JPH0834651B2 - Ultrasonic probe manufacturing method - Google Patents

Description

The present invention relates to a method for manufacturing an array-type ultrasonic probe in which electrodes are drawn out by using a flexible printed board, and an array-type ultrasonic probe using a metal foil as a common ground electrode. In order to make it possible to accurately perform array-shaped cutting, a flexible printed board with multiple electrode leads and an array cutting marker outside the lead group consisting of multiple electrode leads is prepared. Then, solder the flexible printed board to the ultrasonic vibrator, arrange the backing on the back surface of the ultrasonic vibrator, solder the metal foil as the common ground electrode on the front surface of the ultrasonic vibrator, and on it Forming a matching layer, deciding the position of array cutting by the marker for array cutting, and cutting according to it Is a constituent requirement.

[Industrial applications]

The present invention relates to a method for manufacturing an array-type ultrasonic probe in which electrodes are drawn out using a flexible printed board.

[Conventional technology]

FIG. 3 is a top view of a conventional flexible printed board. In the figure, 10 is a flexible printed board,
11 shows the electrode lead patterns, respectively. As shown in the figure, an electrode lead pattern 11 is formed on the flexible printed board 10.

FIG. 4 is a perspective view of an example of an array type ultrasonic probe using a flexible printed board, and FIG. 5 is a side view thereof. In the figure, 1 is an ultrasonic transducer, 2 is a matching layer,
3 is a backing and 20 is a common ground electrode. The ultrasonic vibrator 1 is made of, for example, piezoelectric ceramic, and a metal film is formed on the upper surface and the lower surface thereof by baking or vapor deposition.

To make the ultrasonic probe shown in FIGS. 4 and 5,
First, the flexible printed board 10 is soldered to the ultrasonic vibrator 1, and an ultrasonic absorber called a backing 3 is arranged on the back surface of the ultrasonic vibrator. Next, the ultrasonic transducer 1 is cut into an array shape in accordance with the electrode lead pattern 11 of the flexible printed board 10. Then, the common ground electrode 20 is drawn out on the front surface of the ultrasonic vibrator 1 by using a metal wire or the like, and the matching layer 2 is formed thereon.

In the ultrasonic probe created in this way,
As shown in FIG. 5, since the matching layer 2 is not divided for each element, it adversely affects the acoustic characteristics of the emitted ultrasonic waves.

FIG. 6 is a perspective view of another conventional example of the array type ultrasonic probe, and FIG. 7 is a side view thereof. In the figure, reference numeral 21 denotes a common ground electrode made of metal foil. The array type ultrasonic probe shown in FIGS. 6 and 7 has been designed to eliminate the drawbacks of the array type ultrasonic probe shown in FIGS. 4 and 5.

To create the array type ultrasonic probe shown in FIGS. 6 and 7, first, the flexible printed board 10 is soldered to the ultrasonic transducer 1 and the common ground is provided on the front surface of the ultrasonic transducer 1. Solder a metal foil as electrode 21 and match layer 2 on it.
To form. After that, the ultrasonic probe as shown in FIGS. 6 and 7 is completed by cutting in an array.

[Problems to be Solved by the Invention]

In the ultrasonic probe shown in FIG. 6 and FIG. 7, the electrode lead pattern of the flexible printed board 10 that serves as a guide for cutting when cutting in an array
Since the vicinity of the joint between 11 and the ultrasonic transducer 1 is hidden by the common ground electrode 21 of the metal foil, there remains a drawback that the exact cutting position cannot be determined.

The present invention was created in view of this point,
It is an object of the present invention to accurately perform array cutting in an array type ultrasonic probe using a metal foil as a common ground electrode.

[Methods for solving problems]

FIG. 1 is a top view of the flexible printed board of the present invention. In the figure, 12 indicates a marker for array cutting.

In the flexible printed board 10 of the present invention, a marker 12 is provided outside the lead group composed of a plurality of electrode leads 11 at a known constant distance l from the electrode leads 11.

FIG. 2 is a perspective view of an ultrasonic probe produced using the flexible printed board of the present invention. In order to produce the array type ultrasonic probe of FIG. 2, first, the flexible printed board 10 is soldered to the ultrasonic transducer 1, and the backing 3 is arranged on the back surface of the ultrasonic transducer 1. Next, a metal foil 21 is soldered on the front surface of the ultrasonic vibrator 1 as a common ground electrode, and the matching layer 2 is formed thereon. After that, the position for array cutting is determined by the marker 12,
By cutting along with it, an array type ultrasonic probe as shown in FIG. 2 is completed.

〔The invention's effect〕

As is apparent from the above description, according to the present invention,
In the array cutting process, even in the case where the vicinity of the joint between the lead electrode pattern 11 of the flexible printed board 10 and the ultrasonic vibrator 1 which is a standard for the cutting position is hidden by the common ground electrode 21 of metal foil By using the marker of the present invention, accurate cutting positioning can be performed.

[Brief description of drawings]

FIG. 1 is a top view of the flexible printed board of the present invention,
FIG. 2 is a perspective view of the ultrasonic probe of the present invention, and FIG. 3 is a conventional flexible probe used in the array type ultrasonic probe.
FIG. 4 is a top view of the printed board, FIG. 4 is a perspective view of a conventional example of an array type ultrasonic probe, FIG. 5 is a side view of a conventional example of an array type ultrasonic probe, and FIG. 6 is an array type. FIG. 7 is a perspective view of another conventional example of the ultrasonic probe of FIG. 7, and FIG. 7 is a side view of another conventional example of the array type ultrasonic probe. 1 ... Ultrasonic transducer, 2 ... Matching layer, 3 ... Backing, 10 ... Flexible printed board, 11 ... Electrode lead pattern, 12 ... Array cutting marker,
20 …… Common earth electrode, 21 …… Common earth electrode made of metal foil.

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Kiyoto Matsui 1015 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Within Fujitsu Limited (56) References JP-A-60-119199 (JP, A) JP-A-61- 61599 (JP, A)

Claims (1)

[Claims] 1. An array having a plurality of electrode leads (11) and outside the lead group composed of the plurality of electrode leads (11).
A flexible printed board (10) with a cutting marker (12) is prepared, and a flexible printed board (10) is attached to the ultrasonic transducer (1).
Solder, arrange the backing (3) on the back surface of the ultrasonic transducer (1), solder the metal foil (21) as a common ground electrode on the front surface of the ultrasonic transducer (1), and then A method for manufacturing an ultrasonic probe, comprising forming a matching layer (2) on the substrate, deciding a position for array cutting with an array cutting marker (12), and cutting according to the position.