JP7568053B2 - Inductor Components - Google Patents

Description

The present disclosure relates to inductor components.

The inductor component described in Patent Document 1 comprises an element body and an inductor wiring extending inside the element body. The element body is made of inorganic filler and resin. For example, in the case of a magnetic composite body, the inorganic filler is made of a magnetic material. The average particle size of the inorganic filler is 5 μm or less.

JP 2019-192920 A

The inductor component described in Patent Document 1 aims to improve various characteristics of the inductor component by increasing the filling rate of the inorganic filler in the element body. However, the inductor component described in Patent Document 1 is based on a structure in which inorganic filler particles are randomly dispersed in the element body, and no consideration is given to other structures of the magnetic material in the element body.

In order to solve the above problem, the present invention provides an element body including a plurality of flat magnetic ribbons made of a magnetic material, and an inductor wiring extending inside the element body along the main surface of the magnetic ribbons, the inductor wiring having at least one portion extending in a bent or curved manner, and when the axis along which the inductor wiring extends is taken as the central axis, the axis along the main surface in a cross-sectional view perpendicular to the central axis is taken as the first axis, and the axis perpendicular to the main surface in the cross-sectional view is taken as the second axis, the plurality of magnetic ribbons are arranged in a row along a third axis perpendicular to the second axis. the magnetic ribbons are arranged along a fourth axis that is perpendicular to the second axis and intersects the third axis, and the element body further has non-magnetic portions made of a non-magnetic material that fill gaps between adjacent magnetic ribbons in a direction along the third axis and gaps between adjacent magnetic ribbons in a direction along the fourth axis, and when viewed from a direction along the second axis, the non-magnetic portions are present within a range from the positive end to the negative end of the inductor wiring along the first axis, over the entire range from a first end to a second end of the inductor wiring.

In an inductor component with the above structure, when viewed from the direction along the second axis, non-magnetic portions are present throughout the entire range from the first end to the second end of the inductor wiring, and within the range from the positive end to the negative end along the first axis of the inductor wiring. This improves the characteristics of the inductor component.

The first and second ends of the inductor wiring refer to both ends in the direction in which the inductor wiring extends. The entire range from the first end to the second end of the inductor wiring may mean substantially the entire range, and within the range from the first end to the second end, there may be a small range, a range that does not contribute much to the characteristics, or a range that is not essential, within the range from the positive end to the negative end along the first axis of the inductor wiring where no nonmagnetic part exists.

Furthermore, "along" also includes cases where there is no direct contact and the object is at a distance. For example, "along the first axis" does not only include something that is in direct contact with the first axis and runs along the first axis, but also something that is not in direct contact with the first axis and runs along the first axis at a distance. Furthermore, "along" only requires that there is a substantial parallel relationship, and also includes something that is slightly tilted due to manufacturing errors, etc.

FIG. 2 is an exploded perspective view of the inductor component according to the first embodiment. FIG. 2 is a plan view of a first portion of the inductor component of the first embodiment. 3 is a cross-sectional view of the inductor component taken along line 3-3 in FIG. 2. Table showing the results of the simulation. FIG. FIG. FIG. 11 is a transparent side view of Comparative Example 3. FIG. 11 is a plan view of Comparative Example 5. FIG. 11 is a plan view of Comparative Example 5. FIG. 6 is a cross-sectional view of an inductor component according to a second embodiment. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. FIG. 13 is a plan view of an inductor component according to a third embodiment. FIG. 13 is a transparent side view of an inductor component according to a third embodiment. FIG. 11 is a cross-sectional view of an inductor component according to a modified example. FIG. 11 is a plan view of an inductor component according to a modified example. FIG. 11 is a plan view of an inductor component according to a modified example. FIG. 11 is a plan view of an inductor component according to a modified example.

First Embodiment
A first embodiment of the inductor component will be described below. In the drawings, components may be shown enlarged to facilitate understanding. The dimensional ratios of the components may differ from the actual ones or from those in other drawings. Although hatching is applied in the cross-sectional views, the hatching of some components may be omitted to facilitate understanding. Furthermore, only some of the multiple components may be labeled with a reference symbol.

(Overall composition)
1, the inductor component 10 includes an element body 20 and an inductor wiring 30. The element body 20 includes a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films 70.

The magnetic ribbon 40 is flat. A plurality of magnetic ribbons 40 are stacked in a direction perpendicular to the main surface MF of the magnetic ribbon 40. Note that the flat shape refers to a thin shape having a main surface MF, but is not limited to a thin rectangular parallelepiped, and may have curved edges or corners, minute irregularities on the main surface MF, or holes inside.

The inductor wiring 30 extends linearly along the main surface MF inside the element body 20. The axis along which the inductor wiring 30 extends is the central axis CA. In this embodiment, the extension direction of the central axis CA coincides with the extension direction of one of the sides of the rectangular main surface MF.

As shown in FIG. 3, in a cross-sectional view perpendicular to the central axis CA, an axis along the main surface MF is the first axis AX1, and an axis perpendicular to the main surface MF is the second axis AX2. Furthermore, an axis perpendicular to the second axis AX2 is the third axis AX3, and an axis perpendicular to the second axis AX2 and intersects with the third axis AX3 is the fourth axis AX4. Here, the second axis AX2 is the coordinate axis Z, and one axis perpendicular to the coordinate axis Z is the coordinate axis X. In the cross-section shown in FIG. 3, the coordinate axis X is parallel to the first axis AX1. And, an axis perpendicular to the coordinate axis X and perpendicular to the coordinate axis Z is the coordinate axis Y. In the cross-section shown in FIG. 3, the coordinate axis Y is parallel to the central axis CA. In this embodiment, the coordinate axis X is parallel to the third axis AX3. Furthermore, in this embodiment, the coordinate axis Y is parallel to the fourth axis AX4.

Furthermore, one of the directions along the coordinate axis X is the first positive direction X1, and the other direction along the coordinate axis X is the first negative direction X2. Furthermore, one of the directions along the coordinate axis Y is the second positive direction Y1, and the other direction along the coordinate axis Y is the second negative direction Y2. Furthermore, one of the directions along the coordinate axis Z is the third positive direction Z1, and the other direction along the coordinate axis Z is the third negative direction Z2.

As shown in Figure 1, the inductor component 10 is composed of a first portion P1, a second portion P2, and a third portion P3, which are stacked in order along the coordinate axis Z. Of the three portions P1 to P3, the first portion P1 is located at the end of the third negative direction Z2 along the coordinate axis Z.

As shown in FIG. 2, the first portion P1 is square-shaped when viewed from a direction along the coordinate axis Z. When viewed from a direction along the coordinate axis Z, the first portion P1 has a side extending parallel to the coordinate axis X and a side extending parallel to the coordinate axis Y. The first portion P1 has a plurality of magnetic ribbons 40, a plurality of non-magnetic layers 50, a plurality of non-magnetic portions 60, and two non-magnetic films 70.

As shown in FIG. 3, in a cross section perpendicular to the central axis CA and along the coordinate axis X, each magnetic ribbon 40 of the first portion P1 is stacked in the direction along the coordinate axis Z. As shown in FIG. 2, each magnetic ribbon 40 of the first portion P1 is square-shaped when viewed from the direction along the coordinate axis Z. When viewed from the direction along the coordinate axis Z, each side of each magnetic ribbon 40 is parallel to the coordinate axis X and the coordinate axis Y. Furthermore, the dimensions of the multiple magnetic ribbons 40 in the direction along the coordinate axis X are all the same. Furthermore, the dimensions of the multiple magnetic ribbons 40 in the direction along the coordinate axis Y are all the same. The dimensions of the multiple magnetic ribbons 40 in the direction along the coordinate axis Z are all the same.

Three magnetic ribbons 40 are arranged at intervals in the direction along coordinate axis X at the same position along coordinate axis Z. Three magnetic ribbons 40 are arranged at intervals in the direction along coordinate axis Y at the same position along coordinate axis Z.

The magnetic ribbon 40 is made of a magnetic material. The magnetic material is, for example, a metallic magnetic material containing Fe, Ni, Co, Cr, Cu, Al, Si, B, P, etc. In this embodiment, the magnetic material is a metallic magnetic material containing Fe and Si.

As shown in FIG. 3, the nonmagnetic layer 50 is located between adjacent magnetic ribbons 40 in the direction along the coordinate axis Z. The nonmagnetic layer 50 fills all of the gaps between adjacent magnetic ribbons 40 in the direction along the coordinate axis Z. The nonmagnetic layer 50 is made of a nonmagnetic material. The nonmagnetic material is, for example, acrylic resin, epoxy resin, or silicone resin. Note that in FIG. 3, the nonmagnetic layer 50 is illustrated by a line.

The dimensions of the nonmagnetic layers 50 in the direction along the coordinate axis Z are all the same. In addition, the dimensions of each nonmagnetic layer 50 in the direction along the coordinate axis Z are smaller than the dimensions of each magnetic ribbon 40 in the direction along the coordinate axis Z.

As shown in FIG. 2, the nonmagnetic portion 60 is located between the magnetic ribbons 40 arranged at the same position along the coordinate axis Z. The nonmagnetic portion 60 fills all the gaps between the magnetic ribbons 40 arranged at the same position along the coordinate axis Z. That is, the nonmagnetic portion 60 fills the gaps between the magnetic ribbons 40 adjacent to each other in the direction along the third axis AX3 and the gaps between the magnetic ribbons 40 adjacent to each other in the direction along the fourth axis AX4. As described above, at the same position along the coordinate axis Z, there are a total of nine magnetic ribbons 40, three in the direction along the coordinate axis X and three in the direction along the coordinate axis Y, so there are twelve nonmagnetic portions 60. The nonmagnetic portion 60 is made of a nonmagnetic material. In this embodiment, the material of the nonmagnetic portion 60 is the same as that of the nonmagnetic layer 50.

Here, when viewed from the direction along the coordinate axis Z, of the magnetic ribbons 40 constituting the first portion P1, the magnetic ribbon 40 located furthest in the first negative direction X2 and furthest in the second negative direction Y2 is defined as magnetic ribbon 40A. The magnetic ribbon 40 adjacent to the magnetic ribbon 40A in the first positive direction X1 is defined as magnetic ribbon 40B. Furthermore, the magnetic ribbon 40 adjacent to the magnetic ribbon 40B in the first positive direction X1 is defined as magnetic ribbon 40C.

The magnetic ribbon 40 adjacent to the magnetic ribbon 40A in the second positive direction Y1 is defined as magnetic ribbon 40D. The magnetic ribbon 40 adjacent to the magnetic ribbon 40D in the first positive direction X1 is defined as magnetic ribbon 40E. The magnetic ribbon 40 adjacent to the magnetic ribbon 40E in the first positive direction X1 is defined as magnetic ribbon 40F.

The magnetic ribbon 40 adjacent to the magnetic ribbon 40D in the second positive direction Y1 is defined as magnetic ribbon 40G. The magnetic ribbon 40 adjacent to the magnetic ribbon 40G in the first positive direction X1 is defined as magnetic ribbon 40H. The magnetic ribbon 40 adjacent to the magnetic ribbon 40H in the first positive direction X1 is defined as magnetic ribbon 40I.

In the first portion P1, the non-magnetic film 70 is located at the end of the first positive direction X1 along the coordinate axis X and at the end of the first negative direction X2, which is the opposite direction to the first positive direction X1. The non-magnetic film 70 covers the entire area of both end faces of the magnetic ribbon 40 in the direction along the coordinate axis X. The non-magnetic film 70 also covers the entire area of both end faces of the non-magnetic layer 50 in the direction along the coordinate axis X. Furthermore, the non-magnetic film 70 covers the entire area of both end faces of the non-magnetic portion 60 in the direction along the coordinate axis X. Therefore, all end faces of the first positive direction X1 along the coordinate axis X in the first portion P1 are composed of the non-magnetic film 70. Similarly, all end faces of the first negative direction X2 along the coordinate axis X in the first portion P1 are composed of the non-magnetic film 70. The non-magnetic film 70 is made of a non-magnetic material. In this embodiment, the material of the non-magnetic film 70 is the same as that of the non-magnetic layer 50.

1, when viewed from the first portion P1, the second portion P2 is located in a third positive direction Z1, which is the opposite direction to the third negative direction Z2 along the coordinate axis Z. When viewed from the direction along the coordinate axis Z, the second portion P2 has the same square shape as the first portion P1.

The second portion P2 is composed of an inductor wiring 30, a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films .
2, the inductor wiring 30 includes a first straight portion 32, a second straight portion 33, and a third straight portion 34. The first straight portion 32 has a rectangular shape when viewed from the direction along the coordinate axis Z, and extends linearly in the direction along the coordinate axis Y. Note that in FIG. 2, the position of the inductor wiring 30 on the first portion P1 is virtually illustrated by a dotted line.

The end face of the first straight portion 32 in the second negative direction Y2 constitutes a part of the outer surface of the second portion P2 and is exposed from the element body 20. The side face of the first straight portion 32 in the first negative direction X2 is located between the end of the first positive direction X1 and the end of the first negative direction X2 of the magnetic ribbon 40A of the first portion P1. The side face of the first straight portion 32 in the first positive direction X1 is located between the end of the first negative direction X2 and the end of the first positive direction X1 of the magnetic ribbon 40B. When viewed from the direction along the coordinate axis Z, the first straight portion 32 extends along the nonmagnetic portion 60 that fills the gap between the magnetic ribbon 40A and the magnetic ribbon 40B and the nonmagnetic portion 60 that fills the gap between the magnetic ribbon 40D and the magnetic ribbon 40E. The end face of the first straight portion 32 in the second positive direction Y1 is located between the end of the second positive direction Y1 and the end of the second negative direction Y2 of the magnetic ribbon 40D.

The second straight portion 33 is connected to the end face of the first straight portion 32 in the second positive direction Y1. The second straight portion 33 has a rectangular shape when viewed from the direction along the coordinate axis Z, and extends linearly in the direction along the coordinate axis X. Therefore, the inductor wiring 30 is bent 90 degrees at the boundary between the first straight portion 32 and the second straight portion 33.

The end face of the second straight portion 33 in the first negative direction X2 is flush with the side face of the first straight portion 32 in the first negative direction X2. The side face of the second straight portion 33 in the second negative direction Y2 is flush with the end face of the first straight portion 32 in the second positive direction Y1. That is, the side face of the second straight portion 33 in the second positive direction Y1 is located between the end of the magnetic ribbon 40H in the second negative direction Y2 and the end of the second positive direction Y1 of the first portion P1. The side face of the second straight portion 33 in the second negative direction Y2 is located between the end of the magnetic ribbon 40E in the second negative direction Y2 and the end of the second positive direction Y1. When viewed from the direction along the coordinate axis Z, the second straight portion 33 extends along the nonmagnetic portion 60 that fills the gap between the magnetic ribbon 40E and the magnetic ribbon 40H. An end face of the second straight portion 33 in the first positive direction X1 is located between an end of the magnetic ribbon 40F in the first positive direction X1 and an end of the magnetic ribbon 40F in the first negative direction X2.

The third straight portion 34 is connected to the side surface of the second straight portion 33 in the second positive direction Y1. The third straight portion 34 has a rectangular shape when viewed from the direction along the coordinate axis Z, and extends linearly in the direction along the coordinate axis Y. Therefore, the inductor wiring 30 is bent 90 degrees at the boundary between the second straight portion 33 and the third straight portion 34.

The side of the third straight portion 34 in the first positive direction X1 is flush with the end face of the second straight portion 33 in the first positive direction X1. The side of the third straight portion 34 in the first negative direction X2 is located between the end of the magnetic ribbon 40H in the first portion P1 in the first positive direction X1 and the end of the magnetic ribbon 40H in the first negative direction X2. When viewed from the direction along the coordinate axis Z, the third straight portion 34 extends along the non-magnetic portion 60 that fills the gap between the magnetic ribbon 40H and the magnetic ribbon 40I. The end face of the third straight portion 34 in the second positive direction Y1 constitutes a part of the outer surface of the second portion P2 and is exposed to the outside of the base body 20.

As described above, the inductor wiring 30 as a whole is bent once at 90 degrees to one side and once at 90 degrees to the other side. That is, the central axis CA of the inductor wiring 30 has two portions extending in the direction along the coordinate axis Y and one portion extending in the direction along the coordinate axis X.

The material of the inductor wiring 30 is a conductive material. The conductive material is, for example, Cu, Ag, Au, Al, or an alloy thereof. In this embodiment, the material of the inductor wiring 30 is Cu.

In the second portion P2, the portion that is not the inductor wiring 30 is composed of a plurality of magnetic ribbons 40, a plurality of non-magnetic layers 50, a plurality of non-magnetic portions 60, and a plurality of non-magnetic films 70, similar to the first portion P1.

As shown in FIG. 3, in a cross-sectional view perpendicular to the central axis CA, each magnetic ribbon 40 of the second portion P2 is stacked in a direction along the coordinate axis Z. The dimensions of the multiple magnetic ribbons 40 in the direction along the coordinate axis Z are all the same. Each magnetic ribbon 40 of the second portion P2 is lined up in threes along the coordinate axis X. Furthermore, each magnetic ribbon 40 of the second portion P2 is lined up in threes along the coordinate axis X. When viewed from the direction along the coordinate axis Z, each magnetic ribbon 40 of the second portion P2 has a shape that resembles a cut-out portion of each magnetic ribbon 40 aligned in the same manner as the first portion P1, corresponding to the inductor wiring 30.

Similar to the first portion P1 described above, the nonmagnetic layer 50 of the second portion P2 is located between adjacent magnetic ribbons 40 in the direction along the coordinate axis Z. That is, as shown in FIG. 3, the magnetic ribbons 40 and the nonmagnetic layers 50 are alternately stacked in the direction along the coordinate axis Z, similar to the first portion P1. Also, when viewed from the direction along the coordinate axis Z, each nonmagnetic layer 50 has the same shape as the shape of the adjacent magnetic ribbons 40.

The nonmagnetic portion 60 of the second portion P2 is located between the magnetic ribbons 40 that are lined up at the same position along the coordinate axis Z. The nonmagnetic portion 60 fills all of the space between the magnetic ribbons 40 that are lined up at the same position in the direction along the coordinate axis Z. The position of the nonmagnetic portion 60 of the second portion P2 is continuous with the nonmagnetic portion 60 of the first portion P1 when viewed from the direction along the coordinate axis Z. Note that in the second portion P2, the nonmagnetic portion 60 is not present between the inductor wiring 30 and the magnetic ribbons 40.

In the second portion P2, the nonmagnetic film 70 is located at an end in the first positive direction X1 and an end in the first negative direction X2 along the coordinate axis X. The nonmagnetic film 70 in the second portion P2 is continuous with the nonmagnetic film 70 in the first portion P1. When viewed from the direction along the coordinate axis Z, the inductor wiring 30, the nine magnetic ribbons 40, the eight nonmagnetic portions 60, and the two nonmagnetic films 70 form a square shape.

The third portion P3 is located in the third positive direction Z1 of the second portion P2. When viewed from the coordinate axis Z, the third portion P3 has the same square shape as the first portion P1. The third portion P3 is composed of a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films 70. In this embodiment, the third portion P3 has a structure symmetrical to the first portion P1 with respect to the second portion P2, so a detailed description is omitted. In this way, the base body 20 includes a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films 70.

(Regarding the positional relationship between the inductor wiring and the non-magnetic part)
As shown in FIG. 2, the first end of the inductor wiring 30 along the central axis CA is the end of the first straight portion 32 in the second negative direction Y2. The second end of the inductor wiring 30 opposite to the first end is the end of the third straight portion 34 in the second positive direction Y1. In addition, within the range from the first end to the second end of the inductor wiring 30, there are a nonmagnetic portion 60 located between the magnetic ribbon 40A and the magnetic ribbon 40B, and a nonmagnetic portion 60 located between the magnetic ribbon 40D and the magnetic ribbon 40E. In addition, within the range from the first end to the second end of the inductor wiring 30, there are a nonmagnetic portion 60 located between the magnetic ribbon 40E and the magnetic ribbon 40H, and a nonmagnetic portion 60 located between the magnetic ribbon 40F and the magnetic ribbon 40I. In addition, within the range from the first end to the second end of the inductor wiring 30, there is a nonmagnetic portion 60 located between the magnetic ribbon 40H and the magnetic ribbon 40I. Therefore, when viewed from the direction along the second axis AX2, i.e., the coordinate axis Z, the nonmagnetic portion 60 exists within the range from the positive end to the negative end along the first axis AX1 of the inductor wiring 30 over the entire range from the first end to the second end of the inductor wiring 30 along the central axis CA. In other words, when viewed from the direction along the coordinate axis Z, the nonmagnetic portion 60 extends without interruption from the first end to the second end of the inductor wiring 30.

Furthermore, in this embodiment, when viewed from a direction along the coordinate axis Z, the central axis CA of the inductor wiring 30 passes through the nonmagnetic portion 60. In other words, in a cross-sectional view perpendicular to the central axis CA, the position of the central axis CA is the same as the position of the nonmagnetic portion 60 in the direction along the first axis AX1.

(Simulation results)
Next, a description will be given of the results of a simulation in which the characteristics obtained for inductor component 10 are compared with those of the inductor components of Comparative Example 1 and Reference Examples 1 to 6. Femtet (registered trademark) from Murata Software Co., Ltd. was used for the simulation.

First, the conditions of the simulation will be described.
The software used is Femtet2019 manufactured by Murata Software. The solver is a static magnetic field analysis. The model is three-dimensional. The standard mesh size is 0.25 mm. The material of the inductor wiring 30 is copper.

Next, we will explain the conditions for the dimensions and position of the model of the inductor component 10 of Example 1 used in the simulation. Note that the shape of the model is the inductor component 10 in the first embodiment described above as Example 1.

The dimension of the inductor wiring 30 in the direction along the first axis AX1 is 0.5 mm. The dimension of the inductor wiring 30 in the direction along the coordinate axis Z is 0.1 mm. The dimension of the inductor wiring 30 in the direction along the central axis CA is 4.42 mm.

The dimension of the magnetic ribbon 40 in the direction along the coordinate axis X is 990 μm. The dimension of the magnetic ribbon 40 in the direction along the coordinate axis Y is 990 μm. The dimension of the magnetic ribbon 40 in the direction along the coordinate axis Z is 20 μm. Note that the location where the inductor wiring 30 is arranged is configured so that the inductor wiring 30 is given priority and part of the magnetic ribbon 40 is missing.

The dimension of the nonmagnetic layer 50 in the direction along the coordinate axis X is 20 μm. The dimension of the nonmagnetic layer 50 in the direction along the coordinate axis Y is 20 μm. The dimension of the nonmagnetic layer 50 in the direction along the coordinate axis Z is 2.0 μm. Note that, in the location where the inductor wiring 30 is arranged, the inductor wiring 30 is given priority, and a portion of the nonmagnetic layer 50 is missing.

The number of magnetic ribbons 40 stacked in the direction along the coordinate axis Z is 41. The number of magnetic ribbons 40 lined up in the direction along the coordinate axis X is 3. The number of magnetic ribbons 40 lined up in the direction along the coordinate axis Y is 3.

The dimension of the inductor component 10 along the coordinate axis X is 3030 μm. In the simulation, the element body 20 has a film of the same nonmagnetic material as the nonmagnetic film 70 at both ends along the central axis CA. The dimension of the film along the central axis CA is 10 μm. Therefore, the dimension of the element body 20 along the coordinate axis Y is 3030 μm. The dimension of the inductor component 10 along the coordinate axis Z is 902 μm. In this simulation, the inductor wiring 30 protrudes by 190 μm from the end face of the element body 20 in the second positive direction Y1, and the inductor wiring 30 protrudes by 190 μm from the end face of the element body 20 in the second negative direction Y2.

In the simulation, the relative permeability μr of the magnetic ribbon 40 was set to 7000, and the saturation magnetic flux density Bs was set to 1.3 T. The relative permeability μr of the nonmagnetic material of the nonmagnetic layer 50, the nonmagnetic portion 60, and the nonmagnetic film 70 was set to 1.

The unit of wiring resistance Rdc is mΩ, and it is assumed to be proportional to the wiring cross-sectional area. The absolute value standard is 0.43Ω for a wiring cross-section of 1.0 mm x 0.1 mm, obtained by a separate electromagnetic field analysis simulation.

In Example 1, the magnetic material is an amorphous metal magnetic ribbon composed of Fe, Si, Cr, and B elements. The magnetic material BH curve used satisfies B = Bs x tanh (μ0 x μr x H/Bs). The magnetic material BH curve uses a portion with a relative magnetic permeability μr of 1 or more so as not to fall below the vacuum permeability, and is further extrapolated to the vacuum permeability using the functions of Femtet2019.

On the other hand, as shown in Figure 5, in the inductor component 610 of Comparative Example 1, the base body 620 is a composite material of a magnetic material and a non-magnetic material. In the simulation, the base body 620 is a metal composite material of amorphous metal particles consisting of Fe, Si, Cr and B elements and a resin. The relative permeability μr of the base body 620 is 24, the metal magnetic material filling rate is 70%, and the saturation magnetic flux density Bs is 0.91 T. The other conditions are the same as those of the inductor component 10 of Example 1.

Next, reference examples 1 to 6 will be described.
As shown in FIG. 6 , the inductor component 710 of Reference Example 1 differs from the inductor component 10 of Example 1 mainly in the shape of the inductor wiring 30 and the number of magnetic ribbons 40 .

In the inductor component 710, two magnetic ribbons 740 are arranged in the direction in which the coordinate axis X extends. Two magnetic ribbons 740 are arranged in the direction in which the coordinate axis Y extends. When viewed from the direction along the coordinate axis Z, the magnetic ribbon 740 located closest to the first negative direction X2 and the second negative direction Y2 is defined as the magnetic ribbon 740A. The magnetic ribbon 740 adjacent to the magnetic ribbon 740A in the first positive direction X1 is defined as the magnetic ribbon 740B. The magnetic ribbon 740 adjacent to the magnetic ribbon 740A in the second positive direction Y1 is defined as the magnetic ribbon 740D. The magnetic ribbon 740 adjacent to the magnetic ribbon 740D in the first positive direction X1 is defined as the magnetic ribbon 740E. The non-magnetic portion 760 fills all the spaces between the adjacent magnetic ribbons 740.

The inductor wiring 730 is composed of a first straight portion 732 , a curved portion 733 , and a second straight portion 734 .
The first straight portion 732 extends linearly in a direction along the coordinate axis Y. The dimension of the first straight portion 732 along the first axis AX1, i.e., the direction along the coordinate axis X, is 0.5 mm, which is approximately half that of the magnetic ribbon 40. The dimension of the first straight portion 732 along the coordinate axis Y is 1.0 mm. The center axis CA of the first straight portion 732 is disposed between the end in the first positive direction X1 and the end in the first negative direction X2 of the magnetic ribbon 740A.

When viewed from the coordinate axis Z, the end of the first straight portion 732 in the second negative direction Y2 coincides with the end of the magnetic ribbon 740A in the second negative direction Y2. In other words, the end of the first straight portion 732 in the second negative direction Y2 is exposed to the outer surface of the base body 720.

The first end of the curved portion 733 in the direction along the central axis CA is connected to the end of the first straight portion 732 in the second positive direction Y1. The curved portion 733 is wound one turn in a spiral shape. That is, as shown in FIG. 7, the curved portion 733 is wound one turn when viewed from the coordinate axis Z while proceeding in the third positive direction Z1. Therefore, as shown in FIG. 6, when viewed from the coordinate axis Z, the first end and the second end of the curved portion 733 in the direction along the central axis CA are in the same position. On the other hand, the first end and the second end of the curved portion 733 in the direction along the central axis CA are in different positions in the direction along the coordinate axis Z.

The second straight portion 734 extends linearly in a direction along the coordinate axis Y. The end of the second straight portion 734 in the second negative direction Y2 is connected to a second end of the curved portion 733 in a direction along the central axis CA. The end of the second straight portion 734 in the second positive direction Y1 coincides with the end of the second positive direction Y1 of the magnetic ribbon 740D. In other words, the end of the second positive direction Y1 of the second straight portion 734 is exposed to the outer surface of the base body 720.

Thus, the inductor wiring 730 has a portion where the central axis CA extends linearly and a portion where it extends spirally. However, when viewed in a direction along the coordinate axis Z, the nonmagnetic portion 760 is not present in the range from the positive end to the negative end along the first axis AX1 of the inductor wiring 730 in most of the range from the first end to the second end of the inductor wiring 730 along the central axis CA.

Next, we will explain the inductor component of Reference Example 2. The inductor component of Reference Example 2 differs from the inductor component 710 of Reference Example 1 in that the element body 720 is entirely made of a composite material of magnetic material and non-magnetic material.

Next, conditions regarding the dimensions and position of the model of inductor element 710 of reference example 1 used in the simulation will be described.
The dimension of the inductor wiring 730 in the direction along the first axis AX1 is 0.5 mm. The dimension of the inductor wiring 730 in the direction along the coordinate axis Z is 0.1 mm. The dimension of the inductor wiring 730 in the direction along the central axis CA is 5.16 mm.

The dimension of the magnetic ribbon 740 along the coordinate axis X is 990 μm. The dimension of the magnetic ribbon 740 along the coordinate axis Y is 990 μm. The dimension of the magnetic ribbon 740 along the coordinate axis Z is 20 μm.

The dimension of the nonmagnetic layer 750 in the direction along the coordinate axis X is 20 μm. The dimension of the nonmagnetic layer 750 in the direction along the coordinate axis Y is 20 μm. The dimension of the nonmagnetic layer 750 in the direction along the coordinate axis Z is 2.0 μm. Note that, in the location where the inductor wiring 730 is arranged, the inductor wiring 730 is given priority, and a portion of the nonmagnetic layer 750 is missing.

The number of magnetic ribbons 740 stacked in the direction along coordinate axis Z is 41. The number of magnetic ribbons 740 lined up in the direction along coordinate axis X is 2. The number of magnetic ribbons 740 lined up in the direction along coordinate axis Y is 2.

The dimension of the inductor component 710 along the coordinate axis X is 2020 μm. In the simulation, the element body 20 has a film of the same nonmagnetic material as the nonmagnetic film 70 at both ends along the central axis CA. The dimension of the film along the central axis CA is 10 μm. Therefore, the dimension of the element body 720 along the coordinate axis Y is 2020 μm. The dimension of the inductor component 710 along the coordinate axis Z is 902 μm. In this simulation, the inductor wiring 30 protrudes by 190 μm from the end face of the element body 20 in the second positive direction Y1, and the inductor wiring 30 protrudes by 190 μm from the end face of the element body 20 in the second negative direction Y2.

In the simulation, the relative permeability μr of the magnetic ribbon 740 was set to 7000, and the saturation magnetic flux density Bs was set to 1.3 T. The relative permeability μr of the nonmagnetic material of the nonmagnetic layer 750, the nonmagnetic portion 760, and the nonmagnetic film 770 was set to 1.

The unit of wiring resistance Rdc is mΩ, and it is assumed to be proportional to the wiring cross-sectional area. The absolute value standard is 0.43Ω for a wiring cross-section of 1.0 mm x 0.1 mm, obtained by a separate electromagnetic field analysis simulation.

In Reference Example 1, the magnetic material is an amorphous metal magnetic ribbon composed of Fe, Si, Cr, and B elements. The magnetic material BH curve used satisfies B = Bs x tanh (μ0 x μr x H/Bs). The magnetic material BH curve uses a portion with a relative magnetic permeability μr of 1 or more so as not to fall below the vacuum permeability, and is further extrapolated to the vacuum permeability using the functions of Femtet2019.

On the other hand, in the simulation of Reference Example 2, the element body 720 was a metal composite material of amorphous metal particles consisting of Fe, Si, Cr, and B elements, and resin. The relative permeability μr of the element body 720 was 24, the metal magnetic material filling rate was 70%, and the saturation magnetic flux density Bs was 0.91 T. The other conditions were the same as those of the inductor component 710 of Reference Example 1.

Next, we will explain the inductor component 810 of reference example 3. As shown in Figure 8, the inductor component 810 of reference example 3 has a different shape of the inductor wiring 730 compared to the inductor component 710 of reference example 1.

The inductor wiring 830 of the inductor element 810 is composed of a first straight portion 832 , a curved portion 833 , and a second straight portion 834 .
The first straight portion 832 extends linearly in a direction along the coordinate axis Y. The dimension of the first straight portion 832 along the first axis AX1, i.e., the direction along the coordinate axis X, is 0.5 mm, which is approximately half that of the magnetic ribbon 740. The dimension of the first straight portion 832 along the coordinate axis Y is 1.0 mm. The center axis CA of the first straight portion 832 is disposed between the end in the first positive direction X1 and the end in the first negative direction X2 of the magnetic ribbon 740A.

When viewed from the coordinate axis Z, the first end of the first straight portion 832 in the direction along the central axis CA, i.e., the end in the second negative direction Y2, coincides with the end in the second negative direction Y2 of the magnetic ribbon 740A. Therefore, the end in the second negative direction Y2 of the first straight portion 832 is exposed to the outer surface of the base body 720.

The first end of the curved portion 833 in the direction along the central axis CA is connected to the second end of the first straight portion 832 in the direction along the central axis CA, i.e., the end in the second positive direction Y1. The curved portion 833 is wound 180 degrees when viewed from the direction along the coordinate axis Z. That is, the curved portion 833 is C-shaped convex in the second positive direction Y1 when viewed from the direction along the coordinate axis Z. The curved portion 833 also extends at the same position in the direction along the coordinate axis Z as the first straight portion 832. The second end of the curved portion 833 in the direction along the central axis CA is located in the first positive direction X1 from the center of the inductor component 810 in the direction along the coordinate axis X.

The second straight portion 834 is linear and extends in a direction along the coordinate axis Y. A first end of the central axis CA of the second straight portion 834, i.e., the end in the second positive direction Y1, is connected to a second end of the curved portion 833 in a direction along the central axis CA. When viewed from a direction along the coordinate axis Z, the second end of the second straight portion 834 in a direction along the central axis CA, i.e., the end in the second negative direction Y2, coincides with the end of the magnetic ribbon 740B in the second negative direction Y2.

Thus, the inductor wiring 830 has a portion where the central axis CA extends in a straight line and a portion where it extends in a curved line. However, when viewed in a direction along the coordinate axis Z, the nonmagnetic portion 760 is not present in the range from the positive end to the negative end along the first axis AX1 of the inductor wiring 830 in most of the range from the first end to the second end of the inductor wiring 830 along the central axis CA.

Next, we will explain the inductor component of Reference Example 4. The inductor component of Reference Example 4 differs from the inductor component 810 of Reference Example 3 in that the element body 720 is entirely made of a composite material of magnetic material and non-magnetic material.

Next, conditions regarding the dimensions and position of the model of inductor element 810 of Reference Example 3 used in the simulation will be described.
The dimension of the inductor wiring 830 in the direction along the first axis AX1 is 0.5 mm. The dimension of the inductor wiring 830 in the direction along the coordinate axis Z is 0.1 mm. The dimension of the inductor wiring 830 in the direction along the central axis CA is 3.59 mm.

The other dimensions are the same as those of the inductor component 710 of Reference Example 1. In this simulation, the simulation is performed with both ends of the inductor wiring 30 protruding 190 μm from the end face of the element body 20 in the second negative direction Y2.

On the other hand, in the simulation of Reference Example 4, the element body 720 was a metal composite material of amorphous metal particles consisting of Fe, Si, Cr, and B elements, and resin. The relative permeability μr of the element body 720 was 24, the metal magnetic material filling rate was 70%, and the saturation magnetic flux density Bs was 0.91 T. The other conditions were the same as those of the inductor component 810 of Reference Example 3.

Next, we will explain the inductor component 910 of reference example 5. As shown in Figure 9, the inductor component 910 of reference example 5 has a different shape of the inductor wiring 730 compared to the inductor component 710 of reference example 1.

In the inductor element 910 , the inductor wiring 930 has a first straight portion 932 , a second straight portion 933 , and a third straight portion 934 .
The first straight portion 932 extends linearly in a direction along the coordinate axis Y. The dimension of the first straight portion 932 along the first axis AX1, i.e., the direction along the coordinate axis X, is 0.5 mm, which is approximately half that of the magnetic ribbon 740. The center axis CA of the first straight portion 932 is disposed between the end in the first positive direction X1 and the end in the first negative direction X2 of the magnetic ribbon 740A.

The second straight portion 933 and the third straight portion 934 extend in the same manner as the second straight portion 33 and the third straight portion 34 in the inductor component 10 of Example 1. The third straight portion 934 is located between the end of the magnetic ribbon 740E in the first positive direction X1 and the end of the first negative direction X2.

In this way, the inductor wiring 930 has three parts in which the central axis CA extends linearly. However, in the range from the first end to the second end of the first straight portion 932 along the central axis CA, the nonmagnetic portion 760 does not exist within the range from the positive end to the negative end along the first axis AX1 of the first straight portion 932. In addition, in the range from the first end to the second end of the third straight portion 934 along the central axis CA, the nonmagnetic portion 760 does not exist within the range from the positive end to the negative end along the first axis AX1 of the third straight portion 934. Therefore, when viewed from the direction along the coordinate axis Z, the nonmagnetic portion 760 does not exist within the range from the positive end to the negative end along the first axis AX1 of the inductor wiring 930 in a part of the range from the first end to the second end of the inductor wiring 930 along the central axis CA.

Next, we will explain the inductor component of Reference Example 6. The inductor component of Reference Example 6 differs from the inductor component 910 of Reference Example 5 in that the element body 720 is entirely made of a composite material of magnetic material and non-magnetic material.

Next, conditions regarding the dimensions and position of the model of inductor element 910 of Reference Example 5 used in the simulation will be described.
The dimension of the inductor wiring 930 in the direction along the first axis AX1 is 0.5 mm. The dimension of the inductor wiring 830 in the direction along the coordinate axis Z is 0.1 mm. The dimension of the inductor wiring 830 in the direction along the central axis CA is 3.03 mm.

The other dimensions are similar to those of the inductor component 710 of the first reference example.
On the other hand, in the simulation of Reference Example 6, the element body 720 was a metal composite material of amorphous metal particles consisting of Fe, Si, Cr, and B elements, and resin. The element body 720 had a relative permeability μr of 24, a metal magnetic material filling rate of 70%, and a saturation magnetic flux density Bs of 0.91 T. The other conditions were the same as those of the inductor component 710 of Reference Example 1.

Next, the characteristic index calculated by the simulation will be described.
The unit of inductance L is nH, and the unit of DC superposition characteristic Isat is A. The DC superposition characteristic Isat is the current value Idc at which the inductance L decreases by 20% from the initial inductance Lin, which is the inductance L at a current value Idc of 0.001A.

As shown in Figure 4, the initial inductance Lin and DC superposition characteristic Isat were calculated for Example 1, Comparative Example 1, and Reference Examples 1 to 6. Here, we compare the characteristic indicators for models that differ only in the configuration of the element body. First, comparing Example 1 and Comparative Example 1, the initial inductance Lin of Example 1 is 20% or more larger than the initial inductance Lin of Comparative Example 1. In addition, the DC superposition characteristic Isat of Example 1 is 20% or more larger than the DC superposition characteristic Isat of Comparative Example 1.

Comparing Reference Example 1 and Reference Example 2, the initial inductance Lin of Reference Example 1 is more than twice as large as the initial inductance Lin of Reference Example 2. On the other hand, the DC superposition characteristic Isat of Reference Example 1 is smaller than the DC superposition characteristic Isat of Reference Example 2.

Comparing Reference Example 3 and Reference Example 4, the initial inductance Lin of Reference Example 3 is more than twice as large as the initial inductance Lin of Reference Example 4. On the other hand, the DC superposition characteristic Isat of Reference Example 3 is smaller than the DC superposition characteristic Isat of Reference Example 4.

Comparing Reference Example 5 and Reference Example 6, the initial inductance Lin of Reference Example 5 is more than twice as large as the initial inductance Lin of Reference Example 6. On the other hand, the DC superposition characteristic Isat of Reference Example 5 is smaller than the DC superposition characteristic Isat of Reference Example 6.

In Reference Examples 1 to 6, when viewed from the direction along coordinate axis Z, the nonmagnetic portion 760 does not exist within the entire range from the first end to the second end of the inductor wiring along central axis CA, nor within the range from the positive end to the negative end along first axis AX1 of the inductor wiring. In these cases, by configuring the element body as a laminated structure of magnetic ribbons 740 and nonmagnetic layers 750 rather than a metal composite, the initial inductance Lin can be improved, but the DC superposition characteristic Isat is reduced.

On the other hand, in Example 1 and Comparative Example 1, when viewed from the direction along the coordinate axis Z, the nonmagnetic portion 60 exists within the range from the positive end to the negative end along the first axis AX1 of the inductor wiring 30 in the entire range from the first end to the second end of the inductor wiring 30 along the central axis CA. In other words, the nonmagnetic portion 60 exists continuously from the first end to the second end of the inductor wiring 30 along the central axis CA in a plan view from the direction along the coordinate axis Z without departing from the range of existence of the inductor wiring 30. In this case, by making the configuration of the element body a laminated structure of the magnetic thin ribbon 40 and the nonmagnetic layer 50, rather than a metal composite as in Comparative Example 1, both the initial inductance Lin and the DC superposition characteristic Isat can be improved.

(Effects of the First Embodiment)
Next, the effects of the first embodiment will be described.
(1-1) According to the inductor component 10 of the first embodiment, the element body 20 includes a plurality of magnetic ribbons 40 stacked along the coordinate axis Z. The inductor wiring 30 extends along the main surface MF of the magnetic ribbons 40. The inductor wiring 30 has two bent and extending portions. The magnetic ribbons 40 are aligned along the coordinate axis X, i.e., the third axis AX3. The magnetic ribbons 40 are aligned along the coordinate axis Y, i.e., the fourth axis AX4. The nonmagnetic portion 60 made of a nonmagnetic material fills the gaps between the magnetic ribbons 40 adjacent to each other in the direction along the third axis AX3 and the gaps between the magnetic ribbons 40 adjacent to each other in the direction along the fourth axis AX4.

Here, in the inductor component 10, when viewed from the direction along the coordinate axis Z, the nonmagnetic portion 60 is present within the entire range from the first end to the second end of the inductor wiring 30 along the central axis CA, and within the range from the positive end to the negative end along the first axis AX1 of the inductor wiring 30. Therefore, as shown as the simulation results in Figure 4, both the initial inductance Lin and the DC superposition characteristic Isat can be improved compared to when the element body 20 is entirely made of metal composite material.

(1-2) According to the inductor component 10 of the first embodiment described above, the multiple magnetic ribbons 40 are stacked along the second axis AX2. Therefore, the inductor component 10 has a three-dimensional regular structure of the magnetic ribbons 40 that are stacked along the coordinate axis Z. This can further improve the characteristics of the inductor component 10.

(1-3) According to the first embodiment, the dimensions of the multiple magnetic ribbons 40 in the direction along the second axis AX2 are all equal. Therefore, the magnetic flux density within each magnetic ribbon 40 is uniform, and the magnetic flux is less likely to concentrate and saturate at a specific location. As a result, the magnetic flux density is improved when viewed throughout the entire element body 20.

(1-4) According to the first embodiment described above, the nonmagnetic layer 50 made of a nonmagnetic material is located between adjacent magnetic ribbons 40 along the second axis AX2. Therefore, it is easy to realize a regular structure of the magnetic ribbons 40 and the nonmagnetic layer 50 in the direction along the second axis AX2.

(1-5) According to the first embodiment described above, the dimensions of the multiple nonmagnetic layers 50 in the direction along the second axis AX2 are all equal. Therefore, the magnetic flux disturbance occurring between adjacent magnetic ribbons 40 in the direction along the second axis AX2 can be uniformized.

(1-7) According to the first embodiment, the dimensions of the multiple magnetic ribbons 40 in the direction along the third axis AX3 are all equal. Therefore, it is easy to regularly arrange the multiple magnetic ribbons 40 in the direction along the third axis AX3.

(1-8) According to the first embodiment, the dimensions of the multiple magnetic ribbons 40 in the direction along the fourth axis AX4 are all equal. Therefore, it is easy to regularly arrange the multiple magnetic ribbons 40 in the direction along the fourth axis AX4.

(1-9) According to the first embodiment described above, the shape of the magnetic ribbon 40 is rectangular, i.e., quadrangular, when viewed from the direction along the coordinate axis Z. Therefore, it is easy to arrange the magnetic ribbons 40 regularly when viewed from the direction along the coordinate axis Z. As a result, it is easy to make the nonmagnetic portions 60 linear when viewed from the direction along the coordinate axis Z. When the nonmagnetic portions 60 are linear, the design freedom of the wiring location and dimensions of the inductor wiring 30 is increased.

<Regarding the Second Embodiment>
(Inductor components)
The inductor component 110 in the second embodiment differs from the inductor component 10 in the first embodiment mainly in that the magnetic ribbons 40, the nonmagnetic layer 50, the nonmagnetic portion 60, and the nonmagnetic film 70 in the base body 120 are sintered bodies, and in the configuration of the second portion P2. The main differences from the inductor component 10 in the first embodiment will be described below.

The magnetic ribbon 40 is a flat plate made of a sintered magnetic material. The magnetic ribbon 40 contains at least one of Fe, Ni, an alloy containing Fe and Si elements, an alloy containing Fe and Ni elements, and an alloy containing Fe and Co elements. In this embodiment, the magnetic ribbon 40 is a metal magnetic material containing an alloy containing Fe and Ni elements. Fe is metallic iron, and Ni is metallic nickel.

The non-magnetic layer 50 is made of a sintered non-magnetic material. Examples of the non-magnetic material include alumina, silica, crystallized glass, and amorphous glass. The non-magnetic portion 60 and the non-magnetic film 70 are made of a sintered non-magnetic material.

As shown in FIG. 10, the second portion P2 is composed of an inductor wiring 30 and two composite parts 80. The composite part 80 is composed of powder-like magnetic particles 81 made of a magnetic material and a non-magnetic base material 82 made of a non-magnetic material. The magnetic particles 81 are metal magnetic particles containing, for example, Fe, Ni, Co, Cr, Cu, Al, Si, B, P, etc. In this embodiment, the magnetic particles 81 are metal particles of an alloy containing Fe, Si, and Cr. The non-magnetic base material 82 is, for example, a sintered body of glass, alumina, or the like.

The composite portion 80 occupies the magnetic ribbon 40, the nonmagnetic layer 50, and the nonmagnetic portion 60 in the inductor component 10 of the first embodiment. Therefore, in the second portion P2, two composite portions 80 are arranged on either side of the inductor wiring 30.

(Manufacturing method of inductor components)
Next, a method for manufacturing the inductor element 110 will be described.
As shown in FIG. 11, the manufacturing method of the inductor component 110 includes a first sheet preparation process S11, a second sheet preparation process S12, a lamination process S13, a pressure bonding process S14, a singulation process S15, a sintering process S16, and a coating process S17.

First, the first sheet preparation step S11 is performed. The first sheet 210 has a pre-sintered non-magnetic layer 211 and a magnetic layer 212 containing a metal magnetic powder 212M, which is a magnetic material. As shown in FIG. 12, in manufacturing the first sheet 210, a film made of PET is first prepared as the first substrate 91. The first substrate 91 may be a substrate made of PET, alumina, or ferrite that is removed when the part is completed, or may be a substrate made of glass that remains as a pre-sintered non-magnetic layer 211. In the following description, the two main surfaces of the first substrate 91 are arranged so as to be perpendicular to the coordinate axis Z, and a cross section perpendicular to the central axis CA is shown. In addition, in FIG. 12 to FIG. 20, for ease of understanding, the dimensional ratio is significantly changed from that in FIG. 10.

A non-magnetic paste made of a non-magnetic and insulating non-magnetic material is applied to the main surface of the first substrate 91 facing the third positive direction Z1 along the coordinate axis Z and formed into a sheet. This forms the pre-sintered non-magnetic layer 211. The pre-sintered non-magnetic layer 211 is made of a non-magnetic material containing, for example, alumina, silica, crystallized glass, amorphous glass, etc.

13, a metal magnetic paste containing metal magnetic powder 212M, which is a magnetic material, is applied to the surface of the pre-sintered non-magnetic layer 211 facing the third positive direction Z1 along the coordinate axis Z. In this embodiment, the metal magnetic powder 212M is an FeNi alloy containing Fe and Ni elements. This forms the magnetic layer 212. The magnetic layer 212 is made of a metal magnetic paste containing the metal magnetic powder 212M in the resin 92.

14, a groove 212H is formed in the magnetic layer 212 by laser processing. The groove 212H penetrates the magnetic layer 212. When viewed from a direction along the coordinate axis Z, a portion of the pre-sintered non-magnetic layer 211 is exposed from the groove 212H in the third positive direction Z1 along the coordinate axis Z. When viewed from a direction along the coordinate axis Z, the groove 212H divides the magnetic layer 212 in the directions along the third axis AX3 and the fourth axis AX4.

15, the grooves 212H formed in the magnetic layer 212 are filled with a non-magnetic paste made of a non-magnetic and insulating material by printing or the like. This forms the non-magnetic portions 213 in the grooves. At the same time, the magnetic layer 212 is divided in the direction along the third axis AX3 and in the direction along the fourth axis AX4 to form a plurality of split magnetic layers 212D. The split magnetic layers 212D are then formed into sheets to prepare the first sheets 210. The first sheets 210 are prepared in the same number as the number of stacked magnetic ribbons 40 of the inductor component 10 to be manufactured.

Next, the second sheet preparation process S12 is performed. The second sheet 220 has a wiring pattern 221 and a negative pattern 222. First, in manufacturing the second sheet 220, a second substrate 93 is prepared as shown in FIG. 16. The second substrate 93 may be a substrate made of PET, alumina, or ferrite that is removed when the part is completed, or may be a substrate that remains, such as a pre-sintered non-magnetic layer 211 of glass. In the following description, the two main surfaces of the second substrate 93 are arranged so as to be perpendicular to the coordinate axis Z.

A non-magnetic paste made of a non-magnetic and insulating non-magnetic material is applied to the main surface of the second substrate 93 facing the third positive direction Z1 along the coordinate axis Z and formed into a sheet. This forms the pre-sintered non-magnetic layer 211.

Next, a conductive paste is applied partially by printing or the like to the main surface of the pre-sintered non-magnetic layer 211 facing the third positive direction Z1 along the coordinate axis Z. This forms the wiring pattern 221. The wiring pattern 221 is made of a conductive material. For example, it is made of a conductive paste of Ag or Cu.

In addition to printing such as screen printing, the method of forming the wiring pattern 221 may be a photolithography method using a photosensitive material, a plating method such as semi-additive, or a transfer method in which a wiring pattern formed on a separate sheet is transferred. In the case of a plating method or a transfer method, a resin-free metal film may be used as the material for the wiring pattern 221, rather than a conductive paste.

17, a negative paste is applied by printing or the like to the main surface of the pre-sintered non-magnetic layer 211 facing the third positive direction Z1 along the coordinate axis Z, where the wiring pattern 221 is not applied. This forms the negative pattern 222. Although not shown, the negative pattern 222 contains magnetic particles 81 and non-magnetic powder, which is the raw material of the non-magnetic base material 82. This prepares the second sheet 220. In this embodiment, the pre-sintered non-magnetic layer 211 serves as a sheet-like base material for forming the wiring pattern 221 and the negative pattern 222.

Next, the lamination process S13 is performed to laminate the prepared first sheet 210 and second sheet 220. As shown in FIG. 18, first, the first substrate 91 is peeled off from the first sheet 210, and the sheet is placed on a predetermined jig table (not shown) with the top and bottom directions of the sheet intact. Then, the wiring pattern 221 and the negative pattern 222 of the second sheet 220 are bonded to the surface of the wiring pattern 221 and the negative pattern 222 of the second sheet 220 that faces in the opposite direction to the surface of the pre-sintered non-magnetic layer 211 of the first sheet 210 that faces in the opposite direction to the surface of the pre-sintered non-magnetic layer 212 that is applied. As a result, the first sheet 210 is laminated in the third positive direction Z1 along the coordinate axis Z of the second sheet 220.

Similarly, the first substrate 91 is peeled off from another first sheet 210. Then, the surface of the first sheet 210 laminated on the second sheet 220 facing in the opposite direction to the surface adhered to the second sheet 220 is bonded to the surface of the pre-sintered non-magnetic layer 211 of the other first sheet 210 facing in the opposite direction to the surface on which the magnetic layer 212 is applied. Although not shown in the figure, the first sheets 210 are laminated the same number of times as the number of magnetic ribbons 40 to be laminated on the third portion P3 of the inductor component 10.

Next, the second substrate 93 is peeled off from the second sheet 220. Then, the surface of the second sheet 220 facing in the opposite direction to the surface on which the wiring pattern 221 of the pre-sintered non-magnetic layer 211 is applied is bonded to the surface of the magnetic layer 212 of the first sheet 210 facing in the opposite direction to the surface on which the pre-sintered non-magnetic layer 211 is applied. Then, the first substrate 91 is peeled off from the first sheet 210.

Similarly, the surface of the pre-sintered non-magnetic layer 211 of the first sheet 210 laminated on the second sheet 220 facing the opposite side to the surface on which the magnetic layer 212 is applied is bonded to the surface of the magnetic layer 212 of another first sheet 210 facing the opposite side to the surface on which the pre-sintered non-magnetic layer 211 is applied. Although not shown, the first sheets 210 are laminated by the number of magnetic ribbons 40 to be laminated on the first portion P1 of the inductor component 10. In this way, the first sheets 210 are repeatedly laminated on both main surfaces of the second sheet 220. That is, when forming the laminate 200, multiple split magnetic layers 212D are laminated.

Next, the pressing step S14 is performed. The first sheet 210 and the second sheet 220 that have been laminated in the lamination step S13 are pressed by a WIP or the like to be pressed together. This forms the laminate 200.

Next, the singulation process S15 is performed. As shown in FIG. 19, for example, the laminate 200 is singulated by dicing at a predetermined break line DL. This forms individual pieces 201 into which the laminate 200 is singulated. The individual pieces 201 are composed of a wiring pattern 221 and a divided magnetic layer 212D. The multiple individual pieces 201 are arranged in a matrix in the laminate 200 so as to line up in the direction along the third axis AX3 and the direction along the fourth axis AX4. In this embodiment, the individual piece 201 has one wiring pattern 221.

Next, the sintering step S16 is performed. As shown in FIG. 20, the individual parts 201 of the laminate 200 that have been singulated in the singulation step S15 are sintered by firing for a predetermined time. As a result, the wiring pattern 221 becomes the inductor wiring 30 of the sintered body. The negative pattern 222 becomes the composite part 80 of the sintered body. The pre-sintered non-magnetic layer 211 becomes the non-magnetic layer 50 of the sintered body. The groove non-magnetic part 213 becomes the non-magnetic part 60 of the sintered body. The metal magnetic powder 212M of the magnetic layer 212 becomes the metal magnetic material of the sintered body made of a magnetic material. Meanwhile, the resin contained in the individual parts 201 of the laminate 200 is vaporized by heating.

Next, a coating process S17 is performed. The surface including the break line DL diced in the singulation process S15 is covered with a non-magnetic film 70, which is a non-magnetic insulator. As a result, the individual pieces 201 become the inductor components 110. Note that the volume of the inductor components 110 becomes smaller than the volume of the individual pieces 201 by the sintering process S16.

(Operation of the second embodiment)
According to inductor component 110 of the second embodiment, metal magnetic powder 212M of magnetic layer 212 becomes a sintered body made of a magnetic material through sintering step S16.

(Effects of the Second Embodiment)
The second embodiment is mainly different from the first embodiment in that the magnetic ribbon 40 and the nonmagnetic layer 50 in the second portion P2 in the first embodiment are configured as a composite portion 80. In addition, the material of each component in the element body 120 in the first portion P1 and the third portion P3 is a sintered body material, but the magnetic ribbon 40 is a magnetic material, and the nonmagnetic layer 50, the nonmagnetic portion 60, and the nonmagnetic film 70 are nonmagnetic materials, as in the first embodiment. Therefore, the inductor component 110 in the second embodiment has a tendency similar to that of the simulation result of the inductor component 10 in the first embodiment. Therefore, according to the second embodiment, the effects (1-1) to (1-9) in the first embodiment described above are achieved. In addition, according to the second embodiment, the following effects are achieved.

(2-1) According to the second embodiment, the magnetic ribbon 40 is a sintered body. By using a sintered body as the magnetic ribbon 40, it is possible to alleviate distortion of the magnetic ribbon 40 during the sintering process. As a result, it is possible to prevent the magnetic properties of the magnetic ribbon 40, such as the magnetic permeability and coercive force, from deteriorating during the manufacturing process.

Therefore, crystalline metal magnetic particles with a large magnetostriction constant but a high saturation magnetic flux density Bs can be used, and a high saturation magnetic flux density Bs can be obtained for the entire element body 20. As a result, both the initial inductance Lin and the DC superposition characteristic Isat, which are characteristic indicators, are larger than when the entire element body 20 is made of a metal composite material of powdered metal magnetic particles and organic resin. Therefore, according to the second embodiment, the characteristics of the inductor component 10 can be improved.

(2-2) According to the second embodiment, the magnetic ribbon 40, which is a sintered body, has an alloy containing Fe and Ni elements. The alloy containing Fe and Ni elements can achieve high magnetic permeability μ. Therefore, the initial inductance Lin and the DC superposition characteristic Isat, which are characteristic indicators, can be increased.

(2-3) In the second embodiment described above, the magnetic material of the magnetic ribbon 40 is permendur composed of Fe and Co elements. Among metal magnetic materials, such a crystalline metal magnetic material has an extremely large saturation magnetic flux density Bs. Therefore, from the viewpoint of the DC superposition characteristic Isat, it is suitable as a material for the element body 20 in power inductors and the like used at a high current value Idc.

However, crystalline metal magnetic materials such as permendur, which is composed of Fe and Co elements, have a very large magnetostriction constant. In other words, crystalline metal magnetic materials are materials that undergo a large amount of dimensional change when a magnetic field is generated. Furthermore, when pressure is applied during the formation of the base body 20, distortion of the crystalline metal magnetic material is likely to remain due to stress. If such distortion from processing remains, the magnetic permeability μ may decrease or a large coercive force may be required to return the material to an unmagnetized state.

Here, in the second embodiment, the residual distortion caused by processing can be relaxed in the sintering step S16. In this way, the recovery characteristics can be increased by relaxing the distortion, so the effect of using a sintered body as a crystalline metal magnetic material is greatly exhibited.

(2-4) According to the second embodiment described above, the portion of the second portion P2 that is not the inductor wiring 30 is composed of the composite portion 80. In the composite portion 80, the magnetic particles 81 are randomly dispersed. Therefore, when the magnetic flux generated in the direction along the second axis AX2 penetrates the magnetic material of the second portion P2, the eddy current generated in the composite portion 80 becomes smaller.

(2-5) If the sintered magnetic ribbons 40 were to be stacked one by one in one inductor component 10, it would be time-consuming. According to the second embodiment, a laminate 200 having a plurality of individual pieces 201 is formed. The laminate 200 is then separated into individual pieces to form the individual pieces 201. The individual pieces 201 are then sintered to manufacture the inductor component 10. Therefore, the individual pieces 201 in which a plurality of magnetic ribbons 40 are stacked can be efficiently manufactured.

(2-6) According to the second embodiment, the first sheet 210 is prepared by forming the split magnetic layer 212D into a sheet shape. The second sheet 220 is prepared by forming a wiring pattern 221 on the pre-sintered non-magnetic layer 211 as a sheet-shaped base material. The first sheet 210 and the second sheet 220 are then pressed together to form the laminate 200. Therefore, the laminate 200 can be formed through a process of preparing two types of sheets, a stacking process, and a pressing process.

(2-7) According to the second embodiment described above, the laminate 200 is formed by forming the split magnetic layer 212D on the wiring pattern 221. The position of the split magnetic layer 212D can be adjusted based on the wiring pattern 221.

(2-8) According to the second embodiment described above, in preparing the second sheet 220, a negative pattern 222 is formed on the pre-sintered non-magnetic layer 211 as a sheet-like base material in a portion where the wiring pattern 221 is not formed. This makes it easy to adjust the position of the composite portion 80 in the inductor component 110.

(2-9) According to the second embodiment described above, when forming the laminate 200, multiple split magnetic layers 212D are stacked. This makes it easy to adjust the number of multiple magnetic ribbons 40 stacked in the stacking direction in the inductor component 110.

Third Embodiment
An inductor element 310 in the third embodiment is different from the inductor element 10 in the first embodiment in the shape of the inductor wiring 30. The differences from the inductor element 10 in the first embodiment will be described below.

21, the inductor component 310 includes a first inductor wiring 331 and a second inductor wiring 332. The first inductor wiring 331 extends on a plane perpendicular to the coordinate axis Z. The second inductor wiring 332 extends on a plane perpendicular to the coordinate axis Z at a position different from that of the first inductor wiring 331 in the direction along the coordinate axis Z. As shown in FIG. 22, the inductor component 310 includes a via 333 that connects the first inductor wiring 331 and the second inductor wiring 332.

21, the first inductor wiring 331 is composed of a first straight portion 331A, a second straight portion 331B, and a third straight portion 331C. The first straight portion 331A has a rectangular shape when viewed from the direction along the coordinate axis Z, and extends linearly in the direction along the coordinate axis Y.

The end face of the first straight portion 331A in the second negative direction Y2 constitutes a part of the outer surface of the second portion P2 and is exposed from the element body 20. The side face of the first straight portion 331A in the first negative direction X2 is located between the end of the first positive direction X1 and the end of the first negative direction X2 of the magnetic ribbon 40A. The side face of the first straight portion 331A in the first positive direction X1 is located between the end of the first negative direction X2 and the end of the first positive direction X1 of the magnetic ribbon 40B. When viewed from the direction along the coordinate axis Z, the first straight portion 331A extends along the non-magnetic portion 60 that fills the gap between the magnetic ribbon 40A and the magnetic ribbon 40B and the non-magnetic portion 60 that fills the gap between the magnetic ribbon 40D and the magnetic ribbon 40E. The end face of the first straight portion 331A in the second positive direction Y1 is located in the second negative direction Y2 from the end of the second positive direction Y1 of the magnetic ribbon 40D.

The second straight portion 331B is connected to the end face of the first straight portion 331A in the second positive direction Y1. The second straight portion 331B has a rectangular shape when viewed from the direction along the coordinate axis Z, and extends linearly in the direction along the coordinate axis X.

The end face of the second straight portion 331B in the first negative direction X2 is flush with the side face of the first straight portion 331A in the first negative direction X2. The side face of the second straight portion 331B in the second negative direction Y2 is located between the end of the magnetic ribbon 40E in the second positive direction Y1 and the end of the second negative direction Y2. The side face of the second straight portion 331B in the second positive direction Y1 is located between the end of the magnetic ribbon 40H in the second negative direction Y2 and the end of the second positive direction Y1. When viewed from the direction along the coordinate axis Z, the second straight portion 331B extends along the non-magnetic portion 60 that fills the gap between the magnetic ribbon 40E and the magnetic ribbon 40H. The end face of the second straight portion 331B in the first positive direction X1 is located between the end of the magnetic ribbon 40F in the second negative direction Y2 and the end of the second positive direction Y1.

The third straight portion 331C is connected to the side of the second straight portion 331B in the second negative direction Y2. The third straight portion 331C has a rectangular shape when viewed from the direction along the coordinate axis Z, and extends linearly in the direction along the coordinate axis Y.

The side of the third straight portion 331C in the first positive direction X1 is flush with the end face of the second straight portion 331B in the first positive direction X1. The side of the third straight portion 331C in the first negative direction X2 is located between the end of the magnetic ribbon 40E in the first positive direction X1 and the end of the first negative direction X2. When viewed from the direction along the coordinate axis Z, the third straight portion 34 extends along the nonmagnetic portion 60 that fills the gap between the magnetic ribbon 40E and the magnetic ribbon 40F. The end face of the third straight portion 34 in the second negative direction Y2 is located between the end of the magnetic ribbon 40B in the second negative direction Y2 and the end of the second positive direction Y1. That is, the end face of the third straight portion 34 in the second positive direction Y1 is not exposed to the outside of the base body 20.

22, the via 333 is connected to the end of the third straight portion 331C in the second negative direction Y2. The via 333 is connected to the third positive direction Z1 of the third straight portion 331C. The via 333 is rectangular and square when viewed from the direction along the coordinate axis Z. When viewed from the direction along the coordinate axis Z, the end face of the via 333 in the second negative direction Y2 coincides with the end face of the third straight portion 331C in the second negative direction Y2. When viewed from the direction along the coordinate axis Z, the end face of the via 333 in the first positive direction X1 coincides with the side of the third straight portion 331C in the first positive direction X1.

The second inductor wiring 332 has a fourth straight portion 332A and a fifth straight portion 332B. The fourth straight portion 332A is connected to the end face of the via 333 in the third positive direction Z1. The fourth straight portion 332A has a rectangular shape when viewed from the direction along the coordinate axis Z, and extends linearly in the direction along the coordinate axis X. When viewed from the direction along the coordinate axis Z, the end face of the fourth straight portion 332A in the first positive direction X1 coincides with the end face of the via 333 in the first positive direction X1. The side surface of the fourth straight portion 332A in the second negative direction Y2 coincides with the end face of the via 333 in the second negative direction Y2. The side surface of the fourth straight portion 332A in the second positive direction Y1 coincides with the end face of the via 333 in the second positive direction Y1. When viewed from the direction along the coordinate axis Z, the end face of the fourth straight portion 332A in the first negative direction X2 coincides with the side face of the first straight portion 331A in the first negative direction X2. The fourth straight portion 332A and the first straight portion 331A are separated from each other in the direction along the coordinate axis Z and are not in contact with each other.

The fifth straight portion 332B is connected to the side of the fourth straight portion 332A in the second positive direction Y1. The fifth straight portion 332B is rectangular when viewed from the direction along the coordinate axis Z, and extends linearly in the direction along the coordinate axis Z. The side of the fifth straight portion 332B in the first negative direction X2 coincides with the side of the first straight portion 331A in the first negative direction X2. The side of the fifth straight portion 332B in the first positive direction X1 coincides with the side of the first straight portion 331A in the first positive direction X1. The end face of the fifth straight portion 332B in the second positive direction Y1 is exposed to the outside of the element body 20.

22, the central axis of the first inductor wiring 331 is the first central axis CA1, and the central axis of the second inductor wiring 332 is the second central axis CA2. As shown in FIG. 21, when viewed from the direction along the coordinate axis Z, the axis connecting the first central axis CA1 of the first inductor wiring 331 and the second central axis CA2 of the second inductor wiring 332 is the virtual central axis CAV. In this case, the virtual central axis CAV is wound 1.0 turn. Therefore, when viewed from the direction along the coordinate axis Z, the total number of turns by the first inductor wiring 331 and the second inductor wiring 332 is 1.0 turn.

Here, the total number of turns of the first inductor wiring 331 and the second inductor wiring 332 is determined based on the virtual vector. The starting point of the virtual vector is located on the central axis of each inductor wiring when viewed from the direction along the coordinate axis Z. The virtual vector is in contact with the virtual central axis CAV when viewed from the coordinate axis Z. When the starting point of the virtual vector is moved from one end of the virtual central axis CAV to the other end of the virtual central axis CAV, the number of turns is determined as "1.0 turn" when the angle by which the direction of the virtual vector rotates is "360°". Therefore, for example, when wound by "180°", the number of turns is "0.5 turn".

(Regarding the positional relationship between the inductor wiring and the non-magnetic part)
21 , the first end of the first inductor wiring 331 is an end of the first straight portion 331A in the second negative direction Y2 along the coordinate axis Y. When viewed from the second axis AX2, i.e., the direction along the coordinate axis Z, the second end of the first inductor wiring 331 opposite to the first end along the first center axis CA1 is an end of the third straight portion 331C in the second positive direction Y1 along the coordinate axis Y. Within the range from the first end to the second end of the first inductor wiring 331, there are a nonmagnetic portion 60 located between the magnetic ribbon 40A and the magnetic ribbon 40B, and a nonmagnetic portion 60 located between the magnetic ribbon 40D and the magnetic ribbon 40E. In addition, within the range from the first end to the second end of the first inductor wiring 331, there are a nonmagnetic portion 60 located between the magnetic ribbon 40E and the magnetic ribbon 40H, and a nonmagnetic portion 60 located between the magnetic ribbon 40F and the magnetic ribbon 40I. Furthermore, within the range from the first end to the second end of the first inductor wiring 331, there is a nonmagnetic portion 60 located between the magnetic ribbon 40D and the magnetic ribbon 40E. Therefore, when viewed from the direction along the second axis AX2, i.e., the coordinate axis Z, the nonmagnetic portion 60 exists within the range from the positive end to the negative end of the first inductor wiring 331 along the first center axis CA1 in the entire range from the first end to the second end of the first inductor wiring 331 along the first center axis CA1. In other words, when viewed from the direction along the coordinate axis Z, the nonmagnetic portion 60 extends without interruption from the first end to the second end of the first inductor wiring 331.

Similarly, the first end of the second inductor wiring 332 along the second central axis CA2 is the end of the fourth straight line portion 332A in the first positive direction X1. Also, when viewed from the second axis AX2, i.e., the direction along the coordinate axis Z, the second end opposite to the first end of the second inductor wiring 332 along the second central axis CA2 is the end of the fifth straight line portion 332B in the second positive direction Y1 along the coordinate axis Y. And, within the range from the first end to the second end of the second inductor wiring 332, there is a nonmagnetic portion 60 located between the magnetic ribbon 40B and the magnetic ribbon 40E. Also, within the range from the first end to the second end of the second inductor wiring 332, there is a nonmagnetic portion 60 located between the magnetic ribbon 40D and the magnetic ribbon 40E, and a nonmagnetic portion 60 located between the magnetic ribbon 40G and the magnetic ribbon 40H. Therefore, when viewed from the direction along the second axis AX2, i.e., the coordinate axis Z, the nonmagnetic portion 60 is present within the range from the positive end to the negative end along the first axis AX1 of the second inductor wiring 332 over the entire range from the first end to the second end of the second inductor wiring 332 along the second central axis CA2. In other words, when viewed from the direction along the coordinate axis Z, the nonmagnetic portion 60 extends uninterrupted from the first end to the second end of the second inductor wiring 332.

(About the simulation)
Similar to the simulation for the first embodiment described above, a simulation was performed for the inductor element 310 of the third embodiment as Example 2. Different conditions for the inductor element 310 of the third embodiment in particular will be described.

The sum of the dimension of the first inductor wiring 331 in the direction along the first central axis CA1 and the dimension of the second inductor wiring 332 in the direction along the second central axis CA2 is 7.00 mm.
The dimension of the first inductor wiring 331 in the direction along the first axis AX1 is 0.5 mm. The dimension of the first inductor wiring 331 in the direction along the coordinate axis Z is 0.1 mm. The dimension of the second inductor wiring 332 in the direction along the first axis AX1 is 0.5 mm. The dimension of the second inductor wiring 332 in the direction along the coordinate axis Z is 0.1 mm. The dimension of the via 333 in the direction along the coordinate axis Z is 0.03 mm.

On the other hand, in the inductor component of Comparative Example 2, compared to Example 2, the element body 320 is a composite material of a magnetic material and a non-magnetic material. In the simulation, the element body 320 is a metal composite material of amorphous metal particles consisting of Fe, Si, Cr and B elements and resin. The relative permeability μr of the element body 320 is 24, the metal magnetic material filling rate is 70%, and the saturation magnetic flux density Bs is 0.91 T. The other conditions are the same as those of the inductor component 310 of Example 2.

As shown in Figure 23, the initial inductance Lin and the DC superposition characteristic Isat were calculated for Example 2 and Comparative Example 2. Comparing Example 2 and Comparative Example 2, the initial inductance Lin of Example 2 is 10% or more larger than the initial inductance Lin of Comparative Example 2. In addition, the DC superposition characteristic Isat of Example 2 is 10% or more larger than the DC superposition characteristic Isat of Comparative Example 2.

Thus, in the inductor component 310 of the third embodiment, like the inductor component 10 of the first embodiment, both the initial inductance Lin and the DC superposition characteristic Isat are larger than those of comparison example 2.

(Effects of the Third Embodiment)
According to the third embodiment, in addition to the effects (1-1) to (1-9) in the first embodiment described above, the following effects are achieved.

(3-1) According to the third embodiment, the circuit includes a first inductor wiring 331, a second inductor wiring 332 that is positioned differently from the first inductor wiring 331 in the direction along the second axis AX2, and a via 333. Therefore, since the circuit includes a plurality of inductor wirings that are positioned differently in the direction along the second axis AX2, it is easy to increase the wiring length of the inductor wiring.

(3-2) According to the above third embodiment, when viewed from the direction along the coordinate axis Z, the total number of turns of the first inductor wiring 331 and the second inductor wiring 332 is 1.0 turn. Therefore, a large initial inductance Lin can be obtained.

<Other embodiments>
The above-described embodiments may be modified as follows: The above-described embodiments and the following modifications may be combined and implemented within the scope of technical compatibility.

- In each of the above embodiments, the shape of the base body 20 is not limited to the examples of each of the above embodiments. For example, when viewed from a direction along the second axis AX2, the shape of the base body 20 may be rectangular or a polygon other than a square. Furthermore, for example, when viewed from a direction along the coordinate axis Z, the shape of the base body 20 may be circular, such as an ellipse. Furthermore, the shape of the base body 20 may be a rectangular parallelepiped, a cube, a polygonal prism, a cylinder, etc., with different dimensions for the coordinate axis X and the coordinate axis Y.

In the first embodiment, the shape of the inductor wiring 30 can be changed as appropriate as long as it can impart inductance L to the inductor component 10 by generating a magnetic flux in the element body 20 when a current flows. This also applies to the other embodiments.

For example, in the modified inductor component 410 shown in FIG. 24, the inductor wiring 430 is elliptical in a cross section perpendicular to the central axis CA. Then, a virtual rectangle VR2 is drawn that circumscribes the inductor wiring 430 and has a minimum area with a first side along the coordinate axis X and a second side along the coordinate axis Z. At this time, the first side of the virtual rectangle VR2 is longer than the second side of the virtual rectangle VR2. In this way, it is more preferable that the long side of the virtual rectangle VR2 is parallel to the coordinate axis X, because the end of the wiring cross section in the direction along the coordinate axis X, where the magnetic flux is more concentrated, corresponds to an area with a small demagnetizing field of the magnetic ribbon 40.

In addition, in the first embodiment, the shape of the inductor wiring 30 in a cross section perpendicular to the central axis CA may be such that the second side along the coordinate axis Z is longer than the first side along the coordinate axis X. Even in this case, magnetic flux is concentrated at the end of the inductor wiring 30 in the first positive direction X1. Therefore, this is more preferable because the end of the wiring cross section where the magnetic flux is more concentrated corresponds to an area of the magnetic ribbon 40 with a small demagnetizing field.

Furthermore, in a cross section perpendicular to the central axis CA, the shape of the inductor wiring 30 may be a shape that does not have symmetry, such as linear symmetry or rotational symmetry, for example, when it includes one or more protruding parts. In this way, when symmetry is lost in a cross section perpendicular to the central axis CA, there will be a location where the magnetic flux is more concentrated than in other locations. It is preferable to determine the positional relationship of the magnetic ribbon 40 so that a location where the magnetic flux is more concentrated than in other locations, such as a protruding part, is the end of the inductor wiring 30 in the first positive direction X1.

For example, in a cross section perpendicular to the central axis CA, the shape of the inductor wiring 30 may be a square or a perfect circle. In this case, the virtual rectangle VR drawn in the cross section perpendicular to the central axis CA is a square, and the first side of the virtual rectangle VR does not have to be longer than the second side of the virtual rectangle VR.

- In each of the above embodiments, the shape of the inductor wiring is not limited to the examples of each of the above embodiments. For example, the shape of the inductor wiring 530X may be curved as a whole, as in the modified inductor component 510X shown in FIG. 25. Also, for example, the shape of the inductor wiring 530Y may be curved twice, as in the modified inductor component 510Y shown in FIG. 26. Also, for example, the inductor wiring 530Z may be meander-shaped, as in the modified inductor component 510Z shown in FIG. 27. Note that the meander shape is not limited to one in which the curved portions are continuous, and may be one in which straight portions facing different directions are continuous.

Furthermore, as in the modified examples shown in Figures 25 to 27, the inductor wiring is not limited to having straight portions. If the inductor wiring does not have any bent portions due to the connection of multiple straight portions, it is sufficient that the inductor wiring has at least a curved portion.

- In each of the above embodiments, the dimensions of the inductor wiring are not limited to the examples of the above embodiments. For example, as in the above-mentioned simulation, both ends of the inductor wiring may protrude from the element body.

In each of the above embodiments, the material of the inductor wiring is not limited to the examples of the above embodiments as long as it is a conductive material. For example, the material of the inductor wiring may be a conductive resin.

In each of the above embodiments, the shape of the magnetic ribbon 40 is not limited to a rectangular shape when viewed from a direction along the second axis AX2. For example, the shape of the magnetic ribbon 40 may be a polygonal shape other than a rectangular shape, or may be an elliptical shape.

In each of the above embodiments, when viewed from the coordinate axis Z, one side of the body 20 and the third axis AX3 may not coincide. Also, when viewed from the coordinate axis Z, one side of the body 20 and the fourth axis AX4 may not coincide. Furthermore, the third axis AX3 may not be parallel to the coordinate axis X. Also, the fourth axis AX4 may not be parallel to the coordinate axis Y. For example, when viewed from a direction along the second axis AX2, the shape of the magnetic ribbon 40 is assumed to be hexagonal. In this case, when viewed from a direction along the second axis AX2, the magnetic ribbon 40 is aligned in a direction along the third axis AX3 perpendicular to the second axis AX2, and aligned in a direction along the fourth axis AX4 perpendicular to the second axis AX2 and intersecting the third axis AX3. In this case, the fourth axis AX4 is inclined at 60 degrees with respect to the third axis AX3. In this way, the third axis AX3 and the fourth axis AX4 need only be perpendicular to the second axis AX2, and the fourth axis AX4 needs only to intersect with the third axis AX3.

In each of the above embodiments, an external electrode may be connected to the portion of the inductor wiring exposed from the element body 20. For example, in the first embodiment, external electrodes may be formed by coating, printing, plating, etc. on both end faces of the inductor wiring 30 in the direction along the central axis CA and on both end faces of the element body 20 in the direction along the central axis CA.

In each of the above embodiments, the direction in which the magnetic ribbon 40 and the non-magnetic layer 50 are stacked may not be perpendicular to the central axis CA and the first axis AX1 due to manufacturing errors, etc. In the above embodiments, the magnetic ribbon 40, etc. being "stacked in a direction along the second axis AX2" allows for such manufacturing errors, etc.

In each of the above embodiments, the multiple magnetic ribbons 40 do not have to be stacked in the direction along the second axis AX2 as long as they are aligned in the direction along the third axis AX3 and the direction along the fourth axis AX4. In this case, for example, they only need to be located on one side of the surface of the inductor wiring 30 facing the direction along the second axis AX2. Also, for example, even if they are stacked in the direction along the second axis AX2, in the first embodiment, the third portion P3 may be omitted and they may be arranged on only one side of the surface of the inductor wiring 30 facing the direction along the second axis AX2.

- In each of the above embodiments, the material of the magnetic ribbon 40 is not limited to the examples of the above embodiments, as long as it is a magnetic material. For example, it may be Fe or Ni. It may also be an alloy containing Fe and Co elements. Furthermore, it may be an alloy containing at least two of the elements Fe, Ni, Co, Cr, Cu, Al, Si, B, and P. It may also be a mixture containing at least two of Fe, Ni, Co, Cr, Cu, Al, Si, B, and P. A magnetic material with a large magnetic permeability μ is suitable for improving the initial inductance Lin of the inductor component.

In each of the above embodiments, the material of the non-magnetic layer 50 is not limited to the examples of the above embodiments, so long as it is a non-magnetic material. The non-magnetic layer 50 may be a resin other than acrylic resin, epoxy resin, or silicone resin, or may be a non-magnetic ceramic such as alumina, silica, or glass, or a non-magnetic inorganic material containing these, or may be a gap, or may be a mixture of these. The same applies to the non-magnetic portion 60 and the non-magnetic film 70. In addition, the materials of the non-magnetic layer 50, the non-magnetic portion 60, and the non-magnetic film 70 may be different from each other or may be partially different from each other as long as they are non-magnetic materials. In these cases, this can be achieved by coating the outer surface of the individual part 201 with a resin or filling the space with a resin from the outside after the sintering step S16. In addition, when the non-magnetic layer 50, etc. are formed of a sintered body as in the manufacturing method described in the second embodiment, a material that can be sintered, such as alumina, silica, crystallized glass, or amorphous glass, is suitable as the non-magnetic paste.

In the above embodiment, the nonmagnetic layer 50, the nonmagnetic portion 60, and the nonmagnetic film 70 may be integrated or may be separate members. For example, the nonmagnetic layer 50 may be hollow, or may be configured with an oxide film formed by oxidizing the surface of the magnetic ribbon 40 as an insulator.

In the above embodiment, the nonmagnetic layer 50 may be omitted. In this case, the magnetic ribbons 40 adjacent to each other in the direction along the second axis AX2 may be in direct contact with each other.
In the above embodiment, the nonmagnetic portion 60 may be present between the inductor wiring 30 and the magnetic ribbon 40. In this case, the nonmagnetic portion 60 can ensure insulation between the inductor wiring 30 and the magnetic ribbon 40.

Note that "multiple magnetic ribbons 40 are stacked" and "multiple magnetic ribbons 40 are lined up" specifically refer to cases where adjacent magnetic ribbons 40 are completely or partially insulated from each other or where a microscopic physical boundary exists. For example, this does not include a state where the magnetic ribbons 40 are sintered together and completely integrated.

In the above embodiment, as long as the magnetic ribbon 40 is present in at least one of the first portion P1 and the third portion P3, the configuration of the magnetic ribbon 40, the nonmagnetic layer 50, and the nonmagnetic portion 60 can be changed. For example, the entire portion of the second portion P2 except the inductor wiring 30 may be composed of the magnetic ribbon 40 or the nonmagnetic layer 50. In addition, when the entire portion of the second portion P2 except the inductor wiring 30 is composed of the magnetic ribbon 40, the magnetic ribbon 40 may be a composite material of a powder-like magnetic material and a nonmagnetic material. Examples of such composite materials include a metal composite material of amorphous metal particles made of Fe, Si, Cr, and B and a resin, and a composite material of glass and ferrite.

In each of the above embodiments, the dimensions of the magnetic ribbons 40 in the direction along the second axis AX2 may be different. If the dimension of the magnetic ribbon 40 in the direction along the second axis AX2 is small, a manufacturing error of about 20% may occur depending on the manufacturing method. Therefore, the dimension of the magnetic ribbon 40 in the direction along the second axis AX2 can be considered to be approximately equal if it is 80% or more and 120% or less of the average dimension of the dimensions of the magnetic ribbons 40 in the direction along the second axis AX2. Note that the dimension of each magnetic ribbon 40 in the direction along the second axis AX2 is the smallest dimension in the direction along the second axis AX2 of a single image enlarged by an electron microscope at a magnification between 1000 times and 10,000 times. In addition, the dimension of the multiple magnetic ribbons 40 in the direction along the second axis AX2 is the average value of the dimension of one magnetic ribbon 40 in the direction along the second axis AX2 measured in a single image containing five magnetic ribbons 40 using an electron microscope.

The dimensions of the multiple magnetic ribbons 40 in the direction along the second axis AX2 do not have to be identical to each other, and may vary by more than 20% from the average value.
In each of the above embodiments, the dimensions of the nonmagnetic layers 50 in the direction along the second axis AX2 may be different. When the dimension of the nonmagnetic layer 50 in the direction along the second axis AX2 is small, a manufacturing error of about 20% may occur depending on the manufacturing method. Therefore, the dimension of the nonmagnetic layer 50 in the direction along the second axis AX2 can be considered to be approximately equal if it is 80% or more and 120% or less of the average dimension of the dimensions of the nonmagnetic layers 50 in the direction along the second axis AX2. Note that the dimension of each nonmagnetic layer 50 in the direction along the second axis AX2 is the smallest dimension in the direction along the second axis AX2 of a single image magnified by an electron microscope at a magnification between 1000 times and 10000 times. In addition, the dimension of the multiple nonmagnetic layers 50 in the direction along the second axis AX2 is the average value of the dimension of one nonmagnetic layer 50 in the direction along the second axis AX2 measured using an electron microscope in a single image that contains five nonmagnetic layers 50.

The dimensions of the multiple nonmagnetic layers 50 in the direction along the second axis AX2 do not have to be identical to each other, and may vary by more than 20% from the average value.
In each of the above embodiments, the dimensions of the magnetic ribbons 40 in the direction along the third axis AX3 may be different. When the dimension of the magnetic ribbon 40 in the direction along the third axis AX3 is small, a manufacturing error of about 20% may occur depending on the manufacturing method. Therefore, in a row of magnetic ribbons 40 arranged along the third axis AX3, the dimensions of the magnetic ribbons 40 in the direction along the third axis AX3 can be considered to be approximately equal if they are 80% or more and 120% or less of the average dimension of the dimensions of all the magnetic ribbons 40 in the row in the direction along the third axis AX3. The dimension of each magnetic ribbon 40 in the direction along the third axis AX3 is the maximum dimension in the direction along the third axis AX3 of one image enlarged by an electron microscope at a magnification between 100 times and 10,000 times. In addition, the dimension of the multiple magnetic ribbons 40 in the direction along the third axis AX3 is the average value of the dimension of one magnetic ribbon 40 in the direction along the third axis AX3 measured in a single image captured using an electron microscope that includes all of the magnetic ribbons 40 lined up in the direction along the third axis AX3.

The dimensions of the multiple magnetic ribbons 40 in the direction along the third axis AX3 do not have to be identical to each other, and may vary by more than 20% from the average value.
In each of the above embodiments, the dimensions of the magnetic ribbons 40 in the direction along the fourth axis AX4 may be different. When the dimension of the magnetic ribbon 40 in the direction along the fourth axis AX4 is small, a manufacturing error of about 20% may occur depending on the manufacturing method. Therefore, in a row of magnetic ribbons 40 arranged along the fourth axis AX4, the dimensions of the magnetic ribbons 40 in the direction along the fourth axis AX4 can be considered to be approximately equal if they are 80% or more and 120% or less of the average value of the dimensions of all the magnetic ribbons 40 in the row in the direction along the fourth axis AX4. The dimension of each magnetic ribbon 40 in the direction along the fourth axis AX4 is the maximum dimension in the direction along the fourth axis AX4 of one image enlarged by an electron microscope at a magnification between 100 times and 10,000 times. In addition, the dimension of the multiple magnetic ribbons 40 in the direction along the fourth axis AX4 is the average value of the dimension of one magnetic ribbon 40 in the direction along the fourth axis AX4 measured in a single image using an electron microscope that includes all of the magnetic ribbons 40 lined up in the direction along the fourth axis AX4.

The dimensions of the multiple magnetic ribbons 40 in the direction along the fourth axis AX4 do not have to be identical to each other, and may vary by more than 20% from the average value.
In each of the above embodiments, the number and positions of the nonmagnetic portions 60 are not limited to those in the above embodiments. The number and positions of the nonmagnetic portions 60 may be changed in accordance with the number and positions of the magnetic ribbons 40 in the direction along the first axis AX1 or the direction along the central axis CA. The size of the nonmagnetic portions 60 may also be changed appropriately in accordance with the spacing between the magnetic ribbons 40 at the same position in the direction along the second axis AX2.

- In each of the above embodiments, the number and positions of the nonmagnetic parts 60 are not limited to the examples of each of the above embodiments. The number and positions of the nonmagnetic parts 60 may be changed according to the number and positions of the magnetic ribbons 40 in the direction along the third axis AX3 and the direction along the fourth axis AX4. The size of the nonmagnetic parts 60 may also be changed appropriately according to the spacing of the magnetic ribbons 40 at the same position in the direction along the second axis AX2. At least when viewed from the direction along the second axis AX2, the nonmagnetic parts 60 may be present within the range from the positive end to the negative end along the first axis AX1 of the inductor wiring in the entire range from the first end to the second end of the inductor wiring along the central axis CA.

In each of the above embodiments, the non-magnetic film 70 may be omitted. When the non-magnetic film 70 is omitted, the coating process S17 may be omitted in the manufacturing method of the inductor component 110 in the second embodiment. In addition, the coating process S17 may form the non-magnetic film 70 by applying the non-magnetic film 70 to the entire outer surface of the individual portion 201 of the laminate 200 and then partially scraping it off to expose the inductor wiring 30.

- In the second embodiment, the configuration of the composite part 80 is not limited to the example of the second embodiment. For example, the non-magnetic base material 82 may be an insulating thermoplastic resin such as alumina, epoxy resin, or acrylic resin. The composite part 80 may be an integrally molded body, rather than a laminated structure like each of the magnetic ribbons 40 of the first part P1 and the third part P3. In manufacturing such a composite part 80, for example, after the sintering process S16 and before the coating process S17, the range constituting the composite part 80 may be filled with resin.

- In the manufacturing method of the inductor component 110 in the second embodiment described above, a sheet lamination method in which multiple sheets are formed and then stacked and pressure-bonded is exemplified, but this is not limited to this. For example, a printing lamination method in which multiple sheets are formed and stacked sequentially may also be used. In this case, the split magnetic layer 212D is formed on the wiring pattern 221, so that the split magnetic layer 212D is disposed above the wiring pattern 221.

In the manufacturing method of the inductor component 110 in the second embodiment described above, the second sheet 220 may have a magnetic layer 212 or a pre-sintered non-magnetic layer 211 instead of the negative pattern 222, or may have a magnetic layer 212 and a pre-sintered non-magnetic layer 211. When the negative pattern 222 is replaced by a magnetic layer 212, a pre-sintered non-magnetic layer 211, and a groove non-magnetic portion 213, the inductor component 10 in the first embodiment can be manufactured. In addition, the negative pattern 222 may include at least one of a magnetic material or a non-magnetic material.

In the manufacturing method of the inductor component 110 in the second embodiment described above, the singulation process S15 may be omitted. When the first sheet 210 and the second sheet 220 are prepared for only one individual portion 201, the singulation process S15 may be omitted.

- In the manufacturing method of the inductor component 110 described in the second embodiment above, the portion corresponding to the first portion P1 or the third portion P3 has a plurality of magnetic ribbons 40 and a non-magnetic layer 50. Here, if the second sheet 220 is omitted, a laminated sheet is formed by stacking a plurality of first sheets 210. By sintering this laminated sheet, a magnetic sheet in which the magnetic ribbons 40 are sintered bodies can be manufactured. In this magnetic sheet, a plurality of magnetic ribbons 40 are stacked on the second axis AX2. Furthermore, three magnetic ribbons 40 are lined up in the direction along the third axis AX3 at the same position along the second axis AX2. Furthermore, three magnetic ribbons 40 are lined up in the direction along the fourth axis AX4 at the same position along the second axis AX2.

In the third embodiment, the total number of turns of the multiple inductor wirings may be less than 1.0 turn or may exceed 1.0 turn. For example, if three or more inductor wirings are present at different positions along the Z coordinate axis, the total number of turns of the multiple inductor wirings may be 2.0 or more. Also, the number of turns of a single inductor wiring may be 1.0 or more.

10,110,310,410,510X,510Y,510Z,610,710,810,910...inductor component 20,120,320,620,720...element body 30,430,530X,530Y,530Z,730,830,930...inductor wiring 331...first inductor wiring 332...second inductor wiring 333...via 40,740...magnetic ribbon 50,750...non-magnetic layer 60,760...non-magnetic portion 70,770...non-magnetic film AX1...first axis AX2...second axis AX3...third axis AX4...fourth axis CA...center axis CAV...virtual center axis VR,VR2...virtual rectangle X...coordinate axis Y...coordinate axis Z...coordinate axis

Claims (11)

An element body including a plurality of flat magnetic ribbons made of a magnetic material;
an inductor wiring extending along a main surface of the magnetic ribbon inside the element body;
the inductor wiring has at least one portion that extends in a bent or curved manner;
When an axis along which the inductor wiring extends is defined as a central axis, an axis along the main surface in a cross-sectional view perpendicular to the central axis is defined as a first axis, and an axis perpendicular to the main surface in a cross-sectional view is defined as a second axis,
the magnetic ribbons are arranged along a third axis perpendicular to the second axis, and along a fourth axis perpendicular to the second axis and intersecting the third axis;
the element body further includes a non-magnetic portion made of a non-magnetic material filling a gap between the magnetic ribbons adjacent to each other in a direction along the third axis and a gap between the magnetic ribbons adjacent to each other in a direction along the fourth axis,
An inductor component, wherein when viewed from a direction along the second axis, the nonmagnetic portion is present within the entire range from the first end to the second end of the inductor wiring, and within the range from the positive end to the negative end along the first axis of the inductor wiring. The inductor component according to claim 1 , wherein the magnetic ribbons are stacked along the second axis. The inductor component according to claim 2 , wherein a dimension of each of the magnetic ribbons in the direction along the second axis is 80% to 120% of an average dimension of the plurality of magnetic ribbons in the direction along the second axis. The inductor component according to claim 2 , wherein the element body further includes a plurality of nonmagnetic layers made of a nonmagnetic material and positioned between the magnetic ribbons adjacent to each other along the second axis. The inductor component according to claim 4 , wherein the dimension of each of the nonmagnetic layers in the direction along the second axis is 80% or more and 120% or less of the average dimension of the nonmagnetic layers in the direction along the second axis. The inductor component according to claim 1 , wherein each of the magnetic ribbons has a polygonal shape when viewed from a direction perpendicular to the second axis. The inductor component according to claim 6 , wherein each of the magnetic ribbons has a rectangular shape when viewed in a direction perpendicular to the second axis. When the inductor wiring is a first inductor wiring,
a second inductor wiring that is positioned differently from the first inductor wiring in a direction along the second axis;
The inductor component according to claim 1 , further comprising: a via that connects the first inductor wiring and the second inductor wiring in a direction along the second axis. The inductor component according to claim 8 , wherein a total number of turns of the first inductor wiring and the second inductor wiring is one or more. The inductor component according to any one of claims 1 to 9, wherein in a row of the magnetic ribbons arranged along the third axis, the dimension of each of the magnetic ribbons in the direction along the third axis is 80% or more and 120% or less of the average dimension of all the magnetic ribbons in the row in the direction along the third axis. The inductor component according to any one of claims 1 to 10, wherein in a row of the magnetic ribbons arranged along the fourth axis, the dimension of each of the magnetic ribbons in the direction along the fourth axis is 80% or more and 120% or less of the average dimension of all the magnetic ribbons in the row in the direction along the fourth axis.

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