JP7252819B2 - Peeling device - Google Patents

Description

The present invention relates to a stripping device for stripping a protective member from a plate-shaped work.

A tape mounter capable of peeling the tape (see, for example, Patent Document 1) applies a dicing tape having a diameter larger than that of the plate-shaped work to the back surface of the ground plate-shaped work and one surface of the ring frame, for example. Then, the protective member is peeled off from the surface of the plate-like work.

Japanese Unexamined Patent Application Publication No. 2016-201488

The peeled protective member falls into a recovery box having an opening on the upper side and is stored in the recovery box. Removed from the collection box and discarded.

When an operator disposes of protective members stored in the recovery box, the device must be stopped for the following reasons.
The first reason is that taking out the collection box from the device in order to dispose of the protective member accumulated in the collection box creates space in the place where the collection box was installed. Since a worker can accidentally put his/her hand in that space, there is a risk that a transport mechanism or the like that transports the protective member to the collection box will operate and interfere, resulting in injury to the worker. Therefore, it is necessary to stop the device.
The second reason is that the collection box is taken out of the equipment to dispose of the protective material that has accumulated in the collection box, and the protective material peeled off from the next plate-shaped workpiece is transported and dropped into the space where the collection box is gone. Therefore, it is necessary to stop the equipment until the collection box is installed again.

Therefore, when the protective member is peeled off from the plate-shaped work in the peeling device and discarded, the transport mechanism that transports the peeled protective member does not injure the operator, and the dicing tape or the like for the plate-shaped work can be removed. There is a problem of continuously performing attachment, peeling of the protective member from the plate-shaped work, and disposal without stopping the apparatus.

In order to solve the above problems, the present invention provides a holding table for holding the lower surface of a plate-like work whose upper surface is covered with a sheet-like protective member, and a plate-like work that is held by the holding table and the protective member is peeled off from the plate-like work. a collection box disposed in the peeling device and having an opening for dropping the protective member peeled by the peeling means for collecting the protective member; a moving means capable of moving the collection box between an input position within the peeling device for loading the protective member and a take-out position outside the peeling device for taking out the protective member; a slope formed so that the protective member peeled and dropped by the peeling means enters the recovery box when the recovery box is positioned at the take-out position for takeout, wherein the recovery box The peeling device enables the protection member to be recovered in the recovery box regardless of whether it is positioned at the position or at the take-out position.

The slope is formed by at least two plates, an upper plate and a lower plate, and includes a plurality of longitudinally extending through holes formed in the lower plate, and a plurality of through holes formed in the lower end of the upper plate and inserted into the through holes. and a guide portion for slidably guiding the upper plate and the lower plate. The slope is formed by connecting the upper end of the plate and extending the lower plate so as to follow the upper plate, and when the collection box is positioned at the loading position, the upper plate and the lower plate are superimposed to form the sidewalls of the collection box.

The peeling device according to the present invention includes a collection box for collecting the protective member, which is disposed in the peeling device and has an opening for dropping the protective member peeled by the peeling means, and an insertion position in the peeling device for throwing the protective member. and a removal position outside the peeling device from which the protective member is removed, and a removal means peels off the protective member when the collection box is positioned at the removal position to remove the protective member collected in the collection box. and a slope formed so that the dropped protection member can enter the recovery box. Since it is possible to put the protective member peeled off by the slope into the collection box, the peeling device can be continuously operated. Further, when the peeling device serves as a tape mounter for peeling off the protective member adhered to the plate-shaped work after the dicing tape is adhered to the annular frame and the plate-shaped work, the peeling of the protective member is performed. Since it is now possible to dispose of the protective member accumulated in the recovery box during operation, the peeling device can also be continuously operated as a tape mounter.

In the peeling device according to the present invention, the slope is formed by at least two plates, an upper plate and a lower plate, and includes a plurality of longitudinally extending through holes formed in the lower plate and a through hole formed in the lower end of the upper plate. Skewer blades to be inserted into the holes, and a guide part for slidably guiding the upper plate and the lower plate, and when the collection box is positioned at the take-out position, the lower end of the upper plate and the lower plate A slope is formed by connecting the upper end and extending the lower plate so as to continue to the upper plate. As a result, it is possible to efficiently form or house a slope for guiding the protective member peeled and dropped by the peeling means to the collection box. Further, when the recovery box is moved from the take-out position outside the peeling device for taking out the protective member to the loading position inside the peeling device for loading the protective member, the through-hole and the skewer blade inserted into the through-hole move the lower plate. When the protective member remains on the upper surface of the box, the skewer blade can be brought into contact with the protective member to drive the protective member to the bottom of the collection box, and the protective member is caught between the upper and lower plates. It is possible to prevent the user from being caught.

It is a perspective view which shows an example of a peeling apparatus. FIG. 4 is a cross-sectional view for explaining a state in which a peeling tape is attached to a protective member of a plate-like work and then the peeling tape is cut; FIG. 10 is a cross-sectional view showing a state in which the holding table and the clamping means holding the peeling tape adhered to the protective member are moved relatively to separate the protective member from the plate-like work; FIG. 4 is a perspective view for explaining the internal structure of the recovery box positioned at the loading position; FIG. 4 is a perspective view for explaining the structure of the collection box positioned at the take-out position and the moving means; FIG. 4 is a perspective view for explaining the structure of the collection box positioned at the take-out position and the guide section; FIG. 10 is a perspective view for explaining the structure of the recovery box positioned at the take-out position and the formed slope;

A peeling device 1 according to the present invention shown in FIG. 1 is an example of a peeling device for peeling off a protective member T2 adhered to an upper surface Wa of a plate-like work W using a strip-shaped peeling tape T3. a holding table 30 for holding the lower surface Wb of the plate-like work W covered with a sheet-like protective member T2 of Wa; at least.

The plate-shaped workpiece W shown in FIG. 1 is, for example, a semiconductor wafer having a circular outer shape and made of silicon as a base material, and the upper surface Wa thereof is partitioned into a grid by a plurality of dividing lines S that intersect at right angles. A device D such as an IC is formed in each area partitioned in a grid pattern.
The protective member T2, which is attached so as to cover the entire upper surface Wa of the plate-like work W, is formed by, for example, using a protective member forming device (not shown) to cover the upper surface Wa of the plate-like work W with a liquid resin supplied on a circular sheet. After the liquid resin is spread over the entire upper surface Wa by pressing, the liquid resin is spread from the center to the outer peripheral side of the plate-shaped work W, and then the liquid resin is cured by irradiating the liquid resin with, for example, ultraviolet rays. It is a protective member comprising a formed resin film and the circular sheet.
The plate-shaped work W may be made of gallium arsenide, sapphire, gallium nitride, ceramics, silicon carbide, or the like other than silicon, and the protective member is also limited to the above resin film and circular sheet. not a thing

For example, the plate-like work W has a dicing tape T1 having a diameter larger than that of the plate-like work W attached to the lower surface Wb. Since the outer peripheral portion of the adhesive layer of the dicing tape T1 is also adhered to the annular frame F, the plate-like workpiece W is supported by the annular frame F via the dicing tape T1, and handling by the annular frame F is facilitated. It is possible.

The peeling device 1 has a rectangular parallelepiped base 10 extending in the X-axis direction. Further, each device configuration such as the base 10 of the peeling device 1, the holding table 30, the peeling means 4, and the like is accommodated inside a rectangular parallelepiped housing 11 indicated by broken lines in FIG. In this embodiment, the inside of the housing 11 is the inside of the peeling device 1 and the outside of the housing 11 is the outside of the peeling device 1 .

A table moving means 13 for reciprocating the holding table 30 in the X-axis direction is arranged on the base 10 . The table moving means 13 includes a ball screw 130 arranged on the base 10, a motor 132 connected to one end of the ball screw 130, a pair of guide rails 131 extending parallel to the ball screw 130, and moving in the X-axis direction. A movable member 133 is provided. A holding table 30 is arranged on the upper surface of the movable member 133 via a support base 31 . A pair of guide rails 131 are in sliding contact with the lower surface of the movable member 133 , and a ball screw 130 is screwed to a nut (not shown) disposed at the center of the lower surface of the movable member 133 . By rotating the ball screw 130 driven by the motor 132 , the holding table 30 moves in the X-axis direction along the guide rail 131 together with the movable member 133 .

The holding table 30 includes a suction portion 300 that is made of a porous member or the like and that suctions the plate-like workpiece W, and a frame 301 that supports the suction portion 300 . The adsorption unit 300 communicates with a suction source (not shown) such as a vacuum generator, and the suction force generated by the suction source is transmitted to the flat holding surface 300a that is the exposed surface of the adsorption unit 300. Thus, the holding table 30 can hold the plate-like work W by suction on the holding surface 300a.

For example, the holding table 30 is surrounded by frame fixing means 32 to which the annular frame F is fixed. The frame fixing means 32, which has an annular outer shape in plan view and on which the annular frame F is mounted, is configured to attract and fix the annular frame F by a suction force generated by a suction source (not shown), and is arranged evenly in the circumferential direction. It can move up and down in the Z-axis direction by the piston mechanism 33 . Instead of the frame fixing means 32, a plurality of mechanical clamps, which are opened and closed by a spring or the like, may be arranged around the holding table 30. FIG.

Above the moving path of the holding table 30, there is provided a separating means 4 for separating the protective member T2 of the plate-shaped work W held by the holding table 30. The separating means 4 has a predetermined length, for example. A tape cutting means 40 for cutting the peeling tape T3, and a protective member T2 attached to the upper surface Wa of the plate-like work W by pulling out the peeling tape T3 from the tape roll R around which the peeling tape T3 is wound. a peeling tape supply means 42 for supplying to the tape roll R, a holding means 41 for pinching one end of the peeling tape T3 pulled out from the tape roll R, and the peeling tape T3 pressed against the outer peripheral area of the protective member T2 to be adhered. and X-axis direction moving means 46 for moving the tape pressing means 44 and the clamping means 41 in the X-axis direction.

The X-axis direction moving means 46 includes a ball screw 460 having an axis in the X-axis direction, a pair of guide rails 461 arranged parallel to the ball screw 460, and a motor 462 connected to the ball screw 460 to rotate the ball screw 460. , and a movable plate 463 whose inner nut is screwed onto the ball screw 460 and whose side portion is in sliding contact with the guide rail 461 . The tape pressing means 44 and the clamping means 41 attached to the movable plate 463 also reciprocate in the X-axis direction.

The peeling tape supply means 42 includes a winding cylinder 420 to which the tape roll R is mounted, guide rollers 421a and 421b for guiding downward the peeling tape T3 pulled out from the tape roll R, and a guide roller 421a and 421b. and delivery rollers 423a and 423b arranged on the side. Back tension is applied to the winding tube 420 by a control mechanism (not shown), and the tension is adjusted so that the peeling tape T3 pulled out from the tape roll R does not become slack. The guide rollers 421a and 421b can be folded back while sandwiching the peeling tape T3 and can be guided toward the delivery rollers 423a and 423b while applying tension. The feed rollers 423 a and 423 b can feed the peeling tape T<b>3 guided by the guide rollers 421 a and 421 b toward the clamping means 41 .

The peeling tape T3 is, for example, a heat seal having a two-layer structure composed of an adhesive layer and a base material, which is adhered to the outer peripheral portion of the protective member T2 by applying heat. Although the material of the base material is not particularly limited, it is made of resin such as polyethylene terephthalate, for example. The adhesive layer is preferably made of, for example, a thermosetting resin, such as an epoxy resin. The adhesive force of the peeling tape T3 to the protective member T2 is set to be stronger than the adhesive force of the protective member T2 to the plate-like workpiece W. As shown in FIG. The peeling tape T3 is formed as a tape roll R by being wound with an adhesive layer positioned on the inside (lower surface side in the stretched state). In addition, the peeling tape T3 is not limited to heat sealing.

The clamping means 41 includes a support base 410 fixed to the side surface of the movable plate 463 of the X-axis direction moving means 46, a cylinder mechanism 411 supported by the support base 410, and a clamping mechanism capable of moving up and down by the cylinder mechanism 411. and a claw portion 412 . The holding claw portion 412 includes, for example, a substantially L-shaped fixed claw 412b in a side view, and a movable claw 412a that is arranged to face the fixed claw 412b in the Z-axis direction and can approach or separate from the fixed claw 412b. I have it. In the clamping means 41, one end of the peeling tape T3 can be clamped by moving the movable claw 412a close to the fixed claw 412b. Then, the clamping claw portion 412 that clamps the peeling tape T3 can be positioned by the cylinder mechanism 411 at an appropriate height position for tape bonding on the protective member T2 of the plate-like work W held on the holding table 30. . On the other hand, by separating the movable claw 412a from the fixed claw 412b, the holding state of one end of the peeling tape T3 in the holding means 41 can be released.

The tape pressing means 44 is arranged between the delivery rollers 423 a and 423 b and the holding means 41 . The tape pressing means 44 includes a support base 440 fixed to the side surface of the movable plate 463 of the X-axis direction moving means 46, a pressing plate elevating mechanism 441 made up of an air cylinder or the like and supported by the supporting base 440, and a pressing plate elevating mechanism. It has a pressing plate 442 that can be moved up and down by means of 441 .
A heater (not shown) is attached to the pressing plate 442 to generate heat when an electric current is applied. The pressing plate lifting mechanism 441 lowers the pressing plate 442 to press and adhere the peeling tape T3 to the outer peripheral portion of the protective member T2. At this time, a heater (not shown) heats the pressing plate 442, so that the peeling tape T3 pressed against the protective member T2 can be partially heat-sealed. Thereby, the peeling tape T3 can be well adhered to the protective member T2.

The tape cutting means 40 is arranged, for example, between the delivery rollers 423a, 423b and the tape pressing means 44. As shown in FIG. As shown in FIG. 1, the tape cutting means 40 cuts the mounting surface 400a on which the adhesive layer side (lower side) of the peeling tape T3 is mounted and the mounting surface 400a in the width direction (Y direction) of the peeling tape T3. a mounting table 400 having a groove 400b that traverses in the axial direction; a cutter 401 that advances in the groove 400b along the extending direction of the groove 400b; Cutter moving means 402, which is a ball screw mechanism for moving the cutter 400b in the extending direction (Y-axis direction), and cutter lifting means 403, which consists of an air cylinder or the like, for moving the cutter 401 up and down in the Z-axis direction with respect to the mounting surface 400a. I have it.

The peeling device 1 is configured to serve as a tape mounter capable of adhering a dicing tape T1 having a diameter larger than that of the plate-shaped work W to the lower surface Wb of the plate-shaped work W. good too. In this case, for example, an affixing roller and a cutter for cutting a band-shaped dicing tape to the circular dicing tape T1 while rotating are arranged beside the end of the base 10 in the -X direction.

Next, an operation example of cutting the peeling tape T3 and an operation example of peeling the protective member T2 from the plate-like workpiece W using the peeling tape T3 in the peeling device 1 will be described.

First, the plate-shaped workpiece W integrated with the annular frame F is placed on the holding surface 300a of the holding table 30 with the protective member T2 facing upward, and is arranged on the outer peripheral side of the holding table 30. The annular frame F is mounted on the frame fixing means 32 which has been opened. Subsequently, a suction source (not shown) is actuated to suck and hold the plate-shaped workpiece W on the holding surface 300 a , and the annular frame F is fixed by suction by the frame fixing means 32 .

The peeling tape T3 is fed from the tape roll R toward the pinching means 41 by the feeding rollers 423a and 423b shown in FIG. The adhesive layer side (inner side) of the peeling tape T3 is placed on the mounting surface 400a of the mounting table 400 of the tape cutting means 40, and one end of the peeling tape T3 is placed on the upper surface of the fixing claw 412b of the clamping means 41. Once positioned, the movable claw 412a moves toward the fixed claw 412b, and the clamping means 41 clamps one end of the peeling tape T3. Next, the pinching means 41 is moved in the -X direction by the X-axis direction moving means 46, and the pinched peeling tape T3 is pulled in the same direction. At this stage, the pressing plate 442 of the tape pressing means 44 and the cutter 401 of the tape cutting means 40 are on standby above the peeling tape T3.

For example, the holding table 30 moves in the +X direction to position the outer peripheral portion of the protective member T2 directly below the tape pressing means 44. FIG. Subsequently, the pressing plate 442 shown in FIG. 2 heated by an internal heater (not shown) descends in the -Z direction, and the lower end of the pressing plate 442 presses the peeling tape T3 against the outer peripheral portion of the protective member T2 from above. , the adhesive layer of the peeling tape T3 is heat-sealed to the protective member T2.

In this state, the cutter moving means 402 positions the cutter 401 at the starting position on the -Y direction side (the front side of the paper surface). That is, the cutter 401 is positioned at one end of the groove 400b of the mounting table 400 exposed from one side of the peeling tape T3. Furthermore, the cutter lifting means 403 lowers the cutter 401 until the bottom end of the cutter 401 reaches the inside of the groove 400b. Furthermore, the cutter 401 advances in the +Y direction along the extending direction of the groove 400b, and the peeling tape T3 is cut by the cutter 401. As shown in FIG. After the cutter 401 cuts the peeling tape T3, the cutter 401 and the pressing plate 442 move upward in the +Z direction and retreat from the peeling tape T3.

After that, the clamping means 41 clamping the peeling tape T3 is raised, and a part of the protective member T2 is peeled off from the upper surface Wa of the plate-shaped work W. As shown in FIG. Next, as shown in FIG. 3, the clamping means 41 is moved in the −X direction by the X-axis direction moving means 46, and the holding table 30 is moved in the +X direction by the table moving means 13 (see FIG. 1). 41 is relatively moved radially from the outer edge of the plate-like work W toward the center to separate the protective member T2 from the plate-like work W. As shown in FIG. A rotating roller (not shown) is arranged above the movement path of the holding table 30, and the protective member T2 is peeled off while the rotating roller is brought into contact with the protective member T2. It is also possible to suppress the occurrence of bending of the member T2.

It should be noted that, for example, the holding table 30 can be moved in the +X direction because it is sufficient to move the holding means 41 relatively radially from the outer edge of the plate-like work W toward the center to peel off the protective member T2 from the plate-like work W, for example. The protective member T2 may be peeled off only by moving only the clamping means 41 in the -X direction without moving the protective member T2.

When the protective member T2 is completely peeled off from the upper surface Wa of the plate-like work W, the clamping means 41 for clamping the peeling tape T3 adhered to the protective member T2 moves to the base in the peeling device 1 shown in FIG. It moves to above the area below the peeling tape supply means 42 (the rectangular parallelepiped area indicated by the dashed-dotted line in FIG. 1) beside the +X direction side end of 10 . Then, the clamping means 41 releases the clamping of the peeling tape T3, and drops the protective member T2 and the peeling tape T3 into the collection box 2 described below.

For example, the peeling means 4 peels off in a region below the peeling tape supply means 42 on the side of the +X direction side of the base 10 in the peeling device 1 (a rectangular parallelepiped region indicated by a dashed line in FIG. 1). A recovery box 2 for recovering the protective member T2 having an opening 20 for dropping the protective member T2 shown in FIG. A moving means 5 (see FIG. 5) for moving the recovery box 2 to the outside take-out position P1, and when the recovery box 2 is positioned at the take-out position P1 to take out the protective member T2 recovered in the recovery box 2, , and a slope 6 (see FIG. 7) formed so that the protective member T2 peeled and dropped by the peeling means 4 enters the recovery box 2. As shown in FIG.

The recovery box 2 shown in FIGS. 4 and 5 is, for example, a substantially rectangular parallelepiped box having a bottom plate 21 that is rectangular in plan view and three side walls integrally rising from the outer periphery of the bottom plate 21 in the +Z direction. The protective member T2 can be stored in a space surrounded by the bottom plate 21 and the side walls, and has a rectangular opening 20 for inserting the protective member T2. For example, of the three side walls of the collection box 2, the front side wall (+X direction side) is the side wall 22, and the two side walls on the Y axis side side are the side walls 23. As shown in FIG. 4, the collection box 2 is positioned at the input position P2 inside the peeling device 1, and in FIGS. It shows the state positioned at .

As shown in FIGS. 5 to 7, the recovery box 2 is housed in a housing 9 fixed inside the peeling device 1, for example, so as to be movable in the X-axis direction. The housing 9 has, for example, a substantially rectangular box-like shape in plan view that is larger than the collection box 2, and a bottom plate 91 on which the bottom plate 21 of the collection box 2 slides. , two side plates 94 that rise in the +Z direction and face each other in the Y-axis direction, and a connecting plate 93 that connects the upper portions of the two side plates 94 .

The moving means 5 that can move the collection box 2 between an input position P2 inside the peeling device 1 for loading the protective member T2 shown in FIGS. , guide rails 50 respectively arranged on the lower inner surfaces of the two side plates 94 of the housing 9 so as to extend in parallel with the X-axis direction, and on the lower outer surfaces of the two side walls 23 of the recovery box 2 on the Y-axis direction side. A slide portion 51 is provided, which is loosely fitted to the guide rail 50 and slidably contacts the guide rail 50 . The driving force required when the moving means 5 moves the collection box 2 may be generated by an operator, or may be generated by a ball screw mechanism including a motor (not shown) for moving the slide portion 51.

For example, a pull port 220 is formed in the upper part of the side wall 22 of the collection box 2 , and an operator puts his/her hand on the pull port 220 and pulls the side wall 22 in the +X direction, thereby The recovery box 2 can be pulled out (slid) from the housing 11 of the peeling device 1 shown in FIG.

As shown in FIGS. 4 and 7, in this embodiment, the slope 6 is formed of at least two plates, for example, an upper plate 60 and a lower plate 61 . The upper plate 60 has, for example, a rectangular outer shape in plan view, and is connected to the lower end of the support plate 63 shown in FIG. there is For example, the slope 6 may be made of a single flexible metal plate, resin plate, or the like. The movement causes the slope to curve accordingly.

The support plate 63 extending in the Z-axis direction is attached to the connection plate 93 of the housing 9 . The support plate 63 is formed with, for example, four through holes 630 at equal intervals in the Y-axis direction.

As shown in FIG. 7, the lower plate 61 has, for example, a rectangular outer shape in plan view, and its lower end side is connected to one end side (−X direction side) of the bottom plate 21 of the collection box 2 by a hinge 219 . , and the upper end side thereof is in a state of slipping into a position below the lower surface of the upper plate 60 by a predetermined length.

The slope 6 includes, for example, a plurality of through holes 64 formed in the lower plate 61 extending in the longitudinal direction of the lower plate 61, skewer blades 65 formed in the lower end of the upper plate 60 and inserted into the through holes 64, A guide portion 66 (see FIGS. 5 and 6) for slidably guiding the lower plate 61 and the lower plate 60 is provided.

As shown in FIG. 7, the through-holes 64 extend, for example, in the longitudinal direction of the lower plate 61 so as to match the outer shape of the skewer blades 65 in total four rectangular grooves.
The skewer blade 65 has, for example, a rectangular plate-like outer shape smaller than the width of the through-hole 64, is inserted into the through-hole 64, and its lower end protrudes from the lower surface of the lower plate 61 by a predetermined length. The skewer blade 65 has a length that does not come into contact with the framework 660 shown in FIG.

The guide portions 66 shown in FIGS. 5 to 7 are, for example, a frame 660 attached to the lower surface of the lower plate 61 so as to extend in the width direction (Y-axis direction) of the lower plate 61, and attached to both ends of the frame 660. guide plate 661, guide groove 662 formed in side plate 94 of housing 9, and regulating plate 663 supporting guide plate 661 from the inner surface side.

The rod-like framework 660 shown in FIG. 7 is formed longer than the width of the lower plate 61, for example, and is attached to the lower surface of the lower plate 61, for example, two pieces. The framework 660 is attached to the lower surface of the lower plate 61 so as to protrude from the lower surface of the lower plate 61 so as to form a gap of a predetermined width. Therefore, the skewer blade 65 and the framework 660 moving along the longitudinal direction of the lower plate 61 in the through hole 64 are prevented from colliding with each other.

The guide plate 661 shown in FIGS. 5 and 6 is formed in a plate shape with an arc-shaped upper portion in the illustrated example, and the upper end portion of the guide plate 661 protrudes toward the side plate 94 side of the housing 9 and is inserted into the guide groove 662 . and an engaging pin 661a.
For example, the upper surface of the guide rail 50 of the moving means 5 shown in FIG. Sliding in straight grooves.

The guide groove 662, which serves as a movement path for the engaging pin 661a, is formed, for example, so as to ascend in a curved line from the middle of the side plate 94 of the housing 9 toward the upper portion.

The regulation plate 663 shown in FIGS. 5 and 6 is arranged, for example, on the outside of the side wall 23 of the collection box 2 and supports the guide plate 661 from the inside with its outer surface. The −X direction end of the regulation plate 663 is fixed to the inner surface of the support plate 63 . When the positional relationship is arranged, the side wall 23 of the collection box 2 is located at the innermost side, and the regulation plate 663, the guide plate 661, and the side plate 94 of the housing 9 are aligned toward the outside.

As shown in FIG. 6, the regulating plate 663 has an inclined lower end surface, and the frame 660 shown in FIG. connected to the sides. For example, five through holes 663a are formed in the regulation plate 663 at regular intervals in the X-axis direction. The reason why the upper portion of the guide plate 661 is arcuate, for example, is that when the engaging pin 661a of the guide plate 661 moves along the guide groove 662, the through hole 663a of the regulation plate 663 is blocked by the guide plate 661. This is to prevent it from falling off.

A slant plate 664 is disposed at a position above and inside the regulation plate 663 , and the slant plate 664 ensures that the protective member T 2 thrown toward the opening 20 of the collection box 2 is inside the collection box 2 . guide you in.

As shown in FIG. 5, the side plate 94 of the housing 9 is provided with, for example, five light-emitting portions constituting the first optical sensors 74, respectively.
For example, a rectangular slit 230 extending continuously is formed in the upper region of the side wall 23 on the Y-axis direction side of the collection box 2. For example, when the collection box 2 is at the loading position P2, the slit 230 is formed. passes the detection light emitted from the light emitting portion of the first optical sensor 74 and passing through the through hole 663a of the regulation plate 663 further in the -Y direction, Light is received by a light receiving unit (not shown) provided. The first optical sensor 74 detects that the inside of the collection box 2 is filled with the protective members T2 by blocking the detection light by the protective members T2 piled up in the collection box 2 before reaching the light receiving portion. To detect.

As shown in FIG. 7, an optical sensor storage box 76 projecting in the +Y direction is provided above the recovery box 2, and the optical sensor storage boxes 76 are spaced equally in the Y-axis direction. Light receiving portions 770 constituting four second optical sensors 77 are arranged respectively. The second photosensor 77 is a transmissive photosensor having a light emitting portion 771 facing the light receiving portion 770 on the same straight line in the X-axis direction. The light emitting part 771 is attached to the inner surface of the connecting plate 93 of the housing 9, for example. As shown in FIG. 4 , the detection light emitted from the light emitting portion 771 of the second optical sensor 77 and passed through the through hole 630 of the support plate 63 piled up in the collection box 2 before reaching the light receiving portion 770 . By being blocked by the protective member T2, the second optical sensor 77 detects that the inside of the collection box 2 positioned at the loading position P2 is filled with the protective member T2.
Either one of the first optical sensor 74 and the second optical sensor 77 may be provided.

As described above, in the peeling device 1 shown in FIG. 1, the protective member T2 is peeled off from the upper surface Wa of the plate-like work W by the peeling means 4 using the peeling tape T3, and the peeled protective member T2 is stored in the collection box. 2, the protective member T2 can be removed from the collection box 2, that is, regardless of whether the collection box 2 is positioned at the insertion position P2 or the removal position P1 shown in FIG. The fact that the protection member T2 can be collected in the collection box 2 will be described below.

The clamping means 41 shown in FIG. 1 releases the clamping of the peeled peeling tape T3, drops the protective member T2 and the peeling tape T3, and drops the opening 20 of the recovery box 2 positioned at the input position P2 shown in FIG. The protection member T2 and the peeling tape T3 are put into the collection box 2 from the bottom. The protective member T2 and the peeling tape T3 are piled up on the bottom plate 21 of the collection box 2. As shown in FIG. When the recovery box 2 is positioned at the input position P2, the upper plate 60 is superimposed on the upper surface of the lower plate 61 to form the side wall of the recovery box 2 on the -X direction side.

As shown in FIG. 4, in a state where the collection box 2 is positioned at the input position P2, a plurality of protective members T2 peeled off from the plate-like works W are piled up in the collection box 2 to a predetermined height. The first optical sensor 74 or the second optical sensor 77 detects light detected by the first optical sensor 74 or the second optical sensor 77 by being blocked by the stacked protective member T2 before reaching the respective light receiving portions. detects that the collection box 2 is filled with the protective member T2.
It should be noted that the peeled protective member T2 may be curved or rolled into a roll and piled up. Therefore, the detection light may be blocked by a small number of protective members T2.

When the first optical sensor 74 or the second optical sensor 77 detects that the inside of the recovery box 2 is filled with the protective member T2, the peeling apparatus 1 shown in FIG. 2, or a warning sound indicating that the protective member T2 should be removed from the recovery box 2 is generated from a speaker (not shown).

For example, an operator who has received the warning puts his or her hand on the pull opening 220 of the recovery box 2 shown in FIG. 1, a rectangular protective member outlet 27 is formed adjacent to the opening 20 with the optical sensor housing box 76 interposed therebetween. When the first optical sensor 74 or the second optical sensor 77 detects that the inside of the collection box 2 is filled with the protective member T2, the moving means 5 automatically moves the side wall 22 of the collection box 2 to +X. It is also possible to position the recovery box 2 at the removal position P1 outside the peeling device 1 and form the protective member removal port 27. As shown in FIG.

A worker puts his or her hand into the collection box 2 through the protective member take-out opening 27 shown in FIGS. After that, the protective member T2 is taken out from the collection box 2 by pulling out the hand from the protective member take-out port 27. - 特許庁Individually, since the pinching means 41 of the peeling means 4 shown in FIG. A situation in which the operator's hand touches the means 41 does not occur.

When the recovery box 2 positioned at the input position P2 shown in FIG. 4 is positioned at the removal position P1 outside the peeling apparatus 1 by the moving means 5 shown in FIG. 5, a slope 6 is formed as shown in FIG. That is, the lower plate 61 connected to the bottom plate 21 of the recovery box 2 via the hinge 219 stands substantially vertically together with the upper plate 60 (forming the -X side wall of the recovery box 2). ), it is pulled out in the +X direction and tilted diagonally.

Also, the engagement pin 661a of the guide plate 661 shown in FIGS. 5 and 6 connected to the lower plate 61 via the framework 660 shown in FIG. In conjunction with this, the guide plate 661 sandwiched between the regulation plate 663 and the side plate 94 of the housing 9 from both sides in the Y-axis direction also tilts downward from the standing state. Therefore, the lower plate 61 is gradually tilted obliquely together with the framework 660 .

In parallel with the oblique inclination of the lower plate 61, the upper plate 60 shown in FIG. From the state in which it stands vertically (the state in which the side wall on the -X direction side of the collection box 2 is formed), it tilts obliquely so that the lower end slides on the upper surface of the lower plate 61 . Also, the skewer blade 65 descends along the through hole 64 .
Then, by positioning the collection box 2 at the take-out position P1 outside the peeling apparatus 1, the lower end of the upper plate 60 and the upper end of the lower plate 61 are connected and the lower plate continues to the upper plate 60 as shown in FIG. A slope 6 extending from 61 is formed.

Even while the operator is collecting the protective member T2 in the collection box 2 shown in FIG. T2 is dropped from the opening 20 onto the slope 6 shown in FIG. The protection member T2 slides down the upper surface of the slope 6 and piles up on the bottom plate 21 of the collection box 2. - 特許庁
For example, when the worker finishes collecting the protection members T2 from the collection box 2 through the protection member extraction port 27, the worker pushes the collection box 2 in the -X direction and returns it to the loading position P2 shown in FIG.

As described above, the peeling device 1 according to the present invention includes a collection box 2 that is disposed in the peeling device 1 and has an opening 20 for dropping the protective member T2 peeled by the peeling means 4 and for collecting the protective member T2; a moving means 5 that can move the collection box 2 between a loading position P2 inside the peeling device 1 into which the protective member T2 is loaded and a take-out position P1 outside the peeling device 1 from which the protective member T2 is taken out; and a slope 6 formed so that the protection member T2 peeled and dropped by the peeling means 4 enters the recovery box 2 when the recovery box 2 is positioned at the take-out position P1 to take out the protection member T2. Even while the protective members T2 stored in the collection box 2 are being discarded, it is possible to separate the protective members T2 from the plate-like workpiece W and put the peeled protective members T2 into the collection box 2 through the slope 6. Therefore, continuous operation of the peeling apparatus 1 becomes possible. Further, when the peeling device 1 serves as a tape mounter that peels off the protective member T2 stuck to the plate-like work W after the dicing tape T1 is stuck to the annular frame F and the plate-like work W. Furthermore, since the protective member T2 accumulated in the collection box 2 can be discarded during the peeling operation of the protective member T2, the peeling device 1 can be continuously operated as a tape mounter.

In the peeling device 1 according to the present invention, the slope 6 is formed of at least two plates, an upper plate 60 and a lower plate 61. A plurality of longitudinally extending through holes 64 formed in the lower plate 61 and the upper plate 60 and a skewer blade 65 inserted into the through-hole 64, and a guide portion 66 for slidably guiding the upper plate 60 and the lower plate 61, so that the collection box 2 is positioned at the take-out position P1. When the container is loaded, the lower end of the upper plate 60 and the upper end of the lower plate 61 are connected, the lower plate 61 is extended so as to follow the upper plate 60 to form the slope 6, and the collection box 2 is moved to the loading position P2. When positioned, the upper plate 60 and the lower plate 61 overlap to form the side walls of the collection box 2, thereby efficiently forming the slope 6 for guiding the protective member T2 peeled and dropped by the peeling means 4 to the collection box 2. It can be formed or stored (folded). Further, when the recovery box 2 is moved from the take-out position P1 outside the peeling device 1 where the protective member T2 is taken out to the loading position P2 inside the peeling device 1 where the protective member T2 is loaded, the through-hole 64 and the through-hole 64 are inserted. When the protective member T2 remains on the upper surface of the lower plate 61, the skewer blades 65 can be brought into contact with the protective member T2 to drive the protective member T2 to the bottom plate 21 of the recovery box 2. , the protective member T2 can be prevented from being entangled and sandwiched between the upper plate 60 and the lower plate 61. - 特許庁

Needless to say, the peeling device 1 according to the present invention is not limited to the above-described embodiment, and may be implemented in various forms within the scope of the technical idea. Moreover, the shape and the like of each component of the peeling device 1 illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within the range where the effects of the present invention can be exhibited.

W: plate-like work Wa: upper surface Wb: lower surface S: planned division line D: device T1: dicing tape F: annular frame T2: protective member 1: peeling device 10: base
13: Table Moving Means 130: Ball Screw 131: Guide Rail 132: Motor 133: Movable Member 30: Holding Table 300: Adsorption Part 300a: Holding Surface 301: Frame 31: Support Base 32: Frame Fixing Means 33: Piston Mechanism T3: Peeling tape R: Tape roll 4: Peeling means
40: Tape Cutting Means 400: Mounting Table 401: Cutter 402: Cutter Moving Means 403: Cutter Elevating Means 41: Clamping Means 410: Support Base 411: Cylinder Mechanism 412: Clamping Claw Part 412b: Fixed Claw 412a: Movable Claw 42: Peeling tape supply means 420: winding cylinder 421a, 421b: guide rollers 423a, 423b: delivery roller 44: tape pressing means 440: support base 441: pressing plate lifting mechanism 442: pressing plate
46: X-axis direction moving means Ball screw 460 Motor 462
P1: Take-out position P2: Insertion position 2: Collection box 20: Opening 21: Bottom plate 219: Hinge 22: Side wall 220: Pull port 23: Side wall 5: Moving means 50: Guide rail 51: Sliding part 6: Slope 60: Top Plate 61: lower plate 64: through hole 65: skewer blade 63: support plate 630: through hole 66: guide portion 660: frame 661: guide plate 661a: engagement pin 662: guide groove 663: regulation plate 9: housing 91: Bottom plate 94: Side plate 93: Connection plate 74: First optical sensor 77: Second optical sensor 76: Optical sensor storage box

Claims (2)

A peeling device comprising at least a holding table for holding a lower surface of a plate-like work whose upper surface is covered with a sheet-like protective member, and peeling means for peeling the protective member from the plate-like work held by the holding table There is
a recovery box disposed in the stripping device and having an opening for dropping the protective member stripped by the stripping means for recovering the protective member; a loading position in the stripping device into which the protective member is loaded; a moving means for moving the recovery box to a take-out position outside the peeling device from which the protective member is taken out; and a slope formed so that the protective member peeled and dropped by the peeling means enters the recovery box,
A peeling device capable of recovering the protection member in the recovery box regardless of whether the recovery box is positioned at the input position or the take-out position. The slope is formed by at least two plates, an upper plate and a lower plate, and includes a plurality of longitudinally extending through holes formed in the lower plate, and a plurality of through holes formed in the lower end of the upper plate and inserted into the through holes. and a guide part for slidably guiding the upper plate and the lower plate,
When the recovery box is positioned at the take-out position, the lower end of the upper plate and the upper end of the lower plate are connected to form the slope by extending the lower plate so as to continue to the upper plate. ,
2. The peeling device according to claim 1, wherein the upper plate and the lower plate overlap to form side walls of the collection box when the collection box is positioned at the loading position.

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