JP7079043B2 - Heating device and heating method - Google Patents

Description

The present invention relates to a heating device and a heating method.

Patent Document 1 uses a heated gas circulation type clean oven that heat-treats a plate-like object such as a glass substrate which is a constituent member of a liquid crystal display panel or the like (see, for example, Patent Document 1). In this clean oven, an object to be heat-treated such as a glass substrate is housed in a constant temperature bath, and the heat-treated object is heat-treated using a heated gas circulated by a fan in the constant temperature bath.
In the case of a heated gas circulation type clean oven, it is easy to adopt a structure that accommodates objects to be heated such as a glass substrate in multiple stages, so it is excellent in space efficiency, but it is difficult to make the heating temperature distribution uniform. There is a high possibility that the degree of cleanliness will decrease due to the stirring of the heated gas. Further, when the object to be heated is relatively lightweight, the object to be heated may move from a predetermined position due to circulating convection of the heated gas.

Patent Document 2 comprises a double-sided heating type far-infrared panel heater in which a thin layer of far-infrared radiation ceramics is coated on both sides of a heat-dissipating plate having a heating element inside, and far-infrared rays are radiated from both sides by heating the heat-dissipating plate. Disclosed is a heating furnace in which a large number of shelf-shaped heaters are arranged in a plurality of stages in the furnace body at regular intervals in the vertical direction, and each space formed between these shelf-shaped heaters is used as a drying chamber.
Patent Document 3 stands vertically at a distance and is arranged in a shelf shape between a plurality of heating walls 5 and 6 heated by a built-in electric heater and these heating walls 5 and 6. A plurality of heat radiating members 12 heated by conduction heat from the heating wall are provided, and each space between these heat radiating members 12 is used as a storage space 10 to house a glass substrate 9 to be heated. However, it is heat-treated with the radiant heat from the upper and lower heat radiating members. As a result, a clean heat treatment that does not blow heated air is realized with a simple device configuration.
Patent Documents 4 and 5 also disclose a heating device for improving the uniformity of temperature distribution and the stability of cleanliness.

Japanese Unexamined Patent Publication No. 2001-56141 Japanese Unexamined Patent Publication No. 2001-317872 Japanese Unexamined Patent Publication No. 2013-200077 Japanese Unexamined Patent Publication No. 2005-352306 Japanese Unexamined Patent Publication No. 2005-055152

However, in the heating device of Patent Document 3, since the heat radiating members located at the uppermost stage and the lowermost stage face the outside of the device, heat easily escapes. In particular, the heating device may be arranged in the chamber in order to prevent the inclusion of particles from the outside and to prevent the exhaust heat from affecting other devices in the installation location such as a clean room. This chamber takes in clean air from the outside and exhausts the air in the chamber heated by the heating device directly to the exhaust equipment of the factory without exhausting it into the clean room. An intake port for taking in external intake air is provided at the lower part of the chamber, and an exhaust port for air heated by the heating device is usually provided at the upper part of the chamber. The lower and upper surfaces of the heating device near these intake and exhaust ports are the bottom and top of the multi-stage stack furnace because heat is taken away by the fast flow of air sucked in from the outside and air discharged from the outside. In the heating chamber, the temperature is lower than that in the intermediate heating chamber, and there is a problem that the temperature is not uniform between the heating chambers.

An object to be solved by the present invention is to provide a heating device and a heating method having excellent uniformity of temperature distribution and stability of cleanliness.
In particular, it is an object of the present invention to provide a heating device and a heating method capable of achieving uniformity of temperature distribution without being affected by the air flow inside the chamber when the heating device is arranged inside the chamber.

The heating device of the present invention comprises a plurality of heating walls arranged to face each other at a distance, a plurality of heat generating means provided in each of the plurality of heating walls, and a plurality of the heating walls. A plurality of metal heat radiating members, which are arranged in a shelf shape in a facing region at a distance in the vertical direction and conduct heat from the heating wall body, are provided, and the plurality of heating wall bodies and the plurality of heat radiating members are provided. The heat radiating member is defined in the vertical direction as a plurality of accommodating spaces for accommodating the objects to be heated, and the upper and lower sides of each of the plurality of accommodating spaces are defined by the opposing heat radiating members. Among the accommodation spaces, the accommodation space is characterized by having a heat insulating space for forming an air insulating layer on the uppermost storage space or below the storage space at the bottom.

With this configuration, a heat insulating space is provided at a position in contact with the upper surface or the lower surface of the heating device exposed to the air flow inside the chamber, so that heat is not taken from the accommodation space (heating chamber) inside the chamber, and the chamber is not taken away. Uniformity of temperature distribution can be achieved without being affected by the internal air flow.

Preferably, the plurality of heating walls facing each other are formed on each side in the width direction of a flat plate-shaped object to be heated, which is directly formed at positions corresponding to each other on each wall surface on the side facing the accommodation space. A configuration can be adopted in which each of the support surfaces extending in the depth direction of the accommodation space for receiving the back surface of the edge portion is provided. With such a configuration, the object to be heated can be held by the heat radiating member at a uniform interval, and the object to be heated is uniformly heated in the plane by the radiant heat.

Preferably, the insulation space can adopt a configuration in which the volume is smaller than each of the plurality of accommodation spaces. The heat insulating space may be smaller than the accommodating space as long as it is thick enough to form a heat insulating layer of air.

Preferably, a configuration can be adopted in which the upper and lower parts of the heat insulating space are defined by the heat radiating members facing each other. More preferably, the accommodation space and the heat insulating space have openings defined by the heating wall body and the heat radiating member on the front side and the back side, and the opening on the back side side is a closing member. Can adopt a configuration that is blocked by.
By making the heat insulating space a partitioned space in this way, a steady air heat insulating layer is formed. Further, by making the structure similar to the structure of the accommodation space, the same temperature can be set, so that the temperature gradient with the inner accommodation space becomes small, and heat is less likely to be taken from the accommodation space.

Preferably, at least one temperature sensor provided on each of the plurality of heating walls and the like.
The heat generated by each of the plurality of heat generating means provided in each of the plurality of heating walls so that the detection temperature of at least one temperature sensor provided in each of the plurality of heating walls follows the target temperature. A configuration having a temperature control means for independently controlling the amount and a temperature control means can be adopted.
With this configuration, it is possible to correct the temperature non-uniformity between the heating walls, and the uniformity of the heat treatment is enhanced.

The heating system of the present invention is a heating system further comprising any of the above heating devices and a chamber accommodating the heating device, wherein the chamber has an air intake port for taking in air at the bottom and air at the ceiling. It is characterized by having a ventilation mechanism for ventilating the inside of the chamber through an exhaust port for discharging air.

The heating method of the present invention is characterized in that the object to be heated is heated by using any of the above heating devices or the above heating system.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to provide a heating device which is excellent in the uniformity of temperature distribution and the stability of cleanliness and can respond quickly to at least a change in the size of an object to be heated in the width direction.

It is a front view which shows the heating apparatus which is an embodiment of this invention. It is a right side view of the heating apparatus shown in FIG. It is an external view which shows the heater for heating. It is explanatory drawing which shows the air flow in an example of the air-conditioning chamber of a heating device. It is explanatory drawing which shows the air flow in another example of the air conditioning chamber of a heating device. It is explanatory drawing which shows the air flow in each accommodation space.

Hereinafter, the heating device 100 according to the embodiment of the present invention will be described with reference to FIGS. 1 to 6. As shown in FIG. 1, the heating device 100 includes a plurality of heating walls 10A to 10C arranged to face each other at a distance, and a plurality of electric heaters as heat generating means provided on the heating walls 10A to 10C. 11 and a plurality of heat radiating members 12 arranged in a shelf shape with a distance in the vertical direction (A1-A2 direction) in the facing regions of the plurality of heating walls 10A to 10C, and heat radiating adjacent to each other in the vertical direction. It is provided with a storage space 14 for the object to be heated 13 provided between the members 12.

The upper end side and the lower end side of the heating walls 10A to 10C are connected by the top plate 16 and the bottom plate 17, respectively, and the lower surface of the bottom plate 17 is supported by the gantry unit 30.

The heating walls 10A to 10C are made of a metal such as an aluminum alloy or stainless steel, are structural members forming the partition walls on both side surfaces and the center of the box-shaped main heating device 100, and serve as a heat source for the heating device. It is a member. In the present embodiment, the left side heating wall body 10A, the central heating wall body 10B, and the right side heating wall body 10C are composed of three pieces. A plurality of through holes 24 are formed in each of the heating walls 10A to 10C in the horizontal direction from the front side to the back side, and the electric heater 11 is detachably inserted into each of these through holes 24.

As shown in detail in FIG. 4, the electric heater 11 has a structure in which a heating wire 11w wound in a coil shape is housed inside a metal tube (sheath) 11s. The heating wire 11w and the metal tube 11s are insulated by an insulating layer made of powdered magnesium oxide. In the present embodiment, the winding pitch of the heating wire 11w is reduced at both ends W1 and W1 of the electric heater 11 and increased at the central portion W2 so that the amount of heat generated at both ends of the electric heater 11 is increased. I have to. As a result, the amount of heating at both ends of the heating walls 10A to 10C, which tend to decrease in temperature, in the depth direction (B1-B2 direction) is increased so that the temperature distribution becomes uniform.
The wiring of each electric heater 11 extends from the back side of the heating device 100.

As shown in FIG. 1, each of the heating walls 10A to 10C is provided with another plurality of through holes 25 in the horizontal direction from the front side, and the temperature sensor 15 is inserted therein. The calorific value of each of the plurality of electric heaters 11 provided on the plurality of heating walls 10A to 10C is determined by the temperature controlling means (not shown) so that the detected temperature of the temperature sensor 15 follows the target temperature. Is controlled independently. Alternatively, a plurality of coiled heaters 11 are grouped into a plurality of groups, and the calorific value is independently controlled for each group.
The configuration and arrangement of the coiled heater 11 described above are for realizing uniform temperature of the heating wall 10 when the heat generating means is controlled by the temperature controlling means. In other words, it is difficult to make the temperature of the heating wall 10 uniform only by the temperature control means due to disturbance or the like. Therefore, by devising the configuration and arrangement of the coiled heater 11, the heating wall 10 can be used. Achieves temperature uniformity.

The heat radiating member 12 is a member that is arranged in a shelf shape with a vertical distance between the facing regions of the heating walls 10A to 10C to conduct heat from the heating walls 10A to 10C. In the present embodiment, they are fitted into grooves formed in the heating walls 10A to 10C on both sides and arranged in a shelf shape. Each heat radiating member 12 is formed of an aluminum plate whose surface is plated with black, so that an excellent heat radiating function can be obtained.

Each accommodation space 14 is a space defined by heating walls 10A to 10C on both sides and upper and lower heat radiating members 12, and accommodates one object to be heated one by one from the upper and lower heat radiating members 12. It is designed to be heat-treated with radiant heat. In the heating walls 10A to 10C, grooves 10t extending in the depth direction (B1-B2 direction) of the accommodation space are formed at positions corresponding to each other on the wall surfaces on the side facing each accommodation space 14, and the grooves 10t thereof are formed. The lower inner surface of the groove 10t is a support surface for receiving the back surface of each side edge portion in the width direction of the flat plate-shaped object to be heated 13. Using a predetermined transport device, the object to be heated can be carried in so that both ends in the left-right direction thereof enter each groove 10t, and can be placed on the support surface. When both side edges of the object to be heated 13 are thermally opened, the temperature of the object to be heated 13 tends to be non-uniform at both edges. Therefore, the temperature of the object to be heated 13 is made uniform by directly transferring heat to both side edges of the object to be heated 13 through the support surface of the groove 10t.

The front surface 14a (see FIG. 2) of each accommodation space 14 is open. By opening the front surface 14a, the air heated and expanded inside the accommodation space can escape to the outside. Since the back surface 14b side is closed, even if the air heated and expanded inside the accommodation space escapes to the outside, the structure is such that the air does not easily flow into the accommodation space 14 from the outside.
Depending on the size of the opening of the front surface 14a, an opening / closing door (not shown) that opens / closes the opening can be provided. The opening / closing door is opened when the object to be heated 13 is carried in and out, and is closed when the object 13 is heated. However, even when the open / close door is closed, the inside of the accommodation space is not completely sealed, and the heated and expanded air can escape. Further, as shown in FIG. 6, the back surface 14b side of each accommodation space 14 is closed by the back wall member 26, and the back wall member 26 has an air supply path 27 capable of introducing gas into the accommodation space 14. It is provided. As a result, as shown by the arrow G in FIG. 6, gas flows from the back surface 14b side of the accommodation space 14 to the front surface 14a side, and is discharged to the outside of the accommodation space 14 through the gap. Examples of this gas include an inert gas for preventing oxidation of the surface of the object to be heated, a gas for causing a specific chemical reaction with the surface of the object 13 to be heated, and the like.
The flow rate of this gas is adjusted so that it becomes a very weak laminar flow that does not wind up the particles.

The gantry unit 30 is arranged on the floor on which the heating device 100 is installed, and mounts the bottom plate 17 and the heating device main body on the bottom plate 17. It has a heat insulating function that prevents the heat of the heating device 100 from being transmitted to the floor surface, a vibration isolating function that prevents the vibration of the floor surface from being transmitted to the heating device main body, and the like.

Here, the heating device of the present embodiment has heat insulating spaces 20T and 20B for forming an air heat insulating layer on the uppermost storage space 14 and below the bottommost storage space 14.
Similar to the accommodation space 14, the heat insulating spaces 20T and 20B are spaces defined by the heating walls 10A to 10C on both sides and the upper and lower heat radiating members 12, and the back surface is closed by the back wall member 26. There is. As a result, a heat insulating layer of air having a temperature substantially the same as that of the accommodation space 14 is formed inside the heat insulating spaces 20T and 20B.
However, since the heat insulating spaces 20T and 20B are not spaces for introducing and heating the object to be heated 13, the height (that is, the distance between the upper and lower heat radiating members 12) is smaller than the accommodation space 14, and the air supply path 27 is Not provided (see FIG. 6).

Next, the operation of the heating device of the present invention configured as described above will be described.
When the heating device 100 is used, each object to be heated is carried into each storage space 14 through the opening of the front surface 14a of each storage space 14 by using a predetermined transfer device. If the coiled heater 11 is energized, the heat treatment can be performed according to a predetermined program.
The calorific value of the plurality of coiled heaters 11 is independently controlled individually or for each group so that the detected temperature of each temperature sensor 15 becomes the target temperature.

Since the heating walls 10A to 10C are arranged on the left and right of each accommodation space 14 and the heat radiating members 12 are arranged on the upper and lower sides, the left and right heating walls heated by the heat of the electric heater 11 are arranged. It is heated by the heat radiated from 10A to 10C and the heat radiated up and down from the heat radiating member 12 that generates heat by heat conduction from these heating walls.
Since each heating wall 10 is heated to a target temperature and each heat radiating member 12 is also heated to the same temperature as the heating wall 10, the temperature uniformity between the accommodation spaces 14 is high.

Further, in each of the heating walls 10A to 10C, the calorific value of the electric heater 11 located in each portion is independently controlled so that the detected temperature of each temperature sensor 15 becomes the target temperature, so that the in-plane temperature is controlled. The temperature uniformity is high, and the temperature uniformity between the accommodation spaces 14 located in each portion of the heating walls 10A to 10C is also high.

Further, since each accommodation space 14 is partitioned as described above, the heat accumulation phenomenon and the overheating phenomenon in the upper space due to the rise of hot air do not occur. Further, since the heated gas is not agitated or circulated by the fan, the cleanliness is excellent and the object to be heated does not move due to the gas flow.

Further, since the air in the accommodation space 14 can be replaced with an inert gas or a specific gas by providing the air supply path 27 in each accommodation space 14, the heated object 13 is oxidized by introducing the inert gas. It is also possible to perform surface treatment on the object to be heated 13 by utilizing the reaction with the introduced specific gas.

Next, the effects of the heat insulating spaces 20T and 20B will be described.
As described above, in the heating device, the heat radiating members located at the uppermost stage and the lowermost stage face the outside of the device, so that heat can easily escape. In particular, in order to prevent particles from entering from the outside and to prevent waste heat from affecting other devices in the installation location such as a clean room, the heating device may be arranged in the chamber, but in the chamber. In places where the air flow is strong, this phenomenon of heat loss becomes remarkable.
For example, in the example of FIG. 4, the chamber 200 introduces air from the outside from the intake port 210 on the lower right side by a blower fan 230 provided on the lower right side, and the heat exhaust of the heating device 100 is the upper left of the chamber 200. It is discharged to the factory equipment from the exhaust port 220 of the unit. Further, in the example of FIG. 5, the blower fan 230 provided at the exhaust port 220 on the ceiling of the chamber exhausts the heat exhaust of the heating device inside the chamber 200, and the intake air at the lower left is inside the chamber 200 which has become negative pressure due to this. The outside air is introduced from the mouth 210.
In either case, an air flow is generated between the upper surface of the heating device 100 and the ceiling of the chamber or between the lower surface of the heating device 100 and the floor surface of the chamber 200, and is formed on a portion or a lower surface along the upper surface of the heating device 100. The heat of the part along it is taken away. In the example of FIG. 4, the flow velocity along the lower surface of the heating device close to the blower fan 230 provided on the lower side is large, and in the example of FIG. 5, the flow velocity along the upper surface of the heating device close to the blower fan 230 provided on the upper side is large. Is large, and the heat of these parts is particularly deprived.

Therefore, in the present embodiment, heat insulating spaces 20A and 20B are provided at positions in contact with the upper surface and the lower surface of the heating device 100 exposed to the above-mentioned air flow. As a result, the heat transfer is blocked by the heat insulating air layer formed inside the heat insulating spaces 20A and 20B, so that the heat is not taken from the accommodation space 14 inside the heat insulating space 14 and the air flow inside the chamber 200 The uniformity of the temperature distribution can be ensured without being affected.

The above-mentioned heating device 100 exemplifies the heating device according to the present invention, and the present invention is not limited to the heating device 100.
For example, in the heating device 100 of the present embodiment, both the heat insulating space 20A on the upper surface side and the heat insulating space 20B on the lower surface side are provided, but the present invention is not limited to this, and either of them is provided depending on the installation location of the heating device, the chamber structure, and the like. Only one may be provided. For example, in the example of FIG. 5, only the heat insulating space 20B on the lower surface side may be provided, and in the example of FIG. 6, only the heat insulating space 20A on the upper surface side may be provided.

Further, in the present embodiment, as the heat generating means, an electric heater 11 having a small winding pitch at both ends and a large winding pitch at the center is used, but the present invention is not limited to this, and an electric heater having a uniform winding pitch is used. Alternatively, other means such as a heat pipe may be used as the heat generating means.

Further, in the present embodiment, in each of the heating walls 10A to 10C, the calorific value of the electric heater 11 located in each portion is independently controlled so that the detected temperature of each temperature sensor 15 becomes the target temperature. Not limited to this, when the target temperature uniformity is loose, the calorific value of the electric heater 11 may be controlled in the zone, or the calorific value of all the electric heaters may be controlled collectively.

Further, in the heating device 100, the heating wall bodies 10A to 10C, the top plate 19, and the bottom plate 20 are made of stainless steel, and the heat radiating member 12 is made of an aluminum plate whose surface is plated with black. There is. However, the material is not limited to these materials, and the heating walls 10A to 10C, the top plate 16, the bottom plate 17, and the like are made of aluminum or an aluminum alloy (or an aluminum or aluminum alloy having a matte surface treatment to suppress the dissipation of radiant heat). ) Can also be formed. Further, the surface treatment of the heat radiating member 12 is not limited to black plating, and a surface treatment capable of suppressing the emission of radiant heat, for example, a surface treatment having a matte surface treatment can be adopted.

The heating device according to the present invention can be widely used in the industrial field of heat-treating various plate-shaped members such as glass substrates, semiconductor lead frames, other metal plates, and synthetic resin plates.

10,10A-10C Heating wall 11 Electric heater 11s Metal tube (sheath)
11w Heat-generating wire 12 Heat radiating member 13 Heated object 14 Storage space 14a Front surface 14b Back surface 15 Temperature sensor 16 Top plate 17 Bottom plate 20, 20T, 20B Insulation space 24 Through hole 25 Through hole 26 Back wall member 27 Intake path 30 Stand unit 100 Heating device 200 Chamber 210 Intake port 220 Exhaust port 230 Blower fan

Claims (8)

Multiple heating walls arranged facing each other at a distance,
A plurality of heat generating means provided in each of the plurality of heating walls, and
A plurality of metal heat radiating members, which are arranged in a shelf shape at intervals in the vertical direction in the facing regions of the plurality of heating walls and conduct heat from the heating walls, are provided.
The plurality of heating walls and the plurality of heat radiating members define a plurality of accommodating spaces for accommodating objects to be heated in the vertical direction.
The top and bottom of each of the plurality of accommodation spaces are defined by the heat radiating members facing each other.
Of the plurality of accommodation spaces, the insulation space for forming an air insulation layer is provided on the top accommodation space or below the bottom accommodation space .
The heat insulating space is defined by the heat radiating member whose top and bottom face each other, and is partitioned by the heat radiating member so that air does not flow between the heat radiating member and the adjacent accommodation space . The plurality of facing walls for heating are formed directly at positions corresponding to each other on each wall surface on the side facing the accommodation space, and the back surface of each side edge portion in the width direction of the flat plate-shaped object to be heated. The heating device according to claim 1, each having a support surface extending in the depth direction of the storage space for receiving the storage space. The heating device according to claim 1 or 2, wherein the heat insulating space has a volume smaller than that of each of the plurality of accommodation spaces. The heating device according to any one of claims 1 to 3, wherein the upper and lower parts of the heat insulating space are defined by the heat radiating members facing each other. The accommodation space and the heat insulating space have openings defined by the heating wall body and the heat radiating member on the front side and the back side, and the opening on the back side side is closed by the closing member. , The heating device according to claim 4. At least one temperature sensor provided in each of the plurality of heating walls, and
The heat generated by each of the plurality of heat generating means provided in each of the plurality of heating walls so that the detection temperature of at least one temperature sensor provided in each of the plurality of heating walls follows the target temperature. The heating device according to claim 1 to 5, further comprising a temperature control means for independently controlling the amount. The heating device according to any one of claims 1 to 5,
A heating system, further comprising a chamber for accommodating the heating device.
The chamber is a heating system having a ventilation mechanism for ventilating the inside of the chamber through an intake port for taking in air at the bottom and an exhaust port for discharging air at the ceiling. A heating method for heating an object to be heated by using the heating device according to any one of claims 1 to 6 or the heating system according to claim 7.

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