JP3164875B2 - Cleaning method - Google Patents
Cleaning methodInfo
- Publication number
- JP3164875B2 JP3164875B2 JP07690492A JP7690492A JP3164875B2 JP 3164875 B2 JP3164875 B2 JP 3164875B2 JP 07690492 A JP07690492 A JP 07690492A JP 7690492 A JP7690492 A JP 7690492A JP 3164875 B2 JP3164875 B2 JP 3164875B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning agent
- steam
- cleaning
- tank
- detergent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title claims description 63
- 238000000034 method Methods 0.000 title claims description 22
- 239000012459 cleaning agent Substances 0.000 claims description 127
- 238000013020 steam cleaning Methods 0.000 claims description 93
- 239000003599 detergent Substances 0.000 claims description 47
- 239000007788 liquid Substances 0.000 claims description 39
- 238000001816 cooling Methods 0.000 claims description 29
- 238000001035 drying Methods 0.000 claims description 29
- -1 perfluoro compound Chemical class 0.000 claims description 19
- 230000005484 gravity Effects 0.000 claims description 16
- 229920001296 polysiloxane Polymers 0.000 claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 9
- 238000009835 boiling Methods 0.000 claims description 8
- 238000000926 separation method Methods 0.000 description 30
- 230000000694 effects Effects 0.000 description 13
- 239000002904 solvent Substances 0.000 description 13
- 238000005406 washing Methods 0.000 description 10
- 239000000460 chlorine Substances 0.000 description 9
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 8
- 229910052801 chlorine Inorganic materials 0.000 description 8
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 230000002411 adverse Effects 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 6
- 230000006378 damage Effects 0.000 description 6
- 230000007613 environmental effect Effects 0.000 description 6
- 125000001183 hydrocarbyl group Chemical group 0.000 description 5
- 238000007654 immersion Methods 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 206010067482 No adverse event Diseases 0.000 description 2
- 239000003623 enhancer Substances 0.000 description 2
- 125000001153 fluoro group Chemical group F* 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- WWTBZEKOSBFBEM-SPWPXUSOSA-N (2s)-2-[[2-benzyl-3-[hydroxy-[(1r)-2-phenyl-1-(phenylmethoxycarbonylamino)ethyl]phosphoryl]propanoyl]amino]-3-(1h-indol-3-yl)propanoic acid Chemical compound N([C@@H](CC=1C2=CC=CC=C2NC=1)C(=O)O)C(=O)C(CP(O)(=O)[C@H](CC=1C=CC=CC=1)NC(=O)OCC=1C=CC=CC=1)CC1=CC=CC=C1 WWTBZEKOSBFBEM-SPWPXUSOSA-N 0.000 description 1
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 208000000453 Skin Neoplasms Diseases 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 239000003125 aqueous solvent Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229940126208 compound 22 Drugs 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 206010016256 fatigue Diseases 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007602 hot air drying Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000010721 machine oil Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000010907 mechanical stirring Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 231100000956 nontoxicity Toxicity 0.000 description 1
- 230000009965 odorless effect Effects 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 102200110702 rs60261494 Human genes 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 201000000849 skin cancer Diseases 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000005437 stratosphere Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】本発明は、環境破壊が少ないと共
に安全性に優れ、かつ洗浄・乾燥品質の安定性を高めた
洗浄方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning method which has low environmental destruction, is excellent in safety, and has high stability in cleaning and drying quality.
【０００２】[0002]
【従来の技術】金属部品、メッキ部品、塗装部品、電子
部品、半導体部品等の各種の部品には、その製造工程や
組立て工程等において、機械油をはじめとして様々な汚
れが付着する。このような汚れを有する各種部品は、フ
ロン系溶剤や塩素系溶剤等によって洗浄することが一般
的に行われてきた。2. Description of the Related Art Various contaminants such as machine oil adhere to various parts such as metal parts, plated parts, painted parts, electronic parts, and semiconductor parts in the manufacturing process and the assembling process. Various components having such stains have been generally cleaned with a chlorofluorocarbon-based solvent, a chlorine-based solvent, or the like.
【０００３】ところで、最近、地球的規模で環境問題が
取り上げられている。その中の一つとしてオゾン層破壊
の問題がある。すなわち、上述したようなフロン系溶剤
や塩素系溶剤を用いた洗浄剤は塩素を含んであり、この
洗浄剤に含まれる塩素が分解されないままに成層圏に達
し、オゾン層を破壊するといわれている。その結果、皮
膚ガンの増加や生体系への悪影響が懸念されている。そ
こで、先進国を中心にしてオゾン層を破壊する物質の使
用削除計画が進められており、洗浄剤として用いられる
フロン113 のほか十数種のフロンを西暦2000年までに、
また塩素系溶剤である1,1,1-トリクロロエタンを2005年
までに全廃することが決定されている。そこで、フロン
系溶剤や塩素系溶剤に代わる新しい洗浄剤の開発が各所
で進められている。Recently, environmental issues have been taken up on a global scale. One of them is the problem of depletion of the ozone layer. That is, it is said that the above-mentioned detergent using a chlorofluorocarbon-based solvent or a chlorine-based solvent contains chlorine, and chlorine contained in the detergent reaches the stratosphere without being decomposed, and destroys the ozone layer. As a result, an increase in skin cancer and adverse effects on living systems are concerned. Therefore, a plan to eliminate the use of substances that deplete the ozone layer is being promoted, mainly in developed countries, and by the year 2000, dozens of fluorocarbons in addition to fluorocarbon 113 used as a cleaning agent had been
It has been decided that 1,1,1-trichloroethane, a chlorinated solvent, will be completely eliminated by 2005. Therefore, development of new cleaning agents in place of CFC-based solvents and chlorine-based solvents is being promoted in various places.
【０００４】ここで、一般的な洗浄工程を大別すると、
被洗浄物の汚れを洗い落とす工程（洗浄工程）と、この
洗浄後の被洗浄物をすすぐ工程と、すすいだ後の被洗浄
物を乾燥させる工程の 3つの工程に分けられる。フロン
系溶剤や塩素系溶剤の場合、単独で全ての機能を有して
いたが、代替洗浄剤の場合には、全ての機能を発揮させ
ることはほぼ不可能と考えられている。そこで、一般的
には洗浄工程およびすすぎ洗浄工程は、水系洗浄剤ある
いは非水系溶剤を用いた洗浄剤で行い、乾燥は熱風を利
用したり、また有機溶剤の即乾性を利用することで対応
せざるを得ない状況にある。[0004] Here, the general cleaning process can be roughly classified as follows.
The process can be divided into three steps: a step of washing off dirt on the object to be cleaned (cleaning step), a step of rinsing the object to be cleaned after the cleaning, and a step of drying the object to be cleaned after rinsing. In the case of a chlorofluorocarbon-based solvent or a chlorine-based solvent, all the functions were independently performed, but in the case of an alternative cleaning agent, it is considered that it is almost impossible to exhibit all the functions. Therefore, in general, the washing step and the rinsing step are performed with an aqueous cleaning agent or a cleaning agent using a non-aqueous solvent, and drying is performed by using hot air or by using the quick drying property of an organic solvent. It is inevitable.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、現状の
代替洗浄剤の多くは、洗浄それ自体は可能であっても、
洗浄後に水によるすすぎ洗浄が必要であるという難点を
有している。すなわち、水によるすすぎ洗浄や、水系洗
浄剤による洗浄を実施した後には、被洗浄物の表面に付
着する水分を均一かつ迅速に乾燥させることが洗浄品質
の点から必要である。しかし、現状の温風乾燥のよう
に、強制的に水分を蒸発させる方法では、ウォーターマ
ーク等を防止することは非常に困難とされている。However, many of the current alternative cleaning agents, although cleaning itself is possible,
It has the drawback that rinsing with water is required after cleaning. That is, after rinsing with water or washing with a water-based cleaning agent, it is necessary from the viewpoint of cleaning quality to uniformly and quickly dry moisture adhering to the surface of the object to be cleaned. However, it is very difficult to prevent a watermark or the like by a method of forcibly evaporating moisture as in the current hot air drying.
【０００６】また、有機溶剤等を蒸気洗浄剤として用い
て乾燥を実施する場合、洗い落とした水系あるいは非水
系の洗浄剤、油、フラックス等の成分は、当然ながら蒸
気洗浄剤中に蓄積され、次第に濃度を高めることで乾燥
性を悪化させることになり、ついには洗浄、乾燥効果が
得られなくなる。これを解決するためには、蒸気洗浄剤
から洗浄剤成分や汚れ成分を分離し、浄化した後に再利
用する必要がある。ここで、蒸気洗浄剤から洗浄剤成分
や汚れ成分を分離する際に、一般的な蒸留法を適用した
場合、多くの有機溶剤では洗浄剤成分や汚れ成分を充分
に分離することが困難であったり、また分離自体は可能
であっても、多大な時間やコストを要する等といった問
題がある。さらに、有機溶剤等の蒸気洗浄剤で細部にわ
たって、十分な乾燥効果を得るためには、蒸気化した蒸
気洗浄剤中に洗浄剤成分が溶け込むような組み合せとす
ることが望ましいが、このことは上記した分離能に反す
ることとなる。When drying is carried out using an organic solvent or the like as a steam cleaner, the washed-out water-based or non-aqueous cleaner, oil, flux and other components are naturally accumulated in the steam cleaner, and are gradually accumulated. By increasing the concentration, the drying property is deteriorated, and eventually the cleaning and drying effects cannot be obtained. In order to solve this, it is necessary to separate the cleaning component and the dirt component from the steam cleaning agent, to purify them, and to reuse them. Here, when a general distillation method is applied to separate the detergent component and the dirt component from the steam detergent, it is difficult to sufficiently separate the detergent component and the dirt component with many organic solvents. However, even though separation itself is possible, there is a problem that a great deal of time and cost are required. Further, in order to obtain a sufficient drying effect over the details with a vapor cleaning agent such as an organic solvent, it is desirable to use a combination in which the cleaning agent component is dissolved in the vaporized vapor cleaning agent. Would be contrary to the resolving power.
【０００７】このようなことから、環境破壊や人体に対
して悪影響を及ぼすことがなく、かつ通常状態において
十分な蒸気洗浄効果を確保した上で、洗浄剤と蒸気洗浄
剤とを有効に分離することを可能にし、洗浄剤等の混入
による洗浄・乾燥効果の低下を防止した洗浄方法の開発
が強く望まれている。[0007] For this reason, the cleaning agent and the steam cleaning agent are effectively separated from each other while ensuring sufficient steam cleaning effect under normal conditions without causing environmental destruction or adverse effects on the human body. There is a strong demand for the development of a cleaning method which makes it possible to prevent the deterioration of the cleaning / drying effect due to mixing of a cleaning agent or the like.
【０００８】本発明は、上述したような課題に対処する
ためになされたもので、環境破壊や人体に対する悪影響
がなく、かつ洗浄剤と蒸気洗浄剤とを有効に分離するこ
とを可能にすると共に、十分な洗浄・乾燥効果が得られ
る洗浄方法を提供することを目的としている。SUMMARY OF THE INVENTION The present invention has been made to address the above-described problems, and has no adverse effects on the environment and no adverse effects on the human body, and can effectively separate a cleaning agent and a steam cleaning agent. It is an object of the present invention to provide a cleaning method capable of obtaining a sufficient cleaning / drying effect.
【０００９】[0009]
【課題を解決するための手段】本発明の洗浄方法は、被
洗浄物を洗浄剤が収容された洗浄槽により洗浄する工程
と、蒸気発生槽によって蒸気化した蒸気洗浄剤を蒸気洗
浄槽に供給し、この蒸気洗浄槽内で前記洗浄後の被洗浄
物を乾燥させる工程とを有する洗浄方法において、前記
洗浄剤として、前記蒸気洗浄剤の沸点温度近傍にて該蒸
気洗浄剤に対して相溶性を示すと共に冷却に伴って分離
し、かつそれらの比重差が0.05g/cm3 以上の液状洗浄剤
を用い、かつ、前記液状洗浄剤を含む前記蒸気洗浄剤の
凝縮液を回収し、該凝縮液を強制的に冷却した後、該液
状洗浄剤と蒸気洗浄剤との比重差により分離した蒸気洗
浄剤を蒸気発生槽に再供給しつつ、前記乾燥を行うこと
を特徴としている。A cleaning method according to the present invention comprises a step of cleaning an object to be cleaned by a cleaning tank containing a cleaning agent, and a step of supplying the vapor cleaning agent vaporized by the steam generation tank to the steam cleaning tank. Drying the cleaned object in the steam cleaning tank, wherein the cleaning agent is compatible with the steam cleaning agent near the boiling point of the steam cleaning agent. And a liquid detergent having a specific gravity difference of 0.05 g / cm 3 or more, and a condensate of the vapor detergent containing the liquid detergent is recovered, and the condensation is performed. The method is characterized in that after the liquid is forcibly cooled, the drying is performed while re-supplying the steam cleaning agent separated by the specific gravity difference between the liquid cleaning agent and the steam cleaning agent to the steam generation tank.
【００１０】また、上記洗浄方法において、前記冷却を
前記蒸気洗浄剤に対する前記液状洗浄剤の溶解量が30重
量％以下となるような温度で行うこと特徴としている。In the above-mentioned cleaning method, the cooling is performed at a temperature at which the amount of the liquid cleaning agent dissolved in the steam cleaning agent is 30% by weight or less.
【００１１】[0011]
【作用】本発明の洗浄方法において、乾燥工程の前工程
となる洗浄工程で使用する洗浄剤として、蒸気洗浄剤の
沸点温度近傍では該蒸気洗浄剤に対して相溶性を示すと
共に、そのような温度から強制的に冷却すると分離し、
かつそれらの比重差が0.05g/cm3 以上の液状洗浄剤を用
いている。このような液状洗浄剤で洗浄した被洗浄物の
表面には、洗浄剤成分等が付着している。これを蒸気洗
浄工程に持ち込み、蒸気洗浄剤の蒸気を被洗浄物の表面
で凝縮、液化させると、被洗浄物の表面に付着している
洗浄剤成分等は蒸気洗浄剤中に溶け込むため、細部にわ
たって十分に洗浄・乾燥することができる。ここで、洗
浄剤成分は蒸気洗浄剤中に混入することになるが、洗浄
剤と蒸気洗浄剤とは冷却により溶解度が低下し、かつ適
度の比重差を有するのため、強制的に冷却した後に静置
状態を確保することで、これらは分離する。これによっ
て、蒸気洗浄剤を有効に回収、再利用することができる
と共に、蒸気洗浄剤中への洗浄剤成分の混入による洗浄
・乾燥効果の低下を防止することができる。In the cleaning method of the present invention, as a cleaning agent used in the cleaning step preceding the drying step, it is compatible with the steam cleaning agent near the boiling point of the steam cleaning agent. Separated when forced to cool from temperature,
Liquid detergents having a specific gravity difference of 0.05 g / cm 3 or more are used. Detergent components and the like adhere to the surface of the object to be cleaned which has been cleaned with such a liquid detergent. When this is brought into the steam cleaning process and the vapor of the steam cleaning agent is condensed and liquefied on the surface of the object to be cleaned, the detergent components and the like adhering to the surface of the object to be cleaned dissolve into the steam cleaning agent. Can be sufficiently washed and dried. Here, the detergent component will be mixed into the steam detergent, but the solubility of the detergent and the steam detergent is reduced by cooling, and since the detergent has an appropriate specific gravity difference, after forcibly cooling, These are separated by securing the stationary state. This makes it possible to effectively collect and reuse the steam cleaning agent, and to prevent a reduction in the cleaning / drying effect due to mixing of the cleaning agent component into the steam cleaning agent.
【００１２】[0012]
【実施例】以下、本発明を実施例によって詳細に説明す
る。The present invention will be described below in detail with reference to examples.
【００１３】図１は、本発明の洗浄方法を適用した一実
施例の洗浄装置の構成を示す図である。同図に示す洗浄
装置は、被洗浄物１の搬送手段として、例えばバスケッ
ト搬送機構１０を有し、このバスケット搬送機構１０の
搬送順路に従って、洗浄工程２０、すすぎ洗浄工程３０
および蒸気乾燥工程４０の各洗浄工程が順に配設されて
構成されている。FIG. 1 is a diagram showing the configuration of a cleaning apparatus according to an embodiment to which the cleaning method of the present invention is applied. The cleaning device shown in FIG. 1 has, for example, a basket transport mechanism 10 as a transport means of the article 1 to be cleaned.
Each cleaning step of the steam drying step 40 is arranged in order.
【００１４】上記洗浄工程２０は、洗浄剤２１が収容さ
れた浸漬洗浄槽２２と液切り槽２３とを有しており、上
記浸漬洗浄槽２２によって被洗浄物１に付着している油
系や水系等の汚れが除去される。この浸漬洗浄槽２２で
は、必要に応じて、超音波、揺動、機械的撹拌等を併用
することが可能である。なお、この洗浄手段２０はシャ
ワー洗浄との併用、あるいはシャワー洗浄単独とするこ
とも可能である。The cleaning step 20 includes a immersion cleaning tank 22 containing a cleaning agent 21 and a liquid draining tank 23. Dirt such as water is removed. In the immersion cleaning tank 22, it is possible to use ultrasonic waves, rocking, mechanical stirring, and the like as needed. The cleaning means 20 can be used in combination with shower cleaning or solely for shower cleaning.
【００１５】また、すすぎ洗浄工程３０は、すすぎ洗浄
剤３１が収容された浸漬すすぎ槽３２と、被洗浄物１に
対してすすぎ洗浄剤３１を吹き付けるシャワーすすぎ槽
３３とを有している。洗浄工程２０を経た被洗浄物１に
付着している洗浄剤成分やイオン性の汚れは、このすす
ぎ洗浄工程３０によってすすぎ落とされる。The rinsing step 30 includes a immersion rinsing tank 32 containing a rinsing agent 31, and a shower rinsing tank 33 for spraying the rinsing agent 31 onto the object 1 to be cleaned. Detergent components and ionic dirt adhering to the article to be cleaned 1 after the cleaning step 20 are rinsed off in the rinse step 30.
【００１６】蒸気乾燥工程４０は、蒸気洗浄剤４１を蒸
気化する蒸気発生槽４２と、この蒸気発生槽４２から蒸
気化された蒸気洗浄剤４１が供給され、すすぎ洗浄後の
被洗浄物１の蒸気洗浄を行う蒸気洗浄槽４３とを有して
いる。蒸気発生槽４２には、蒸気洗浄剤４１が収容され
ており、この蒸気洗浄剤４１中に投入されたヒータ４４
によって、蒸気洗浄剤４１の蒸気を生成するように構成
されている。また、蒸気洗浄槽４３の上部には、この蒸
気洗浄槽４３内からペルフルオロ化合物の蒸気が揮散す
ることを防止するように、冷却パイプ４５が設置されて
いる。In the steam drying step 40, a steam generating tank 42 for evaporating the steam cleaning agent 41, and the vaporized steam cleaning agent 41 supplied from the steam generating tank 42, are used to clean the article 1 to be cleaned after rinsing. And a steam cleaning tank 43 for performing steam cleaning. The steam generation tank 42 contains a steam cleaning agent 41, and the heater 44 introduced into the steam cleaning agent 41.
Thereby, the steam of the steam cleaning agent 41 is generated. A cooling pipe 45 is provided above the steam cleaning tank 43 so as to prevent the vapor of the perfluoro compound from evaporating from inside the steam cleaning tank 43.
【００１７】上記した蒸気洗浄剤４１としては、容易に
蒸気化し得ると共に、毒性を有さず環境等に対して悪影
響を及ぼさない、不活性な液体を用いることが好まし
い。このような蒸気洗浄剤４１としては、ペルフルオロ
化合物が好適である。このペルフルオロ化合物として
は、分子構造中の炭素原子に結合し得る全ての置換基が
フッ素原子である炭素化合物（ペルフルオロカーボン）
が例示される。ただし、工業的に得られるペルフルオロ
カーボンは、置換基の全てがフッ素原子であるとは限ら
ず、一部不純物として水素、塩素あるいは臭素等が結合
しているものも含まれる。これは、製造上避けることが
できない不純物であって、ペルフルオロカーボンに0.5%
〜5.0%程度含まれるものであり、このような不純物を含
むペルフルオロカーボンで実用上の支障はない。また、
上記ペルフルオロカーボンとしては、主鎖が炭素である
ものに限られるものでなく、一部エーテル結合のような
酸素を含むものや、窒素、珪素等を含むものを用いるこ
とも可能である。As the above-mentioned steam cleaner 41, it is preferable to use an inert liquid which can be easily vaporized, has no toxicity and does not adversely affect the environment and the like. As such a vapor cleaning agent 41, a perfluoro compound is preferable. As the perfluoro compound, a carbon compound (perfluorocarbon) in which all substituents capable of bonding to carbon atoms in the molecular structure are fluorine atoms
Is exemplified. However, industrially obtained perfluorocarbons do not necessarily have all of the substituents as fluorine atoms, and include those in which hydrogen, chlorine, bromine, or the like is bonded as a part of impurities. This is an unavoidable impurity in production and 0.5% in perfluorocarbon
The content is about 5.0%, and there is no practical problem with perfluorocarbon containing such impurities. Also,
The above-mentioned perfluorocarbon is not limited to those having a main chain of carbon, and it is also possible to use one containing oxygen such as an ether bond, one containing nitrogen, silicon, or the like.
【００１８】このようなペルフルオロ化合物は、通常、
常温では液状体であって、不燃性、無毒、無臭で、非常
に安全性の高いものであり、また実質的に塩素を含まな
いことから環境破壊を招くことがない。また、フロン系
溶剤と同等の揮発性を有し、さらに金属、プラスチッ
ク、ガラス等の各種材料を侵さないことから、各種材質
からなる被洗浄物１に対して有効かつ十分な洗浄および
乾燥性能を発揮する。ペルフルオロカーボンの具体例と
しては、 C3 F 6 、 C4 F 8 、 C5 F 10、 C6 F12、 C
6 F 12O 、 C6 F 14、 C7 F 14、 C7 F 14O 、 C7 F
16、 C8 F 16 O、 C8 F 18、 C9 F 18O 、 C10F 20O
等の分子式で表されるものや、CF3 -[(O-CF(CF3 )-C
F2 ) n -(O-CF2 ) m ]-O-CF3 等の構造を有するもの等
が挙げられる。具体的には、例えばテクノケアFRV-1(商
品名、株式会社東芝製）等が使用される。Such a perfluoro compound is usually
It is a liquid at room temperature, is nonflammable, non-toxic, odorless, and has very high safety. Further, since it contains substantially no chlorine, it does not cause environmental destruction. In addition, since it has the same volatility as a CFC-based solvent and does not attack various materials such as metals, plastics, and glass, it has an effective and sufficient cleaning and drying performance for the object 1 to be cleaned made of various materials. Demonstrate. Specific examples of perfluorocarbons include C 3 F 6 , C 4 F 8 , C 5 F 10 , C 6 F 12 , C
6 F 12 O, C 6 F 14, C 7 F 14, C 7 F 14 O, C 7 F
16, C 8 F 16 O, C 8 F 18, C 9 F 18 O, C 10 F 20 O
Such as CF 3 -[(O-CF (CF 3 ) -C
F 2 ) n- (O-CF 2 ) m ] -O-CF 3 and the like. Specifically, for example, Technocare FRV-1 (trade name, manufactured by Toshiba Corporation) or the like is used.
【００１９】ここで、この実施例においては、蒸気乾燥
工程４０具体的には蒸気洗浄槽４３に持ち込まれる洗浄
剤はすすぎ洗浄剤３１である。従って、少なくともすす
ぎ洗浄剤３１として、ペルフルオロ化合物からなる蒸気
洗浄剤４１の沸点温度近傍にて蒸気洗浄剤４１に対して
相溶性を示すと共に冷却に伴って分離し、かつそれらの
比重差が0.05g/cm3 以上である液状洗浄剤を用いる。上
記冷却時の分離性としては、一般的な冷却温度例えば10
℃以上の温度で、蒸気洗浄剤４１に対する液状洗浄剤の
溶解量が30重量％以下となることが好ましい。なお、液
状洗浄剤中に添加物が含まれているような場合には、そ
の成分が蒸気洗浄剤中で均一分散状態（例えばエマルジ
ョン）を形成することもあるが、特に問題となるもので
はない。冷却時に上記した溶解量が30重量％を超えると
いうことは、たえずそれ以上の液状洗浄剤が蒸気洗浄剤
４１中に溶解していることになり、蒸気洗浄剤４１の性
能低下を招くこととなる。冷却時における上記溶解量の
より好ましい値は20重量％以下であり、さらに好ましく
は10重量％以下である。また、再使用するにあたって、
冷却温度はあまり低くしないほうがよいため、冷却温度
は10℃以上とすることが好ましい。さらに、蒸気洗浄剤
４１と液状洗浄剤との比重差が0.05g/cm3未満では、後
述する分離時に長時間要したり、流水中では分離が困難
となる。上記比重差のより好ましい値は 0.1g/cm3 以上
であり、さらに好ましくは 0.3g/cm3 以上である。Here, in this embodiment, the cleaning agent brought into the steam drying step 40, specifically the steam cleaning tank 43, is the rinse cleaning agent 31. Therefore, at least as the rinse detergent 31, it is compatible with the vapor detergent 41 near the boiling point of the vapor detergent 41 composed of a perfluoro compound and separates upon cooling, and their specific gravity difference is 0.05 g. / cm 3 or more liquid detergent. As the separability at the time of cooling, a general cooling temperature, for example, 10
At a temperature of not less than ° C., the amount of the liquid detergent dissolved in the steam detergent 41 is preferably 30% by weight or less. When an additive is contained in the liquid detergent, the component may form a uniform dispersion state (for example, an emulsion) in the steam detergent, but this is not a particular problem. . The fact that the above-mentioned dissolved amount exceeds 30% by weight upon cooling means that more liquid detergent is constantly dissolved in the steam cleaner 41, and the performance of the steam cleaner 41 is reduced. . A more preferable value of the above-mentioned dissolved amount upon cooling is 20% by weight or less, further preferably 10% by weight or less. Also, when reusing,
Since it is better not to lower the cooling temperature, the cooling temperature is preferably set to 10 ° C. or higher. Further, when the difference in specific gravity between the steam cleaner 41 and the liquid cleaner is less than 0.05 g / cm 3, it takes a long time for separation, which will be described later, or the separation becomes difficult in running water. A more preferable value of the above specific gravity difference is 0.1 g / cm 3 or more, and further preferably 0.3 g / cm 3 or more.
【００２０】なお、洗浄剤２１も蒸気洗浄槽４３内に持
ち込まれる可能性が皆無とはいえないため、上記条件を
満足する液状洗浄剤を主成分とするような洗浄剤２１を
用いることがより好ましい。Since there is no possibility that the cleaning agent 21 is also brought into the steam cleaning tank 43, it is more preferable to use the cleaning agent 21 mainly containing a liquid cleaning agent satisfying the above conditions. preferable.
【００２１】ペルフルオロカーボンに対して上記条件を
満足する液状洗浄剤としては、例えば低分子量シリコー
ン系洗浄剤、イソパラフィン系洗浄剤等が例示される。
低分子量シリコーン系洗浄剤の主成分となるシリコーン
化合物としては、例えばExamples of the liquid detergent which satisfies the above conditions with respect to perfluorocarbon include, for example, a low molecular weight silicone detergent and an isoparaffin detergent.
Examples of the silicone compound that is a main component of the low molecular weight silicone-based detergent include, for example,
【化１】 （式中、 Rは同一または異なる置換または非置換の 1価
の炭化水素基、 mは 0〜5の整数を示す）で表される直
鎖状ポリジオルガノシロキサンや、Embedded image (Wherein, R represents the same or different substituted or unsubstituted monovalent hydrocarbon group, and m represents an integer of 0 to 5), or a linear polydiorganosiloxane represented by
【化２】 （式中、 Rは同一または異なる置換または非置換の 1価
の炭化水素基、 nは 3〜7の整数を示す）で表される環
状ポリジオルガノシロキサン等が例示される。上記した
(1)式および (2)式中の Rは、置換または非置換の 1価
の炭化水素基であり、例えばメチル基、エチル基、プロ
ピル基、ブチル基等のアルキル基、フェニル基等の 1価
の非置換炭化水素基、トリフロロメチル基等の 1価の置
換炭化水素基等が例示されるが、系の安定性、揮発性の
維持等からメチル基が好ましい。Embedded image (Wherein, R represents the same or different substituted or unsubstituted monovalent hydrocarbon group, and n represents an integer of 3 to 7), and the like. Above
R in the formulas (1) and (2) is a substituted or unsubstituted monovalent hydrocarbon group, for example, an alkyl group such as a methyl group, an ethyl group, a propyl group, and a butyl group; Examples thereof include a monovalent substituted hydrocarbon group such as a monovalent unsubstituted hydrocarbon group and a trifluoromethyl group, and a methyl group is preferred from the viewpoint of system stability and maintenance of volatility.
【００２２】上記低分子量シリコーン系洗浄剤をすすぎ
洗浄剤３１として用いる場合の具体例としては、上記低
分子量ポリオルガノシロキサン単独のテクノケアFRW-1
(商品名、株式会社東芝製）等が挙げられる。A specific example of the case where the above-mentioned low molecular weight silicone-based detergent is used as the rinse detergent 31 is as follows.
(Trade name, manufactured by Toshiba Corporation).
【００２３】例えば、蒸気洗浄剤４１としてのテクノケ
アFRV-1 の比重は約 1.7g/cm3 、またすすぎ洗浄剤３１
としてのテクノケアFRW-1 の比重は約 1g/cm3 であり、
これらの比重差は約 0.7g/cm3 となり、冷却および静置
により 2層に分離することができる。また、図２に FRV
-1に対する FRW-1の溶解量と温度との関係を示す。図２
から明らかなように、 FRV-1と FRW-1とは、 FRV-1の沸
点近傍の温度すなわち蒸気洗浄温度では任意に溶解する
と共に、80℃程度まで冷却することにより、20重量％以
下の溶解量とすることができる。これらにより、蒸気洗
浄時には十分な溶解性が得られ、かつ冷却時には効率よ
く分離し得ることが分かる。For example, the specific gravity of Technocare FRV-1 as the steam cleaner 41 is about 1.7 g / cm 3 , and the rinse cleaner 31
The specific gravity of Techno Care FRW-1 is about 1 g / cm 3 ,
Their specific gravity difference is about 0.7 g / cm 3 , and they can be separated into two layers by cooling and standing. Figure 2 shows FRV
1 shows the relationship between the amount of FRW-1 dissolved in -1 and temperature. FIG.
As is clear from the above, FRV-1 and FRW-1 can be arbitrarily dissolved at a temperature near the boiling point of FRV-1, that is, at a steam cleaning temperature, and cooled to about 80 ° C to dissolve 20% by weight or less. Quantity. From these, it can be seen that sufficient solubility can be obtained during steam cleaning and that separation can be performed efficiently during cooling.
【００２４】また、上述したような低分子量シリコーン
化合物を洗浄剤２１として用いる場合には、洗浄性能を
付与、向上させ得る界面活性剤や親水性溶剤等を添加し
たもの等が使用される。上記したような低分子量ポリオ
ルガノシロキサンは、これら単独でも洗浄性能を示すも
のであるが、界面活性剤や親水性溶剤等を添加すること
によって、より良好な洗浄性能が得られる。When the above-mentioned low molecular weight silicone compound is used as the detergent 21, a detergent or hydrophilic solvent which can impart or improve the washing performance is added. The low-molecular-weight polyorganosiloxanes described above exhibit cleaning performance even when used alone, but more favorable cleaning performance can be obtained by adding a surfactant or a hydrophilic solvent.
【００２５】上記洗浄性能向上剤としての界面活性剤
は、カチオン系、アニオン系、ノニオン系、両性系およ
びこれらの複合系等、各種のものを使用することが可能
である。また親水性溶剤としては、エチレングリコール
モノメチルエーテル、エチレングリコールモノエチルエ
ーテル、エチレングリコールモノプロピルエーテル、エ
チレングリコールモノブチルエーテル、エチレングリコ
ールモノブチルエーテルアセテート、ジエチレングリコ
ールモノブチルエーテル等の多価アルコールとその誘導
体等が例示される。Various surfactants such as cationic, anionic, nonionic, amphoteric and composites thereof can be used as the above-mentioned detergent. Examples of the hydrophilic solvent include polyhydric alcohols such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, ethylene glycol monobutyl ether acetate, and diethylene glycol monobutyl ether, and derivatives thereof. You.
【００２６】このような洗浄剤２１の具体例としては、
低分子量シリコーン化合物に洗浄性能向上剤を添加した
テクノケアFRW-13（商品名、株式会社東芝製）、シリコ
ーン系化合物に洗浄性能向上剤を添加した、例えばテク
ノケアFRW-14（商品名、株式会社東芝製）、同FRW-15、
同FRW-17等が挙げられる。Specific examples of such a cleaning agent 21 include:
Technocare FRW-13 (trade name, manufactured by Toshiba Corporation) in which a cleaning performance enhancer is added to a low molecular weight silicone compound, for example, Technocare FRW-14 (trade name, manufactured by Toshiba Corporation) in which a silicone compound is added with a cleaning performance enhancer Made), FRW-15,
FRW-17 and the like.
【００２７】洗浄工程２０で油系や水系等の汚れが除去
され、かつすすぎ洗浄工程３０で洗浄剤成分やイオン性
の汚れがすすぎ落とされた被洗浄物１は、蒸気洗浄剤４
１例えばペルフルオロ化合物の蒸気が充満する蒸気洗浄
槽４３内に搬送される。被処理物１の表面には、その温
度がペルフルオロ化合物の沸点に至るまで、ペルフルオ
ロ化合物の蒸気が結露し、その中にすすぎ洗浄剤３１は
溶け込む。そして、被処理物１の温度がペルフルオロ化
合物の沸点に至ると、すすぎ洗浄剤３１を含むペルフル
オロ化合物の蒸発が起こり、被処理物１の表面にはもは
や何ものも付着しない状態（清浄・乾燥状態）となる。The object 1 to be cleaned from which oil-based or water-based stains have been removed in the washing step 20 and the detergent components or ionic stains have been rinsed off in the rinsing step 30 is a steam cleaner 4.
For example, it is transported into a vapor cleaning tank 43 filled with vapor of a perfluoro compound. Until the temperature reaches the boiling point of the perfluoro compound, the vapor of the perfluoro compound condenses on the surface of the article 1, and the rinsing agent 31 dissolves therein. Then, when the temperature of the object 1 reaches the boiling point of the perfluoro compound, the perfluoro compound including the rinse agent 31 evaporates, and nothing is adhered to the surface of the object 1 (clean / dry state). ).
【００２８】また、被処理物１の表面で凝縮、液化され
た蒸気洗浄剤４１ａ（以下、凝縮蒸気洗浄液と記す）
は、蒸気洗浄槽４３内に落下する。この凝縮蒸気洗浄液
４１ａには、すすぎ洗浄剤３１や一部汚れ成分等が含ま
れている。よって、この凝縮蒸気洗浄液４１ａを単に再
使用したのでは、当然ながらすすぎ洗浄剤３１や汚れ成
分等が蒸気洗浄剤４１中に蓄積され、次第に濃度を高め
ることで乾燥性を悪化させることになり、ついには洗
浄、乾燥効果が得られなくなる。そこで、この実施例の
洗浄装置においては、蒸気発生槽４２および蒸気洗浄槽
４３を蒸気洗浄剤回収配管５１ａ、５１ｂによって、蒸
気洗浄剤分離槽５０と接続している。A vapor cleaner 41a condensed and liquefied on the surface of the object 1 (hereinafter referred to as a condensed vapor cleaning liquid).
Falls into the steam cleaning tank 43. The condensed vapor cleaning liquid 41a contains the rinse cleaning agent 31, a partly dirty component, and the like. Therefore, if the condensed steam cleaning liquid 41a is simply reused, the rinsing detergent 31 and dirt components are naturally accumulated in the steam cleaning agent 41, and the drying property is deteriorated by gradually increasing the concentration. Eventually, the washing and drying effects cannot be obtained. Therefore, in the cleaning apparatus of this embodiment, the steam generation tank 42 and the steam cleaning tank 43 are connected to the steam cleaning agent separation tank 50 by the steam cleaning agent recovery pipes 51a and 51b.
【００２９】そして、この蒸気洗浄剤分離槽５０によっ
て、凝縮蒸気洗浄液４１ａを強制的に冷却することによ
り、前述したように蒸気洗浄剤４１に対するすすぎ洗浄
剤３１の溶解度が低下する。また、引き続いて静置する
ことにより、すすぎ洗浄剤３１や汚れ成分と蒸気洗浄剤
４１とは、それらの比重差により分離される。 2層に分
離された下層側には、例えばペルフルオロ化合物が存在
することになる。Then, by forcibly cooling the condensed steam cleaning liquid 41a by the steam cleaning agent separation tank 50, the solubility of the rinse cleaning agent 31 in the steam cleaning agent 41 is reduced as described above. In addition, by continuing to stand still, the rinse detergent 31 and the dirt component and the vapor detergent 41 are separated by their specific gravity difference. On the lower layer side separated into two layers, for example, a perfluoro compound is present.
【００３０】上述した蒸気洗浄剤分離槽５０は、図３に
示すように、上下方向に垂設された遮蔽板５２、５３に
よって、冷却用コイル５４が設置された冷却部５５と、
分離部５６とに分けられている。上記遮蔽板５２、５３
は、洗浄剤成分や汚れ成分等が含まれている凝縮蒸気洗
浄液４１ａの冷却部５５における滞留時間を長くし、冷
却効率を高めると共に、分離部５６で安定した静置状態
を得るためのものである。なお、上記冷却コイルに代え
て、冷却フィンを有する冷却パイプ等を用いることも可
能である。As shown in FIG. 3, the above-mentioned steam cleaning agent separation tank 50 includes a cooling section 55 in which a cooling coil 54 is installed by shielding plates 52 and 53 vertically suspended.
And a separation unit 56. The shielding plates 52, 53
Is to increase the residence time of the condensed vapor cleaning liquid 41a containing the cleaning agent component and the dirt component in the cooling unit 55, to increase the cooling efficiency, and to obtain a stable stationary state in the separation unit 56. is there. Note that a cooling pipe having cooling fins or the like may be used instead of the cooling coil.
【００３１】上記冷却部５５には、蒸気発生槽４２に接
続された蒸気洗浄剤回収配管５１ａと、蒸気洗浄槽４３
に接続された蒸気洗浄剤回収配管５１ｂとが、その上方
に接続されており、冷却用コイル５４は下方に設置され
ている。これらによって、洗浄剤成分や汚れ成分等が含
まれている凝縮蒸気洗浄液４１ａは十分に冷却され、容
易に蒸気洗浄剤４１と洗浄剤成分等とに分離し得る状態
となる。なお、蒸気発生槽４２からの蒸気洗浄剤４１の
回収は、蒸気発生槽４２内にすすぎ洗浄剤３１が残留し
て、蒸気洗浄剤４１中のすすぎ洗浄剤３１の濃度が高く
なることを防止するためであり、必要に応じて実施すれ
ばよい。The cooling section 55 includes a steam cleaning agent recovery pipe 51 a connected to the steam generation tank 42, and a steam cleaning tank 43.
Is connected to the upper part thereof, and the cooling coil 54 is installed below. As a result, the condensed vapor cleaning liquid 41a containing the cleaning agent component, the dirt component, and the like is sufficiently cooled, and can be easily separated into the vapor cleaning agent 41 and the cleaning agent component. The recovery of the steam cleaning agent 41 from the steam generation tank 42 prevents the rinse cleaning agent 31 remaining in the steam generation tank 42 from increasing the concentration of the rinse cleaning agent 31 in the steam cleaning agent 41. This can be implemented as needed.
【００３２】また、冷却部５５によって十分に冷却され
た凝縮蒸気洗浄液４１ａは、オーバーフロー部５７を介
して分離部５６へと流れ込む。この分離部５６におい
て、冷却された凝縮蒸気洗浄液４１ａは静置状態とされ
ることにより、上層側のすすぎ洗浄剤３１例えば低分子
量シリコーン系洗浄剤（Ａ層）と下層側のペルフルオロ
化合物（Ｂ層）とに分離される。The condensed vapor cleaning liquid 41a sufficiently cooled by the cooling section 55 flows into the separation section 56 via the overflow section 57. In the separation section 56, the cooled condensed vapor cleaning liquid 41a is allowed to stand still, so that the upper-side rinse agent 31 such as a low-molecular-weight silicone-based detergent (layer A) and the lower-layer perfluoro compound (layer B) ) And separated into
【００３３】この分離部５６によって分離、浄化された
蒸気洗浄剤４１（Ｂ層）は、図４に示すように、分離部
５６の下部側に設けられた蒸気洗浄剤戻り配管５８を通
じて、蒸気発生槽４２へと再供給される。このように、
蒸気洗浄剤戻り配管５８を分離部５６の下部に設けるこ
とによって、オーバーフロー部５７から分離部５６へと
流れ込む際に発生する乱流の影響を受けることなく、十
分に分離、浄化された蒸気洗浄剤４１のみを蒸気発生槽
４２へと再供給することができる。また、分離部５６と
蒸気発生槽４２とを、同レベルで蒸気洗浄剤戻り配管５
８により接続することによって、蒸気発生槽４２内の蒸
気洗浄剤４１が蒸気洗浄槽４３に供給された際、蒸気洗
浄剤分離槽５０から分離・浄化された蒸気洗浄剤４１を
随時蒸気発生槽４２へ再供給することができる。なお、
上層側のすすぎ洗浄剤３１等によるＡ層は、適時配管５
９によって排出すればよい。As shown in FIG. 4, the steam cleaner 41 (layer B) separated and purified by the separating section 56 generates steam through a steam cleaning agent return pipe 58 provided on the lower side of the separating section 56. It is resupplied to the tank 42. in this way,
By providing the steam cleaning agent return pipe 58 at the lower portion of the separation unit 56, the steam cleaning agent that has been sufficiently separated and purified without being affected by turbulence generated when flowing from the overflow unit 57 to the separation unit 56. Only 41 can be resupplied to the steam generation tank 42. Further, the separation section 56 and the steam generation tank 42 are connected at the same level to each other with the steam cleaning agent return pipe 5.
8, when the steam cleaning agent 41 in the steam generation tank 42 is supplied to the steam cleaning tank 43, the steam cleaning agent 41 separated and purified from the steam cleaning agent separation tank 50 is used as needed. Can be resupplied to In addition,
The layer A by the upper-side rinse agent 31 etc.
9 to discharge.
【００３４】ところで、図４においては、蒸気洗浄剤分
離槽５０と蒸気発生槽４２とを直管状の蒸気洗浄剤戻り
配管５８により接続した例について説明したが、これだ
と蒸気発生に伴って蒸気発生槽４２の内圧が上昇するこ
とにより、蒸気洗浄剤４１が蒸気洗浄剤分離槽５０に逆
流する可能性がある。蒸気洗浄剤４１の逆流が生じる
と、分離部５６での分離効率が低下したり、また蒸気発
生槽４２内の液量が減少して、ヒータ４４の空たきが起
こる可能性がある等、危険性や冷却効率の点で問題が生
じるおそれがある。FIG. 4 shows an example in which the steam cleaning agent separating tank 50 and the steam generating tank 42 are connected by a straight tubular steam cleaning agent return pipe 58. When the internal pressure of the generation tank 42 increases, the steam cleaning agent 41 may flow back into the steam cleaning agent separation tank 50. When the backflow of the steam cleaning agent 41 occurs, there is a danger that the separation efficiency in the separation unit 56 is reduced, and the amount of liquid in the steam generation tank 42 is reduced, and the heater 44 may be emptied. There is a possibility that problems may occur in terms of performance and cooling efficiency.
【００３５】このような点に対しては、図５または図６
に示すように、例えば蒸気洗浄剤戻り配管５８を屈曲さ
せることにより、ヒータ４４の設置位置より高くなる部
分５８ａを設けることが効果的である。図５に示す蒸気
洗浄剤戻り配管５８は、屈曲させた部分を直接的に蒸気
洗浄剤分離槽５０内に挿入すると共に、その開口端部５
８ｂが下層側の蒸気洗浄剤層（Ｂ層）に到達するよう配
管長さを設定している。また、図６に示す蒸気洗浄剤戻
り配管５８では、蒸気洗浄剤分離槽５０および蒸気発生
槽４２に対する接続部５８ｃは図４と同様に、それぞれ
の下部側に設け、その間を屈曲させることによって、ヒ
ータ４４の設置位置より高くなる部分５８ａを設けてい
る。FIG. 5 or FIG.
As shown in (5), it is effective to provide a portion 58a which is higher than the installation position of the heater 44 by bending the steam cleaning agent return pipe 58, for example. The steam cleaning agent return pipe 58 shown in FIG. 5 inserts the bent portion directly into the steam cleaning agent separation tank 50 and has an open end 5.
The length of the pipe is set so that 8b reaches the lower steam cleaner layer (layer B). Also, in the steam cleaning agent return pipe 58 shown in FIG. 6, a connection portion 58c for the steam cleaning agent separation tank 50 and the steam generation tank 42 is provided on each lower side similarly to FIG. A portion 58a that is higher than the installation position of the heater 44 is provided.
【００３６】このように、蒸気洗浄剤戻り配管５８の一
部がヒータ４４の設置位置より高くなるよう設定するこ
とにより、蒸気発生槽４２内の蒸気洗浄剤４１が蒸気洗
浄剤分離槽５０に逆流することが防止でき、蒸気洗浄剤
分離槽５０から蒸気発生槽４２に安定して蒸気洗浄剤４
１を補給することが可能となる。蒸気洗浄剤分離槽５０
内の蒸気洗浄剤４１による液面が蒸気洗浄剤戻り配管５
８の上部５８ａ位置より低い場合には液の補給は止まる
が、蒸気洗浄により凝縮した液４１ａが蒸気洗浄剤分離
槽５０に供給されるため、液面が高くなって自然に蒸気
発生槽４２に流れることとなる。蒸気洗浄剤戻り配管５
８の一部をヒータ４４の設置位置より高くし、蒸気洗浄
剤分離槽５０内に十分な量の液を溜めておくことにより
逆流が防止でき、よってヒータ４４が液面からでて空た
きが起こることもなくなり、温度が異常に高くなること
もない。このように、安全性の向上に寄与する。なお、
上記した例では、ヒータ４４を蒸気発生槽４２の下側か
ら20cmの位置に設置し、かつ蒸気洗浄剤戻り配管５８の
上部５８ａ位置を40cmに設定した。As described above, by setting a part of the steam cleaning agent return pipe 58 to be higher than the installation position of the heater 44, the steam cleaning agent 41 in the steam generation tank 42 flows backward to the steam cleaning agent separation tank 50. Can be prevented and the steam cleaning agent 4 can be stably transferred from the steam cleaning agent separation tank 50 to the steam generation tank 42.
1 can be supplied. Steam cleaning agent separation tank 50
The liquid level due to the vapor cleaning agent 41 in the inside is changed to the vapor cleaning agent return pipe 5
8, the supply of liquid is stopped, but the liquid 41a condensed by the vapor cleaning is supplied to the vapor cleaning agent separating tank 50, so that the liquid level rises and the liquid 41a naturally flows into the vapor generating tank 42. It will flow. Steam cleaning agent return pipe 5
8 can be made higher than the installation position of the heater 44, and a sufficient amount of liquid can be stored in the vapor cleaning agent separation tank 50 to prevent the backflow. It does not happen and the temperature does not rise abnormally. Thus, it contributes to improvement of safety. In addition,
In the above example, the heater 44 was installed at a position 20 cm from the lower side of the steam generating tank 42, and the position of the upper portion 58 a of the steam cleaning agent return pipe 58 was set at 40 cm.
【００３７】上述したように、この実施例においては、
低分子量シリコーン化合物等を含む洗浄剤を用いること
によって、環境破壊や人体に対する悪影響を及ぼすこと
なく、被洗浄物１に対して十分な洗浄力を発揮すること
ができる。また、ペルフルオロ化合物を用いて蒸気洗浄
（乾燥）を行っているため、同様に環境破壊や人体に対
する悪影響を及ぼすことなく、優れた乾燥性能が得られ
る。As described above, in this embodiment,
By using a cleaning agent containing a low molecular weight silicone compound or the like, it is possible to exert sufficient detergency on the object to be cleaned 1 without causing environmental destruction or adverse effects on the human body. In addition, since steam cleaning (drying) is performed using a perfluoro compound, excellent drying performance can be similarly obtained without causing environmental destruction or adverse effects on the human body.
【００３８】そして、低分子量シリコーン化合物とペル
フルオロ化合物とは、ペルフルオロ化合物の沸点温度近
傍では相溶性を示し、かつ温度低下により急激に溶解度
が低くなると共に、適度な比重差を有することから、強
制冷却と比重差を利用して容易に分離することができ
る。よって、蒸気洗浄剤４１中に持ち込まれた洗浄剤成
分や汚れ成分によって、洗浄・乾燥力が低下することを
有効に防止することができると共に、蒸気洗浄剤４１の
再使用が可能となる。また、洗浄剤と蒸気洗浄剤との分
離を比重差によって行っているため、蒸気洗浄剤４１の
回収が低コストで実現できる。The low-molecular-weight silicone compound and the perfluoro compound exhibit compatibility at around the boiling point of the perfluoro compound, have a sharply lower solubility due to a temperature drop, and have an appropriate specific gravity difference. And can be easily separated by utilizing the difference in specific gravity. Therefore, it is possible to effectively prevent the cleaning / drying power from being reduced by the cleaning component and the dirt component brought into the steam cleaning agent 41, and it is possible to reuse the steam cleaning agent 41. In addition, since the cleaning agent and the steam cleaning agent are separated by the difference in specific gravity, the recovery of the steam cleaning agent 41 can be realized at low cost.
【００３９】[0039]
【発明の効果】以上説明したように、本発明の洗浄方法
によれば、環境破壊や人体に対して悪影響を及ぼすこと
なく、通常状態において十分な洗浄および乾燥性能が得
られる。また、洗浄剤と蒸気洗浄剤とを、低コストでか
つ確実に分離することが可能となるため、洗浄剤等の混
入による洗浄・乾燥効果の低下を防止することができ、
よって上記洗浄および乾燥性能を安定して得ることが可
能となる。As described above, according to the cleaning method of the present invention, sufficient cleaning and drying performance can be obtained under normal conditions without destruction of the environment or adverse effects on the human body. Further, since the cleaning agent and the steam cleaning agent can be reliably separated at low cost, it is possible to prevent a reduction in the cleaning / drying effect due to mixing of the cleaning agent and the like,
Therefore, it is possible to stably obtain the washing and drying performance.
【図１】本発明の洗浄方法を適用した一実施例の洗浄装
置の構成を模式的に示す図である。FIG. 1 is a diagram schematically showing a configuration of a cleaning apparatus according to an embodiment to which a cleaning method of the present invention is applied.
【図２】蒸気洗浄剤としてのペルフルオロ化合物中への
液状洗浄剤としてのシリコーン化合物の溶解量を温度の
関数として示す図である。FIG. 2 is a diagram showing the amount of silicone compound as a liquid detergent dissolved in a perfluoro compound as a vapor detergent as a function of temperature.
【図３】図１に示す洗浄装置に用いた蒸気洗浄剤分離槽
の構成を示す断面図である。FIG. 3 is a cross-sectional view showing a configuration of a steam cleaning agent separation tank used in the cleaning device shown in FIG.
【図４】図１に示す洗浄装置に用いた蒸気洗浄剤分離槽
と蒸気発生槽との接続状態を示す断面図である。FIG. 4 is a sectional view showing a connection state between a steam cleaning agent separation tank and a steam generation tank used in the cleaning apparatus shown in FIG.
【図５】蒸気洗浄剤分離槽と蒸気発生槽との接続状態の
他の例を示す断面図である。FIG. 5 is a cross-sectional view showing another example of the connection state between the steam cleaning agent separation tank and the steam generation tank.
【図６】蒸気洗浄剤分離槽と蒸気発生槽との接続状態の
さらに他の例を示す断面図である。FIG. 6 is a cross-sectional view showing still another example of the connection state between the steam cleaning agent separation tank and the steam generation tank.
１………被洗浄物 １０……バスケット搬送機構 ２０……洗浄工程 ２１……シリコーン系化合物を含む洗浄剤 ２２……浸漬洗浄槽 ２３……液切り槽 ３０……すすぎ洗浄工程 ３１……すすぎ洗浄剤 ３２……浸漬すすぎ槽 ３３……シャワーすすぎ槽 ４０……蒸気乾燥工程 ４１……蒸気洗浄剤 ４１ａ…凝縮蒸気洗浄液 ４２……蒸気発生槽 ４３……蒸気洗浄槽 ５０……蒸気洗浄剤分離槽 ５１ａ、５１ｂ……蒸気洗浄剤回収配管 ５２、５３……遮蔽板 ５４……冷却用コイル ５５……冷却部 ５６……分離部 ５８……蒸気洗浄剤戻り配管 Ａ……シリコーン化合物層 Ｂ……ペルフルオロ化合物層 DESCRIPTION OF SYMBOLS 1 ... thing to be washed 10 ... basket transport mechanism 20 ... washing process 21 ... detergent containing silicone compound 22 ... immersion washing tank 23 ... drain tank 30 ... rinsing washing step 31 ... rinsing Cleaning agent 32 ... Immersion rinsing tank 33 ... Shower rinsing tank 40 ... Steam drying step 41 ... Steam cleaning agent 41a ... Condensed steam cleaning liquid 42 ... Steam generation tank 43 ... Steam cleaning tank 50 ... Steam cleaning agent separation Tanks 51a, 51b Vapor cleaning agent recovery pipes 52, 53 Shield plate 54 Cooling coil 55 Cooling section 56 Separation section 58 Vapor cleaning agent return pipe A Silicon compound layer B ... Perfluoro compound layer
フロントページの続き (72)発明者 今城 康隆 東京都港区芝浦１丁目１番１号 株式会 社東芝 本社事務所内 (72)発明者 福岡 顕一 東京都港区芝浦１丁目１番１号 株式会 社東芝 本社事務所内 (72)発明者 斉藤 信宏 群馬県太田市西新町133番地 東芝シリ コーン株式会社内 (72)発明者 山藤 茂夫 群馬県太田市西新町133番地 東芝シリ コーン株式会社内 (56)参考文献 特開 平４−297590（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) C23G 5/032 Continued on the front page (72) Inventor Yasutaka Imajo 1-1-1, Shibaura, Minato-ku, Tokyo Inside the head office of Toshiba Corporation (72) Inventor Kenichi Fukuoka 1-1-1, Shibaura, Minato-ku, Tokyo Stock Company (72) Inventor Nobuhiro Saito 133 Nishishinmachi, Ota City, Gunma Toshiba Siri Cone Corporation (72) Inventor Shigeo Yamafashi 133 Nishishinmachi Nishishinmachi, Ota City, Gunma Prefecture Toshiba Siri Cone Corporation (56) References JP-A-4-297590 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) C23G 5/032
Claims (5)
より洗浄する工程と、蒸気発生槽によって蒸気化した蒸
気洗浄剤を蒸気洗浄槽に供給し、この蒸気洗浄槽内で前
記洗浄後の被洗浄物を乾燥させる工程とを有する洗浄方
法において、 前記洗浄剤として、前記蒸気洗浄剤の沸点温度近傍にて
該蒸気洗浄剤に対して相溶性を示すと共に冷却に伴って
分離し、かつそれらの比重差が0.05g/cm3 以上の液状洗
浄剤を用い、 かつ、前記液状洗浄剤を含む前記蒸気洗浄剤の凝縮液を
回収し、該凝縮液を強制的に冷却した後、該液状洗浄剤
と蒸気洗浄剤との比重差により分離した蒸気洗浄剤を蒸
気発生槽に再供給しつつ、前記乾燥を行うことを特徴と
する洗浄方法。1. A step of cleaning an object to be cleaned by a cleaning tank containing a cleaning agent, and supplying a steam cleaning agent vaporized by a steam generation tank to the steam cleaning tank. Drying the object to be cleaned, wherein the cleaning agent shows compatibility with the steam cleaning agent near the boiling point of the steam cleaning agent and separates upon cooling, and A liquid detergent having a specific gravity difference of 0.05 g / cm 3 or more is used, and a condensate of the vapor detergent containing the liquid detergent is collected, and the condensate is forcibly cooled. A cleaning method, wherein the drying is performed while re-supplying a steam cleaning agent separated by a specific gravity difference between the cleaning agent and the steam cleaning agent to a steam generation tank.
溶解量が30重量％以下となるような温度で行うことを特
徴とする洗浄方法。2. The cleaning method according to claim 1, wherein the cooling is performed at a temperature at which the amount of the liquid cleaning agent dissolved in the steam cleaning agent is 30% by weight or less.
とを特徴とする洗浄方法。3. The cleaning method according to claim 1, wherein a perfluoro compound is used as the steam cleaning agent.
剤を用いることを特徴とする洗浄方法。4. The cleaning method according to claim 1, wherein a liquid cleaning agent containing a silicone compound is used as the cleaning agent.
に、前記洗浄剤としてシリコーン系化合物を含む液状洗
浄剤を用いることを特徴とする洗浄方法。5. The cleaning method according to claim 1, wherein a perfluoro compound is used as the vapor cleaning agent, and a liquid cleaning agent containing a silicone-based compound is used as the cleaning agent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07690492A JP3164875B2 (en) | 1992-03-31 | 1992-03-31 | Cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07690492A JP3164875B2 (en) | 1992-03-31 | 1992-03-31 | Cleaning method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06173049A JPH06173049A (en) | 1994-06-21 |
| JP3164875B2 true JP3164875B2 (en) | 2001-05-14 |
Family
ID=13618657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07690492A Expired - Fee Related JP3164875B2 (en) | 1992-03-31 | 1992-03-31 | Cleaning method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3164875B2 (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0818565B2 (en) * | 1988-12-06 | 1996-02-28 | 株式会社日立製作所 | Current control device, current control method, and electric power steering device |
| JPH02216362A (en) * | 1989-02-15 | 1990-08-29 | Matsushita Electric Ind Co Ltd | Pwm circuit for electrically driven power steering system |
| JPH07115645B2 (en) * | 1989-03-17 | 1995-12-13 | 光洋精工株式会社 | Motor current detection circuit |
| JP2711479B2 (en) * | 1990-05-07 | 1998-02-10 | 富士写真光機株式会社 | Driving method of DC motor |
-
1992
- 1992-03-31 JP JP07690492A patent/JP3164875B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06173049A (en) | 1994-06-21 |
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