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JP7103053B2 - Table device - Google Patents
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JP7103053B2 - Table device - Google Patents

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JP7103053B2
JP7103053B2 JP2018151797A JP2018151797A JP7103053B2 JP 7103053 B2 JP7103053 B2 JP 7103053B2 JP 2018151797 A JP2018151797 A JP 2018151797A JP 2018151797 A JP2018151797 A JP 2018151797A JP 7103053 B2 JP7103053 B2 JP 7103053B2
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force generating
base
attractive force
space
shaped member
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JP2020027021A (en
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尚史 倉持
秀樹 古川
伸明 田中
澄雄 杉田
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NSK Ltd
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Description

本開示は、テーブル装置に関する。 The present disclosure relates to a table device.

搬送装置等には、真空雰囲気や特殊ガス雰囲気のプロセス室内で、テーブルをスライド移動させて位置決めするテーブル装置が用いられる。特許文献１に記載されたステージ装置（テーブル装置）は、ステージと、ステージの両サイドに設けられた固定子移動ユニットと、ステージと連結された移動型固定子と、を有する。 As the transfer device or the like, a table device for positioning by sliding the table in a process chamber having a vacuum atmosphere or a special gas atmosphere is used. The stage device (table device) described in Patent Document 1 includes a stage, stator moving units provided on both sides of the stage, and a movable stator connected to the stage.

特許文献１のステージ装置では、固定子移動ユニットにコイルが配置され、移動型固定子に磁石が配置される。コイルと磁石との間に発生する引力により、固定子移動ユニットの移動に伴って移動型固定子及びステージ（テーブル）が移動する。 In the stage device of Patent Document 1, a coil is arranged in the stator moving unit, and a magnet is arranged in the moving stator. Due to the attractive force generated between the coil and the magnet, the movable stator and the stage (table) move with the movement of the stator moving unit.

特開平１１－２８７８８０号公報Japanese Unexamined Patent Publication No. 11-287880

特許文献１のステージ装置において、高さが高いステージ（テーブル）を用いた場合、ステージの重心が上方に位置するため、ステージの走行安定性が低下する可能性がある。 When a stage (table) having a high height is used in the stage device of Patent Document 1, the center of gravity of the stage is located above, so that the running stability of the stage may decrease.

本開示は、上記の課題に鑑みてなされたものであって、より高い走行安定性を有するテーブルを備えたテーブル装置を提供することを目的とする。 The present disclosure has been made in view of the above problems, and an object of the present disclosure is to provide a table device including a table having higher running stability.

上記の目的を達成するため、本開示の一態様に係るテーブル装置は、第１面と、前記第１面と反対側の第２面とを有し、前記第１面側の第１空間と、前記第２面側の第２空間とを区切る板状部材と、前記板状部材の前記第１面側に配置され第１引力発生部を有すると共に、前記第１面上を移動可能な第１テーブルと、前記板状部材の前記第２面側に配置されると共に、前記第１引力発生部に吸引可能な第２引力発生部を有し前記第１テーブルの移動に追従して前記第２面上を移動可能な第２テーブルと、を備え、前記第２テーブルは、第２ベースと、前記第２ベースを移動可能に支持する支持部と、を含み、前記第２ベースには、段差により前記第２面との距離が他の部位よりも大きい底面が設けられ、前記段差及び前記底面で形成された空間内に前記支持部が配置されている。 In order to achieve the above object, the table device according to one aspect of the present disclosure has a first surface, a second surface opposite to the first surface, and a first space on the first surface side. A plate-shaped member that separates the second space on the second surface side, and a first attractive force generating portion that is arranged on the first surface side of the plate-shaped member and is movable on the first surface. The first table is arranged on the second surface side of the plate-shaped member, and has a second attractive force generating portion that can be attracted to the first attractive force generating portion, and follows the movement of the first table. A second table that is movable on two surfaces is provided, and the second table includes a second base and a support portion that movably supports the second base. A bottom surface having a step larger than that of other portions is provided by the step, and the support portion is arranged in the space formed by the step and the bottom surface.

支持部に設けられる転動体（例えばボール等）が大きくなると、転動体と板状部材との面圧が低下するため、支持部及び板状部材の寿命が長くなる。一方、転動体が大きくなると、支持部も大きくなる。ここで、平坦な基板に大径の転動体を有する支持部を取り付けると、平坦な基板に小径の転動体を有する支持部を取り付けた場合と比較して、基板の高さが高くなる。よって、テーブル全体の重心も高くなるため、走行安定性が低下する。
従って、第２ベースの底面を他の部位の下面よりも高く配置し、底面に支持部を固定する。これにより、テーブル全体の重心は、平坦な基板に小径の転動体を有する支持部を取り付けた場合と同等又は低くなる。以上より、本開示によれば、支持部及び板状部材の寿命が長くなると共に、テーブル全体の重心も低く抑えられて高い走行安定性を維持することができる。 When the rolling element (for example, a ball or the like) provided on the support portion becomes large, the surface pressure between the rolling element and the plate-shaped member decreases, so that the life of the support portion and the plate-shaped member becomes long. On the other hand, as the rolling element becomes larger, the support portion also becomes larger. Here, when the support portion having the large-diameter rolling element is attached to the flat substrate, the height of the substrate is higher than that in the case where the supporting portion having the small-diameter rolling element is attached to the flat substrate. Therefore, the center of gravity of the entire table is also high, and the running stability is lowered.
Therefore, the bottom surface of the second base is arranged higher than the lower surface of the other portion, and the support portion is fixed to the bottom surface. As a result, the center of gravity of the entire table becomes equal to or lower than that in the case where the support portion having the rolling element having a small diameter is attached to the flat substrate. From the above, according to the present disclosure, the life of the support portion and the plate-shaped member is extended, and the center of gravity of the entire table is suppressed to be low, so that high running stability can be maintained.

テーブル装置の望ましい態様として、前記第２ベースは、平面視において矩形状の環状部材であり、前記支持部が配置される前記空間は、前記環状部材の角部に配置された保持部に設けられている。 As a desirable aspect of the table device, the second base is an annular member having a rectangular shape in a plan view, and the space in which the support portion is arranged is provided in a holding portion arranged at a corner portion of the annular member. ing.

このように、第２ベースは環状部材であるため、板状部材と比較して、重量が軽減される。また、第２テーブルを４箇所の支持部で均等に支持するため、第２テーブルの重量を均等に分散して支持することができる。以上より、支持部の寿命が更に延長される。 As described above, since the second base is an annular member, the weight is reduced as compared with the plate-shaped member. Further, since the second table is evenly supported by the four support portions, the weight of the second table can be evenly distributed and supported. From the above, the life of the support portion is further extended.

テーブル装置の望ましい態様として、前記第２ベースは、複数の前記保持部と、隣接する前記保持部同士を連結する連結部と、を有し、前記連結部の前記第２面側に前記第２引力発生部が設けられる。 As a desirable embodiment of the table device, the second base has a plurality of the holding portions and a connecting portion for connecting the adjacent holding portions to each other, and the second base is on the second surface side of the connecting portion. An attractive force generating part is provided.

これにより、連結部の第２面側のスペースを有効利用することができる。また、連結部の第２面側に第２引力発生部を設けることにより、第１引力発生部との吸引力が大きくなる。よって、第２テーブルの走行安定性が更に向上する。 As a result, the space on the second surface side of the connecting portion can be effectively used. Further, by providing the second attractive force generating portion on the second surface side of the connecting portion, the suction force with the first attractive force generating portion is increased. Therefore, the running stability of the second table is further improved.

テーブル装置の望ましい態様として、連結部と前記第２面との距離は、保持部と第２面との距離よりも小さい。 As a preferred embodiment of the table device, the distance between the connecting portion and the second surface is smaller than the distance between the holding portion and the second surface.

連結部と保持部との高さを同じ位置にした場合と比較して、第２引力発生部と第１引力発生部との距離が短くなる。このため、第２引力発生部と第１引力発生部との吸引力が大きくなる。よって、第２テーブルの走行安定性が更に向上する。 Compared with the case where the heights of the connecting portion and the holding portion are set to the same position, the distance between the second attractive force generating portion and the first attractive force generating portion becomes shorter. Therefore, the suction force between the second attractive force generating portion and the first attractive force generating portion becomes large. Therefore, the running stability of the second table is further improved.

テーブル装置の望ましい態様として、前記第２ベースの周縁部は、前記第２ベースの移動方向に対して非対称となるように異形状部を有する。 As a preferred embodiment of the table device, the peripheral edge portion of the second base has a deformed portion so as to be asymmetric with respect to the moving direction of the second base.

これにより、第２ベースの移動方向が目視で識別可能となり、第２テーブルを適正な方向に設置することが容易になる。 As a result, the moving direction of the second base can be visually identified, and it becomes easy to install the second table in an appropriate direction.

本開示によれば、テーブルの走行安定性が、より向上したテーブル装置を提供することができる。 According to the present disclosure, it is possible to provide a table device in which the running stability of the table is further improved.

図１は、実施形態に係るテーブル装置の斜視図である。FIG. 1 is a perspective view of the table device according to the embodiment. 図２は、図１におけるＡ－Ａ断面図である。FIG. 2 is a cross-sectional view taken along the line AA in FIG. 図３は、第２テーブルの斜視図である。FIG. 3 is a perspective view of the second table. 図４は、図３の第２テーブルの平面図である。FIG. 4 is a plan view of the second table of FIG. 図５は、第１変形例に係る第２テーブルの斜視図である。FIG. 5 is a perspective view of the second table according to the first modification. 図６は、第２変形例に係る第２テーブルの断面図である。FIG. 6 is a cross-sectional view of the second table according to the second modification.

以下、本発明につき図面を参照しつつ詳細に説明する。なお、下記の発明を実施するための形態（以下、実施形態という）により本発明が限定されるものではない。また、下記実施形態における構成要素には、当業者が容易に想定できるもの、実質的に同一のもの、いわゆる均等の範囲のものが含まれる。さらに、下記実施形態で開示した構成要素は適宜組み合わせることが可能である。なお、実施形態において、水平面内の一方向をＸ方向とし、水平面内においてＸ方向と交差する方向をＹ方向とし、Ｘ方向及びＹ方向のそれぞれと交差する方向（すなわち鉛直方向）をＺ方向とする。 Hereinafter, the present invention will be described in detail with reference to the drawings. The present invention is not limited to the embodiments for carrying out the following inventions (hereinafter referred to as embodiments). In addition, the components in the following embodiments include those that can be easily assumed by those skilled in the art, those that are substantially the same, that is, those in a so-called equal range. Further, the components disclosed in the following embodiments can be appropriately combined. In the embodiment, one direction in the horizontal plane is the X direction, the direction intersecting the X direction in the horizontal plane is the Y direction, and the direction intersecting each of the X direction and the Y direction (that is, the vertical direction) is the Z direction. do.

[実施形態]
図１は、実施形態に係るテーブル装置の斜視図である。図２は、図１におけるＡ－Ａ断面図である。図３は、第２テーブルの斜視図である。図４は、図３の第２テーブルの平面図である。 [Embodiment]
FIG. 1 is a perspective view of the table device according to the embodiment. FIG. 2 is a cross-sectional view taken along the line AA in FIG. FIG. 3 is a perspective view of the second table. FIG. 4 is a plan view of the second table of FIG.

図１に示すように、テーブル装置１は、筐体２と、第１テーブル３と、第２テーブル４と、第１移動機構６と、第２移動機構７とを含む。第１テーブル３、第１移動機構６及び第２移動機構７は、筐体２の内側の第１空間Ｐに設けられる。第２テーブル４は、筐体２の外側の第２空間Ｒに設けられる。第２空間Ｒは、特定の環境を維持し、操作対象物の位置決めや、加工、検査等を行うための空間である。第２空間Ｒは、作業に適した特定の環境を維持できる空間であればよい。第２空間Ｒは、真空、減圧、ガス置換（減圧又は陽圧）、温度の異なる空間、クリーン環境、異物環境等の様々な環境に適用可能である。例えば、テーブル装置１は、細胞等のサンプルの採取や各種検査等を行うバイオ用途に用いられる。この場合、第２空間Ｒはクリーン環境であり、第２空間Ｒ内の第２テーブル４は、例えば腐食性ガスを用いて滅菌処理が施される。 As shown in FIG. 1, the table device 1 includes a housing 2, a first table 3, a second table 4, a first moving mechanism 6, and a second moving mechanism 7. The first table 3, the first moving mechanism 6, and the second moving mechanism 7 are provided in the first space P inside the housing 2. The second table 4 is provided in the second space R outside the housing 2. The second space R is a space for maintaining a specific environment and performing positioning, processing, inspection, and the like of the operation object. The second space R may be any space that can maintain a specific environment suitable for work. The second space R can be applied to various environments such as vacuum, depressurization, gas substitution (decompression or positive pressure), spaces having different temperatures, a clean environment, and a foreign matter environment. For example, the table device 1 is used for biotechnology applications such as collecting samples of cells and performing various tests. In this case, the second space R is a clean environment, and the second table 4 in the second space R is sterilized using, for example, a corrosive gas.

筐体２は、板状部材２１を含む。板状部材２１は、筐体２の側面に対して垂直な方向に延出する板状の部材であり、筐体２と一体に設けられる。第１空間Ｐと第２空間Ｒとは板状部材２１によって区切られている。本実施形態では、板状部材２１は非磁性体であり、非磁性ステンレス等が用いられる。非磁性ステンレスとして、合金オーステナイト系ステンレス（例えばＳＵＳ３１６等）が挙げられる。 The housing 2 includes a plate-shaped member 21. The plate-shaped member 21 is a plate-shaped member extending in a direction perpendicular to the side surface of the housing 2, and is provided integrally with the housing 2. The first space P and the second space R are separated by a plate-shaped member 21. In the present embodiment, the plate-shaped member 21 is a non-magnetic material, and non-magnetic stainless steel or the like is used. Examples of non-magnetic stainless steel include alloy austenitic stainless steel (for example, SUS316).

図２に示すように、板状部材２１は、第１面２１ａと、第１面２１ａと反対側の第２面２１ｂとを有する。第１空間Ｐは、第１面２１ａ側の空間である。第２空間Ｒは、第２面２１ｂ側の空間である。第１空間Ｐは、筐体２の内部の空間である。板状部材２１によって、第１空間Ｐと第２空間Ｒとが分離されている。板状部材２１は、第１空間Ｐと第２空間Ｒとを連通する孔部等が設けられていない連続した板状の部材である。これにより、第１移動機構６及び第２移動機構７の動作により発生する異物を含む気体が、第１空間Ｐから第２空間Ｒに流入することを抑制できる。従って、第２空間Ｒの環境を維持することができる。 As shown in FIG. 2, the plate-shaped member 21 has a first surface 21a and a second surface 21b opposite to the first surface 21a. The first space P is a space on the first surface 21a side. The second space R is a space on the second surface 21b side. The first space P is the space inside the housing 2. The first space P and the second space R are separated by the plate-shaped member 21. The plate-shaped member 21 is a continuous plate-shaped member that is not provided with a hole or the like that connects the first space P and the second space R. As a result, it is possible to prevent the gas containing foreign matter generated by the operation of the first moving mechanism 6 and the second moving mechanism 7 from flowing from the first space P into the second space R. Therefore, the environment of the second space R can be maintained.

第１テーブル３は、第１ベース３１と、第１引力発生部３２と、第１斥力発生部３３と、第１支持部３４と、を含む。第１ベース３１は、第１主面３１ａと、第１主面３１ａと反対側の第２主面３１ｂとを有する板状の部材である。第１ベース３１の第２主面３１ｂは、第２移動機構７の連結部７７と連結される。第１ベース３１は、第１移動機構６及び第２移動機構７の動作により、板状部材２１の第１面２１ａと平行な面内を移動する。 The first table 3 includes a first base 31, a first attractive force generating unit 32, a first repulsive force generating unit 33, and a first supporting unit 34. The first base 31 is a plate-shaped member having a first main surface 31a and a second main surface 31b opposite to the first main surface 31a. The second main surface 31b of the first base 31 is connected to the connecting portion 77 of the second moving mechanism 7. The first base 31 moves in a plane parallel to the first surface 21a of the plate-shaped member 21 by the operation of the first moving mechanism 6 and the second moving mechanism 7.

第１引力発生部３２、第１斥力発生部３３及び第１支持部３４は、第１ベース３１の第１主面３１ａに設けられる。言い換えると、第１引力発生部３２、第１斥力発生部３３及び第１支持部３４は、第１ベース３１と板状部材２１との間に設けられる。本実施形態において、第１引力発生部３２及び第１斥力発生部３３は、磁石であり、例えば耐熱ネオジム磁石やコバルト磁石を用いることができる。耐熱ネオジム磁石の耐熱温度は、１５０℃程度である。コバルト磁石の耐熱温度は２００℃程度である。第１引力発生部３２及び第１斥力発生部３３は、それぞれ、Ｎ極が第１主面３１ａに接している。また、第１引力発生部３２及び第１斥力発生部３３は、それぞれ、Ｓ極が板状部材２１とＺ方向に離隔して対向する。 The first attractive force generating portion 32, the first repulsive force generating portion 33, and the first supporting portion 34 are provided on the first main surface 31a of the first base 31. In other words, the first attractive force generating portion 32, the first repulsive force generating portion 33, and the first supporting portion 34 are provided between the first base 31 and the plate-shaped member 21. In the present embodiment, the first attractive force generating unit 32 and the first repulsive force generating unit 33 are magnets, and for example, a heat-resistant neodymium magnet or a cobalt magnet can be used. The heat-resistant temperature of the heat-resistant neodymium magnet is about 150 ° C. The heat resistant temperature of the cobalt magnet is about 200 ° C. The north pole of each of the first attractive force generating section 32 and the first repulsive force generating section 33 is in contact with the first main surface 31a. Further, in the first attractive force generating section 32 and the first repulsive force generating section 33, the S poles of the first attractive force generating section 32 and the first repulsive force generating section 33 face each other with the plate-shaped member 21 separated from each other in the Z direction.

第１支持部３４は、ボールローラである。具体的には、第１支持部３４は、ハウジング３４１と、ボール３４２とを含む。ハウジング３４１は第１ベース３１に固定される。ボール３４２は、ハウジング３４１の凹部内に回転可能に設けられている。ボール３４２は、板状部材２１の第１面２１ａと接している。第１ベース３１は、板状部材２１の第１面２１ａに沿って自由に移動可能になっている。第１支持部３４が設けられているため、第１引力発生部３２及び第１斥力発生部３３が板状部材２１に接触することを抑制でき、第１ベース３１がスムーズに移動できる。 The first support portion 34 is a ball roller. Specifically, the first support portion 34 includes a housing 341 and a ball 342. The housing 341 is fixed to the first base 31. The ball 342 is rotatably provided in the recess of the housing 341. The ball 342 is in contact with the first surface 21a of the plate-shaped member 21. The first base 31 is freely movable along the first surface 21a of the plate-shaped member 21. Since the first support portion 34 is provided, it is possible to prevent the first attractive force generating portion 32 and the first repulsive force generating portion 33 from coming into contact with the plate-shaped member 21, and the first base 31 can move smoothly.

なお、本実施形態及び後述する第２変形例では、ボール３４２が板状部材２１の第１面２１ａと接している態様を示したが、本発明はこれに限定されない。例えば、ボール３４２が板状部材２１の第１面２１ａから上下方向で離隔していてもよい。また、第１支持部３４自体が必ずしも必要でなくてもよい。即ち、第１テーブル３の移動に追従して第２テーブル４が第２面２１ｂ上を移動可能であればよい。このためには、（１）第１引力発生部３２と第２引力発生部４２とで作用する引力Ｆ１が適正な値に設定されていること、（２）第１斥力発生部３３と第２斥力発生部４３とで作用する斥力Ｆ２が適正な値に設定されていること、（３）板状部材２１の剛性が十分であること、が満たされることが好ましい。ただし、（１）～（３）の要件は、必須でない。 In the present embodiment and the second modification described later, the aspect in which the ball 342 is in contact with the first surface 21a of the plate-shaped member 21 is shown, but the present invention is not limited to this. For example, the ball 342 may be separated from the first surface 21a of the plate-shaped member 21 in the vertical direction. Further, the first support portion 34 itself does not necessarily have to be required. That is, it suffices if the second table 4 can move on the second surface 21b following the movement of the first table 3. For this purpose, (1) the attractive force F1 acting by the first attractive force generating unit 32 and the second attractive force generating unit 42 is set to an appropriate value, and (2) the first repulsive force generating unit 33 and the second. It is preferable that the repulsive force F2 acting on the repulsive force generating unit 43 is set to an appropriate value, and (3) the rigidity of the plate-shaped member 21 is sufficient. However, the requirements (1) to (3) are not essential.

図２に示すように、第２テーブル４は、第２ベース４１（ベース）と、第２引力発生部４２と、第２斥力発生部４３と、第２支持部４４（支持部）と、を含む。 As shown in FIG. 2, the second table 4 includes a second base 41 (base), a second attractive force generating portion 42, a second repulsive force generating portion 43, and a second supporting portion 44 (supporting portion). include.

図３に示すように、第２ベース４１（ベース）は、平面視でロ字状の形状を有する。四隅の角部には、それぞれ第１保持部４１１、第２保持部４１２、第３保持部４１３、及び第４保持部４１４が設けられている。また、それぞれの隣接する保持部同士は、第１連結部４１５、第２連結部４１６、第３連結部４１７、及び第４連結部４１８で連結されている。 As shown in FIG. 3, the second base 41 (base) has a square shape in a plan view. A first holding portion 411, a second holding portion 412, a third holding portion 413, and a fourth holding portion 414 are provided at the corners of the four corners, respectively. Further, the adjacent holding portions are connected by a first connecting portion 415, a second connecting portion 416, a third connecting portion 417, and a fourth connecting portion 418.

なお、図２に示すように、連結部（第１連結部４１５、第２連結部４１６、第３連結部４１７及び第４連結部４１８）の下面４１６ｃと第２面２１ｂとの距離Ｈ１は、保持部（第１保持部４１１、第２保持部４１２、第３保持部４１３及び第４保持部４１４）の底面４１３３ｃと第２面２１ｂとの距離Ｈ２よりも小さい。 As shown in FIG. 2, the distance H1 between the lower surface 416c and the second surface 21b of the connecting portion (first connecting portion 415, second connecting portion 416, third connecting portion 417, and fourth connecting portion 418) is set. The distance between the bottom surface 4133c and the second surface 21b of the holding portion (first holding portion 411, second holding portion 412, third holding portion 413, and fourth holding portion 414) is smaller than the distance H2.

第１保持部４１１、第２保持部４１２、第３保持部４１３、及び第４保持部４１４の構造は同一であるため、本実施形態では、第３保持部４１３を例にとって説明する。 Since the structures of the first holding portion 411, the second holding portion 412, the third holding portion 413, and the fourth holding portion 414 are the same, the third holding portion 413 will be described as an example in the present embodiment.

第３保持部４１３は、一方側縦壁部４１３１と、横壁部４１３３と、他方側縦壁部４１３４と、突起部４１３５と、を有する。一方側縦壁部４１３１は、第２連結部４１６のＸ方向の反対方向の端部４１６ａからＺ方向に延びる。横壁部４１３３は、一方側縦壁部４１３１のＺ方向の端部４１３２から板状部材２１の第２面２１ｂに沿って（ＸＹ平面に沿って）延びる。他方側縦壁部４１３４は、横壁部４１３３の端部４１３３ａからＺ方向の反対方向に延びて第３連結部４１７のＹ方向の反対方向の端部４１７ａと連結される。突起部４１３５は、横壁部４１３３の上面４１３３ｂからＺ方向に突出する。突起部４１３５は、平面視Ｌ字状の形状を有する。なお、第２ベース４１において、４つの突起部の内側にワークを載置して保持する。 The third holding portion 413 has a vertical wall portion 4131 on one side, a horizontal wall portion 4133, a vertical wall portion 4134 on the other side, and a protrusion 4135. The one-side vertical wall portion 4131 extends in the Z direction from the end portion 416a of the second connecting portion 416 in the opposite direction to the X direction. The lateral wall portion 4133 extends from the end portion 4132 of the one-side vertical wall portion 4131 in the Z direction along the second surface 21b of the plate-shaped member 21 (along the XY plane). The other side vertical wall portion 4134 extends from the end portion 4133a of the horizontal wall portion 4133 in the opposite direction in the Z direction and is connected to the end portion 417a of the third connecting portion 417 in the opposite direction in the Y direction. The protrusion 4135 projects in the Z direction from the upper surface 4133b of the side wall portion 4133. The protrusion 4135 has an L-shaped plan view. In the second base 41, the work is placed and held inside the four protrusions.

また、第３保持部４１３におけるＺ方向の反対側（図２の下側）には、空間４１３６が設けられている。詳細には、図２及び図３に示すように、第３保持部４１３には、段差４１３１ａにより第２面２１ｂとの距離が連結部（第１連結部４１５、第２連結部４１６、第３連結部４１７及び第４連結部４１８）よりも大きい底面４１３３ｃが設けられている。即ち、空間４１３６は、Ｚ方向（第１方向、図２の上側）に向けて凹んで形成されている。段差４１３１ａ及び底面４１３３ｃで形成された空間４１３６内に第２支持部４４（支持部）が配置されている。空間４１３６の縁は、一方側縦壁部４１３１のＸ方向の反対方向側の段差４１３１ａと、他方側縦壁部４１３４のＹ方向の反対方向側の側面４１３４ａと、横壁部４１３３の底面４１３３ｃと、を有する。なお、上述した第１方向は、本実施形態では、第１面２１ａから第２面２１ｂに向かうＺ方向である。また、第１方向に交差する方向を第２方向とする。この第２方向は、本実施形態では、ＸＹ平面に沿った方向である。 Further, a space 4136 is provided on the opposite side (lower side in FIG. 2) of the third holding portion 413 in the Z direction. Specifically, as shown in FIGS. 2 and 3, the third holding portion 413 has a connecting portion (first connecting portion 415, second connecting portion 416, third) having a distance from the second surface 21b due to the step 4131a. A bottom surface 4133c larger than the connecting portion 417 and the fourth connecting portion 418) is provided. That is, the space 4136 is formed so as to be recessed in the Z direction (first direction, upper side of FIG. 2). The second support portion 44 (support portion) is arranged in the space 4136 formed by the step 4131a and the bottom surface 4133c. The edges of the space 4136 include a step 4131a on the opposite side in the X direction of the vertical wall portion 4131 on one side, a side surface 4134a on the opposite side in the Y direction of the vertical wall portion 4134 on the other side, and a bottom surface 4133c of the horizontal wall portion 4133. Has. In the present embodiment, the above-mentioned first direction is the Z direction from the first surface 21a to the second surface 21b. Further, the direction intersecting the first direction is defined as the second direction. This second direction is the direction along the XY plane in this embodiment.

また、第３保持部４１３の空間４１３６内には、第２支持部４４（支持部）が配置されている。第２支持部４４は、本実施形態では、ボールローラである。具体的には、第２支持部４４は、図２に示すように、ハウジング４４１と、ボール４４２と、雄ねじ部４４３（図３，４参照）と、を含む。ボール４４２は、ハウジング４４１の凹部内に回転可能に設けられている。ハウジング４４１には、Ｚ方向に延びる雄ねじ部４４３が設けられている。横壁部４１３３には、Ｚ方向に貫通する雌ねじ部が設けられている。雄ねじ部４４３を雌ねじ部に締結することにより、第２支持部４４を横壁部４１３３に固定することができる。ボール４４２は、板状部材２１の第２面２１ｂと接している。ボール４４２の回転により、第２ベース４１は、板状部材２１の第２面２１ｂに沿って自由に移動可能になっている。 Further, a second support portion 44 (support portion) is arranged in the space 4136 of the third holding portion 413. The second support portion 44 is a ball roller in this embodiment. Specifically, as shown in FIG. 2, the second support portion 44 includes a housing 441, a ball 442, and a male screw portion 443 (see FIGS. 3 and 4). The ball 442 is rotatably provided in the recess of the housing 441. The housing 441 is provided with a male screw portion 443 extending in the Z direction. The side wall portion 4133 is provided with a female screw portion penetrating in the Z direction. By fastening the male screw portion 443 to the female screw portion, the second support portion 44 can be fixed to the lateral wall portion 4133. The ball 442 is in contact with the second surface 21b of the plate-shaped member 21. The rotation of the ball 442 allows the second base 41 to move freely along the second surface 21b of the plate-shaped member 21.

第２引力発生部４２及び第２斥力発生部４３は、第１連結部４１５、第２連結部４１６、第３連結部４１７、及び第４連結部４１８の下面に設けられる。図２においては、第２連結部４１６の下面４１６ｃに設けられた場合を示す。言い換えると、第２引力発生部４２及び第２斥力発生部４３は、第２ベース４１と板状部材２１との間に設けられる。本実施形態において、第２引力発生部４２及び第２斥力発生部４３は、磁石であり、例えば耐熱ネオジム磁石やコバルト磁石を用いることができる。耐熱ネオジム磁石の耐熱温度は、１５０℃程度である。コバルト磁石の耐熱温度は２００℃程度である。第２引力発生部４２においては、Ｓ極が各連結部の下面に当接し、Ｎ極が板状部材２１の第２面２１ｂと離隔して対向する。第２斥力発生部４３においては、Ｎ極が各連結部の下面に当接し、Ｓ極が板状部材２１の第２面２１ｂと離隔して対向する。 The second attractive force generating portion 42 and the second repulsive force generating portion 43 are provided on the lower surfaces of the first connecting portion 415, the second connecting portion 416, the third connecting portion 417, and the fourth connecting portion 418. FIG. 2 shows a case where the second connecting portion 416 is provided on the lower surface 416c. In other words, the second attractive force generating portion 42 and the second repulsive force generating portion 43 are provided between the second base 41 and the plate-shaped member 21. In the present embodiment, the second attractive force generating unit 42 and the second repulsive force generating unit 43 are magnets, and for example, a heat-resistant neodymium magnet or a cobalt magnet can be used. The heat-resistant temperature of the heat-resistant neodymium magnet is about 150 ° C. The heat resistant temperature of the cobalt magnet is about 200 ° C. In the second attractive force generating portion 42, the S pole abuts on the lower surface of each connecting portion, and the N pole faces the second surface 21b of the plate-shaped member 21 at a distance. In the second repulsive force generating portion 43, the north pole abuts on the lower surface of each connecting portion, and the south pole faces the second surface 21b of the plate-shaped member 21 at a distance.

第２引力発生部４２は、板状部材２１を介して第１引力発生部３２と対向する。すなわち、第２引力発生部４２は、Ｚ方向から見たときに、第１引力発生部３２と重なる位置に配置される。第２引力発生部４２は第１引力発生部３２と異なる極が対向するように配置される。図２に示す例では、第２引力発生部４２のＮ極と、第１引力発生部３２のＳ極が対向する。これにより、第１引力発生部３２と第２引力発生部４２との間には、引力Ｆ１が発生する。第２ベース４１には、第１ベース３１に向かう方向の引力Ｆ１が作用する。 The second attractive force generating unit 42 faces the first attractive force generating unit 32 via the plate-shaped member 21. That is, the second attractive force generating unit 42 is arranged at a position overlapping with the first attractive force generating unit 32 when viewed from the Z direction. The second attractive force generating unit 42 is arranged so that poles different from those of the first attractive force generating unit 32 face each other. In the example shown in FIG. 2, the north pole of the second attractive force generating unit 42 and the south pole of the first attractive force generating unit 32 face each other. As a result, an attractive force F1 is generated between the first attractive force generating unit 32 and the second attractive force generating unit 42. An attractive force F1 in the direction toward the first base 31 acts on the second base 41.

第２斥力発生部４３は、板状部材２１を介して第１斥力発生部３３と対向する。すなわち、第２斥力発生部４３は、Ｚ方向から見たときに、第１斥力発生部３３と重なる位置に配置される。第２斥力発生部４３は第１斥力発生部３３と同じ極が対向するように配置される。図２に示す例では、第２斥力発生部４３のＳ極と、第１斥力発生部３３のＳ極が対向する。これにより、第１斥力発生部３３と第２斥力発生部４３との間に斥力Ｆ２が発生する。第２ベース４１には、第１ベース３１から第２ベース４１に向かう方向の斥力Ｆ２が作用する。 The second repulsive force generating unit 43 faces the first repulsive force generating unit 33 via the plate-shaped member 21. That is, the second repulsive force generating unit 43 is arranged at a position overlapping the first repulsive force generating unit 33 when viewed from the Z direction. The second repulsive force generating unit 43 is arranged so that the same poles as the first repulsive force generating unit 33 face each other. In the example shown in FIG. 2, the S pole of the second repulsive force generating unit 43 and the S pole of the first repulsive force generating unit 33 face each other. As a result, a repulsive force F2 is generated between the first repulsive force generating unit 33 and the second repulsive force generating unit 43. A repulsive force F2 in the direction from the first base 31 to the second base 41 acts on the second base 41.

本実施形態では、引力Ｆ１の合計の力は、斥力Ｆ２の合計の力よりも大きい。これにより、第２ベース４１は、第１ベース３１の移動に追従して、板状部材２１の第２面２１ｂに沿って移動可能となっている。 In the present embodiment, the total force of the attractive force F1 is larger than the total force of the repulsive force F2. As a result, the second base 41 can move along the second surface 21b of the plate-shaped member 21 following the movement of the first base 31.

ここで、第２テーブル４の重心Ｇの位置について説明する。まず、図２に示すように、第２テーブル４をＹ方向から見た場合、重心Ｇは、第２ベース４１のＸ方向の両端同士の中央に位置する。また、Ｚ方向では、重心Ｇは、第１連結部４１５、第２連結部４１６、第３連結部４１７、及び第４連結部４１８の上面（図２では第２連結部４１６の上面４１６ｂ）に位置する。そして、図４に示すように、平面視の場合、重心Ｇは、第２ベース４１におけるＸ方向の中央であってＹ方向の中央に位置する。ここで、第１連結部４１５、第２連結部４１６、第３連結部４１７及び第４連結部４１８の高さが、保持部の横壁部（例えば、図２に示す第３保持部４１３の横壁部４１３３）と同じ高さとした場合、重心の位置が本実施形態よりも高くなる。 Here, the position of the center of gravity G of the second table 4 will be described. First, as shown in FIG. 2, when the second table 4 is viewed from the Y direction, the center of gravity G is located at the center of both ends of the second base 41 in the X direction. Further, in the Z direction, the center of gravity G is located on the upper surfaces of the first connecting portion 415, the second connecting portion 416, the third connecting portion 417, and the fourth connecting portion 418 (in FIG. 2, the upper surface 416b of the second connecting portion 416). To position. Then, as shown in FIG. 4, in the case of a plan view, the center of gravity G is located at the center of the second base 41 in the X direction and in the center of the Y direction. Here, the height of the first connecting portion 415, the second connecting portion 416, the third connecting portion 417, and the fourth connecting portion 418 is the lateral wall portion of the holding portion (for example, the lateral wall of the third holding portion 413 shown in FIG. 2). When the height is the same as that of the part 4133), the position of the center of gravity is higher than that of the present embodiment.

以上説明したように、テーブル装置１は、第２テーブル４を備え、第２テーブル４は、第２ベース４１と、第２支持部４４と、を含む。保持部（第１保持部４１１、第２保持部４１２、第３保持部４１３及び第４保持部４１４）には、段差４１３１ａ及び底面４１３３ｃで形成された空間４１３６が設けられ、空間４１３６内に第２支持部４４が配置される。 As described above, the table device 1 includes a second table 4, and the second table 4 includes a second base 41 and a second support portion 44. The holding portion (first holding portion 411, second holding portion 412, third holding portion 413, and fourth holding portion 414) is provided with a space 4136 formed by a step 4131a and a bottom surface 4133c, and a space 4136 is provided in the space 4136. 2 Support portion 44 is arranged.

ボール４４２の径が大きくなると、ボール４４２と板状部材２１との面圧が低下するため、第２支持部４４及び板状部材２１の寿命が長くなる。一方、ボール４４２の径が大きくなると、第２支持部４４も大きくなる。ここで、平坦な基板に大径のボールを有する第２支持部４４を取り付けると、平坦な基板に小径のボールを有する支持部を取り付けた場合と比較して、基板の高さが高くなる。よって、テーブル全体の重心も高くなるため、走行安定性が低下する。 As the diameter of the ball 442 increases, the surface pressure between the ball 442 and the plate-shaped member 21 decreases, so that the life of the second support portion 44 and the plate-shaped member 21 becomes longer. On the other hand, as the diameter of the ball 442 increases, so does the second support portion 44. Here, when the second support portion 44 having the large diameter balls is attached to the flat substrate, the height of the substrate becomes higher as compared with the case where the support portion having the small diameter balls is attached to the flat substrate. Therefore, the center of gravity of the entire table is also high, and the running stability is lowered.

従って、第３保持部４１３の底面４１３３ｃを第２連結部４１６の下面４１６ｃよりも高く配置し、底面４１３３ｃに第２支持部４４を固定する。これにより、テーブル全体の重心は、平坦な基板に小径のボールを有する支持部を取り付けた場合と同等又は低くなる。以上より、本実施形態によれば、第２支持部４４及び板状部材２１の寿命が長くなると共に、テーブル全体の重心も低く抑えられるため、高い走行安定性を維持することができる。 Therefore, the bottom surface 4133c of the third holding portion 413 is arranged higher than the lower surface 416c of the second connecting portion 416, and the second support portion 44 is fixed to the bottom surface 4133c. As a result, the center of gravity of the entire table becomes equal to or lower than that in the case where the support portion having the small diameter balls is attached to the flat substrate. From the above, according to the present embodiment, the life of the second support portion 44 and the plate-shaped member 21 is extended, and the center of gravity of the entire table is also suppressed to be low, so that high running stability can be maintained.

第２ベース４１は、平面視において矩形状の環状部材であり、保持部（第１保持部４１１、第２保持部４１２、第３保持部４１３及び第４保持部４１４）は、環状部材の角部に設けられる。 The second base 41 is a rectangular annular member in a plan view, and the holding portions (first holding portion 411, second holding portion 412, third holding portion 413, and fourth holding portion 414) are corners of the annular member. It is provided in the part.

このように、第２ベース４１は環状部材であるため、板状部材と比較して、重量が軽減される。また、第２テーブル４を４箇所の第２支持部４４で均等に支持するため、第２テーブル４の重量を均等に分散して支持することができる。以上より、第２支持部４４の寿命が更に延長される。 As described above, since the second base 41 is an annular member, the weight is reduced as compared with the plate-shaped member. Further, since the second table 4 is evenly supported by the second support portions 44 at four locations, the weight of the second table 4 can be evenly distributed and supported. From the above, the life of the second support portion 44 is further extended.

第２ベース４１は、隣接する保持部同士を連結する連結部（第１連結部４１５、第２連結部４１６、第３連結部４１７及び第４連結部４１８）と、を有する。連結部の第２面２１ｂ側に第２引力発生部４２が設けられる。 The second base 41 has connecting portions (first connecting portion 415, second connecting portion 416, third connecting portion 417, and fourth connecting portion 418) that connect adjacent holding portions to each other. A second attractive force generating portion 42 is provided on the second surface 21b side of the connecting portion.

これにより、連結部の第２面２１ｂ側のスペースを有効利用することができる。また、連結部の第２面２１ｂ側に第２引力発生部４２を設けることにより、第２引力発生部４２と第１引力発生部３２との距離が短くなる。このため、第２引力発生部４２と第１引力発生部３２との吸引力が大きくなり、第２テーブル４の走行安定性が更に向上する。 As a result, the space on the second surface 21b side of the connecting portion can be effectively used. Further, by providing the second attractive force generating portion 42 on the second surface 21b side of the connecting portion, the distance between the second attractive force generating portion 42 and the first attractive force generating portion 32 is shortened. Therefore, the suction force between the second attractive force generating unit 42 and the first attractive force generating unit 32 becomes large, and the running stability of the second table 4 is further improved.

連結部（第１連結部４１５、第２連結部４１６、第３連結部４１７及び第４連結部４１８）の下面と第２面２１ｂとの距離Ｈ１は、保持部（第１保持部４１１、第２保持部４１２、第３保持部４１３及び第４保持部４１４）の底面４１３３ｃと第２面２１ｂとの距離Ｈ２よりも小さい。 The distance H1 between the lower surface of the connecting portion (first connecting portion 415, second connecting portion 416, third connecting portion 417, and fourth connecting portion 418) and the second surface 21b is the holding portion (first holding portion 411, first holding portion 411, first. The distance between the bottom surface 4133c of the 2 holding portion 412, the 3rd holding portion 413, and the 4th holding portion 414) and the 2nd surface 21b is smaller than the distance H2.

連結部と保持部との高さを同じ位置にした場合と比較して、第２引力発生部４２と第１引力発生部３２との距離が短くなる。このため、第２引力発生部４２と第１引力発生部３２との吸引力が大きくなる。よって、第２テーブル４の走行安定性が更に向上する。 Compared with the case where the heights of the connecting portion and the holding portion are set to the same position, the distance between the second attractive force generating unit 42 and the first attractive force generating unit 32 becomes shorter. Therefore, the suction force between the second attractive force generating unit 42 and the first attractive force generating unit 32 becomes large. Therefore, the running stability of the second table 4 is further improved.

また、例えば、第１引力発生部３２及び第１斥力発生部３３の磁石の腐食を抑制するために、磁石の表面にフッ素コート層を設け、フッ素樹脂製の磁石カバーを介して磁石を第２ベース４１に固定してもよい。これにより、腐食性ガス等の特殊ガス雰囲気のプロセス室内などで用いられる場合でも、より高い耐食性を有するテーブル装置１を提供することができる。 Further, for example, in order to suppress the corrosion of the magnets of the first attractive force generating portion 32 and the first repulsive force generating portion 33, a fluorine coating layer is provided on the surface of the magnet, and the magnet is seconded through the magnet cover made of fluororesin. It may be fixed to the base 41. This makes it possible to provide the table device 1 having higher corrosion resistance even when it is used in a process chamber having a special gas atmosphere such as a corrosive gas.

[第１変形例]
次いで、本実施形態の第１変形例について説明する。ただし、上述した実施形態と同じ部位には同じ符号を付けて説明を省略する。 [First modification]
Next, a first modification of the present embodiment will be described. However, the same parts as those in the above-described embodiment are designated by the same reference numerals, and the description thereof will be omitted.

図５は、第１変形例に係る第２テーブルの斜視図である。当該第１変形例に係る第２テーブル４Ａにおいては、第２ベース４１Ａの第３保持部４１３Ａ及び第４保持部４１４Ａに面取部４００（異形状部）を設けている。第１変形例においては、第２ベース４１Ａの移動方向はＸ方向であるが、本発明では、第２ベース４１Ａの移動方向は特に限定されない。面取部４００（異形状部）は、第１面取部４１０、第２面取部４２０、第３面取部４３０及び第４面取部４４０を含む。面取部４００は、面取部４００を設けない部位と比較して形状が相違する異形状部である。なお、異形状部は、面取部４００に限定されず、目視で識別可能であれば、例えば刻印等でもよい。 FIG. 5 is a perspective view of the second table according to the first modification. In the second table 4A according to the first modification, the chamfered portion 400 (deformed portion) is provided in the third holding portion 413A and the fourth holding portion 414A of the second base 41A. In the first modification, the moving direction of the second base 41A is the X direction, but in the present invention, the moving direction of the second base 41A is not particularly limited. The chamfered portion 400 (deformed portion) includes a first chamfered portion 410, a second chamfered portion 420, a third chamfered portion 430, and a fourth chamfered portion 440. The chamfered portion 400 is a deformed portion having a different shape as compared with a portion not provided with the chamfered portion 400. The irregularly shaped portion is not limited to the chamfered portion 400, and may be, for example, engraved as long as it can be visually identified.

第３保持部４１３Ａにおいては、第１面取部４１０と、第２面取部４２０と、が設けられている。第１面取部４１０は、突起部４１３５のうちＹ方向に沿った部位の上端角部に設けられている。第２面取部４２０は、第３保持部４１３ＡにおけるＸ方向の反対方向側であってＹ方向の反対方向側の角部に設けられ、Ｚ方向に沿って延びる。 The third holding portion 413A is provided with a first chamfered portion 410 and a second chamfered portion 420. The first chamfered portion 410 is provided at the upper end corner portion of the protruding portion 4135 along the Y direction. The second chamfered portion 420 is provided at a corner portion of the third holding portion 413A on the opposite direction side in the X direction and on the opposite direction side in the Y direction, and extends along the Z direction.

また、第４保持部４１４Ａにおいては、第３面取部４３０と、第４面取部４４０と、が設けられている。第３面取部４３０は、突起部４１４５のうちＹ方向に沿った部位の上端角部に設けられている。第４面取部４４０は、第４保持部４１４ＡにおけるＸ方向の反対方向側であってＹ方向側の角部に設けられ、Ｚ方向に沿って延びる。 Further, in the fourth holding portion 414A, a third chamfered portion 430 and a fourth chamfered portion 440 are provided. The third chamfered portion 430 is provided at the upper end corner of the portion of the protrusion 4145 along the Y direction. The fourth chamfered portion 440 is provided at a corner portion of the fourth holding portion 414A on the opposite direction side in the X direction and on the Y direction side, and extends along the Z direction.

なお、図４に示す重心Ｇの位置は、第１方向に交差する第２方向の中央部Ｃの位置と同じである。すなわち、第２方向は、前述したように、Ｚ方向である第１方向と交差するＸＹ平面に沿った方向である。従って、第２ベース４１Ａにおける第２方向の中央部Ｃは、図４の上下方向の中央で、かつ、図４の左右方向の中央に位置する。 The position of the center of gravity G shown in FIG. 4 is the same as the position of the central portion C in the second direction intersecting the first direction. That is, as described above, the second direction is the direction along the XY plane that intersects the first direction, which is the Z direction. Therefore, the central portion C in the second direction of the second base 41A is located at the center in the vertical direction in FIG. 4 and in the center in the horizontal direction in FIG.

従って、図５に示すように、面取部４００は、第２ベース４１Ａにおける第２方向の中央部Ｃを挟んだ一方側の部位（本実施形態では、Ｘ方向の反対方向側の部位）に設けられている。 Therefore, as shown in FIG. 5, the chamfered portion 400 is located on one side of the second base 41A with the central portion C in the second direction sandwiched (in the present embodiment, the portion on the opposite side in the X direction). It is provided.

以上説明したように、第２ベース４１Ａにおける第２方向の中央部Ｃを挟んだＸ方向の反対方向側の第３保持部４１３Ａ及び第４保持部４１４Ａは、面取部４００（異形状部）を有する。換言すれば、第２ベース４１Ａの周縁部は、第２ベース４１Ａの移動方向（第１変形例ではＸ方向）に対して非対称となるように面取部４００（異形状部）を有する。 As described above, the third holding portion 413A and the fourth holding portion 414A on the side opposite to the X direction sandwiching the central portion C in the second direction of the second base 41A are chamfered portions 400 (deformed portions). Has. In other words, the peripheral edge portion of the second base 41A has a chamfered portion 400 (deformed portion) so as to be asymmetric with respect to the moving direction of the second base 41A (X direction in the first modification).

ここで、第２テーブル４Ａは、図２で説明したように、第１テーブル３のＺ方向側に対向して配置される。図２では、１つの第２引力発生部４２と、当該第２引力発生部４２のＸ方向側及びＸ方向の反対方向側に配置された２つの第２斥力発生部４３と、が設けられている。すなわち、第２引力発生部４２と第２斥力発生部４３との位置が、Ｘ方向において対称となっている。しかし、第２引力発生部４２と第２斥力発生部４３との位置が、Ｘ方向において非対称となる場合、第２テーブル４Ａを設置する向きが間違っていると、第２テーブル４Ａが正常に移動しない。なお、第２テーブル４Ａを設置する向きが正規の方向と相違すると第２テーブル４Ａが正常に移動しない場合は、前述した場合に限定されず、種々のケースがある。 Here, the second table 4A is arranged so as to face the Z direction side of the first table 3 as described with reference to FIG. In FIG. 2, one second attractive force generating unit 42 and two second repulsive force generating units 43 arranged on the X direction side and the opposite direction side of the X direction of the second attractive force generating unit 42 are provided. There is. That is, the positions of the second attractive force generating unit 42 and the second repulsive force generating unit 43 are symmetrical in the X direction. However, when the positions of the second attractive force generating unit 42 and the second repulsive force generating unit 43 are asymmetrical in the X direction, if the direction in which the second table 4A is installed is incorrect, the second table 4A moves normally. do not do. If the direction in which the second table 4A is installed is different from the normal direction and the second table 4A does not move normally, the case is not limited to the above-mentioned case, and there are various cases.

従って、第３保持部４１３Ａ及び第４保持部４１４Ａに面取部４００（異形状部）を設けている。これにより、第２ベースの移動方向が目視で識別可能となり、第２テーブルを適正な方向に設置することが容易になる。 Therefore, the chamfered portion 400 (deformed portion) is provided in the third holding portion 413A and the fourth holding portion 414A. As a result, the moving direction of the second base can be visually identified, and it becomes easy to install the second table in an appropriate direction.

[第２変形例]
次いで、本実施形態の第２変形例について説明する。ただし、上述した実施形態及び第１変形例と同じ部位には同じ符号を付けて説明を省略する。
図６は、第２変形例に係るテーブル装置の断面図である。図６に示すように、本変形例のテーブル装置１Ａは、筐体２Ａと、第１テーブル３と、第２テーブル４と、移動機構（第１移動機構６及び第２移動機構７（図１参照））とを有する。筐体２Ａの外側の空間が第１空間Ｐであり、筐体２Ａの内側の空間が第２空間Ｒである。第２空間Ｒは、例えば真空、減圧、クリーン環境等、様々な環境に対応可能である。筐体２Ａの底板が、板状部材２１Ａである。なお、図示はしていないが、筐体２Ａは、床面等に固定されて移動しない。即ち、筐体２Ａは固定され、筐体２Ａに対して第１テーブル３及び第２テーブル４が移動可能である。 [Second modification]
Next, a second modification of the present embodiment will be described. However, the same parts as those in the above-described embodiment and the first modification are designated by the same reference numerals, and the description thereof will be omitted.
FIG. 6 is a cross-sectional view of the table device according to the second modification. As shown in FIG. 6, the table device 1A of this modified example includes a housing 2A, a first table 3, a second table 4, and a moving mechanism (first moving mechanism 6 and second moving mechanism 7 (FIG. 1). See)) and. The space outside the housing 2A is the first space P, and the space inside the housing 2A is the second space R. The second space R can be used in various environments such as a vacuum, a reduced pressure, and a clean environment. The bottom plate of the housing 2A is a plate-shaped member 21A. Although not shown, the housing 2A is fixed to the floor surface or the like and does not move. That is, the housing 2A is fixed, and the first table 3 and the second table 4 can be moved with respect to the housing 2A.

第１テーブル３は、板状部材２１Ａの第１面２１Ａａ側、即ち第１空間Ｐに配置される。また、第２テーブル４は、板状部材２１Ａの第２面２１Ａｂ側、即ち第２空間Ｒに配置される。つまり、筐体２Ａの外側に、第１ベース３１及び第１引力発生部３２を含む第１テーブル３と、移動機構（第１移動機構６及び第２移動機構７（図６では図示を省略する））と、が設けられる。また筐体２Ａの内側に、第２ベース４１、第２引力発生部４２及び第２支持部４４を含む第２テーブル４が設けられる。第１テーブル３及び第２テーブル４の構成は、図２から図４に示したものと同様であり、詳細な説明は省略する。 The first table 3 is arranged on the first surface 21Aa side of the plate-shaped member 21A, that is, on the first space P. Further, the second table 4 is arranged on the second surface 21Ab side of the plate-shaped member 21A, that is, on the second space R. That is, on the outside of the housing 2A, the first table 3 including the first base 31 and the first attractive force generating unit 32 and the moving mechanism (first moving mechanism 6 and second moving mechanism 7 (not shown in FIG. 6)). )) And are provided. Further, a second table 4 including a second base 41, a second attractive force generating portion 42, and a second supporting portion 44 is provided inside the housing 2A. The configurations of the first table 3 and the second table 4 are the same as those shown in FIGS. 2 to 4, and detailed description thereof will be omitted.

本変形例においては、例えば、第２引力発生部４２及び第２斥力発生部４３の磁石の腐食を抑制するために、磁石の表面にフッ素コート層を設け、フッ素樹脂製の磁石カバーを介して磁石を第１ベース３１に固定してもよい。これにより、腐食性ガス等の特殊ガス雰囲気のプロセス室内などで用いられる場合でも、より高い耐食性を有するテーブル装置１を提供することができる。 In this modification, for example, in order to suppress the corrosion of the magnets of the second attractive force generating portion 42 and the second repulsive force generating portion 43, a fluorine coating layer is provided on the surface of the magnets, and the magnet cover made of fluororesin is used. The magnet may be fixed to the first base 31. This makes it possible to provide the table device 1 having higher corrosion resistance even when it is used in a process chamber having a special gas atmosphere such as a corrosive gas.

以上、実施形態及び変形例を説明したが、前述した内容により実施形態及び変形例が限定されるものではない。例えば、第１引力発生部３２及び第１斥力発生部３３の磁石の磁極の向きは実施形態及び変形例の例に限定されない。即ち、実施形態及び第２変形例では、第１引力発生部３２及び第１斥力発生部３３においては、それぞれ、Ｎ極が第１主面３１ａに接し、第２引力発生部４２においては、Ｓ極が第２連結部４１６の下面４１６ｃに接し、第２斥力発生部４３においては、Ｎ極が第２連結部４１６の下面４１６ｃに接するように磁極を配置した。 Although the embodiments and modifications have been described above, the embodiments and modifications are not limited to the above-mentioned contents. For example, the directions of the magnetic poles of the magnets of the first attractive force generating unit 32 and the first repulsive force generating unit 33 are not limited to the examples of the embodiment and the modification. That is, in the embodiment and the second modification, in the first attractive force generating unit 32 and the first repulsive force generating unit 33, the north pole is in contact with the first main surface 31a, respectively, and in the second attractive force generating unit 42, S The poles are in contact with the lower surface 416c of the second connecting portion 416, and in the second repulsive force generating portion 43, the magnetic poles are arranged so that the north pole is in contact with the lower surface 416c of the second connecting portion 416.

しかし、例えば、第１引力発生部３２、第１斥力発生部３３、第２引力発生部４２及び第２斥力発生部４３の磁石の磁極の向きを全て逆に配置してもよい。また、例えば、第１引力発生部３２及び第２引力発生部４２における磁極の向きをそれぞれ逆にしてもよい。更に、引力発生部及び斥力発生部の配置数や配置箇所は、特に限定されず、さまざまな配置数や配置箇所とすることができる。 However, for example, the directions of the magnetic poles of the magnets of the first attractive force generating unit 32, the first repulsive force generating unit 33, the second attractive force generating unit 42, and the second repulsive force generating unit 43 may all be reversed. Further, for example, the directions of the magnetic poles in the first attractive force generating unit 32 and the second attractive force generating unit 42 may be reversed. Further, the number and location of arrangement of the attractive force generating portion and the repulsive force generating portion are not particularly limited, and various arrangement numbers and locations can be used.

１，１Ａ テーブル装置
２１ 板状部材
２１ａ，２１Ａａ 第１面
２１ｂ，２１Ａｂ 第２面
３ 第１テーブル
３２ 第１引力発生部
４，４Ａ 第２テーブル
４１ 第２ベース（ベース）
４００ 面取部（異形状部）
４１１ 第１保持部（保持部）
４１２ 第２保持部（保持部）
４１３ 第３保持部（保持部）
４１４ 第４保持部（保持部）
４１５ 第１連結部（連結部）
４１６ 第２連結部（連結部）
４１７ 第３連結部（連結部）
４１８ 第４連結部（連結部）
４１３１ａ 段差
４１３３ｃ 底面
４１３６ 空間
４２ 第２引力発生部
４４ 第２支持部（支持部）
Ｐ 第１空間
Ｒ 第２空間 1,1A table device 21 Plate-shaped member 21a, 21Aa 1st surface 21b, 21Ab 2nd surface 3 1st table 32 1st attractive force generating part 4, 4A 2nd table 41 2nd base (base)
400 Chamfered part (deformed part)
411 First holding part (holding part)
412 Second holding part (holding part)
413 Third holding part (holding part)
414 4th holding part (holding part)
415 First connecting part (connecting part)
416 Second connecting part (connecting part)
417 Third connecting part (connecting part)
418 4th connecting part (connecting part)
4131a Step 4133c Bottom surface 4136 Space 42 Second attractive force generating part 44 Second supporting part (supporting part)
P 1st space R 2nd space

Claims (5)

第１面と、前記第１面と反対側の第２面とを有し、前記第１面側の第１空間と、前記第２面側の第２空間とを区切る板状部材と、
前記板状部材の前記第１面側に配置され第１引力発生部を有すると共に、前記第１面に沿って移動可能な第１テーブルと、
前記板状部材の前記第２面側に配置されると共に、前記第１引力発生部に吸引可能な第２引力発生部を有し前記第１テーブルの移動に追従して前記第２面上を移動可能な第２テーブルと、を備え、
前記第２テーブルは、第２ベースと、前記第２ベースを移動可能に支持する支持部と、を含み、
前記第２ベースには、段差により前記第２面との距離が前記第２ベースの他の部位よりも大きい底面が設けられ、前記段差及び前記底面で形成された空間内に前記支持部が配置されている、
テーブル装置。 A plate-shaped member having a first surface and a second surface opposite to the first surface and separating the first space on the first surface side and the second space on the second surface side.
A first table arranged on the first surface side of the plate-shaped member, having a first attractive force generating portion, and being movable along the first surface,
The plate-shaped member is arranged on the second surface side, and has a second attractive force generating portion that can be attracted to the first attractive force generating portion, and follows the movement of the first table on the second surface. With a movable second table,
The second table includes a second base and a support that movably supports the second base.
The second base is provided with a bottom surface whose distance from the second surface is larger than other parts of the second base due to the step, and the support portion is arranged in the space formed by the step and the bottom surface. Has been
Table device. 前記第２ベースは、平面視において矩形状の環状部材であり、前記支持部が配置される前記空間は、前記環状部材の角部に配置された保持部に設けられている、
請求項１に記載のテーブル装置。 The second base is a rectangular annular member in a plan view, and the space in which the support portion is arranged is provided in a holding portion arranged at a corner portion of the annular member.
The table device according to claim 1. 前記第２ベースは、複数の前記保持部と、隣接する前記保持部同士を連結する連結部と、を有し、前記連結部の前記第２面側に前記第２引力発生部が設けられている、
請求項２に記載のテーブル装置。 The second base has a plurality of the holding portions and a connecting portion that connects the adjacent holding portions to each other, and the second attractive force generating portion is provided on the second surface side of the connecting portion. Yes,
The table device according to claim 2. 前記連結部と前記第２面との距離は、前記保持部と前記第２面との距離よりも小さい、
請求項３に記載のテーブル装置。 The distance between the connecting portion and the second surface is smaller than the distance between the holding portion and the second surface.
The table device according to claim 3. 前記第２ベースの周縁部は、
前記第２ベースの移動方向に対して非対称となるように
異形状部を有する、
請求項２から４のいずれか１項に記載のテーブル装置。 The peripheral edge of the second base
It has a deformed portion so as to be asymmetric with respect to the moving direction of the second base.
The table device according to any one of claims 2 to 4.
JP2018151797A 2018-08-10 2018-08-10 Table device Active JP7103053B2 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008156033A (en) 2006-12-21 2008-07-10 Kubota Corp Transport device
JP2010263213A (en) 2009-05-08 2010-11-18 Asml Netherlands Bv Immersion lithography apparatus and device manufacturing method

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JPS5715317Y2 (en) * 1976-10-23 1982-03-30
JPH03223021A (en) * 1989-12-29 1991-10-02 Ntn Corp Carrier device used in special environment
JPH1026138A (en) * 1996-07-08 1998-01-27 Sony Corp Planar drive actuator
JPH1170434A (en) * 1997-08-29 1999-03-16 Ntn Corp Movable table
JP5391925B2 (en) * 2009-08-19 2014-01-15 トヨタ自動車株式会社 Stage equipment

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
JP2008156033A (en) 2006-12-21 2008-07-10 Kubota Corp Transport device
JP2010263213A (en) 2009-05-08 2010-11-18 Asml Netherlands Bv Immersion lithography apparatus and device manufacturing method

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