JP5141902B2 - Mask fixing method - Google Patents

Description

  The present invention belongs to the technical field of a vacuum film forming apparatus for forming a thin film pattern on a substrate such as a glass plate, and more particularly to a mask fixing method for aligning and fixing a substrate on a mask tray integrated with a metal mask.

  Conventionally, a vacuum film forming apparatus using a mask has been widely used as means for forming a thin film pattern on a substrate. In this vacuum deposition system, a mask tray in which a metal mask is integrated by welding or the like is used, but when the substrate is aligned with the mask tray in which this metal mask is integrated and transported to the next process, the relative positions Therefore, it is necessary to fix both the substrate and the mask tray. In many cases, such as a pre-process when depositing a transparent electrode of organic EL, the fixing operation is performed in a glove box. Moreover, the member insertion height of the vacuum film-forming apparatus is usually about 20 to 25 mm.

  Conventionally used fixing methods include placing the substrate between the mask tray and the presser and using a mechanical clamp method to fix the substrate with the presser by tightening the bolts, or using a magnetic mask. The method of fixing using a magnet from the back side of the vapor deposition surface is mentioned.

Japanese Patent No. 2832836 JP-A-11-158605

  Among the above-mentioned fixing methods, the mechanical clamping method involves fixing work using a commercially available tool for turning bolts, and both hands are used to fix the fixing tool separated from the mask tray with two bolts. There is a problem in workability in a glove box with many restrictions. In addition, the general-purpose one-touch clamp method using a toggle clamp or the like increases the size and cannot satisfy the dimensional constraints in the height direction of the apparatus. On the other hand, the method of fixing using a magnet has a problem that a non-magnetic mask cannot be used.

  The present invention has been made in view of such problems, and the object of the present invention is a mechanical clamp method, which requires no tools and can be operated with one hand, so that the work efficiency is high. An object of the present invention is to provide a mask fixing method which is greatly improved.

  In order to achieve the above object, the mask fixing method of the present invention is a mask fixing method for fixing a substrate to a mask tray in which a metal mask is integrated, each having a knob-type male screw in the center of a bottom plate and both sides thereof. Use two fixing tools with anti-rotation pins arranged, and females respectively corresponding to the male screw and anti-rotation pin of the fixing tool in the middle of each of the two opposite sides and on the outside of the metal mask Use a mask tray with a screw and pin hole, place the substrate on the mask tray with an integrated metal mask and align it, then insert the locking pin into the pin hole and insert the male screw into the female. By attaching to the screws, the fixture is attached to each of the two opposite sides of the mask tray while holding the edge of the substrate, and the male screw knob is turned by hand in that attached state. Characterized in that for fixing the substrate to the mask tray by fasteners.

  In the mask fixing method described above, it is preferable to use a fixing tool in which the detent pin is slightly longer than the male screw.

  In the mask fixing method described above, it is preferable to use a fixing tool in which a slide bearing or a rolling bearing is attached to the male screw.

  The mask fixing method of the present invention is a mask fixing method for fixing a substrate to a mask tray in which a metal mask is integrated, and is formed by arranging a knob-type male screw at the center of a bottom plate and a detent pin on each side thereof. Use two fixtures, and provide female screws and pin holes respectively corresponding to the male screws and detent pins in the middle of the two opposite sides and on the outside of the metal mask. After placing the substrate on the mask tray with the integrated metal mask and aligning it, insert the locking pin into the pin hole and align the male screw with the female screw. Attach the fixing tool to each of the two opposite sides of the mask tray while holding the edge, and turn the male screw knob by hand in the mounting condition to fix the mask tray with the two fixing tools. The machine clamp method allows the fixing work to be performed simply by inserting the locking pin of the fixing tool into the pin hole provided in the mask tray and turning the knob type male screw with one hand. However, the work of fixing the substrate and the mask tray can be performed with one hand without using a tool, and the work efficiency is greatly improved. In addition, because of the mechanical clamp method, there is an advantage that the mask material can be selected.

  In the mask fixing method described above, by using a fixing tool in which the detent pin is slightly longer than the male screw, it becomes easier to set the fixing tool on the mask tray, and the work is further accelerated.

  Further, in the above-described mask fixing method, by using a fixing tool in which a sliding bearing or a rolling bearing is attached to the male screw, the sliding resistance is reduced, and the operation of turning the male screw knob becomes easier.

  Hereinafter, embodiments of the present invention will be described in detail.

  FIG. 1 is a perspective view for explaining the mask fixing method of the present invention, and shows the mask tray 10, the substrate 20, and the fixture 30 in order from the bottom.

  The mask tray 10 has a rectangular frame shape, and as shown in the drawing, the metal mask 11 is integrated by welding so that the pattern surface is positioned in the frame. The substrate 20 forms a pattern of the metal mask 11 on its surface by vapor deposition, and is fixed to the mask tray 10 after alignment with the metal mask 11.

  As shown in an enlarged view in FIG. 2, the fixing device 30 has a knob-type male screw 32 and a non-rotating pin 33 on each side of the bottom plate 31 having a rectangular plane. The top plate 34 is attached with bolts 35 so as to straddle the thick portions provided at both ends. The top plate 34 is the same size as the bottom plate 31 in plan view, and a head 32 a of a male screw 32 is rotatably fitted in a hole provided in the center thereof, and a space formed by the bottom plate 31 and the top plate 34. The disc-shaped knob 32b of the male screw 32 is located at the same position, and a part of the knob 32b protrudes from the space to both sides. In order to make it easier to set the fixture 30, the detent pin 33 is slightly longer than the male screw 32.

  A sliding bearing 36 having a cylindrical flange shape is inserted between the bottom plate 31 and the shaft portion of the male screw 32, and between the top plate 34 and the head 32 a of the male screw 32. A cylindrical slide bearing 37 is inserted. Here, dry metal bushes are used as the sliding bearings 36 and 37. The bottom plate 31 and the shaft portion of the male screw 32 may be in direct contact with each other, and the top plate 34 and the head portion 32a of the male screw 32 may be in direct contact, but the male screw 32 is provided with a slide bearing or a rolling bearing. It is more convenient to turn the knob 32b by reducing the sliding resistance.

  Since this fixture 30 is used, the mask tray 10 has a male screw 32 and a detent pin 33 on the middle of the two opposite sides and on the outside of the metal mask 11, respectively. Corresponding female screws 12 and pin holes 13 are provided. Further, an attachment hole for attaching to the holding plate (P in FIG. 4) is provided near the corner of the mask tray 10.

  When the substrate 20 is fixed to the mask tray 10, two fixing tools 30 are used. The procedure is as follows. A mask tray 10 integrated with a metal mask 11 and a substrate 20 to be patterned are prepared in advance, and the mask tray 20 is attached to a holding plate (P in FIG. 4). Then, after the substrate 20 is placed on the mask tray 10 and aligned, as shown in FIG. 3, the non-rotating pin 33 is inserted into the pin hole 13 and the male screw 32 is aligned with the female screw 12. The fixing tool 30 is attached to two opposing sides of the mask tray 10 in a state where the edge of the mask tray 10 is pressed. Thereafter, in this mounted state, the knob 32b of the male screw 32 in each fixture 30 is turned by hand to fix the substrate 20 to the mask tray 10.

  As shown in FIG. 4, the rotation stop pin 33 of the fixing tool 30 is inserted into the pin hole 13 provided in the mask tray 10 and then the knob 32b of the male screw 32 is turned with one hand. The mask tray 10 and the substrate 20 can be fixed by the tool 30. Therefore, if the fixing operation of the substrate to the mask tray, which took several minutes in the conventional method of fixing with two commercial bolts using a tool, is performed by the fixing method of the present invention, it can be shortened to about several tens of seconds. .

  The member insertion height of the vacuum film forming apparatus is normally about 20 to 25 mm. In FIG. 4, the height from the mask tray 10 to the fixture 30 is 5 mm for the mask tray 10 and 5 mm for the substrate 20. In the case of 1.1 mm, since the thickness of the fixture 30 is at most about 12 mm, it can be suppressed to about 18 mm, so that there is a sufficient margin. Also, because of the mechanical clamp, the mask material can be selected. Further, the fixing operation of the substrate 20 to the mask tray 10 which has conventionally spent several minutes can be shortened to several tens of seconds.

  The embodiment of the present invention has been described in detail above. However, the mask fixing method of the present invention is not limited to the embodiment as described above, and various methods are possible without departing from the spirit of the present invention. Of course, changes are possible.

It is a perspective view shown in the state where a mask tray, a substrate, and a fixture were separated. It is the top view and side view of a fixing tool. It is explanatory drawing which shows the procedure which fixes a mask tray and a board | substrate with a fixing tool. It is a partial side view which shows the fixed state of the board | substrate with respect to a mask tray.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Mask tray 11 Metal mask 20 Board | substrate 30 Fixing tool 31 Bottom plate 32 Male screw 32a Head 32b Knob 33 Anti-rotation pin 34 Top plate 35 Bolt 36, 37 Sliding bearing

Claims (3)

  A mask fixing method for fixing a substrate to a mask tray in which a metal mask is integrated, using two fixing tools each having a knob-type male screw and a non-rotating pin on each side of the bottom plate. The mask tray is provided with a female screw and a pin hole corresponding to the male screw and the non-rotating pin, respectively, in the middle of each of the two opposing sides and on the outside of the metal mask. After placing the substrate on the mask tray integrated with the metal mask and aligning it, insert the detent pin into the pin hole and align the male screw with the female screw to fix the edge of the substrate in place Attach the tool to the two opposite sides of the mask tray, and in that state, turn the male screw knob by hand to fix the substrate to the mask tray with two fasteners. Mask fixing method to.   2. The mask fixing method according to claim 1, wherein a fixing tool having a non-rotating pin slightly longer than the male screw is used.   The mask fixing method according to claim 1 or 2, wherein a fixing tool in which a slide bearing or a rolling bearing is attached to the male screw is used.

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