JP7529136B2 - Inductor Components - Google Patents

Description

The present disclosure relates to inductor components.

The inductor component described in Patent Document 1 comprises an element body and an inductor wiring extending inside the element body. The element body is made of inorganic filler and resin. For example, in the case of a magnetic composite body, the inorganic filler is made of a magnetic material.

JP 2019-192920 A

In the inductor component described in Patent Document 1, inorganic filler particles are randomly dispersed within the element body. Therefore, Patent Document 1 makes no mention of how the arrangement of magnetic materials would affect the characteristics of the inductor component if multiple magnetic materials were regularly arranged within the element body. Therefore, it is necessary to find an element body structure that will provide desirable characteristics for an inductor component in which magnetic materials are regularly arranged.

In order to solve the above problem, an inductor component of the present invention includes a plurality of flat magnetic ribbons made of a magnetic material, the plurality of magnetic ribbons being stacked in a direction perpendicular to a main surface of the magnetic ribbons; and an inductor wiring extending along the main surface inside the element body, wherein when an axis along which the inductor wiring extends is defined as a central axis, an axis along the main surface in a cross-sectional view perpendicular to the central axis is defined as a first axis, and an axis perpendicular to the main surface in the cross-sectional view is defined as a second axis, and when, among the magnetic ribbons stacked in a direction along the second axis relative to the inductor wiring in the cross-sectional view, the magnetic ribbon having the shortest distance from the inductor wiring in a direction along the second axis is defined as a first magnetic ribbon, the magnetic ribbons are lined up in a direction along the first axis relative to the first magnetic ribbon, with non-magnetic portions interposed between the magnetic ribbons, and when a first virtual line is drawn through the first magnetic ribbon in a direction along the first axis, a one-dimensional filling factor of the magnetic ribbons on the first virtual line relative to the element body is 90% or more.

According to the above configuration, the inductor component has flat magnetic ribbons stacked in a direction along the second axis. The magnetic ribbons have a regular structure in which multiple magnetic ribbons are lined up in a direction along the first axis relative to the first magnetic ribbon. In such a structure, the one-dimensional filling factor is 90% or more, so that the effective relative permeability when viewed as the entire element body is sufficient for practical use.

Note that "along" also includes cases where there is no direct contact and the object is at a distance. For example, "along the first axis" does not only include something that is in direct contact with the first axis and runs along the first axis, but also something that is not in direct contact with the first axis and runs along the first axis at a distance. Furthermore, "along" only requires that there is a substantial parallel relationship, and also includes something that is slightly tilted due to manufacturing errors, etc.

Provides inductor components with high effective relative permeability.

FIG. FIG. 2 is a plan view of a first portion of the inductor component. 3 is a cross-sectional view of the inductor component taken along line 3-3 in FIG. 2. 4 is a cross-sectional view of the inductor component taken along line 4-4 in FIG. 2. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. FIG. 4 is a cross-sectional view of an inductor component of a comparative example. 11 is a table showing the results of a comparison between the inductor component of the comparative example and the inductor component of the embodiment. Simulation results showing the relationship between one-dimensional filling factor and effective relative permeability. Simulation results showing the relationship between the two-dimensional filling factor and the effective relative permeability. Simulation results showing the relationship between aspect ratio and effective relative permeability.

<One embodiment of the inductor component>
An embodiment of an inductor component will be described below. In the drawings, components may be shown enlarged to facilitate understanding. The dimensional ratios of components may differ from the actual ones or from those in other drawings. Although hatching is applied in the cross-sectional views, hatching of some components may be omitted to facilitate understanding. Furthermore, reference symbols may be applied to only some of the multiple components.

<Overall composition>
1, the inductor component 10 includes an element body 20 and an inductor wiring 30. The element body 20 includes a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films 70.

The magnetic ribbon 40 is flat. A plurality of magnetic ribbons 40 are stacked in a direction perpendicular to the main surface MF of the magnetic ribbon 40. Note that the flat shape refers to a thin shape having a main surface, but is not limited to a thin rectangular parallelepiped, and may have curved edges or corners, minute irregularities on the main surface MF, or holes inside.

The inductor wiring 30 extends linearly along the main surface MF inside the element body 20. The axis along which the inductor wiring 30 extends is the central axis CA. In this embodiment, the extension direction of the central axis CA coincides with the extension direction of one of the sides of the rectangular main surface MF.

As shown in FIG. 3, in a cross-sectional view perpendicular to the central axis CA, an axis along the main surface MF is the first axis X, and an axis perpendicular to the main surface MF is the second axis Z. One of the directions along the first axis X is the first positive direction X1, and the other direction along the first axis X is the first negative direction X2. One of the directions along the central axis CA is the positive direction Y1, and the other direction along the central axis CA is the negative direction Y2. One of the directions along the second axis Z is the second positive direction Z1, and the other direction along the second axis Z is the second negative direction Z2. The cross section shown in FIG. 3 is the first cross section.

As shown in Figure 1, the inductor component 10 is composed of a first portion P1, a second portion P2, and a third portion P3. The three portions P1 to P3 are arranged in this order along the second axis Z. Of the three portions P1 to P3, the first portion P1 is located at the end of the second negative direction Z2 along the second axis Z.

As shown in FIG. 2, the first portion P1 has a square shape when viewed from a direction along the second axis Z. The first portion P1 has a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films 70. In the first portion P1, the plurality of magnetic ribbons 40, the plurality of nonmagnetic layers 50, the plurality of nonmagnetic portions 60, and the nonmagnetic films 70 constitute a part of the base body 20.

As shown in FIG. 3, in a cross-sectional view perpendicular to the central axis CA, each magnetic ribbon 40 of the first portion P1 is stacked in a direction along the second axis Z. The main surface MF of each magnetic ribbon 40 is perpendicular to the second axis Z. That is, the thickness direction of each magnetic ribbon 40 is along the second axis Z. As shown in FIG. 2, each magnetic ribbon 40 of the first portion P1 is square-shaped when viewed from a direction along the second axis Z. When viewed from a direction along the second axis Z, each side of each magnetic ribbon 40 is parallel to the first axis X or the central axis CA. The dimensions of the multiple magnetic ribbons 40 in the direction along the second axis Z are all the same.

3, in the first cross-sectional view, two magnetic ribbons 40 are lined up in the direction along the first axis X at the same position along the second axis Z, with a non-magnetic portion 60 between them. The cross-sectional view along the second axis Z and perpendicular to the first axis X is referred to as the second cross-sectional view. In other words, the second cross-sectional view is the cross-sectional view shown in FIG. 4. In the second cross-sectional view, two magnetic ribbons 40 are lined up in the direction along the central axis CA, with a non-magnetic portion 60 between them. In other words, in this embodiment, the magnetic ribbons 40 are arranged not only in the direction along the second axis Z, but also in the directions along the first axis X and the central axis CA.

Here, in the first cross-sectional view, among the magnetic ribbons 40 stacked in the direction along the second axis Z relative to the inductor wiring 30, the magnetic ribbon 40 that is the shortest distance from the inductor wiring 30 in the direction along the second axis Z is defined as the first magnetic ribbon 41. As described above, two magnetic ribbons 40 are lined up in the direction along the first axis X. Therefore, two first magnetic ribbons 41 are also lined up in the direction along the first axis X, with the non-magnetic portion 60 interposed therebetween.

The magnetic ribbon 40 is made of a magnetic material. The magnetic material is, for example, a metal magnetic material containing elements such as Fe, Ni, Co, Cr, Cu, Al, Si, B, and P. In this embodiment, the magnetic material is a metal magnetic material containing Fe and Si.

As shown in FIG. 3, in the first cross-sectional view, the base body 20 has a nonmagnetic layer 50 made of a nonmagnetic material between adjacent magnetic ribbons 40 along the second axis Z. The nonmagnetic layer 50 fills all of the spaces between adjacent magnetic ribbons 40 in the direction along the second axis Z. The nonmagnetic material is, for example, acrylic resin, epoxy resin, or silicone resin. Note that in FIG. 3, the nonmagnetic layer 50 is illustrated by a line.

The dimensions of the nonmagnetic layers 50 in the direction along the second axis Z are all the same. That is, the spacing between adjacent pairs of magnetic ribbons 40 in the direction along the second axis Z is all equal. Furthermore, the dimension of each nonmagnetic layer 50 in the direction along the second axis Z is smaller than the dimension of each magnetic ribbon 40 in the direction along the second axis Z. In this embodiment, the dimension of the nonmagnetic layer 50 in the direction along the second axis Z is 4 μm or less.

As shown in FIG. 2, the nonmagnetic portion 60 is located between the magnetic ribbons 40 that are lined up at the same position along the second axis Z. The nonmagnetic portion 60 fills all of the space between the magnetic ribbons 40 that are lined up at the same position in the direction along the second axis Z. As described above, at the same position along the second axis Z, there are a total of four magnetic ribbons 40, two in the direction along the central axis CA and two in the direction along the first axis X, so there are four nonmagnetic portions 60. The nonmagnetic portion 60 is made of a nonmagnetic material. In this embodiment, the material of the nonmagnetic portion 60 is the same as that of the nonmagnetic layer 50.

In the first portion P1, the non-magnetic film 70 is located at the end of the first positive direction X1 along the first axis X and at the end of the first negative direction X2, which is the opposite direction to the first positive direction X1. The non-magnetic film 70 covers the entire area of both end faces of the magnetic ribbon 40 in the direction along the first axis X. The non-magnetic film 70 also covers the entire area of both end faces of the non-magnetic layer 50 in the direction along the first axis X. Furthermore, the non-magnetic film 70 covers the entire area of both end faces of the non-magnetic portion 60 in the direction along the first axis X. Therefore, all end faces of the first positive direction X1 along the first axis X in the first portion P1 are composed of the non-magnetic film 70. Similarly, all end faces of the first negative direction X2 along the first axis X in the first portion P1 are composed of the non-magnetic film 70. The non-magnetic film 70 is made of a non-magnetic material. In this embodiment, the material of the nonmagnetic film 70 is the same as that of the nonmagnetic layer 50 .

1, when viewed from the first portion P1, the second portion P2 is located in a second positive direction Z1, which is the opposite direction to the second negative direction Z2 along the second axis Z. When viewed from the direction along the second axis Z, the second portion P2 has the same square shape as the first portion P1.

The second portion P2 is composed of an inductor wiring 30, a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films .
The inductor wiring 30 has a rectangular shape when viewed from the direction along the second axis Z, and extends linearly. The central axis of the inductor wiring 30 is the central axis CA. An end face in the positive direction Y1 along the central axis CA of the inductor wiring 30 constitutes part of the outer surface of the second portion P2, and is exposed from the element body 20. Similarly, an end face in the negative direction Y2, which is the opposite direction to the positive direction Y1 along the central axis CA of the inductor wiring 30, constitutes part of the outer surface of the second portion P2, and is exposed from the element body 20.

When viewed from the second axis Z, the end face in the positive direction Y1 and the end face in the negative direction Y2 along the central axis CA of the inductor wiring 30 are parallel to the first axis X. Furthermore, the central axis CA of the inductor wiring 30 is located at the center of the second portion P2 in the direction along the first axis X. Therefore, the central axis CA, which is the axis along which the inductor wiring 30 extends, passes through the center of the second portion P2 in the direction along the first axis X. The dimension of the inductor wiring 30 in the direction along the first axis X is half the dimension of the second portion P2 in the direction along the first axis X.

The material of the inductor wiring 30 is a conductive material. The conductive material is, for example, Cu, Ag, Au, Al, or an alloy thereof. In this embodiment, the material of the inductor wiring 30 is Cu.

3, in a first cross section perpendicular to the central axis CA, the inductor wiring 30 is rectangular having a long side and a short side shorter than the long side. Here, in the first cross section perpendicular to the central axis CA, a virtual rectangle VR is drawn that circumscribes the inductor wiring 30 and has a smallest area, a first side along the first axis X, and a second side along the second axis Z. In addition, in a cross section perpendicular to the central axis CA, the long side of the outer shape of the inductor wiring 30 is aligned with the first axis X. Furthermore, in a cross section perpendicular to the central axis CA, the short side of the outer shape of the inductor wiring 30 is aligned with the second axis Z. Therefore, the virtual rectangle VR coincides with the outer shape of the inductor wiring 30. And the first side of the virtual rectangle VR is longer than the second side of the virtual rectangle VR.

In the second portion P2, the portion that is not the inductor wiring 30 is composed of a plurality of magnetic ribbons 40, a plurality of non-magnetic layers 50, a plurality of non-magnetic portions 60, and a plurality of non-magnetic films 70, similar to the first portion P1.

As shown in FIG. 3, in a first cross-sectional view perpendicular to the central axis CA, each magnetic ribbon 40 in the second portion P2 is stacked in a direction along the second axis Z. As shown in FIG. 1, each magnetic ribbon 40 in the second portion P2 is rectangular when viewed from a direction along the second axis Z. When viewed from a direction along the second axis Z, the long side of each magnetic ribbon 40 is parallel to the central axis CA. The dimensions of the multiple magnetic ribbons 40 in the direction along the second axis Z are all the same.

1, in the second portion P2, the magnetic ribbons 40 are located on both sides of the first positive direction X1 and the first negative direction X2 along the first axis X when viewed from the inductor wiring 30. That is, in the second portion P2, two magnetic ribbons 40 are lined up in a direction along the first axis X, sandwiching the inductor wiring 30 therebetween. In addition, two magnetic ribbons 40 are lined up at an interval in a direction along the central axis CA at the same position along the second axis Z.

As with the first portion P1 described above, the nonmagnetic layer 50 of the second portion P2 is located between adjacent magnetic ribbons 40 in the direction along the second axis Z. That is, as shown in FIG. 3, the magnetic ribbons 40 and the nonmagnetic layers 50 are alternately stacked in the direction along the second axis Z, as with the first portion P1. In the second portion P2 as well, the dimension of the nonmagnetic layer 50 in the direction along the second axis Z is 4 μm or less.

The non-magnetic portion 60 of the second portion P2 is located between the magnetic ribbons 40 that are lined up at the same position along the second axis Z. The non-magnetic portion 60 fills all of the space between the magnetic ribbons 40 that are lined up at the same position in the direction along the second axis Z. The position of the non-magnetic portion 60 of the second portion P2 overlaps with a portion of the non-magnetic portion 60 of the first portion P1 when viewed from the direction along the second axis Z. The non-magnetic portion 60 of the second portion P2 is continuous with the non-magnetic portion 60 of the first portion P1. Note that in the second portion P2, the non-magnetic portion 60 does not exist between the inductor wiring 30 and the magnetic ribbon 40.

In the second portion P2, the non-magnetic film 70 is located at an end of the first positive direction X1 and at an end of the first negative direction X2, which is the opposite direction to the first positive direction X1. The non-magnetic film 70 in the second portion P2 is continuous with the non-magnetic film 70 in the first portion P1.

The third portion P3 is located in the second positive direction Z1 of the second portion P2. When viewed from the second axis Z, the third portion P3 has the same square shape as the first portion P1. The third portion P3 is composed of a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films 70. In this embodiment, the third portion P3 has a structure symmetrical to the first portion P1 with respect to the second portion P2, so a detailed description is omitted. In this way, the base body 20 includes a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films 70.

<About one-dimensional filling rate>
As shown in FIG. 3, in the first cross-sectional view, a first virtual line VL1 is drawn through the first magnetic ribbon 41 and along the first axis X in the inductor component 10. That is, in this embodiment, the first virtual line VL1 passes through the element body 20. On the first virtual line VL1, the element body 20 includes two magnetic ribbons 40, a nonmagnetic portion 60 located between the magnetic ribbons 40, and two nonmagnetic films 70. The dimension of the magnetic ribbon 40 along the first virtual line VL1 is 0.92 mm. The dimension of the nonmagnetic portion 60 along the first virtual line VL1 is 0.02 mm. The dimension of each nonmagnetic film 70 along the first virtual line VL1 is 0.02 mm. That is, on the first virtual line VL1, the one-dimensional filling factor of the magnetic ribbons 40 with respect to the element body 20 is approximately 97%. Here, the one-dimensional filling rate is the ratio of the magnetic ribbons 40 to the element body 20 on the first virtual straight line VL1. In the following description, the one-dimensional filling rate of the magnetic ribbons 40 to the element body 20 on the first virtual straight line VL1 will be referred to as a "first one-dimensional filling rate."

As shown in FIG. 4, in the second cross-sectional view, a second virtual line VL2 is drawn through the first magnetic ribbon 41 and along the central axis CA in the inductor component 10. That is, in this embodiment, the second virtual line VL2 passes through the element body 20. On the second virtual line VL2, the element body 20 includes two magnetic ribbons 40 and a nonmagnetic portion 60 located between the magnetic ribbons 40. The dimension of the magnetic ribbon 40 along the second virtual line VL2 is 0.92 mm. The dimension of the nonmagnetic portion 60 along the second virtual line VL2 is 0.02 mm. That is, on the second virtual line VL2, the one-dimensional filling rate of the magnetic ribbon 40 with respect to the element body 20 is approximately 99%. In the following description, the one-dimensional filling rate of the magnetic ribbon 40 with respect to the element body 20 on the second virtual line VL2 is referred to as the "second one-dimensional filling rate".

<About aspect ratio>
As shown in Fig. 3, in the first cross-sectional view perpendicular to the central axis CA, the dimension of the first magnetic ribbon 41 in the direction along the second axis Z is 0.02 mm. The dimension of the first magnetic ribbon 41 along the first axis X is 0.92 mm, which is the same as the dimension of the magnetic ribbon 40 along the above-mentioned first virtual straight line VL1. Here, the ratio of the dimension of the first magnetic ribbon 41 along the first axis X to the dimension of the first magnetic ribbon 41 along the second axis Z is defined as the aspect ratio. The aspect ratio of the first magnetic ribbon 41 in this embodiment is 46.

<About the first magnetic ribbon>
3, in a first cross-sectional view perpendicular to the central axis CA, an end of the inductor wiring 30 in the first positive direction X1 is defined as a first wiring end IP1. In addition, in a cross-sectional view perpendicular to the central axis CA, an end of the inductor wiring 30 in the first negative direction X2 is defined as a second wiring end IP2.

As described above, among the magnetic ribbons 40 stacked in the direction along the second axis Z with respect to the inductor wiring 30, the magnetic ribbon 40 with the shortest distance from the inductor wiring 30 along the second axis Z is the first magnetic ribbon 41. Note that when viewed from the direction along the second axis Z, the magnetic ribbon 40 that at least partially overlaps the inductor wiring 30 is the magnetic ribbon 40 stacked in the direction along the second axis Z with respect to the inductor wiring 30. Therefore, in this embodiment, the magnetic ribbon 40 in the first part P1 and the magnetic ribbon 40 in the third part P3 are magnetic ribbons 40 stacked in the direction along the second axis Z with respect to the inductor wiring 30. On the other hand, the magnetic ribbon 40 in the second part P2 is not stacked in the direction along the second axis Z with respect to the inductor wiring 30. The first magnetic ribbon 41 includes two magnetic ribbons 40 in the first portion P1 that are located furthest in the second negative direction Z2, and two magnetic ribbons 40 in the third portion P3 that are located furthest in the second positive direction Z1.

In one magnetic ribbon 40, the end in the first positive direction X1 is the first end MP11, and the end in the first negative direction X2 is the second end MP12. In this case, the range excluding both ends in the direction along the first axis X in one magnetic ribbon 40 is the first range AR11. Then, as shown in FIG. 3, a third virtual line VL3 is drawn that passes through the first wiring end IP1 and extends in the direction along the second axis Z. In this case, the third virtual line VL3 passes through the first range AR11 of the first magnetic ribbon 41. More specifically, the third virtual line VL3 passes through the center of the first magnetic ribbon 41 in the direction along the first axis X. That is, the second end MP12 of each first magnetic ribbon 41 is located approximately in the center of the inductor wiring 30 in the direction along the first axis X.

In this embodiment, the inductor component 10 has a linearly symmetrical structure with respect to the second axis Z, which passes through the center in the direction along the first axis X. Therefore, when a third virtual line VL3 is drawn in a direction along the second axis Z and passes through the second wiring end IP2 in the first negative direction X2 of the inductor wiring 30, the third virtual line VL3 passes through the center in the direction along the first axis X of the first magnetic ribbon 41 that passes through the third virtual line VL3.

<Manufacturing method of inductor components>
Next, a method for manufacturing the inductor element 10 will be described.
5, first, a copper foil preparation step is performed to prepare copper foil 81. Since the copper foil 81 constitutes the inductor wiring 30, the copper foil 81 is prepared to have a thickness required for the inductor wiring 30. In the following description, the copper foil 81 is disposed so that two main surfaces of the copper foil 81 are perpendicular to the second axis Z, and a cross section perpendicular to the central axis CA is shown.

6, a first coating process is performed to coat the surfaces of the copper foil 81 that are perpendicular to the second axis Z, except for the area occupied by the magnetic thin strips 40 in the second portion P2, when viewed from the direction along the second axis Z. Specifically, a first coating portion 82 is formed on the surface of the copper foil 81 facing the second negative direction Z2, covering the surface of the copper foil 81 that faces the second negative direction Z2 except for the area occupied by the magnetic thin strips 40 in the second portion P2. To form the first coating portion 82, a photosensitive dry film resist is applied to the entire surface of the copper foil 81 facing the second negative direction Z2. Next, the dry film resist is hardened by exposing the portion on which the first coating portion 82 is to be formed. Next, a dry film resist is similarly applied to the surface of the copper foil 81 facing the second positive direction Z1, and the dry film resist is hardened by exposing the portion on which the first coating portion 82 is to be formed. After that, the unhardened portion of the applied dry film resist is peeled off and removed by a chemical solution. As a result, the hardened portion of the applied dry film resist is formed as the first covering portion 82. Note that photolithography in other steps described later is a similar process, and therefore detailed description thereof will be omitted.

7, a copper foil etching process is performed to etch the copper foil 81 exposed from the first covering portion 82. The copper foil 81 partially covered by the first covering portion 82 is etched to remove the exposed copper foil 81.

Next, as shown in Fig. 8, a first coating removal process is performed to remove the first coating portion 82. Specifically, the first coating portion 82 is peeled off by wet etching the first coating portion 82 with a chemical.

Next, a second coating process is performed to cover the area occupied by the multiple magnetic ribbons 40 when viewed from the direction along the second axis Z on both sides of the copper foil 81 perpendicular to the second axis Z. Specifically, first, as shown in FIG. 9, a dry film resist R is applied to the entire surface of the copper foil 81 facing the second positive direction Z1. Next, as shown in FIG. 10, a second coating portion 83 is formed by photolithography to cover the area other than the area occupied by the magnetic ribbons 40 and the non-magnetic layer 50 on the surface of the copper foil 81 facing the second positive direction Z1 when viewed from the direction along the second axis Z. Thereafter, similarly, a second coating portion 83 is formed by photolithography to cover the area other than the area occupied by the magnetic ribbons 40 and the non-magnetic layer 50 on the surface of the copper foil 81 facing the second negative direction Z2 when viewed from the direction along the second axis Z.

Next, a lamination preparation step is performed to prepare a laminate 84 in which the magnetic ribbons 40 and the nonmagnetic layers 50 are laminated.
First, for example, a ribbon is prepared as the magnetic ribbon 40. The ribbon is made of, for example, NANOMET (registered trademark) manufactured by Tohoku Magnet Institute Co., Ltd., Metglas (registered trademark) or FINEMET (registered trademark) manufactured by Hitachi Metals, Ltd., FeSiB, FeSiBCr, etc. This ribbon is cut into 10 mm squares. A nonmagnetic material is applied to the cut ribbon by spin coating. An example of the nonmagnetic material is epoxy resin varnish. The cut ribbon is laminated on the applied nonmagnetic material. In this way, the ribbon and the nonmagnetic material are alternately laminated, and then the ribbon and the nonmagnetic material are cured and bonded by a vacuum heating and pressing device. Then, by dicing to a desired size, a laminate 84 in which a plurality of magnetic ribbons 40 and nonmagnetic layers 50 are laminated can be prepared. In this embodiment, two types of laminates 84 are prepared: a first laminate 84A constituting the magnetic ribbon 40 and the nonmagnetic layer 50 in the first portion P1 and the third portion P3, and a second laminate 84B constituting the magnetic ribbon 40 and the nonmagnetic layer 50 in the second portion P2.

Next, a laminate arrangement step is performed in which the laminate 84 is arranged.
11, of the laminate 84, a first laminate 84A constituting the magnetic ribbons 40 and the nonmagnetic layer 50 in the third portion P3 is temporarily adhered to a surface of the copper foil 81 facing the second positive direction Z1 by a thermoplastic adhesive 85. The thermoplastic adhesive 85 is indicated by a thick line in FIGS. 11 to 16.

Next, as shown in Fig. 12, the entire laminate 84 is inverted in the direction along the second axis Z. Then, as shown in Fig. 13, the second laminate 84B constituting the magnetic ribbon 40 and the non-magnetic layer 50 in the second portion P2 of the laminate 84 is disposed on a portion of the surface of the first laminate 84A facing the second positive direction Z1 that is not in contact with the copper foil 81. Specifically, the second laminate 84B can be disposed by pressing the laminate 84 into the opening of the copper foil 81 by a press or the like.

14, the first laminate 84A constituting the magnetic ribbon 40 and the non-magnetic layer 50 in the first portion P1 of the laminate 84 is temporarily bonded to the surface of the copper foil 81 facing the second positive direction Z1 and the surface of the second laminate 84B facing the second positive direction Z1 with a thermoplastic adhesive 85. This positions the laminate 84.

Next, as shown in Figure 15, a pressing process is performed. The entire structure is covered with a non-magnetic resin material 86, and then pressing is performed. This causes each layer in the direction along the second axis Z to be pressed together.

Next, as shown in FIG. 16, a singulation process is performed. Specifically, for example, the pieces are singulated by dicing at the break lines DL. In the above-mentioned second covering portion 83, the portions between the first laminates 84A aligned in the direction along the first axis X become the nonmagnetic portion 60. In addition, in the second covering portion 83, the portions between the first laminates 84A aligned in the direction along the central axis CA and between the second laminates 84B become the nonmagnetic portion 60. Furthermore, the thermoplastic adhesive 85 remains on both sides of the inductor wiring 30 in the direction along the second axis Z as part of the nonmagnetic layer 50. In the example shown in FIG. 16, the laminate 84 is cut along the end face in the first positive direction X1 and the end face in the first negative direction X2. Then, a nonmagnetic film 70 made of a nonmagnetic material is applied to the end face in the first positive direction X1 and the end face in the first negative direction X2 of the laminate 84. This allows the inductor component 10 to be formed. Furthermore, with this method, the thermoplastic adhesive 85 wraps around the side sides of the inductor wiring 30 facing the first positive direction X1 and the side sides facing the first negative direction X2, so that the magnetic ribbon 40 and the inductor wiring 30 do not come into direct contact with each other, and insulation is ensured.

<About the simulation>
Next, a simulation was performed using a two-dimensional model of the inductor component to investigate the characteristics obtained for the inductor component 10. Femtet (registered trademark) from Murata Software Co., Ltd. was used for the simulation.

<Conditions for 2D simulation>
In this simulation, a two-dimensional model of an inductor component represented by the first axis X and the second axis Z described above is used. In the simulation, a model in which a plurality of magnetic ribbons 40 are stacked in a direction along the second axis Z, similar to the inductor component 10 of the embodiment, is assumed. In addition, in this model, a nonmagnetic layer 50 is positioned between adjacent magnetic ribbons 40 in the direction along the second axis Z. In addition, in this model, a nonmagnetic portion 60 is positioned between adjacent magnetic ribbons 40 in the direction along the first axis X. The parameters of the model are described in detail below.

The software used is Femtet2019 from Murata Software. The solver is static magnetic field analysis. The model is two-dimensional. The standard mesh size is 0.1 mm. The magnetic material is an amorphous metal magnetic thin film made of Fe, Si, Cr, and B, with a relative permeability μr of 7000 and a saturation magnetic flux density Bs of 0.8 T. The magnetic material BH curve used satisfies B = Bs x tanh (μ0 x μr x H/Bs). Note that the magnetic material BH curve uses a portion with a relative permeability μr of 1 or more so as not to be less than the vacuum permeability, and is further extrapolated to the vacuum permeability using the function of Femtet2019. The material of the inductor wiring 30 is copper.

The dimension of the inductor component along the first axis X is 1 mm. The dimension of the inductor component along the second axis Z is 1 mm. The dimension of the inductor wiring 30 along the first axis X is 1 mm. The dimension of the inductor wiring 30 along the second axis Z is 0.01 mm. The inductor wiring 30 is located at the end of the inductor component in the second negative direction Z2.

In the two-dimensional model, a non-magnetic film 70 is located at the end in the first positive direction X1 and the end in the first negative direction X2. The dimension of each non-magnetic film 70 in the direction along the first axis X is 0.02 mm. The dimension of each non-magnetic film 70 in the direction along the second axis Z is 1 mm. In the two-dimensional model, a non-magnetic portion 60 is located at the end in the second positive direction Z1. The ends of the non-magnetic portion 60 in the first positive direction X1 and the first negative direction X2 are in contact with the non-magnetic film 70. The dimension of the non-magnetic portion 60 in the direction along the first axis X is 0.96 mm. The dimension of the non-magnetic portion 60 in the direction along the second axis Z is 0.072 mm. The relative permeability μr of the non-magnetic layer 50 and the non-magnetic portion 60 was set to 1.

In the two-dimensional simulation, parameters were allocated as follows for the dimensions and positions of the magnetic ribbons 40. Similarly, in the two-dimensional simulation, parameters were allocated as follows for the dimensions and positions of the nonmagnetic portions 60 and nonmagnetic layers 50 located between the magnetic ribbons 40. The length of the magnetic ribbons 40 along the first axis X was allocated in stages in the range of 0.015 to 0.96 mm. The length of the magnetic ribbons 40 along the second axis Z was allocated in stages in the range of 0.0145 to 0.928 mm. The number of magnetic ribbons 40 was allocated so that 1 to 58 pieces were arranged in the direction along the first axis X and 1 to 58 pieces were arranged in the direction along the second axis Z. In addition, when the magnetic ribbons 40 are arranged so as to be evenly positioned in the inductor component, the dimension of the nonmagnetic portions 60 located between the magnetic ribbons 40 along the first axis X varies in the range of 0.002241379 mm to 0.52 mm. Similarly, the dimension of the nonmagnetic layers 50 located between the magnetic ribbons 40 in the direction along the second axis Z varies within a range of 0.002 to 0.496 mm.

<Effective relative permeability in two-dimensional simulation>
Using the above conditions, the effective relative magnetic permeability μ was calculated by a two-dimensional simulation. In the two-dimensional simulation, the effective relative magnetic permeability μ was calculated by the following formula using the vacuum magnetic permeability μ for the inductance L when a current of 0.01 A was applied to the inductor wiring 30.

μre=(1000×L)/μ0
<Results of 2D simulation of filling rate>
It is generally known that the higher the filling rate of the magnetic material in an inductor component, the larger the effective relative permeability μre. For example, the two-dimensional filling rate is calculated in the above two-dimensional simulation. The efficiency is expressed by the magnetic field occupying the plane of the inductor component represented by the first axis X and the second axis Z, without taking into account the dimensions and positions of the magnetic ribbons 40, the nonmagnetic layer 50, and the nonmagnetic portion 60. The ratio of the thin ribbons is 40. As shown in Fig. 20, as the two-dimensional filling rate increases, the effective relative permeability μre tends to increase approximately proportionally.

In addition, the one-dimensional filling rate was calculated when the magnetic ribbon 40, nonmagnetic portion 60, and nonmagnetic layer 50 were divided according to the above parameters in the two-dimensional model of the inductor component. A first virtual straight line VL1 parallel to the first axis X was drawn on the inductor component in a location that does not include the inductor wiring 30 and the nonmagnetic layer 50. The one-dimensional filling rate is the proportion of the magnetic ribbon 40 on the first virtual straight line VL1. This one-dimensional filling rate corresponds to the first one-dimensional filling rate.

As shown in FIG. 19, in the simulation results, the effective relative permeability μre increased as the one-dimensional filling rate increased. Specifically, in the range where the one-dimensional filling rate was greater than 30% and less than 90%, the increase in the effective relative permeability μre with the increase in the one-dimensional filling rate was relatively gradual. On the other hand, in the range where the one-dimensional filling rate was 90% or more, the increase in the effective relative permeability μre with the increase in the one-dimensional filling rate was relatively rapid. In the graph of FIG. 19, when the effective relative permeability μre is on the y-axis and the one-dimensional filling rate is on the x-axis, the exponential regression line LL1 in the range where the one-dimensional filling rate is greater than 30% and less than 90% is y = 0.4882e ^2.7914x . On the other hand, the exponential regression line LL2 in the range where the one-dimensional filling rate is 90% or more is y = 8 × 10 ^-7 e ^17.827X . Therefore, in the range where the one-dimensional filling rate is 90% or more, the slope of the exponential regression line is greater than in the range where the one-dimensional filling rate is less than 90%.

<Aspect ratio results of 2D simulation>
In the above two-dimensional simulation, the dimensions of the magnetic ribbon 40 and the nonmagnetic portion 60 are set within the above parameter ranges so that the one-dimensional filling rate is 90% or more. As a result, the aspect ratio of the magnetic ribbon 40 varies within a range greater than 0 and less than 68. The aspect ratio of the magnetic ribbon 40 is the dimension in the direction along the first axis X relative to the dimension in the direction along the second axis Z.

As shown in Figure 21, the simulation results showed a tendency for the effective relative permeability μre to increase as the aspect ratio increases. On the other hand, in the range where the aspect ratio is greater than 0 and less than 4, the minimum value of the effective relative permeability μre was approximately 5. In other words, in the range where the aspect ratio is greater than 0 and less than 4, an increase in the effective relative permeability μre with an increase in the aspect ratio cannot necessarily be expected.

In addition, in the above simulation results, when the aspect ratio of the magnetic ribbon 40 is 8 or more, the effective relative magnetic permeability μre is greater than 10. In addition, in the range where the aspect ratio is 8 or more, the effective relative magnetic permeability μre exceeds 15 in most cases.

<About 3D simulation>
Next, a description will be given of a simulation in which the characteristics obtained for the inductor component 10 are compared with those of a comparative example inductor component 90. Femtet (registered trademark) from Murata Software Co., Ltd. was used for the simulation.

<Conditions for 3D simulation>
The software used is Femtet2019 made by Murata Software. The solver is static magnetic field analysis. The model is three-dimensional. The standard mesh size is 0.25 mm. The magnetic material is an amorphous metal magnetic thin film made of Fe, Si, Cr, and B, with a relative magnetic permeability μr of 7000 and a saturation magnetic flux density Bs of 0.8 T. The magnetic material BH curve used satisfies B=Bs×tanh (μ0×μr×H/Bs). Note that the magnetic material BH curve uses a portion with a relative magnetic permeability μr of 1 or more so as not to be less than the vacuum permeability, and is further extrapolated to the vacuum permeability using the function of Femtet2019. The material of the inductor wiring 30 is copper.

The dimension of the magnetic ribbon 40 in the direction along the first axis X is 990 μm. The dimension of the magnetic ribbon 40 in the direction along the second axis Z is 20 μm. The dimension of the magnetic ribbon 40 in the direction along the central axis CA is 990 μm. The dimension of the nonmagnetic layer 50 in the direction along the second axis Z is 2.439024 μm. The dimension of the nonmagnetic portion 60 located between adjacent magnetic ribbons 40 in the direction along the first axis X is 20 μm. The dimension of the nonmagnetic portion 60 located between adjacent magnetic ribbons 40 in the direction along the central axis CA is 20 μm. The number of magnetic ribbons 40 stacked in the direction along the second axis Z is 41. The number of magnetic ribbons 40 lined up in the direction along the first axis X is 2. The number of magnetic ribbons 40 aligned in the direction along the central axis CA is two.

The dimension of the inductor component 10 in the direction along the first axis X is 2000 μm. The dimension of the inductor component 10 in the direction along the second axis Z is 920 μm. The dimension of the inductor wiring 30 in the direction along the first axis X is 1 mm. The dimension of the inductor wiring 30 in the direction along the second axis Z is 100 μm. The dimension of the inductor wiring 30 in the direction along the central axis CA is 2000 μm. The position of the inductor wiring 30 is arranged so that the center of gravity of the inductor wiring 30 coincides with the center of gravity of the base body 20. The relative permeability μr of the nonmagnetic material of the nonmagnetic layer 50 and the nonmagnetic portion 60 was set to 1.

On the other hand, as shown in FIG. 17, the inductor component 90 of the comparative example has an element 91 made of a composite material of a magnetic material and a non-magnetic material. In the simulation, the element 91 is a metal composite material of amorphous metal particles made of Fe, Si, Cr, and B and resin. The element 91 has a relative magnetic permeability μr of 24, a metal magnetic material filling rate of 70%, and a saturation magnetic flux density Bs of 0.56 T. In addition, the magnetic material BH curve of the element 91 satisfies B = Bs × tanh (μ0 × μr × H / Bs). In addition, the magnetic material BH curve uses a portion with a relative magnetic permeability μr of 1 or more so as not to be less than the magnetic permeability of a vacuum, and is extrapolated to the magnetic permeability of a vacuum using the function of Femtet2019.

Next, the characteristic index calculated by the simulation will be described.
The unit of inductance L is nH. The unit of DC bias characteristic Isat is A, and the DC bias characteristic Isat is the current value at which inductance L decreases by 20% from the initial inductance, which is inductance L at 0.001 A.

<Results of 3D simulation>
18, first, the effective relative permeability μre was calculated for the above-mentioned Example and Comparative Example in the same manner as in the above-mentioned two-dimensional simulation. The effective relative permeability μre in the Example was larger than the effective relative permeability μre in the Comparative Example. Specifically, the effective relative permeability μre in the Example was 28, and the effective relative permeability μre in the Comparative Example was 24.

Next, a three-dimensional simulation was performed for the example and the comparative example to calculate Isat and inductance L. Isat in the example was larger than Isat in the comparative example; specifically, Isat in the example was 35 and Isat in the comparative example was 30.

The inductance L in the embodiment is larger than the inductance L in the comparative example; specifically, the inductance L in the embodiment is 14.1, and the inductance L in the comparative example is 9.0.

<Operation of this embodiment>
When a current flows in a direction along the central axis CA through the inductor wiring 30 of the inductor component 10, a magnetic field is generated around the inductor wiring 30. In a cross section perpendicular to the central axis CA of the inductor wiring 30, the magnetic flux tends to concentrate at an end in a direction along the first axis X. Furthermore, if the magnetic flux generated when a current flows through the inductor wiring 30 passes through an end of the first magnetic ribbon 41 in a direction along the first axis X, the magnetic flux becomes disturbed or locally concentrated.

<Effects of this embodiment>
(1) In this embodiment, the magnetic ribbons 40 are stacked in a direction perpendicular to the main surface MF, and two are arranged in a direction along the first axis X. Assuming that the magnetic ribbons 40 are arranged regularly in this manner, the first one-dimensional filling factor on the first virtual line VL1 along the first axis X is greater than 90%. As shown in the above simulation results, when the first one-dimensional filling factor exceeds 90%, the rate of increase in the effective relative permeability μre with respect to the increase in the first one-dimensional filling factor becomes large. Therefore, in this embodiment, the effective relative permeability μre sufficient for practical use can be obtained for the entire element body 20. Also, as shown in FIG. 18, in the embodiment, the values of Isat and inductance L are also large, reflecting the magnitude of the effective relative permeability μre. In particular, when the simulation results of the example and the comparative example are compared, the example showed an improvement in inductance L that was greater than the effect of the magnitude of the effective relative permeability μre. That is, a preferable characteristic for the inductor component 10 is obtained.

(2) In the above two-dimensional simulation, as shown in FIG. 19, when the first one-dimensional filling factor is 96% or more, there are some whose effective relative permeability μre exceeds 15. When used as a power inductor, it is preferable for the effective relative permeability μre of the inductor component to exceed 15. In this embodiment, the first one-dimensional filling factor of the inductor component 10 is approximately 97%. Therefore, the effective relative permeability μre is likely to exceed 15, making it suitable for use as a power inductor.

(3) In the above embodiment, the second one-dimensional filling rate of the magnetic ribbon 40 relative to the base body 20 on the second virtual straight line VL2 is approximately 99%. Therefore, the inductor component 10 has a considerable filling rate of the magnetic ribbon 40 even in the direction along the central axis CA, and the two-dimensional filling rate of the magnetic ribbon 40 also exceeds approximately 96%.

21, under the condition that the one-dimensional filling rate of the magnetic ribbon 40 is 90% or more, if the aspect ratio of the magnetic ribbon 40 is 4 or more, the lower limit of the effective relative magnetic permeability μre increases rapidly as the aspect ratio increases. In the above embodiment, since the aspect ratio of the first magnetic ribbon 41 is 46, if the first one-dimensional filling rate is 90% or more, the effective relative magnetic permeability μre is high.

(5) As shown in FIG. 21, in the above simulation results, when the aspect ratio is 8 or more, the effective relative permeability μre is greater than 10. Furthermore, in the range where the aspect ratio is 8 or more, the effective relative permeability μre exceeds 15 in most cases. Therefore, when the aspect ratio is 8 or more, it is highly likely that characteristics preferable for application as a power inductor, for example, can be obtained. In this embodiment, the aspect ratio of the first magnetic ribbon 41 is 46. Therefore, the inductor component 10 is even more preferable for obtaining an effective relative permeability μre effective for application as a power inductor.

(6) According to the above embodiment, the third virtual straight line VL3 passes through the first range AR11 of the first magnetic ribbon 41. Therefore, of the magnetic flux generated when a current flows through the inductor wiring 30, in the vicinity of the first wiring end IP1 of the inductor wiring 30, the majority of the magnetic flux oriented along the third virtual straight line VL3 passes through a portion of the first magnetic ribbon 41 excluding the end in the direction along the first axis X. In other words, of the magnetic flux generated when a current flows through the inductor wiring 30, less magnetic flux passes through the end in the direction along the first magnetic ribbon 41. Therefore, it is possible to suppress disturbance of the magnetic flux or local concentration of the magnetic flux.

(7) In the above embodiment, the dimension of the nonmagnetic layer 50 in the direction along the second axis Z is 4 μm or less. Therefore, the dimension of the nonmagnetic layer 50 in the direction along the second axis Z is smaller than the dimension of the magnetic ribbon 40 in the direction along the second axis Z. Therefore, it is easy to ensure the filling rate of the magnetic ribbon 40 in the direction along the second axis Z.

(8) According to the above embodiment, the material of the magnetic ribbon 40 contains Fe and Si elements. Therefore, the magnetic material can have a high relative magnetic permeability μr.
<Other Examples>
The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined and implemented within a range that does not cause technical contradiction.

- In the above embodiment, the shape of the base body 20 is not limited to the example of the above embodiment. For example, when viewed from a direction along the second axis Z, the shape of the base body 20 may be a rectangle, a circle, an ellipse, a polygonal shape other than a square, etc. The shape of the base body 20 may also be a cube or a cylinder. The shape of the base body 20 may be, for example, a rectangular parallelepiped or a polygonal prism whose dimensions along the first axis X and the dimensions along the central axis CA are different.

- In the above embodiment, the shape of the inductor wiring 30 can be changed as appropriate as long as it can impart inductance L to the inductor component 10 by generating magnetic flux in the magnetic ribbon 40 when current flows.

For example, the inductor wiring 30 may be elliptical in a cross section perpendicular to the central axis CA. A virtual rectangle VR is then drawn that circumscribes the inductor wiring 30 and has a minimum area, a first side along the first axis X, and a second side along the second axis Z. In this case, the first side of the virtual rectangle VR is longer than the second side of the virtual rectangle VR.

In the above embodiment, the shape of the inductor wiring 30 in a cross section perpendicular to the central axis CA may be such that the second side along the second axis Z is longer than the first side along the first axis X.
Furthermore, in a cross section perpendicular to the central axis CA, the shape of the inductor wiring 30 may be a shape that does not have symmetry, such as linear symmetry or rotational symmetry, for example, when it includes one or more protruding portions.

Furthermore, in a cross section perpendicular to the central axis CA, the shape of the inductor wiring 30 may be a square or a perfect circle. In this case, the imaginary rectangle VR drawn in the cross section perpendicular to the central axis CA is a square, and the first side of the imaginary rectangle VR is not longer than the second side of the imaginary rectangle VR.

In the above embodiment, the third virtual straight line VL3 does not have to pass through the first ranges AR11 of all of the magnetic ribbons 40 stacked on the inductor wiring 30. It is sufficient that the third virtual straight line VL3 passes through at least the first range AR11 of the first magnetic ribbon 41. It is preferable that the third virtual straight line VL3 passes through the first ranges AR11 of five consecutive magnetic ribbons 40 in the direction along the second axis Z, including the first magnetic ribbon 41.

In addition, in the above embodiment, the third virtual straight line VL3 may pass through the non-magnetic portion 60 instead of within the first range AR11.
In the above embodiment, the shape of the inductor wiring 30 is not limited to a straight line. It is sufficient that the inductor wiring 30 extends along the main surface MF of the magnetic ribbon 40, and may be, for example, curved or meandering overall. When the inductor wiring 30 extends on the same plane, it is easy to adjust the arrangement of the first wiring end IP1 of the inductor wiring 30 and the first magnetic ribbon 41. When the inductor wiring 30 has a meandering shape, the central axis CA extends in a meandering shape.

In the above embodiment, the first cross section may be set at any position as long as it is a cross section perpendicular to the central axis CA. In any first cross section perpendicular to the central axis CA, the one-dimensional filling rate of the magnetic ribbon 40 on the first virtual straight line VL1 may be 90% or more.

In the above embodiment, the material of the inductor wiring 30 is not limited to the example of the above embodiment as long as it is a conductive material. For example, the material of the inductor wiring 30 may be a conductive resin.

In the above embodiment, an external electrode may be connected to the portion of the inductor wiring 30 exposed from the element body 20. For example, external electrodes may be formed by coating, printing, plating, etc. on both end faces of the inductor wiring 30 in the direction along the central axis CA and on both end faces of the element body 20 in the direction along the central axis CA.

In the above embodiment, the direction in which the multiple magnetic ribbons 40 and non-magnetic layers 50 are stacked may not be perpendicular to the central axis CA and the first axis X due to manufacturing errors, etc. In the above embodiment, the magnetic ribbons 40, etc. being "stacked in a direction along the second axis Z" allows for such manufacturing errors, etc.

In the above embodiment, the number of magnetic ribbons 40 stacked in the direction along the second axis Z may be two or more. In this case, the inductor wiring 30 and the non-magnetic layer 50 may be disposed between the two magnetic ribbons 40.

In the above embodiment, the material of the magnetic ribbon 40 is not limited to the example of the above embodiment as long as it is a magnetic material. For example, it may be Fe or Ni. It may also be a metallic magnetic material containing elements other than Fe, Ni, Co, Cr, Cu, Al, Si, B, and P.

In the above embodiment, the material of the non-magnetic layer 50 is not limited to the example of the above embodiment, so long as it is a non-magnetic material. The non-magnetic layer 50 may be a resin other than acrylic resin, epoxy resin, or silicone resin. The non-magnetic layer 50 may also be a non-magnetic ceramic such as alumina, silica, or glass, or a non-magnetic inorganic material containing these, or may be a void, or may even be a mixture of these. The same applies to the non-magnetic portion 60 and the non-magnetic film 70. The materials of the non-magnetic layer 50, the non-magnetic portion 60, and the non-magnetic film 70 may be different from each other or may be partially different from each other, so long as they are non-magnetic materials.

In the above embodiment, the nonmagnetic layer 50, the nonmagnetic portion 60, and the nonmagnetic film 70 may be integrated or may be separate members. For example, the nonmagnetic layer 50 may be hollow, or may be configured with an oxide film formed by oxidizing the surface of the magnetic ribbon 40 as an insulator.

In the above embodiment, the non-magnetic layer 50 may be omitted. In this case, adjacent magnetic ribbons 40 in the direction along the second axis Z may be in direct contact with each other. Note that "multiple magnetic ribbons 40 stacked" specifically refers to a case where adjacent magnetic ribbons 40 are completely or partially insulated from each other or a case where a microscopic physical boundary exists. For example, it does not include a state where the magnetic ribbons 40 are sintered together and completely integrated.

In the above embodiment, if the magnetic ribbon 40 is laminated in a direction perpendicular to the main surface MF, the configuration of the magnetic ribbon 40, the nonmagnetic layer 50, and the nonmagnetic portion 60 can be changed. For example, the entire second portion P2 except the inductor wiring 30 may be composed of the magnetic ribbon 40 or the nonmagnetic layer 50. In addition, when the entire second portion P2 except the inductor wiring 30 is composed of the magnetic ribbon 40, the magnetic ribbon 40 may be a composite material of a powdered magnetic material and a nonmagnetic material. Such a composite material may be a metal composite material of amorphous metal particles made of Fe, Si, Cr, and B and a resin.

- According to the above embodiment, at the same position along the second axis Z, two magnetic ribbons 40 are lined up in the direction along the first axis X, and two are lined up in the direction along the central axis CA. That is, when "M" and "N" are positive integers, at the same position along the second axis Z, "M" magnetic ribbons 40 are lined up in the direction along the central axis CA, and "N" magnetic ribbons 40 are lined up in the direction along the first axis X, and both "M" and "N" are 2. In the above embodiment, "N", which is the number of magnetic ribbons 40 lined up in the direction along the first axis X, may be 3 or more. Also, "M", which is the number of magnetic ribbons 40 lined up in the direction along the central axis CA, may be 1, or may be 3 or more.

In the above embodiment, the dimensions of the magnetic ribbons 40 in the direction along the second axis Z may be different. In addition, when the dimension of the magnetic ribbon 40 in the direction along the second axis Z is small, a manufacturing error of about 20% may occur depending on the manufacturing method. Therefore, the dimension of the magnetic ribbon 40 in the direction along the second axis Z can be considered to be approximately equal if it is 80% or more and 120% or less of the average dimension of the multiple magnetic ribbons 40 in the direction along the second axis Z. The dimension of one magnetic ribbon 40 in the direction along the second axis Z is the average value of three points in a single image enlarged by an electron microscope at a magnification between 1000 times and 10,000 times. In addition, the dimension of the multiple magnetic ribbons 40 in the direction along the second axis Z is the average value of the dimensions of one magnetic ribbon 40 in the direction along the second axis Z measured in a single image in which three or more magnetic ribbons 40 fit in the electron microscope.

The dimensions of the multiple magnetic ribbons 40 in the direction along the second axis Z do not have to be the same. They may vary from one another, or may vary by more than 20% from the average value.

In the above embodiment, the interval between a pair of adjacent magnetic ribbons 40 in the direction along the second axis Z may be different. For example, the dimensions of the nonmagnetic layers 50 in the direction along the second axis Z may be different. If the dimension of the nonmagnetic layer 50 in the direction along the second axis Z is small, a manufacturing error of about 20% may occur depending on the manufacturing method. Also, for example, as in the above-mentioned modified example, a part of the nonmagnetic layer 50 may be hollow, which may cause the interval between a pair of adjacent magnetic ribbons 40 in the direction along the second axis Z to vary. In addition, there may be a gap between the nonmagnetic layer 50 and the magnetic ribbon 40. In this case, the interval between a pair of adjacent magnetic ribbons 40 in the direction along the second axis Z is the sum of the lengths of the nonmagnetic layer 50 and the gap. Therefore, the interval between a pair of adjacent magnetic ribbons 40 in the direction along the second axis Z can be considered to be substantially equal if it is 80% or more and 120% or less of the average value of the intervals between multiple pairs of adjacent magnetic ribbons 40 in the direction along the second axis Z. The interval between a pair of adjacent magnetic ribbons 40 in the direction along the second axis Z is the smallest dimension in the direction along the second axis Z in a single image magnified by an electron microscope at a magnification between 1000 times and 10000 times. The average value of the intervals between multiple pairs of adjacent magnetic ribbons 40 in the direction along the second axis Z is the average value of the intervals between five pairs of magnetic ribbons 40 measured in a single image in which six or more magnetic ribbons 40 fit using an electron microscope.

The dimensions of the multiple nonmagnetic layers 50 in the direction along the second axis Z do not have to be the same. They may vary from one another, or may vary by more than 20% from the average value.

In the above embodiment, the number and positions of the non-magnetic portions 60 are not limited to the examples in the above embodiment. The number and positions of the non-magnetic portions 60 may be changed in accordance with the number and positions of the magnetic ribbons 40 in the direction along the first axis X or the direction along the central axis CA. The size of the non-magnetic portions 60 may also be changed appropriately in accordance with the spacing between the magnetic ribbons 40 at the same position in the direction along the second axis Z.

In the above embodiment, the dimensions of the magnetic ribbon 40, the nonmagnetic layer 50, and the nonmagnetic portion 60 are not limited to the examples of the above embodiment. For example, the dimension of the nonmagnetic layer 50 in the direction along the second axis Z may be greater than 4 μm.

In the above embodiment, the non-magnetic film 70 may be omitted. When forming the non-magnetic film 70, for example, in the manufacturing method of the inductor component 10, the dimension of the laminate 84 in the direction along the first axis X and central axis CA may be set smaller than the gap in the direction along the first axis X and central axis CA of the second covering portion 83. In this case, the resin material 86 enters the gap between the second covering portion 83 and the laminate 84, thereby forming the non-magnetic film 70.

In the above embodiment, among the multiple first virtual straight lines VL1 drawn in the direction along the first axis X through the magnetic ribbon 40, the first one-dimensional filling rate of the magnetic ribbon 40 may be 90% or more on the first virtual straight line VL1 passing through at least the first magnetic ribbon 41. Note that, among the multiple magnetic ribbons 40 stacked in the direction along the second axis Z, it is preferable that the first one-dimensional filling rate of the magnetic ribbon 40 is 90% or more on the first virtual straight line VL1 passing through each magnetic ribbon 40 for 50% or more of the magnetic ribbons 40.

In the above embodiment, the first one-dimensional filling rate of the magnetic ribbon 40 on the first virtual straight line VL1 relative to the base body 20 may be less than 96% as long as it is 90% or more. As described above, if the first one-dimensional filling rate is 90% or more, an effective relative permeability μre preferable for the inductor component 10 is obtained.

In the above embodiment, the second one-dimensional filling rate of the magnetic ribbons 40 with respect to the element body 20 on the second virtual straight line VL2 may be lower than 90%.
In the above embodiment, the aspect ratio of the magnetic ribbon 40 may be equal to or less than 4. Even if the aspect ratio is equal to or less than 4, the expected effective relative permeability μ may be obtained by increasing the first one-dimensional filling factor.

In the above embodiment, the manufacturing method of the inductor component 10 is not limited to the example of the above embodiment. For example, the laminate 84 may not be disposed on the second covering portion 83, but the element body 20 may be formed by forming a plurality of sheets in which the element body 20 is laminated in a direction along the second axis Z, and then stacking these multiple sheets to form the element body 20.

REFERENCE SIGNS LIST 10 inductor component 20 element body 30 inductor wiring 40 magnetic ribbon 41 first magnetic ribbon 50 non-magnetic layer 60 non-magnetic portion 70 non-magnetic film AR11 first range CA central axis VL1 first virtual line VL2 second virtual line VL3 third virtual line VR virtual rectangle X first axis X1 first positive direction X2 first negative direction Z second axis

Claims (10)

an element body including a plurality of flat magnetic ribbons made of a magnetic material, the plurality of magnetic ribbons being stacked in a direction perpendicular to a main surface of the magnetic ribbons;
an inductor wiring extending along the main surface inside the element body;
When an axis along which the inductor wiring extends is defined as a central axis, an axis along the main surface in a cross-sectional view perpendicular to the central axis is defined as a first axis, and an axis perpendicular to the main surface in the cross-sectional view is defined as a second axis,
In the cross-sectional view,
Among the magnetic ribbons stacked in the direction along the second axis with respect to the inductor wiring, the magnetic ribbon that is the shortest in distance from the inductor wiring in the direction along the second axis is defined as a first magnetic ribbon,
the magnetic ribbon is arranged in a direction along the first axis with a non-magnetic portion interposed between the first magnetic ribbon,
an inductor component, wherein when a first imaginary line is drawn through the first magnetic ribbon in a direction along the first axis, a one-dimensional filling factor of the magnetic ribbon with respect to the element body on the first imaginary line is 90% or more. 2. The inductor component according to claim 1, wherein when first imaginary lines are drawn through the magnetic ribbon in a direction along the first axis, a one-dimensional filling factor of the magnetic ribbon with respect to the body on any of the first imaginary lines is 90% or more. The inductor component according to claim 1 or 2, wherein the one-dimensional filling factor is 96% or more. When the cross-sectional view is a first cross-sectional view, in a second cross-sectional view along the second axis and perpendicular to the first axis,
the magnetic ribbon is arranged in a direction along the central axis with respect to the first magnetic ribbon, with non-magnetic portions interposed therebetween;
When the one-dimensional filling rate is a first one-dimensional filling rate, and a second imaginary line is drawn passing through the first magnetic ribbon in a direction along the central axis, the one-dimensional filling rate of the magnetic ribbon with respect to the element body on the second imaginary line is a second one-dimensional filling rate,
The inductor component according to any one of claims 1 to 3, wherein the second one-dimensional filling factor is 90% or more. The inductor component according to claim 4 , wherein the second one-dimensional filling factor is 96% or more. In the cross-sectional view,
The inductor component according to any one of claims 1 to 5, wherein when the aspect ratio is defined as a ratio of a dimension of the first magnetic ribbon in a direction along the first axis to a dimension of the first magnetic ribbon in a direction along the second axis, the aspect ratio is greater than 4. The inductor component of claim 6 , wherein the aspect ratio is greater than 8. An inductor component as described in any one of claims 1 to 7, wherein, in the cross-sectional view, one of two directions along the first axis is defined as a first positive direction, an end of the inductor wiring in the first positive direction is defined as a first wiring end, a range of the magnetic ribbon excluding both ends in the direction along the first axis is defined as a first range, and when a third imaginary line passing through the first wiring end and extending in a direction along the second axis is drawn, the third imaginary line passes within the first range of the first magnetic ribbon. When viewed in cross section, the element body has a nonmagnetic layer made of a nonmagnetic material between the magnetic ribbons adjacent to each other along the second axis,
9. The inductor component according to claim 1, wherein the nonmagnetic layer has a dimension of 4 μm or less in the direction along the second axis. The inductor component according to any one of claims 1 to 9, wherein the magnetic ribbon contains Fe elements and Si elements.

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