JP3753545B2 - Component adsorption head - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a component suction head for sucking and mounting a component, for example, in a component mounting apparatus applied to mounting an electronic component on an electronic circuit board, and more particularly to a vacuum sealing structure thereof.
[0002]
[Prior art]
A component suction head in a component mounting apparatus that automatically mounts an electronic component on an electronic circuit board includes a nozzle for sucking and mounting the electronic component on the electronic circuit board. In recent years, there has been a demand for reliably adsorbing electronic components to increase work efficiency and stabilizing the suction force of the nozzles so that expensive electronic components are not dropped.
[0003]
Hereinafter, a conventional electronic component mounting apparatus will be described with reference to FIG. In FIG. 7, the electronic component mounting apparatus includes a suction head portion 51 having a nozzle for sucking an electronic component, a suction device 52 for sucking the electronic component with the nozzle, and a suction head portion 51 in the X and Y directions. An XY robot 53 to be moved, and a control device 54 that controls the operation of the suction head unit 51, the suction device 52, and the XY robot 53 are provided. In FIG. 7, only main components of the suction head portion 51 are shown, and for example, the body portion and the like are not shown.
[0004]
55 is a spline shaft, and two nuts 56 and 57 are fitted and attached so as to be movable in the axial direction. The nuts 56 and 57 are attached to the body portion of the suction head portion 51 via bearings 58 and 59 (see FIG. (Not shown). As a result, the spline shaft 55 is movable in the axial direction and rotatable around the axial center, and is rotated by the motor 60 attached to the suction head portion 51 via the pulley 61, the belt 62, and the pulley 63. .
[0005]
A nozzle 65 that sucks the electronic component 64 is provided at the distal end portion 55 a of the spline shaft 55. Inside the nozzle 65, a filter 66 is provided for preventing entry of dust during suction.
[0006]
The spline shaft 55 is configured to be driven up and down by a voice coil motor 67. The spline shaft 55, that is, the nozzle 65 is lowered by the applied pressure so that the electronic component 64 is sucked and mounted. The voice coil motor 67 passes a spline shaft 55 through an axial center portion of a casing 68 as a closed box, fixes a magnet 70 to the spline shaft 55, and energizes a voice coil 69 disposed on the inner periphery of the casing 68. Thus, the magnet 70, that is, the spline shaft 55 is configured to be driven up and down.
[0007]
The nozzle 65 communicates with a space 73 in the casing 68 through a hollow hole 71 provided in the spline shaft 55 and a communication hole 72, and this space 73 is sucked through a communication hole 74 provided in the casing 68 and an air joint 75. It is connected to the device 52. Therefore, at the time of component adsorption, vacuum suction is performed by the suction device 52 through the air joint 75 to apply a vacuum pressure to the nozzle 65 and the electronic component 64 is sucked. The penetrating portions of the spline shaft 55 at the upper and lower ends of the casing 68 are vacuum-sealed by holding a very soft annular disc-shaped packing 76 with a lid 77.
[0008]
A magnetic scale 78 magnetized to the NS pole is fixed to the upper end portion of the spline shaft 55, and the position of the nozzle 65 is detected by reading the position of the magnetic scale 78 with the magnetic sensor 79, and the tip of the magnetic scale 78 is also detected. Is detected by the transmission sensor 80, and the origin position is detected.
[0009]
The operation of the component mounting apparatus having the above configuration will be described. The XY robot 53 is operated by the control operation of the control device 54, and the suction head unit 51 is moved to the component suction position, which is a suction place for electronic components. The controller 54 controls the energization of the voice coil motor 67 while reading the magnetic scale 78 to lower the nozzle 65. When the nozzle 65 comes into contact with the electronic component 64, the suction device 52 is activated to connect the air joint 75. A vacuum pressure is applied to the nozzle 65 through the hole 74, the space 73 in the casing 68, the communication hole 72, and the hollow hole 71, and the electronic component 64 is adsorbed. After suction of the electronic component 64, the nozzle 65 rises. Next, the XY robot 53 moves the suction head unit 51 onto the component recognition camera, images the suction position of the electronic component 64, and corrects the position based on the information. At this time, the spline shaft 55 is rotated by the motor 60 via the pulley 61, the belt 62, the pulley 63, and the nut 56. Next, the XY robot 53 moves the suction head unit 51 onto the electronic circuit board. Next, when the voice coil motor 67 is energized and the nozzle 65 descends and the electronic component 64 comes into contact with the electronic circuit board, the communication of the nozzle 65 with the suction device 52 is cut off and returned to atmospheric pressure, and the electronic component 64 is Mount on the electronic circuit board.
[0010]
[Problems to be solved by the invention]
However, the above configuration has the following problems. The electronic parts 64 to be mounted vary widely, from minute ones of 1 mm square or less to 60 mm squares. Further, the electronic parts 64 are securely adsorbed and brought into close contact with the nozzle 65 while being transferred to the mounting position, so that positional displacement does not occur. It is necessary to do so. For this purpose, the nozzle 65 must be stably vacuum-sucked.
[0011]
By the way, in the cross section of the spline shaft 55, as shown in FIG. 8, a groove 82 and the like are provided so that the balls 81 provided on the nuts 56 and 57 roll. As a result, air leakage occurs and a sufficient vacuum pressure cannot be applied to the nozzle 65. Therefore, conventionally, a very soft packing 76 is disposed in the penetrating portion of the spline shaft 55, and further, a high-viscosity vacuum grease or the like is applied to improve the sealing performance of the groove 82.
[0012]
However, the applied grease is eventually sucked into the casing 68 due to repeated evacuation, and the extremely soft packing 76 deteriorates due to its flexibility, and air leakage occurs after aging, and the nozzle 65 There was a problem that the vacuum pressure could not be secured sufficiently, and the position was shifted while the suction posture was corrected and moved to the mounting position, causing a mounting abnormality. Also, in the case of electronic parts that do not have a sufficiently wide suction space such as atypical parts, there is a problem that the work efficiency of the mounting is significantly reduced because the suction is particularly difficult to stabilize.
[0013]
An object of the present invention is to provide a component suction head capable of stabilizing the vacuum suction by a nozzle and improving the mounting quality in view of the above-described conventional problems.
[0014]
[Means for Solving the Problems]
The component suction head of the present invention is formed on the outer peripheral surface and supported by a nut fitted to the outer peripheral surface so as to be movable in the axial direction in the component suction head of the component mounting apparatus for sucking and mounting the component. A shaft that is regulated in the rotational direction by engagement of a groove and a nut is provided, and a nozzle that adsorbs components is provided at the lower end portion of the shaft, and a hollow hole that communicates with the nozzle is provided in the shaft core portion. A communication hole that communicates with the hollow hole is provided in the middle of the box, a closed box is provided so as to surround the communication hole, and a packing having a hole having the same shape as the cross-sectional shape of the shaft is provided in a portion through which the shaft of the closed box passes. the closure box a component suction head connected to a vacuum suction means, and soft first packing in close contact with the shaft the packing with a hole cross-sectional shape and the same shape of the shaft, the groove of the shaft Mutual and portions other than the groove of the shaft viewed is obtained by arranged to overlap the second packing high rigidity having a gap, first with holes of the same shape with respect to the shaft in the shaft penetrating portion of the closure box Since the packing is in close contact, the outside of the closed box is sealed, the vacuum suction by the vacuum suction means reaches the nozzle without leaking, and a sufficient degree of vacuum can be secured at the nozzle, and the shaft rotates. Accordingly, the second packing rotates, and the first packing rotates together with the second packing. Therefore, even if the shaft rotates, the rotational phase of the first packing and the shaft does not shift, and the soft first packing is tightly sealed. There is ensured, reaching the nozzle without leaks vacuum suction by the vacuum suction means, Ru can be ensured a sufficient degree of vacuum nozzles.
[0015]
Further, it provided between the second packing and said first gasket in contact with the closure box, when the second packing Ru further comprising a biasing member for pressing to said closed box, not leak more vacuum suction It is effective.
[0016]
Furthermore, in the case of including a blow device that is connected to the closed box and returns to the atmospheric pressure state in the closed box, the communication hole, and the hollow hole to release the suction of the components , When the inside of the closed box is returned to the atmospheric pressure state by the blowing device , the urging member presses the second packing against the closed box, and the contact surface between the second packing and the closed box it is possible to prevent air leakage during the suction operation by the vacuum suction means could kill air passage occurring in portions.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a reference example of the component suction head of the present invention will be described with reference to FIGS.
[0018]
First, an overall configuration of an electronic component mounting apparatus including a component suction head according to this reference example will be described with reference to FIG. In FIG. 1, an electronic circuit board 1 is carried in and out by a transport unit 2 and is held at a predetermined position during production. 3 and 4 are electronic component supply units that store and supply electronic components to be mounted on the electronic circuit board 1, and the electronic component supply unit 3 is a reel-type electronic component supply unit that stores electronic components in a reel. The electronic component supply unit 4 is a tray-type electronic component supply unit that stores electronic components in a tray.
[0019]
Reference numeral 5 denotes a component suction head portion that performs the up-and-down rotation operation of the nozzle 6 that sucks an electronic component. The component suction head portion 5 is attached to an XY robot 7 that moves the component suction head portion 5 in the X and Y directions. At the time of sucking the electronic component, the XY robot 7 moves the component suction head unit 5, that is, the nozzle 6 to the electronic component holding position in the electronic component supply unit 3 or 4, and then lowers the nozzle 6 to suck the electronic component. Then, the nozzle 6 is raised after the suction.
[0020]
The suction state of the electronic component by the nozzle 6 is imaged by the component recognition camera 8, and it is determined whether or not correction of the suction angle of the electronic component is necessary before mounting on the electronic circuit board 1 based on the imaging information. The electronic component sucked by the nozzle 6 is moved in the X and Y directions by the movement of the component suction head unit 5 by the XY robot 7 and is moved to a predetermined position on the electronic circuit board 1. Then, the nozzle 6 is lowered by the operation of the component suction head unit 5, the electronic component is mounted at a predetermined component mounting position on the electronic circuit board 1, and the suction of the electronic component is released. By repeating the above operation, each electronic component is mounted on the electronic circuit board 1 from the electronic component supply unit 3 or 4.
[0021]
FIG. 2 shows a detailed configuration of the component suction head unit 5, a suction device 9 for sucking an electronic component by the XY robot 7 and the nozzle 6, and operation control of the component suction head unit 5, the XY robot 7, and the suction device 9. The control apparatus 10 which performs is shown. In FIG. 2, for convenience, the spline shaft 11 is directly driven by the XY robot 7, but the component suction head unit 5 is actually moved by the XY robot 7.
[0022]
In the component suction head portion 5, two nuts 12 and 13 are fitted to the spline shaft 11 so as to be movable in the axial direction. The spline shaft 11 is formed with a groove in which the balls provided on the nuts 12 and 13 roll in the axial direction, and is slidably supported in the axial direction and engaged in the rotational direction. The nuts 12 and 13 are supported by the body portion (not shown) of the suction head portion 5 via the bearings 14 and 15, and the spran shaft 11 is movable in the axial direction and rotates around the axial center. The motor 16 is supported in such a manner as to be supported, and is driven to rotate through a pulley 17, a belt 18, and a pulley 19 by a motor 16 mounted on the component suction head unit 5.
[0023]
A nozzle 6 that sucks the electronic component 20 is provided at the tip end portion 11 a of the spline shaft 11. A filter 21 is provided inside the nozzle 6 to prevent dust from entering during suction.
[0024]
The spline shaft 11 is configured to be driven up and down by a voice coil motor 22, and the spline shaft 11, that is, the nozzle 6 is lowered by the applied pressure to perform the operation of sucking and mounting the electronic component 20. The voice coil motor 22 passes the spline shaft 11 through the shaft core portion of the casing 23 as a closed box, fixes a magnet 24 to the spline shaft 11, and energizes the voice coil 25 disposed on the inner periphery of the casing 23. Thus, the magnet 24, that is, the spline shaft 11 is driven up and down.
[0025]
The nozzle 6 communicates with a space 28 in the casing 23 through a hollow hole 26 provided in the spline shaft 11 and a communication hole 27, and this space 28 is sucked through a communication hole 29 provided in the casing 23 and an air joint 30. It is connected to the device 9. Therefore, at the time of component adsorption, the suction device 9 performs vacuum suction through the air joint 30 to apply a vacuum pressure to the nozzle 6 to adsorb the electronic component 20.
[0026]
A packing 31 is disposed in a through portion of the spline shaft 11 at the upper and lower ends of the casing 23 and is sealed with a lid 32 and vacuum-sealed. As shown in detail in FIG. 3, the packing 31 has a hole having the same shape as the cross-sectional shape of the spline shaft 11, and is pressed by the lid 32 to be in close contact with the outer surface of the casing 23. As a result, the space 28 and the outside are sealed, and a sufficient vacuum state of the nozzle 6 is ensured without the outside air leaking into the space 28 during suction by the suction device 9 and the vacuum is not lowered.
[0027]
A magnetic scale 33 magnetized to the NS pole is fixed to the upper end portion of the spline shaft 11, and the position of the nozzle 6 is detected by reading the position of the magnetic scale 33 by the magnetic sensor 34 and transmitted through the tip of the magnetic scale 33. The sensor 35 is configured to read and detect the origin position.
[0028]
The operation of the component mounting apparatus having the above configuration will be described. The XY robot 7 is operated by the control operation of the control device 10, and the component suction head unit 5 is moved to the component suction position, which is a suction location for electronic components. The controller 10 controls the energization of the voice coil motor 22 while reading the magnetic scale 33 to lower the nozzle 6. When the nozzle 6 comes into contact with the electronic component 20, the suction device 9 is activated to connect the air joint 30. A vacuum pressure is applied to the nozzle 6 through the hole 29, the space 28 in the casing 23, the communication hole 27, and the hollow hole 26 to adsorb the electronic component 20. After the electronic component 20 is attracted, the nozzle 6 is raised. Next, the XY robot 7 moves the component suction head unit 5 onto the component recognition camera 8, images the suction position of the electronic component 20, and corrects the position based on the information. At this time, the spline shaft 11 is rotated by the motor 16 via the pulley 17, the belt 18, the pulley 19, and the nut 12. Next, the XY robot 7 moves the component suction head unit 5 onto the electronic circuit board 1. Next, when the voice coil motor 22 is energized and the nozzle 6 descends and the electronic component 20 comes into contact with the electronic circuit board 1, the communication with the suction device 9 of the nozzle 6 is cut off and returned to atmospheric pressure. Is mounted on the electronic circuit board 1.
[0029]
Next, a first embodiment of the present invention will be described with reference to FIGS. In FIG. 4, the same components as those in the above-described reference example are denoted by the same reference numerals, description thereof is omitted, and only differences are described. In the penetration part of the spline shaft 11 at the upper and lower ends of the casing 23, a soft first packing 41 having a hole having the same shape as the cross-sectional shape of the spline shaft 11 and closely contacting the spline shaft 11, and a ball groove of the spline shaft 11 A pair of high-rigidity second packings 42 that mesh with each other and do not shift in the rotational direction are vacuum sealed with a lid 43 attached to the outer surface of the casing 23 with the first packing 41 sandwiched by the second packing 42. Yes. The first packing 41 is the same as the packing 31 of the reference example . The second packing 42 may be engaged with the ball groove 44 of the spline shaft 11 so as to follow and rotate when the spline shaft 11 rotates. Therefore, as shown in FIG. In order to reduce the machining cost and reduce the contact resistance by reducing the sliding resistance, it has been devised to ensure a long service life. In addition, some grease etc. are apply | coated in order to improve a vacuum sealing property more.
[0030]
In the present embodiment, the first packing 41 is completely in close contact with the cross-sectional shape of the spline shaft 11 like the packing 31 of the reference example . However, in order to improve the adhesion, a soft material such as urethane rubber is used. Therefore, when the spline shaft 11 is rotated when the casing 23 and the lid 43 are in close contact with each other, as shown in FIG. 6, the groove 44 of the ball provided on the spline shaft 11 and the protruding portion of the packing 41 that meshes with the groove 44 are formed. There is a possibility that the phase of the rotation direction of 45 shifts and the sealing is broken, and the vacuum pressure does not increase. Therefore, in the present embodiment, the packing 41 is sandwiched by the high-rigidity second packing 42 that engages with the ball groove 44 provided on the spline shaft 11, so that the second packing 42 is attached to the casing 23 and the lid 43. It is made to rotate with the spline shaft 11 in the contact state. Thus, since the first packing 41 rotates in synchronization with the second packing 42, the rotation phase with the spline shaft 11 does not shift, and the vacuum pressure of the nozzle 6 is sufficiently secured.
[0031]
Next, a second embodiment of the present invention will be described with reference to Figs.
[0032]
Note that the same components as those in the first embodiment are denoted by the same reference numerals, description thereof is omitted, and only differences are described.
[0033]
As shown in FIG. 9, the inside of the nozzle 6 is returned to the atmospheric pressure state in the casing 23 of the voice coil motor 22 through the space 28 in the casing 23, the communication hole 27, and the hollow hole 26. A blow device 301 can be provided for canceling. The blow device 301 is connected to the casing 23 via the air joint 30 and is connected to the control device 10 to be controlled in operation.
[0034]
In the component suction head configured as described above, air is injected into the space 28 of the voice coil motor 22 by the blow device 301, but the injected air passes through the spline shaft 11 in the casing 23. It tries to flow from the space 28 of the voice coil motor 22 through the groove 44 of the spline shaft 11 to the outside. At this time, as shown in FIG. 10, the injected air may leak to the outside through the contact surface portion 501 between the second packing 42 and the casing 23 of the voice coil motor 22. Once air leakage occurs through the contact surface portion 501, an air passage is formed in the contact surface portion 501, and there is a possibility that the suction operation by the suction device 9 becomes difficult. Conceivable.
[0035]
Therefore, in the second embodiment, a pressure-contact type packing 502 as shown in FIG. 10 is provided as a sealing member in a portion where the spline shaft 11 penetrates the casing 23 of the voice coil motor 22. The pressure-contact type packing 502 includes a third packing 503, a motor-side packing 504 that contacts the casing 23 of the voice coil motor 22, a lid-side packing 505 that contacts the lid 352, and a base member 506 that constitutes a pressure-contacting member. And a biasing member 507.
[0036]
Similar to the first packing 41 described above, the third packing 503 is a soft packing that has a hole having the same shape as the cross-sectional shape of the spline shaft 11 and is in close contact with the spline shaft 11, and is formed of urethane rubber. Yes.
[0037]
The motor side packing 504 and the lid side packing 505 correspond to the second packing 42 described above, and engage with the groove 44 of the spline shaft 11 to rotate the spline shaft 11 in the direction around the axis thereof. Higher rigidity than the above-described third packing 503, in which the protrusions 453 that do not cause a shift in the rotational direction relative to the spline shaft 11 by rotating the packing 504 and the lid side packing 505 are formed. A pair of packings, which are formed of duracon like the second packing 42. The third packing 503 is disposed between the motor side packing 504 and the lid side packing 505.
[0038]
As shown in FIG. 11, the base member 506 includes a recess 508 having an opening 512 through which the third packing 503 is fitted and through which the spline shaft 11 passes, and a collar 508 provided in the recess 508 to which the biasing member 507 comes into contact. Part 509. Further, the opening 512 in the recess 508 engages with the groove 44 of the spline shaft 11 similarly to the protrusion 453, and the base member 506 is relatively rotated in the rotational direction with respect to the rotation of the spline shaft 11. A protrusion 510 that does not cause a shift is formed.
[0039]
The urging member 507 is provided between the third packing 503 and the motor side packing 504, that is, between the collar portion 509 and the motor side packing 504 in the present embodiment, and has a force of 30 to 40 g. The side packing 504 is pressed against the casing 23 of the voice coil motor 22. In this embodiment, a spring is used as the urging member 507. However, the urging member 507 is not limited to the spring as long as it generates the urging force as described above.
[0040]
By providing the pressure-contact type packing 502 configured as described above, first, as in the case of the first embodiment described above, the motor side packing 504 and the lid side packing 505 are arranged so that the spline shaft 11 moves in the direction around the axis. When rotating, the spline shaft 11 rotates integrally with the spline shaft 11 in contact with the casing 23 and the lid 43. Thus, since the third packing 503 rotates in synchronization with the motor side packing 504 and the lid side packing 505, the spline shaft 11 and the third packing 503 do not shift in the rotation direction, and the space 28 of the voice coil motor 22 is not affected. The occurrence of a situation where the degree of vacuum is reduced can be reduced, so that a sufficient suction operation by the nozzle 6 is ensured. In addition to this, the press-contact type packing 502 forms an air passage through which the air injected by the blow operation leaks to the outside through the contact surface portion 501 between the casing 23 of the voice coil motor 22 and the motor side packing 504. Even in this case, since the motor side packing 504 is pressed against the casing 23 of the voice coil motor 22 by the urging member 507, the air passage formed in the contact surface portion 501 is crushed and blocked when the blow operation is finished. It is. Therefore, the suction operation is not difficult.
[0041]
In the pressure-contact type packing 502, the base member 506 has a recess 508, but the base member 506 is not limited to such a shape. That is, the recess 508 serves to prevent the base member 506 from being displaced relative to the third packing 503. Therefore, it is not necessary to have a concave shape as long as it has such a function. For example, a member for preventing misalignment is added to an annular plate having the functions of the opening 512 and the collar portion 509 as shown in FIG. The shape which projects 513 may be sufficient.
[0042]
【The invention's effect】
According to the component suction head of the present invention, as is apparent from the above description, a closed box is provided which communicates with the nozzle at the tip of the shaft via the hollow hole of the shaft and the communication hole in the middle part of the shaft. In the component suction head in which a packing having a hole having the same shape as the cross-sectional shape of the shaft is provided in a portion through which the shaft passes, and the closed box is connected to the vacuum suction means, the packing has a hole having the same shape as the cross-sectional shape of the shaft. Since the soft first packing that is in close contact with the shaft and the rigid second packing that is in mesh with the groove of the shaft and that has a gap in the portion other than the shaft groove are overlapped , the shaft penetrating portion of the closed box in sealed against external closed box by first packing with a hole having the same shape with respect to the shaft comes into close contact is secured, without leakage of vacuum suction by vacuum suction means Reached nozzle, nozzles can be ensured a sufficient degree of vacuum, and further a second packing rotated with the rotation of the shaft, by with the second packing is first packing rotated, the shaft rotates However, the rotational phase of the first packing and the shaft does not shift, and the sealing is secured by the close contact of the soft first packing, the vacuum suction by the vacuum suction means reaches the nozzle without leaking, and a sufficient degree of vacuum is secured at the nozzle. it is Ru can.
[0043]
Further, it provided between the second packing and said first gasket in contact with the closure box, when the second packing Ru further comprising a biasing member for pressing to said closed box, not leak more vacuum suction It is effective.
[0044]
Furthermore, in the case of including a blow device that is connected to the closed box and returns to the atmospheric pressure state in the closed box, the communication hole, and the hollow hole to release the suction of the components, When the inside of the closed box is returned to the atmospheric pressure state by the blowing device, the urging member presses the second packing against the closed box, and the contact surface between the second packing and the closed box The air passage generated in the portion can be crushed to prevent air leakage during the suction operation by the vacuum suction means.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an overall schematic configuration of a component mounting apparatus including a component suction head according to a reference example of the present invention.
FIG. 2 is a partial longitudinal sectional view showing a schematic configuration of a component suction head of the reference example .
FIG. 3 is a plan view of a packing in the reference example .
FIG. 4 is a partial longitudinal sectional view showing a schematic configuration of a component suction head according to the first embodiment of the present invention.
FIG. 5 is a plan view of a second packing in the same embodiment.
FIG. 6 is an operation explanatory view of first and second packings in the same embodiment.
FIG. 7 is a partial longitudinal sectional view showing a schematic configuration of a conventional component suction head.
FIG. 8 is a cross-sectional plan view taken along the line AA in FIG.
FIG. 9 is a partial longitudinal sectional view showing a schematic configuration of a component suction head according to a second embodiment of the present invention .
10 is a cross-sectional view showing the structure of a pressure-contact type packing provided in the component suction head shown in FIG.
11 is a perspective view of the pressure-contact type packing shown in FIG.
12 is a perspective view of a modification of the pressure-contact type packing shown in FIG.
[Explanation of symbols]
5 Component Adsorption Head 6 Nozzle 9 Suction Device 11 Spline Shaft 12 Nut 13 Nut 20 Electronic Component 23 Casing (Closed Box)
26 Hollow hole 27 Communication hole 31 Packing 41 First packing 42 Second packing 301 Blow device 502 Pressure welding packing

Claims (3)

In a component suction head of a component mounting apparatus that sucks and mounts a component, it is supported so as to be movable in the axial direction by a nut fitted to the outer peripheral surface, and is used to engage a groove formed in the outer peripheral surface with the nut. A shaft that is restricted in the rotational direction is provided, a nozzle that adsorbs parts is provided at the lower end of the shaft, a hollow hole that communicates with the nozzle is provided in the shaft core, and a hollow hole that communicates with the nozzle is provided in the middle of the shaft. A closed box is provided so as to surround the communication hole, and a packing having a hole having the same shape as the cross-sectional shape of the shaft is provided in a portion through which the shaft of the closed box passes, and the closed box is used as a vacuum suction means. a connected component suction head, the packing is soft and first packing engages and shaft groove of the shaft in close contact with the shaft with the hole in the cross-sectional shape and the same shape of the shaft Mizo以 Component suction head locations, characterized in that arranged on top and a second packing having high rigidity having a gap. 2. The component suction head according to claim 1 , further comprising an urging member provided between the second packing and the first packing that contacts the closed box, and presses the second packing against the closed box . A blow device connected to the closed box and returning to the atmospheric pressure state through the closed box, the communication hole, and the hollow hole to release the suction of the component is provided . When the inside of the closed box is returned to the atmospheric pressure state, the urging member presses the second packing against the closed box, and air generated at a contact surface portion between the second packing and the closed box 請 Motomeko 2 wherein the component suction head that to prevent air leakage during the suction operation by the vacuum suction means crush passage.

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