JP3800018B2 - Optical fiber positioning method and two-dimensional optical fiber array - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical transmission line forming technique using an optical fiber, and in particular, an optical fiber positioning method for two-dimensionally positioning end portions of a plurality of optical fibers and 2 in which end portions of a plurality of optical fibers are arranged in a matrix. Dimensional optical fiber array.
[0002]
[Prior art]
Conventionally, as this type of two-dimensional optical fiber array, the one shown in FIGS. 23 and 24, the one shown in FIG. 25, the one shown in FIG. 26, etc. are known (the ones shown in FIGS. No. 10-268145, see Japanese Patent Laid-Open No. 5-224093 for the one shown in FIG. 25, and Japanese Patent Laid-Open No. 10-268145 for the one shown in FIG.
[0003]
FIG. 23 shows a method of constructing an optical fiber array by laminating a plurality of optical fiber blocks. The optical fiber block 1a is made of, for example, a silicon substrate. For this, a groove V having a V-shaped cross section perpendicular to the longitudinal direction is utilized by utilizing the difference in etching rate depending on the crystal orientation of silicon.₁, V₂, V₃... are formed in parallel. Groove V₁, V₂, V₃Are loaded with optical fibers 2a, 2b, 2c,. As in the block 1a, optical fiber blocks 1b, 1c,. Then, as shown in FIGS. 23 and 24, blocks 1a, 1b, 1c... Are stacked and bonded to form an optical fiber array. In this optical fiber array, the end portions of the optical fibers 2a, 2b, 2c... Are arranged in a matrix (two-dimensionally) on the end face of the array body.
[0004]
In the optical fiber array shown in FIGS.₁, V₂, V₃Are formed by photolithography and selective etching treatment, for example, the groove V₁, V₂The lateral groove pitch (optical fiber spacing) corresponding to the spacing between them can be determined with high accuracy.
[0005]
An optical fiber block in which a V-shaped groove is formed on the surface of a quartz substrate by mechanical cutting has been proposed. In such an optical fiber block, the accuracy of the lateral pitch is not good as compared with the fiber block according to the etching process described above.
[0006]
In the two-dimensional optical fiber array shown in FIG. 25, vertical spacers 4a, 4b, 4c... Are arranged on one side of the substrate 3 and a plurality of vertical spacers are arranged on the other side of the substrate 3 in the same manner. Optical fibers 5a, 5b, 5c... Are arranged between the spacers. The horizontal spacers 6a and 6b are arranged on the one side and the other side of the substrate 3 so as to be orthogonal to the optical fibers 5a, 5b, 5c. Similarly, the required number of optical fibers and lateral spacers are stacked. Thereafter, the vertical spacers are pressed from the left and right, and the horizontal spacers are pressed from above with an appropriate force so that the ends of the optical fibers are arranged in a matrix as shown in FIG. 25. In this state, the spaces between the vertical and horizontal spacers are arranged. The vertical and horizontal spacers are fixed by filling the adhesive. An optical fiber or the like is used as the vertical and horizontal spacers.
[0007]
In the two-dimensional optical fiber array shown in FIG. 26, the holes H are formed on the ceramic plate 7a by precision processing such as laser processing.₁, H₂, H₃.. Are formed in a matrix and ceramic plates 7b, 7c,. H₁The ceramic plates 7a, 7b, 7c,... Are laminated and fixed by passing the guide wires through a plurality of holes such as the same. After removing the guide wire from the hole,₁, H₂, H₃.. Are inserted through optical fibers 8a, 8b, 8c. The end faces of the ceramic plate laminate are polished to align the ends of the optical fibers 8a, 8b, 8c.
[0008]
[Problems to be solved by the invention]
According to the prior art shown in FIGS. 23 and 24, since a plurality of optical fiber blocks are stacked, the variation in the thickness of the block (substrate) is accumulated (when the adhesive layer is used, the variation in the thickness is also accumulated). There is a problem in that the accuracy of the vertical groove pitch (optical fiber spacing) decreases.
[0009]
On the other hand, the prior art shown in FIG. 25 or 26 enables two-dimensional high-precision optical fiber arrangement. However, in the optical fiber array shown in FIG. 25, since a large number of vertical and horizontal spacers are handled, it is inevitable that the assembly work becomes complicated. In addition, in the optical fiber array of FIG. 26, it is not easy to align the positions of a large number of holes between a large number of ceramic plates even if precision processing is used, and the optical fibers are respectively placed in the large numbers of holes of the ceramic plate laminate. It is not easy to insert. Therefore, the optical fiber arrays of FIGS. 25 and 26 have a problem that they are difficult to manufacture.
[0010]
An object of the present invention is to provide a novel optical fiber positioning method capable of easily and accurately performing two-dimensional positioning of ends of a plurality of optical fibers.
[0011]
Another object of the present invention is to provide a novel two-dimensional optical fiber array that has two-dimensionally positioned optical fibers with high accuracy at the end face of the array and can be easily manufactured.
[0012]
[Means for Solving the Problems]
  A first optical fiber positioning method according to the present invention includes:
  Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Is formed of a multi-core ferrule provided so as to continuously extend from one end surface to the other end surface, and the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes.An array body that holds a plurality of optical fibers arranged in a matrix.Said oneThe ends of the plurality of optical fibers are arranged in a matrix on the end face, and theOneThe ends of the plurality of optical fibers protrude from the end face.And the depth of each optical fiber holding groove or each optical fiber holding hole so that the protruding portion of each optical fiber can move in a direction parallel to the one end surface when positioning each optical fiber. The diameter was set larger than the diameter of each optical fiberAnd a plurality of positioning holes respectively corresponding to the plurality of optical fibers and having corners are formed in a matrix with the directions of the corners being the same, and the plurality of positioning holes are formed in the array body. Preparing a positioning plate formed with a higher positioning accuracy than the positioning accuracy of the optical fiber;
  SaidOneDisposing the positioning plate on the end surface side and inserting the end portions of the plurality of optical fibers into the plurality of positioning holes, respectively;
  Positioning the end portions of the plurality of optical fibers at corners of the plurality of positioning holes, respectively.When,
  Bonding the positioning plate to the one end surface in a state where the end portions of the plurality of optical fibers are respectively positioned at corners of the plurality of positioning holes;
Is included.
[0013]
According to the first optical fiber positioning method, the array main body holds a plurality of optical fibers, and the positioning plate uses a plurality of positioning holes to perform two-dimensional positioning of the ends of the plurality of optical fibers. Therefore, the array body can roughly position the optical fibers, and the positioning plate can perform two-dimensional positioning of the end portions of the plurality of optical fibers with high accuracy. That is, since a plurality of positioning holes can be formed in a matrix with high positional accuracy by a thin film process or the like on the positioning plate, two-dimensional positioning of the end portions of the plurality of optical fibers can be performed by using such a positioning plate. Can be performed with high accuracy.
[0014]
On the other hand, since the positioning accuracy in the array body may be low, the array body can be manufactured easily and at low cost. Further, since the end portions of the plurality of optical fibers are respectively inserted into the plurality of positioning holes and positioned at substantially the same position (for example, predetermined corners) in the plurality of positioning holes, the positioning holes By providing an allowance in size, the insertion of the optical fiber is facilitated, and positioning is easier than positioning at various positions.
[0015]
  A first two-dimensional optical fiber array according to the present invention includes:
  Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Is formed of a multi-core ferrule provided so as to continuously extend from one end surface to the other end surface, and the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes.An array body that holds a plurality of optical fibers arranged in a matrix,Said oneThe ends of the plurality of optical fibers are arranged in a matrix on the end face, and theOneThe ends of the plurality of optical fibers protrude from the end face.And the depth of each optical fiber holding groove or each optical fiber holding hole so that the protruding portion of each optical fiber can move in a direction parallel to the one end surface when positioning each optical fiber. The diameter was set larger than the diameter of each optical fiberthings and,
  A plurality of positioning holes respectively corresponding to the plurality of optical fibers and having corners are formed in a matrix with the directions of the corners being the same, and the plurality of positioning holes are formed of the optical fibers in the array body. A positioning plate formed with higher positioning accuracy than the positioning accuracy,OneIn the state where the end portions of the plurality of optical fibers are respectively inserted into the plurality of positioning holes on the end surface side,Bonded to one end faceWhat was done,
  Fixing means for fixing the plurality of optical fibers to the positioning plate in a state where the end portions of the plurality of optical fibers are respectively positioned at corners of the plurality of positioning holes;
It is equipped with.
[0016]
In such a configuration, an adhesive such as an ultraviolet curable adhesive can be used as the fixing means, and an auxiliary member such as a pressing member may be used as necessary. The first two-dimensional optical fiber array is suitable for manufacturing by using the first optical fiber positioning method, and two-dimensional positioning of the ends of a plurality of optical fibers using a positioning plate is highly accurate and simple. Therefore, it has high positioning accuracy and can be easily manufactured.
[0017]
  A second optical fiber positioning method according to the present invention includes:
  Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Is formed of a multi-core ferrule provided so as to continuously extend from one end surface to the other end surface, and the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes.An array body that holds a plurality of optical fibers arranged in a matrix.Said oneThe ends of the plurality of optical fibers are arranged in a matrix on the end face, and theOneThe ends of the plurality of optical fibers protrude from the end face.And the depth of each optical fiber holding groove or each optical fiber holding hole so that the protruding portion of each optical fiber can move in a direction parallel to the one end surface when positioning each optical fiber. The diameter was set larger than the diameter of each optical fiberA plurality of first positioning holes respectively corresponding to the plurality of optical fibers formed in a matrix with a positional accuracy higher than the positioning accuracy of the optical fibers in the array body; and Providing a second positioning plate in which a plurality of second positioning holes respectively corresponding to optical fibers are formed in a matrix with a positional accuracy higher than the positioning accuracy of the optical fibers in the array body;
  The first positioning plate isOneDisposing the end portions of the plurality of optical fibers through the plurality of first positioning holes respectively on the end face side; and
  The second positioning plate isThe one through the first positioning plateA step of inserting the end portions of the plurality of optical fibers into the plurality of second positioning holes respectively on the end face side;
  SaidOneThe end portions of the plurality of optical fibers are respectively connected to the first portions of the plurality of optical fibers by sandwiching the end portions of the optical fibers with first and second positioning holes inserted through the optical fibers for each optical fiber on the end surface side. Positioning at substantially the same position in the positioning hole and positioning the ends of the plurality of optical fibers at substantially the same position in the plurality of second positioning holes, respectively.When,
  A state in which the end portions of the plurality of optical fibers are respectively inserted into the plurality of first positioning holes, or the end portions of the plurality of optical fibers are respectively substantially at the same positions in the plurality of first positioning holes. Bonding the first positioning plate to the one end face in a positioned state;
  Bonding the second positioning plate to the first positioning plate with the end portions of the plurality of optical fibers positioned at substantially the same positions in the plurality of second positioning holes, respectively.
Is included.
[0018]
According to the second optical fiber positioning method, the two-dimensional positioning of the end portions of the plurality of optical fibers is performed with high accuracy using the first and second positioning plates in the same manner as described above for the first optical fiber positioning method. And it can be done easily.
[0019]
In addition, the end portions of the optical fibers are inserted into the first positioning holes by sandwiching the end portions of the optical fibers between the first and second positioning holes inserted through the optical fibers for each optical fiber. Since the end portions of the plurality of optical fibers are positioned at substantially the same position in the plurality of second positioning holes, for example, a plurality of the first positioning plates The end portions of the plurality of optical fibers can be collectively positioned by the second positioning plate at substantially the same position in the first positioning hole. Therefore, positioning becomes easier.
[0020]
  A second two-dimensional optical fiber array according to the present invention includes:
  Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Is formed of a multi-core ferrule provided so as to continuously extend from one end surface to the other end surface, and the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes.An array body that holds a plurality of optical fibers arranged in a matrix,Said oneThe ends of the plurality of optical fibers are arranged in a matrix on the end face, and theOneThe ends of the plurality of optical fibers protrude from the end face.And the depth of each optical fiber holding groove or each optical fiber holding hole so that the protruding portion of each optical fiber can move in a direction parallel to the one end surface when positioning each optical fiber. The diameter was set larger than the diameter of each optical fiberthings and,
  A plurality of first positioning holes respectively corresponding to the plurality of optical fibers, wherein the first positioning plates are formed in a matrix with a positional accuracy higher than the optical fiber positioning accuracy in the array body,OneThe end portions of the plurality of optical fibers at the end face side are respectively inserted into the plurality of first positioning holes,
  A plurality of second positioning holes respectively corresponding to the plurality of optical fibers, wherein the second positioning plates are formed in a matrix with a positional accuracy higher than the optical fiber positioning accuracy in the array body,In a state where it is arranged on the one end face through the first positioning plateThe end portions of the plurality of optical fibers are respectively inserted into the plurality of second positioning holes, and
  SaidOneThe end portions of the plurality of optical fibers are respectively connected to the first portions of the plurality of optical fibers by sandwiching the end portions of the optical fibers with first and second positioning holes inserted through the optical fibers for each optical fiber on the end surface side. The optical fiber is positioned at substantially the same position in the positioning hole and the ends of the plurality of optical fibers are positioned at substantially the same position in the plurality of second positioning holes, respectively.Bonding the first positioning plate to the one end face and the second positioning plate to the first positioning plate, respectivelyIt is a thing.
[0021]
The second two-dimensional optical fiber array is suitable for manufacturing by using the second optical fiber positioning method, and the first and second positioning plates are used to two-dimensionally end the plurality of optical fibers. Since positioning can be performed with high accuracy and ease, it has high positioning accuracy and can be easily manufactured.
[0022]
  A third optical fiber positioning method according to the present invention includes:
  Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Is formed of a multi-core ferrule provided so as to continuously extend from one end surface to the other end surface, and the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes.An array body that holds a plurality of optical fibers arranged in a matrix.Said oneThe ends of the plurality of optical fibers form a matrix composed of a plurality of rows and a plurality of columns at the end face, andOneArranged to protrude from the end faceAnd the depth of each optical fiber holding groove or each optical fiber holding hole so that the protruding portion of each optical fiber can move in a direction parallel to the one end surface when positioning each optical fiber. The diameter was set larger than the diameter of each optical fiberAnd a first positioning plate in which a plurality of elongated first positioning holes respectively corresponding to the plurality of rows (or the plurality of columns) are formed with higher positional accuracy than optical fiber positioning accuracy in the array body. A plurality of first locking portions for positioning a plurality of optical fibers in a row (or column) corresponding to each first positioning hole are arranged on one side along the longitudinal direction of the first positioning hole. And a second positioning plate in which a plurality of elongated second positioning holes respectively corresponding to the plurality of rows (or the plurality of columns) are formed with a positional accuracy higher than the optical fiber positioning accuracy in the array body The plurality of second locking portions for positioning the plurality of optical fibers in the corresponding row (or column) for each second positioning hole is the other side along the longitudinal direction of the second positioning hole. In A step of preparing a to that set,
  The first positioning plate isOneInserting the ends of a plurality of optical fibers in a row (or column) corresponding to each first positioning hole disposed on the end surface side; and
  The second positioning plate isThe one through the first positioning plateInserting the ends of a plurality of optical fibers in a row (or column) corresponding to each second positioning hole disposed on the end face side; and
  SaidOnePositioning the end of the optical fiber with the first and second engaging portions corresponding to each optical fiber on the end face sideWhen,
  A state in which the end portions of the plurality of optical fibers in the corresponding row (or column) are inserted into each first positioning hole or in the first and second engaging portions corresponding to each optical fiber Adhering the first positioning plate to the one end surface in a state of being positioned across the end; and
Adhering the second positioning plate to the first positioning plate in a state in which the end portions of the optical fiber are positioned between the first and second engaging portions corresponding to each optical fiber;
Is included.
[0023]
According to the third optical fiber positioning method, the two-dimensional positioning of the ends of the plurality of optical fibers is performed with high accuracy using the first and second positioning plates as described above for the first optical fiber positioning method. And it can be done easily.
[0024]
In addition, the first and second engaging portions corresponding to each optical fiber can be collectively positioned with the end portion of the optical fiber interposed therebetween. Therefore, positioning becomes easier.
[0025]
  A third two-dimensional optical fiber array according to the present invention includes:
  Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Is formed of a multi-core ferrule provided so as to continuously extend from one end surface to the other end surface, and the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes.An array body that holds a plurality of optical fibers arranged in a matrix,Said oneThe ends of the plurality of optical fibers form a matrix composed of a plurality of rows and a plurality of columns at the end face, andOneArranged to protrude from the end faceAnd the depth of each optical fiber holding groove or each optical fiber holding hole so that the protruding portion of each optical fiber can move in a direction parallel to the one end surface when positioning each optical fiber. The diameter was set larger than the diameter of each optical fiberthings and,
  A plurality of elongated first positioning holes respectively corresponding to the plurality of rows (or a plurality of columns) are first positioning plates formed with higher positional accuracy than optical fiber positioning accuracy in the array body, A plurality of first locking portions for positioning a plurality of optical fibers in a row (or column) corresponding to each positioning hole are arranged in parallel on one side along the longitudinal direction of the first positioning hole, SaidOneThe end portions of the plurality of optical fibers in the corresponding row (or column) are inserted into the first positioning holes on the end surface side, and
  A plurality of elongated second positioning holes respectively corresponding to the plurality of rows (or the plurality of columns) are second positioning plates formed with higher positional accuracy than optical fiber positioning accuracy in the array body, A plurality of second locking portions for positioning the plurality of optical fibers in the corresponding row (or column) for each of the two positioning holes;SecondIt is arranged in parallel on the other side along the longitudinal direction of the positioning hole,In a state of being arranged on the one end face side through the first positioning plateA plurality of optical fiber ends of a corresponding row (or column) are inserted into each second positioning hole, and
  SaidOneIn the state where the end portion of the optical fiber is positioned between the first and second engaging portions corresponding to each optical fiber on the end face side, and positioned.Bonding the first positioning plate to the one end face and the second positioning plate to the first positioning plate, respectivelyIt is a thing.
[0026]
The third two-dimensional optical fiber array is suitable for manufacturing by using the third optical fiber positioning method, and uses the first and second positioning plates to two-dimensionally end the plurality of optical fibers. Since positioning can be performed with high accuracy and ease, it has high positioning accuracy and can be easily manufactured.
[0027]
  A fourth optical fiber positioning method according to the present invention includes:
  Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Is formed of a multi-core ferrule provided so as to continuously extend from one end surface to the other end surface, and the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes.An array body that holds a plurality of optical fibers arranged in a matrix.Said oneThe ends of the plurality of optical fibers form a matrix composed of a plurality of rows and a plurality of columns at the end face, andOneArranged to protrude from the end faceAnd the depth of each optical fiber holding groove or each optical fiber holding hole so that the protruding portion of each optical fiber can move in a direction parallel to the one end surface when positioning each optical fiber. The diameter was set larger than the diameter of each optical fiberAnd a plurality of first positioning plates respectively corresponding to the plurality of rows, and a plurality of first positioning holes respectively corresponding to the plurality of optical fibers in the corresponding row are used to position the optical fibers in the array body. And a plurality of second positioning holes each corresponding to a plurality of optical fibers in a corresponding row, each of which is formed with a higher positional accuracy than the accuracy, and a plurality of second positioning plates respectively corresponding to the plurality of rows. Is prepared with a position accuracy higher than the positioning accuracy of the optical fiber in the array body,
  The plurality of first positioning plates areOneInserting the end portions of a plurality of optical fibers in a row corresponding to each first positioning plate through the plurality of first positioning holes, respectively, on the end surface side; and
  The plurality of second positioning plates areThe one of the first positioning plates via the plurality of first positioning platesInserting the end portions of a plurality of optical fibers in a row corresponding to each second positioning plate through the plurality of second positioning holes, respectively, on the end surface side; and
  SaidOneThe plurality of first positioning holes for each first positioning plate by sandwiching the end portions of the optical fibers with first and second positioning holes inserted through the optical fibers for each optical fiber on the end surface side The ends of the plurality of optical fibers inserted through the plurality of optical fibers are positioned at substantially the same position in the plurality of first positioning holes, and inserted into the plurality of second positioning holes for each second positioning plate. Positioning the ends of the plurality of optical fibers at substantially the same position in the plurality of second positioning holes, respectively.When,
  For each first positioning plate, the end portions of the plurality of optical fibers inserted through the plurality of first positioning holes are positioned at substantially the same positions in the plurality of first positioning holes, and The plurality of optical fibers inserted into the plurality of second positioning holes for each of the two positioning plates are positioned at substantially the same position in the plurality of second positioning holes, respectively. Bonding the first positioning plate to the one end surface and bonding the plurality of second positioning plates to the plurality of first positioning plates;
Is included.
[0028]
According to the fourth optical fiber positioning method, as described above with respect to the first optical fiber positioning method, a plurality of first positioning plates and a plurality of second positioning plates are used to form ends of the plurality of optical fibers. Two-dimensional positioning can be easily performed with high accuracy.
[0029]
In addition, the first and second positioning holes through which the optical fibers are inserted are inserted into the plurality of first positioning holes for each first positioning plate. A plurality of light beams that are positioned at substantially the same position in the plurality of first positioning holes and inserted into the plurality of second positioning holes for each second positioning plate. Since the end portions of the fibers are positioned at substantially the same positions in the plurality of second positioning holes, the end portions of the plurality of optical fibers can be positioned in units of rows or columns. The degree of freedom increases.
[0030]
  A fourth two-dimensional optical fiber array according to the present invention is:
  Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Is formed of a multi-core ferrule provided so as to continuously extend from one end surface to the other end surface, and the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes.An array body that holds a plurality of optical fibers arranged in a matrix,Said oneThe ends of the plurality of optical fibers form a matrix composed of a plurality of rows and a plurality of columns at the end face, andOneArranged to protrude from the end faceAnd the depth of each optical fiber holding groove or each optical fiber holding hole so that the protruding portion of each optical fiber can move in a direction parallel to the one end surface when positioning each optical fiber. The diameter was set larger than the diameter of each optical fiberthings and,
  A plurality of first positioning plates respectively corresponding to the plurality of rows, wherein the plurality of first positioning holes respectively corresponding to the plurality of optical fibers in the corresponding row are based on the positioning accuracy of the optical fibers in the array body. Formed with high positional accuracy andOneThe end portions of the plurality of optical fibers in the corresponding row on the end face side are respectively inserted into the plurality of first positioning holes,
  A plurality of second positioning plates respectively corresponding to the plurality of rows, wherein a plurality of second positioning holes respectively corresponding to the plurality of optical fibers in the corresponding row are higher than the positioning accuracy of the optical fibers in the array body Form with position accuracyIn each of the second positioning plates, the plurality of second positioning plates are arranged on the one end face via the plurality of first positioning plates.The ends of the plurality of optical fibers in the corresponding row are respectively inserted into the plurality of second positioning holes,
  SaidOneThe plurality of first positioning holes for each first positioning plate by sandwiching the end portions of the optical fibers with first and second positioning holes inserted through the optical fibers for each optical fiber on the end surface side The ends of the plurality of optical fibers inserted through the plurality of optical fibers are positioned at substantially the same position in the plurality of first positioning holes, and inserted into the plurality of second positioning holes for each second positioning plate. The end portions of the plurality of optical fibers are positioned at substantially the same positions in the plurality of second positioning holes, respectively.The plurality of first positioning plates are bonded to the one end surface, and the plurality of second positioning plates are bonded to the plurality of first positioning plates, respectively.It is a thing.
[0031]
The fourth two-dimensional optical fiber array is suitable for manufacturing using a fourth optical fiber positioning method, and a plurality of optical fibers using a plurality of first positioning plates and a plurality of second positioning plates. Since the two-dimensional positioning of the end portion of the head can be performed with high accuracy and ease, it can be easily manufactured with high positioning accuracy.
[0032]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows a two-dimensional optical fiber array according to an embodiment of the present invention in an exploded state.
[0033]
The holding substrate 10a is made of, for example, a quartz substrate, and a groove V having a V-shaped cross section perpendicular to the longitudinal direction is formed on one main surface thereof.₁, V₂, V₃... are formed in parallel. Each groove is for holding an optical fiber, and is formed to extend from one end of the holding substrate 10a to the other end and to have a depth larger than the diameter of the optical fiber. As the holding substrate 10a, a substrate having good ultraviolet transmittance is used in order to make it possible to use an ultraviolet curable adhesive in a process of fixing an optical fiber or the like.
[0034]
In the present invention, since high accuracy is not required for positioning of the optical fiber in the array body, the groove V is formed by machining using the cutting tool 18 as illustrated in FIG.₁, V₂, V₃... can be formed. Therefore, the manufacturing process is simplified and the cost can be reduced. The holding substrates 10b, 10c,... Are prepared in the same manner as the holding substrate 10a.
[0035]
In the holding substrate 10a, the groove V₁, V₂, V₃... the optical fiber 12a₁, 12a₂, 12a₃... are arranged. Each optical fiber is disposed in a corresponding groove so that its end protrudes from the end surface of the holding substrate 10a by about L = several hundreds μm, and is not fixed to the holding substrate 10 before assembling. It can move left and right. Similarly to the holding substrate 10a, the optical fiber 12b is also formed in the groove of the holding substrate 10b.₁, 12b₂, 12b₃Are arranged in the same manner, and the optical fibers are also arranged in the grooves of the holding substrate 10c and the like.
[0036]
As described above, the array body is configured by stacking the holding substrates 10a, 10b, 10c... Holding the optical fibers. In order to prevent the optical fiber from falling off from the uppermost holding substrate, a pressing plate is disposed on the uppermost holding substrate. The holding substrates 10a, 10b, 10c,... And the pressing plate are fixed with an ultraviolet curing adhesive in an overlapped state. As a result, an array body having a shape in which optical fiber ends are arranged in a matrix (two-dimensional) on the end face is obtained, as shown in FIG. As an example, the array body can have 8 × 8 = 64 optical fibers. Each optical fiber may be fixed at the end opposite to the movable protrusion before the holding substrates are stacked as described above. If it does in this way, an optical fiber will not drop | omit at the time of stacking work, but work will be easy.
[0037]
On the other hand, positioning plates 14 and 16 are prepared separately from the array body described above. These positioning plates are for performing two-dimensional positioning of the ends of the plurality of optical fibers with high accuracy on the end face of the array body. As will be described later with reference to FIGS. Or the like is used to form the positioning hole with high positional accuracy.
[0038]
The positioning plate 14 is made of a material (for example, Al) that has good ultraviolet transparency and corrosion resistance.₂O₃, ZrO₂, SiO₂In the example in which the array body includes 8 × 8 optical fibers as described above, it has a size of about 3 × 3 mm. The positioning plate 14 includes a plurality of positioning holes P corresponding to the plurality of rows and the plurality of columns of the optical fiber arrangement.₁₁, P₁₂..., P₂₁, P₂₂... are formed in a matrix. Each positioning hole is 12a₁And having a size larger than the diameter of the optical fiber, such as a rhombus as shown in FIG.₁₁, P₁₂Hole pitch Px in the row direction (lateral direction) corresponding to the interval of₁And hole P₁₁, P₂₁Hole pitch Py in the column direction (vertical direction) corresponding to the interval of₁Can be 250 μm. 10 to 15, the hole pitch error can be suppressed within ± 1 μm, so the hole pitch Px in the row direction and the column direction can be reduced.₁And Py₁Are both 250 ± 1 μm, and high-precision two-dimensional positioning is possible for the optical fibers of the array body.
[0039]
The positioning hole 16 is also formed in the positioning plate 16 in the same manner as the positioning plate 14.₁₁, Q₁₂..., Q₂₁, Q₂₂... is formed. In this case, hole Q₁₁, Q₁₂..., Q₂₁, Q₂₂... corresponding holes P in the positioning plate 14₁₁, P₁₂..., P₂₁, P₂₂... and so that the direction is reversed. Hole Q as shown in FIG.₁₁, Q₁₂Hole pitch Px in the row direction corresponding to the interval of₂And hole Q₁₁, Q₂₁Hole pitch Py in the column direction corresponding to the interval of₂Are the hole pitches Px in the positioning plate 14, respectively.₁And Py₁Is set equal to
[0040]
When assembling the two-dimensional optical fiber array of FIG. 1, first, the positioning plate 14 is arranged on the end face side of the array body to position the positioning hole P.₁₁, P₁₂..., P₂₁, P₂₂... in each of the optical fibers 12a₁, 12a₂..., 12b₁, 12b₂Insert the end of…. Then, in such an inserted state, the positioning plate 14 is fixed to the end surface of the array body with an ultraviolet curable adhesive.
[0041]
Next, the positioning plate 16 is disposed on the end face side of the array body via the positioning plate 14 to position the positioning hole Q.₁₁, Q₁₂..., Q₂₁, Q₂₂... in each of the optical fibers 12a₁, 12a₂..., 12b₁, 12b₂Insert the end of…. Then, as shown in FIG. 2, a positioning hole (for example, an optical fiber 12a) is inserted through the end of each optical fiber.₁For hole P₁₁, Q₁₁) To adjust the relative positions of the positioning plates 14 and 16 (for example, the plates 14 and 16 are slid in the opposite directions such as upward and downward).₁, 12a₂..., 12b₁, 12b₂The end of each hole P₁₁, P₁₂..., P₂₁, P₂₂The optical fiber 12a is positioned at substantially the same position (for example, the downward corner of the rhombus).₁, 12a₂..., 12b₁, 12b₂The end of each hole Q₁₁, Q₁₂..., Q₂₁, Q₂₂... are positioned at substantially the same position (for example, the upward corner of the rhomboid hole). Such positioning can be performed collectively for all optical fibers, and the positioning operation is simple and quick.
[0042]
Next, in the positioning state as described above, the positioning plate 16 is fixed to the positioning plate 14 with an ultraviolet curable adhesive, and each optical fiber is fixed to the positioning plates 14 and 16 with an ultraviolet curable adhesive. Thereafter, the main surface of the positioning plate 16 from which the end portion of the optical fiber protrudes is polished so that the end surface of each optical fiber forms a common plane with the main surface of the positioning plate 16.
[0043]
The two-dimensional optical fiber array shown in FIGS. 1 and 2 can be easily assembled as described above, and high positioning accuracy can be obtained for the two-dimensional arrangement of the optical fiber array.
[0044]
In the example described above, the positioning plates 14 and 16 are separately mounted on the array body, but may be mounted simultaneously. That is, the positioning plates 14 and 16 are arranged on the end face side of the array body, the optical fiber end portions are inserted into the positioning holes, and then the relative positions of the positioning plates 14 and 16 are adjusted to two-dimensionally the optical fiber end portions Perform positioning. In such a positioning state, the UV curable adhesive is used to fix the positioning plate 14 to the array body, the positioning plate 16 to the positioning plate 14, and the optical fibers to the positioning plates 14 and 16. At the same time.
[0045]
In the above example, the end of each optical fiber is connected to the hole P.₁₁, P₁₂, P₂₁, P₂₂As for…, positioning at the downward corner of the diamond-shaped hole and the hole Q₁₁, Q₁₂, Q₂₁, Q₂₂For ..., it was positioned at the upward corner of the diamond-shaped hole.₁₁, Q₁₁As long as the positioning holes are sandwiched, the corners facing each other may be positioned at other corners. For example, the end of each optical fiber is₁₁, P₁₂, P₂₁, P₂₂As for…, positioning at the upward corner and hole Q₁₁, Q₁₂, Q₂₁, Q₂₂... May be positioned at the downward corners.
[0046]
3 and 4 show a modified example of positioning with respect to the two-dimensional optical fiber array of FIGS. 1 and 2, and the same parts as those of FIGS. 3 and 4, the positioning hole P₁₁, P₁₂, P₂₁, P₂₂..., Q₁₁, Q₁₂, Q₂₁, Q₂₂Each is characterized by a square shape.
[0047]
In the example of FIG. 3, the end of each optical fiber has a hole P₁₁, P₁₂, P₂₁, P₂₂As for…, it is positioned at the downward corner of the square and the hole Q₁₁, Q₁₂, Q₂₁, Q₂₂... is positioned at the upward corner of the square. Moreover, in the example of FIG.₁₁, P₁₂, P₂₁, P₂₂As for…, it is positioned at the left corner of the square and the hole Q₁₁, Q₁₂, Q₂₁, Q₂₂... is positioned at the right corner. In the example of FIGS.₁₁, Q₁₁As long as the positioning holes such as sandwiching positioning corners face each other, they may be positioned at other corners.
[0048]
In the example of FIGS. 3 and 4, since each positioning hole has a square shape, the occupied area of the positioning hole is reduced as compared with the diamond-shaped hole, and the positioning plates 14 and 16 can be prevented from having insufficient mechanical strength. it can. The number of optical fibers in the array body is expected to increase to about 1000 × 1000 in the future while maintaining the current positioning hole pitch. When the number of positioning holes increases with such an increase in the number of optical fibers, the mechanical strength of the positioning plate tends to decrease. If the positioning hole is square, such a decrease in mechanical strength can be suppressed.
[0049]
FIG. 5 shows a modification of the positioning plate. In this example, the positioning plate 14 is provided with longitudinally long positioning holes Pa, Pb... In the vertical direction, and the positioning plate 16 is provided with laterally elongated positioning holes Qa, Qb... In the holes Pa, Pb. Correspondingly, they are arranged in the vertical direction. The hole Pa is the positioning hole P described above.₁₁, P₁₂... has a shape that continues in the lateral direction while leaving the upward corners, and the hole Pb is also the positioning hole P described above.₂₁, P₂₂Has a continuous shape as in the case of Pa. The hole Qa is the aforementioned positioning hole Q₁₁, Q₁₂... has a shape in which the downwardly facing corners are left laterally continuous, and the hole Qb is also the positioning hole Q described above.₂₁, Q₂₂Has a continuous shape as in the case of Qa.
[0050]
The usage of the positioning plates 14 and 16 shown in FIG. 5 is the same as that described above with reference to FIGS. According to the positioning plates 14 and 16 of FIG. 5, the upward corners in the holes such as Pa and Pb and the downward corners in the holes such as Qa and Qb are made by shifting the positioning plates 14 and 16 downward and upward, respectively. High-precision two-dimensional positioning can be performed by sandwiching the end portion of the optical fiber in correspondence. Further, since corners adjacent to each hole such as Pa and Qa can be arranged at a minute pitch, it is possible to cope with higher density of optical fiber arrangement.
[0051]
In the above description regarding the positioning plates 14 and 16 in FIG. 5, by shifting the positioning plates 14 and 16 downward and upward, respectively, upward corners in holes such as Pa and Pb and downward corners in holes such as Qa and Qb However, by shifting the positioning plates 14 and 16 to the right and left, respectively, the left-facing corner in the holes such as Pa and Pb and the right-facing corner in the holes such as Qa and Qb are arranged. By sandwiching the end of the optical fiber or shifting the positioning plates 14 and 16 to the left and right, respectively, the right-facing corner of the hole such as Pa and Pb and the left-facing corner of the hole such as Qa and Qb The end of the optical fiber may be sandwiched.
[0052]
Further, the positioning plate 14 may be provided with holes similar to Qa, Qb..., And the positioning plate 16 may be provided with holes similar to the holes Pa, Pb. In this way, the end portions of the optical fiber can be sandwiched between the downward corner portion of the hole in the positioning plate 14 and the upward corner portion of the hole in the positioning plate 16 by shifting the positioning plates 14 and 16 upward and downward, respectively. .
[0053]
FIG. 6 shows a two-dimensional optical fiber array according to another embodiment of the present invention in a disassembled state, and the same parts as those in FIG.
[0054]
The embodiment of FIG. 6 has a plurality of positioning plates 14a, 14b, 14c,... Corresponding to a plurality of rows of optical fiber arrangements in the array body and a plurality of columns of optical fiber arrangements in the array body. That is, a plurality of positioning plates 16a, 16b (see FIG. 7) are prepared.
[0055]
The positioning plate 14a has positioning holes P corresponding to the plurality of optical fibers in the corresponding row.₁₁, P₁₂... are formed, and the positioning hole P is similarly formed in the positioning plate 14b.₂₁, P₂₂The same applies to the positioning plates 14c for the other rows. The positioning plate 16a has positioning holes Q corresponding to the plurality of optical fibers in the corresponding row.₁₁, Q₂₁... are formed, and the positioning hole 16 is similarly formed in the positioning plate 16b.₁₂, Q₂₂The same applies to the positioning plates corresponding to the other rows. Each positioning plate can be prepared by the method described later with reference to FIGS. Each positioning hole is 12a₁It has a size larger than the diameter of the optical fiber such as, and can be circular as an example. Further, the hole pitch Px in the row direction and the hole pitch Py in the column direction are respectively the above-described hole pitch Px.₁And Py₁It can be set in the same way.
[0056]
When assembling the two-dimensional optical fiber array shown in FIG.₁₁, P₁₂... in each of the optical fibers 12a₁, 12a₂... and the positioning plate 14a is inserted into the positioning hole P as shown in FIG.₁₁, P₁₂Optical fiber 12a at the top of₁, 12a₂.. Are engaged with the ends of. Similarly, the positioning plate 14b is moved to the positioning hole P.₂₁, P₂₂... optical fiber 12b above₁, 12b₂The same applies to the positioning plates 14c and the like corresponding to the other rows.
[0057]
Next, the positioning plate 16a is arranged in front of the positioning plates 14a, 14b, 14c.₁₁, Q₂₁... in each of the optical fibers 12a₁, 12b₁Insert the end of…. Similarly, the positioning hole Q of the positioning plate 16b₁₂, Q₂₂... in each of the optical fibers 12a₂, 12b₂The same applies to the positioning plates corresponding to the other rows through the end of. Then, as shown in FIG. 7, a positioning hole (for example, an optical fiber 12a) through which the end portion of each optical fiber is inserted.₁For hole P₁₁, Q₁₁) And the positioning plates 16a, 16b... Are adjusted so that the end portions of the optical fibers are positioned at substantially the same positions in the positioning holes (for each positioning plate corresponding to each row). For example, the optical fiber 12a is used for the positioning plate 14a.₁, 12a₂... the end of the hole P₁₁, P₁₂.. And the end of the optical fiber for each positioning plate corresponding to each row is positioned at substantially the same position in the positioning hole (for example, the optical fiber 12a for the positioning plate 16a).₁, 12b₁... the end of the hole Q₁₁, Q₂₁Position at the bottom of…. In order to temporarily fix such a positioning state, temporary fixing may be performed.
[0058]
Next, in the positioning state as described above, the positioning plates 14a, 14b, 14c,... Are fixed to the substrates 10a, 10b, 10c,. The plates 16a, 16b,... Are fixed with an ultraviolet adhesive, and a positioning plate (for example, an optical fiber 12a) for inserting each optical fiber.₁Are fixed to the positioning plates 14a, 16a) with an ultraviolet adhesive. Thereafter, the main surfaces of the positioning plates 16a, 16b,... From which the end portions of the optical fibers protrude are subjected to a polishing process so that each positioning plate has a flat main surface without the protruding portions of the end portions of the optical fibers.
[0059]
The two-dimensional optical fiber array shown in FIGS. 6 and 7 can be easily assembled as described above, and high positioning accuracy can be obtained for the two-dimensional arrangement of optical fibers.
[0060]
FIG. 8 shows a modified example of positioning with respect to the two-dimensional optical fiber array of FIGS. 6 and 7, and the same parts as those in FIGS.
[0061]
In the example of FIG. 8, the optical fiber 12a₁, 12b₁The end of… is the hole P₁₁, P₁₂... is positioned at the left of the circular hole and the hole Q₁₁, Q₁₂... is positioned at the right part of the circular hole. Also, the optical fiber 12b₁, 12b₂The end of… is the hole P₂₁, P₂₂... is positioned at the left of the circular hole and the hole Q₂₁, Q₂₂... is positioned at the right part of the circular hole. In the examples of FIGS.₁₁, Q₁₁As long as it is a part which mutually opposes about the positioning holes which pinch | interpose etc., you may position to another part.
[0062]
In the examples of FIGS. 7 and 8, each positioning hole has a circular shape, so that the area occupied by the positioning hole is reduced as compared with the square hole, and each positioning plate can be prevented from having insufficient mechanical strength.
[0063]
Next, a method for manufacturing the positioning plate will be described with reference to FIGS. In the process of FIG. 10, a Cu layer 24 is formed on one main surface of a substrate 20 made of glass, for example, via a Cr layer 22. Both the Cr layer 22 and the Cu layer 24 can be formed by a sputtering method or the like. The Cr layer 22 is formed as an adhesion layer for improving adhesion because the Cu layer 24 does not have good adhesion to glass.
[0064]
In the step of FIG. 11, a resist layer is formed on the Cu layer 24 by a well-known photolithography process and patterned to leave the resist layers 26a, 26b, 26c... Corresponding to the positioning holes on the Cu layer 24. .
[0065]
In the step of FIG. 12, an oxide (oxide) layer 28 is formed on the Cu layer 24 so as to cover the resist layers 26a, 26b, 26c. The oxide layer 28 finally becomes a positioning plate, and the material of the layer 28 is Al.₂O₃, ZrO₂, SiO₂It is desirable to use materials such as those having low hygroscopicity and low thermal expansion.
[0066]
In the process of FIG. 13, by polishing the surface of the substrate 20 on which the oxide layer 28 is formed, the rioxide layer 28 and the resist layers 26a, 26b, 26c. The remaining thickness of the oxide layer 28 (the thickness of the positioning plate) can be 50 to 100 μm.
[0067]
In the process of FIG. 14, the resist layers 26a, 26b, 26c... Are removed by chemical treatment. As a result, the oxide layer 28 has positioning holes 28a, 28b, 28c... Corresponding to the resist layers 26a, 26b, 26c.
[0068]
In the process of FIG. 15, the Cu layer 24 and the Cr layer 22 are sequentially removed by wet etching, and the oxide layer 28 is peeled off from the substrate 20. The peeled oxide layer 28 can be used as the positioning plate 14a or 16a shown in FIGS.
[0069]
FIGS. 16-21 shows the manufacturing method of a metal positioning board. In the process of FIG. 16, a substrate 20 such as glass having a Cu layer 24 formed on one main surface through a Cr layer 22 is prepared in the same manner as in the process of FIG. 10 described above. Then, a Ni—Fe alloy (permalloy) layer 25 is formed on the Cu layer 24 by sputtering or the like. The Ni—Fe alloy layer 25 is used as a plating underlayer.
[0070]
In the process of FIG. 17, resist layers 26a, 26b, 26c... Corresponding to the desired number of positioning holes are formed on the Ni—Fe alloy layer 25 in the same manner as in the process of FIG.
[0071]
In the step of FIG. 18, the Ni—Fe alloy layer 27 is formed on the Ni—Fe alloy layer 25 by selective plating using the resist layers 26a, 26b, 26c. The Ni—Fe alloy layer 27 finally constitutes a positioning plate together with the Ni—Fe alloy layer 25, and is thicker than the Ni—Fe alloy layer 25 and formed with a thickness corresponding to the thickness of the desired positioning plate. .
[0072]
19, the resist layers 26a, 26b, 26c,... Are removed by chemical treatment. As a result, the Ni—Fe alloy layer 27 has positioning holes 27a, 27b, 27c... Corresponding to the resist layers 26a, 26b, 26c.
[0073]
In the process of FIG. 20, the Ni—Fe alloy layers 25, 27 are etched to remove the Ni—Fe alloy layer 25 at the bottoms of the positioning holes 27a, 27b, 27c.
[0074]
In the process of FIG. 21, the positioning plate made of Ni—Fe alloy layers 25 and 27 is separated from the substrate 20 by removing the Cu layer 24 by wet etching. This positioning plate can be used as the positioning plate 14a or 16a shown in FIGS.
[0075]
Since the positioning plate described above with reference to FIGS. 16 to 21 is made of metal and has malleability, there is an advantage that the positioning plate does not bend when the optical fiber is sandwiched between the positioning holes.
[0076]
The above is a method of manufacturing the positioning plate for one row or one column, but by forming the positioning holes in a matrix in the same manner as described above, the positioning plate 14 or 16 shown in FIGS. Can be formed.
[0078]
FIG. 22 shows another array body that can be used in the present invention. This array body has holes H provided in a multi-core ferrule 30 in a matrix (two-dimensional).₁₁, H₁₂... H₂₁, H₂₂Are inserted through optical fibers 32a, 32b,. The multi-core ferrule 30 is made of, for example, zirconia or the like, and is manufactured by loosening the hole tolerance. As an example, H₁₁The diameter of part A of the hole is 140 μm, H₁₁-H₁₂Direction hole pitch x is 250 μm, H₁₁-H₂₁The hole pitch in the direction can be 300 μm. H₁₁The B part of the holes such as the same is formed in a shape (funnel shape) which is continuous with the A part and gradually increases in diameter toward the outside.
[0079]
When positioning the end of the optical fiber, the multi-core ferrule 30 can be₁₁And so that the B part of the hole such as₁₁Each optical fiber such as 32a is inserted from bottom to top for each hole such as. In such an insertion state, the optical fiber is fixed in the hole of the B part for each hole by the ultraviolet curable adhesive, and the optical fiber is allowed to move freely from the A part. Since ultraviolet rays are irradiated from below during the bonding process, the multi-core ferrule 30 is not limited to an ultraviolet ray transmissive material such as silicon oxide, but may be an ultraviolet ray opaque material such as metal.
[0080]
When positioning the ends of the optical fibers 32a, 32b..., The positioning plates 14 and 16 as shown in FIGS. In the same manner as described above, the end portion of each optical fiber is inserted into the corresponding holes of the positioning plates 14 and 16 and is sandwiched by these holes, so that two-dimensional high-precision positioning is performed. In such a positioning state, the positioning plates 14 and 16 are fixed to the multi-core ferrule 30 and the optical fibers are fixed to the corresponding holes in the positioning plates 14 and 16 using an ultraviolet adhesive. The positioning method described above with reference to FIG. 22 has an advantage that the positioning operation is easier than the positioning method described above with reference to FIG.
[0081]
The present invention is not limited to the above-described embodiment, and can be implemented in various modifications. For example, the following changes are possible.
[0082]
(1) In the embodiment shown in FIG. 1, the optical fiber end portion may be positioned or fixed using a positioning plate such as 14 a or 16 a shown in FIGS. Further, positioning or fixing may be performed by pressing a side portion of the bar-shaped member without providing a positioning hole in the bar-shaped member such as 14a and 16a.
[0083]
(2) The shape of the positioning hole is not limited to the above, and may be an ellipse, a semicircle, a triangle, a polygon, or the like. In the embodiment of FIG. 1, a circular positioning hole as shown in FIGS. 6 and 7 may be used, or in the embodiment of FIG. 6, a diamond-shaped positioning hole as shown in FIGS. Square positioning holes as shown in FIGS. 3 and 4 may be used.
[0084]
(3) In the positioning plates 14 and 16 shown in FIG. 5, the positioning locking portions arranged side by side along the longitudinal direction of the positioning holes such as Pa or Qa are not limited to the corner portions as described above, A circular part, a semi-elliptical part, a concave part, etc. may be sufficient.
[0085]
【The invention's effect】
As described above, according to the present invention, since the positioning plate different from the array main body holding the plurality of optical fibers is used, the two-dimensional positioning of the ends of the plurality of optical fibers can be performed with high accuracy. The effect that a two-dimensional optical fiber array that is easy to manufacture can be realized is obtained.
[0086]
In addition, since the array body does not require high accuracy for positioning of the optical fiber, there is also an effect that the array body can be easily manufactured at low cost.
[Brief description of the drawings]
FIG. 1 is a perspective view showing components of a two-dimensional optical fiber array according to an embodiment of the present invention.
2 is an end view showing a positioning state of an end portion of the optical fiber in the optical fiber array of FIG. 1. FIG.
FIG. 3 is an end view showing a modified example of positioning.
FIG. 4 is an end view showing another modified example of positioning.
FIG. 5 is a perspective view showing a modification of the positioning plate.
FIG. 6 is a perspective view showing components of a two-dimensional optical fiber array according to another embodiment of the present invention.
7 is an end view showing a positioning state of the end portion of the optical fiber in the optical fiber array of FIG. 6. FIG.
FIG. 8 is an end view showing a modified example of positioning.
FIG. 9 is a perspective view showing a V-shaped groove forming step in the manufacturing method of the holding substrate.
FIG. 10 is a cross-sectional view showing a Cu / Cr layer forming step in the manufacturing method of the positioning plate.
11 is a cross-sectional view showing a resist layer forming step that follows the step of FIG.
12 is a cross-sectional view showing an oxide layer forming step that follows the step of FIG. 11. FIG.
13 is a cross-sectional view showing a polishing step subsequent to the step of FIG. 12. FIG.
14 is a cross-sectional view showing a resist removal step subsequent to the step of FIG.
15 is a perspective view showing an oxide layer peeling step subsequent to the step of FIG. 14. FIG.
FIG. 16 is a cross-sectional view showing a Ni—Fe alloy sputtering step in a method for manufacturing a metal positioning plate.
17 is a cross-sectional view showing a resist layer forming step that follows the step of FIG. 16. FIG.
18 is a cross-sectional view showing a Ni—Fe alloy plating step following the step of FIG. 17;
FIG. 19 is a cross-sectional view showing a resist removing step that follows the step of FIG. 18;
20 is a cross-sectional view showing a Ni—Fe alloy etching step following the step of FIG. 19;
FIG. 21 is a cross-sectional view showing a Cu etching step following the step of FIG. 20;
FIG. 22 is a partial cross-sectional perspective view showing a modification of the array body.
FIG. 23 is a perspective view showing a conventional optical fiber laminating method.
24 is an end view showing a two-dimensional optical fiber array formed by the method of FIG. 23. FIG.
FIG. 25 is a perspective view showing another example of a conventional two-dimensional optical fiber array.
FIG. 26 is a perspective view showing still another example of a conventional two-dimensional optical fiber array.
[Explanation of symbols]
10a to 10c: holding substrate, 12a₁~ 12a₃, 12b₁~ 12b₃: Optical fiber, 14, 14a, 14b, 16, 16a, 16b: Positioning plate, 18: Cutting tool, 20: Substrate, 22: Cr layer, 24: Cu layer, 25, 27: Ni—Fe alloy layer, 26a˜ 26c: resist layer, 28: oxide layer, V₁~ V₃: Holding groove, P₁₁, P₁₂, P₂₁, P₂₂, Q₁₁, Q₁₂, Q₂₂: Positioning hole.

Claims (8)

Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Comprises a multi-core ferrule provided so as to continuously extend from one end face to the other end face, and aligns the plurality of optical fibers in a matrix by the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes. The end of the plurality of optical fibers is arranged in a matrix on the one end face, and the end of the plurality of optical fibers protrudes from the one end face . The depth of each optical fiber holding groove or the diameter of each optical fiber holding hole so that the protruding portion of each optical fiber can move in the direction parallel to the one end face when positioning each optical fiber at the end face And those greater than set the diameter of each optical fiber, said plurality of with a plurality of positioning holes having a respective optical fiber corresponding to and each corner portion is formed in a matrix in the same orientation of the corners of each Providing a positioning plate in which the plurality of positioning holes are formed with higher positional accuracy than the optical fiber positioning accuracy in the array body;
Disposing the positioning plate on the one end surface side and inserting the end portions of the plurality of optical fibers into the plurality of positioning holes, respectively;
Positioning the ends of the plurality of optical fibers at the corners of the plurality of positioning holes, respectively ;
Adhering the positioning plate to the one end surface in a state where the end portions of the plurality of optical fibers are respectively positioned at corners of the plurality of positioning holes . Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Comprises a multi-core ferrule provided so as to continuously extend from one end face to the other end face, and aligns the plurality of optical fibers in a matrix by the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes. an array body for holding Te, and an end portion of said plurality of optical fibers from the one end surface along with the ends of the plurality of optical fibers to the one end face are arranged in a matrix are projected, the one The depth of each optical fiber holding groove or the length of each optical fiber holding hole so that the protruding portion of each optical fiber can move in the direction parallel to the one end surface when positioning each optical fiber. As but which is set larger than the diameter of each optical fiber,
A plurality of positioning holes respectively corresponding to the plurality of optical fibers and having corners are formed in a matrix with the directions of the corners being the same, and the plurality of positioning holes are formed of the optical fibers in the array body. a positioning plate which is formed at higher positioning accuracy positional accuracy, the is bonded to one end surface of the end portion of the plurality of optical fibers at said one end face side in each state of being inserted into the plurality of positioning holes And
A two-dimensional optical fiber array comprising fixing means for fixing the plurality of optical fibers to the positioning plate in a state where end portions of the plurality of optical fibers are positioned at corners of the plurality of positioning holes, respectively. Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Comprises a multi-core ferrule provided so as to continuously extend from one end face to the other end face, and aligns the plurality of optical fibers in a matrix by the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes. The end of the plurality of optical fibers is arranged in a matrix on the one end face, and the end of the plurality of optical fibers protrudes from the one end face . The depth of each optical fiber holding groove or the diameter of each optical fiber holding hole so that the protruding portion of each optical fiber can move in the direction parallel to the one end face when positioning each optical fiber at the end face To those large set than the diameter of each optical fiber, a plurality of first positioning holes corresponding to the plurality of optical fibers are formed in a matrix with high positional accuracy than the positioning accuracy of the optical fiber in the array body A first positioning plate, and a second positioning plate in which a plurality of second positioning holes respectively corresponding to the plurality of optical fibers are formed in a matrix with a positional accuracy higher than the optical fiber positioning accuracy in the array body Steps to prepare,
Disposing the first positioning plate on the one end face side and inserting the end portions of the plurality of optical fibers into the plurality of first positioning holes, respectively;
Disposing the second positioning plate on the one end face side through the first positioning plate and inserting the ends of the plurality of optical fibers into the plurality of second positioning holes, respectively;
The end portions of the plurality of optical fibers are respectively inserted into the plurality of optical fibers by sandwiching the end portions of the optical fibers by first and second positioning holes through which the optical fibers are inserted for each optical fiber on the one end face side. Positioning at substantially the same position in the first positioning hole and positioning the ends of the plurality of optical fibers at substantially the same position in the plurality of second positioning holes, respectively ;
A state in which the end portions of the plurality of optical fibers are respectively inserted into the plurality of first positioning holes, or the end portions of the plurality of optical fibers are respectively substantially at the same positions in the plurality of first positioning holes. Bonding the first positioning plate to the one end face in a positioned state;
Bonding the second positioning plate to the first positioning plate with the end portions of the plurality of optical fibers positioned at substantially the same positions in the plurality of second positioning holes, respectively. An optical fiber positioning method comprising: Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Comprises a multi-core ferrule provided so as to continuously extend from one end face to the other end face, and aligns the plurality of optical fibers in a matrix by the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes. an array body for holding Te, and an end portion of said plurality of optical fibers from the one end surface along with the ends of the plurality of optical fibers to the one end face are arranged in a matrix are projected, the one The depth of each optical fiber holding groove or the length of each optical fiber holding hole so that the protruding portion of each optical fiber can move in the direction parallel to the one end surface when positioning each optical fiber. As but which is set larger than the diameter of each optical fiber,
Wherein the plurality of a first positioning plate in which a plurality of first positioning holes are formed in a matrix with high positional accuracy than the positioning accuracy of the optical fiber in the array body corresponding respectively to the optical fiber, wherein one end face of the The end portions of the plurality of optical fibers are respectively inserted into the plurality of first positioning holes on the side;
A plurality of second positioning holes respectively corresponding to the plurality of optical fibers are second positioning plates formed in a matrix with a positional accuracy higher than the optical fiber positioning accuracy in the array body , The end portions of the plurality of optical fibers are respectively inserted into the plurality of second positioning holes in a state of being arranged on the one end face via a positioning plate ,
The end portions of the plurality of optical fibers are respectively inserted into the plurality of optical fibers by sandwiching the end portions of the optical fibers by first and second positioning holes through which the optical fibers are inserted for each optical fiber on the one end face side. The first positioning hole is positioned at substantially the same position and the end portions of the plurality of optical fibers are positioned at substantially the same position within the plurality of second positioning holes, respectively . A two-dimensional optical fiber array in which one positioning plate is bonded to the one end surface and the second positioning plate is bonded to the first positioning plate . Each plurality of optical fiber holding groove section perpendicular is V-shaped in the longitudinal direction one end face the other to the end face made of the holding substrate provided so as to extend continuously or a plurality of optical fiber holding from The multi-fiber ferrule is provided so that the holes continuously extend from one end face to the other end face, and the plurality of optical fibers are arranged in a matrix by the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes. align is arranged so that the end portion of an array body said plurality of optical fibers at said one end surface of projecting a plurality of rows and and the one end face of the form a plurality of rows consisting of a matrix which holds the The depth of each optical fiber holding groove or each optical fiber holding hole so that the protruding portion of each optical fiber can move in a direction parallel to said one end surface when positioning each optical fiber at one end surface. To that diameter is set larger than the diameter of each optical fiber, said plurality of rows (or the plurality of rows) in higher position accuracy than the positioning accuracy of the plurality of elongated first positioning hole respectively corresponding optical fiber in said array body A plurality of first locking portions for positioning a plurality of optical fibers in a row (or column) corresponding to each first positioning hole. And a plurality of elongated second positioning holes respectively corresponding to the plurality of rows (or the plurality of columns) according to the positioning accuracy of the optical fiber in the array body. A plurality of second locking portions for positioning a plurality of optical fibers in a row (or column) corresponding to each second positioning hole, which is a second positioning plate formed with high positional accuracy Comprising the steps of: providing a that are arranged in parallel in the other side along the longitudinal direction of the second positioning holes,
Disposing the first positioning plate on the one end face side and inserting the end portions of a plurality of optical fibers in a corresponding row (or column) with respect to each first positioning hole;
The second positioning plate is disposed on the one end face side through the first positioning plate, and the end portions of a plurality of optical fibers in a row (or column) corresponding to each second positioning hole are arranged. A step of insertion;
Positioning the end portion of the optical fiber with the first and second engaging portions corresponding to each optical fiber on the one end surface side ; and
A state in which the end portions of the plurality of optical fibers in the corresponding row (or column) are inserted into each first positioning hole or in the first and second engaging portions corresponding to each optical fiber Adhering the first positioning plate to the one end surface in a state of being positioned across the end; and
Bonding the second positioning plate to the first positioning plate in a state in which the end portions of the optical fiber are positioned with the first and second locking portions corresponding to each optical fiber interposed therebetween; An optical fiber positioning method including: Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Comprises a multi-core ferrule provided so as to continuously extend from one end face to the other end face, and aligns the plurality of optical fibers in a matrix by the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes. an array body for holding Te, are arranged so as to protrude from the end face end of one said plurality of rows and and form a plurality of rows consisting of the matrix of the plurality of optical fibers at said one end face of the The depth of each optical fiber holding groove or each optical fiber holding hole so that the protruding portion of each optical fiber can move in a direction parallel to said one end surface when positioning each optical fiber at one end face To that diameter is set larger than the diameter of each optical fiber,
A plurality of elongated first positioning holes respectively corresponding to the plurality of rows (or a plurality of columns) are first positioning plates formed with higher positional accuracy than optical fiber positioning accuracy in the array body, A plurality of first locking portions for positioning a plurality of optical fibers in a row (or column) corresponding to each positioning hole are arranged in parallel on one side along the longitudinal direction of the first positioning hole, The one end face side is inserted through the ends of a plurality of optical fibers in a row (or column) corresponding to each first positioning hole;
A plurality of elongated second positioning holes respectively corresponding to the plurality of rows (or the plurality of columns) are second positioning plates formed with higher positional accuracy than optical fiber positioning accuracy in the array body, second holding portion plural for positioning a plurality of optical fibers each row corresponding to every two positioning holes (or column) is arranged on the other side along the longitudinal direction of the second positioning hole The ends of a plurality of optical fibers in the corresponding row (or column) are inserted into each second positioning hole in a state of being arranged on the one end face side through the first positioning plate. And
In the state where the first and second locking portions corresponding to each optical fiber on the one end surface side are positioned with the end portion of the optical fiber being sandwiched, the first positioning plate on the one end surface, A two-dimensional optical fiber array in which the second positioning plate is bonded to the first positioning plate . Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Comprises a multi-core ferrule provided so as to continuously extend from one end face to the other end face, and aligns the plurality of optical fibers in a matrix by the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes. are arranged so that the end portion of an array body said plurality of optical fibers at said one end surface of projecting a plurality of rows and and the one end face of the form a plurality of rows consisting of the matrix that holds Te, the one The depth of each optical fiber holding groove or each optical fiber holding hole so that the protruding portion of each optical fiber can move in the direction parallel to the one end surface when positioning each optical fiber. To that diameter is set larger than the diameter of each optical fiber, said plurality of first corresponding to a plurality of optical fibers of the line both are multiple lines corresponding to a plurality of first positioning plate corresponding And a plurality of second positioning plates respectively corresponding to the plurality of rows, each of which corresponds to a plurality of light beams corresponding to each of the plurality of rows. Preparing a plurality of second positioning holes respectively corresponding to the fibers formed with a positional accuracy higher than the positioning accuracy of the optical fiber in the array body;
Inserting each end of the plurality of optical fibers in the row corresponding to the plurality of first positioning plate to each respective first positioning plate disposed on the end face side of the one to the plurality of first positioning holes Steps,
The plurality of second positioning plates are arranged on the one end face side through the plurality of first positioning plates, and the end portions of the plurality of optical fibers in the row corresponding to each second positioning plate are Inserting each of the plurality of second positioning holes;
By sandwiching the end portion of the optical fiber between the first and second positioning holes through which the optical fiber is inserted for each optical fiber on the one end surface side, the first plurality of first positioning plates are provided for each first positioning plate. The ends of the plurality of optical fibers inserted through the positioning holes are positioned at substantially the same positions in the plurality of first positioning holes, and the second positioning positions are determined for each second positioning plate. Positioning the ends of the plurality of optical fibers inserted through the holes at substantially the same positions in the plurality of second positioning holes, respectively .
For each first positioning plate, the end portions of the plurality of optical fibers inserted through the plurality of first positioning holes are positioned at substantially the same positions in the plurality of first positioning holes, and The plurality of optical fibers inserted into the plurality of second positioning holes for each of the two positioning plates are positioned at substantially the same position in the plurality of second positioning holes, respectively. Bonding the first positioning plate to the one end surface and bonding the plurality of second positioning plates to the plurality of first positioning plates, respectively . Each of a plurality of optical fiber holding grooves each having a V-shaped cross section perpendicular to the longitudinal direction is formed of a holding substrate provided so as to continuously extend from one end face to the other end face, or a plurality of optical fiber holding holes Comprises a multi-core ferrule provided so as to continuously extend from one end face to the other end face, and aligns the plurality of optical fibers in a matrix by the plurality of optical fiber holding grooves or the plurality of optical fiber holding holes. an array body for holding Te, are arranged so as to protrude from the end face end of one said plurality of rows and and form a plurality of rows consisting of the matrix of the plurality of optical fibers at said one end face of the depth or each optical fiber holding hole of the optical fiber holding groove for movement in a direction parallel to the end surface of the one during the positioning of the projecting portions each optical fiber of the optical fibers at one end face To that diameter is set larger than the diameter of each optical fiber,
A plurality of first positioning plates respectively corresponding to the plurality of rows, wherein the plurality of first positioning holes respectively corresponding to the plurality of optical fibers in the corresponding row are based on the positioning accuracy of the optical fibers in the array body. The end portions of the plurality of optical fibers in the corresponding row formed on the one end face side are inserted through the plurality of first positioning holes, respectively, with high positional accuracy,
A plurality of second positioning plates respectively corresponding to the plurality of rows, wherein a plurality of second positioning holes respectively corresponding to the plurality of optical fibers in the corresponding row are higher than the positioning accuracy of the optical fibers in the array body The plurality of second positioning plates are arranged on the one end surface through the plurality of first positioning plates, and each second positioning plate has a row corresponding to each of the second positioning plates . A plurality of end portions of the optical fibers are respectively inserted into the plurality of second positioning holes,
By sandwiching the end portion of the optical fiber between the first and second positioning holes through which the optical fiber is inserted for each optical fiber on the one end surface side, the first plurality of first positioning plates are provided for each first positioning plate. The ends of the plurality of optical fibers inserted through the positioning holes are positioned at substantially the same positions in the plurality of first positioning holes, and the second positioning positions are determined for each second positioning plate. The plurality of first positioning plates on the one end surface in a state where the end portions of the plurality of optical fibers inserted through the holes are positioned at substantially the same positions in the plurality of second positioning holes, respectively. A two-dimensional optical fiber array in which a plurality of second positioning plates are bonded to the plurality of first positioning plates, respectively .

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