largesizeとは 意味・読み方・使い方

Tokai Region Nano Technology Manufacturing Cluster]○Commercialization of an ultra-small sensor capable of directly measuring radicals in plasma Previously, radicals in plasma, which play an important role in fine processing and formation of thin films, could be measured only by largesize optical spectrometers. The Tokai Region Nano Technology Manufacturing Cluster reduced the size of optical spectrometers capable of measuring radicals in plasma to several millimeters in diameter by developing a new lighting source and succeeded in commercializing a radical monitor that enables the easy, precise measurement of radicals.例文帳に追加

プラズマ中のラジカルを直接計測できる超小型センサーを商品化これまでに大型の光分光計測装置でしか計測できなかったプラズマ中のラジカルは、微細加工や薄膜形成に重要な役割を担っているが、新規の光源等を開発することで数mm径まで小型化し、簡単に高精度でラジカルを計測できるラジカルモニターの商品化に成功した。 - 経済産業省