evacuation passageとは 意味・読み方・使い方

At a shutdown mode, the controller 9 switches off the valve V2, switches on the valve V3 to reduce a flow rate of evacuation flowing into the evacuation passage L1.例文帳に追加

停止モード時、バルブＶ２をオフ、バルブＶ３をオンとし、排出通路Ｌ１を流れる排気の流量を少なくする。 - 特許庁

Two evacuation passages 30 and 40 of different evacuation capacity are formed in the film deposition chamber 10, and evacuation valves 32 and 42 are switched so that the evacuation is performed by the evacuation passage 30 having a pump 31 of smaller evacuation capacity when the raw gas is fed, and the evacuation is performed by the evacuation paces 40 having a pump 41 of larger evacuation capacity when the purge gas is fed.例文帳に追加

成膜室１０に対して排気能力の異なる２個の排気通路３０、４０を設け、原料ガス供給時には、排気能力の小さいポンプ３１を有する排気通路３０にて排気を行い、パージガス供給時には、排気能力の大きいポンプ４１を有する排気通路４０にて排気を行うように、各排気バルブ３２、４２を切り替える。 - 特許庁

Circumferentially adjoining small abrasive grain layer portions 28 delimit an auxiliary evacuation passage 30 in between, and radially adjoining ones delimit a main evacuation passage 31 in between.例文帳に追加

周方向に隣り合う小砥粒層部２８，２８の間は副排出路３０となり、径方向に隣り合う小砥粒層部２８，２８の間は主排出路３１となる。 - 特許庁

An evacuation replacement passage S is separately formed in an extending manner along the passage 2a in the spouting unit 2, and a bulkhead 5 for merging the passage 2a with the evacuation replacement passage S before reaching the fracture scheduled line 3 is provided.例文帳に追加

そして、前記注出部２内に、該通路2aに沿って伸延して空気置換用通路Ｓを別途に形成するとともに前記破断予定線３に至る前に該通路2aと空気置換用通路Ｓを合流させる隔壁５を設ける。 - 特許庁

The evacuation passage 10 is formed in interior of a wall of a sealing room H, and an lower end of the passage 10 is connected continuously with the inside of the lower end of the sealing room H through an evacuation opening 11.例文帳に追加

密閉室Ｈの壁内部に排気通路１０を形成し、排気通路１０の下端部を排気開口部１１を介して密閉室Ｈの下端部内と連通させる。 - 特許庁

An evacuation passage L2 is fitted in parallel to an evacuation passage L1 of exhaust gas from a combustion chamber 4 to a reforming heat exchanger 2 so as to lead the exhaust gas from the combustion chamber 4 to an air preheater 6.例文帳に追加

改質熱交換器２への燃焼室４からの排気ガスの排出通路Ｌ１に並列に排出通路Ｌ２を設け、燃焼室４からの排気ガスを空気予熱器６へ導く。 - 特許庁

Moreover, when the second material gas is supplied to the reaction vessel, a channel is switched by a switching means, vacuum evacuation is performed by a second vacuum evacuation means through a second vacuum evacuation passage, and the gas is sent to the gas treatment facility via a second exhaust passage.例文帳に追加

また反応容器に第２の原料ガスを供給するときには切り替え手段で流路を切り替えて第２の真空排気路を介して第２の真空排気手段により排気を行い、ガスは第２の排気通路を介してガス処理設備に送る構成とする。 - 特許庁

A passage changeover member 18 is mounted in the tool holder mounting hole 6a, and when cleaning the coolant evacuation passage 16, the coolant supply opening part 15a is put in communication with a one-end opening 16a of the coolant evacuation passage 16 by the passage changeover member 18.例文帳に追加

前記工具ホルダ装着孔６ａには、流路切替部材１８が装着されており、クーラント退避通路１６の清掃時には、この流路切替部材１８により、クーラント供給口部１５ａをクーラント退避通路１６の一端開口１６ａに連通させるようにしている。 - 特許庁