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JP4367612B2 - Porous body-coated particles, and a precursor for heat insulating material and the heat insulating material containing the porous body-coated particles - Google Patents
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JP4367612B2 - Porous body-coated particles, and a precursor for heat insulating material and the heat insulating material containing the porous body-coated particles - Google Patents

Porous body-coated particles, and a precursor for heat insulating material and the heat insulating material containing the porous body-coated particles Download PDF

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JP4367612B2
JP4367612B2 JP2003316772A JP2003316772A JP4367612B2 JP 4367612 B2 JP4367612 B2 JP 4367612B2 JP 2003316772 A JP2003316772 A JP 2003316772A JP 2003316772 A JP2003316772 A JP 2003316772A JP 4367612 B2 JP4367612 B2 JP 4367612B2
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heat insulating
porous body
particle
insulating material
particles
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JP2005081495A (en
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牧男 内藤
浩也 阿部
泰男 伊藤
高弘 大村
武久 福井
雅浩 吉川
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Hosokawa Micron Corp
Nichias Corp
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Nichias Corp
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Priority to US10/855,895 priority patent/US7250212B2/en
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Description

本発明は、多孔体被覆粒子及びその製造方法に関し、更には前記多孔体被覆粒子を含有する断熱材用前駆体及び断熱材に関する。   The present invention relates to a porous body-coated particle and a method for producing the same, and further relates to a heat insulating material precursor and the heat insulating material containing the porous body-coated particle.

より熱伝導性が低く、断熱性能に優れた断熱材として、低熱伝導材料である超微粒子状無水シリカ(例えば、日本アエロジル株式会社製:商品名アエロジル)、セラミックファイバ、更には酸化チタン、酸化ジルコニウム等の粒子からなる輻射吸収散乱材等を混合し、プレス成形を行った後、機械加工することによって得られる低熱伝導断熱材(特許文献1〜6参照)等が知られている。 More low thermal conductivity, as an excellent heat insulating material in the heat insulating performance, low thermal ultrafine particulate anhydrous silica, which is a conductive material (e.g., Nippon Aerosil Co., Ltd .: trade name Aerosil), ceramic fiber, and further oxidation of titanium oxide Known is a low thermal conductive heat insulating material (see Patent Documents 1 to 6) obtained by mixing a radiation absorption / scattering material composed of particles such as zirconium, press forming, and then machining.

特開平7−267756号公報JP-A-7-267756 特表平10−509940号公報Japanese National Patent Publication No. 10-509940 特表平10−509941号公報Japanese National Patent Publication No. 10-509941 特表平11−513349号公報Japanese National Patent Publication No. 11-513349 特表平10−514959号公報Japanese National Patent Publication No. 10-514959 特表2000−506570号公報Special Table 2000-506570

上記の超微粒子状無水シリカや超臨界乾燥シリカは、直径数nm〜数十nmの微粒子で、常温(25℃)での熱伝導率(以下、同様)が0.01W/(m・K)程度の低熱伝導材料である。しかし、超微粒子状無水シリカや超臨界乾燥シリカは直径数nm〜数十nmの微粒子であることから、分子間力等により会合して二次粒子を形成し、図6に模式的に示すように、この二次粒子10がセラミックファイバやガラスファイバ等の無機繊維20の繊維間に点在している。そのため、無機繊維20が絡み合っている部分では繊維間での熱伝導が起こり、超微粒子状無水シリカや超臨界乾燥シリカが持つ低熱伝導性が大きく損なわれている。例えば、ガラスファイバの熱伝導率は0.1W/(m・K)程度であり、断熱材全体としての断熱性能はこのガラスファイバの熱伝導率に大きく依存している。   The above ultrafine anhydrous silica and supercritical dry silica are fine particles having a diameter of several nanometers to several tens of nanometers, and have a thermal conductivity (hereinafter the same) of 0.01 W / (m · K) at room temperature (25 ° C.). It is a low thermal conductivity material. However, since ultrafine anhydrous silica and supercritical dry silica are fine particles having a diameter of several nanometers to several tens of nanometers, they associate with each other by intermolecular force to form secondary particles, as schematically shown in FIG. The secondary particles 10 are interspersed between the fibers of the inorganic fibers 20 such as ceramic fibers and glass fibers. Therefore, heat conduction occurs between the fibers where the inorganic fibers 20 are intertwined, and the low thermal conductivity of the ultrafine anhydrous silica or supercritical dry silica is greatly impaired. For example, the thermal conductivity of the glass fiber is about 0.1 W / (m · K), and the heat insulating performance of the entire heat insulating material greatly depends on the thermal conductivity of the glass fiber.

また、輻射吸収散乱材1aは200℃を超える高温域での熱伝導低減に効果的であるが、隣接する輻射吸収散乱材間で固体伝導が起こり、特に200℃以下の低温域での熱伝導が大きくなる。更には、輻射吸収散乱材1aと無機繊維20との間でも固体伝導が起こる。   Further, the radiation absorption / scattering material 1a is effective in reducing heat conduction in a high temperature range exceeding 200 ° C., but solid conduction occurs between adjacent radiation absorption / scattering materials, and in particular, heat conduction in a low temperature range of 200 ° C. or less. Becomes larger. Further, solid conduction occurs between the radiation absorbing / scattering material 1 a and the inorganic fiber 20.

更に、断熱性能を重視して、バインダを用いることなく、無機繊維20、超微粒子状無水シリカや超臨界乾燥シリカ及び輻射吸収散乱材1aとの混練物をプレス成形しているため、機械的強度が不足しており、断熱材が割れたり、切断端面の欠け等が起こりやすく、取り扱い性や加工性に劣るという欠点もある。更に、超微粒子状無水シリカや超臨界乾燥シリカの二次粒子10は繊維間に入り込んでいるだけであり、この二次粒子10と無機繊維1との付着力も小さく、二次粒子10が脱離して(粉落ち)外部を汚染する。そのため、例えば、半導体製造装置等の清浄さが要求される用途には使用し難いという問題もある。   Furthermore, since the kneaded material of the inorganic fiber 20, the ultrafine anhydrous silica, the supercritical dry silica, and the radiation absorption scattering material 1a is press-molded without using a binder with an emphasis on heat insulation performance, the mechanical strength is increased. Is insufficient, the heat insulating material is cracked, the cut end face is likely to be chipped, etc., and there are also disadvantages in that it is inferior in handleability and workability. Furthermore, the secondary particles 10 of ultrafine anhydrous silica or supercritical dry silica only penetrate between the fibers, and the adhesion between the secondary particles 10 and the inorganic fibers 1 is small, and the secondary particles 10 are removed. Separate (powders) to contaminate the outside. Therefore, for example, there is also a problem that it is difficult to use in applications that require cleanliness such as semiconductor manufacturing equipment.

そこで本発明の目的は、断熱性能に優れ、更に機械的強度や取扱性、加工性にも優れる断熱材、並びに前記断熱材を得るのに好適な多孔体被覆粒子及び前記多孔体被覆粒子を含む断熱材用前駆体を提供することにある。   Accordingly, an object of the present invention includes a heat insulating material that is excellent in heat insulating performance and also excellent in mechanical strength, handleability, and workability, and a porous coated particle suitable for obtaining the heat insulating material and the porous coated particle. It is in providing the precursor for heat insulating materials.

上記の目的を達成するために、本発明は、下記の多孔体被覆粒子、並びに前記多孔体被覆粒子を含む複合体及び断熱材を提供する。
(1)第1の無機化合物からなる微粒子がリング状または螺旋状に会合した二次粒子で形成される多孔体により、第2の無機化合物からなるコア粒子が被覆されていることを特徴とする多孔体被覆粒子。
(2)前記コア粒子が平均粒子径30μm以下であることを特徴とする上記(1)記載の多孔体被覆粒子。
(3)前記微粒子が平均粒子径5〜50nmであることを特徴とする上記(1)または(2)記載の多孔体被覆粒子。
(4)前記二次粒子のリング内径が0.1μm以下であることを特徴とする上記(1)〜(3)の何れか一項に記載の多孔体被覆粒子。
(5)前記コア粒子が5〜50質量%で、前記微粒子が50〜95質量%であることを特徴とする上記(1)〜(4)の何れか一項に記載の多孔体被覆粒子。
(6)無機繊維及び前記無機繊維が前記二次粒子で形成される多孔体により被覆された多孔体被覆繊維から選ばれる少なくとも1種の繊維材料と、上記(1)〜(5)の何れか1項に記載の多孔体被覆粒子とを含有することを特徴とする断熱材用前駆体。
(7)前記多孔体被覆粒子が55〜95質量%で、前記繊維材料が5〜45質量%であることを特徴とする上記(6)記載の断熱材用前駆体。
(8)上記(6)または(7)記載の断熱材用前駆体を加圧成形してなることを特徴とする断熱材。
(9)かさ密度が200〜600kg/mで、曲げ強度が0.3MPa以上であることを特徴とする上記(8)記載の断熱材。
(10)1000℃における熱伝導率が0.04W/(m・K)以下であることを特徴とする上記(9)記載の断熱材。
In order to achieve the above object, the present invention provides the following porous-coated particles, and a composite and a heat insulating material including the porous-coated particles.
(1) The core particles made of the second inorganic compound are covered with a porous body formed of secondary particles in which fine particles made of the first inorganic compound are associated in a ring shape or a spiral shape. Porous coated particles.
(2) The porous material-coated particle according to (1), wherein the core particle has an average particle diameter of 30 μm or less.
(3) The porous material-coated particles according to (1) or (2), wherein the fine particles have an average particle diameter of 5 to 50 nm.
(4) The porous body-coated particle according to any one of (1) to (3) above, wherein a ring inner diameter of the secondary particle is 0.1 μm or less.
(5) The porous material-coated particle according to any one of (1) to (4), wherein the core particle is 5 to 50% by mass and the fine particle is 50 to 95% by mass.
(6) At least one fiber material selected from inorganic fibers and porous coated fibers in which the inorganic fibers are covered with a porous body formed of the secondary particles, and any one of the above (1) to (5) A precursor for a heat insulating material, comprising the porous material-coated particles according to item 1.
(7) The precursor for a heat insulating material according to (6), wherein the porous body-coated particles are 55 to 95% by mass and the fiber material is 5 to 45% by mass.
(8) A heat insulating material obtained by pressure-molding the heat insulating material precursor according to (6) or (7).
(9) The heat insulating material according to (8), wherein the bulk density is 200 to 600 kg / m 3 and the bending strength is 0.3 MPa or more.
(10) The heat insulating material according to the above (9), wherein the heat conductivity at 1000 ° C. is 0.04 W / (m · K) or less.

本発明によれば、断熱性能に優れ、更に機械的強度や取扱性、加工性にも優れる断熱材、並びに前記断熱材を得るのに好適な多孔体被覆粒子及び前記多孔体被覆粒子を含む断熱材用前駆体が提供される。   According to the present invention, a heat insulating material excellent in heat insulating performance and further excellent in mechanical strength, handleability and workability, a porous coated particle suitable for obtaining the heat insulating material, and a heat insulating material including the porous coated particle. A precursor for the material is provided.

以下、本発明に関して図面を参照して詳細に説明する。   Hereinafter, the present invention will be described in detail with reference to the drawings.

図1は本発明の多孔体被覆粒子を示す模式図であり、図2は無機化合物からなる微粒子(以下、「無機微粒子」という)の二次粒子を拡大して示す模式図である。図示されるように、本発明の多孔体被覆粒子100は、無機化合物からなるコア粒子1に、複数の無機微粒子10aがリング状または螺旋状に会合した二次粒子10が付着し、更に堆積したものであり、コア粒子1が無機微粒子10aからなる多孔体で被覆された構造となっている。   FIG. 1 is a schematic view showing porous body-coated particles of the present invention, and FIG. 2 is a schematic view showing enlarged secondary particles of fine particles (hereinafter referred to as “inorganic fine particles”) made of an inorganic compound. As shown in the drawing, in the porous body-coated particle 100 of the present invention, the secondary particles 10 in which a plurality of inorganic fine particles 10a are associated in a ring shape or a spiral shape are attached to the core particle 1 made of an inorganic compound and further deposited. The core particle 1 is covered with a porous body made of inorganic fine particles 10a.

コア粒子1は、例えば炭化珪素や酸化チタン、酸化ジルコニウム等の輻射吸収散乱材料からなる粒子とすることができる。ここで、輻射吸収散乱材料としては絶対屈折率が1.5以上である無機粒子であればよく、前記粒子に限定されるものではない。このコア粒子1は、無機微粒子10aの付着性を高めるために酸化熱処理されていることが好ましい。この酸化熱処理により、コア粒子1の表面に酸化物からなる微小粒子が生成して微細な凹凸が形成され、無機微粒子10aの付着力が高まる。処理条件としては、空気中または酸素雰囲気中にて800〜1200℃で3〜12時間加熱すればよい。また、コア粒子1は、断熱材としたときの断熱性能や機械的強度を考慮すると、平均粒子径で30μm以下であることが好ましい。   The core particle 1 can be a particle made of a radiation absorption / scattering material such as silicon carbide, titanium oxide, or zirconium oxide. Here, the radiation absorption / scattering material may be inorganic particles having an absolute refractive index of 1.5 or more, and is not limited to the particles. The core particle 1 is preferably subjected to an oxidation heat treatment in order to improve the adhesion of the inorganic fine particles 10a. By this oxidation heat treatment, fine particles made of oxide are generated on the surface of the core particle 1 to form fine irregularities, and the adhesion of the inorganic fine particles 10a is increased. The treatment conditions may be heating at 800 to 1200 ° C. for 3 to 12 hours in air or in an oxygen atmosphere. The core particle 1 preferably has an average particle diameter of 30 μm or less in consideration of heat insulating performance and mechanical strength when used as a heat insulating material.

無機微粒子10aは、例えば超微粒子状無水シリカや超臨界乾燥シリカ等を使用することができる。上述のように、これらは熱伝導率が0.01W/(m・K)程度であり、本発明においても好ましいものである。その他にも、アルミナ等の微粒子も用いることができる。また、無機微粒子10aは、平均粒子径で5〜50nmであることが好ましい。上述のように、また図2にも示すように、このような微粒子は、分子間力、静電気力等により会合してリング状または螺旋状の二次粒子10を形成するが、その際、リング内径(R)が0.1μm(100nm)以下であることが好ましい。これは、伝熱媒体となる空気の平均自由行程が常温で約100nmであり、リング内径(R)が0.1μm程度以下であれば二次粒子10を通じての伝熱をほぼ防止できることによる。尚、後述するように、二次粒子10は変形した状態で積層して多孔体を形成するが、その際にリング内径(R)も小さくなり、空気の平均自由行程以下となる。平均粒径が5〜50nmの無機微粒子10aは、このようなリング内径(R)の二次粒子10を形成しやすい。これら無機微粒子10aは、複数種を併用してもよい。更に、必要に応じて、他の無機微粒子を混合してもよい。   As the inorganic fine particle 10a, for example, ultrafine anhydrous silica, supercritical dry silica, or the like can be used. As described above, these have a thermal conductivity of about 0.01 W / (m · K), which is also preferable in the present invention. In addition, fine particles such as alumina can also be used. The inorganic fine particles 10a preferably have an average particle diameter of 5 to 50 nm. As described above and as shown in FIG. 2, such fine particles associate with each other by intermolecular force, electrostatic force, or the like to form ring-shaped or spiral secondary particles 10. The inner diameter (R) is preferably 0.1 μm (100 nm) or less. This is because heat transfer through the secondary particles 10 can be substantially prevented if the mean free path of air serving as a heat transfer medium is about 100 nm at room temperature and the ring inner diameter (R) is about 0.1 μm or less. As will be described later, the secondary particles 10 are laminated in a deformed state to form a porous body. At that time, the ring inner diameter (R) is also reduced, and is below the mean free path of air. The inorganic fine particles 10a having an average particle diameter of 5 to 50 nm tend to form secondary particles 10 having such a ring inner diameter (R). A plurality of these inorganic fine particles 10a may be used in combination. Furthermore, other inorganic fine particles may be mixed as necessary.

コア粒子1と無機微粒子10aとの配合比は、コア粒子1が5〜50質量%で、無機微粒子10aが50〜95質量%であることが好ましい。無機微粒子10aの配合割合が50質量%未満では、コア粒子1が二次粒子10により十分厚く被覆されないおそれがある。   The compounding ratio between the core particles 1 and the inorganic fine particles 10a is preferably 5 to 50% by mass of the core particles 1 and 50 to 95% by mass of the inorganic fine particles 10a. If the blending ratio of the inorganic fine particles 10a is less than 50% by mass, the core particles 1 may not be sufficiently thickly covered with the secondary particles 10.

本発明の多孔体被覆粒子100を得るには、コア粒子1と無機微粒子10aとを上記の配合で乾式混合した混合物を微小隙間に繰り返し通過させればよい。具体的には、図3に示すような回転混合装置30を用いる。この回転混合装置30は、円筒状のチャンバ31の内部に、押圧部材32を配して構成されている。チャンバ31は図中矢印方向に回転し、押圧部材32は、その一端がチャンバ31の内壁との間で所定の微小隙間を形成するように固定されている。   In order to obtain the porous body-coated particles 100 of the present invention, a mixture obtained by dry-mixing the core particles 1 and the inorganic fine particles 10a with the above composition may be repeatedly passed through the minute gaps. Specifically, a rotary mixing device 30 as shown in FIG. 3 is used. The rotary mixing device 30 is configured by arranging a pressing member 32 inside a cylindrical chamber 31. The chamber 31 rotates in the direction of the arrow in the figure, and the pressing member 32 is fixed so that one end thereof forms a predetermined minute gap with the inner wall of the chamber 31.

そして、回転混合装置30に、コア粒子1と無機微粒子10aとを上記配合比にて投入し(図中、符号35)、チャンバ31を回転させる。この回転に伴い、コア粒子1の表面に無機微粒子10aからなる二次粒子10が付着し、その上に別の二次粒子10が順次積層して積層体を形成する。その際、チャンバ31と押圧部材32との微小隙間を通過することにより二次粒子10がコア粒子1の表面に押し込まれるように付着し、積層する際も二次粒子10同士が強く押し付け合うため、二次粒子10のリング状形状または螺旋状形状が変形したり、鎖状または個々の無機微粒子10aに分解して相互に複雑に絡み合い、コア粒子1から無機微粒子10aあるいは二次粒子10が脱離することはない。また、無機微粒子10aの粒子間で微細空孔が多数形成されるため、得られる積層体は多孔体となる。   And the core particle 1 and the inorganic fine particle 10a are thrown into the rotation mixing apparatus 30 by the said compounding ratio (code | symbol 35 in the figure), and the chamber 31 is rotated. Along with this rotation, the secondary particles 10 composed of the inorganic fine particles 10a adhere to the surface of the core particle 1, and another secondary particle 10 is sequentially laminated thereon to form a laminated body. At that time, the secondary particles 10 adhere so as to be pushed into the surface of the core particle 1 by passing through a minute gap between the chamber 31 and the pressing member 32, and the secondary particles 10 are strongly pressed against each other even when they are stacked. The ring-shaped or spiral shape of the secondary particles 10 is deformed or decomposed into chain-like or individual inorganic fine particles 10a and complicatedly entangled with each other, so that the inorganic fine particles 10a or the secondary particles 10 are detached from the core particles 1. Never leave. Moreover, since many fine voids are formed between the particles of the inorganic fine particles 10a, the obtained laminate is a porous body.

図4は、コア粒子1として酸化熱処理した化珪素を用い、無機微粒子1aとして超微粒子状無水シリカを用いて作製した多孔体被覆粒子100を撮影した電子顕微鏡写真であるが、表面に超微粒子状無水シリカからなる二次粒子が積層した多孔体が形成されており、化珪素が露呈していないことがわかる。 4, using an oxidizing heat-treated carbon of silicon as the core particles 1, but as the inorganic fine particles 1a is an electron microscopic photograph of the porous coating particles 100 produced using the ultrafine particles of anhydrous silica, ultrafine particles on the surface porous secondary particles composed of Jo anhydrous silica are laminated is formed, it can be seen that the carbonization silicon is not exposed.

本発明はまた、上記の多孔体被覆粒子100を含有する断熱材を提供するが、多孔体被覆粒子100のみでは成形が困難であり、得られる断熱材も保形性に劣り、機械的強度も低いものとなる。バインダを用いることも考えられるが、断熱性能が低下するため、本発明では繊維材料を混入して断熱材とする。   The present invention also provides a heat insulating material containing the porous body-coated particles 100 described above. However, it is difficult to mold the porous body-coated particles 100 alone, and the obtained heat insulating material is also inferior in shape retention and mechanical strength. It will be low. Although it is conceivable to use a binder, since the heat insulation performance is lowered, a fiber material is mixed in the present invention to form a heat insulating material.

繊維材料としては、無機繊維そのもの、あるいは無機繊維を上記のように無機微粒子1aの二次粒子10からなる多孔体で被覆したものを用いることができる。多孔体で被覆した無機繊維を用いることにより、断熱材中で無機繊維同士が直接接触せず、固体伝導が起こらないため断熱性能に優れたものとなる。   As the fiber material, inorganic fibers themselves or those coated with a porous body made of the secondary particles 10 of the inorganic fine particles 1a as described above can be used. By using the inorganic fiber covered with the porous body, the inorganic fibers are not in direct contact with each other in the heat insulating material, and solid conduction does not occur, so that the heat insulating performance is excellent.

無機繊維としては、アルミナ繊維、シリカ・アルミナ繊維、シリカ繊維、ムライト繊維等のセラミック繊維、ガラス繊維、ロックール等を用いることができる。中でも、低熱伝導性の、好ましくは熱伝導率0.1W/(m・K)以下、特に0.04W/(m・K)以下の無機繊維が好ましく、シリカ・アルミナ繊維やシリカ繊維等のシリカ系繊維を好適に使用できる。また、無機繊維は、平均繊維径が15μm以下であることが好ましい。平均繊維径が15μmを超えると、表面積が大きくなるため、後述する二次粒子10による被覆作業に長時間を要し製造上好ましくない。更に、無機繊維の平均繊維長は50μm以上が好ましい。平均繊維長が50μm未満では、成形したときの多孔体被覆繊維100の配向が少なく、機械的強度が不足する。これらの無機繊維は、複数種を併用してもよい。   As the inorganic fibers, alumina fibers, silica / alumina fibers, silica fibers, mullite fibers and other ceramic fibers, glass fibers, rock ole and the like can be used. Among these, inorganic fibers having low thermal conductivity, preferably thermal conductivity of 0.1 W / (m · K) or less, particularly 0.04 W / (m · K) or less are preferable, and silica such as silica / alumina fiber or silica fiber is preferable. A system fiber can be used conveniently. The inorganic fiber preferably has an average fiber diameter of 15 μm or less. When the average fiber diameter exceeds 15 μm, the surface area becomes large, so that it takes a long time to cover with the secondary particles 10 to be described later, which is not preferable in production. Furthermore, the average fiber length of the inorganic fibers is preferably 50 μm or more. When the average fiber length is less than 50 μm, the orientation of the porous body-coated fiber 100 when molded is small, and the mechanical strength is insufficient. These inorganic fibers may be used in combination.

また、無機繊維を無機微粒子10aの二次粒子10からなる多孔体で被覆するには、多孔体被覆粒子100と同様に、図3に示す回転混合装置30を用いて無機繊維と無機微粒子10aとを回転混合することにより得られる。   Further, in order to coat the inorganic fiber with the porous body composed of the secondary particles 10 of the inorganic fine particles 10a, similarly to the porous body-coated particles 100, the inorganic fibers and the inorganic fine particles 10a can be obtained using the rotary mixing device 30 shown in FIG. Obtained by rotary mixing.

断熱材とするには、これら繊維材料と、上記の多孔体被覆粒子100とを混合した断熱材用前駆体を作製し、この断熱材用前駆体を所定の金型に充填してプレス成形すればよい。図5に本発明の断熱材を模式的に示すが、多孔体被覆粒子100が繊維材料200(ここでは無機微粒子10aの二次粒子10からなる多孔体で被覆された無機繊維20)の間に分散しており、その際、多孔体被覆粒子100は無機微粒子10aの二次粒子10からなる多孔体で被覆されているため、コア粒子間で固体伝導を起こすことがなく、断熱性能に優れたものとなる。また、繊維材料200を無機微粒子10aの二次粒子10からなる多孔体で被覆された無機繊維20とすることにより、繊維材料間での固体伝導も無くなり、断熱性能がより高まる。   In order to obtain a heat insulating material, a precursor for heat insulating material obtained by mixing these fiber materials and the above-mentioned porous body-coated particles 100 is prepared, and this heat insulating material precursor is filled in a predetermined mold and press-molded. That's fine. FIG. 5 schematically shows the heat insulating material of the present invention, in which the porous material-coated particles 100 are between the fiber materials 200 (here, the inorganic fibers 20 covered with the porous material composed of the secondary particles 10 of the inorganic fine particles 10a). At that time, since the porous body-coated particles 100 are coated with a porous body composed of the secondary particles 10 of the inorganic fine particles 10a, solid conduction does not occur between the core particles, and the heat insulating performance is excellent. It will be a thing. In addition, when the fiber material 200 is the inorganic fiber 20 covered with the porous body made of the secondary particles 10 of the inorganic fine particles 10a, solid conduction between the fiber materials is eliminated, and the heat insulation performance is further improved.

尚、断熱材用前駆体における多孔体被覆粒子100と繊維材料200との配合割合は、得られる断熱材の断熱性能や機械的特性を考慮すると、多孔体被覆粒子100が全体の55〜95質量%で、繊維材料200が5〜45質量%であることが好ましい。   In addition, the mixture ratio of the porous body covering particle 100 and the fiber material 200 in the precursor for heat insulating material is 55 to 95 mass of the whole of the porous body covering particle 100 in consideration of the heat insulating performance and mechanical characteristics of the heat insulating material to be obtained. %, And the fiber material 200 is preferably 5 to 45% by mass.

また、断熱材は、かさ密度を200〜600kg/m、好ましくは300〜500kg/mとすることにより、断熱性能及び機械的強度に優れた断熱材が得られる。具体的には、曲げ強度が0.3MPa以上となり割れ難く、1000℃における熱伝導率も0.04W/(m・K)以下と優れた断熱性能を示す。更に、切断した場合でも、切断端面の欠けも無く、加工性にも優れる。しかも、無機微粒子10aの脱離もなく、外部を汚染することもない。 Moreover, a heat insulating material excellent in heat insulating performance and mechanical strength can be obtained by setting the bulk density to 200 to 600 kg / m 3 , preferably 300 to 500 kg / m 3 . Specifically, the bending strength is 0.3 MPa or more and it is difficult to break, and the thermal conductivity at 1000 ° C. is 0.04 W / (m · K) or less, which shows excellent heat insulation performance. Furthermore, even when cut, there is no chipping of the cut end face, and the workability is excellent. In addition, the inorganic fine particles 10a are not detached and the outside is not contaminated.

以下に実施例及び比較例を挙げて本発明を更に説明するが、本発明はこれにより何ら制限されるものではない。   Examples The present invention will be further described below with reference to examples and comparative examples, but the present invention is not limited thereby.

(実施例1)
平均粒子径3μmの炭化珪素を空気中で1000℃にて8時間酸化熱処理し、コア粒子とした。このコア粒子25質量%と、平均粒子径7nmで、熱伝導率(25℃)が0.01W/(m・K)のシリカ微粒子75質量%とを図3に示す回転混合装置30に投入し、チャンバ31と押圧部材32との微小隙間2000μmに設定し、回転速度1000min−1にて30分間連続回転させた。内容物を取り出して電子顕微鏡で観察したところ、図に示すように、シリカ微粒子からなる多孔体で表面が完全に被覆されていた。
(Example 1)
Silicon carbide having an average particle diameter of 3 μm was subjected to an oxidation heat treatment in air at 1000 ° C. for 8 hours to obtain core particles. 25 mass% of the core particles and 75 mass% of silica fine particles having an average particle diameter of 7 nm and a thermal conductivity (25 ° C.) of 0.01 W / (m · K) are put into the rotary mixing device 30 shown in FIG. The minute gap between the chamber 31 and the pressing member 32 was set to 2000 μm, and it was continuously rotated for 30 minutes at a rotational speed of 1000 min −1 . When the contents were taken out and observed with an electron microscope, as shown in FIG. 4 , the surface was completely covered with a porous body made of silica fine particles.

作製した多孔体被覆粒子80質量%と、平均繊維径が10μmで、平均繊維長5000μmのシリカ系セラミックファイバ20質量%とを乾式混合して断熱材用前駆体とし、この断熱材用前駆体を用いてプレス成形により一辺が150mmで、厚さ10mmの成形品を作製した。尚、プレス圧は6MPaとした。得られた成形品のかさ密度、曲げ強度及び熱伝導率を表1に示す。   The produced porous body-coated particles 80% by mass and 20% by mass of silica-based ceramic fiber having an average fiber diameter of 10 μm and an average fiber length of 5000 μm are dry-mixed to form a heat-insulating material precursor. A molded product having a side of 150 mm and a thickness of 10 mm was produced by press molding. The press pressure was 6 MPa. Table 1 shows the bulk density, bending strength, and thermal conductivity of the obtained molded product.

(実施例2)
実施例1で用いたシリカ系セラミックファイバ3質量%と、シリカ微粒子97質量%とを図3に示す回転混合装置30に投入し、チャンバ31と押圧部材32との微小隙間2000μmに設定し、回転速度1000min−1にて30分間連続回転させ、シリカ微粒子で被覆されたシリカ系セラミックファイバを作製した。
(Example 2)
3% by mass of the silica-based ceramic fiber and 97% by mass of silica fine particles used in Example 1 were put into the rotary mixing device 30 shown in FIG. 3, and the minute gap between the chamber 31 and the pressing member 32 was set to 2000 μm, and the rotation was performed. A silica-based ceramic fiber coated with silica fine particles was produced by continuously rotating at a speed of 1000 min −1 for 30 minutes.

作製したシリカ微粒子で被覆されたシリカ系セラミックファイバ20質量%と、実施例1の多孔体被覆粒子80質量%とを乾式混合して断熱材用前駆体とし、この断熱材用前駆体を用いてプレス成形により一辺が150mmで、厚さ10mmの成形品を作製した。尚、プレス圧は6MPaとした。得られた成形品のかさ密度、曲げ強度及び熱伝導率を表1に示す。   20% by mass of the silica-based ceramic fiber coated with the prepared silica fine particles and 80% by mass of the porous material-coated particles of Example 1 were dry-mixed to obtain a heat-insulating material precursor, and this heat-insulating material precursor was used. A molded product having a side of 150 mm and a thickness of 10 mm was produced by press molding. The press pressure was 6 MPa. Table 1 shows the bulk density, bending strength, and thermal conductivity of the obtained molded product.

(比較例1)
平均粒子径3μmの炭化珪素80質量%と、平均繊維径が10μmで、平均繊維長5000μmのシリカ系セラミックファイバ20質量%とを乾式混合して断熱材用前駆体とし、この断熱材用前駆体を用いてプレス成形により一辺が150mmで、厚さ10mmの成形品を作製した。尚、プレス圧は6MPaとした。得られた成形品のかさ密度、曲げ強度及び熱伝導率を表1に示す。
(Comparative Example 1)
80 mass% of silicon carbide having an average particle diameter of 3 μm and 20 mass% of silica-based ceramic fiber having an average fiber diameter of 10 μm and an average fiber length of 5000 μm are dry-mixed to obtain a precursor for heat insulating material. A molded product having a side of 150 mm and a thickness of 10 mm was produced by press molding. The press pressure was 6 MPa. Table 1 shows the bulk density, bending strength, and thermal conductivity of the obtained molded product.

(比較例2)
平均粒子径3μmの炭化珪素80質量%と、実施例2で作製したシリカ微粒子で被覆されたシリカ系セラミックファイバ20質量%とを乾式混合して断熱材用前駆体とし、この断熱材用前駆体を用いてプレス成形により一辺が150mmで、厚さ10mmの成形品を作製した。尚、プレス圧は6MPaとした。得られた成形品のかさ密度、曲げ強度及び熱伝導率を表1に示す。
(Comparative Example 2)
80% by mass of silicon carbide having an average particle diameter of 3 μm and 20% by mass of silica-based ceramic fiber coated with silica fine particles prepared in Example 2 were dry-mixed to obtain a precursor for a heat insulating material. A molded product having a side of 150 mm and a thickness of 10 mm was produced by press molding. The press pressure was 6 MPa. Table 1 shows the bulk density, bending strength, and thermal conductivity of the obtained molded product.

表1より、本発明に従う実施例1及び実施例2の成形品は、機械的強度が高く、熱伝導率が低く断熱性能に優れることがわかる。また、実施例1と実施例2との比較から、無機微粒子で被覆した繊維材料を用いることにより、機械的強度及び断熱性能がより高まることがわかる。   From Table 1, it can be seen that the molded articles of Example 1 and Example 2 according to the present invention have high mechanical strength, low thermal conductivity, and excellent heat insulation performance. Moreover, it turns out that mechanical strength and heat insulation performance increase more by using the fiber material coat | covered with the inorganic fine particle from the comparison with Example 1 and Example 2. FIG.

これに対し、コア粒子及び無機繊維とも無機微粒子で被覆されていない比較例1の成形品は、機械的強度が低く、断熱性能も大きく劣っている。無機微粒子で被覆した繊維材料を用いた比較例2の成形品は機械的特性及び断熱性能ともに改善が見られるものの、実施例の成形品に比べると劣っている。   On the other hand, the molded article of Comparative Example 1 in which both the core particles and the inorganic fibers are not coated with the inorganic fine particles has low mechanical strength and is greatly inferior in heat insulation performance. The molded product of Comparative Example 2 using the fiber material coated with inorganic fine particles is inferior to the molded product of the Examples, although both mechanical properties and heat insulation performance are improved.

本発明の多孔体被覆粒子を示す模式図である。It is a schematic diagram which shows the porous body covering particle | grains of this invention. 無機微粒子からなる二次粒子を示す模式図である。It is a schematic diagram which shows the secondary particle which consists of inorganic fine particles. 本発明の多孔体被覆繊粒子を製造するための回転混合装置を示す概略構成図である。It is a schematic block diagram which shows the rotary mixing apparatus for manufacturing the porous body covering fine particle of this invention. 本発明の多孔体被覆粒子を撮影した電子顕微鏡写真である。It is the electron micrograph which image | photographed the porous body covering particle | grains of this invention. 本発明の多孔体被覆粒子を含有する断熱材を示す模式図である。It is a schematic diagram which shows the heat insulating material containing the porous body covering particle | grains of this invention. 従来の断熱材を示す模式図である。It is a schematic diagram which shows the conventional heat insulating material.

符号の説明Explanation of symbols

1 コア粒子
10 二次粒子
10a 無機微粒子
20 無機繊維
30 回転混合装置
31 チャンバ
32 押圧部材
35 投入物
100 多孔体被覆粒子
200 繊維材料
DESCRIPTION OF SYMBOLS 1 Core particle 10 Secondary particle 10a Inorganic fine particle 20 Inorganic fiber 30 Rotary mixing apparatus 31 Chamber 32 Pressing member 35 Input 100 Porous body covering particle 200 Fiber material

Claims (10)

第1の無機化合物からなる微粒子がリング状または螺旋状に会合した二次粒子で形成される多孔体により、第2の無機化合物からなるコア粒子が被覆されていることを特徴とする多孔体被覆粒子。 A porous body coating characterized in that core particles composed of a second inorganic compound are coated with a porous body formed of secondary particles in which fine particles composed of a first inorganic compound are associated in a ring shape or a spiral shape. particle. 前記コア粒子が平均粒子径30μm以下であることを特徴とする請求項1記載の多孔体被覆粒子。 2. The porous body-coated particle according to claim 1, wherein the core particle has an average particle diameter of 30 μm or less. 前記微粒子が平均粒子径5〜50nmであることを特徴とする請求項1または2記載の多孔体被覆粒子。 3. The porous body-coated particle according to claim 1, wherein the fine particle has an average particle diameter of 5 to 50 nm. 前記二次粒子のリング内径が0.1μm以下であることを特徴とする請求項1〜3の何れか一項に記載の多孔体被覆粒子。 4. The porous body-coated particle according to claim 1, wherein a ring inner diameter of the secondary particle is 0.1 μm or less. 前記コア粒子が5〜50質量%で、前記微粒子が50〜95質量%であることを特徴とする請求項1〜4の何れか一項に記載の多孔体被覆粒子。 The said core particle is 5-50 mass%, and the said microparticles | fine-particles are 50-95 mass%, The porous body covering particle as described in any one of Claims 1-4 characterized by the above-mentioned. 無機繊維及び前記無機繊維が前記二次粒子で形成される多孔体により被覆された多孔体被覆繊維から選ばれる少なくとも1種の繊維材料と、請求項1〜5の何れか1項に記載の多孔体被覆粒子とを含有することを特徴とする断熱材用前駆体。 The porous material according to any one of claims 1 to 5, and at least one fiber material selected from an inorganic fiber and a porous material-coated fiber in which the inorganic fiber is coated with a porous material formed of the secondary particles. The precursor for heat insulating materials characterized by containing body covering particle | grains. 前記多孔体被覆粒子が55〜95質量%で、前記繊維材料が5〜45質量%であることを特徴とする請求項6記載の断熱材用前駆体。 The precursor for a heat insulating material according to claim 6, wherein the porous body-coated particles are 55 to 95% by mass and the fiber material is 5 to 45% by mass. 請求項6または7記載の断熱材用前駆体を加圧成形してなることを特徴とする断熱材。 A heat insulating material obtained by pressure-molding the heat insulating material precursor according to claim 6 or 7. かさ密度が200〜600kg/mで、曲げ強度が0.3MPa以上であることを特徴とする請求項8記載の断熱材。 The heat insulating material according to claim 8, wherein the bulk density is 200 to 600 kg / m 3 and the bending strength is 0.3 MPa or more. 1000℃における熱伝導率が0.04W/(m・K)以下であることを特徴とする請求項9記載の断熱材。 The heat insulating material according to claim 9, wherein the heat conductivity at 1000 ° C. is 0.04 W / (m · K) or less.
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