radiation thermocoupleとは 意味・読み方・使い方

The temperature of the processing liquid is calculated by correcting the detection value of the radiation thermometer 6 by means of the corresponding formula of the radiation-detecting value and the thermocouple-detecting value in accordance with the processing liquid.例文帳に追加

放射温度計６の検出値を、当該処理液に対応する放射検出値−熱電対検出値対応式で補正することにより、当該処理液の温度が算出される。 - 特許庁

Therefore, the radiation-intercepting cover lid intercepts the radiation that gives an undesirable effect to the measurement of the temperature of the wafers 7, and enables the thermocouple to accurately measure the temperature of the wafers.例文帳に追加

したがって、輻射遮断カバー１１ｄがウェーハ７の温度検出に悪影響を与える輻射を遮断して、熱電対がウェーハの温度を正確に検出することを可能にしている。 - 特許庁

A radiation-detecting value when the processing liquid is discharged really from the nozzle 5 to detect its temperature by the radiation thermometer 6 is stored in a memory in association with a thermocouple-detecting value when the temperature of the processing liquid is measured by means of a thermocouple thermometer.例文帳に追加

ノズル５から実際に処理液を吐出させ、その処理液の温度を放射温度計６により検出したときの放射検出値が、当該処理液の温度を熱電対温度計により測定したときの熱電対検出値に対応付けて、メモリに記憶されている。 - 特許庁

The radiation system 1 which generates a beam of radiation includes an extreme ultraviolet radiation source to produce extreme ultraviolet rays 3, a foil trap 4 to shut up a contaminant from the radiation source 2, a metal plate 7 which operates as a heat sink to collect the heat of radiation from the foil trap 4, and a thermocouple sensor 9 to detect a temperature of the metal plate 7.例文帳に追加

放射線ビームを発生させる放射線システム１は、極端紫外線３を発生させる極端紫外放射源２、放射源２からの汚染を閉じ込めるフォイルトラップ４、フォイルトラップ４からの放射熱を収集するヒートシンクとして作用する金属プレート７、金属プレート７の温度を検出する熱電対センサ９を含む。 - 特許庁

To provide an apparatus for processing wafers which has a thermocouple that accurately measures the wafer temperature by not being affected by an undesirable effect of radiation from the heater of the heating source or the like.例文帳に追加

加熱源であるヒータなどの輻射の悪影響を受けずに基板の温度を正確に検出できる熱電対を備えた基板処理装置を提供する。 - 特許庁

Its temperature is measured by both characteristic thermocouple thermometer 52 and a test substrate measuring optical fiber type radiation thermometer to obtain the temperature difference thereof by a difference correcting circuit 59.例文帳に追加

この温度を熱電対温度計５２と検査基板測定用光ファイバ式放射温度計との両方で測定し、その温度差を差分補正回路５９で求める。 - 特許庁

To reuse an expensive consumptive immersion thermocouple in measuring a molten liquid temperature of a high temperature molten metal and to accurately measure a molten metal liquid inside temperature by means of a radiation thermometer.例文帳に追加

高温溶融金属の融液温度の測定に於ける、高価な消耗型浸漬熱電対の使い捨てを避け、放射温度計による溶融金属液内部温度の正確な測定をする。 - 特許庁

By covering a whole inner side of the thermocouple by a refractory material 8, forming a hole or a gap in a bottom of the refractory material 8, and providing a convection groove for providing high temperature, melting and sterilization are carried out by radiation down-draft heat.例文帳に追加

熱電対の中側全体は耐火物８で覆い、その底部には穴または隙間を作り高温にするための対流溝を設け輻射倒炎熱で溶融殺菌する。 - 特許庁