JP2911293B2 - Magneto-optical recording medium - Google Patents
Magneto-optical recording mediumInfo
- Publication number
- JP2911293B2 JP2911293B2 JP10304492A JP10304492A JP2911293B2 JP 2911293 B2 JP2911293 B2 JP 2911293B2 JP 10304492 A JP10304492 A JP 10304492A JP 10304492 A JP10304492 A JP 10304492A JP 2911293 B2 JP2911293 B2 JP 2911293B2
- Authority
- JP
- Japan
- Prior art keywords
- platinum
- underlayer
- recording medium
- magneto
- optical recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 81
- 229910052697 platinum Inorganic materials 0.000 claims description 37
- 150000001875 compounds Chemical class 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 8
- 229910052593 corundum Inorganic materials 0.000 claims description 7
- 239000010431 corundum Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 229910052723 transition metal Inorganic materials 0.000 claims description 5
- 150000003624 transition metals Chemical class 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 12
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 9
- 229910017052 cobalt Inorganic materials 0.000 description 9
- 239000010941 cobalt Substances 0.000 description 9
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 9
- 229910052594 sapphire Inorganic materials 0.000 description 5
- 239000010980 sapphire Substances 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 3
- 230000005291 magnetic effect Effects 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 230000005374 Kerr effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【0001】[0001]
【産業上の利用分野】本発明は、光磁気記録媒体に関
し、特に、白金を含む層と遷移金属を含む層とからなる
交互積層膜と透明基板間に挟み込まれる下地層に係わ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium, and more particularly, to an underlayer sandwiched between a transparent substrate and an alternately laminated film composed of a layer containing platinum and a layer containing a transition metal.
【0002】[0002]
【従来の技術】図2(a)は白金/コバルト積層膜(P
t/Co積層膜)を用いた従来の光磁気記録媒体を示
す。ガラスやポリカーボネイト(PC)の基板3上にカ
ー効果を増大させるため、SiNなどの誘電体膜を成膜
し、次に、SiNを平滑にするため、エッチング処理す
る。その後、白金とコバルトを数Åづつ積層する(第1
4回日本応用磁気学会講演概要集P.65)。2. Description of the Related Art FIG. 2A shows a platinum / cobalt laminated film (P).
1 shows a conventional magneto-optical recording medium using a (t / Co laminated film). A dielectric film such as SiN is formed on the glass or polycarbonate (PC) substrate 3 to increase the Kerr effect, and then an etching process is performed to smooth the SiN. Then, platinum and cobalt are laminated by several square meters (first
4th Annual Meeting of the Japan Society of Applied Magnetics 65).
【0003】しかし、このような膜構成では、SiNが
アモルファスであり、白金層が[111]方向にきれい
に積層されないため、垂直磁気異方性が小さく、高密度
記録に必要な保磁力が1KOe程度しか得られない。ま
た、図2(b)は他の従来の光磁気記録媒体を示す。こ
の場合、GaAS(111)やPt(111)に白金/
コバルトを積層すると、保磁力が4KOeまで増大した
という報告(E−MRS spring′90 C 8
−7)があるが、GaAsやPtは不透明なため、その
ような下地層を設けると、信号が読み出しできない。However, in such a film configuration, since SiN is amorphous and the platinum layer is not stacked in the [111] direction, the perpendicular magnetic anisotropy is small, and the coercive force required for high density recording is about 1 KOe. I can only get it. FIG. 2B shows another conventional magneto-optical recording medium. In this case, GaAs (111) or Pt (111) is
It was reported that the coercive force increased to 4 KOe when cobalt was laminated (E-MRS spring'90 C 8
However, since GaAs and Pt are opaque, signals cannot be read if such an underlayer is provided.
【0004】[0004]
【発明が解決しようとする課題】上記の様に、白金/コ
バルト積層膜を用いた光磁気記録媒体では、高密度記録
に必要な保磁力が得られなかったり、信号の読み出しが
できなかったりした。As described above, in a magneto-optical recording medium using a platinum / cobalt laminated film, a coercive force required for high-density recording cannot be obtained or a signal cannot be read. .
【0005】[0005]
【課題を解決するための手段】白金を含む層と遷移金属
を含む層とからなる交互積層膜と、透明基板との間に透
明でかつコランダムAl2O3型構造である下地層化合物
を挟み込む。あるいは、前記下地層化合物としてAl2
O3を用いる。Means for Solving the Problems A transparent underlayer compound having a corundum Al 2 O 3 type structure is sandwiched between an alternately laminated film composed of a layer containing platinum and a layer containing a transition metal, and a transparent substrate. . Alternatively, Al 2 is used as the underlayer compound.
O 3 is used.
【0006】[0006]
【作用】コランダムAl2O3型構造の化合物を[000
1]方向から見ると、Pt[111]方向から見たとき
と類似した並び方をしている。また、Al2O3などの酸
素間の原子間距離は白金のそれとほぼ等しい。従って、
白金を積層する前にそれらの化合物の膜を白金の[11
1]方向から見たときと類似した並び方になるように成
膜しておくと、白金も成膜の最初から密な並び方をす
る。そのため、白金を含む層と遷移金属を含む層からな
る交互積層膜の保磁力が大きくなり、高密度記録が可能
になる。また、透明であるので、信号の再生が可能で膜
厚を適当に調整することによって、カー回転角が増大す
る。The compound having a corundum Al 2 O 3 type structure is [000
When viewed from the [1] direction, the arrangement is similar to that when viewed from the Pt [111] direction. The interatomic distance between oxygen atoms such as Al 2 O 3 is substantially equal to that of platinum. Therefore,
Prior to stacking platinum, the films of these compounds were plated with platinum [11].
1] If the films are formed so as to be similar in arrangement when viewed from the direction, platinum is also arranged densely from the beginning of the film formation. Therefore, the coercive force of the alternately laminated film including the layer containing platinum and the layer containing the transition metal increases, and high-density recording becomes possible. Further, since it is transparent, signals can be reproduced, and by appropriately adjusting the film thickness, the Kerr rotation angle increases.
【0007】[0007]
【実施例】本発明の一実施例を、磁性層に白金/コバル
ト積層膜、下地化合物にAl2O3(サファイア)を用い
た場合について説明する。図1は本発明の光磁気記録媒
体の断面構造図であり、透明基板3上にAl2O31を成
膜し、その上に白金/コバルト積層膜2を成膜する。An example of the embodiment of the present invention, platinum / cobalt multilayer film magnetic layer, will be described using the Al 2 O 3 (sapphire) the underlying compound. FIG. 1 is a sectional structural view of a magneto-optical recording medium according to the present invention, in which Al 2 O 3 1 is formed on a transparent substrate 3 and a platinum / cobalt laminated film 2 is formed thereon.
【0008】図3(a)は白金の結晶構造図であり、図
3(b)は[111]方向から見た積み重ねの様子を示
す構造図である。白金結晶は図3(a)に示すように面
心立方格子で、[111]方向から見ると、図3(b)
のように最密な積み重ねをする。格子定数は3.9Å、
原子間距離は2.8Åである。下地層の表面の原子の並
び方が白金の[111]方向から見た面と類似している
と、白金の結晶性が向上する。FIG. 3A is a crystal structure diagram of platinum, and FIG. 3B is a structure diagram showing a state of stacking viewed from the [111] direction. The platinum crystal has a face-centered cubic lattice as shown in FIG. 3A, and when viewed from the [111] direction, FIG.
Make the stack as close as possible. The lattice constant is 3.9Å,
The interatomic distance is 2.8 °. When the arrangement of the atoms on the surface of the underlayer is similar to the surface of the platinum viewed from the [111] direction, the crystallinity of the platinum is improved.
【0009】図4はコランダムAl2O3型の結晶構造を
示す構造図であり、サファイア(Al2O3)はコランダ
ムAl2O3型構造で[0001]方向から見ると、白金
の[111]方向から見た面と類似した並び方をしてい
る。図5はサファイアC面(0001)の平面結晶構造
図である。サファイアC面内の平均酸素間の距離が2.
75Åであるのに対して、白金の原子間距離は約2.8
Åであるので、格子間のミスマッチが少ない。そのため
サファイアを下地層に用い、その上に白金を積層する
と、白金も密な構造で積層されていく。FIG. 4 is a structural diagram showing the crystal structure of corundum Al 2 O 3 type. Sapphire (Al 2 O 3 ) has a corundum Al 2 O 3 type structure and, when viewed from the [0001] direction, has a platinum [111] structure. ] Is similar to the plane viewed from the direction. FIG. 5 is a plane crystal structure diagram of the sapphire C plane (0001). The average distance between oxygen in the sapphire C plane is 2.
75 °, while the interatomic distance of platinum is about 2.8.
Since Å, mismatch between lattices is small. Therefore, when sapphire is used as a base layer and platinum is stacked thereon, platinum is also stacked in a dense structure.
【0010】図6(a)は下地層の表面が白金の[11
1]方向から見た面と大きく異なるときの白金と下地層
の界面の状態図である。図6(b)は下地層の表面が白
金の[111]方向から見た面と類似しているときの下
地層の界面の状態図である。図において、4は白金原
子、5は下地層の原子である。図6(b)では白金が最
密な並び方をしながら積層されている。このように、白
金と似た原子の並び方をする下地層を用いることにより
白金の結晶性が向上し、白金/コバルト積層膜の保磁力
が増大する。FIG. 6A shows that the surface of the underlayer is made of platinum [11].
1] is a state diagram of the interface between platinum and an underlayer when the surface is significantly different from the surface viewed from the [1] direction. FIG. 6B is a state diagram of the interface of the underlayer when the surface of the underlayer is similar to the surface of platinum as viewed from the [111] direction. In the figure, 4 is a platinum atom, and 5 is an atom of the underlayer. In FIG. 6B, platinum is stacked in the closest arrangement. As described above, the crystallinity of platinum is improved and the coercive force of the platinum / cobalt laminated film is increased by using the underlayer in which atoms are arranged in a manner similar to that of platinum.
【0011】[0011]
【発明の効果】上記のように、透明かつコランダムAl
2O3型構造である化合物の下地層を用いることによっ
て、白金の結晶性が向上し、白金を含む層と遷移金属を
含む層からなる交互積層膜の保磁力が増大する。その結
果、高密度記録が可能になる。As described above, transparent and corundum Al
By using an underlayer of a compound having a 2 O 3 type structure, the crystallinity of platinum is improved, and the coercive force of an alternately stacked film including a layer containing platinum and a layer containing a transition metal is increased. As a result, high density recording becomes possible.
【図1】本発明の光磁気記録媒体の断面構造図である。FIG. 1 is a sectional structural view of a magneto-optical recording medium of the present invention.
【図2】(a)白金/コバルト積層膜(Pt/Co積層
膜)を用いた従来の光磁気記録媒体である。 (b)他の従来の光磁気記録媒体である。FIG. 2A shows a conventional magneto-optical recording medium using a platinum / cobalt laminated film (Pt / Co laminated film). (B) Another conventional magneto-optical recording medium.
【図3】(a)白金の結晶構造図である。 (b)[111]方向から見た積み重ねの様子を示す構
造図である。FIG. 3 (a) is a crystal structure diagram of platinum. (B) is a structural diagram showing a state of stacking viewed from the [111] direction.
【図4】コランダムAl2O3型の結晶構造を示す構造図
である。FIG. 4 is a structural diagram showing a crystal structure of a corundum Al 2 O 3 type.
【図5】サファイアC面(0001)の平面結晶構造図
である。FIG. 5 is a plane crystal structure diagram of a sapphire C-plane (0001).
【図6】(a)下地層の表面が白金の[111]方向か
ら見た面と大きく異なるときの白金と下地層の界面の状
態図である。 (b)下地層の表面が白金の[111]方向から見た面
と類似しているときの下地層の界面の状態図である。FIG. 6 (a) is a state diagram of the interface between platinum and the underlayer when the surface of the underlayer is significantly different from the surface of the platinum viewed from the [111] direction. (B) A state diagram of the interface of the underlayer when the surface of the underlayer is similar to the surface of platinum as viewed from the [111] direction.
【符号の説明】1 Al 2 O 3 2 白金/コバルト積層膜 3 透明基板 [Description of Signs] 1 Al 2 O 3 2 Platinum / Cobalt laminated film 3 Transparent substrate
Claims (3)
なる交互積層膜と、透明基板と、前記交互積層膜と前記
透明基板の間に挟みこまれた、透明でかつコランダムA
l2O3型構造である化合物の下地層とからなる光磁気記
録媒体。1. An alternate laminated film composed of a layer containing platinum and a layer containing a transition metal, a transparent substrate, and a transparent and corundum A sandwiched between the alternately laminated film and the transparent substrate.
A magneto-optical recording medium comprising an underlayer of a compound having an l 2 O 3 type structure.
で、下地層の結晶方向である[0001]方向と交互積
層膜の積層方向とが一致することを特徴とする光磁気記
録媒体。 2. The method according to claim 1, wherein the underlayer of the compound is in contact with the alternately laminated film.
And the alternate product with the [0001] direction, which is the crystal direction of the underlayer.
Magneto-optical recording characterized in that the laminating direction of the layer film coincides
Recording medium.
録媒体。Recording medium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10304492A JP2911293B2 (en) | 1992-04-22 | 1992-04-22 | Magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10304492A JP2911293B2 (en) | 1992-04-22 | 1992-04-22 | Magneto-optical recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05298759A JPH05298759A (en) | 1993-11-12 |
| JP2911293B2 true JP2911293B2 (en) | 1999-06-23 |
Family
ID=14343671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10304492A Expired - Fee Related JP2911293B2 (en) | 1992-04-22 | 1992-04-22 | Magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2911293B2 (en) |
-
1992
- 1992-04-22 JP JP10304492A patent/JP2911293B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05298759A (en) | 1993-11-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |