公昭60−29209号公報) 発明が解決しようとする課題 第3図のごとく前述の誘電体層9内に内部電極8が埋
めこまれ且つ誘電体層9面と内部電極8層面が同一の面
をなしているシートを使用してコンデンサを作成すると
積層成形体の圧力ムラは改善できるが、焼結後に誘電体
層9と電極層8間に剥離現象が多数発生し、歩留まりが
悪いという問題点を有していた。In order to improve this point, an internal electrode 8 is formed on a support 7 such as a base film as shown in FIG. 3, and then a dielectric layer 9 is formed on the internal electrode 8 to form a dielectric layer 9 surface and an internal electrode. There has been proposed a method for producing a laminated ceramic capacitor using a sheet in which eight layers have the same surface. (Japanese Patent Publication No. 60-29209) Problems to be Solved by the Invention As shown in FIG. 3, the internal electrode 8 is embedded in the dielectric layer 9 and the surface of the dielectric layer 9 and the surface of the internal electrode 8 are the same. When a capacitor is formed using a sheet having a surface, pressure unevenness of the laminated molded body can be improved, but a large number of peeling phenomena occur between the dielectric layer 9 and the electrode layer 8 after sintering, resulting in poor yield. Had a point.
本発明は上記問題点に鑑み誘電体層内に内部電極が埋
めこまれ且つ誘電体層面と内部電極層面が略同一の面を
なしているシートを使用してコンデンサを作成しても、
デラミネーションの発生を抑制することが可能となり歩
留まりを大幅に向上できる積層磁器コンデンサの製造方
法を提供しようとするものである。In view of the above problems, the present invention creates a capacitor using a sheet in which the internal electrodes are embedded in the dielectric layer and the dielectric layer surface and the internal electrode layer surface form substantially the same surface,
An object of the present invention is to provide a method for manufacturing a laminated ceramic capacitor that can suppress the occurrence of delamination and can significantly improve the yield.
課題を解決するための手段 上記課題を解決するために本発明の積層磁器コンデン
サの製造方法はまず以下に記述するようなグリーンシー
トを作成する。すなわちベースフィルムの表面が凹凸状
になっている面上に内部電極をスクリーン印刷法などで
形成した後、さらにこの面上に誘電体層を形成する。か
かるグリーンシートの前述の内部電極、誘電体層が形成
されていない面側から加熱圧着し、被写物にグリーンシ
ートに形成されている内部電極、誘電体層を両者同時に
加熱転写して積層するものである。Means for Solving the Problems In order to solve the above problems, the method for manufacturing a laminated ceramic capacitor of the present invention first creates a green sheet as described below. That is, an internal electrode is formed by a screen printing method or the like on the surface where the surface of the base film is uneven, and then a dielectric layer is formed on this surface. The inner electrodes and the dielectric layer of the green sheet are heated and pressure-bonded from the side where the dielectric layer is not formed, and the inner electrode and the dielectric layer formed on the green sheet are heat-transferred and laminated on the object at the same time. It is a thing.
作 用 従来のベースフィルム面に内部電極を形成し、その
後、この上にさらに誘電体層を形成して内部電極を誘電
体層に埋め込んだシートを使用すると、デラミネーショ
ンが発生しやすい原因は次のことによるものと思われ
る。このグリーンシートの場合、内部電極面及び誘電体
層面はフラットなポリエステルなどのベースフィルムの
上に形成されていることから、このシートを積層する
時、ベースフィルムを剥がした面、言い換えれば電極面
及び誘電体層面は凹凸の無い極めてフラットな面とな
る。一般にBaTiO3を主成分とする積層磁器コンデンサの
場合、内部電極に使用する材料はパラジウム、白金等の
貴金属である。これらの内部電極はBaTiO5と化学的に反
応することはなく、むしろ凹凸のある内部電極面に誘電
体層が入り込む物理的効果で密着していると考えられて
いる。しかるに内部電極が誘電体層に埋め込まれている
従来方式のシートでは内部電極面及び誘電体層面がフラ
ットなため物理的な効果が期待できず積層成形体を焼成
すると内部電極と誘電体層間の境界で剥離現象が生じや
すくなる。Working If a sheet is used in which internal electrodes are formed on the surface of a conventional base film, and then a dielectric layer is further formed on this and the internal electrodes are embedded in the dielectric layer, the cause of delamination is likely to occur as follows. It seems to be due to. In the case of this green sheet, since the internal electrode surface and the dielectric layer surface are formed on a flat base film such as polyester, when this sheet is laminated, the surface from which the base film is peeled off, in other words, the electrode surface and The surface of the dielectric layer is an extremely flat surface without irregularities. Generally, in the case of a laminated ceramic capacitor containing BaTiO 3 as a main component, the material used for the internal electrodes is a noble metal such as palladium or platinum. It is believed that these internal electrodes do not chemically react with BaTiO 5 , but rather adhere to the uneven internal electrode surface by the physical effect of the dielectric layer entering. However, since the internal electrode surface and the dielectric layer surface are flat in the conventional sheet in which the internal electrodes are embedded in the dielectric layer, physical effects cannot be expected and the boundary between the internal electrodes and the dielectric layer cannot be expected when firing the laminated compact. Therefore, the peeling phenomenon easily occurs.
これに対して本発明の積層磁器コンデンサの製造方法
では次のようなグリーンシートを使用する。すなわち第
1図に示すように内部電極1と誘電体層2の支持体とな
るベースフィルム3の表面をあらかじめエムボス加工等
により凹凸状に仕上げたものを用いる。この面上に内部
電極1、誘電体層2を印刷法等により形成する。このよ
うな構成からなるグリーンシートのベースフィルム3を
剥がすと内部電極1及び誘電体層2の面は凹凸状となる
ことから、このシートを加熱転写して積層した積層成形
体は内部電極1と誘電体層2の密着性は極めて良好とな
り焼結後もデラミネーションの発生を著しく抑制するこ
とが可能となる。On the other hand, the following green sheets are used in the method for manufacturing a laminated ceramic capacitor of the present invention. That is, as shown in FIG. 1, a base film 3 serving as a support for the internal electrodes 1 and the dielectric layer 2 is used, in which the surface of the base film 3 is finished in advance by embossing or the like to give an uneven shape. The internal electrode 1 and the dielectric layer 2 are formed on this surface by a printing method or the like. When the base film 3 of the green sheet having such a structure is peeled off, the surfaces of the internal electrode 1 and the dielectric layer 2 become uneven, so that the laminated molded body obtained by heating and transferring this sheet is laminated with the internal electrode 1. The adhesion of the dielectric layer 2 is extremely good, and the delamination can be remarkably suppressed even after sintering.
実施例 本発明の具体的実施例について詳しく説明する。BaTi
O3を主成分とする誘電体粉末100重量部に対しポリビニ
ルブチラール樹脂10重量部、フタル酸ジオクチル2重量
部を配合した後、溶剤に酢酸−n−ブチル用いてボール
ミルで20時間混練し1800cpsの粘度からなるスラリーを
作成した。EXAMPLES Specific examples of the present invention will be described in detail. BaTi
After blending 10 parts by weight of polyvinyl butyral resin and 2 parts by weight of dioctyl phthalate with 100 parts by weight of dielectric powder containing O 3 as a main component, kneading was carried out for 20 hours by a ball mill using n-butyl acetate as a solvent, and 1800 cps. A slurry of viscosity was created.
次にあからじめエムボス加工により表面平均粗さが1.
5μmの凹凸状に仕上げている厚み50μmのポリエステ
ルフィルムの面上に市販のPd電極ペーストをスクリーン
印刷法で所定の形状に印刷後、乾燥した。さらにこの面
上に前述のスラリーをドクターブレード法でシート成形
し、誘電体層の厚みが25μmで、且つ内部電極が埋め込
まれたグリーンシートを作成した。なお比較のために従
来法による積層磁器コンデンサ用グリーンシートも次の
方法で作成した。すなわち厚み50μmで表面が凹凸の無
いポリエステルフィルムの面上に前述と全く同じ電極材
料、方法で内部電極を形成した後、前述のスラリーを用
いて厚み25μmの誘電体層からなる積層磁器コンデンサ
用グリーンシートを作成した。Next, the average surface roughness is 1.
Commercially available Pd electrode paste was printed in a predetermined shape on the surface of a polyester film having a thickness of 50 μm and finished in an uneven shape of 5 μm by a screen printing method, and then dried. Further, the above-mentioned slurry was formed into a sheet on this surface by a doctor blade method to prepare a green sheet having a dielectric layer thickness of 25 μm and embedded with internal electrodes. For comparison, a conventional green sheet for laminated ceramic capacitors was also prepared by the following method. That is, an internal electrode was formed on the surface of a polyester film having a thickness of 50 μm and no unevenness by the same electrode material and method as described above, and then the above-mentioned slurry was used to form a 25 μm-thick dielectric layer for laminated ceramic capacitors. Created a sheet.
かかる2種類のグリーンシートをそれぞれ使用して積
層数40層からなる積層成形体を加熱転写法により作成し
た。具体的には厚み200μmのコンデンサとして直接寄
与しない誘電体層と、前述のグリーンシートの内部電
極、誘電体層とが向かい合うように重ね合わせた後、ベ
ースフィルム面側から熱盤プレスで加熱圧着し内部電極
と誘電体層を同時に転写し、積層した。この工程を繰り
返し行った後、再び厚み200μmのコンデンサとして直
接寄与しない誘電体シートを積層した。なお加熱転写時
の温度は150℃、圧力は30kg/cm2である。この積層成形
体をチップ状に切断後、チップ成形体をZrO2粉末中にま
ぶしながら1300℃で2時間焼成した。このようにして作
成した積層チップコンデンサの焼結体内部及び積層成形
体の切断時におけるクラック、内部電極はがれの様子を
電子顕微鏡により観察した。その結果、全試料数100コ
に対しいずれの方式でも積層成形体の切断時における不
良品は見つからなかった。しかしながら焼結体内の微細
構造を観察した結果、従来法のグリーンシートを用いた
場合には、誘電体層と内部電極の間でデラミネーション
が発生しており、不良率は10%であったが、本発明の製
造方法では全くデラミネーションが見られなかった。以
上の結果から明らかなように本発明による積層磁器コン
デンサの製造方法、すなわちグリーンシートのベースフ
ィルム面が凹凸状になっている面上に内部電極、誘電体
層が形成されているシートを用いて、加熱圧着により熱
転写して積層することにより、積層成形体の切断時にお
けるクラック、内部電極はがれがなく、また焼成後も内
部電極と誘電体層間の密着性が良好で焼結体のデラミネ
ーションの発生を著しく抑制することが出来た。なお本
実施例では積層磁器コンデンサをとりあげたが他の積層
磁器電子部品、例えば積層アクチュエータ、積層バリス
タ、積層基板に適用しても全く同様の効果を得ることが
出来るのは言うまでもないことである。Using these two types of green sheets, a laminated molded body having 40 layers was prepared by a heat transfer method. Specifically, the dielectric layer that does not directly contribute to the 200 μm thick capacitor is overlaid so that the internal electrodes and the dielectric layer of the green sheet face each other, and then heat-pressed with a hot plate press from the base film surface side. The internal electrode and the dielectric layer were simultaneously transferred and laminated. After repeating this step, a dielectric sheet having a thickness of 200 μm, which does not directly contribute as a capacitor, was laminated again. The temperature during heat transfer is 150 ° C. and the pressure is 30 kg / cm 2 . After cutting this laminated compact into chips, the chip compact was baked for 2 hours at 1300 ° C. while being sprinkled with ZrO 2 powder. The state of cracks and internal electrode peeling at the time of cutting the inside of the sintered body of the multilayer chip capacitor thus produced and the multilayer molded body was observed with an electron microscope. As a result, no defective product was found when cutting the laminated molded body in any of the 100 samples. However, as a result of observing the fine structure in the sintered body, when the conventional green sheet was used, delamination occurred between the dielectric layer and the internal electrode, and the defect rate was 10%. No delamination was observed in the manufacturing method of the present invention. As is clear from the above results, using the method for manufacturing a laminated ceramic capacitor according to the present invention, that is, using a sheet in which internal electrodes and a dielectric layer are formed on the surface of the green sheet on which the base film surface is uneven. By thermal transfer by thermocompression bonding and stacking, there is no crack at the time of cutting the laminated molded body, peeling of the internal electrode, and good adhesion between the internal electrode and the dielectric layer even after firing, resulting in delamination of the sintered body. The generation could be suppressed significantly. In this embodiment, the laminated porcelain capacitor is taken up, but it goes without saying that the same effect can be obtained even when applied to other laminated porcelain electronic parts such as a laminated actuator, a laminated varistor and a laminated substrate.
発明の効果 以上のように本発明による積層磁器コンデンサの製造
方法は、凹凸となったベースフィルムの表面上に内部電
極と誘電体層が形成されたグリーンシートを、前記電極
層、誘電体層が形成されていないベースフィルム面側か
ら加熱圧着して、ベースフィルムに形成された内部電極
及び誘電体層を同時に被写物に転写して積層するもので
あるので、積層成形体をチップ状に切断する時、積層時
の圧力むらが小さいことからクラック、内部電極はがれ
がおきず、また焼成後も内部電極と誘電体層間の密着性
が良好となるため、焼結体のデラミネーションの発生も
著しく抑制することが出来るなど、その工業的価値は極
めて大なるものである。EFFECTS OF THE INVENTION As described above, in the method for manufacturing a laminated ceramic capacitor according to the present invention, a green sheet in which internal electrodes and a dielectric layer are formed on the surface of an uneven base film is used as the electrode layer and the dielectric layer. Since the internal electrodes and dielectric layer formed on the base film are transferred to the object at the same time by thermocompression bonding from the side of the base film that has not been formed, the laminated molded body is cut into chips. In this case, since the pressure unevenness during lamination is small, cracks and internal electrodes do not peel off, and the adhesion between the internal electrodes and the dielectric layer is good even after firing, so delamination of the sintered body also occurs significantly. Its industrial value is extremely great as it can be suppressed.
第1図は本発明において用いる積層磁器コンデンサ用グ
リーンシートの構成を示す断面図、第2図,第3図は従
来法において用いる積層磁器コンデンサ用グリーンシー
トの構成を示す断面図である。 1……内部電極、2……誘電体層、3……ベースフィル
ム。FIG. 1 is a sectional view showing the structure of a laminated ceramic capacitor green sheet used in the present invention, and FIGS. 2 and 3 are sectional views showing the structure of a laminated ceramic capacitor green sheet used in a conventional method. 1 ... internal electrode, 2 ... dielectric layer, 3 ... base film.
Claims (1)
る面上に内部電極を印刷後、この面上に誘電体層を形成
して作成したグリーンシートの、上記ベースフィルムの
上記内部電極、誘電体層を形成していない面側から熱と
圧力をかけて被写物に上記内部電極、誘電体層を転写す
ることにより積層する工程を有することを特徴とする積
層磁器コンデンサの製造方法。1. An internal electrode of a base film of a green sheet produced by printing an internal electrode on a surface of a base film having an uneven surface and then forming a dielectric layer on the surface. A method for manufacturing a laminated ceramic capacitor, comprising a step of laminating the internal electrodes and the dielectric layer onto an object by applying heat and pressure from the surface side on which the dielectric layer is not formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63271151A JPH0831390B2 (en) | 1988-10-27 | 1988-10-27 | Method for manufacturing laminated porcelain capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63271151A JPH0831390B2 (en) | 1988-10-27 | 1988-10-27 | Method for manufacturing laminated porcelain capacitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02117115A JPH02117115A (en) | 1990-05-01 |
| JPH0831390B2 true JPH0831390B2 (en) | 1996-03-27 |
Family
ID=17496043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63271151A Expired - Fee Related JPH0831390B2 (en) | 1988-10-27 | 1988-10-27 | Method for manufacturing laminated porcelain capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0831390B2 (en) |
-
1988
- 1988-10-27 JP JP63271151A patent/JPH0831390B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02117115A (en) | 1990-05-01 |
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