JP2976170B2 - Granular shutoff valve - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a particulate shutoff valve, and more particularly to a particulate shutoff valve, in which the particulates flowing into a valve housing from an inflow opening stay at a repose angle on the shutoff member. The present invention relates to a shut-off type particulate shut-off valve.

[0002]

2. Description of the Related Art In the production of silicon semiconductor wafers, as is well known, polycrystalline silicon is produced, and then the polycrystalline silicon is monocrystallized to produce a monocrystalline silicon ingot. In the production of polycrystalline silicon, silicon is generally precipitated in the form of a rod to produce rod-shaped polycrystalline silicon. In recent years, however, silicon has been precipitated in the form of particles, for example, silicon particles having a diameter of about 1 to 1.5 mm. Producing bodies has been proposed and put into practical use. In the production of such silicon particles, a particle shut-off valve is provided in a flow line for separating and flowing the silicon particles from the atmosphere to prevent contamination, and the flow of the silicon particles is controlled as necessary. It is necessary to shut off appropriately.

When a normal gate valve, ball valve, pinch valve or the like is used as a particle shutoff valve, the particles are caught between the valve seat member and the valve member when the flow of the particles is shut off. Rubbed between the two. Therefore, a considerable amount of the granular material is damaged by crushing or the like, and the valve seat member and the valve member are worn out within a relatively short period of time and cannot function as required.

[0004] US Patent Nos. 5,202,099 and 5,205,998 and drawings show a granule shut-off valve which solves the above-mentioned problem in a normal valve, in which particles are rested on a specific surface. Several forms of particulate shutoff valves using the phenomenon of stagnation are disclosed. In the particulate shutoff valve of the first embodiment, a stationary shutoff surface is provided in the granular fluid passage, and a gas injection mechanism is disposed in relation to the stationary shutoff surface. When the operation of the gas injection mechanism is stopped, the flow of the particles is interrupted by the particles remaining at an angle of repose on the stationary shut-off surface. When the gas injection mechanism is activated, the particles on the stationary shut-off surface are forced to flow downstream by the action of the jet gas flow, and thus the particles are allowed to flow without staying on the stationary shut-off surface. In the granular material shutoff valve according to the second embodiment, a shutoff member selectively disposed between a shutoff position and a non-interrupt position is provided so as to face an inflow opening formed at a lower end of a vertically extending introduction path. doing. When the blocking member is located at the blocking position, the blocking surface extends substantially horizontally below and opposite the inflow opening, and the particles flowing in from the inflow opening form a repose angle on the blocking surface. And the inflow of granules is blocked. When the blocking member is located in the non-blocking position, the blocking surface is tilted, so that the particles introduced from the introduction opening abut on the blocking surface and flow down along the blocking surface.

[0005]

However, the above-described granular shutoff valve disclosed in the above-mentioned U.S. Pat. Nos. 5,202,099 and 5,205,998 and the drawings is still not disclosed. It is not fully satisfactory and has the following problems. That is, in the granular material shutoff valve of the first embodiment, it is necessary to additionally provide the gas injection mechanism and its operation control means, and the production and operation costs are relatively high. In addition, the granules are caused to collide with the inner surfaces of various members due to the forced flow of the granules by the jet gas flow, and the granules are damaged, and the inner surfaces of the members are formed within a relatively short time. They tend to be worn away. On the other hand, in the granular material shutoff valve of the second embodiment, the shutoff member is located at the shutoff position, and even when the particles are staying at the angle of repose on the shutoff surface, When some vibrations are generated, the particles remaining on the blocking surface tend to flow down relatively easily, and the particle blocking characteristics are not always sufficient. Further, in a state where the blocking member is located at the non-blocking position, since the particles once collide with the blocking surface of the blocking member and flow, the particles are damaged and the blocking surface of the blocking member is relatively small. They tend to wear out in a short period of time.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and its main technical problem is that there is no need to provide a gas flow injection mechanism or the like for controlling the flow of particles, and the present invention is not limited to this. SUMMARY OF THE INVENTION It is an object of the present invention to provide a new and improved particulate shut-off valve which can reliably block the flow of particulates and can be used well for a relatively long period of time.

[0007]

SUMMARY OF THE INVENTION In order to solve the above-mentioned main technical problems, according to the present invention, a blocking surface of a blocking member selectively positioned between a blocking position and a non-blocking position is formed into a concave shape. When the member is located at the blocking position, the concave blocking surface is located opposite to and below the inflow opening provided at the lower end of the introduction path, and the entire peripheral edge of the concave blocking surface is above the inflow opening. And when the blocking member is positioned in the non-blocking position, the concave blocking surface retreats laterally with respect to the inflow opening, and fluid flowing from the inflow opening flows into the blocking member. It is designed to be able to flow down without collision.

That is, according to the present invention, as a particulate shutoff valve for achieving the above-mentioned main technical problem, a valve housing having an introduction passage having an inflow opening at a lower end is provided, and a shutoff position and a non-cutoff position are provided. A blocking member selectively positioned, wherein the blocking member has a concave blocking surface, and when the blocking member is positioned in the blocking position, the concave blocking surface faces the inflow opening. All the peripheral edges of the concave blocking surface are located above the inflow opening, and the particles flowing from the inflow opening stay at the angle of repose on the concave blocking surface, so that the When the inflow is blocked and the blocking member is positioned in the non-blocking position, the concave blocking surface retreats laterally with respect to the inflow opening, and the fluid flowing in from the inflow opening collides with the blocking member. It is characterized by being able to flow down without That granules shutoff valve is provided.

In a preferred embodiment, the inlet opening is located substantially horizontally, the concave blocking surface is substantially spherical, and when the blocking member is positioned in the blocking position, the concave blocking surface has The entire periphery also extends substantially horizontally. The introduction path is defined by a cylindrical introduction member mounted on the valve housing, and the cylindrical introduction member is protruded into the valve housing, and a lower end outer peripheral surface of the cylindrical introduction member is conical. It is preferably trapezoidal. Further, the blocking member is preferably pivoted between the blocking position and the non-blocking position about a pivot axis which is laterally displaced from the inlet opening and extends substantially horizontally.

[0010]

In the granular shut-off valve of the present invention, when the shut-off member is located at the shut-off position, the entire periphery of the concave shut-off surface of the shut-off member is located above the inflow opening, and thus on the concave shut-off surface. The particles are located above the particles that are retained at an angle of repose. Therefore, even if the blocking member is slightly vibrated, the particles on the concave blocking surface are practically not flowed beyond the periphery of the concave blocking surface, and the reliable particle blocking characteristics are high. Is achieved. Further, when the blocking member is located at the non-blocking position, the concave blocking surface of the blocking member is retracted laterally with respect to the inflow opening, and the particles flowing in from the inflow opening flow down without colliding with the blocking member. Therefore, the concave blocking surface of the blocking member is not worn in a short time.

[0011]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing a preferred embodiment of a particulate shutoff valve according to the present invention.

FIG. 1 illustrates a preferred embodiment of a particulate shutoff valve constructed in accordance with the present invention. The illustrated granular shut-off valve, which is preferably used as a silicon granular shut-off valve in a polycrystalline silicon granular manufacturing plant, comprises a valve housing indicated by the reference numeral 2 as a whole. And a lower housing member 6. The upper housing 4, which can be formed from a suitable metal material such as carbon steel or stainless steel, has a substantially cylindrical main part 8 whose lower surface is open throughout. An annular connecting flange 10 is formed at a lower end of the main part 8. A shallow annular recess 12 for lining is formed on the outer surface of the connecting flange 10, that is, on the inner peripheral edge of the lower surface. A cylindrical projection 14 extending upward is formed at an upper end of the main portion 8, and an annular connecting flange 16 is formed at an upper end of the cylindrical projection 14. Cylindrical protrusion 1
The inner peripheral surface of 4 is defined by an upper portion 18 having a relatively large diameter and a lower portion 20 having a relatively small diameter, and an annular shoulder surface 22 facing upward is formed on the inner peripheral surface of the cylindrical projection 14. I have.
A shallow concave portion 24 for lining is formed on the outer surface of the connecting flange 16, that is, on the inner peripheral edge of the upper surface. An annular recess 25 for accommodating a sealing O-ring (not shown) is also formed on the upper surface of the connection flange 16. On the left side of the main part 8 of the upper housing member 4 in FIG. 1, a relatively small-diameter purge gas introduction cylindrical protrusion 26 extending to the left is formed. A connecting flange 28 is formed. As can be clearly seen from FIG. 1, the inner surface of the upper housing 2 as described above (including the recesses 12 and 24 in the connecting flanges 10 and 16 and the outer or left inner peripheral edge of the connecting flange 28) is A lining 32, preferably made of a fluororesin such as fluoroethylene, is provided.

Referring to FIG. 1 and FIG. 2, a cylindrical introduction member 34 is mounted on the cylindrical protrusion 14 formed at the upper end of the main portion 8 of the upper housing member 4. As will be further described below, the polycrystalline silicon particles are caused to flow through the cylindrical introduction member 34, and the silicon particles are extremely high in purity and are prevented from being contaminated by contacting substances other than silicon. Is desired.
Therefore, the tubular introduction member 34 is advantageously formed from annealed polycrystalline silicon. The cylindrical introduction member 34 has a cylindrical upper part 3 having a relatively large outer diameter.
6, a cylindrical intermediate portion 38 having a relatively small outer diameter, and a truncated conical cylindrical lower portion 40 whose outer diameter is gradually reduced downward; Is formed. The outer diameter of the upper part 36 of the cylindrical introduction member 34 is made to correspond to the inner diameter of the upper part 18 of the cylindrical projection part 14, and the outer diameter of the intermediate part 38 of the cylindrical introduction member 34 is lower than the lower part 20 of the cylindrical projection part 14. It corresponds to the inside diameter of. Such a tubular introduction member 34
The upper housing member 4 is clearly shown in FIG.
By inserting the shoulder surface 42 formed on the outer peripheral surface thereof into the shoulder surface 22 formed on the inner peripheral surface of the cylindrical protrusion portion 14 by inserting the upper surface into the cylindrical projection portion 14 from above.
It is supported at the required mounting position. The frustoconical cylindrical lower part 40 of the cylindrical introduction member 34 is projected downward into the upper housing 4 beyond the lower end of the cylindrical projection 14. The tapered inclination angle α on the outer peripheral surface of the truncated conical cylindrical lower portion 40 may be about 10 to 30 degrees. The tubular introduction member 34 is formed with an introduction passage 44 extending therethrough, and an inflow opening 46 is defined at a lower end thereof. The cross-sectional shape of the introduction path 44 and the shape of the inflow opening 46 may be circular. The lower end of the introduction path 44 is formed in a truncated cone shape whose inner diameter gradually increases downward. As shown in FIG.
Advantageously extends substantially vertically and the inlet opening 46 is positioned substantially horizontally.

Continuing with FIG. 1, the lower housing member 6 of the valve housing 2 is also connected to the upper housing member 4.
Similarly, it can be formed from an appropriate metal material such as carbon steel or stainless steel. The lower housing member 6 has a truncated-cone-shaped main portion 48 whose outer diameter and inner diameter are gradually reduced downward, and the upper surface thereof is entirely open. An annular connecting flange 50 is formed at the upper end of the lower housing member 6. On the outer surface of the connecting flange 50, that is, on the inner peripheral edge of the upper surface, a shallow concave portion 52 for lining is formed. Further, an annular concave portion 56 for accommodating the sealing O-ring 54 is formed on the upper surface of the connecting flange 50. At the lower end of the lower housing member 6, a cylindrical projection 58 extending downward is formed,
An annular connecting flange 60 is provided at the lower end of the cylindrical projection 58.
Are formed. The inner peripheral surface of the cylindrical protrusion 58 is defined by an upper portion 62 having a relatively large diameter and a lower portion 64 having a relatively small diameter, and the inner peripheral surface of the cylindrical protrusion 58 has an annular shoulder surface 66 facing downward. Are formed. The inner surface of the lower housing member 6 (including the concave portion 52 of the connecting flange 50 and the outer surface of the connecting flange 60, that is, the inner peripheral edge of the lower surface) is also made of a fluororesin similarly to the inner surface of the upper housing member 4. A lining 68 is provided which is convenient.

A cylindrical lead-out member 70 is mounted on the cylindrical protrusion 58 of the lower housing member 6. This tubular lead-out member 70 is, similarly to the tubular lead-in member 34 in the upper housing member 4, advantageously formed of polycrystalline silicon that has been annealed to avoid contamination of silicon particles. . The tubular lead-out member 70 has an upper portion 72 having a relatively large outer diameter and a lower portion 74 having a relatively small outer diameter, and an annular shoulder surface 76 facing downward is formed on the outer peripheral surface of the tubular lead-out member 70. ing. Cylindrical lead-out member 7
An annular ridge 78 protruding upward is formed on the inner peripheral edge of the upper end surface of the ridge.
Are formed. The outer diameter of the upper portion 72 of the cylindrical protruding member 70 is made to correspond to the inner diameter of the upper portion 62 of the cylindrical protruding portion 58, and the outer diameter of the lower portion 74 of the cylindrical protruding member 70 is smaller than that of the lower portion 64 of the cylindrical protruding portion 58. Corresponds to the inner diameter.
The cylindrical lead-out member 70 is inserted into the cylindrical protrusion 58 of the lower housing member 6 from above, and a shoulder surface 78 formed on the outer peripheral surface is formed on the inner peripheral surface of the cylindrical protrusion 58. By being brought into contact with the shoulder surface 66 which is provided, it is supported at a required mounting position. A lead-out passage 80 extending substantially vertically is formed in the tubular lead-out member 70. Outgoing path 80
Has a circular cross-section, the inner diameter of which is gradually reduced downward in the upper half, and the inner diameter is maintained unchanged in the lower half. As will be described in more detail later, the silicon particles flowing into the valve housing 2 from the introduction passage 44 provided in the upper housing member 4 are formed on the inner surface of the lower housing member 6 before reaching the outlet passage 80. There is a possibility of collision or contact. In view of this fact, the lower housing member 6
In addition to the lining 68, a plurality of protective members 82, which are conveniently formed from annealed polycrystalline silicon, are disposed on the inner surface of the substrate. The protection members 82 arranged circumferentially along the inner surface of the main portion 48 of the lower housing member 6 have a truncated cone shape corresponding to the inner surface of the main portion 48 of the lower housing member 6 as a whole. A ridge 84 is formed on the outer edge of the lower end surface of the cover. Each of the protection members 82 is inserted into the lower housing member 6 from above, and the lower end surface thereof is brought into contact with the upper end surface of the tubular lead-out member 70. More specifically, the protrusions 84 formed on the lower end surface are provided. The above-mentioned cylindrical lead-out member 70
It is supported at the required mounting position by being opposed to an annular ridge 78 formed on the upper end surface of the cylindrical lead-out member 70 and positioned radially outside thereof and having its lower end surface abutting on the upper end surface of the cylindrical lead-out member 70. You. As clearly shown in FIG.
The inner peripheral surfaces of the plurality of protective members 82 cooperate to define a truncated conical shape whose inner diameter is gradually reduced downward,
The truncated cone shape smoothly follows the truncated cone shape in the upper half of the lead-out passage 80 formed in the tubular lead-out member 70.

The upper housing member 4 and the lower housing member 6 are provided at a connecting flange 10 provided at the lower end of the upper housing member 4 and at the upper end of the lower housing member 6, as clearly shown in FIG. The connecting flanges 50 are aligned and connected to each other. In this connection, the shaft of the bolt 86 is inserted into holes formed in the connection flanges 10 and 50 at a plurality of positions spaced apart in the circumferential direction, and a nut 88 is screwed onto the protruding end of the shaft of the bolt 86. This is accomplished by dressing up.

Referring to FIGS. 1 and 2, the inside of the valve housing 2 formed by the above-described upper housing member 4 and lower housing member 6 is shown by a two-dot chain line in FIG. 1 and a solid line in FIG. And a non-blocking position shown by a solid line in FIG.
It is important that they are provided. More specifically, referring to FIG. 3 together with FIGS. 1 and 2, the upper housing member 4 has a bulging portion 91 extending in the vertical direction in FIG.
Are formed, and a support shaft 92 extending through the bulging portion 91 is rotatably mounted. The support shaft 92 is rotatably mounted via a pair of bearing members 94 and 96 mounted on the upper housing member 4, and is formed at the lower end of the tubular introduction member 34 as clearly understood from FIG. It is displaced in the lateral direction (right direction in FIG. 1) from the inflow opening 46, and extends substantially horizontally in the direction perpendicular to the paper surface in FIG. 1 and in the vertical direction in FIG. As clearly shown in FIG. 3, a pair of sealing means 93 and 95 are provided between the inner peripheral surface of the bulging portion 91 and the outer peripheral surface of the support shaft 92. Each of the sealing means 93 and 95 includes inner O-rings 97 and 99 and outer O-rings 101 and 103, and between the inner O-rings 97 and 99 and the outer O-rings 101 and 103, Discharge paths 105 and 107 are formed. If a gas such as monosilane leaks through the inner O-rings 97 and 99, the leaked gas will
It is sent to an abatement apparatus (not shown) via 5 and 107. A cover 98 is fixed to an outer end (lower end in FIG. 3) of the bulging portion 91 of the upper housing member 4 by an appropriate fixing means (not shown) such as a fastening screw. One end of the support shaft 92 extends downwardly in FIG. 3 through the cover 98, and the extension end of the support shaft 92 is connected to an electric motor or an air motor via a speed reducing means 100 which may be a reduction gear train. And the like. Bulge 9
1, the inner surface exposed in the valve housing 2 is also provided with a lining made of fluororesin,
2, the surface exposed in the valve housing 2 is advantageously provided with a coating which may be made of a fluororesin.

One end of a substantially L-shaped support arm 104 is fixed to the support shaft 92 by an appropriate fixing means (not shown) such as screwing or bonding. A substantially disk-shaped support member 106 is attached to the other end of the support arm 104. More specifically, a recess 108 is formed on the lower surface of the other end of the support arm 104 in the state shown in FIG. 2, and a through hole extending from the recess 108 to the upper surface is formed.
Then, the shaft of the fastening bolt 110 is extended through the through hole, and the shaft of the fastening bolt 110 is
The support member 106 is attached to the other end of the support arm 104 by being screwed to the center of the lower surface of the support arm 106. The recess 108 formed in the support arm 104
The cover member 112 is press-fitted into the cover 110, and the head of the fastening bolt 110 located in the recess 110 is covered by the cover member 112. Conveniently, the support arm 104, support member 106, and cover member 112 are formed from a fluorinated resin such as polytetrafluoroethylene. If desired, the support arm 104, support member 106, and cover member 112 can be formed from other suitable members, such as steel, and can be coated with a fluorocarbon resin. The blocking member 90 is mounted on the surface of the support member 106. Conveniently, blocking member 90 is formed from polycrystalline silicon that has been annealed to avoid contamination of silicon particles contacted therewith.
A cylindrical projection 114 is formed on the back surface of the blocking member 90 having a disk shape as a whole. On the other hand, the support member 106
Is formed with a circular recess 116. A ring 118, which is conveniently formed of a fluororesin such as polytetrafluoroethylene, is screwed into the recess 116 of the support member 106, ie, a female thread formed on the inner peripheral surface of the circular recess 116. The external thread formed on the outer peripheral surface of the ring 118 is attached by screwing, and the protrusion 114 of the blocking member 90 is pressed into the ring 118, and thus the blocking member 90 is placed on the surface of the support member 106. It is installed. On the surface of the blocking member 90, a concave blocking surface 120 is formed. Such a concave blocking surface 120
Is preferably substantially spherical. Concave blocking surface 120
The diameter D1 of the circle defined by the peripheral edge 122 of the inflow opening 46 at the lower end of the cylindrical introduction member 34 is the diameter D1.
2, and 3 to 5 times (3 × D2 ≦ D
It is preferable that about 1 ≦ 5 × D2). Further, it is preferable that the depth L1 of the concave blocking surface 118 is equal to or about twice (D2 ≦ L1 ≦ 2 × D1) the diameter D2 of the inflow opening.

By appropriately rotating the support shaft 92 by the driving source 102, the blocking member 90 is
2 is selectively positioned between a blocking position shown by a two-dot chain line in FIG. 2 and a non-blocking position shown by a solid line in FIG. If desired, a blocking position restricting piece and a non-blocking position restricting piece (not shown) acting on the support shaft 92 or the support arm 104 are provided, and the blocking member 90 is sufficiently precisely positioned in the above-mentioned blocking position and non-blocking position. It can be made to be positioned. As can be clearly understood by referring to FIGS. 1 and 2, when the blocking member 90 is located at the blocking position, the central portion of the concave blocking surface 120 of the blocking member 90 is
Inflow opening 46 defined at the lower end of tubular introduction member 34
, Below and preferably substantially concentrically. The concave blocking surface 120 preferably extends substantially horizontally, and its entire periphery 122 is located above the inlet opening 46. The vertical distance L2 between the peripheral edge 122 of the concave blocking surface 120 and the inflow opening 46 is 0.5 to 1 times the diameter D2 of the inflow opening 46 (0.5 × D2 ≦ L2 ≦ D2).
Preferably it is on the order of magnitude. On the other hand, as can be clearly understood from FIG. 1, when the blocking member 90 is located at the non-blocking position, the concave blocking surface 118 is retracted in the lateral direction with respect to the inflow opening 46.

The particulate shutoff valve as described above is preferably used as a silicon particulate shutoff valve in a polycrystalline silicon particulate manufacturing plant. In this case, as shown by a two-dot chain line in FIG. 1, a pipe member 124 (a lining made of a fluorine-based resin and a protection member made of polycrystalline silicon are provided on the inner surface of the pipe member) at the upper end of the valve housing 2. The polycrystalline silicon particles are supplied to the introduction path 44 through the connected pipe member 124. When the blocking member 90 is located at the non-blocking position shown by the solid line in FIG. 1, the silicon particles supplied to the introduction passage 44 flow into the valve housing 2 from the inflow opening 46 and pass through the valve housing 2. It flows down substantially vertically and flows out of the valve housing 2 through the outlet channel 80. As is well known, a monosilane gas is used to deposit polycrystalline silicon particles, and a gas such as a monosilane gas flows into the valve housing 2 together with the silicon particles. As shown by a two-dot chain line in FIG. 1, a tube member 126 (a lining made of a fluororesin and a protection member made of polycrystalline silicon are also provided on the inner surface of the tube member) is connected to the lower end of the valve housing 2. The silicon particles that have flowed out of the valve housing 2 are conveyed through the pipe member 126 to, for example, a collection container (not shown). As can be clearly understood with reference to FIG. 1, when the blocking member 90 is in the non-blocking position, the blocking member 90 is retracted laterally with respect to the inlet opening 46, so that the inlet Silicon particles flowing into the valve housing 2 from the opening 46 and flowing down the valve housing 2 do not substantially collide with the blocking member 90.

On the other hand, when the blocking member 90 is moved to the blocking position shown by the two-dot chain line in FIG. 1 and shown by the solid line in FIG. 2, the central portion of the concave blocking surface 120 of the blocking member 90 faces the inflow opening 46. And located below it. Therefore, the flow of the silicon particles S flowing into the valve housing 2 from the inflow opening 46 is blocked by the concave blocking surface 120 of the blocking member 90, and the silicon particles S start to be deposited on the concave blocking surface 120. Then, as the deposition of the silicon particles S on the concave blocking surface 120 progresses, as shown in FIG.
The silicon particles S stay at an angle of repose on the concave blocking surface 120, thereby preventing the flow of the silicon particles S. The concave blocking surface 120 of the blocking member 90 is spherical,
Since the silicon particles S extend substantially horizontally, the silicon particles S are successively well deposited on the concave blocking surface 120 and are retained at an angle of repose. In addition, the concave blocking surface 120
Is located above the inflow opening 34, so that even if some vibration is generated in the blocking member 90, the silicon particles S are substantially not dropped from the concave blocking surface 120. . Thus, the flow of the silicon particles S can be sufficiently and stably blocked.

Normally, a gas shut-off valve (not shown) is provided downstream of the granular shut-off valve. In the granular shut-off valve, the shut-off member 90 is moved to the shut-off position, and the silicon granules S are removed. When the flow is interrupted, the gas shut-off valve is also brought into a gas shut-off state at the same time as, or some time after, the shut-off of the silicon particles by the particle shut-off valve. When the gas shut-off valve is brought into the gas shut-off state, the valve housing 2 is closed.
A purge gas, which may be a nitrogen gas, is introduced through an introduction passage defined in a protrusion 26 formed in the upper housing member 4. The purge gas is supplied to the shut-off member 90 together with the monosilane gas and the like existing in the valve housing 2.
Through the silicon particles S deposited on the upper surface,
Through the air and guided to an abatement device (not shown). When the silicon particles S are caused to flow through the valve housing 2 again, the shut-off member 90 is moved from the shut-off position indicated by the solid line in FIG. 2 to the non-cut-off position indicated by the solid line in FIG. . So,
The silicon particles S remaining on the concave blocking surface 120 of the blocking member 90 are caused to flow sufficiently smoothly downward, and further flow downstream from the valve housing 2 through the outlet passage 80. Since the concave blocking surface 120 of the blocking member 90 is retracted with respect to the inflow opening 46, the silicon particles S flowing into the valve housing 2 again through the inflow opening 46.
Is made to flow down in the valve housing 2 without colliding with the shutoff member 90 and flow to the outlet passage 80.

[0023]

According to the present invention, it is not necessary to provide a gas flow injection mechanism for controlling the flow of the granular material.
Therefore, the production and operation costs can be made relatively inexpensive. Further, even in an environment in which some vibration is generated, the flow of the granules can be sufficiently stably blocked, and the particles can be favorably used for a relatively long period of time.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a preferred embodiment of a granular shutoff valve configured according to the present invention.

FIG. 2 is an enlarged longitudinal sectional view showing a part of the granular material shutoff valve of FIG. 1;

FIG. 3 is a cross-sectional view showing the granular material cutoff valve of FIG. 1;

[Explanation of symbols]

 2: valve housing 4: upper housing member 6: lower housing member 34: tubular introduction member 44: introduction passage 46: inflow opening 70: tubular derived member 80: derived passage 90: blocking member 120: concave blocking surface 122: concave Peripheral edge of blocking surface S: Silicon particles

Claims (4)

(57) [Claims] 1. A valve housing having an introduction passage having an inflow opening at a lower end, and a blocking member selectively positioned between a blocking position and a non-blocking position, wherein the blocking member has a concave blocking surface. When the blocking member is positioned at the blocking position, the concave blocking surface is located below and opposite the inflow opening, and the entire peripheral edge of the concave blocking surface is above the inflow opening. When the particles flowing from the inflow opening stay at the angle of repose on the concave blocking surface and stay at an angle of repose, the inflow of the particles is blocked. The granular shutoff valve, wherein the shutoff surface retreats laterally with respect to the inflow opening, and the fluid flowing in from the inflow opening is allowed to flow down without colliding with the shutoff member. 2. The inflow opening is positioned substantially horizontally, the concave blocking surface is substantially spherical, and when the blocking member is positioned in the blocking position, the entire periphery of the concave blocking surface is also reduced. The granular shutoff valve of claim 1, wherein the valve extends substantially horizontally. 3. The introduction path is defined by a tubular introduction member mounted on the valve housing, the tubular introduction member protruding into the valve housing, and a lower end of the tubular introduction member. 3. The granular material shutoff valve according to claim 1, wherein the outer peripheral surface has a truncated cone shape. 4. The blocking member according to claim 1, wherein said blocking member is pivoted between said blocking position and said non-blocking position about a pivot axis extending laterally displaced laterally from said inlet opening. A particulate shutoff valve according to any one of the above.