JP4290964B2 - Clean room construction method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a construction method for a clean room used for semiconductor manufacturing or the like.
[0002]
[Prior art]
Conventionally, clean rooms such as semiconductor manufacturing factories and operating rooms are known. In the construction of this clean room, cleanup measures are taken from the building construction stage in order to bring the clean room to the final level with low cost and short construction period. In other words, daily cleaning during construction and cleaning every lap are thorough, and after completion of the frame construction and steelwork construction, it is mandatory for the occupants to enter their shoes and every time the construction proceeds, Clean construction is required by wearing clean suits and requiring entry through an air shower.
[0003]
[Problems to be solved by the invention]
In conventional clean room construction, there is a problem that short-term clean-up construction cannot be achieved because dust continues to float in the space of the clean room under construction after completion of the frame construction and steel frame construction. In addition, especially after completion of the frame construction, dust is generated from the frame floor, and as a result, the amount of dust floating in the space increases.
[0004]
[Means for Solving the Problems]
Method of constructing a clean room of the present invention, in a clean room construction, a construction method of a clean room which is adapted to spray water laying a sheet precursor floor clean room space of the clean room, as the sheet, a liquid Using a wet sheet impregnated with a waterproofing agent, it prevents dust floating due to dust generation from the enclosure floor, re-floating of dust that has fallen once attached to the spray water, and penetration of spray water into the enclosure floor. This effectively removes the dust floating in the clean room space under construction, prevents the dust from re-floating, and also causes the spray water adhering to the dust to permeate the cabinet floor and contaminate the cabinet floor. So that it can be prevented.
In addition, immediately after the completion of the clean room enclosure work, the wet sheet is laid on the floor of the clean room and water is sprayed onto the space of the clean room to prevent dust from floating due to dust generation from the enclosure floor. Efficiently remove dust floating in the space with spray water .
In addition, during the construction of the clean room, so as to supply the dry air, to prevent condensation in the construction. In particular, dry air is supplied after clean room interior construction to prevent condensation on the interior finish surface of the clean room.
[0005]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to FIGS. First, an outline of a clean room of a semiconductor manufacturing factory in the present embodiment will be described with reference to FIG. Generally, a clean room has a structure divided into three areas. That is, it includes a process area 10 in which precision equipment necessary for semiconductor manufacturing and inspection is installed, an underfloor area 20, and a ceiling area 30. The floor of the process area 10 is a perforated floor (grating) 11, and the ceiling of the process area 10 is a perforated ceiling 12. In the ceiling area 30, an air conditioner 31 and an air cleaning filter 32 are provided. An air circulation space 10A is provided on the side of the process area 10 so that the air is purified by the air cleaning filter 32 and circulates in the respective areas 10, 20, and 30 as indicated by arrows. A front room equipped with an air shower is provided between the entrance 40 and the outside, and a person entering the clean room enters the clean room after performing air cleaning in the front room. The front room becomes a sealed space with the door 40a on the clean room side and the door on the outside side. Incidentally, 41 is an entrance / exit between the air circulation space 10A and the process area 10, 41a is a door of the entrance / exit 41, 42 is a pillar, 42a is a steel joist of the perforated floor 11, 43 and 44 are fire-resistant coated beams, 45 is A double window, 46 is a corridor, and 47 is a wiring pit for storing wiring.
[0006]
Next, the construction method of the clean room by embodiment is demonstrated in order with reference to FIG. Here, an example is shown in which construction management is performed in six stages.
・ Step 1
Carry out frame construction and steel frame construction. From this step 1, the entrance / exit of the room occupant and the carry-in entrance for materials, etc. are designated. Then, sweeping and cleaning are performed every day and every work.
Immediately after the completion of the frame construction in step 1, as shown in FIG. 1, a wet sheet 1 (a sheet impregnated with a liquid waterproofing agent) is laid on the cabinet floor 21 in the underfloor area 20, and the construction is performed by the sprayer 2. Spray water in the clean room.
As described above, by laying the wet sheet 1 on the cabinet floor 21 in the underfloor area 20 immediately after the completion of the cabinet construction, it is possible to prevent dust from floating due to dust generation from the cabinet floor 21 and to spray water. By doing so, the dust floating in the clean room under construction adheres to the spray water 2a and falls onto the wet sheet 1, so that the dust floating in the clean room space under construction can be efficiently removed.
Moreover, since the wet sheet 1 impregnated with a liquid waterproofing agent is used, it is possible to prevent dust once dropped on the wet sheet 1 from rising again into the space and floating, and further, waterproofing is applied. Therefore, it is also possible to prevent the spray water 2a adhering dust from penetrating into the chassis floor 21 and contaminating the chassis floor 21.
In addition, the spray water 2a which adhered dust and fell on the wet sheet | seat 1 is sucked up with a vacuum cleaner suitably. Further, spraying is performed every day, and the wet sheet 1 is appropriately replaced depending on the degree of contamination.
Thus, the dust-proofing and gradual dusting operations by laying the wet sheet 1 on the frame floor 21 and spraying water in the clean room under construction are performed until the process proceeds to step 3.
・ Step 2
Assembly work of scaffolding, wall foundation concrete molding plate such as ALC plate, wall foundation board, ceiling deck, fireproof coated calcium plate installation work, joinery installation work, ceiling deck painting work, etc. From step 2 onwards, the room entry is required to enter the room. Further, cleaning is performed using a vacuum cleaner or the like every time daily work is completed and every lap.
・ Step 3
Scaffold dismantling work, floor painting work, cloth pasting work, sealing work, joinery and steel frame paint work, etc. From this step 3, the fitting is always closed, and as shown in FIG. 1, the dry air 3 a is sent into the clean room under construction using a temporary air conditioner 3 (for example, an air conditioner with a dustproof function). Thereby, the dew condensation in the clean room under construction, especially the dew condensation on the interior finish surface such as the cloth surface and the painted surface can be prevented. The supply of the dry air 3a by the temporary air conditioner 3 is continued until the air conditioner 31 is installed and operated in the ceiling area 30. Further, the same cleaning as in step 2 is performed.
・ Step 4
Perforated floor (grating) construction, ceiling area construction, power piping wiring construction, air conditioning duct piping construction, etc. From step 4 onwards, the room occupants are required to wear clean suits (rough ones). In addition, water wiping and cleaning is performed every day and every cycle.
・ Step 5
Installation of inner wall panel in process area 10, installation work for underfloor equipment, pure water piping work, chemical piping work, etc. From this step 5, it is mandatory to enter the regular entrance route, that is, enter from the previous room. In addition, the interior materials are wiped clean with pure water in daily cleaning and general cleaning every lap.
・ Step 6
Installation work of the air conditioner 31 and air cleaning filter 32, gas equipment work, trial operation (air circulation operation) of the air conditioner 31 and the like are performed. From step 6, it is mandatory to wear a regular clean suit and enter the room through an air shower. Further, the same cleaning as in step 5 is performed.
[0007]
In the above, immediately after the completion of the frame construction in step 1, the wet sheet 1 is laid, and the sprayer 2 sprays water into the clean room space under construction, but after entering step 2, The wet sheet 1 may be laid and sprayed with water. For example, the floating of dust due to dust generation from the frame floor 21 is left until about the middle of step 2, and then the wet dust 1 is spread from the middle of step 2 to remove the floating dust by spraying water. It may be. That is, the operation of spreading the wet sheet 1 and spraying water may be performed during the construction of the clean room, preferably during the construction of the clean room before entering the interior construction of the clean room.
In the above description, the wet sheet 1 (a sheet impregnated with a liquid waterproofing agent) is used, but an ordinary sheet may be used.
Further, in the above, an example in which the dry air 3a is supplied into the clean room under construction from Step 3 onward, that is, from the start of the interior work, is shown. You may make it supply the dry air 3a.
Moreover, the division of the construction by the above steps is an example, and is not limited to this.
[0008]
【The invention's effect】
According to claim 1 of the present invention, Rutotomoni such as dust floating in the space of the clean room in the construction can be efficiently removed, resuspended prevention of dust, further, building frame bed spray water attached to dust It is possible to prevent the body floor from getting dirty and soiling the building floor, thereby realizing a short-term cleaning construction.
According to claim 2, it is possible to prevent the dust from floating due to dust generated from the floor of the clean room under construction, and to efficiently remove the dust floating in the clean room space. Can be realized .
According to 請 Motomeko 3, further, in a clean room construction, it is possible to prevent dew condensation in the clean room in the construction.
According to claim 4, it is possible to prevent condensation on the interior finish surface of the clean room.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram for explaining a clean room construction method according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view showing an outline of a clean room constructed by the construction method according to the embodiment.
[Explanation of symbols]
1 wet sheet (sheet), 2 sprayer, 3 air conditioner, 3a dry air.

Claims (4)

During the construction of a clean room, a clean room construction method in which a sheet is laid on the cabinet floor of the clean room and water is sprayed into the space of the clean room, and a wet sheet impregnated with a liquid waterproofing agent is used as the sheet. A clean room construction method characterized by preventing floating of dust due to dust generation from the chassis floor, re-floating of dust once dropped on the spray water, and penetration of spray water into the chassis floor . 2. The method for constructing a clean room according to claim 1, wherein the wet sheet is laid on the body floor of the clean room and water is sprayed into the space of the clean room immediately after the completion of the clean room housing . 3. The clean room construction method according to claim 1, wherein dry air is supplied into the clean room being constructed during construction of the clean room. 3. The clean room construction method according to claim 1, wherein dry air is supplied into the clean room being constructed after the interior construction of the clean room.

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