JP4551690B2 - Dust collector in laser processing - Google Patents

Description

The present invention relates to efficiently recover to that equipment the foreign matter removed from the workpiece surface, such as a substrate by laser processing.

Conventionally, removal of dust and other foreign substances such as particles in a laser processing apparatus is generally performed by suction mainly using a dust collection nozzle (dust collection duct). As another method, a method of applying a resist or the like on the surface of a workpiece and removing it with a solvent after laser processing is used.
Japanese Patent Laid-Open No. 9-271980 Japanese Patent Laid-Open No. 7-185875

  However, in the former method of sucking with a dust collection nozzle (dust collection duct), the foreign matter is instantaneously scattered by laser irradiation, so it is difficult to reliably remove the foreign matter at the laser irradiation portion.

  In addition, the latter method of applying resist, etc. has a greater effect of removing foreign matter than the former method using a dust collection nozzle (dust collection duct), but of course the solvent is used to remove the foreign matter. It cannot be applied to workpieces that cannot.

  The problem to be solved by the present invention is that a foreign object cannot be efficiently removed by a workpiece that cannot use a solvent.

A dust collector in laser processing according to the present invention,
Celluloid, cellulose, acetate, acetyl sheet, acetyl resin, petit sheet, polyvinyl alcohol, carboxymethyl cellulose, polyethylene glycol, polyvinyl pyrrolidone, nylon, polyethylene glycol, polyvinyl brachiral, polystyrene, polyvinyl chloride, polyester resin, polyimide, polymer Coating material,
A coating mechanism for coating the surface of the workpiece with this coating material;
After laser processing, a film peeling recovery mechanism that peels and recovers the film material from the surface of the workpiece,
An apparatus for separating and removing foreign substances adhering to the film material collected by the film peeling and collecting mechanism from the film material;
With a suction device that sucks foreign matter separated and removed from the coating material by this separation and removal device,
Coating of the coating material onto the workpiece, separation and recovery of the coating material from the surface of the workpiece, separation and removal of foreign matter adhering to the collected coating material from the coating material, and suction of the separated and removed foreign matter The main feature is that a series of operations can be performed in parallel with laser processing.

In addition, the dust collector in laser processing according to the present invention ,
An apparatus for carrying out the dust collection method in laser processing according to claim 1,
Celluloid, cellulose, acetate, acetyl sheet, acetyl resin, petit sheet, polyvinyl alcohol, carboxymethyl cellulose, polyethylene glycol, polyvinyl pyrrolidone, nylon, polyethylene glycol, polyvinyl brachiral, polystyrene, polyvinyl chloride, polyester resin, polyimide, polymer Coating material,
A coating mechanism for coating the surface of the workpiece with this coating material;
After laser processing, a film peeling recovery mechanism that peels and recovers the film material from the surface of the workpiece,
An apparatus for separating and removing foreign substances adhering to the film material collected by the film peeling and collecting mechanism from the film material;
With a suction device that sucks foreign matter separated and removed from the coating material by this separation and removal device,
The coating mechanism, a rotatable roller that winds the coating material and coats the coating material on the workpiece surface by rotation accompanying relative movement with the workpiece;
Further, the film peeling recovery mechanism, wherein you are the most important feature that no a film peeling recovery roller rotates with the relative movement of the workpiece.

  In the present invention, the coating material is coated on the surface of the workpiece, laser processing is performed, and after the laser processing, the coating material and foreign matter adhering to the coating material are collected. It can be reliably recovered in a usable state. According to the experiment results of the inventors, the recovery rate of foreign matters was 70% or more. In addition, since the coating material can be used repeatedly and no solvent is used, it can be applied regardless of the workpiece.

Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 and FIG. 2 are drawings for explaining a first example of the present invention, and 1 is a coating material that covers the surface of the workpiece 2 before laser processing. It is an essential requirement that the coating material 1 hardly absorbs the laser 3 and is not peeled off by the laser.

  Examples of the coating material 1 having the above requirements include celluloid, cellulose, acetate, acetyl sheet, acetyl resin, petit sheet, polyvinyl alcohol, carboxymethyl cellulose, polyethylene glycol, polyvinyl pyrrolidone, nylon, polyethylene glycol, polyvinyl bratilal, polystyrene, poly There are vinyl chloride, polyester resin, polyimide, polymer and the like.

  Reference numeral 4 denotes a coating mechanism for coating the surface of the workpiece 2 with the coating material 1 in which, for example, an acrylic adhesive is applied to the contact surface with the workpiece 2, and in the example shown in FIG. A rotatable roller that coats the surface of the workpiece 2 with the coating material 1 wound around the outer peripheral surface by rotation accompanying the movement of the workpiece 2 (hereinafter, the coating mechanism 4 is also referred to as “roller 4”). An example using is shown.

The pressure-sensitive adhesive for imparting adhesiveness to the coating material 1 is not limited to the acrylic pressure-sensitive adhesive as long as it has transparency to the laser 3. Further, the pressure-sensitive adhesive to be used is intended to increase the adhesive property by laser irradiation (for example, a thermosetting adhesive agent) is desirable, considering the case of stripping, skillfully adhesive which can be peeled off by water or heat It is important to use properly.

  Reference numeral 5 denotes a film peeling / recovery mechanism for removing the foreign material 7 removed from the surface of the workpiece 2 after the laser processing and adhering to the film material 1 from the film material 1 and collecting it. In this example, a film peeling / collecting roller rotating in synchronization with the roller 4 (hereinafter, the film peeling / collecting mechanism 5 is also referred to as “film peeling / collecting roller 5”) is shown.

  6 is an apparatus for separating and removing dust and dusty foreign matter 7 attached to the film material 1 collected by the film peeling / collecting roller 5 from the film material 1, and in the example shown in FIG. A rotating brush in contact with the roller 5 is shown. In FIG. 2, in order to efficiently separate and remove the foreign matter 7 adhering to the film material 1, a first rotating brush 6a that rotates in synchronization with the film peeling / recovery roller 5 and the first rotating brush 6a. And the second rotating brush 6b that scrapes off the foreign matter 7 collected on the first rotating brush 6a by rotating in the same direction while abutting on.

  1 and 2, reference numeral 8 denotes a suction nozzle that sucks the foreign matter 7 separated and removed from the coating material 1 by the separation / removal device 6 to a suction device (not shown).

  In the first example of the dust collector in the laser processing shown in FIGS. 1 and 2 having such a configuration, for example, a dust collector in a state where the roller 4 around which the film material 1 is wound is brought into contact with the workpiece 2. If the workpiece 2 is moved relative to the workpiece 2, the roller 4 rotates as the workpiece 2 moves, and the coating material 1 is rewound from the roller 4 to cover the surface of the workpiece 2. become.

  Then, the surface of the workpiece 2 is irradiated with a laser 3 from above the coating material 1 to remove the foreign matter 7 on the surface of the workpiece 2. The removed foreign matter 7 adheres to the coating material 1, and the coating material 1 is wound around the coating peeling / recovering roller 5 as the workpiece 2 is moved. Is scraped off from the coating material 1 and is sucked and collected by a suction device.

The above operations are continuously performed as the workpiece 2 moves .

  FIG. 3 shows a second example of the present invention. The second example shown in FIG. 3 is suitable when the foreign substance 7 to be collected is charged. In this case, the coating material 1 has a charging property unlike the first example. I am using something.

  In this second example, the foreign matter 7 is attached to the coating material 1 by electric charge. Therefore, the separation / removal device 6 replaces the rotating brush as in the first example with a neutralization device 6c. By disposing in the vicinity of the outer periphery of the roller 5, when the film material 1 is wound up, the foreign matter 7 adhering to the film material 1 is separated by the static eliminator 6c.

  In the second example, depending on the chargeability of the foreign matter 7, it is necessary to arrange the charging device 9 on the upstream side where laser processing is performed, but this is not an essential component. FIG. 3 shows the charging device 9 which is unwound from the roller 4 and charges the coating material 1 after being coated on the workpiece 2. FIG. As shown in Fig. 5, the film material 1 wound around the roller 4 may be placed at a position where it is charged immediately before rewinding.

  The present invention is not limited to the above examples, and it is needless to say that the embodiments may be appropriately changed within the scope of the technical idea described in each claim. For example, in the above example, the workpiece 2 is moved and the dust collector and the laser processing device according to the present invention are fixed. However, the workpiece 2 is fixed as in the example shown in FIG. Thus, the dust collector according to the present invention and the laser head 10 for laser processing may be moved.

  In the case of FIG. 4, first, the coating mechanism 4 is moved from the right side to the left side of the workpiece 2 to coat the surface of the workpiece 2 with the coating material 1 (FIG. 4A), and then the laser head. Similarly, laser processing is performed by moving 10 from the right side to the left side of the drawing. Thereafter, the film peeling / recovery device 5 and the separation / removal device 6 are moved from the right to the left in the drawing to separate and collect the foreign matter 7 adhering to the film material 1. In the example of FIG. 4 as well, the above operations may be performed continuously in parallel.

  The present invention is not merely as a dust collector, for example, when patterning the ITO film on the substrate surface, as shown in FIG. 5, only the processed portion of the ITO film 7a is attached to the coating material 1 and collected, Applicable to recycling. In addition, since there is no adhesion of foreign matter to other than the processed portion, it can be applied to fine processing for forming electrodes and the like.

It is a figure explaining the schematic structure of the dust collector in the laser processing of this invention. It is a schematic block diagram of the film | membrane peeling collection | recovery roller and separation / removal apparatus which comprise the dust collector in the laser processing of this invention shown in FIG. (A) is a figure explaining schematic structure of the other dust collector in the laser processing of this invention, (b) is a schematic block diagram of the film | membrane peeling collection | recovery roller and separation / removal apparatus which comprise the dust collector of (a). is there. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a drawing when the dust collecting apparatus of the present invention is incorporated in a laser processing machine, where (a) shows a coating material coating, (b) shows a laser processing, and (c) shows a coating material peeling and recovery time. It is. It is a figure explaining the condition where the ITO film | membrane of a process part adheres to film | membrane material at the time of peeling collection | recovery of film | membrane material by the method using the dust collector of this invention.

Explanation of symbols

1 Film Material 2 Workpiece 3 Laser 4 Film Mechanism (Roller)
5 Film peeling recovery mechanism (film peeling recovery roller)
6 Separation and removal device 6a First rotating brush 6b Second rotating brush 6c Static eliminator 7 Foreign matter 8 Suction nozzle

Claims (2)

An apparatus for carrying out our Keru dust collecting method in the laser processing for removing the thin film of the workpiece surface by applying laser to the workpiece surface,
Se Ruroido, cellulose, acetate, Asechishito, Asechirejin, Petit sheet, polyvinyl alcohol, carboxymethyl cellulose, polyethylene glycol, polyvinylpyrrolidone, nylon, polyethylene glycol, polyvinyl Burachira Lumpur, polystyrene, polyvinyl chloride, polyester resin, polyimide, or a polymer Coating materials of
A coating mechanism for coating the surface of the workpiece with this coating material;
After laser processing, a film peeling recovery mechanism that peels and recovers the film material from the surface of the workpiece,
An apparatus for separating and removing foreign substances adhering to the film material collected by the film peeling and collecting mechanism from the film material;
With a suction device that sucks foreign matter separated and removed from the coating material by this separation and removal device,
Coating of the coating material onto the workpiece, separation and recovery of the coating material from the surface of the workpiece, separation and removal of foreign matter adhering to the collected coating material from the coating material, and suction of the separated and removed foreign matter series of operations, the dust collector in the laser processing, characterized by being configured so as to enable parallel with laser processing. An apparatus for carrying out a dust collection method in laser processing that removes a thin film on the workpiece surface by irradiating the workpiece surface with a laser,
Celluloid, cellulose, acetate, acetyl sheet, acetyl resin, petit sheet, polyvinyl alcohol, carboxymethyl cellulose, polyethylene glycol, polyvinyl pyrrolidone, nylon, polyethylene glycol, polyvinyl brachiral, polystyrene, polyvinyl chloride, polyester resin, polyimide, polymer Coating material,
A coating mechanism for coating the surface of the workpiece with this coating material;
After laser processing, a film peeling recovery mechanism that peels and recovers the film material from the surface of the workpiece,
An apparatus for separating and removing foreign substances adhering to the film material collected by the film peeling and collecting mechanism from the film material;
With a suction device that sucks foreign matter separated and removed from the coating material by this separation and removal device,
The coating mechanism is a rotatable roller that winds the coating material and coats the coating material on the workpiece surface by rotation accompanying relative movement with the workpiece,
The dust collecting apparatus in laser processing, wherein the film peeling / recovering mechanism is a film peeling / recovering roller that rotates in association with a relative movement with the workpiece.

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