JP7632587B2 - Inductor Components - Google Patents

Description

The present disclosure relates to inductor components.

The inductor component described in Patent Document 1 comprises an element body and an inductor wiring extending inside the element body. The element body is made of inorganic filler and resin. For example, in the case of a magnetic composite body, the inorganic filler is made of a magnetic material. The average particle size of the inorganic filler is 5 μm or less.

JP 2019-192920 A

The inductor component described in Patent Document 1 aims to improve various characteristics of the inductor component by increasing the filling rate of the inorganic filler in the element body. However, the inductor component described in Patent Document 1 is based on a structure in which inorganic filler particles are randomly dispersed in the element body, and no consideration is given to other structures of the magnetic material in the element body.

In order to solve the above problem, the present invention provides an inductor component comprising: an element body including a plurality of flat magnetic ribbons made of a magnetic material, the plurality of magnetic ribbons being stacked in a direction perpendicular to the main surface of the magnetic ribbons; and an inductor wiring extending along the main surface inside the element body; when the axis along which the inductor wiring extends is defined as a central axis, an axis along the main surface in a cross-sectional view perpendicular to the central axis is defined as a first axis, and an axis perpendicular to the main surface in the cross-sectional view is defined as a second axis, the element body has a plurality of non-magnetic layers made of a non-magnetic material positioned between the magnetic ribbons adjacent to each other along the second axis; and when the average value of the dimensions of the plurality of magnetic ribbons in the direction along the second axis is defined as the magnetic ribbon thickness, and the average value of the dimensions of the plurality of non-magnetic layers in the direction along the second axis is defined as the non-magnetic layer thickness, the percentage of the non-magnetic layer thickness relative to the magnetic ribbon thickness is 15% or less.

According to the inductor component described above, the base body has a plurality of magnetic ribbons stacked along the second axis, and a plurality of non-magnetic layers made of a non-magnetic material and positioned between adjacent magnetic ribbons. In other words, the inductor component described above has a regular structure of magnetic ribbons stacked along the second axis.

Here, in an inductor component with the above structure, the magnetic ribbon thickness affects the inductance obtained from the inductor component. And, as in the above configuration, if the percentage of the nonmagnetic layer thickness relative to the magnetic ribbon thickness is 15% or less, the effect on inductance can be suppressed even if the magnetic ribbon thickness varies slightly from inductor component to inductor component. Therefore, the variation in inductance from inductor component to inductor component can be suppressed.

Note that "along" also includes cases where there is no direct contact and the object is at a distance. For example, "along the first axis" does not only include something that is in direct contact with the first axis and runs along the first axis, but also something that is not in direct contact with the first axis and runs along the first axis at a distance. Furthermore, "along" only requires that there is a substantially parallel relationship, and also includes something that is slightly tilted due to manufacturing errors, etc.

In inductor components consisting of multiple laminated magnetic ribbons, the inductance variation between inductor components can be suppressed.

FIG. FIG. 2 is a plan view of a first portion of the inductor component. 3 is a cross-sectional view of the inductor component taken along line 3-3 in FIG. 2. FIG. 4 is an enlarged view of a portion of FIG. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. 5A to 5C are explanatory diagrams of a manufacturing method of an inductor component. Graph showing the results of a simulation. Graph showing the results of a simulation. FIG. 11 is a cross-sectional view of an inductor component according to a modified example.

<One embodiment of the inductor component>
An embodiment of an inductor component will be described below. In the drawings, components may be shown enlarged to facilitate understanding. The dimensional ratios of components may differ from the actual ones or from those in other drawings. Although hatching is applied in the cross-sectional views, hatching of some components may be omitted to facilitate understanding. Furthermore, reference symbols may be applied to only some of the multiple components.

(Overall composition)
1, the inductor component 10 includes an element body 20 and an inductor wiring 30. The element body 20 includes a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films 70.

The magnetic ribbon 40 is flat. A plurality of magnetic ribbons 40 are stacked in a direction perpendicular to the main surface MF of the magnetic ribbon 40. Note that the flat shape refers to a thin shape having a main surface MF, but is not limited to a thin rectangular parallelepiped, and may have curved edges or corners, minute irregularities on the main surface MF, or holes inside.

The inductor wiring 30 extends linearly along the main surface MF inside the element body 20. The axis along which the inductor wiring 30 extends is the central axis CA. In this embodiment, the extension direction of the central axis CA coincides with the extension direction of one of the sides of the rectangular main surface MF.

As shown in Figure 3, in a cross-sectional view perpendicular to the central axis CA, the axis along the main surface MF is the first axis X, and the axis perpendicular to the main surface MF is the second axis Z. One direction along the first axis X is the first positive direction X1, and the other direction along the first axis X is the first negative direction X2. One direction along the central axis CA is the positive direction Y1, and the other direction along the central axis CA is the negative direction Y2. Furthermore, one direction along the second axis Z is the second positive direction Z1, and the other direction along the second axis Z is the second negative direction Z2.

As shown in Figure 1, the inductor component 10 is composed of a first portion P1, a second portion P2, and a third portion P3, which are stacked in sequence along the second axis Z. Of the three portions P1 to P3, the first portion P1 is located at the end of the second negative direction Z2 along the second axis Z.

As shown in FIG. 2, the first portion P1 has a square shape when viewed from a direction along the second axis Z. The first portion P1 has a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films 70.

As shown in Figure 3, in a cross-sectional view perpendicular to the central axis CA, each magnetic ribbon 40 in the first portion P1 is stacked in a direction along the second axis Z. As shown in Figure 2, each magnetic ribbon 40 in the first portion P1 is square-shaped when viewed from a direction along the second axis Z. When viewed from a direction along the second axis Z, each side of each magnetic ribbon 40 is parallel to the first axis X or the central axis CA.

Two magnetic ribbons 40 are arranged at the same position along the second axis Z, spaced apart in a direction along a third axis perpendicular to the second axis Z. Two magnetic ribbons 40 are also arranged at the same position along the second axis Z, spaced apart in a direction along a fourth axis perpendicular to the second axis Z and the third axis. The third axis coincides with the central axis CA, and the fourth axis coincides with the first axis X. Therefore, in this embodiment, the magnetic ribbons 40 are arranged not only in a direction along the second axis Z, but also in a direction along the first axis X and the central axis CA.

The magnetic ribbon 40 is made of a magnetic material. The magnetic material is, for example, a metallic magnetic material containing Fe, Ni, Co, Cr, Cu, Al, Si, B, P, etc. In this embodiment, the magnetic material is a metallic magnetic material containing Fe and Si.

As shown in FIG. 3, the non-magnetic layer 50 is located between adjacent magnetic ribbons 40 in the direction along the second axis Z. The non-magnetic layer 50 fills all of the spaces between adjacent magnetic ribbons 40 in the direction along the second axis Z. The non-magnetic layer 50 is made of a non-magnetic material. The non-magnetic material is, for example, acrylic resin, epoxy resin, or silicone resin. Note that in FIG. 3, the non-magnetic layer 50 is illustrated by a line.

As shown in FIG. 2, the nonmagnetic portion 60 is located between the magnetic ribbons 40 that are lined up at the same position along the second axis Z. The nonmagnetic portion 60 fills all of the space between the magnetic ribbons 40 that are lined up at the same position along the second axis Z. As described above, at the same position along the second axis Z, there are a total of four magnetic ribbons 40, two in the direction along the central axis CA and two in the direction along the first axis X, so there are four nonmagnetic portions 60. The nonmagnetic portion 60 is made of a nonmagnetic material. In this embodiment, the material of the nonmagnetic portion 60 is the same as that of the nonmagnetic layer 50.

In the first portion P1, the non-magnetic film 70 is located at the end of the first positive direction X1 along the first axis X and at the end of the first negative direction X2, which is the opposite direction to the first positive direction X1. The non-magnetic film 70 covers the entire area of both end faces of the magnetic ribbon 40 in the direction along the first axis X. The non-magnetic film 70 also covers the entire area of both end faces of the non-magnetic layer 50 in the direction along the first axis X. Furthermore, the non-magnetic film 70 covers the entire area of both end faces of the non-magnetic portion 60 in the direction along the first axis X. Therefore, all end faces of the first positive direction X1 along the first axis X in the first portion P1 are composed of the non-magnetic film 70. Similarly, all end faces of the first negative direction X2 along the first axis X in the first portion P1 are composed of the non-magnetic film 70. The non-magnetic film 70 is made of a non-magnetic material. In this embodiment, the material of the nonmagnetic film 70 is the same as that of the nonmagnetic layer 50 .

1, when viewed from the first portion P1, the second portion P2 is located in a second positive direction Z1, which is the opposite direction to the second negative direction Z2 along the second axis Z. When viewed from the direction along the second axis Z, the second portion P2 has the same square shape as the first portion P1.

The second portion P2 is composed of an inductor wiring 30, a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films .
The inductor wiring 30 has a rectangular shape when viewed from the direction along the second axis Z, and extends linearly along the central axis CA. An end face of the inductor wiring 30 in the positive direction Y1 along the central axis CA constitutes part of the outer surface of the second portion P2, and is exposed from the element body 20. Similarly, an end face of the inductor wiring 30 in the negative direction Y2, which is the opposite direction to the positive direction Y1 along the central axis CA, constitutes part of the outer surface of the second portion P2, and is exposed from the element body 20.

When viewed from the second axis Z, the end face in the positive direction Y1 and the end face in the negative direction Y2 of the inductor wiring 30 are parallel to the first axis X. Furthermore, the central axis CA of the inductor wiring 30 is located at the center of the second portion P2 in the direction along the first axis X. Therefore, the central axis CA, which is the axis along which the inductor wiring 30 extends, passes through the center of the second portion P2 in the direction along the first axis X. The dimension of the inductor wiring 30 in the direction along the first axis X is half the dimension of the second portion P2 in the direction along the first axis X.

The material of the inductor wiring 30 is a conductive material. The conductive material is, for example, Cu, Ag, Au, Al, or an alloy thereof. In this embodiment, the material of the inductor wiring 30 is Cu.

As shown in FIG. 3, in a cross section perpendicular to the central axis CA, the inductor wiring 30 is rectangular. Here, in a cross section perpendicular to the central axis CA, a virtual rectangle VR is drawn that circumscribes the inductor wiring 30 and has a first side along the first axis X and a second side along the second axis Z, and has a minimum area. In this embodiment, in a cross section perpendicular to the central axis CA, the inductor wiring 30 is rectangular. In addition, in a cross section perpendicular to the central axis CA, the long side of the outer shape of the inductor wiring 30 is along the first axis X. Furthermore, in a cross section perpendicular to the central axis CA, the short side of the outer shape of the inductor wiring 30 is along the second axis Z. Therefore, the virtual rectangle VR coincides with the outer shape of the inductor wiring 30. And the first side of the virtual rectangle VR is longer than the second side of the virtual rectangle VR.

In the second portion P2, the portion that is not the inductor wiring 30 is composed of a plurality of magnetic ribbons 40, a plurality of non-magnetic layers 50, a plurality of non-magnetic portions 60, and a plurality of non-magnetic films 70, similar to the first portion P1.

As shown in Figure 3, in a cross-sectional view perpendicular to the central axis CA, each magnetic ribbon 40 in the second portion P2 is stacked in a direction along the second axis Z. As shown in Figure 2, each magnetic ribbon 40 in the second portion P2 is rectangular when viewed from a direction along the second axis Z. When viewed from a direction along the second axis Z, the long side of each magnetic ribbon 40 is parallel to the central axis CA.

1, in the second portion P2, the magnetic ribbons 40 are located on both sides of the first positive direction X1 and the first negative direction X2 along the first axis X when viewed from the inductor wiring 30. That is, in the second portion P2, two magnetic ribbons 40 are lined up in a direction along the first axis X, sandwiching the inductor wiring 30 therebetween. In addition, two magnetic ribbons 40 are lined up at an interval in a direction along the central axis CA at the same position along the second axis Z.

Similar to the first portion P1 described above, the nonmagnetic layer 50 of the second portion P2 is located between adjacent magnetic ribbons 40 in the direction along the second axis Z. That is, as shown in FIG. 3, the magnetic ribbons 40 and the nonmagnetic layers 50 are alternately stacked in the direction along the second axis Z, similar to the first portion P1.

The non-magnetic portion 60 of the second portion P2 is located between the magnetic ribbons 40 that are lined up at the same position along the second axis Z. The non-magnetic portion 60 fills all of the space between the magnetic ribbons 40 that are lined up at the same position in the direction along the second axis Z. The position of the non-magnetic portion 60 of the second portion P2 overlaps with a part of the non-magnetic portion 60 of the first portion P1 when viewed from the direction along the second axis Z. The non-magnetic portion 60 of the second portion P2 is continuous with the non-magnetic portion 60 of the first portion P1. Note that in the second portion P2, the non-magnetic portion 60 does not exist between the inductor wiring 30 and the magnetic ribbon 40.

In the second portion P2, the nonmagnetic film 70 is located at an end of the first positive direction X1 along the first axis X and at an end of the first negative direction X2, which is the opposite direction to the first positive direction X1. The nonmagnetic film 70 in the second portion P2 is continuous with the nonmagnetic film 70 in the first portion P1.

The third portion P3 is located in the second positive direction Z1 of the second portion P2. When viewed from the second axis Z, the third portion P3 has the same square shape as the first portion P1. The third portion P3 is composed of a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films 70. In this embodiment, the third portion P3 has a structure symmetrical to the first portion P1 with respect to the second portion P2, so a detailed description is omitted. In this way, the base body 20 includes a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films 70.

(Magnetic ribbon thickness and non-magnetic layer thickness)
The dimensions of the magnetic ribbons 40 and the nonmagnetic layers 50 in the direction along the second axis Z will be described in detail. The dimensions of the magnetic ribbons 40 in the direction along the second axis Z vary by up to about 20% for each magnetic ribbon 40 due to manufacturing errors. Also, the dimensions of the nonmagnetic layers 50 in the direction along the second axis Z vary by up to about 20% for each nonmagnetic layer 50 due to manufacturing errors.

Here, the average value of the dimensions of the magnetic ribbon 40 in the direction along the second axis Z is defined as the magnetic ribbon thickness Tm, and the average value of the dimensions of the nonmagnetic layer 50 in the direction along the second axis Z is defined as the nonmagnetic layer thickness Tnm. The method for measuring each thickness will be described below.

First, the dimension of each magnetic ribbon 40 in the direction along the second axis Z is measured. As shown in FIG. 4, an image is taken with an electron microscope of a cross section perpendicular to the central axis CA, so that six magnetic ribbons 40 and five non-magnetic layers 50 are included. Then, in the image, the magnetic ribbons 40 arranged in the second positive direction Z1 along the second axis Z are magnetic ribbon 40A, magnetic ribbon 40B, magnetic ribbon 40C, magnetic ribbon 40D, magnetic ribbon 40E, and magnetic ribbon 40F. In this case, in the image, the minimum dimension of the magnetic ribbon 40A in the direction along the second axis Z is measured as the first dimension Tm1. Similarly, in the image, the minimum dimension of the magnetic ribbon 40B in the direction along the second axis Z is measured as the second dimension Tm2. Similarly, in the image, the minimum dimension of magnetic ribbon 40C in the direction along the second axis Z is measured as a third dimension Tm3. Similarly, in the image, the minimum dimension of magnetic ribbon 40D in the direction along the second axis Z is measured as a fourth dimension Tm4. Similarly, in the image, the minimum dimension of magnetic ribbon 40E in the direction along the second axis Z is measured as a fifth dimension Tm5.

Then, the average value of these first dimension Tm1 to fifth dimension Tm5 is calculated as the magnetic ribbon thickness Tm. In the above embodiment, the magnetic ribbon thickness Tm is 20 μm. Furthermore, each of the first dimension Tm1 to fifth dimension Tm5 is a dimension that is 80% or more and 120% or less of the magnetic ribbon thickness Tm.

Next, the dimension of the nonmagnetic layer 50 in the direction along the second axis Z is measured. As shown in FIG. 4, in the same image where the magnetic ribbon thickness Tm was measured, the nonmagnetic layer 50 located between the magnetic ribbon 40A and the magnetic ribbon 40B is the nonmagnetic layer 50A. The nonmagnetic layer 50 located between the magnetic ribbon 40B and the magnetic ribbon 40C is the nonmagnetic layer 50B. The nonmagnetic layer 50 located between the magnetic ribbon 40C and the magnetic ribbon 40D is the nonmagnetic layer 50C. The nonmagnetic layer 50 located between the magnetic ribbon 40D and the magnetic ribbon 40E is the nonmagnetic layer 50D. The nonmagnetic layer 50 located between the magnetic ribbon 40E and the magnetic ribbon 40F is the nonmagnetic layer 50E.

In the image shown in FIG. 4, the smallest dimension of nonmagnetic layer 50A in the direction along the second axis Z is measured as the first dimension Tnm1. The smallest dimension of nonmagnetic layer 50B in the direction along the second axis Z is measured as the second dimension Tnm2. The smallest dimension of nonmagnetic layer 50C in the direction along the second axis Z is measured as the third dimension Tnm3. The smallest dimension of nonmagnetic layer 50D in the direction along the second axis Z is measured as the fourth dimension Tnm4. The smallest dimension of nonmagnetic layer 50E in the direction along the second axis Z is measured as the fifth dimension Tnm5.

Then, the average value of these first dimension Tnm1 to fifth dimension Tnm5 is calculated as the nonmagnetic layer thickness Tnm. In the above embodiment, the nonmagnetic layer thickness Tnm is 2 μm or less. Therefore, the percentage of the nonmagnetic layer thickness Tnm to the magnetic ribbon thickness Tm is 10% or less. In other words, the nonmagnetic layer thickness Tnm is 3 μm or less, and the percentage of the nonmagnetic layer thickness Tnm to the magnetic ribbon thickness Tm is 15% or less. Furthermore, each of the first dimension Tnm1 to fifth dimension Tnm5 is a dimension that is 80% or more and 120% or less of the nonmagnetic layer thickness Tnm.

(Regarding the first magnetic ribbon)
3, in a cross-sectional view perpendicular to the central axis CA, an end of the inductor wiring 30 in the first positive direction X1 is defined as a first wiring end IP1. Also, in a cross-sectional view perpendicular to the central axis CA, an end of the inductor wiring 30 in the first negative direction X2 is defined as a second wiring end IP2.

Among the magnetic ribbons 40 stacked in the direction along the second axis Z with respect to the inductor wiring 30, the magnetic ribbon 40 with the shortest distance along the second axis Z from the first wiring end IP1 is the first magnetic ribbon 41. Note that when viewed from the direction along the second axis Z, the magnetic ribbon 40 that at least partially overlaps with the inductor wiring 30 is the magnetic ribbon 40 stacked in the direction along the second axis Z with respect to the inductor wiring 30. Therefore, in this embodiment, the magnetic ribbon 40 in the first part P1 and the magnetic ribbon 40 in the third part P3 are magnetic ribbons 40 stacked in the direction along the second axis Z with respect to the inductor wiring 30. On the other hand, the magnetic ribbon 40 in the second part P2 is not stacked in the direction along the second axis Z with respect to the inductor wiring 30. In addition, the first magnetic ribbon 41 is the magnetic ribbon 40 that is located furthest in the second negative direction Z2 among the magnetic ribbons 40 in the first portion P1, and the magnetic ribbon 40 that is located furthest in the second positive direction Z1 among the magnetic ribbons 40 in the third portion P3.

As shown in FIG. 3, in one magnetic ribbon 40, the end in the first positive direction X1 is the first end MP1, and the end in the first negative direction X2 is the second end MP2. At this time, the range excluding both ends in the direction along the first axis X in one magnetic ribbon 40 is the first range AR1. In other words, in one magnetic ribbon 40, the coordinate indicating the position of the second end MP2 in the direction along the first axis X is 0. In one magnetic ribbon 40, the coordinate indicating the position of the first end MP1 in the first positive direction X1 along the first axis X in the direction along the first axis X is 1. At this time, the range in which the coordinate indicating the position in the direction along the first axis X is greater than 0 and less than 1 is the first range AR1. Then, as shown in FIG. 3, a first virtual straight line VL1 is drawn in the direction along the second axis Z while passing through the first wiring end IP1. At this time, the first virtual straight line VL 1 passes through the first area AR 1 of the first magnetic ribbon 41 .

In the present embodiment, in the first portion P1, a plurality of magnetic ribbons 40 are continuously stacked in the second positive direction Z1 with respect to the inductor wiring 30. In a cross-sectional view perpendicular to the central axis CA, the first virtual straight line VL1 passes through the first range AR1 of two or more magnetic ribbons 40 continuously stacked including the first magnetic ribbon 41 among the plurality of magnetic ribbons 40 continuously stacked in the second positive direction Z1 from the first magnetic ribbon 41. Specifically, the first virtual straight line VL1 passes through the first range AR1 of all magnetic ribbons 40 continuously stacked on the first magnetic ribbon 41 among the magnetic ribbons 40 included in the first portion P1.

A second virtual straight line VL2 is drawn passing through the second end MP2 in the first negative direction X2, which is the opposite direction of the first positive direction X1 along the first axis X of the first magnetic ribbon 41, and in the direction along the second axis Z. At this time, the second virtual straight line VL2 passes through the inductor wiring 30. In this embodiment, it is located approximately in the center of the inductor wiring 30 in the direction along the first axis X.

In this embodiment, the inductor component 10 has a linearly symmetrical structure with the second axis Z passing through the center in the direction along the first axis X as the axis of symmetry. Here, a third virtual straight line VL3 is drawn in the direction along the second axis Z while passing through the second wiring end IP2 of the inductor wiring 30. In addition, among the magnetic ribbons 40 stacked in the direction along the second axis Z with respect to the inductor wiring 30, the magnetic ribbon 40 having the shortest distance along the second axis Z from the second wiring end IP2 is defined as the second magnetic ribbon 42. In this case, the third virtual straight line VL3 passes through the first range AR1 of the second magnetic ribbon 42 in a cross-sectional view perpendicular to the central axis CA. More specifically, the third virtual straight line VL3 passes through the center of the second magnetic ribbon 42 in the direction along the first axis X.

In addition, in this embodiment, in a cross-sectional view perpendicular to the central axis CA, the third virtual straight line VL3 passes through the first range AR1 of two or more magnetic ribbons 40 that are continuously stacked, including the second magnetic ribbon 42. Specifically, the third virtual straight line VL3 passes through the first range AR1 of all magnetic ribbons 40 that are continuously stacked on the second magnetic ribbon 42, among the magnetic ribbons 40 included in the first portion P1.

Furthermore, in a cross-sectional view perpendicular to the central axis CA, the third virtual straight line VL3 passes through the first range AR1 of two or more magnetic ribbons 40 that are continuously stacked, including the second magnetic ribbon 42, among the magnetic ribbons 40 included in the third portion P3. Specifically, the third virtual straight line VL3 passes through the first range AR1 of all magnetic ribbons 40 that are continuously stacked on the second magnetic ribbon 42 among the magnetic ribbons 40 included in the third portion P3. More specifically, the third virtual straight line VL3 passes through the center of all magnetic ribbons 40 that are continuously stacked on the second magnetic ribbon 42. Thus, in a cross-sectional view perpendicular to the central axis CA, it is preferable that the third virtual straight line VL3 passes through the above-mentioned first range AR1 for the second magnetic ribbon 42.

(Manufacturing method of inductor components)
Next, a method for manufacturing the inductor element 10 will be described.
5, first, a copper foil preparation step is performed to prepare copper foil 81. Since the copper foil 81 constitutes the inductor wiring 30, the copper foil 81 is prepared to have a thickness required for the inductor wiring 30. In the following description, the copper foil 81 is disposed so that two main surfaces of the copper foil 81 are perpendicular to the second axis Z, and a cross section perpendicular to the central axis CA is shown.

6, a first coating process is performed to coat the surfaces of the copper foil 81 that are perpendicular to the second axis Z, except for the area occupied by the magnetic ribbons 40 in the second portion P2, when viewed from the direction along the second axis Z. Specifically, a first coating portion 82 is formed to coat the surfaces of the copper foil 81 that face the second negative direction Z2 along the second axis Z, except for the area occupied by the magnetic ribbons 40 in the second portion P2. To form the first coating portion 82, a photosensitive dry film resist is applied to the entire surface of the copper foil 81 that faces the second negative direction Z2 along the second axis Z. Next, the dry film resist is hardened by exposing the portion where the first coating portion 82 is to be formed. Next, a dry film resist is similarly applied to the surface of the copper foil 81 that faces the second positive direction Z1 along the second axis Z, and the dry film resist is hardened by exposing the portion where the first coating portion 82 is to be formed. Thereafter, the uncured portion of the applied dry film resist is peeled off and removed by a chemical solution. As a result, the cured portion of the applied dry film resist is formed as the first covering portion 82. Note that the photolithography in other steps described later is a similar process, and therefore detailed description thereof will be omitted.

7, a copper foil etching process is performed to etch the copper foil 81 exposed from the first covering portion 82. The copper foil 81 partially covered by the first covering portion 82 is etched to remove the exposed copper foil 81.

Next, as shown in Fig. 8, a first coating removal process is performed to remove the first coating portion 82. Specifically, the first coating portion 82 is peeled off by wet etching the first coating portion 82 with a chemical.

Next, a second coating process is performed to cover the area occupied by the multiple magnetic ribbons 40 when viewed from the direction along the second axis Z on both sides of the copper foil 81 perpendicular to the second axis Z. Specifically, first, as shown in FIG. 9, a dry film resist R is applied to the entire surface of the copper foil 81 facing the second positive direction Z1 along the second axis Z. Next, as shown in FIG. 10, a second coating portion 83 is formed by photolithography to cover the area other than the area occupied by the magnetic ribbons 40 and the non-magnetic layer 50 on the surface of the copper foil 81 facing the second positive direction Z1 along the second axis Z when viewed from the direction along the second axis Z. Thereafter, similarly, a second coating portion 83 is formed by photolithography to cover the area other than the area occupied by the magnetic ribbons 40 and the non-magnetic layer 50 on the surface of the copper foil 81 facing the second negative direction Z2 along the second axis Z when viewed from the direction along the second axis Z.

Next, a laminate preparation step is performed to prepare a laminate 84 in which the magnetic ribbons 40 and the nonmagnetic layers 50 are laminated.
First, for example, a ribbon is prepared as the magnetic ribbon 40. The ribbon is made of, for example, NANOMET (registered trademark) manufactured by Tohoku Magnet Institute Co., Ltd., Metglas (registered trademark) or FINEMET (registered trademark) manufactured by Hitachi Metals, Ltd., FeSiB, FeSiBCr, etc. This ribbon is cut into 10 mm squares. A nonmagnetic material, for example, an epoxy resin film, is laminated on the cut ribbon. The epoxy resin film has a thickness set to 15% or less of the ribbon thickness. In this embodiment, the percentage of the thickness of the epoxy resin film relative to the ribbon thickness is 10% or less, and the thickness of the epoxy resin film is 2 μm or less. Furthermore, the cut ribbon is laminated on the laminated epoxy resin film. In this way, after the ribbon and the nonmagnetic material are alternately laminated, the ribbon and the nonmagnetic material are cured and bonded by a vacuum heating and pressing device. Then, by dicing to a desired size, a laminate 84 in which a plurality of magnetic ribbons 40 and nonmagnetic layers 50 are laminated can be prepared. In this embodiment, two types of laminates 84 are prepared: a first laminate 84A constituting the magnetic ribbon 40 and the nonmagnetic layer 50 in the first portion P1 and the third portion P3, and a second laminate 84B constituting the magnetic ribbon 40 and the nonmagnetic layer 50 in the second portion P2.

Next, a laminate arrangement step is performed in which the laminate 84 is arranged.
11, of the laminate 84, a first laminate 84A constituting the magnetic ribbons 40 and the nonmagnetic layer 50 in the third portion P3 is temporarily adhered to a surface of the copper foil 81 facing the second positive direction Z1 along the second axis Z by a thermoplastic adhesive 85. The thermoplastic adhesive 85 is indicated by a thick line in FIGS. 11 to 16.

Next, as shown in Fig. 12, the entire laminate 84 is inverted in the direction along the second axis Z. Then, as shown in Fig. 13, the second laminate 84B constituting the magnetic ribbon 40 and the non-magnetic layer 50 in the second portion P2 of the laminate 84 is disposed on a portion of the surface of the first laminate 84A facing the second positive direction Z1 along the second axis Z that is not in contact with the copper foil 81. Specifically, the second laminate 84B can be disposed by pressing the laminate 84 into the opening of the copper foil 81 by a press or the like.

14, the first laminate 84A constituting the magnetic ribbon 40 and the non-magnetic layer 50 in the first portion P1 of the laminate 84 is temporarily bonded to the surface facing the second positive direction Z1 along the second axis Z of the copper foil 81 and the surface facing the second positive direction Z1 along the second laminate 84B with a thermoplastic adhesive 85. This positions the laminate 84.

15, a pressing step is performed. With the entire assembly covered with a non-magnetic resin material 86, a pressing process is performed. As a result, each layer in the direction along the second axis Z is pressure-bonded.
Next, as shown in FIG. 16, a singulation process is performed. Specifically, for example, the pieces are singulated by dicing at the break lines DL. In the above-mentioned second covering portion 83, the portions between the first laminates 84A aligned in the direction along the first axis X become the nonmagnetic portion 60. In addition, in the second covering portion 83, the portions between the first laminates 84A aligned in the direction along the central axis CA and between the second laminates 84B become the nonmagnetic portion 60. Furthermore, the thermoplastic adhesive 85 remains on both sides of the inductor wiring 30 in the direction along the second axis Z as a part of the nonmagnetic layer 50. In addition, in the example shown in FIG. 16, the laminate 84 is cut along the end face in the first positive direction X1 and the end face in the first negative direction X2. Thereafter, the nonmagnetic film 70 made of a nonmagnetic material is applied to the end face in the first positive direction X1 and the end face in the first negative direction X2 of the laminate 84. This allows the inductor component 10 to be formed. Furthermore, with this method, the thermoplastic adhesive 85 wraps around the side sides of the inductor wiring 30 facing the first positive direction X1 and the side sides facing the first negative direction X2, so that the magnetic ribbon 40 and the inductor wiring 30 do not come into direct contact with each other, and insulation is ensured.

(Simulation results)
Next, a description will be given of the results of a simulation in which the characteristics obtained for the inductor component 10 are compared with those of an inductor component of a comparative example. Femtet (registered trademark) from Murata Software Co., Ltd. was used for the simulation.

First, the conditions of the simulation will be described.
The software used is Femtet2019 made by Murata Software. The solver is magnetic field harmonic analysis. The model is three-dimensional. The standard mesh size is 0.25 mm. The magnetic material is an amorphous metal magnetic ribbon made of Fe, Si, Cr and B. The relative magnetic permeability μr is 7000, and the saturation magnetic flux density Bs is 1.3 T. The magnetic material BH curve used satisfies B = Bs x tanh (μ0 x μr x H / Bs). In addition, the magnetic material BH curve uses a portion with a relative magnetic permeability μr of 1 or more so that it does not become less than the vacuum permeability, and further extrapolates to the vacuum permeability using the function of Femtet2019. The material of the inductor wiring 30 is copper. In addition, the conductivity of the magnetic material is 0.568181818 MS / m. The current applied to the wiring is a sine wave of 3 MHz and has an amplitude of 2.25A.

Next, the conditions regarding the dimensions and position of the inductor component model used in the simulation will be described.
The dimension of the inductor wiring 30 in the direction along the first axis X is 1000 μm. The dimension of the inductor wiring 30 in the direction along the second axis Z is 100 μm. The dimension of the inductor wiring 30 in the direction along the central axis CA is 2400 μm.

The dimension of the magnetic ribbon 40 in the direction along the first axis X is 990 μm. The dimension of the magnetic ribbon 40 in the direction along the second axis Z is 20 μm. The dimension of the magnetic ribbon 40 in the direction along the central axis CA is 990 μm.

The non-magnetic layer 50 is non-magnetic and insulating. The dimension of the non-magnetic layer 50 in the direction along the second axis Z is 0.06 to 6.00 μm. The dimension of the non-magnetic portion 60 in the direction along the first axis X is 20 μm. The dimension of the non-magnetic portion 60 in the direction along the central axis CA is 20 μm. The number of magnetic ribbons 40 stacked in the direction along the second axis Z is 41. The number of magnetic ribbons 40 lined up in the direction along the first axis X is 2. The number of magnetic ribbons 40 lined up in the direction along the central axis CA is 2.

The inductor wiring 30 was positioned so that the center of gravity of the inductor wiring 30 coincided with the center of gravity of the base body 20. The relative permeability μr of the nonmagnetic material of the nonmagnetic layer 50, the nonmagnetic portion 60, and the nonmagnetic film 70 was set to 1.

The dimension of the inductor component 10 in the direction along the first axis X is 2020 μm. In the simulation, the element body 20 has a film of the same nonmagnetic material as the nonmagnetic film 70 at both ends in the direction along the central axis CA. The dimension of the film in the direction along the central axis CA is 10 μm. Therefore, the dimension of the element body 20 in the direction along the central axis CA is 2020 μm. That is, in this simulation, the dimension of the inductor wiring 30 in the direction along the central axis CA is 380 μm larger than the dimension of the element body 20 in the direction along the central axis CA. Therefore, the simulation is performed in a state where the inductor wiring 30 protrudes by 190 μm from the end face of the element body 20 in the positive direction Y1 and the inductor wiring 30 protrudes by 190 μm from the end face of the element body 20 in the negative direction Y2. Furthermore, the dimension of the inductor component 10 in the direction along the second axis Z varies depending on the dimension of the nonmagnetic layer 50 in the direction along the second axis Z.

As shown in Figure 17, the dimension of the non-magnetic layer 50 in the direction along the second axis Z was changed within the range of 0.06 to 6.00 μm, and the inductance L obtained when the wiring applied current was a sine wave of 3 MHz with an amplitude of 2.25 A was calculated by simulation.

Incidentally, the inductance L obtained from the inductor component 10 is affected by the dimensional variation in the direction along the second axis Z of the magnetic ribbon 40. The dimension in the direction along the second axis Z of the magnetic ribbon 40 may be about 20% larger or smaller due to manufacturing.

Therefore, the inductance L obtained when the non-magnetic layer thickness Tnm is 20% smaller than the design value, that is, when the non-magnetic layer thickness Tnm is 16 μm, was calculated by simulation. Similarly, the inductance L obtained when the non-magnetic layer thickness Tnm is 20% larger than the design value, that is, when the non-magnetic layer thickness Tnm is 24 μm, was calculated by simulation. Then, as shown in FIG. 18, when the inductance when the non-magnetic layer thickness Tnm is 20 μm, which is the design value, is taken as 100%, the acquisition rate of the inductance L when the magnetic ribbon thickness Tm is 20% smaller is calculated as the negative side acquisition rate RN. On the other hand, when the inductance L obtained as the simulation result shown in FIG. 17 is taken as 100%, the acquisition rate of the inductance L when the magnetic ribbon thickness Tm is 20% larger is calculated as the positive side acquisition rate RP. As a result, the variation V of the inductance L when the magnetic ribbon thickness Tm varies by 20% is calculated as the difference between the negative side acquisition rate RN and the positive side acquisition rate RP.

According to the simulation results shown in Figure 18, the positive side acquisition ratio RP increases as the nonmagnetic layer thickness Tnm increases. The degree of change in the positive side acquisition ratio RP due to an increase in the nonmagnetic layer thickness Tnm changes significantly once the nonmagnetic layer thickness Tnm is 2 μm. The degree of change in the positive side acquisition ratio RP due to an increase in the nonmagnetic layer thickness Tnm changes even more significantly once the nonmagnetic layer thickness Tnm is 3 μm.

According to the simulation results shown in FIG. 18, the negative side acquisition ratio RN decreases as the nonmagnetic layer thickness Tnm increases. The degree of change in the negative side acquisition ratio RN due to an increase in the nonmagnetic layer thickness Tnm changes significantly when the nonmagnetic layer thickness Tnm is 2 μm. The degree of change in the negative side acquisition ratio RN due to an increase in the nonmagnetic layer thickness Tnm changes even more significantly when the nonmagnetic layer thickness Tnm is 3 μm.

As described above, the variation V of inductance L is calculated as the difference between the negative side acquisition rate RN and the positive side acquisition rate RP. Therefore, the variation V of inductance L increases as the nonmagnetic layer thickness Tnm increases. The degree of change in the variation V of inductance L with respect to the nonmagnetic layer thickness Tnm changes in two stages, with the boundary between when the nonmagnetic layer thickness Tnm is 2 μm and when it is 3 μm.

When the nonmagnetic layer thickness Tnm is greater than 3 μm, the variation V of the inductance L is much larger than when the nonmagnetic layer thickness Tnm is 3 μm or less. In other words, when the nonmagnetic layer thickness Tnm is 3 μm or less, that is, when the percentage of the nonmagnetic layer thickness Tnm to the magnetic ribbon thickness Tm is 15% or less, the variation V of the inductance L is smaller than when the nonmagnetic layer thickness Tnm is greater than 3 μm. Furthermore, when the nonmagnetic layer thickness Tnm is 2 μm or less, that is, when the percentage of the nonmagnetic layer thickness Tnm to the magnetic ribbon thickness Tm is 10% or less, the variation V of the inductance L is even smaller than when the nonmagnetic layer thickness Tnm is greater than 2 μm. In order to adjust the nonmagnetic layer thickness Tnm, for example, the thickness of the epoxy resin film in the above-mentioned manufacturing method may be changed.

(Discussion)
It is generally known that the inductance L obtained from an inductor component increases as the total volume of the magnetic material contained in the element body 20 increases. However, in the above simulation results, the number and size of the magnetic ribbons 40, which are the magnetic material, are the same, so the total volume of the magnetic material is constant. Therefore, it was found that there is a correlation between the nonmagnetic layer thickness Tnm and the inductance L.

(Effects of this embodiment)
Next, the effects of the above embodiment will be described.
(1) According to the above embodiment, the element body 20 has a plurality of magnetic ribbons 40 and a plurality of nonmagnetic layers 50. The plurality of magnetic ribbons 40 are stacked along the second axis Z, and each nonmagnetic layer 50 is located between adjacent magnetic ribbons 40 along the second axis Z. That is, the inductor component 10 of the above embodiment has a regular structure of the magnetic ribbons 40 that are stacked along the second axis Z.

According to the above embodiment, the percentage of the non-magnetic layer thickness Tnm relative to the magnetic ribbon thickness Tm is 15% or less. Therefore, as shown in the simulation results in Figure 18, even if the magnetic ribbon thickness Tm varies by 20%, the variation V of the inductance L for each inductor component 10 can be suppressed.

(2) According to the above embodiment, the nonmagnetic layer thickness Tnm is 3 μm or less. If the nonmagnetic layer thickness Tnm is sufficiently small, the variation V of the inductance L for each inductor component 10 can be suppressed regardless of the magnetic ribbon thickness Tm.

(3) In the simulation results shown in FIG. 18, the degree of change in the variation V of the inductance L with respect to the nonmagnetic layer thickness Tnm changes significantly when the percentage of the nonmagnetic layer thickness Tnm with respect to the magnetic ribbon thickness Tm is 10%. According to the above embodiment, the percentage of the nonmagnetic layer thickness Tnm with respect to the magnetic ribbon thickness Tm is 10% or less. Therefore, the degree of change in the variation V of the inductance L with respect to the nonmagnetic layer thickness Tnm changes twice so that it becomes smaller as the nonmagnetic layer thickness Tnm becomes smaller, and the variation V of the inductance L is small. Therefore, even if the magnetic ribbon thickness Tm varies by 20%, the variation V of the inductance L obtained from the inductor component 10 can be further suppressed.

(4) According to the above embodiment, the nonmagnetic layer thickness Tnm is 2 μm or less. If the nonmagnetic layer thickness Tnm is sufficiently small, the variation V of the inductance L for each inductor component 10 can be further suppressed regardless of the magnetic ribbon thickness Tm.

(5) The magnetic flux generated when a current flows through the inductor wiring 30 in a direction along the central axis CA includes magnetic flux that penetrates into the magnetic ribbon 40 in a direction along the second axis Z. The magnetic flux that penetrates in this manner generates eddy currents in the magnetic ribbon 40. Furthermore, when viewed from the direction along the second axis Z, the larger the area of each magnetic ribbon 40, the larger this eddy current becomes. When eddy currents are generated, the energy of the magnetic flux is lost as thermal energy, resulting in losses.

According to the above embodiment, the magnetic ribbons 40 are arranged in a line with two in the direction along the third axis and two in the direction along the fourth axis at the same position along the second axis Z. Therefore, the area of the magnetic ribbon 40 in the second portion P2 when viewed from the direction along the second axis Z is smaller than when there is one magnetic ribbon 40 at the same position along the second axis Z. Therefore, the eddy current generated in one magnetic ribbon 40 is smaller.

(6) According to the above embodiment, two magnetic ribbons 40 are arranged in the direction along the first axis X at the same position along the second axis Z. Therefore, the first magnetic ribbon 41 through which the first virtual straight line VL1 passing through the first wiring end IP1 of the inductor wiring 30 passes and the second magnetic ribbon 42 through which the third virtual straight line VL3 passing through the second wiring end IP2 of the inductor wiring 30 passes are different magnetic ribbons 40. Therefore, while ensuring a certain degree of size as the dimension of the inductor wiring 30 in the direction along the first axis X, the positional relationship described above can be realized as the positional relationship between the inductor wiring 30 and the first magnetic ribbon 41.

(7) According to the above embodiment, the dimension of all magnetic ribbons 40 in the direction along the second axis Z is 80% or more and 120% or less of the magnetic ribbon thickness Tm. In other words, it can be said that the dimension of all magnetic ribbons 40 in the direction along the second axis Z is approximately equal. Therefore, the magnetic flux density within each magnetic ribbon 40 is uniform, and the magnetic flux is less likely to concentrate and saturate at a specific location. As a result, the magnetic flux density is improved when viewed throughout the entire base body 20.

(8) According to the first embodiment, the dimension of all nonmagnetic layers 50 in the direction along the second axis Z is 80% or more and 120% or less of the nonmagnetic layer thickness T nm. In other words, it can be said that the dimension of all nonmagnetic layers 50 in the direction along the second axis Z is approximately equal. Therefore, the disturbance of the magnetic flux occurring at the interface between the nonmagnetic layer 50 and the magnetic ribbon 40 can be made uniform.

(9) According to the above embodiment, the first virtual straight line VL1 passes through the first range AR1 of the first magnetic ribbon 41. Therefore, among the magnetic flux generated when a current flows through the inductor wiring 30, in the vicinity of the first wiring end IP1 of the inductor wiring 30, most of the magnetic flux oriented along the first virtual straight line VL1 passes through the part of the first magnetic ribbon 41 except for the end in the direction along the first axis X. That is, among the magnetic flux generated when a current flows through the inductor wiring 30, the magnetic flux passing through the end in the direction along the first magnetic ribbon 41 is reduced. Therefore, it is possible to suppress the magnetic flux from being disturbed or being concentrated locally. According to such a positional relationship between the first magnetic ribbon 41 and the inductor wiring 30, the obtained inductance L is large regardless of the filling rate of the magnetic material.

<Other embodiments>
The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined and implemented within a range that does not cause technical contradiction.

- In the above embodiment, the shape of the base body 20 is not limited to the example of the above embodiment. For example, when viewed from a direction along the second axis Z, the shape of the base body 20 may be rectangular or a polygon other than a square. Furthermore, for example, when viewed from a direction along the second axis Z, the shape of the base body 20 may be circular, such as an ellipse. Furthermore, the shape of the base body 20 may be a rectangular parallelepiped, cube, polygonal prism, cylinder, etc., whose dimensions in the direction along the third axis are different from those in the direction along the fourth axis.

- In the above embodiment, the shape of the inductor wiring 30 can be changed as appropriate as long as it is capable of imparting inductance L to the inductor component 10 by generating magnetic flux in the magnetic ribbon 40 when current flows.

For example, in the modified inductor component 110 shown in FIG. 19, the inductor wiring 130 is elliptical in a cross section perpendicular to the central axis CA. Then, a virtual rectangle VR2 is drawn that circumscribes the inductor wiring 130 and has a minimum area, a first side along the first axis X, and a second side along the second axis Z. In this case, the first side of the virtual rectangle VR2 is longer than the second side of the virtual rectangle VR2. In this way, it is more preferable that the long side of the virtual rectangle VR2 is parallel to the first axis X, because the end of the wiring cross section in the direction along the first axis X, where the magnetic flux is more concentrated, corresponds to an area of small antimagnetic field of the first magnetic ribbon 41.

In the above embodiment, the shape of the inductor wiring 30 in a cross section perpendicular to the central axis CA may be such that the second side along the second axis Z is longer than the first side along the first axis X. Even in this case, magnetic flux is concentrated at the first wiring end IP1, which is the end of the inductor wiring 30 in the first positive direction X1. Therefore, this is more preferable because the first wiring end IP1 in the wiring cross section where the magnetic flux is more concentrated corresponds to an area of the first magnetic ribbon 41 with a small antimagnetic field.

Furthermore, in a cross section perpendicular to the central axis CA, the shape of the inductor wiring 30 may be a shape that does not have symmetry, such as linear symmetry or rotational symmetry, for example, when it includes one or more protruding parts. In this way, when symmetry is lost in a cross section perpendicular to the central axis CA, there will be a location where the magnetic flux is more concentrated than in other locations. It is preferable to determine the positional relationship of the first magnetic ribbon 41 so that the location where the magnetic flux is more concentrated than in other locations, such as a protruding part, is the first wiring end IP1.

For example, in a cross section perpendicular to the central axis CA, the shape of the inductor wiring 30 may be a square or a perfect circle. In this case, the virtual rectangle VR drawn in the cross section perpendicular to the central axis CA is a square, and the first side of the virtual rectangle VR does not have to be longer than the second side of the virtual rectangle VR.

The first magnetic ribbon 41 is determined according to the shape of the inductor wiring 30 in a cross section perpendicular to the central axis CA. In the modified example shown in FIG. 19, among the magnetic ribbons 40 stacked in the direction along the second axis Z with respect to the inductor wiring 130, the magnetic ribbon 40 having the shortest distance along the second axis Z from the first wiring end IP1 is one of the magnetic ribbons 40 included in the second portion P2. Even in this case, it is sufficient that the first virtual straight line VL1 passes through the first range AR1 of the first magnetic ribbon 41.

In the above embodiment, the position of the inductor wiring 30 in the direction along the first axis X is not limited to the example of the above embodiment. It is preferable that the first virtual straight line VL1 passes through the first range AR1 of five magnetic ribbons 40 that are continuously arranged in the direction along the second axis Z including the first magnetic ribbon 41, and it is more preferable that the first virtual straight line VL1 passes through the first range AR1 of all the magnetic ribbons 40. Therefore, the first virtual straight line VL1 does not have to pass through approximately the center of all the magnetic ribbons 40 in the direction along the first axis X. In addition, the first virtual straight line VL1 may be outside the first range AR1 of the first magnetic ribbon 41.

In the above embodiment, the shape of the inductor wiring 30 is not limited to a straight line. It is sufficient that the inductor wiring 30 extends along the main surface MF of the magnetic ribbon 40, and may be, for example, a curved shape or a meandering shape as a whole. For example, as in the above-mentioned simulation, both ends of the inductor wiring 30 may protrude from the element body 20.

The inductor wiring 30 may also be connected to an extraction wiring extending in a direction intersecting the main surface MF, or to a via wiring extending in a direction along the second axis Z. Furthermore, multiple inductor wirings 30 may be connected to via wiring extending in a direction along the second axis Z, and as a whole, may have a helical or helical three-dimensional spiral shape. In this case, the portion extending along the main surface MF of the magnetic ribbon 40 is the inductor wiring 30.

In the above embodiment, the material of the inductor wiring 30 is not limited to the example of the above embodiment as long as it is a conductive material. For example, the material of the inductor wiring 30 may be a conductive resin.

In the above embodiment, the central axis CA and the third axis do not have to coincide. The fourth axis does not have to coincide with the first axis X. For example, when the shape of the inductor wiring 30 is a meander shape as described above, the central axis CA extends in a meander shape. In this case, the third axis is perpendicular to the second axis Z, and the fourth axis is perpendicular to the second axis Z and intersects with the third axis. Even in this case, if multiple magnetic ribbons 40 are arranged in the direction along the third axis or multiple magnetic ribbons 40 are arranged in the direction along the fourth axis, the area of the magnetic ribbon 40 when viewed from the direction along the second axis Z is smaller than when there is one magnetic ribbon 40 at the same position along the second axis Z. Therefore, the eddy current generated in one magnetic ribbon 40 is smaller.

The positional relationship between the first virtual straight line VL1 passing through the first wiring end IP1 and the first range AR1 of the first magnetic ribbon 41 described in the above embodiment may be satisfied in any one of the cross sections of the inductor wiring 30 perpendicular to the central axis CA. In other words, the positional relationship between the first virtual straight line VL1 and the first range AR1 of the first magnetic ribbon 41 may not be satisfied in all areas of the inductor wiring 30. It is not necessary that there is even one cross section that satisfies the positional relationship between the first virtual straight line VL1 passing through the first wiring end IP1 and the first range AR1 of the first magnetic ribbon 41. In other words, the position of the first wiring end IP1 of the inductor wiring 30 in the direction along the first axis X may not be within the first range AR1 of the first magnetic ribbon 41, and may coincide with the end of the first magnetic ribbon 41 in the direction along the first axis X.

In the above embodiment, an external electrode may be connected to the portion of the inductor wiring 30 exposed from the element body 20. For example, external electrodes may be formed by coating, printing, plating, etc. on both end faces of the inductor wiring 30 in the direction along the central axis CA and on both end faces of the element body 20 in the direction along the central axis CA.

In the above embodiment, the direction in which the multiple magnetic ribbons 40 and multiple non-magnetic layers 50 are stacked may not be perpendicular to the central axis CA and the first axis X due to manufacturing errors, etc. In the above embodiment, the magnetic ribbons 40 etc. are "stacked in a direction along the second axis Z" to allow for such manufacturing errors, etc.

In the above embodiment, the number of magnetic ribbons 40 stacked in the direction along the second axis Z may be two or more. In this case, the inductor wiring 30 and the non-magnetic layer 50 may be disposed between the two magnetic ribbons 40.

In the above embodiment, the material of the magnetic ribbon 40 is not limited to the example of the above embodiment as long as it is a magnetic material. For example, it may be Fe or Ni. It may also be a metallic magnetic material other than Fe, Ni, Co, Cr, Cu, Al, Si, B, or P.

In the above embodiment, the material of the non-magnetic layer 50 is not limited to the example of the above embodiment, so long as it is a non-magnetic material. The non-magnetic layer 50 may be a resin other than acrylic resin, epoxy resin, or silicone resin, or may be a non-magnetic ceramic such as alumina, silica, or glass, or a non-magnetic inorganic material containing these, or may be a void, or may even be a mixture of these. The same applies to the non-magnetic portion 60 and the non-magnetic film 70. In addition, the materials of the non-magnetic layer 50, the non-magnetic portion 60, and the non-magnetic film 70 may be different from each other or may be partially different from each other, so long as they are non-magnetic materials.

In the above embodiment, the nonmagnetic layer 50, the nonmagnetic portion 60, and the nonmagnetic film 70 may be integrated or may be separate members. For example, the nonmagnetic layer 50 may be hollow, or may be configured with an oxide film formed by oxidizing the surface of the magnetic ribbon 40 as an insulator.

In the above embodiment, the non-magnetic portion 60 may be omitted. In this case, the magnetic ribbons 40 aligned in the direction along the third axis or the fourth axis may be in direct contact with each other. The non-magnetic portion 60 may also be present between the inductor wiring 30 and the magnetic ribbon 40. In this case, the non-magnetic portion 60 can ensure insulation between the inductor wiring 30 and the magnetic ribbon 40.

Note that "multiple magnetic ribbons 40 are stacked" and "multiple magnetic ribbons 40 are lined up" specifically refer to cases where adjacent magnetic ribbons 40 are completely or partially insulated from each other or where a microscopic physical boundary exists. For example, this does not include a state where the magnetic ribbons 40 are sintered together and completely integrated.

In the above embodiment, the configuration of the base body 20 can be changed as long as the base body 20 has a plurality of magnetic ribbons 40 and a plurality of non-magnetic layers 50. For example, all of the second portion P2 except the inductor wiring 30 may be composed of the magnetic ribbon 40 or the non-magnetic layer 50. In addition, when all of the second portion P2 except the inductor wiring 30 is composed of the magnetic ribbon 40, the magnetic ribbon 40 may be a composite material of a powdered magnetic material and a non-magnetic material. An example of such a composite material is a metal composite material of amorphous metal particles made of Fe, Si, Cr, and B and a resin.

- According to the above embodiment, the magnetic ribbons 40 are arranged in pairs in the direction along the first axis X at the same position along the second axis Z, and in pairs in the direction along the central axis CA, i.e., the third axis. That is, when "M" and "N" are positive integers, the magnetic ribbons 40 are arranged in "M" pieces in the direction along the third axis at the same position along the second axis Z, and in "N" pieces in the direction along the first axis X, i.e., the fourth axis, and both "M" and "N" are 2. In the above embodiment, "M", which is the number of first magnetic ribbons 41 arranged in the direction along the fourth axis, may be 1 or 3 or more. Also, "N", which is the number of magnetic ribbons 40 arranged in the direction along the central axis CA, may be 1 or 3 or more. In addition, when at least one of "M" and "N" is 2 or more, the area of each magnetic ribbon 40 when viewed from the second axis Z can be reduced, making it easier to reduce loss due to eddy currents.

The relationship between the magnetic ribbon thickness Tm and the nonmagnetic layer thickness Tnm described in the above embodiment only needs to be satisfied in any one of the cross sections of the inductor wiring 30 perpendicular to the central axis CA. In other words, the relationship between the magnetic ribbon thickness Tm and the nonmagnetic layer thickness Tnm does not need to be satisfied in all regions of the inductor wiring 30.

The dimensions of the multiple magnetic ribbons 40 in the direction along the second axis Z may be the same as each other, or may vary by more than 20% with respect to the magnetic ribbon thickness Tm.
The dimensions of the nonmagnetic layers 50 in the direction along the second axis Z may be the same as each other, or may vary by more than 20% from the average value. At the very least, the nonmagnetic layer thickness Tnm should be 15% or less of the magnetic ribbon thickness Tm.

In the above embodiment, the number and positions of the non-magnetic portions 60 are not limited to the examples in the above embodiment. The number and positions of the non-magnetic portions 60 may be changed in accordance with the number and positions of the magnetic ribbons 40 in the direction along the first axis X or the direction along the central axis CA. The size of the non-magnetic portions 60 may also be changed appropriately in accordance with the spacing between the magnetic ribbons 40 at the same position in the direction along the second axis Z.

In the above embodiment, the non-magnetic film 70 may be omitted. When forming the non-magnetic film 70, for example, in the manufacturing method of the inductor component 10, the dimension of the laminate 84 in the direction along the first axis X and central axis CA may be set smaller than the gap in the direction along the first axis X and central axis CA of the second covering portion 83. In this case, the resin material 86 enters the gap between the second covering portion 83 and the laminate 84, thereby forming the non-magnetic film 70.

In the above embodiment, the manufacturing method of the inductor component 10 is not limited to the example of the above embodiment. For example, the laminate 84 may not be disposed on the second covering portion 83, but may be formed into a plurality of sheets in which the element body 20 is laminated in a direction along the second axis Z, and the element body 20 may be formed by stacking these multiple sheets.

REFERENCE SIGNS LIST 10, 110... Inductor component 20... Base body 30, 130... Inductor wiring 40... Magnetic ribbon 41... First magnetic ribbon 42... Second magnetic ribbon 50... Non-magnetic layer 60... Non-magnetic portion 70... Non-magnetic film AR1... First range CA... Central axis MF... Main surface MP1... First end MP2... Second end Tm... Magnetic ribbon thickness Tnm... Non-magnetic layer thickness VL1... First virtual straight line VL2... Second virtual straight line VR, VR2... Virtual rectangle X... First axis Z... Second axis

Claims (7)

an element body including a plurality of flat magnetic ribbons made of a magnetic material, the plurality of magnetic ribbons being stacked in a direction perpendicular to a main surface of the magnetic ribbons;
an inductor wiring extending along the main surface inside the element body;
When an axis along which the inductor wiring extends is defined as a central axis, an axis along the main surface in a cross-sectional view perpendicular to the central axis is defined as a first axis, and an axis perpendicular to the main surface in a cross-sectional view is defined as a second axis,
the element body has a plurality of nonmagnetic layers made of a nonmagnetic material and positioned between the magnetic ribbons adjacent to each other along the second axis,
when an average value of dimensions of the plurality of magnetic ribbons in a direction along the second axis is defined as a magnetic ribbon thickness, and an average value of dimensions of the plurality of non-magnetic layers in a direction along the second axis is defined as a non-magnetic layer thickness, a percentage of the non-magnetic layer thickness with respect to the magnetic ribbon thickness is 15% or less,
the magnetic ribbons and the nonmagnetic layers are alternately stacked in a direction along the second axis,
When "M" and "N" are integers of 2 or more,
The magnetic ribbons are arranged in a number "M" at the same position along the second axis in a direction along a third axis perpendicular to the second axis, and in a number "N" along a fourth axis perpendicular to the second axis and the third axis,
When viewed from a direction along the second axis, a part or all of the boundary between the magnetic ribbons adjacent to each other at the same position along the second axis is on the inductor wiring.
Inductor components. The inductor component according to claim 1 , wherein a percentage of the thickness of the nonmagnetic layer with respect to a thickness of the magnetic ribbon is 10% or less. The inductor component according to claim 1 , wherein the nonmagnetic layer has a thickness of 3 μm or less. The inductor component according to claim 3 , wherein the nonmagnetic layer has a thickness of 2 μm or less. The dimension of each of the magnetic ribbons in the direction along the second axis is 80% or more and 120% or less of the thickness of the magnetic ribbon.
The inductor component according to any one of claims 1 to 4 . The dimension of each of the nonmagnetic layers in the direction along the second axis is 80% or more and 120% or less of the thickness of the nonmagnetic layer.
The inductor component according to any one of claims 1 to 5 . When one of the two directions along the first axis is defined as a first positive direction,
In the cross-sectional view,
an end of the inductor wiring in the first positive direction is defined as a first wiring end;
Among the magnetic ribbons stacked in the direction along the second axis with respect to the inductor wiring, the magnetic ribbon having the shortest distance from an end of the first wiring in the direction along the second axis is designated as a first magnetic ribbon,
When a range of the first magnetic ribbon excluding both ends in a direction along the first axis is defined as a first range,
When a virtual line is drawn passing through the first wiring end and extending in a direction along the second axis, the virtual line passes through the first range of the first magnetic ribbon.
The inductor component according to any one of claims 1 to 6 .

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