JP3812469B2 - Optical fiber holder, manufacturing method thereof, and optical fiber fixing plate - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical transmission line forming technique using an optical fiber, and more particularly to an optical fiber holder such as an optical fiber array , a manufacturing method thereof, and an optical fiber fixing plate used for carrying out this manufacturing method.
[0002]
[Prior art]
Conventionally, as a two-dimensional optical fiber array, those shown in FIGS. 19 and 20 have already been proposed by the same applicant as the present application (for example, see Japanese Patent Application No. 2001-241180).
[0003]
In the optical fiber array shown in FIGS. 19 and 20, holding holes J _{1 to} J ₈ are provided so as to penetrate from one end of the optical fiber holder 1 to the other end, and the holding hole J ₁ is provided at the end of the holder _1. mounting the positioning plate 2 having positioning holes _H 1 to H ₈ corresponding to through J _8, respectively the optical fiber F into the positioning hole _H 1 to H ₈ from the holding hole _J 1 through J ₈ while wearing the positioning plate 2 the ₁ to F ₈ inserted, has a structure for fixing. According to such an optical fiber array, since the positioning plate 2 can be easily and accurately formed by a thin film process, high-accuracy positioning is possible.
[0004]
[Problems to be solved by the invention]
According to the above-described prior art, since the metal positioning plate 2 is mounted on the end surface of the holder 1, there are the following problems.
[0005]
(1) When the positioning plate 2 is mounted on the end face of the holder 1, it is necessary to precisely align the corresponding positioning holes with respect to the holding holes at the micron level, and the alignment work is not easy. If such alignment is insufficient, the optical fiber will break during insertion.
[0006]
(2) Since the thickness of the positioning plate 2 is as thin as about 100 μm, it is difficult to hold it on the side portions along the four sides. Therefore, when the positioning plate 2 is mounted on the end surface of the holder 1, the main surface on the holder 1 side of the positioning plate 2 is usually adhered and fixed to the end surface of the holder 1 with an adhesive. In this case, the operation of attaching the positioning plate 2 in parallel to the end face of the holder 1 is not easy. If the parallelism of the surfaces is insufficient, the adhesive layer becomes non-uniform, and troubles such as warping of the positioning plate 2 occur during thermal expansion.
[0007]
An object of the present invention is to provide a novel optical fiber holder , a method of manufacturing the same, and an optical fiber fixing plate capable of easily and accurately determining the position of the optical fiber at the end of the optical fiber holder.
[0008]
[Means for Solving the Problems]
The first optical fiber holder according to the present invention is:
One or more optical fibers;
An optical fiber holding hole corresponding to each optical fiber of the one or a plurality of optical fibers is provided so as to penetrate from one end to the other end, and is a cylindrical or polygonal shape made of a continuous material from the one end to the other end. In the columnar optical fiber holder, a first positioning pin insertion hole (or groove) is provided separately from each optical fiber holding hole so as to extend from the one end toward the other end, and in the vicinity of the one end. Is provided with a fixing plate insertion groove so as to cross each optical fiber holding hole and the first positioning pin insertion hole (or groove),
An optical fiber fixing plate formed by selective plating and inserted into the fixing plate insertion groove, corresponding to each optical fiber holding hole and the first positioning pin insertion hole (or groove) of the optical fiber holder. Both the optical fiber fixing hole and the second positioning pin insertion hole (or groove) are provided so as to penetrate from one main surface to the other main surface, and each optical fiber fixing hole approaches the other main surface. One formed to increase in size,
The second positioning pin insertion hole (or groove) communicates with the first positioning pin insertion hole (or groove) and the other main surface of the optical fiber fixing plate faces the other end of the optical fiber holder. A positioning pin inserted into the first and second positioning pin insertion holes (or grooves) in a state where the optical fiber fixing plate is inserted into the fixing plate insertion groove, and the first and second positioning pins. Positioning each optical fiber fixing hole of the optical fiber fixing plate in communication with a corresponding optical fiber holding hole of the optical fiber holder in a state of being inserted into the insertion hole (or groove);
The positioning pin is inserted into the first and second positioning pin insertion holes (or grooves), and each optical fiber is fixed to the corresponding optical fiber holding hole of the optical fiber holder and the corresponding optical fiber fixing of the optical fiber fixing plate. The positioning pin and a fixing means for fixing each optical fiber to the optical fiber holder in a state of being inserted into the hole. Here, the hole size refers to the diameter of the hole, the dimension of one side of the hole, and the like.
[0009]
According to a first optical fiber holding member, the fixing plate insertion groove provided in the vicinity of one end of the optical fiber holder, the first positioning pin insertion of an optical fiber holder in a state of inserting the optical fiber fixing plate to the fixed plate insertion groove Since the positioning pin is inserted into the hole (or groove) and the second positioning pin insertion hole (or groove) of the optical fiber fixing plate, each optical fiber fixing hole is positioned in the corresponding optical fiber holding hole. Positioning of the optical fiber fixing plate with respect to the fiber holder can be performed easily and accurately. Further, since the optical fiber fixing plate is inserted into the fixing plate insertion groove, warpage and peeling are unlikely to occur.
[0010]
In addition, since the optical fiber fixing plate can be formed with submicron order accuracy by a thin film process, the optical fiber can be positioned with high accuracy at the end of the optical fiber holder. The optical fiber fixing plate is inserted into the fixing plate insertion groove so that the large size end of each optical fiber fixing hole faces the other end of the optical fiber holder. The fiber can be easily inserted.
[0011]
The second optical fiber holder according to the present invention is:
One or more optical fibers;
An optical fiber holding hole corresponding to each optical fiber of the one or a plurality of optical fibers is provided so as to penetrate from one end to the other end, and is a cylindrical or polygonal shape made of a continuous material from the one end to the other end. In the columnar optical fiber holder, a first positioning pin insertion hole (or groove) is provided separately from each optical fiber holding hole so as to extend from the one end toward the other end, and in the vicinity of the one end. A plurality of fixing plate insertion grooves arranged in parallel so as to cross each optical fiber holding hole and the first positioning pin insertion hole (or groove);
A plurality of optical fiber fixing plates, each formed by selective plating , respectively inserted into the plurality of fixing plate insertion grooves, each optical fiber fixing plate having an optical fiber holding hole and the first optical fiber holding hole. An optical fiber fixing hole and a second positioning pin insertion hole (or groove) respectively corresponding to the positioning pin insertion hole (or groove) are provided so as to penetrate from one main surface to the other main surface, An optical fiber fixing hole formed to increase in size as it approaches the other main surface;
The second positioning pin insertion hole (or groove) of each optical fiber fixing plate is communicated with the first positioning pin insertion hole (or groove), and the other main surface of each optical fiber fixing plate is connected to the optical fiber holder. Each optical fiber fixing plate is inserted into the corresponding fixing plate insertion groove of the optical fiber holder so as to face the other end, and the first positioning pin insertion hole (or groove) and the second of each optical fiber fixing plate are inserted. the positioning pin insertion holes (or grooves) and the inserted respective optical fiber fixed to each optical fiber fixing plate in a state of being inserted into the a positioning pin first and second positioning pin insertion holes (or grooves) Positioning the hole so as to communicate with the corresponding optical fiber holding hole of the optical fiber holder;
The positioning pin is inserted into the first positioning pin insertion hole (or groove) and the second positioning pin insertion hole (or groove) of each optical fiber fixing plate, and each optical fiber corresponds to the optical fiber holder. The optical fiber holding hole and a fixing means for fixing the optical fiber to the optical fiber holder in a state of being inserted into the corresponding optical fiber fixing hole of each optical fiber fixing plate.
[0012]
The second optical fiber holding body corresponds to the first optical fiber holding body having a plurality of fixing plate insertion grooves and a plurality of optical fiber fixing plates, and is the same as the first optical fiber holding body . The effect is obtained. In addition, since the optical fiber is positioned by a plurality of optical fiber fixing plates at the end of the optical fiber holder, the parallelism between the optical fibers can be set precisely.
[0013]
The manufacturing method of the first optical fiber holder according to the present invention is as follows:
One or a plurality of optical fibers and an optical fiber holding hole corresponding to each of the one or a plurality of optical fibers are provided so as to penetrate from one end to the other end, and continuous from the one end to the other end A cylindrical or polygonal optical fiber holder made of a constituent material, wherein the first positioning pin insertion hole (or groove) is separated from each optical fiber holding hole so as to extend from the one end toward the other end. A fixing plate insertion groove provided across the optical fiber holding hole and the first positioning pin insertion hole (or groove) in the vicinity of the one end, and inserted into the fixing plate insertion groove. behenate rather each optical fiber holding hole of said optical fiber holder to an optical fiber fixing plate formed by selective plating and the first positioning pin insertion holes (or grooves) in the corresponding optical fiber, respectively Both the fixing hole and the second positioning pin insertion hole (or groove) are provided so as to penetrate from one main surface to the other main surface, and the size of each optical fiber fixing hole becomes closer to the other main surface. Preparing an increase and a positioning pin to be inserted into the first and second positioning pin insertion holes;
The second positioning pin insertion hole (or groove) communicates with the first positioning pin insertion hole (or groove) and the other main surface of the optical fiber fixing plate faces the other end of the optical fiber holder. Inserting the optical fiber fixing plate into the fixing plate insertion groove;
By inserting the positioning pins into the first and second positioning pin insertion holes in a state where the optical fiber fixing plate is inserted into the fixing plate insertion groove, each optical fiber fixing hole of the optical fiber fixing plate is inserted into the light. Positioning to communicate with a corresponding optical fiber holding hole of the fiber holder;
Fixing the positioning pins to the optical fiber holder in a state where the optical fiber fixing holes of the optical fiber fixing plate are positioned in the corresponding optical fiber holding holes of the optical fiber holder by the positioning pins;
With the positioning pins fixed to the optical fiber holder, each optical fiber is connected from the other end of the optical fiber holder to the corresponding optical fiber holding hole of the optical fiber holder and the corresponding optical fiber fixing hole of the optical fiber fixing plate. Inserting step;
And fixing each optical fiber to the optical fiber holder in a state where each optical fiber is inserted into a corresponding optical fiber holding hole of the optical fiber holder and a corresponding optical fiber fixing hole of the optical fiber fixing plate.
[0014]
According to a manufacturing method of the first optical fiber holder can be made good simply and accurately the first optical fiber holding member described above. In the production method of the first optical fiber holding member, one end of the optical fiber holder to reach holder section between the one end and the fixed plate insertion groove of the optical fiber holder in a state of fixing the respective optical fibers in the optical fiber holder You may make it perform the step which grind | polishes. If it does in this way, the edge part of an optical fiber holder can be made into a flat and clean surface, and a coupling loss can be reduced when couple | bonding with another optical device.
[0015]
The manufacturing method of the second optical fiber holder according to the present invention is as follows:
One or a plurality of optical fibers and an optical fiber holding hole corresponding to each of the one or a plurality of optical fibers are provided so as to penetrate from one end to the other end, and continuous from the one end to the other end A cylindrical or polygonal optical fiber holder made of a constituent material, wherein the first positioning pin insertion hole (or groove) is separated from each optical fiber holding hole so as to extend from the one end toward the other end. A plurality of fixing plate insertion grooves arranged in parallel so as to cross each optical fiber holding hole and the first positioning pin insertion hole (or groove) in the vicinity of the one end; and the plurality of fixing plates each of the plurality of optical fiber holding hole and the first positioning of the optical fiber holder is an optical fiber fixing plate to each optical fiber fixing plate into the insertion groove formed by the base rather selective plating process to be inserted respectively An optical fiber fixing hole and a second positioning pin insertion hole (or groove) respectively corresponding to the pin insertion hole (or groove) are provided so as to penetrate from one main surface to the other main surface, and each optical fiber The fixing hole should be inserted into the first positioning pin insertion hole and the second positioning pin insertion hole of each of the optical fiber fixing plates, which are formed to increase in size as they approach the other main surface. Preparing a positioning pin;
The second positioning pin insertion hole (or groove) of each optical fiber fixing plate is communicated with the first positioning pin insertion hole (or groove), and the other main surface of each optical fiber fixing plate is connected to the optical fiber holder. Inserting each optical fiber fixing plate into the corresponding fixing plate insertion groove of the optical fiber holder to face the other end;
With each optical fiber fixing plate inserted into the corresponding fixing plate insertion groove of the optical fiber holder, the first positioning pin insertion hole (or groove) and the second positioning pin insertion hole (or groove) of each optical fiber fixing plate (or Positioning the optical fiber fixing holes to communicate with the corresponding optical fiber holding holes of the optical fiber holder by inserting the positioning pins into the grooves) , and
Fixing the positioning pin to the optical fiber holder in a state in which each optical fiber fixing hole is positioned in the corresponding optical fiber holding hole of the optical fiber holder for each optical fiber fixing plate by the positioning pin;
With the positioning pins fixed to the optical fiber holder, each optical fiber is connected from the other end of the optical fiber holder to the corresponding optical fiber holding hole of the optical fiber holder and the corresponding optical fiber fixing hole of each optical fiber fixing plate. Inserting step;
And fixing each optical fiber to the optical fiber holder in a state where each optical fiber is inserted into a corresponding optical fiber holding hole of the optical fiber holder and a corresponding optical fiber fixing hole of each optical fiber fixing plate.
[0016]
According to the manufacturing method of the second optical fiber holder , the first or second optical fiber holder can be easily and accurately manufactured. In the preparation of the second optical fiber holding member, in the holder section between either one of the one end and a plurality of fixed plates insertion grooves of the optical fiber holder in a state of fixing the respective optical fibers in the optical fiber holder You may make it perform the step which grind | polishes the one end side of an optical fiber holder until it reaches. In this case, when the one end side of the optical fiber holder is polished until it reaches the holder section closer to the one end of the optical fiber holder, the above-described second optical fiber holder is obtained. Also, when polishing the one end of the optical fiber holder from one end of the optical fiber holder to reach farther holder section, the first optical fiber holder of the above can be obtained. When the one end side of the optical fiber holder is polished in this manner, the coupling loss can be reduced when coupling with another optical device as described above.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows a two-dimensional optical fiber array according to an embodiment of the present invention. A cross section taken along line XX ′ in FIG. 1 is shown in FIG. 2, and a cross section taken along line YY ′ in FIG. Is shown in FIG. FIG. 3 shows an enlarged part of FIG.
[0018]
The optical fiber holder 10 has a quadrangular prism shape as an example, and is made of ceramic, metal, plastic, or the like. The holder 10 has circular optical fiber holding holes H _{11 to} H ₄₈ provided in a matrix so as to penetrate from one end (left end) to the other end (right end) of the holder 10 in a substantially parallel state. The circular positioning pin insertion holes 10a and 10b are provided so as to penetrate from one end to the other end of the holder 10 in a substantially parallel state. Pin insertion holes 10a, 10b are in a substantially parallel to the holding hole _H 11 _{to H 48.} The holding holes H _{11 to} H ₄₈ and the pin insertion holes 10 a and 10 b all have a diameter that increases as they approach the other end of the holder 10 as shown in FIGS.
[0019]
The vicinity of one end of the holder 10, and is formed substantially orthogonal to the fixing plate insertion groove 14 holding holes _H 11 _{to H 48} and the pin insertion holes 10a, 10b. 10A shows a holder section between one end of the holder 10 and the plate insertion groove 14. An optical fiber fixing plate 16 is inserted into the plate insertion groove 14. As an example, the fixed plate 16 has a quadrilateral shape corresponding to the cross-sectional shape orthogonal to the longitudinal direction of the holder 10, and is made of a metal plate such as a Ni—Fe alloy. The fixing plate 16 is provided with 32 optical fiber fixing holes corresponding to the holding holes H _{11 to} H ₄₈ of the holder 10 so as to penetrate from one main surface of the fixing plate 16 to the other main surface. Yes. FIG. 2 shows four fixing holes S ₁₁ , S ₂₁ , S ₃₁ , S ₄₁ among the 32 fixing holes of the fixing plate 16. As shown in FIG. 4, the fixing plate 16 is provided with positioning pin insertion holes Sa and Sb corresponding to the pin insertion holes 10a and 10b of the holder 10, respectively.
[0020]
In the fixing plate 16, the fixing holes S _{11 to} S ₄₁ shown in FIG. 2 are formed so that the diameter increases as the other main surface of the fixing plate 16 is approached, and this also applies to the other fixing holes. It is. The fixed plate 16 is inserted into the plate insertion groove 14 so that the other main surface faces the other end of the holder 10. On one main surface of the fixing plate 16 is bonded hole _M 11 continuously respectively in small size end fixed as shown in FIG. 2 hole _{S 11, S 21, S 31} , S 41, M 21, M 31, _M41 is provided, and this is the same for the other fixing holes. Each bonding holes such as M ₁₁ has a larger diameter than the corresponding fixing hole.
[0021]
As shown in FIG. 4, adhesive holes Ma and Mb are provided on one main surface of the fixing plate 16 continuously at the small size ends of the pin insertion holes Sa and Sb, respectively. Each of the bonding holes Ma and Mb has a larger diameter than the corresponding pin insertion hole.
[0022]
Positioning pins 12a and 12b are inserted into the pin insertion holes 10a and Sa and the pin insertion holes 10b and Sb from the other end of the holder 10, respectively. Each of the positioning pins 12a and 12b is made of a metal such as stainless steel having a diameter of about 1 mm or a ceramic such as alumina. Since the positioning pins are inserted into the pin insertion holes 10a, 10b, Sa, and Sb from the large-sized ends, the insertion work is facilitated. The positioning pins 12a and 12b are fixed to the holder 10 together with the fixing plate 16 by being bonded with adhesives in the bonding holes Ma and Mb, respectively, in the same manner as the optical fiber bonding described later with reference to FIG. As a result, the fixing plate 16 is precisely aligned with the holder 10 so that each fixing hole communicates with a corresponding holding hole of the holder 10.
[0023]
In this manner aligned state, the communication hole of the holding hole _{H 11} as shown in FIG. 2 and the fixed hole _{S 11,} and the holding hole _{H 21} hole of the fixing hole _{S 21,} the holding hole _{H 31} fixed Optical fibers F ₁₁ , F ₂₁ , F ₃₁ and F ₄₁ are inserted from the other end of the holder 10 into the communication hole with the hole S ₃₁ and the communication hole between the holding hole H ₄₁ and the fixing hole S ₄₁ . The same applies to the communication holes between the other holding holes and the fixing holes. Since the optical fiber is inserted into each holding hole and each fixing hole from the large size end, the insertion work becomes easy. Each optical fiber is bonded and fixed to the holder 10 with an adhesive at a corresponding bonding hole.
[0024]
FIG. 3 illustrates the bonding / fixing structure at this time with respect to the bonding holes M ₁₁ and M ₂₁ . As an example, previously filled with a UV curable adhesive bonding hole _{M 11, M 21} prior to inserting the fixing plate 16 to the plate insertion groove 14, the hole _S 11 as shown in FIG. _{3, M 11} and the hole UV to the adhesive layer _{a 11, a 21} of the adhesive holes _{M 11, M 21} through each optical fiber _{F 11, F 21} at the stage of finished inserting the respective S _{21, M 21} optical fibers _{F 11} and _{F 21} Is applied to cure the adhesive layers A ₁₁ and A ₂₁ . As a result, the optical fibers F ₁₁ and F ₂₁ are fixed to the holder 10 together with the fixing plate 16 by the adhesive layers A ₁₁ and A ₂₁ , respectively.
[0025]
Next, a method for manufacturing the above optical fiber array will be described with reference to FIGS. 5-10, the same code | symbol is attached | subjected to the part similar to FIGS. 1-4, and detailed description is abbreviate | omitted.
[0026]
In the step of FIG. 5, as described above, the optical fiber holder 10 having the holding hole group H including the optical fiber holding holes H _{11 to} H ₄₈ and the positioning pin insertion holes 10a and 10b is formed by, for example, calcination processing of zirconia powder. .
[0027]
In the process of FIG. 6, by using a dicing blade having a width of 100 μm to 200 μm, two dicing grooves are formed side by side in the vicinity of one end of the holder 10, thereby obtaining the fixing plate insertion grooves 14 and 18 including these dicing grooves. The pin insertion holes 10 a and 10 b are cut by the plate insertion grooves 14 and 18. A holder section 10 </ b> B remains between one end of the holder 10 and the plate insertion groove 18, and a holder section 10 </ b> A remains between the plate insertion grooves 18 and 14.
[0028]
In the step of FIG. 7, optical fiber fixing plates 16 and 16 ′ prepared by a thin film process as will be described later with reference to FIGS. As described above, the fixing plate 16 has the bonding / fixing hole group SM including the optical fiber fixing holes such as S _{11 to} S ₄₁ and the bonding holes such as M _{11 to} M ₄₁ and the positioning pin insertion holes Sa and Sb. Thus, the fixed plate 16 ′ has the same configuration as the fixed plate 16.
[0029]
Next, the fixing plates 16 and 16 'are inserted into the plate insertion holes 14 and 18, respectively. At this time, as shown in FIGS. 2 and 4, the fixing plate 16 is placed so that the fixing holes such as S ₁₁ and the pin insertion holes such as Sa all face the large size end toward the other end (right end) of the holder 10. The same applies to the fixing plate 16 'inserted into the plate insertion groove 14. FIG. 8 shows a state after the fixing plates 16 and 16 ′ are inserted.
[0030]
8, the positioning pins 12a and 12b are inserted into the pin insertion holes 10a and 10b from the other end of the holder 10 with the fixing plates 16 and 16 'inserted into the plate insertion grooves 14 and 18, respectively. The positioning pins 12a and 12b are inserted into the pin insertion holes Sa and Sb of the fixing plate 16 through the pin insertion holes 10a and 10b, respectively, as described above with reference to FIG. 4, and the holder section 10A, the fixing plate 16 ′, and the holder section 10B. It penetrates in, and it fixes with an adhesion hole as mentioned above in such a state. As a result, the fixing plates 16 and 16 ′ are positioned with respect to the holder 10.
[0031]
9, in the positioning state as described above, each optical fiber in the optical fiber (fiber core wire) group F led out from the fiber tape FT is moved from the other end of the holder 10 to a corresponding holding hole of the holder 10. The corresponding fixing hole of the fixing plate 16, the corresponding holding hole of the holder section 10A, the corresponding fixing hole of the fixing plate 16 ', and the corresponding holding hole of the holder section 10B are inserted and corresponded as described above. It fixes to the holder 10 with the adhesion hole to do. FIG. 10 shows a state in which the optical fiber group F is inserted and fixed to the holder 10.
[0032]
In the process of FIG. 10, a length D extending from one end of the holder 10 to the holder section 10 </ b> A as shown in FIG. 9 by performing polishing on the optical fiber portion protruding from one end of the holder 10 and the end of the holder 10. Remove the holder section. As a result, the end surface of the holder section 10A becomes a flat surface as shown in FIG. 1, and the fixing plate 16 remains. In addition, as a grinding | polishing process, you may perform a diagonal grinding | polishing process as needed.
[0033]
In the above example, the polishing is performed until the holder section 10A is reached. However, the polishing may be stopped when the holder section 10B is reached. In this case, both the fixing plates 16 and 16 'remain. Further, either one of the fixing plates 16, 16 ′ may be omitted.
[0034]
FIG. 11 shows a modified example of the method for aligning the holder and the fixing plate. The same parts as those in FIGS.
[0035]
In the example of FIG. 11, positioning pin insertion grooves 10 p, 10 q, and 10 r are provided on the upper and both sides of the holder 10 so as to extend from one end of the holder 10 toward the other end (or to reach the other end). Each of the pin insertion grooves 10p to 10r extends from the end face of the holder section 10B to the other end side of the holder 10 through the fixing plate 16 ′, the holder section 10A, and the exposed portions of the fixing plate 16.
[0036]
At the time of alignment, the plate-like positioning pins 12p, 10p, 10r are respectively inserted into the pin insertion grooves 10p, 10q, 10r in the state where the fixing plates 16, 16 'are inserted into the plate insertion grooves 14, 18 of the holder 10 as shown in FIG. 12q and 12r are inserted as shown by arrows in FIG. 11, and fixed by adhesion or the like. In such a fixed state, the optical fiber insertion operation is performed in the same manner as described above. The portions protruding from the holder 10 (including the holder sections 10A and 10B) and the fixing plates 16 and 16 ′ in the positioning pins 12p to 12r can be removed by a polishing process or the like.
[0037]
According to the above-described embodiment, the fixing plates 16 and 16 ′ can be accurately positioned with respect to the holder 10 using the positioning pins 12 a and 12 b or 12 p to 12 r. Further, since the fixing plates 16 and 16 ′ are respectively present in the plate insertion grooves 14 and 18, warpage and peeling are unlikely to occur. Further, the accuracy of the diameter of each fixing hole of the fixing plates 16 and 16 ′ can be as high as submicron order below 1 μm with respect to the outer diameter of the optical fiber. Accurate positioning is possible, and the parallelism between the optical fibers can be made 0.1 degrees or less.
[0038]
FIGS. 12-16 shows an example of the manufacturing method of an optical fiber fixing plate.
[0039]
In the process of FIG. 12, for example, a Cu / Cr laminate (a laminate in which a Cu layer is laminated on a Cr layer) 22 is formed as a plating underlayer on one main surface of a substrate 20 made of glass or quartz by a sputtering method. The Cr layer is for improving the adhesion of the Cu layer to the substrate 20, and the thicknesses of the Cr layer and the Cu layer can be about 30 nm and 300 nm, respectively. After the Cu / Cr laminate 22 is formed, resist (negative resist) layers R _{11 to} R ₁₆ respectively corresponding to the desired adhesion hole pattern are formed on the Cu / Cr laminate 22 by photolithography.
[0040]
Next, in the step of FIG. 13, resist (negative resist) layers R _{21 to} R ₂₆ respectively corresponding to desired fixed hole patterns are formed on the resist layers R _{11 to} R ₁₆ by photolithography.
[0041]
In the process of FIG. 14, the optical fiber fixing plate 16 made of a Ni—Fe alloy layer is formed by selective plating of a Ni—Fe alloy using the resist layers R _{11 to} R ₁₆ and R _{21 to} R ₂₆ as a mask. At this time, the fixing plate 16 is formed so as to move away from each resist layer as it goes upward around each resist layer such as R ₂₁ (having a fixing hole whose size increases as it goes upward).
[0042]
FIG. 17 illustrates the growth state of the plating layer 16 at this time with respect to the resist layers R ₁₁ and R ₂₁ . When viewed from the point P in the vicinity of the resist layer _{R 11} on Cu / Cr laminate 22, Q points shown in the surface of the plating layer 16, R is an equal distance. Since the plating layer 16 is grown isotropically, the resist layer in the R point plating base is not exposed there is R _11, the plating layer 16 is grown over the resist layer R ₁₁ from point P immediately below. For this reason, the plating layer (fixing plate) 16 is formed so as to move away from each resist layer as it progresses upward around each resist layer.
[0043]
In the step of FIG. 15, the resist layers R _{11 to} R ₁₆ and R _{21 to} R ₂₆ are removed by chemical treatment or the like, and fixing holes S _{11 to} S ₁₆ and adhesion holes M _{11 to} M ₁₆ are provided to the fixing plate 16. As a result, in the fixed plate 16, together with the fixing holes S ₁₁ to S ₁₆ so as to increase the size as from the one main surface closer to the other through the main surface and the other main surface are formed fixing holes Adhesive holes M _{11 to} M ₁₆ having a size larger than that of the small size ends are successively formed at the small size ends of S _{11 to} S ₁₆ .
[0044]
In the process of FIG. 16, the Cu layer in the Cu / Cr laminate 22 is removed by etching, and the fixing plate 16 is separated from the substrate 20.
[0045]
As the optical fiber fixing plate 16 shown in FIGS. 2 to 4, a plate in which the bonding holes M _{11 to} M ₄₁ , Ma, and Mb are omitted may be used. In this case, the fixing plate 16 can be manufactured as shown in FIG. That is, after the Cu / Cr layer 22 is formed on the surface of the substrate 20 in the same manner as described above with reference to FIG. 12, the resist layers 24 and R _{1 to} R ₈ are formed on the Cu / Cr layer 22 by photolithography. . The resist layer 24 is formed so as to have quadrilateral holes corresponding to the plane pattern of the desired fixing plate, and the resist layers R _{1 to} R ₈ are all patterns corresponding to the desired fixing holes in the quadrilateral holes. And increases in size as it goes from the top to the bottom. Here, in order to obtain a forward tapered resist shape such as the layers R _{1 to} R ₈ , when a stepper (reduced projection exposure apparatus) is used,
(1) A method of setting the focus position in the resist,
(2) A method of setting a small exposure amount at the bottom of the resist (a method for positive resist),
(3) In the exposure mask, any of the methods of gradually changing the transmittance of the mask portion (increasing the transmittance as it goes to the bottom of the resist) can be used.
[0046]
Next, the fixed plate 16 made of the Ni—Fe alloy layer is formed by selective plating of the Ni—Fe alloy using the resist layers 24 and R _{1 to} R ₈ as a mask. Then, the resist layer 24 and R _{1 to} R ₈ are removed by chemical treatment or the like. Since the resist layers R _{1 to} R ₈ are removed, the fixing plate 16 is provided with fixing holes S _{1 to} S ₈ . Since each of the fixing holes increases in size as the corresponding resist layer proceeds from the upper part to the lower part, the fixing hole is formed to increase in size as it proceeds from the upper surface to the lower surface of the fixing plate 16. Thereafter, the Cu layer in the Cu / Cr laminate 22 is removed by an etching process, and the fixing plate 16 is separated from the substrate 20.
[0047]
According to manufacturing method of the optical fiber fixing plate as described above, the hole _{S 11 ~S 16, M 11 ~M} 16, S 1 ~S 8 position and size and submicron order accuracy of 0.5μm or the like fixing hole pitch between Can be set. Further, as the fixing plate 16, the holes S _{11 to} S ₁₆ , M _{11 to} M ₁₆ , and S _{1 to} S ₈ are exemplified as a one-dimensional array, but the fixing holes and the adhesive holes form a two-dimensional array. Can be created in the same manner as described above. Further, the pin insertion holes Sa and Sb and the bonding holes Ma and Mb shown in FIG. 4 can be created in the same manner as the fixing holes S _{11 to} S ₁₆ and the bonding holes M _{11 to} M _16, and the pins are inserted as necessary. The holes Sa and Sb may be formed in the same manner as the fixing holes S _{1 to} S ₈ without the bonding holes.
[0048]
The present invention is not limited to the above-described embodiment, and can be implemented in various modifications. For example, the following changes are possible.
[0049]
(1) The shape of the optical fiber holder 10 is not limited to a rectangular column shape, and may be a cylindrical shape, a polygonal column (for example, a triangular column, a hexagonal column), or the like.
[0050]
(2) The shape of the holding hole or pin insertion hole of the optical fiber holder 10 and the fixing hole or pin insertion hole of the fixing plates 16 and 16 ′ is not limited to a circular shape, but may be a polygon (for example, a triangle, a square, a parallelogram, (Hexagonal) or the like. When the pin insertion hole of the holder 10 and the pin insertion hole of the fixing plates 16 and 16 ′ are polygonal, the cross-sectional shape of the positioning pin is also a polygonal shape corresponding to the polygonal shape of the pin insertion hole. In this case, since the positioning pin does not rotate, one positioning pin can be used.
[0051]
(3) The present invention is applicable not only to a two-dimensional optical fiber array but also to a one-dimensional optical fiber array or a single-core optical fiber holder (positioning of one optical fiber).
[0052]
【The invention's effect】
As described above, according to the present invention, the positioning pin insertion hole (or groove) of the optical fiber holder with the optical fiber fixing plate inserted into one or more fixing plate insertion grooves provided near one end of the optical fiber holder. Since the positioning pin is inserted into the positioning pin insertion hole (or groove) of the optical fiber fixing plate to align the optical fiber holder and the optical fiber fixing plate, each optical fiber fixing hole of the optical fiber fixing plate is The optical fiber holder can be precisely positioned in the corresponding optical fiber holding hole. Therefore, the operation of inserting the optical fiber into the optical fiber fixing hole through the optical fiber holding hole is facilitated, and an effect of preventing a situation where the optical fiber is broken can be obtained.
[0053]
In addition, since the optical fiber fixing plate is inserted and fixed in the fixing plate insertion groove, it is possible to prevent the optical fiber fixing plate from being warped or peeled off, especially when polishing the end face of the optical fiber holder. The effect of performing the polishing operation without paying special attention to the fiber fixing plate can be obtained.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an optical fiber array according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view taken along line XX ′ of FIG.
FIG. 3 is an enlarged sectional view showing an optical fiber bonding portion.
4 is a cross-sectional view taken along line YY ′ of FIG. 1. FIG.
5 is a perspective view showing a holder creation step in an example of a method for producing the optical fiber array of FIG. 1. FIG.
6 is a perspective view showing a plate insertion groove forming step subsequent to the step of FIG. 5. FIG.
7 is a perspective view showing a fixing plate insertion step subsequent to the step of FIG. 6. FIG.
8 is a perspective view showing a positioning pin insertion / fixing step subsequent to the step of FIG. 7; FIG.
9 is a perspective view showing an optical fiber inserting / fixing step subsequent to the step of FIG. 8. FIG.
10 is a perspective view showing a polishing process subsequent to the process of FIG. 9. FIG.
FIG. 11 is a perspective view showing a modification of the method for aligning the holder and the fixing plate.
FIG. 12 is a cross-sectional view showing a resist layer forming step in an example of a method for producing an optical fiber fixing plate according to the present invention.
13 is a cross-sectional view showing a resist layer forming step that follows the step of FIG. 12. FIG.
14 is a cross-sectional view showing a selective plating step subsequent to the step of FIG.
15 is a cross-sectional view showing a resist removing step that follows the step of FIG. 14;
16 is a cross-sectional view showing a separation step that follows the step of FIG. 15. FIG.
FIG. 17 is a cross-sectional view showing a growth state of a plating layer in the selective plating process.
FIG. 18 is a cross-sectional view showing a modification of the optical fiber fixing plate.
FIG. 19 is a perspective view showing a conventional two-dimensional optical fiber array.
20 is a cross-sectional view taken along line AA ′ of FIG.
[Explanation of symbols]
10: optical fiber holder, 10A, 10B: holder section, 10a, 10b, Sa, Sb: pin insertion hole, 10p-10r: pin insertion groove, 12a, 12b, 12p-12r: positioning pin, 14, 18: plate insertion Groove, 16, 16 ′: Optical fiber fixing plate, 20: Substrate, 22: Cu / Cr laminated, H _{11 to} J ₄₈ : Holding hole, F _{11 to} F ₄₈ : Optical fiber, M _{11 to} M ₄₁ , Ma, Mb , M _{11 to} M ₁₆ : Adhesion hole, S _{11 to} S ₄₁ , S _{11 to} S ₁₆ , S _{1 to} S ₈ : Fixing hole, A ₁₁ , A ₂₁ : Adhesion layer, H: Holding hole group, SM: Adhesion / Fixed hole group, F: optical fiber group, FT: optical fiber tape, R _{11 to} R ₁₆ , R _{21 to} R ₂₆ , R _{1 to} R ₈ , 24: resist layer.

Claims (7)

One or more optical fibers;
An optical fiber holding hole corresponding to each optical fiber of the one or a plurality of optical fibers is provided so as to penetrate from one end to the other end, and is a cylindrical or polygonal shape made of a continuous material from the one end to the other end. In the columnar optical fiber holder, a first positioning pin insertion hole (or groove) is provided separately from each optical fiber holding hole so as to extend from the one end toward the other end, and in the vicinity of the one end. Is provided with a fixing plate insertion groove so as to cross each optical fiber holding hole and the first positioning pin insertion hole (or groove),
An optical fiber fixing plate formed by selective plating and inserted into the fixing plate insertion groove, corresponding to each optical fiber holding hole and the first positioning pin insertion hole (or groove) of the optical fiber holder. Both the optical fiber fixing hole and the second positioning pin insertion hole (or groove) are provided so as to penetrate from one main surface to the other main surface, and each optical fiber fixing hole approaches the other main surface. One formed to increase in size,
The second positioning pin insertion hole (or groove) communicates with the first positioning pin insertion hole (or groove) and the other main surface of the optical fiber fixing plate faces the other end of the optical fiber holder. A positioning pin inserted into the first and second positioning pin insertion holes (or grooves) in a state where the optical fiber fixing plate is inserted into the fixing plate insertion groove, and the first and second positioning pins. Positioning each optical fiber fixing hole of the optical fiber fixing plate in communication with a corresponding optical fiber holding hole of the optical fiber holder in a state of being inserted into the insertion hole (or groove);
The positioning pin is inserted into the first and second positioning pin insertion holes (or grooves), and each optical fiber is fixed to the corresponding optical fiber holding hole of the optical fiber holder and the corresponding optical fiber fixing of the optical fiber fixing plate. optical fiber holding member that the positioning pins and the optical fibers in a state of being inserted into the hole and a fixing means for fixing the optical fiber holder. One or more optical fibers;
An optical fiber holding hole corresponding to each optical fiber of the one or a plurality of optical fibers is provided so as to penetrate from one end to the other end, and is a cylindrical or polygonal shape made of a continuous material from the one end to the other end. In the columnar optical fiber holder, a first positioning pin insertion hole (or groove) is provided separately from each optical fiber holding hole so as to extend from the one end toward the other end, and in the vicinity of the one end. A plurality of fixing plate insertion grooves arranged in parallel so as to cross each optical fiber holding hole and the first positioning pin insertion hole (or groove);
A plurality of optical fiber fixing plates, each formed by selective plating , respectively inserted into the plurality of fixing plate insertion grooves, each optical fiber fixing plate having an optical fiber holding hole and the first optical fiber holding hole. An optical fiber fixing hole and a second positioning pin insertion hole (or groove) respectively corresponding to the positioning pin insertion hole (or groove) are provided so as to penetrate from one main surface to the other main surface, An optical fiber fixing hole formed to increase in size as it approaches the other main surface;
The second positioning pin insertion hole (or groove) of each optical fiber fixing plate is communicated with the first positioning pin insertion hole (or groove), and the other main surface of each optical fiber fixing plate is connected to the optical fiber holder. Each optical fiber fixing plate is inserted into the corresponding fixing plate insertion groove of the optical fiber holder so as to face the other end, and the first positioning pin insertion hole (or groove) and the second of each optical fiber fixing plate are inserted. the positioning pin insertion holes (or grooves) and the inserted respective optical fiber fixed to each optical fiber fixing plate in a state of being inserted into the a positioning pin first and second positioning pin insertion holes (or grooves) Positioning the hole so as to communicate with the corresponding optical fiber holding hole of the optical fiber holder;
The positioning pin is inserted into the first positioning pin insertion hole (or groove) and the second positioning pin insertion hole (or groove) of each optical fiber fixing plate, and each optical fiber corresponds to the optical fiber holder. optical fiber holding member that the positioning pins and the optical fibers in the inserted state in the optical fiber fixing hole and a fixing means for fixing said optical fiber holder corresponding optical fiber holding hole and the optical fiber fixing plate. One or a plurality of optical fibers and an optical fiber holding hole corresponding to each of the one or a plurality of optical fibers are provided so as to penetrate from one end to the other end, and continuous from the one end to the other end A cylindrical or polygonal optical fiber holder made of a constituent material, wherein the first positioning pin insertion hole (or groove) is separated from each optical fiber holding hole so as to extend from the one end toward the other end. A fixing plate insertion groove provided across the optical fiber holding hole and the first positioning pin insertion hole (or groove) in the vicinity of the one end, and inserted into the fixing plate insertion groove. behenate rather each optical fiber holding hole of said optical fiber holder to an optical fiber fixing plate formed by selective plating and the first positioning pin insertion holes (or grooves) in the corresponding optical fiber, respectively Both the fixing hole and the second positioning pin insertion hole (or groove) are provided so as to penetrate from one main surface to the other main surface, and the size of each optical fiber fixing hole becomes closer to the other main surface. Preparing an increase and a positioning pin to be inserted into the first and second positioning pin insertion holes;
The second positioning pin insertion hole (or groove) communicates with the first positioning pin insertion hole (or groove) and the other main surface of the optical fiber fixing plate faces the other end of the optical fiber holder. Inserting the optical fiber fixing plate into the fixing plate insertion groove;
By inserting the positioning pins into the first and second positioning pin insertion holes in a state where the optical fiber fixing plate is inserted into the fixing plate insertion groove, each optical fiber fixing hole of the optical fiber fixing plate is inserted into the light. Positioning to communicate with a corresponding optical fiber holding hole of the fiber holder;
Fixing the positioning pins to the optical fiber holder in a state where the optical fiber fixing holes of the optical fiber fixing plate are positioned in the corresponding optical fiber holding holes of the optical fiber holder by the positioning pins;
With the positioning pins fixed to the optical fiber holder, each optical fiber is connected from the other end of the optical fiber holder to the corresponding optical fiber holding hole of the optical fiber holder and the corresponding optical fiber fixing hole of the optical fiber fixing plate. Inserting step;
Fixing each optical fiber to the optical fiber holder in a state in which each optical fiber is inserted into a corresponding optical fiber holding hole of the optical fiber holder and a corresponding optical fiber fixing hole of the optical fiber fixing plate. The manufacturing method of the holding body . The method further comprises the step of polishing one end side of the optical fiber holder until the optical fiber reaches a holder section between the one end of the optical fiber holder and the fixing plate insertion groove in a state where each optical fiber is fixed to the optical fiber holder. Item 4. A method for producing an optical fiber holder according to Item 3. One or a plurality of optical fibers and an optical fiber holding hole corresponding to each of the one or a plurality of optical fibers are provided so as to penetrate from one end to the other end, and continuous from the one end to the other end A cylindrical or polygonal optical fiber holder made of a constituent material, wherein the first positioning pin insertion hole (or groove) is separated from each optical fiber holding hole so as to extend from the one end toward the other end. A plurality of fixing plate insertion grooves arranged in parallel so as to cross each optical fiber holding hole and the first positioning pin insertion hole (or groove) in the vicinity of the one end; and the plurality of fixing plates each of the plurality of optical fiber holding hole and the first positioning of the optical fiber holder is an optical fiber fixing plate to each optical fiber fixing plate into the insertion groove formed by the base rather selective plating process to be inserted respectively An optical fiber fixing hole and a second positioning pin insertion hole (or groove) respectively corresponding to the pin insertion hole (or groove) are provided so as to penetrate from one main surface to the other main surface, and each optical fiber The fixing hole should be inserted into the first positioning pin insertion hole and the second positioning pin insertion hole of each of the optical fiber fixing plates, which are formed to increase in size as they approach the other main surface. Preparing a positioning pin;
The second positioning pin insertion hole (or groove) of each optical fiber fixing plate is communicated with the first positioning pin insertion hole (or groove), and the other main surface of each optical fiber fixing plate is connected to the optical fiber holder. Inserting each optical fiber fixing plate into the corresponding fixing plate insertion groove of the optical fiber holder to face the other end;
With each optical fiber fixing plate inserted into the corresponding fixing plate insertion groove of the optical fiber holder, the first positioning pin insertion hole (or groove) and the second positioning pin insertion hole (or groove) of each optical fiber fixing plate (or Positioning the optical fiber fixing holes to communicate with the corresponding optical fiber holding holes of the optical fiber holder by inserting the positioning pins into the grooves) , and
Fixing the positioning pin to the optical fiber holder in a state in which each optical fiber fixing hole is positioned in the corresponding optical fiber holding hole of the optical fiber holder for each optical fiber fixing plate by the positioning pin;
With the positioning pins fixed to the optical fiber holder, each optical fiber is connected from the other end of the optical fiber holder to the corresponding optical fiber holding hole of the optical fiber holder and the corresponding optical fiber fixing hole of each optical fiber fixing plate. Inserting step;
Fixing each optical fiber to the optical fiber holder in a state where each optical fiber is inserted into a corresponding optical fiber holding hole of the optical fiber holder and a corresponding optical fiber fixing hole of each optical fiber fixing plate. The manufacturing method of the holding body . One end side of the optical fiber holder until the optical fiber reaches the holder section between one end of the optical fiber holder and one of the plurality of fixing plate insertion grooves in a state where each optical fiber is fixed to the optical fiber holder. The method for producing an optical fiber holder according to claim 5, further comprising a step of polishing the substrate . One or a plurality of optical fiber holding holes are provided so as to penetrate from one end to the other end, and are cylindrical or polygonal column optical fiber holders made of a continuous material from the one end to the other end. A first positioning pin insertion hole (or groove) is provided separately from each optical fiber holding hole so as to extend toward the other end, and each optical fiber holding hole and the first positioning hole are provided in the vicinity of the one end. An optical fiber fixing plate used by being inserted into the fixing plate insertion groove in an optical fiber holder provided with a fixing plate insertion groove so as to cross a pin insertion hole (or groove),
An optical fiber fixing hole and a second positioning pin insertion hole (or groove) respectively corresponding to each optical fiber holding hole and the first positioning pin insertion hole (or groove) of the optical fiber holder are one main surface. optical fiber fixing plate formed by selective plating process so as to increase the size as the other penetrates the main surface and the optical fiber fixing hole closer to the other main surface from.

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