JP4290963B2 - Clean room construction method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a construction method for a clean room used for semiconductor manufacturing or the like.
[0002]
[Prior art]
Conventionally, clean rooms such as semiconductor manufacturing factories and operating rooms are known. In the construction of this clean room, cleanup measures are taken from the building construction stage in order to bring the clean room to the final level with low cost and short construction period. In other words, daily cleaning during construction and cleaning every lap are thorough, and after completion of the frame construction and steelwork construction, it is mandatory for the occupants to enter their shoes and every time the construction proceeds, Clean construction is required by wearing clean suits and requiring entry through an air shower.
[0003]
[Problems to be solved by the invention]
In conventional clean room construction, the ventilation during construction was naturally ventilated with outside air through a predetermined ventilation port, so condensation formed in the clean room under construction, especially in summer, caused condensation. There was a problem that the removal work was difficult.
[0004]
[Means for Solving the Problems]
According to the construction method of the clean room according to the present invention, before entering the interior construction of the clean room, a sheet material is laid on the cabinet floor of the clean room to prevent dust from floating due to dust generation from the cabinet floor, Water is sprayed into the clean room, and the dust floating in the clean room under construction is attached to the spray water and dropped onto the seat.After the interior construction of the clean room, dry air is supplied to the clean room under construction. Having preventing condensation on interior finish surface Te, before entering the interior construction of the clean room, it is possible to prevent floating of dust in a clean room in construction, Oite the interior work after the clean room, the interior finish surfaces Condensation can be prevented.
[0005]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to FIGS. First, an outline of a clean room of a semiconductor manufacturing factory in the present embodiment will be described with reference to FIG. Generally, a clean room has a structure divided into three areas. That is, it includes a process area 10 in which precision equipment necessary for semiconductor manufacturing and inspection is installed, an underfloor area 20, and a ceiling area 30. The floor of the process area 10 is a perforated floor (grating) 11, and the ceiling of the process area 10 is a perforated ceiling 12. In the ceiling area 30, an air conditioner 31 and an air cleaning filter 32 are provided. An air circulation space 10A is provided on the side of the process area 10 so that the air is purified by the air cleaning filter 32 and circulates in the respective areas 10, 20, and 30 as indicated by arrows. A front room equipped with an air shower is provided between the entrance 40 and the outside, and a person entering the clean room enters the clean room after performing air cleaning in the front room. The front room becomes a sealed space with the door 40a on the clean room side and the door on the outside side. Incidentally, 41 is an entrance / exit between the air circulation space 10A and the process area 10, 41a is a door of the entrance / exit 41, 42 is a pillar, 42a is a steel joist of the perforated floor 11, 43 and 44 are fire-resistant coated beams, 45 is A double window, 46 is a corridor, and 47 is a wiring pit for storing wiring.
[0006]
Next, the construction method of the clean room by embodiment is demonstrated in order with reference to FIG. Here, an example is shown in which construction management is performed in six stages.
・ Step 1
Carry out frame construction and steel frame construction. From this step 1, the entrance / exit of the room occupant and the carry-in entrance for the materials are designated. Then, sweeping and cleaning are performed every day and every work.
Immediately after the completion of the frame construction in step 1, as shown in FIG. 1, the sheet material 1 is laid on the frame floor 21 in the underfloor area 20, and the sprayer 2 sprays water into the clean room under construction.
As described above, by laying the sheet material 1 on the cabinet floor 21 in the underfloor area 20 immediately after the completion of the cabinet construction, it is possible to prevent dust from floating due to dust generation from the cabinet floor 21 and to spray water. By doing so, the dust floating in the clean room under construction adheres to the spray water 2a and falls onto the sheet material 1, so that the dust floating in the clean room space under construction can be efficiently removed.
In addition, the spray water 2a which adhered to the dust and fell on the sheet | seat material 1 is sucked up with a vacuum cleaner suitably. Moreover, spraying is performed every day, and the sheet material 1 is appropriately replaced depending on the degree of contamination.
In this way, the dust prevention and gradual dusting work by laying the sheet material 1 on the frame floor 21 and spraying water into the clean room under construction is performed until the process proceeds to step 3.
・ Step 2
Assembly work of scaffolding, wall foundation concrete molding plate such as ALC plate, wall foundation board, ceiling deck, fireproof coated calcium plate installation work, joinery installation work, ceiling deck painting work, etc. From step 2 onwards, the room entry is required to enter the room. Further, cleaning is performed using a vacuum cleaner or the like every time daily work is completed and every lap.
・ Step 3
Scaffold dismantling work, floor painting work, cloth pasting work, sealing work, joinery and steel frame paint work, etc. From this step 3, the joinery is always closed and, as shown in FIG. 1, dry air 3 a is sent into the clean room under construction using a temporary air conditioner 3 (for example, an air conditioner with a dustproof function). Thereby, the dew condensation in the clean room under construction, especially the dew condensation on the interior finish surface such as the cloth surface and the painted surface can be prevented. The supply of the dry air 3a by the temporary air conditioner 3 is continued until the air conditioner 31 is installed and operated in the ceiling area 30. Further, the same cleaning as in step 2 is performed.
・ Step 4
Perforated floor (grating) construction, ceiling area construction, power piping wiring construction, air conditioning duct piping construction, etc. From step 4 onwards, the room occupants are required to wear clean suits (rough ones). In addition, water wiping and cleaning is performed every day and every cycle.
・ Step 5
Installation of inner wall panel in process area 10, installation work for underfloor equipment, pure water piping work, chemical piping work, etc. From this step 5, it is mandatory to enter the regular entrance route, that is, enter from the previous room. In addition, the interior materials are wiped clean with pure water in daily cleaning and general cleaning every lap.
・ Step 6
Installation work of the air conditioner 31 and air cleaning filter 32, gas equipment work, trial operation (air circulation operation) of the air conditioner 31 and the like are performed. From this step 6, it is mandatory to wear a regular clean suit and enter the room through an air shower. Further, the same cleaning as in step 5 is performed.
[0007]
In the above, the example in which the dry air 3a is supplied into the clean room under construction from Step 3 onward, that is, from the start of the interior work, is shown. You may make it supply the dry air 3a.
Further, as the sheet material 1, for example, if a wet sheet impregnated with a liquid waterproofing agent is used, it is possible to prevent the dust once dropped on the wet sheet from rising again into the space and floating, Since the waterproof treatment is performed, it is possible to prevent the spray water 2a adhering dust from penetrating into the frame floor 21 and contaminating the frame floor 21.
Moreover, the division of the construction by the above steps is an example, and is not limited to this.
[0008]
【The invention's effect】
According to the present onset Akira, in prior to entering the interior construction of the clean room, it is possible to prevent the floating of dust in a clean room in construction, in the interior construction work after the clean room, it is possible to prevent condensation on the interior surface finish.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram for explaining a clean room construction method according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view showing an outline of a clean room constructed by the construction method according to the embodiment.
[Explanation of symbols]
3 Air conditioner, 3a Dry air.

Claims (1)

Before starting clean room interior construction, lay sheet material on the floor of the clean room to prevent dust from floating due to dust from the floor, and spray water into the clean room that is being constructed. The dust floating in the clean room was attached to the spray water and dropped on the sheet.After the clean room interior work , dry air was supplied to the clean room under construction to prevent condensation on the interior finish surface. A clean room construction method .

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