JP3889282B2 - Clean room interior structure - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an interior structure of a clean room used for semiconductor manufacturing or the like.
[0002]
[Prior art]
Conventionally, clean rooms such as semiconductor manufacturing factories and operating rooms are known. The interior structure of this clean room is configured as shown in FIG. In FIG. 3, reference numeral 1 denotes a base structure material such as a metal trunk edge, a field edge, or a joist, and 2 denotes an interior base material such as a gypsum board or veneer plywood attached to the base structure material 1. A conductive interior material 3 such as a conductive cloth or a conductive floor sheet is attached to the interior ground surface constituted by the surface 2 a of the interior foundation material 2.
[0003]
[Problems to be solved by the invention]
In the conventional clean room interior structure, the conductive interior material 3 having an antistatic function is used, and the conductive interior material 3 is connected to the ground to prevent the electrostatic charge. However, particularly when the interior base material 2 is a gypsum board or veneer plywood, the electric charge charged on the surface 3a of the conductive interior material 3 cannot be efficiently released to the ground. Therefore, in the conventional clean room, it can be said that the antistatic measures are not perfect, and dust is accumulated on the surface 3a of the conductive interior material 3, or gas is generated due to an organic reaction caused by the electrostatic spark. There has been a problem of causing troubles in semiconductor manufacturing and the like.
[0004]
[Means for Solving the Problems]
The interior structure of a clean room according to claim 1 of the present invention includes a metal strip attached to the surface of the interior base surface, a conductive interior material attached to the surface of the metal strip and the interior base surface, and the conductive material. And a metal material that is electrically connected to the metal strip through the interior material, and the metal strip is connected to ground.
The interior structure of the clean room according to claim 2 includes a conductive interior material attached to the surface of the interior base surface, a metal strip attached to the surface of the conductive interior material, and an electrical connection to the metal strip. A metal material that is connected and penetrates the conductive interior material, and the metal strip is connected to ground.
According to a third aspect of the present invention, the metal material exposed in the clean room is covered with an interior material having a metal surface electrically connected to the metal material formed on the back surface.
[0005]
DETAILED DESCRIPTION OF THE INVENTION
Embodiment 1 FIG.
Embodiment 1 of the present invention will be described below with reference to FIGS. First, the outline of the clean room of the semiconductor manufacturing factory in the first embodiment will be described with reference to FIG. The clean room has a three-layer structure. That is, it includes a process area 10 in which precision equipment necessary for semiconductor manufacturing and inspection is installed, an underfloor area 20, and a ceiling area 30. The floor of the process area 10 is a perforated floor (grating) 11, and the ceiling of the process area 10 is a perforated ceiling 12. In the ceiling area 30, an air conditioner 31 and an air cleaning filter 32 are provided. An air circulation space 10A is provided on the side of the process area 10 so that the air is purified by the air cleaning filter 32 and circulates in the respective areas 10, 20, and 30 as indicated by arrows. In addition, a front room equipped with an air shower is provided between the entrance 40 and the outside, and a person entering the clean room enters the clean room after performing air washing in the front room. The front room becomes a sealed space with the door 40a on the clean room side and the door on the outside side. In addition, 41 is an entrance / exit between the air circulation space 10A and the process area 10, 41a is a door of the entrance / exit 41, 42 is a pillar, 43 and 44 are fireproof covering beams, 45 is a double window, 46 is a corridor, 47 is This is a wiring pit for storing wiring.
[0006]
Next, the interior structure of the clean room according to Embodiment 1 will be described with reference to FIG. The same parts as those of the conventional example shown in FIG.
In the first embodiment, a metal strip 4 made of aluminum foil, copper foil or the like is attached to the surface 2a of the interior base material 2 serving as the interior base surface. Then, the conductive interior material 3 such as a conductive cloth is attached to the surface 4a of the metal strip 4 and the surface 2a of the interior base material 2 with a cloth paste or the like. Then, a metal needle material 5 such as a stapler as a metal material is driven into the conductive interior material 3 and the metal strip material 4 and attached to the base structure material 1. Thereby, the metal needle material 5 penetrates the conductive interior material 3 and is electrically connected to the metal band material 4. Then, the conductive interior material 6 such as a conductive cloth (normal interior interior) in which a metal strip 14 that electrically connects the head of the metal needle material 5 exposed in the clean room to the metal needle material 5 is bonded to the back surface 6a. Cover with material) and hide. Thereby, the head of the metal needle material 5 and the metal strip 14 are electrically connected. The metal strip 4 and the metal strip 14 are connected to a grounded door frame or connected to ground using a ground wire. FIG. 2 shows a case where the metal strip 4 is connected to the grounded door frames 40b and 41b.
[0007]
According to the above, the conductive interior material 3 and the metal strip 4 are reliably conducted by the metal needle material 5, and the electric charge charged on the surface 3a of the conductive interior material 3 is passed through the metal strip 4 having a large area. It becomes possible to escape to the ground quickly and efficiently, and an interior structure of a clean room having an excellent antistatic effect can be obtained. That is, the electric charge charged on the surface 3 a of the conductive interior material 3 quickly and efficiently escapes to the ground via the metal needle material 5 and the metal strip material 4. Moreover, since the metal surface electrically connected with the metal needle material 5 increases by providing the metal strip 14, the antistatic effect can be further improved.
[0008]
Embodiment 2. FIG.
In the above description, the metal strip 4 is provided on the back side of the conductive interior material 3, but the metal strip 4 may be provided on the surface 3 a side of the conductive interior material 3. Even in this case, the same effect as in the first embodiment can be obtained.
[0009]
In order to efficiently release the electric charge generated by the friction between the air and the surface of the conductive interior material by paying attention only to the antistatic effect, it is only necessary to attach a metal sheet as the conductive interior material 3. Thus, spark discharge may occur in a material having a resistance that is too low (resistance value is approximately 0Ω). Therefore, in order to give a little large resistance only to the surface side of the metal strip 4, the surface 4a of the metal strip 4 is electrically conductive such as a conductive cloth (having a surface resistance of 10 ⁶ to 10 ⁹ Ω) as described above. By covering with the interior materials 3 and 6, the spark discharge can be prevented.
[0010]
Further, the present invention can be applied to any interior structure such as a wall interior structure, a floor interior structure, and a ceiling interior structure.
The present invention can also be applied to an interior structure of a clean room such as an operating room.
[0011]
【The invention's effect】
According to the first and second aspects of the present invention, it is possible to obtain an interior structure of a clean room having an excellent antistatic effect capable of quickly and efficiently releasing charges charged on the surface of the conductive interior material to the ground.
According to the third aspect, since the metal surface is further increased, an interior structure of a clean room having a more excellent antistatic effect can be obtained.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing an interior structure of a clean room according to Embodiment 1 of the present invention.
2 is a cross-sectional view showing an outline of a clean room according to Embodiment 1. FIG.
FIG. 3 is a cross-sectional view showing the interior structure of a conventional clean room.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Ground structure material, 2 Interior base material, 3 Conductive interior material, 4 Metal strip material, 5 Metal needle material (metal material), 6 Conductive interior material (interior material), 6a The back surface of the conductive interior material, 14 Metal strip (metal surface).

Claims (3)

A metal strip attached to the surface of the interior base surface, a conductive interior material attached to the surface of the metal strip and the interior base surface, and electrically penetrates the metal strip through the conductive interior material An interior structure of a clean room, comprising: a connected metal material, wherein the metal strip is connected to ground. Conductive interior material attached to the surface of the interior base surface, metal strip attached to the surface of the conductive interior material, and metal material electrically connected to the metal strip and penetrating through the conductive interior material An interior structure of a clean room, characterized in that the metal strip is connected to ground. 3. The clean room according to claim 1 or 2, wherein the metal material exposed in the clean room is covered with an interior material having a metal surface electrically connected to the metal material formed on the back surface. Interior structure.

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