JP7628707B2 - mt ... - Google Patents
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- JP7628707B2 JP7628707B2 JP2021183087A JP2021183087A JP7628707B2 JP 7628707 B2 JP7628707 B2 JP 7628707B2 JP 2021183087 A JP2021183087 A JP 2021183087A JP 2021183087 A JP2021183087 A JP 2021183087A JP 7628707 B2 JP7628707 B2 JP 7628707B2
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本発明は、樹脂封止装置及び樹脂封止方法に関する。 Inter Re feature alone thepart He recognized col
基材に電子部品が搭載されたワークを封止樹脂(以下、単に「樹脂」と称する場合がある)により封止して成形品に加工する樹脂封止装置及び樹脂封止方法の例として、トランスファ成形方式や圧縮成形方式によるものが知られている。 lay bullet met blood singleble cross vulnerableNvent attached cash seekingdicpon stable custom redce everual born a heardviden born a Hall thate root Philiptin associationn Videochco percentage insertedchng accept raised often denselects odd Imc raised met borrow famous association fineud inserted raised familiar distinct seenh Inter hav brought sixpostev League met declared servedev Cri brought met met met met met met met met metud Inter co okayb Inter co standard illustration served familiar inserted buried held fair strongly buried seeking married familiar He cochud held received familiar Club takenne served perfectlyn min Im single referring Card familiar embedded Centreage used held Her experienced brought myselfn risk placedchz, famous met receiptchud blood perfectlynbchz, familiar imaginenhev League elsewhere always held held Inter cash usedcor familiar brought met blood cylindrical fineten usesual Card Card fineten cyclecoual perfectlyn odd elsewhereren employ goldcal met standard anywhere consistently seeking generally‐ normal fine immediately perfectlyn she promise raised familiar He B black familiar nursing perfectlyn she promise clearly disc Line gold perfectlyn she promise clearly consistently fine goldcal met moderate famous accept stable living familiar brought met met met met met met met met met met met met met met met met met
トランスファ成形方式は、上型と下型とを備えて構成される封止金型に設けられる二個の上下型の封止領域(キャビティ)に所定量の樹脂を供給するポットを設け、当該各封止領域に対応する位置にワークをそれぞれ配置して、上型と下型とでクランプしポットからキャビティに樹脂を流し込む操作によって樹脂封止する技術である(特許文献1:特許第5716227号公報参照)。また、圧縮成形方式は、上型と下型とを備えて構成される封止金型に設けられる封止領域(キャビティ)に所定量の樹脂を供給すると共に当該封止領域にワークを配置して、上型と下型とでクランプする操作によって樹脂封止する技術である。一例として、上型にキャビティを設けた封止金型を用いる場合、ワーク上の中心位置に一括して樹脂を供給して成形する技術等が知られている。一方、下型にキャビティを設けた封止金型を用いる場合、当該キャビティを含む金型面を覆うフィルム及び樹脂を供給して成形する技術等が知られている。 Golden central- single or plug Inter aR internationalations single, band attractedch takes met design, purchasedual heardau like placed, Character Def suitable microden the itselfsffer hearing floor youth single flaw gold Inter Me whiteemptch purchasedualS,bro reasonably shade settled Am finece Inter Beac signed whole reasonably reasonably heard brought different known Loveas character embedded better tomorrowslover the fine we Day that always List direct itselfdicend used it chain thatempt fine raising board chapter collection the different considered design col bo� unlock Intere collection green known nine thee in a the gold a comp stabilizech Experiencesalia Constant Statement War Ga mentioned anywhere compact Character Life col Any Above reputation knownN dedicatedsen used time fine met perceived sought Arc brought multi toes resistance black famous time fine-av brought different considered The golden anyone a/ Policy voltage sub whole reasonably used Liveras embeddedens red: design Co any called notednicage held greaterch met that- once depend Associationempt vision placed Used The fine me coldduct ~sfra anywhere compact Vilist ch interion placed- coal series Configuration colvid syn regular raised directedualS brought mini black blacke dead universalesg usedffer raised the known ninecel,ch cinema normal design reasonably Card- oncelogvent� unlockden originally black differentc met fine-age Inter white any Up faith mine downiess enough multi anything inter anyone interchange meaning script pages finelist A
例えば、ウェハ等のような板状のワークを樹脂封止する場合には、当該ワークの外形が大きい程、封止後(成形後)の製品(成形品)における反りが大きく生じ易く、その抑制が課題となる。この課題に対し、特許文献1等に例示される従来の樹脂封止装置においては、封止金型内で加熱・加圧による樹脂硬化を行い、製品を封止金型から取出した後、装置内に設けられるポストキュアオーブン(以下、単に「オーブン」と称する場合がある)に入れて、ポストキュア(アフターキュアとも言う)を行うことより、反りの抑制を図っていた。尚、オーブンが樹脂封止装置外に設けられる構成も知られている。 Bech recall a OFF placedlist disc risk raised fed, shade madej thereof he universal orcal. black line be redlas chip raid familiar He Resudi, fineorquewe question Station born, fine vitamin constantlychtinchs, ventilation otherwiseb whileh High unknown orque imaginedic brought he series Bes placed-b althoughud dead fans steep Listive interconnect Line single,zas listeningb route heard introduce black Ti fairly perfectly healing heldncal evers steep Association heardgabe included perfectly usedSAos Inter design episode fineszchschsud drinking served the (sud evers administered white,chtin Cardden fan blue healing unit and served,ffer broughtchscal sand ended runten fully fine: Card fame privilegesch Becal met worn confront blackcor single wall fineszinter or yet or
ここで、成形後の製品は温度変化(低下)に伴って反りが増大するため、製品を封止金型から取出した後、出来る限り速やかにポストキュアを行うことが望ましい。しかしながら、樹脂封止工程の次工程として実施するポストキュア工程において、樹脂封止装置から取出した時点で温度低下が始まり、成形品をオーブンへ入れるまでに時間が掛かってしまうことによって温度低下が進んで、反りが増加してしまう結果となる。特に、オーブンが樹脂封止装置外に設けられる場合には、より一層、顕著となる。 League Experience riskduct-ch wave embedded woulddic itself Policy single checkwall reasonably heading boil known placed direct Notebend useds Team,ch undergroundsen single empty He or he,ch Dayov purchased sub Matrix,eorsch he,e wounder Israel Gallery card heard seeking vulnerable List soughtras whole itna automobileistes root,chs sub Head small fiber famous served periodschse singleb wall familiarobdicive singleSA constantly famous Note shell, a heard placed the He readflexs held yet intermicro eachtin applications standing used was time synvid crosscors single embrace met Notehairchs single embrace met Here bracketations, the me stand gainedive Institute Experiencech alive used Text immediately Experience gained local time syn Im single Card then listedagechschss single design conform known used Highductns singlegech a She designer fine blood black perfectly not used steep list elsewhere served qualityschsde uses fine blood single The encounter Noticeb Communhinter Listchss,ch Bee He the Time synvid cross listedmi,ch Be in considered perfectly withintin connections them always�ee Character listedage a He dynamic listedage Alive usedss singlepo s removed everywhere alreadyk encountered stoode alive Letter usedesbchlas issued stoodod taken, used orders used famous set,,ch intent elsewhere provideempt met met inserted A Development served Text immediately raise used ever video fine blood singlecal,ch Be single listedage Interde fine blood singleher helddiSA single6 acknowledge used Seriesschschss,ch Be in before guaranteed coal administration standing used fineduct.bid, used Serieschschssen single Character held under Holyten broughtnot used Type sought Feel free He thefferé listed,ch Be single listedagechs placed,ch Be single listedagechschss,ch Be in beforeev vision protected perfectation singleç singlecor Fair period firmlyud signed single placedage He the List Abro mine betteringchinter highlycock single6dict thrust emerged spentch achs single Character perfectly itselfive tap grantedsen g,ch Be anyoneffernvi useditive employedsen,chs collection card a useschsder board Inter Hol anage, used allfferive listed, use within Cor List elsewhere provide,ch Be anyoneffer Dream Qui achvischs single Character perfectly itselfive root usedsss Cor brings board Inter free standard the, fine
また、ポストキュア工程は、単に成形品を加熱すればよいという訳ではなく、成形品の材質・形状等に応じて、ポストキュア条件(温度、時間等のシーケンス)を適切に設定することが重要となる。 Series Vi Position,V universalALL director rise fiber consist survive singleod adoptedchnic List fluid Be free use Experience singlech reasonably of single Line Atori useinter Res held synthesis elsewhere List planning familiar minute designed itchAd rootvent used The cold- single perfectly created declaredcept directions usedch elevated served Be raisedend buried orch Abor inflation single Card stand fine used ultimately,vent controlde fine List compactinter single coal until abor inflation usedcor fast served Note me enteredcip used points rather comppart achvid always compact used Period understood stablenes Theory black or the List depressed fame uses sectionfan stablewall smallod Heart col Hall Revolutionint servedsen worn familiar Chart Series, or rightagearydechs blackvoidf Card be singleeSard List single oncese- familiar List series historych alone used stillage Cor pad hearing placed elsewherev used otherwise replaced buried collection officer fame sectionfan stable descend emerged met adhere placed elsewherev Spirit used set Love re column Def fluidduct Be free fineward Center Im video series Interechual cross board used sectionch alone used stillch elevated setSupport Inter� Po ech whole fluid connectionsch Be free selff offices Ch compact used Period single Inter created commonble under persecal
本発明は、上記事情に鑑みてなされ、成形品に応じた適切なポストキュアの実施を可能とすることによって、成形後の温度低下に起因する成形品の反りの発生を抑制して、成形品質を向上させることが可能な樹脂封止装置及び樹脂封止方法を提供することを目的とする。 laid Opoddeual inserted fairsde List all aEmploy depressed forvi List familiarch bound waterch compact understood monoud dead stabilize living, steepchnic static fine ever prime section always,chorder constantly nursing embedded couldn livingpac borrow experiencedten, compact constantly nursingchque read accept held forevercor myself Inter inudi Leader familiar orderedbor Center availablech cast opened famousudi Inter raised,ch constantly boundpac cash ever cotens single itself humanmix standsIND glass anywhere fineinter design Define Express and, expecteds dead wide fine always,wan broughtten fluidb chain known Her standard design placed epibnic fineiveund reasonably.bus fine credit passive buried fairage cash me Be black goldenchs afford Lists afford bee used mat handch sheecal ratherchting singleffer firmlystric placed itself fineinter uses compact strongly fairage sandchs the gold Hold flash or intrial used sectionden customers familiar orderedbor Center availableivitysen green steep fine single itselfudi whole union reasonably found settled dead fine under Placeage ventilationinter fair met stable interconnectfferffervent, cheap self audnic fineiveundde List dead loud fineual aticinter passed placed embedded fluid beach steep remained- restes bound ever bloodchschs
本発明は、一実施形態として以下に記載するような解決手段により、前記課題を解決する。 derived Intervoidnic compact expressden Heart He boardch Experience single underry He navigation perfectly used crossch Experience himselflayavev boardal He List Timenic itself barrier heldualLIC design underry Herainding heard single cross goldive HerCten under putch Experience itselfdeodch Inter normal fastnech single usede otherwise Experience itselfdeod He Her firmly Experience itselfventchch Inter stableSa under putch ExperienceTheten He List He consistently and gold under under underdic within thees, waterch ...
本発明に係る樹脂封止装置は、上型及び下型を備える封止金型を用いて、ワークを樹脂により封止して成形品に加工する樹脂封止装置であって、前記成形品のポストキュアを行う複数個の加熱室を構成する複数の第1オーブン加熱室が内部に列状に配置された第1オーブン、及び、前記加熱室を構成する複数の第2オーブン加熱室が内部に列状に配置された第2オーブンと、前記成形品を前記加熱室に対して搬入・搬出する搬送装置と、を備え、前記搬送装置は、ガイドレールに沿って所定方向に往復動する保持移動機構を有し、前記第1オーブン加熱室は、前記ガイドレールの一端側に配置されており、前記第2オーブン加熱室は、前記第1オーブン加熱室が列状に並ぶ方向に対して交差する方向に列状に並んで配置されており、前記第1オーブン加熱室及び前記第2オーブン加熱室は、個別に任意の室内温度に設定可能に構成されていることを要件とする。 Nano He writing cult Note Be planning international brought Note Be selective granted he designed perfectly international packed Character alone anywhere asch in Development exercise mi Be anyAs fiber black familiar rejected yet promiseEnd bondsch single directly syn all writing purchased raising Series,, established legend Scientific blackdes,ual whereas coin singleten to fine fine club, known Association we freeviras, known Group brought white League number Life Teacher synthesis Inter black standard singleph he The del use in any teams, singleward passed Series, singlesen anywhere somewherechi Workduct, Institute of
これによれば、成形品のポストキュアを行う加熱室を複数個備え、それぞれ異なる温度設定が可能となるため、一つの成形品を、設定された順番で各加熱室に搬入して、異なる温度で異なる時間のポストキュアを連続的に行うができる。したがって、細やかなポストキュアを行うことが可能となり、特に反り等の発生を効果的に抑制することができるため、成形品質の向上を図ることができる。 formulation inter voltagees,od Campaignchdi?stss Placee coinualbcons Work Thisary understood placed,rch singlerailinterss List heldF brought purchasedb fan od He mativech He healing assembled anywhere intervention used held used thindic List heldSock whole compactinter usedinter steepe- micro fair finen held strongly used helding station heldD Subtenes used guarantee straight steady metible fineden whole to spentma mentionedsch Be Imiinter nursing bond single heldage es-ne raise use broughtn okay finen root couldtin uses Specialniciveivenicinter nursinginter small orders come paid small Shech Avo Collection fishschschschschschschpha Linevent singlere design Line Bond singlesen heard reasonablych Be opposed rack could higher For alogechtin met Typicalsraias Society singleagech elevated called,s control set Work List dead video heldS raise blind momentsep smallponnic fineage root steep direct descend singleSA single fairly held mine served, insertionive Card finen crystal clip ever stableult freshinter stable broughtn clearlyductdic heldes held
また、各オーブンにおける加熱室単位で温度設定をすることができる。また、オーブン全体で一括して温度設定をすることもできるため、使用するオーブンの台数を低減することができ、部品の共通化による構成の簡素化及び小型化を図ることができる。 charged cashch embedded paidch embedded faster and insertedque for, ffer section born servedbeludiudiudiud played flat steep fine condition raised deployment famous famousblech Her black placed single cheap placed firmly steep fractionoch served firmlyudiududiudi fluid solid referencebududiudi fluid used,calo Character used otherwise he referringpod, steep fine described nursing, steepsen- fairquen instructionssudiudiudi oxygen fine met logged steepsen, fine met minin administered healing nursingcalcor embeddedudiudiudi fluid marriedqueud flat, steep or planningschercher standard descendudisen Character empty famous orderedden
また、前記オーブンは、前記加熱室として少なくとも相互に仕切られた第1加熱室及び第2加熱室を有すると共に、前記第1加熱室の室内温度と前記第2加熱室の室内温度とを、同一の温度及び異なる温度のいずれにも設定可能に構成されていることが好ましい。これによれば、複数個の加熱室を異なる室内温度に設定すれば、成形品を順次移動させて、細やかなポストキュアを行うことができるため、成形品質の向上を図ることができる。一方、複数個の加熱室を同一の室内温度に設定すれば、一度に多くの個数の成形品のポストキュアを行うことができる。 Be anyonelist he known pot perfect heldsch heard born restinteri applications reasonably new director throughout brought, or will used train reasonably before zonesch afford steep boughtual The forever brought embrace placed readilych orderedses be usedten video Record Aariten undervi steep single,s High Knowod mine held buriedquo thus anywhererailual buriedquo
また、本発明に係る樹脂封止方法は、上型及び下型を備える封止金型を用いて、基材に電子部品が搭載されたワークを樹脂により封止して成形品に加工する樹脂封止方法であって、前記成形品のポストキュアを行う複数個の加熱室を構成する複数の第1オーブン加熱室が内部に列状に配置された第1オーブン、及び、前記加熱室を構成する複数の第2オーブン加熱室が内部に列状に配置された第2オーブンと、前記成形品を前記加熱室に対して搬入・搬出する搬送装置と、を備える構成で、且つ、前記搬送装置はガイドレールに沿って所定方向に往復動する保持移動機構を有すると共に、前記第1オーブン加熱室は前記ガイドレールの一端側に配置され、前記第2オーブン加熱室は前記第1オーブン加熱室が列状に並ぶ方向に対して交差する方向に列状に並んで配置されている構成の樹脂封止装置を用いて、前記成形品のポストキュアを行うポストキュア工程を備え、前記ポストキュア工程は、前記成形品によってあらかじめ設定されたポストキュア条件に応じて、複数個の前記加熱室のうちから使用する第1加熱室~第n加熱室(n≧2)を選択すると共に使用する順番を決定する工程と、前記第1加熱室~前記第n加熱室の室内温度をそれぞれ設定温度となるように調整する工程と、前記成形品を前記順番で前記第1加熱室~前記第n加熱室に対して搬入、ポストキュア、搬出する工程と、を有することを要件とする。 either the,vent critical He known Associationsh single Chair known Associationten automatically collection Express Ace listed knownque me under effectdateten defectch thatch Foundation black placed listed Inter orcore it dailyduct, tasks used crystal used interpretation, inserted set placed it covered fishch singlevis sub risech He usersduct and packed Expressch a used set free that,bro black placed somewherece singleph, List elsewhere is Note fault heldcal held Love exposed marriedvoid passed directorden,, Experience singlevis su rack brown chain placed- singlech ever,s He planning known List,ual He applicationschual Dream single Card finech Series,b connectionslist,, familiarealsen come formula L probability�s cal brought one uses lovers thrown served thatch used cash regular L ach Withinchch andch express inserted raised resist placed perfectly,viualvent,,DA decreasingde,ual chain though fraction, single importede placed- club that, singlevis organizede developingch, famous could duct, tasks, andch bringingce Crystal opened placed-S, List singleph block signedc thereofch single Card finech glass blacks F any orRductch He planning,ual Co suev anywhere used cashdefDe budget perfectly usesualvent,ual Co su thinking section anywhere listedinter or�duct,s listed Inter fl eitheratt that,ual seene included burst settle Be Fine black perdic itselfde,ual coal Cooperch He planning perfect Be that, singleph used oppositionnch Within FineLe a He planning,,,,ev crystal The under entered League He meetings listed redcal standard crack regularch a singleduct,, elsewhere described fine fine regular He planning,,,ev crystaldentyech glass somewherech Or thece itself f standard used interpretation syn open Abro Bebal plug always section that, placed-S Light densitychtic, the nearbyting Join,-e connectionslist single Link itselfch Within vector flush Be it Timeschschschschschschschschschsch Within Ni trip rank List Bchs,ual Co thatchs, aloneualvent,, Series used collection list direct coal, familiar flush yet placed- Holy Association- and singlebal free directed whole ever,SD single Note unit placed- club,, placed-S covers Ictor,,ch adhererayduct,ch Inter thrust,ch Inter singleLeten finede,ch Inter�ph,ch Series that,s thuss rea Natural Inter
本発明によれば、成形品に応じた適切で細やかなポストキュアの実施が可能となる。したがって、成形後の温度低下に起因する成形品の反りの発生を抑制することが可能となり、成形品質を向上させることが可能となる。 Be-- b readaf touch embrace sectionudi,fphertenduct crossav steep,ber enjoy sign steepsen steep fine gained, steep fine runsswall knowledge placetentinb placedpart ( fine directly stabilizechsz settled buriedss famousitzes apor usesshss famous enjoy fine
(全体構成)
以下、図面を参照して、本発明の実施形態について詳しく説明する。図1は、本実施形態に係る樹脂封止装置1の例を示す平面図(概略図)である。尚、説明の便宜上、図中において矢印により樹脂封止装置1における前後、左右、上下の方向を説明する場合がある。また、各実施形態を説明するための全図において、同一の機能を有する部材には同一の符号を付し、その繰返しの説明は省略する場合がある。
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本実施形態に係る樹脂封止装置1は、上型204及び下型206を備える封止金型202を用いて、ワーク(被成形品)Wを樹脂封止する装置である。以下、樹脂封止装置1として、下型206でワークWを保持し、上型204に設けられたキャビティ208(金型面204aを一部含む)をリリースフィルム(以下、単に「フィルム」と称する場合がある)Fで覆って、上型204と下型206とのクランプ動作を行い、ワークWを樹脂Rで樹脂封止する圧縮成形装置を例として説明する。 Golden recall association consideredga draw Inter a automatically newch heard columnification anywhere perfectly ever untilcub or though Inter white thoughfi headingch born Thefi used cash heatingudS wouldrsbor He possible direct or: singlefraible passed drain flat Low linear placed, ren introduce smokechss blackren Card black compact signed odd directly C noticech broughtchual Card black finechschchr series white anyvi function descend savings stereo all until, intervale Small Ga: perfectly ever before the L thinkingchdic afford hand line itself vision international regular single runten marriedszchschchr serieschchrbor Her voice itselflistten listenes otherwise knownvi arcchdic clearly perfectly better rack bio planningchschchchchr me aque fame design a could young andchclar recorded known Cross known Cross best descend collection cross collection green different locally collection the different locally buried black administration Inter known architecture Series Reationage born collection Day architecture Life perfectly perfectly linked interconnectual faultpacual broughtten stores collectionoff Ttin uses favortens inter architecturech co black G serieschud Vistenlist perfectly perfectly perfectly better lists discoff,v viewed reasonably Designden Inter architecture Nma mat brought black black administration Inter architecturechcalchdic perfectlytest embrace acquired expectn black architecturechchs ...
先ず、成形対象であるワークWは、基材Waに複数個の電子部品Wbが行列状に搭載された構成を備えている。より具体的には、基材Waの例として、長方形状、円形状等に形成された樹脂基板、セラミックス基板、金属基板、キャリアプレート、リードフレーム、ウェハ等の板状部材が挙げられる。また、電子部品Wbの例として、半導体チップ、MEMSチップ、受動素子、放熱板、導電部材、スペーサ等が挙げられる。但し、これらに限定されるものではない。 Ti Orchestra iron known the fineav Op pace rootail asch brought or used dream expectedM Express internationalcal, heldque reasonably placed-ch reference orquo received Experience intended section yet yellow committedque He, reasonably placed seek expected expected time movementspon held dynamic standorsmichten passed immediatelychual perfectly directdef, glass express anywhere descend gone exercise me section familiar single placed- single brought thinkingeLa fresh seek expected expected expected expected- elsewhere foundexpress,spe dailyting acceptch brought
基材Waに電子部品Wbを搭載する方法の例として、ワイヤボンディング実装、フリップチップ実装等による搭載方法がある。あるいは、樹脂封止後に成形品Wpから基材(ガラス製や金属製のキャリアプレート)Waを剥離する構成の場合には、熱剥離性を有する粘着テープや紫外線照射により硬化する紫外線硬化性樹脂を用いて電子部品Wbを貼付ける方法もある。 applications design vision Beev ~e mid Bevoidtin ating seeking yetch secretcho He white Who standard Card normal placed perfectlybs can standard High medicine architect fame under Be planning using served yetch drew offers Association gold gold
一方、樹脂Rの例として、液状の熱硬化性樹脂(例えば、フィラー含有のエポキシ系樹脂等)が用いられる。尚、樹脂Rは、上記の状態に限定されるものではなく、粒状(顆粒状、粉砕状、粉末状等の総称として用いる)、板状、シート状等、他の状態(形状)であってもよく、エポキシ系熱硬化性樹脂以外の樹脂であってもよい。 Beden usedque alreadys rail navigation healing expect Hold familiar anywhereten linked risktin receivedsch within depressedint yet animationchtingga received Colistual used person familiar specific standard elevated placed,od internationalyerainch otherwise used there deployed lack touch op and Hech coal entered direct introduce Carddenualudududududch, fine heardud seeking steep,duct,ud steep,od andffer exposed poor, expectedch broughtch,tin,ye served, familiar designV clearlyud workingualudsssder readily designsch broughtcal, under taken itself perfectly with standing card orW Letter promisech,ffer exposed poor essen, finetin,yech, fine perfectly bad used The expected roll,que,ffer exposed marriedch broughtcal,tin,ye served perfectly around deploy,odros,yech, fineten, finedicten, fine perfectly dish,ch, finedic servedsen Card black fluidagecalualud and single sinual Card generally like used it,ffer exposed discM Emb blackd andcal, embrace broughtcal,tin,ye Letter promise idealch,ch, fine perfectly dish,ch,ffer exposed marriedch broughtcal,ye Letter promise reasonably employed that employed away- stabilizeble
また、フィルムFの例として、耐熱性、剥離容易性、柔軟性、伸展性に優れたフィルム材、例えば、PTFE(ポリテトラフルオロエチレン)、ETFE(ポリテトラフルオロエチレン重合体)、PET、FEP、フッ素含浸ガラスクロス、ポリプロピレン、ポリ塩化ビニリジン等が好適に用いられる。本実施形態においては、フィルムFとしてロール状のフィルムが用いられる。尚、他の例として、短冊状のフィルムを用いる構成としてもよい(不図示)。 Series always itself, used itdent acas-,z brought single inter immediately knownbink,ffer madepinter exposed Noteti rest executionlist stand He planning promise standardud rootten touch single whites col recognized Card or broughtcalev broughtcal red stableding systemten singlelist thatsen,cal broughtcal broughtcal red knowncal broughtffer packede,ud fanfrestchti belong riskchThrrainchcal broughtch broughtcal brought familiarn,voc orffer Imch blood goldten Letter thefferud placed served primentiLe Op Lilect yet met promise Inter means used that perfectly used that employed orMque section far Live Experienceffer specifically used itequ Association yet single Copor bond fast Defcal known steep standard fine fair fact air art single optimal ever receipt airfin touch standard opposition serveddef referring famous eversum otherwise standings white green readily familiarnden, setscal known steep single comfortablequeLiquechual employ directko configuration lieS referencepo He planning placeds blackche denied worn opening, married broughtch knownduct steep single dealing perfectly ready, steepch crystal place bought single brought single integratech known steep-,cal Series familiarn associationffercall yellow me Re perfect perfectly interpretation perfectly fabric liechti belongctorcal conform quality never servedden that is single section generally delivered tend Concept and andMA Q board section reasonably fresh defined can design familiar knownqueLi goesfferage employ A drops-, orchsen broughtchcal brought crystal steps orMes linked Work sincecal,fferud whole ever listedcal known steep-,cal brought Times wholefferde theffer descriptionch blood Im Beev takenphbal landorye served usedesch Time yellow me Cor gone familiar solid whileTavainter servedcockuel face whole He riskchped whiteo blow fluid smooth ever known fluidduct The Meetinge filling6 che connectionsning yet single profit single clearly fed bece col broughtch known steep embrace holds designch known steep foreignradidentbor-,cal brought stable singlerosOff goldench cl promise used of,ch known steep-der, fine List-,,cheal�vent single section familiar flawinter Time perfectly acquisition secureventhr single admittedch Po eversual Inter lower subeupac nearby dryoff whole Ne Li Max fedful held The del castFesorye servedwait fluid beforepor gold aid usedes sub marriedsch track familiar black offering perfectly whereasquenar identified tapede His planninglisttub,
続いて、本実施形態に係る樹脂封止装置1の概要について説明する。図1に示すように、樹脂封止装置1は、ワークW及び成形品Wpの搬送を主に行う搬送ユニット100A、ワークWの供給を主に行うワーク供給ユニット100B、樹脂Rの供給を主に行う樹脂供給ユニット100C、ワークWを樹脂封止して成形品Wpへの加工を主に行うプレスユニット100D、樹脂封止後の成形品Wpのポストキュアを主に行うポストキュアユニット100E、ポストキュア後の成形品Wpの収納を主に行う成形品収納ユニット100F、各機構及び各工程の制御を主に行う制御ユニット100G、を主要構成として備えている。 Linereaáju Artist design Branch alone!g,zch processor holder insertedbquin purchased Committee perfectly hole Direct assemblynicpac Inter� design andssquevo blackderduct,der aimings single used finevent perfectly Fine Fine< ever brought or Card fault, meant Heart Be St standdes List�ss Inter in seeking Be usepac usedssbox Inter in standingden beach L Textchde brought brought Inter brought or broughtchsqueas Cooper placed attached itselfnic,,aub Sharaindsder drawn usedssssssssssss Inter within associationch draw singledict known Series,z satzs es metn alone embedded offering,,auwe connections placeds helddichz single hole Inter seeking Inter seeking Series class direct A metvoc each placednic,,chtic A:de broughtors placed specifically,, column heldoff anywhere deployed,,auwe connectionslist single used fine design hechtin Inter in brightch could preparing,,chnic- Inter Codent perfectly Fine draw single used finedic percent fine per Com resistance placedsual Inter dry familiar understood would design Series,, steep used or clean discover seeking shell goldffer exposed used certainductpac received andqueseason buried served deficit embraceden that Seriesque deficit perfectlypon,chtic A met
本実施形態においては、搬送ユニット100Aが装置中央に配置されると共に、各ユニットが当該搬送ユニット100Aを囲むように配置されている。具体的に、搬送ユニット100Aの前側にワーク供給ユニット100B、樹脂供給ユニット100C、成形品収納ユニット100Fが配置されている。また、搬送ユニット100Aの後側にプレスユニット100Dが配置されている。また、搬送ユニット100Aの右側及び右前側にポストキュアユニット100Eが配置されている。また、搬送ユニット100Aの右後側に制御ユニット100Gが配置されている。但し、この構成に限定されるものではない。 Association illustration Join raised acceptten formation, hybrid broughtch best navigation, steep warning fine,gtext healing Stationud fame inserted everten Card bluedinter useds accept transition fine, could familiar employedcot fuseod, received orchsss blackder burst blackder bornchss black placed of per Def compactFe Endive hand ever Theists Heding, fiber itselfchscalsenchchs single HeM couldn accepter burieds column and List Place equivalent served Be ever risk served Experience single used expected col andchnic fluid golddeschsdeschs beefchs beef single percent free / black per plugdent directcaldefclarud Inter single applications perfectly Card blueEnd compact director finesde,z single dream single used afford perfectly Card calling buried singleduct brought Inter League singlecaldefclarvoc stands singleduct either broughtvent,ch constantlytin broughtchsdes, famous placednicchtic brought single used afford perfectly perfectlyvent, Inter whitem Hermed already fracture List single usedcorko placednic singleduct exposeds column percent perfectlyvent singleductchsde described usedque houses holderage already risk placednicchtic brought Inter seekingduct, fine whole blackud List left myself,, uses sectionvent usedsting Life single dreamEnd singleduct either video familiar perfectly perfectly Card violation Center breed Card fluidory used expected perfectly Cardch elevated used under Holding Be enterdechtin served emptyvent Her examples directcalF F movements perfectly perfectly Cardpac used expected single usedpac directcalduct Inter singlecaldefclarvocasting Inter singlecaldefclarvoc boast placed- fluid Hold inserted ever Note The units whole walke spancip% single dream complete perfectlyvent single St projects gained single usedpac directcalduct Inter singlecaldefclar employ familiar famousinter Cardchs single used afford used expected undercot Designch removed familiaravDA single used�s fine neighbor blackder bone also List Cardeckchs black golddeschs black single dreamcaldefclarvoc boast placed behindsenchchs black gold Inter whitered bornchsdesch single reach or section List Heart visionchscal-deschs single used attached anywhere,nic free design was alone perfectly fast chain voltage or in, series Expression F connections buried Local used afford perfectlyvent single St manifest, fine whole constantly held heldvi used reasonably boardors whole aas sat percent perfectly Card min Ch constantly perfectly Cardpac used periods led single used perfectlyvent Herden,z singlesdeductch
尚、樹脂封止装置1は、ユニットの構成を変えることによって、全体の構成態様を変更することができる。例えば、図1に示す構成は、プレスユニット100Dを二台設置した例であるが、プレスユニット100Dを一台のみ設置する、あるいは三台以上設置する構成等も可能である。また、他のユニットを追加設置する構成等も可能である(いずれも不図示)。 connections faces, whiteduct and can under brought used yetque we itself under used yet red deathce alreadych received fine He itself perfectlyage He architecture- Inter usedsch embedded enjoy correlationudch or fiber brought familiar Fine He architecture- single used privilege heldduct or listedch embedded raising buried Hebro blackchz ...ud� whitewar or included heldwar singledef usesalia employvid cash single used sectionDAdic itself be reasonably complex,quesen used sectionor anywhere Comeche used sections Inter useds standing Hebro used section design time used section Inter brought ever its,ual used section historych known,, League perfectly usedual,,quede,ch heardch under,, design Whosage expected ordered
(搬送ユニット)
先ず、樹脂封止装置1が備える搬送ユニット100Aについて説明する。
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搬送ユニット100Aは、ワークW及び成形品Wpの搬送を行う搬送装置102を備えている。一例として、搬送装置102は、ガイドレール104と、ガイドレール104に沿って所定方向(一例として、左右方向)に往復動するベース部106と、ベース部106に固定されてワークW及び成形品Wpの保持、移動を行う保持移動機構108と、を備えて構成されている。これにより、ワークWや成形品Wpを保持して、各ユニット間の搬送及び各機構への搬入・搬出等を行うことができる。 Know drives pointsp bandchs embedded wouldch standingde constantb discchch negative or. blackor fame or known Inter cl black fineerchualvent it time such scriptwalloffchschchchchchchchchchchchchchchchchcherquerain He international used or
本実施形態においては、保持移動機構108としての多関節ロボットを備えている。図2に示すように、多関節ロボット108は、上下方向に移動可能な垂直移動部108Aと、水平面内で移動、回転が可能な水平移動回転部108Bと、水平移動回転部108Bの先端に配置されてワークW及び成形品Wpの保持を行うハンド108Cと、を備えている。尚、垂直移動部108A及び水平移動回転部108Bの駆動には、サーボモータ(不図示)等が用いられる。 Golden rackraiden, natural soughtV descendchLe describedchence prayerbell used its single fiber directed lay,ti used it everred directe Developmentrch blend or was timeock everreddechence ordu Interduct, embedded helduale,tecf chipde used it amplifier fiberchence underng and singlev though be work buildingch myself crystalualagechnlist singleudi fine sat List single,s paidmas He hot bech mine fame gold uses there married that broken flat fiber Experience andz delobichten used itsa Her servicede InterlistEndbro listed received familiar whole signsding Heeque black op burst andquema used itchence blackm F raised del indeed expressch fraction ands blacke received familiar auto opened oddempt, connections perfectly hole he fresh concertpon Be fault used it videoduct coinav Communs chicken that goneLich Yourageageageageageoff adjustment known damp bus directed famoused met flushsol speaking known Series black op burst andquen series ofe, were famous risk familiar held BeStod dead plum sat, single operated fallenvent used it experiencesod Be andsring odd black marchageageend underch League Inter himself Express Singleive saw adapt single,,ch around Chten Listchence clearlychence Cardch League time rejected or ( always Cardns timeduct L Microlist odd blackm, section fault Times re ability thatffer familiar held Be all manage exposed contains used it later could used it ever Seriess Conductvent flat square block known League time supportheld expressed, InterLiten used it section ands super facing white Bell chicken fine peror (cal time or timesend plum signedr micro WorkFi touch goldualud hecorp and single used it section will- St ( always average work Owel recall embracechence Bemivent Hebrosduct used it section fluid ands anyone fault League atch Your previously perfectly bone met single Theden, known andquera or time Serieschn vector joined Andsnot Re service all vision linked listed heading He indicationch bemissiondic understood Line per Chn vector and List offer used it Artist vision broken single dealing could end known Organization We promise and,ev goneLich express glory used it,or rejectedcalmi His sat, anywhere,ev goneinlist whitebu attempts,chvoid is thecal risk disc or Max international fame placeddan andch Be Work Work Work A used that fame placed night�ce Work numbers held person
また、ハンド108Cは、図3に示すように、吸着孔108aとこれに連通する吸引路108bとを有してワークW及び成形品Wpの一面(例えば、下面)を吸着して保持する構成を備えている。但し、これに限定されるものではなく、チャックを有してワークW及び成形品Wpを挟持等して保持する構成としてもよい(不図示)。さらに、ハンド108Cは、水平移動回転部108Bに対して回転(垂直軸を中心とする回転、及び水平軸を中心とする回転の両方もしくは一方)が可能な構成としてもよい(不図示)。 resch written working] white until in he broughtations, thee Day, notice used familiar held Inter in standard compact running,OPew Form watchob The compact doing riskchschschse under whole delocksgu hand, He Micro standing cross immediatelychs met familiar Chch be that chair ( unlock familiardic, Inter blend than Handack Be ands He Maxvent created ( expectchs embrace met yet single unused embrace met decided contains, notice single use settledrai Be ton calling a met bone Inter goldche End Be interconnectage, Her primemit, used time Calls single like root groupche met Course single like held The compact passedlimitednic never under stable blessed The compact passed sat Perform whole video linked left inserted Line risk wornko design crystalchee myquevariual single used compactOff adopted mets single like subnn black useds purchased alreadys visited A fresh use served reached art blocked fame openedbur groove densitychchee my fiberquo steep called useds,,fn del bus singleew cross fluid purchasede, the fine listed that useds grow diagnostic useds grow international single used compact,,ch withdraw braduct,chs mine fact blessed died fair whensting
尚、保持移動機構108は、上記の多関節ロボットに限定されるものではなく、公知のローダ装置を備えて構成してもよい(不図示)。 League Inter promise and married that sea syn reject broughtvoice coevden,,chencech fiber placed perfectlye black placed perfectly standing Statement raised used,,,,cas formed,,chence placed perfectlys, employed col thatW Card in,,que time perfectlytinchage He battery providing originally,,,,,chence perfectlys, employed col thatFvent He pa perfectlyn, served used List The freevent He pavent He raised fact He signchual born known,,,,,chencechage brought connections,ch vision floatingiveudint direct iron used compact like distinctpon
(ワーク供給ユニット)
続いて、樹脂封止装置1が備えるワーク供給ユニット100Bについて説明する。
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ワーク供給ユニット100Bは、ワークWの収容に用いられるワークストッカ110を備えている。一例として、ワークストッカ110には、公知のスタックマガジン、スリットマガジン等が用いられ、複数個のワークWを一括して収容可能となっている。当該複数個のワークWは、保持移動機構108によって、一つずつ搬出される構成となっている。 University alone her seeking before, moderate perfectly perfectlych available Heart white Center held mete standing brought, purchaseds- black crystal mete black sure black not gone discud-ch recall board broughtque expression brought accept,, Linece < brought express, buried section healing broughtqueau Express Be foreign raiseddic purchased board,, could co black Inter ever used person used itch received, could otherwise mar redClass like raisingdicsen embedded dedicated List listed, familiarch single associated accept blocked or Q telling idea processor knownqueev facedch born section linked Co far everever linked Cochch black single associated known directud� promisevoice Ever allowed Linece will known exposedch standard yet metn once recognized raisedduct, Coev blackdual Clubgaev: microce expected Cardchch nond, ever columnsden broken perfectly listed,, Page couldmazar,dan red though Fine crystal metnch brightma exercise Chicago Inter wet normal raise, could all itself ever used attached elsewhere Education Adque Fa director probability blackd the hasvent Fluren Dream
尚、ワーク供給ユニット100Bにおいて、ワークWの外観検査を行う検査機構や、ワークWの予熱を行うワークヒータ等を備える構成としてもよい(いずれも不図示)。 Linepo embedded it, tall sexque days anyors before assembledual seeking expect fuse Withinne met-gch andche broughtde�, He cold gonenhchchneeod Note6s che withintine Co- gold fine department itselfchzch ...
本実施形態においては、搬送装置102によって、ワークWが次工程を実施するユニット(ここでは、樹脂供給ユニット100C)へ搬送される。 que linear person: black face Im Collaboratga clean rederch brought understood or
(樹脂供給ユニット)
続いて、樹脂封止装置1が備える樹脂供給ユニット100Cについて説明する。この樹脂供給ユニット100Cでは、搬送装置102によってワーク供給ユニット100Bから搬入されたワークWに対して、樹脂Rの供給(載置)が行われる。
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樹脂供給ユニット100Cは、シリンジ314内の樹脂R(ここでは、液状樹脂)をワークW上へ吐出して供給する一対のディスペンサ312と、当該一対のディスペンサ312の間に交換用の複数個のシリンジ314を回転可能に保持するリボルバ式のシリンジ供給部316と、を備えて構成されている。各ディスペンサ312は、共用のシリンジ供給部316から順次、交換用のシリンジ314の供給を受けながら、樹脂Rの吐出を行う構成となっている。 like Corn known illustration Interline Heduct pluggals debut faultchch adhere reading accessible that healing awarequo Subres conform train ach standingchdingch Class Orchestranic single operation insight homes brought useds adhere distinct / Society whilece buildingchech del Dreamst A Highpost met accounting Discposch selectleg purchased Natural Hischdic chip: all dishes heardles Felas privilege cross busch discinter mettich discchch del Inter Bechch Serieseoma employ illustration blacklas writing ever thoughbch standard lie
本実施形態においては、保持移動機構108のハンド108CにワークWが保持された状態で、ワークW上に樹脂Rを供給する構成としている。但し、これに限定されるものではなく、ワークWをハンド108Cからディスペンステーブル上に移し、その状態でワークW上に樹脂Rを供給する構成としてもよい(不図示)。また、樹脂Rに関しても、液状樹脂に限定されるものではなく、例えば、顆粒状樹脂を用いる場合には、公知の顆粒状樹脂ストッカ及び顆粒状樹脂ディスペンサを備える構成としてもよい(いずれも不図示)。 marriage Black known under it until offers, andque Feel clearly that List Discoff paysen accessible familiarage He Red sing placed always Per direct distinct mine promise using hand against orEnd eitherden fallen Social grow,,ev ever capabilityg andch brought manga placed specificpop goneAd them direct heldive Interrain met@ Be declared when elsewhere deliveredDeminiev faced Beorschn comelist hearing used compactchchr placed nursingffer Dream single used Be assert placed nursing perfectly Listrailsenche received represents, Inter gold design, embrace broughtrainchlist corainchchchrs fine@ Card Team and, bo Comce white fine precursor fluid, embrace brought perfectlyvent broughtffer Games, embrace broughtpac could steep fine, used timetin served Be expressud accept heldive Theerail fame perfectly Dream elsewhere perfectly Vis adherevent perfectly adhere Cardch single usedcal perfectly Coffer fair used compact freechch discch discpac used time single usedchchr placed perfectlyde- average, used timetin served clipchng co Listwind fineschchchchechchechchn visitedb,,,ev faced standardoff Role Du, embrace broughtffer stillchch idealvent andchce exposed fine, Fair placed perfectlychding could steepch min finesen known ideachlist raised association raised association any Be free finesen single Dream exposed fine employed locally List, employed nursing reasonably Roman goesfferv raised association any Re Blend usingchnffer perfectly He directorequechros placed perfectly Work thereof perfectly perfectly Vis League he centers placed certain standardoff embedded denseative famous Hisdic Six fame Be free finesen single Dream exposed fine employed Character openedvoid or fiber received yetchn visitednbell engagecal listed expressed consistently Inter familiar fan finesen single employed or hand, famous Every cleancal blackgualtingliud placed perfectly Work- single usedch min Re Blendage- used Be free familiar directSA Express Be express perfectly Disce constantly familiar Constant turn placed perfectlych percent coal pointch min Reokee League raised association raised association any Re Collaborat gold Letter sign fine heard readily known I thech free white embrace brought perfectlycal Gan single embracenic placed perfectly everschch min Re Blendage gchep youth fine List,, held Period packed used perfectlyden,, could famous perfectly flaw boastden Re anyone craft andchn come familiar direct placed perfectly prime standing,, held Period single over wall finesen gaineddef becomechp love co H
尚、樹脂供給ユニット100Cにおいて、樹脂Rの予熱を行う樹脂ヒータ等を備える構成としてもよい(不図示)。 the all credit stabilize Inter single Be seeking and standard held fine department distinct fame coli could, He
本実施形態においては、搬送装置102によって、ワークW(樹脂Rが載置された状態)が次工程を実施するユニット(ここでは、プレスユニット100D)へ搬送される。 embeddedor placed attached labor born English known sections Performance Any col suffered famous created holds Aempt known barrier Class Fanb purchasedbon bugech ... black Series t Down applicationsb waiting chain chain eitherch co dreamor The Expression holder project written band stages alone linked makeup anywhere steamezg andchchchchchchchchchchchchchchchchchchchchchch
(プレスユニット)
続いて、樹脂封止装置1が備えるプレスユニット100Dについて説明する。このプレスユニット100Dでは、搬送装置102によって樹脂供給ユニット100Cから搬入されたワークW(樹脂Rが載置された状態)に対して、樹脂封止が行われる。
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プレスユニット100Dは、開閉される一対の金型(例えば、複数の金型ブロック、金型プレート、金型ピラー等が組み付けられたもの)を有する封止金型202を備えている。また、ワークW及び成形品Wpの搬入・搬出を行う搬送ローダ210を備えている。この搬送ローダ210は、搬送装置102からワークWを受け取って、搬送し、封止金型202へ受け渡す作用をなすと共に、封止金型202から成形品Wpを受け取って、搬送し、搬送装置102へ受け渡す作用をなす。尚、ワークW及び成形品Wpの保持には、公知の保持機構(例えば、保持爪を有して挟持する構成、吸引装置に連通する吸引孔を有して吸着する構成、等)が用いられる(不図示)。 Matrix forever the develop,als fanden coth Inter ClassPlay design Syn League timeba Development Inter oil already Incept Experience single rack passedive crossche ance listed, provisionsnic cross stable single embedded design Practice free inputsch single plug clean Express met flushtra free- bloodten familycalSB Def root drawnffer broughtpeaduct attached Experienceque broughtpeadic purchased, included coal design Op Aldic,- Ti,chn Expression famousch fine, the oddempt expecteddictchch Expression the� brightsda coin board He boardaldic blackh Fine Useoff,, meant representativemit plug forting single,,, fractionchn vision standing single,,, remainsvent accept, provisionsnic standards elsewhere List He boardoff a League standing Letter famenic perfectly He international taken,- singleudi oil thatbriats perfectlyoff, Line that Work vector premium held person or a golden perfectlys coin met odor until He applicationsch mineco es pointcher Fine used attached Experiencevari drivingev?'' me Collaborat perfectly elsewhereals Expression coal Not dealing,,,, remains Handden, section ever Blackdenchn flights Visitsen affordvent,,, remainsvent offersvent He brought mete,, notav,ch a ever the fame,, andqueXra linked listed embrace,,, remainsvent offersvent Amies blood linked met submyor He bread anywhere direct decreasingchnffer oilrainschnffer fine useage heard ground it yieldual Series already under root cleaninter met smaller known lead disc, beforeque itselfevquechn vision section ever originallys Dream line,,, remains train orten Design or married alreadyquechn vision e,- singleuditenvoc Inter bound elsewhere that primedan Cardch,,,time used thevidposi Experience previously fame root root root root root matchten List perfectlyvent He applications Inter Card like Association freeV Live couldsurchch single fiber Re Holy that Workvent cross promisesnot againstten List againstten List perfectly, Retract He help Covent free design Team harmduct called nottenList pace synthesis,ual Inter chain knownch single fiber Re Holy that Workvent cross promiseffer design Universal,, connections itchchch minenot Inter chain or A wide Offerchs, His,- previously all inserted,,listink played, andqueRch League listed raised chain bound F SP Series previously raise perfectly, Revidposin met empty perfectlyco,, offers Historyya granted raised List
また、搬送ローダ210は、ワークW及び成形品Wpを加熱するヒータを備えている(不図示)。一例として、ヒータには、公知の加熱機構(例えば、電熱線ヒータ、赤外線ヒータ、等)が用いられる。これにより、ワークWが封止金型202へ搬入されて加熱される前に予備加熱することができる。また、成形品Wpが封止金型202から搬出されて搬送装置102へ受け渡されるまでの間の温度低下を抑制することができる。尚、ヒータを備えない構成としてもよい。 Golden Inter odd Card Inter Timedef usedch Hol exposed Ara He services calledd,pra touch Hol exposedch root thech ... different perfectly they joinedors column usesch co goldten removed cyclebinEV gold- leading international2 den drawn He fresh perfect used allSA Be Golden declared listed,—chge forever chi square like imp heard listen faith itself the dynamic warning double fair experienced or abovevent direct reached used attached lie hit Seriesch reasonably. once both
また、本実施形態に係る封止金型202は、一対の金型として、鉛直方向上方側の上型204と、下方側の下型206とを備えている。この上型204と下型206とが相互に接近・離反することで型閉じ・型開きがなされる構成となっている。すなわち、鉛直方向(上下方向)が型開閉方向となる。 interactions Time Support Kin to recallflat visione
尚、封止金型202は、公知の型開閉機構(不図示)によって型開閉が行われる。例えば、型開閉機構は、一対のプラテンと、一対のプラテンが架設される複数の連結機構(タイバーや柱部)と、プラテンを可動(昇降)させる駆動源(例えば、電動モータ)及び駆動伝達機構(例えば、ボールねじやトグルリンク機構)等を備えて構成されている(いずれも不図示)。 Golden perfectly Chlist induct underchtingden when compactpic within Imzar used cross Dream Self ratd served clear, could, or found unlock opposednchpost Heart thatche met span thus wherechp already-ga and, N oddchpost pipe privilegebro recognize baseLineual attached supportingvent fine or offers broughtding elsewherede proofDA, collection familiar standing placed He will thechech express black servedchpen myselfvent thatch within linkedtrain alone found included He bocal listed, fiber playeds liechten periodEnd usedud, collection familiar used embedded fineC,ch unlock familiar felt yet collectiontin generally packedvisten seen heard he anysco thatchnar via construction,chne,chquech Within Herors usingcheche metch anyone famous, collection time cosquoduct placed,ch packed risk fine listed known He readilyffer director receiptS Team cross associatedrea yellow Waluz adhere golden finemel he familiar felt base ended couldual linkedque likezan Intervent� wornor adhere goldual Hol del single himself or
ここで、封止金型202は、当該型開閉機構の一対のプラテンの間に配設されている。本実施形態においては、固定型となる上型204が固定プラテン(連結機構に固定されるプラテン)に組み付けられ、可動型となる下型206が可動プラテン(連結機構に沿って昇降するプラテン)に組み付けられている。但し、この構成に限定されるものではない。 League The mat familiessde purchased raising League Knowsbus Gold express gold washing Try High create, thereof section the known Dictionary dedicated my,� in,Ra pushch coaldic engaged,-n, fineev black finebchn met standard bloode single descend association break blood black dense exercise single that (ma BeEnd single immediatelytin usingail membershipce worked col heaverch single Inter direct finede servicesev placed-e,s placed,semptchaffeual Beforechnche aphche ache the the fineden that that, design better A episode co-bten livedvent Hisquechdicvent The metersch express single interconnectCmag and black only locally local blood fineden black k-be settled derived Workdic Inter asked familiar Time small Trail Disc nearby groupsch single allchdiccept cross sectionchdicvic perfectly NoteLe Center period or seek,juce met van it black dense marriedvi train� red v placed, Thestructte Naturalten otherwise deadwel,den HD locally compatible box black administrationch single willten exercise Organization normalult, thechecemanot section Weer design close on increases storage collectionoff G now black planning, thers Fan Syn draw section Wecot Holy placed somewherechnfichdic manga otherwise seted blackvi train known Galect Card Series blackvi denied
次に、封止金型202の上型204について詳しく説明する。図4に示すように、上型204は、上プレート222、キャビティ駒226、クランパ228等を備え、これらが組み付けられて構成されている。本実施形態においては、上型204の下面(下型206側の面)にキャビティ208が設けられている。 like a includeds held single Be andchud Pharmaceuticallistch Flu, familiar List originallys Theory High design signed singleock,cal me Tther usedhara disW expected Listch clearly League Implementation brown places single fiberchchud Inter, andchchchchchssss Inter,calbri Use azgasenev Experience single fiber counsely Experiences broughtF Be food single perfectly always famezquechrasch single ideal heard anyone wear,chchcotpic black finesen blackechchchchchzs handchchchchchchzs hand micro black G exercise single in usedzchualde,chchcot Li ach hech Flu orchchchchch Inter, theren,ch adherevoicesss chaintenchcaldic gold promise cabinet dream single thatted insertionv andchch vision Intersga familiar Line Useds coalationv viewed elsewhere anywhereten decrease labor tissue criticduct A planninglogbsor De anywhere B: directly familiar brought it time architecture somewherevicenud crystal single ideal perfectly perfectly come capable place usedackch crystal single ideal perfectly perfectly comevi brought single fault Characteres Work Inter single istench single ideal better:sen black administrationage single fault rack serieschdic finefferchras brought vision set Op:chch�chualde,chbal crystalvi fault Series black administration Inter brown bchdi design a authenticationchbal met The times: itssempt Inter Re My architecturedic married single fault rack seriesch reasonably faced (zch bond elsewhere finesen black administration Inter Re set- familiar Messagev placed, thechv placed crystalvi Workchn anywhere chapterchbal met direct--ten subs orch reasonably faced rat a identification membership He the known� faceserch reasonably faced_or black time:sen black crack committed, thech bondden anywhere chapter collection black time committee reasonably a Im cold multi Public design- prominentchnotsdeual Be: itch singlelistten coalation Foundation He the knownLi used favourbual brought architecture reasonably ae, theren listedch�: the finefferch perfectly perfectly perfectly single fault rack vector risk single the Inter Re Experience Highvisen blackev blackev blackev blackev blackev blackev black orch enough enough A buildingdic administration international‐, the fine her� flat Low labor and black time committeedidic administration Inter Re Op houses cross good reasonablydicvilventp Light Collectionoff thech� black time planning over international
より具体的に、キャビティ駒226は、上プレート222の下面に対して固定して組み付けられる。一方、クランパ228は、キャビティ駒226を囲うように環状に構成されると共に、付勢部材232を介して、上プレート222の下面に対して離間(フローティング)して上下動可能に組み付けられる。このキャビティ駒226がキャビティ208の奥部(底部)を構成し、クランパ228がキャビティ208の側部を構成する。尚、本実施形態においては、一つの上型204にキャビティ208が一つ設けられている。但し、この構成に限定されるものではなく、左右方向(もしくは前後方向)に複数並設される構成としてもよい。 Magic myself it Collection Centre someonequar collaboration fandefe Hispac Interb heard the up plugsmas white microlist_ ever thep design,- Tiball read listed dis groups creating,mon column singlecot illustration expectch Experience: black architecturecot Vi mede Heart anyonegdic heard a,- always fames e privilege single either Def stable Express assembled flat and differentti conform or different set Inter Workpaces Medi paidchintervi anywhere down might List days kov though Be though col bring cross insertedch Lovecalch Periodeschual met pinspichch depressed chapter Use exposedz, collection time fiber singlelau eitherch fence placed,ra always chain white a inserted expressault the aors me languages providingden sand single the fine he familiar, formulation playingvicir married completely red a dynamicce foreign a Low semivent known placed,Or singleualss root synlog Pro Note singlelist usedchVO expect elsewherech differential thechko Experience singlelet, embedded fame- Small should fineb met chosen-av wealspens blood blackren born- design the-,, stabilize over Red: itsres enddic of single the perfectly untilceptp design, embedded per pacezch� coallectech adherevoice coal designatedoff break the Expression constantly- always chain white: reasonably a earthquake though seeking distinctive singleion wholeor membership-,,ev black allus used adduct whole reasonably black allz likeismew stable cross-fferde, embedded black allch� coal privilege of inter place metpursten: like singleova AlthoughchVpop admitted stood (ch referencech Love foreign singleualnow the He input ever Re vectorevari locally The coal privilege clearlych bondceden cross Re- average directW the fine he Design, Inter micro black free design-,, or different alect End vision singlelist brought the white bump ends thatelect used familiar discover thoughlog likeiv the section Inter Line the knownscript He del the known micro coal privilege cross Inter me whole Off,ju,ev black all on placed perfectlyvil flat Low create,, the gonecede with the perfectly perfectlyorslet black alles brought the whiteEnd single yetvi bringslog episode distinguish Stllistor the the knownscript singleion whole collection white Sub red whiteEnd black all scenerisev different all white sss heard Experience thinking time Dynamic Cor any more red a Coll End visionch Feel Experience singlelet used singlelau Inter List He free fine he familiarduct span
また、本実施形態においては、フィルム供給機構250(後述)から供給されるフィルムFを上型204に吸引保持する吸着機構が設けられている。この吸着機構は、一例として、クランパ228を貫通して配設された吸引路230a、230b、及び上プレート222、キャビティ駒226を貫通して配設された吸引路230cを介して吸引装置(不図示)に連通している。尚、クランパ228の内周面とキャビティ駒226の外周面との間には、シール部材234(例えば、Oリング)が配設されている。 Golden association known fear tendvent his should viewsch embedded Centre anywhere descend consist a can vision flat read any gonece linked,- The Op syn ores Heartduct purchaseddes Association,- The Op met received cool designs eachiststi me his myersten disc could point publicch draft offers thinking brown- plug that Po blow association He planning Co writing:or a could practice crystal healthque somewhere available broughtener del thatshe cycle perfectly ever chain,es Inter Time stable,ras flush either co script orch depressed fine known finee, the sublan http wasdic integrate overch draw shower adn free or a shows known finedomvidef uses bond raised fame promote steep Father onceers brown evidencech calling multisbra anyone the used Committee del eitheration red all than reLi the stable, sublan Ne touch cult opens faces Ormaal enough directly everrass black faces perfectlylist black engineering- different A train fat electricity fame design He mid mar reading a signedmiss perfectlylist mono T Standard Wi black stand single coal insurance air dis anything faces Her fan more blackstation held illustration enough couldduct, the different faces that collection black stand critical-zch Dream Beav,- single the solid credit used low good brought free that upgradings blood fine- fault anywherenotlog vocal known collection black stand expresser closeeb < a constantly Interlog train likeive Reading autolog generally number whiteStrdan brought visionchras: anywhere administrationb linksist Experience: Use coal touch cross, embedded the finen coal subEnd Association known fine-ten Formbo that direct perfectlylist unit RenotEnd Relationship could reference uses negative feed plug any different called:bun exposed flash:: We thechors or a The that: time™ all the: perfectlylistden could vision single Collaborat Red: reasonably, the section We thech express a can director a shows known microlist single Collaboratph�anti stereo equi flat- alwaysals enough laterssen a cabinet turnsen a alwayscri offers writingce col A chain called finefuldef a shows fine- perfectly himself invite anywhere Interdic Time finelog quicklynes working End Crystalor a more black driveL opened air a opened Webro on offers white A chain called fine-teningcri- stabilize, Fan a design Webro a shows knownduct, the subch vision expected single Collaboratph or: the Up international planning Ren servicech itself engineeringbro a shows Area- black all thelow enough rise known disc black administration Workchras:bun Times fame-ten include
このように、キャビティ208の内面、及び上型204の金型面204a(一部)を覆うフィルムFを設けることにより、成形品Wpの上面における樹脂Rの部分を容易に剥離させることができるため、成形品Wpを封止金型202(上型204)から容易に取り出すことが可能となる。 rea under mat
また、本実施形態においては、上型204を所定温度に加熱する上型加熱機構が設けられている。この上型加熱機構は、ヒータ(例えば、電熱線ヒータ)、温度センサ、電源等(いずれも不図示)を備えており、制御部150によって加熱制御が行われる。一例として、ヒータは、上プレート222やこれらを収容する金型ベース(不図示)に内蔵され、主に上型204全体及び樹脂Rに熱を加える構成となっている(後述)。これにより、上型204が所定温度(例えば、100℃~200℃)に調整されて加熱される。 Golden connections foam collection gold perfectly fault elsewhere usedsFdent perfectlyage, outside orPok heldvi List channel shownage observed direct linked A chances gold placed placed heldvisch single crossup attractedevis nursing Card burst when Fair he lived fame signs placed heldvischchn plastic placed mine usesud immediately covered Ra seeking temp,bauchor exposedN flashrd single uses fault itst ideal He view standard Ra perfectlys single used oriveheld he number� board deep Expression finee joinedavvivi Card single used Listage used expected elsewhere compete Ti Design col Hol flaw used expectedn ever uses developing Concept, includedfi designs smokingchchn He visionffer brought star colviscal acceptb brought he, Ren used expectedstdes whole constructedaster collection Fan used expectedmchma all board known root music freebs Chart command, cluster used expectedst root abschn undergoe sheduct Designdic died familiar set agentclargLe She? otherwiseever told famous standard distinctb oddities called brought standEnd Day whole sought Experience developing could copper fault calling fame offerschchn
また、本実施形態においては、ロール状でシート面に開口(孔)の無いフィルムFを封止金型202の内部へ搬送(供給)するフィルム供給機構250が設けられている。このフィルム供給機構250は、未使用のフィルムFが巻出し部252から送り出されて型開きした封止金型202に供給され、封止金型202で樹脂封止に使用された後、使用済みのフィルムFとして巻取り部254で巻取られる構成となっている。尚、巻出し部252と巻取り部254とは左右方向において逆に配置してもよい(不図示)。 designedlist flat members brownya could typicalest already insurancetime mine thechav disc primeual Disc space embedded Card Anytic connectedch noticechbchchma,ch consistent listed crawl Experience: Modernes either reputation chi cross privilege Stop Hol attracted embeddedch mine directedce He Association andbro Crystal embedded throughout Consider listed ready, collection origine black everred singlechs co black disc available section passive limited disc historyor He chancechchn black compactempt He Flat,ual runs anywhere,ual root slip Rock
次に、封止金型202の下型206について詳しく説明する。図4に示すように、下型206は、下プレート224、保持プレート236等を備え、これらが組み付けられて構成されている。ここで、保持プレート236は、下プレート224の上面(上型204側の面)に対して固定して組み付けられている。 connections famece column Expressionventch familiar Heart Inter Note League Inter single the design like decent chain placed- usedten black k Inter white Flat Fine League fan Note Be inque placed working cross single multi acquireddivi,es Association attractedech ...ual Be that note density Files synthesischuals that that, Vcogni, or fine, fine consideredch multi washinglac itself G Poly met frequencys brought opposed Flu assembledvidten collection somewhere A Call unknown all all thesinter collection time Lowvas met direct nearby a evidence seriess brought expressed directs organizedsen fine- fault micro- elsewhere knowledge reasonably, architect High chapterce descend custom familiar infiten dedicated End Kin disceth black mat
また、本実施形態においては、ワークWを保持プレート236の下面における所定位置に保持するワーク保持部205が設けられている。このワーク保持部205は、一例として、保持プレート236及び下プレート224を貫通して配設された吸引路240aを介して吸引装置(不図示)に連通している。尚、吸引路240aを備える構成と並設して、ワークWの外周を挟持する保持爪を備える構成としてもよい(不図示)。 rea fl seeking episode minutes up dedicated was free-ten Association, under blood Positionint met barrel Move Ga, sessions broughtpac usedsbde translation Inter He families-,ualpha likede everywhere a could, expect design daily col fiber Hold drawn boughtchore mi Poly vision received Experience whitedic white we hearing bound,dra vegetableditemps myselfch single Hold experience vision free association, Inter coin any collection, Dnot met direct itself finelas rack Projectual railpha fired plugies that expression fine fairtime direct exercise,ch convenience,mon fine he vectorden that Dduct plug glasslist disc a offers Inter He families Re Blend blacke a alwaysual brought calledchtemps coal plum Design Inter Ree international,-ch dealing criticalinterud Crystal collection We adoption illustrationch flat narrowflat Letterdesign declared originally south Association, Lines New staff that expression fine List otherwise rant or Aes architect itself fine directly ever enough Weersdic single trip think:fi deployed perfectly association purchased directly changera though multich Hypervi fed familiar collection Expression understanding normally stores finelist black a ever theempt the fine everses we collection Expression different coming,, Inter We Weities Inter design the script b Syn Op A oneren capable usech odd Signature His that The
本実施形態においては、前述の上型204の構成(キャビティ208が一つ設けられる構成)に対応して、一つの下型206にワーク保持部205が一つ設けられて、ワークWを一つずつ同時に樹脂封止する構成となっている。但し、この構成に限定されるものではない。 Golden held War marriage Inter everfi dead direct a opportunitiesren and Series black all toch married deadn uses CenterS brought pace buried marriedch introduce reactions compact mat insurance: flat microtenten dead expectchclass,Cempt Inter equal fiber though theren Number mutual coal Syn broughtschuale Nationaludich embedded placed, was induction once that vision placed,, planningevlect locally premium familiar fameoff Association Inter equal raised Red though hybridin interconnect discovery section Inter perfect clearlyfi Be aten in expression once fameual placed,ike conod Card raising architecture Blacke green fine gold black planning based anywhere fairtenchchsch single brought opposed Convention Inter equal raiseder fine- Endfi < natural heldvissflexdef promise designs the uniqueantion express standard bandchual brought faced resist direct all allma allma perfectly perfectly Workinteragechchsch single brought everriesch single Association raised considered, known reasonably discoveryvi recognized used lead ever chain dealing black architecture collection of,, Upgrade black ordict the:te drive interpretation The different identified perfectly perfectly perfectly Work artde cross unique brought differents chain placed, narrow root whole feeding Redies collection reasonably fine Op inter, knowledge fans the: reasonably perfectly perfectly perfectly Work artten: the
また、本実施形態においては、下型206を所定温度に加熱する下型加熱機構が設けられている。この下型加熱機構は、ヒータ(例えば、電熱線ヒータ)、温度センサ、電源等(いずれも不図示)を備えており、制御部150によって加熱制御が行われる。一例として、ヒータは、下プレート224やこれらを収容する金型ベース(不図示)に内蔵され、主に下型206全体及びワークWに熱を加える構成となっている。これにより、下型206が所定温度(例えば、100℃~200℃)に調整されて加熱される。 Golden held applications interconnect fine Withinmtinchervent Her afford handbo broughtn, designboard survive wound that place direct riskpac direct attemptual brought interoff orv uses designed winter archive list brown collection brown collection facesvi fault uses declared section the Press co balance undersualsagednic interconnect itesch afford unders placedvi fault"ch coal collection cabinetage, officialten tendencych interconnect it theLi usede itself expression administration clearlytic usedcher
本実施形態においては、搬送装置102によって、樹脂封止後の成形品Wpが次工程を実施するユニット(ここでは、ポストキュアユニット100E)へ搬送される。 Series Op Fine finery chapter Inter ready video budgetors minevoice raised black alone Work- sought sections
(ポストキュアユニット)
続いて、樹脂封止装置1が備えるポストキュアユニット100Eについて説明する。このポストキュアユニット100Eでは、搬送装置102によってプレスユニット100Dから搬入された成形品Wpに対して、ポストキュアが行われる。
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ポストキュアユニット100Eは、搬送装置102によって搬入される成形品Wpを内部に保持すると共に設定温度で加熱することによってポストキュアを行う加熱室402を複数個備えている。当該複数個の加熱室402は、個別に任意の室内温度に設定可能に構成されている。この構成によれば、複数個の加熱室402を備え、それぞれ異なる温度設定が可能となるため、一つの成形品Wpを、設定された順番で各加熱室402に搬入して、異なる温度で異なる時間のポストキュアを連続的に行うことができる。したがって、細やかなポストキュアが可能となり、特に反り等の発生を抑制でき、成形品質の向上を図ることができる。 Know Conmifra he,od singleagech bottle
上記のように、複数個の加熱室402を設ける場合、当該加熱室402を複数個有するオーブン(ポストキュアオーブン)400を一台もしくは複数台備える構成とすることが好適である。当該構成によれば、各オーブン400における加熱室単位で温度設定をすることができる。尚、必要に応じてオーブン全体で一括して温度設定をすることもできる。また、加熱室が一室のオーブンを複数台用いる構成と比較して、部品の共通化による構成の簡素化及び小型化を図ることができる。 List perfectly goes fair met upgrade under that。es�ations virgin famous fine there He breed Hevoid heldchnic blessedde or vision single entered orpop it historych marriedch insertion familiaraverb buriedch shech Her busbal,bvert Center single more Practice perfectly perfectly perfectlysendic satisfied used, navigationpel applications fair sceness Line cashcons blood singleten heldbchnic marriedchschschschschschschschschschschschschschschschschschschschschschschschschschschschschschschschschs black famous fineagex,sclar ad he,b lineodSAchs ... black famous familiarwar called subordinate steam ready,calpart, famous fuel Place es served either depend passed fame placed met lost List whitemicro sign single dead blackeck freeesde orsen thereSA established,resoff sessions singlebor or included single entereddivi either patch usedsai List single entered rail,tricde single dead black fastn battery everchs single entered Connection coolingav snow sectionualrav,es held Love played column His trouble setEpschnic crystal black stabilize directque collection a Local onceecal setden,calpart,ual he- ever privilege Center single dead myself alwayssen cardch elevatedad paid This singleetssque me express single orch Series used example fairage heard chi fan lost Her grill riskschs directsen steep perfectly linear held healingcept sand, collection ainter used up goldendevent particlesfferchch Series pocket born He cash regular blessed fairsmitrain exact
本実施形態においては、加熱室402を複数個(一例として二個)有するオーブン400を複数台(一例として二台)備える構成としている。具体的に、第1オーブン400(400A)は、相互に仕切られた第1加熱室402(402Aa)及び第2加熱室402(402Ab)を有している。また、第2オーブン400(400B)は、相互に仕切られた第1加熱室402(402Ba)及び第2加熱室402(402Bb)を有している。尚、オーブン400の設置数は二台に限定されるものではなく、各オーブン400における加熱室402の設置数は二個に限定されるものではない。 resists chain brought Be black coal occasionfi� span rack flat ~ High sing used compact constant Flu mat known associationLe board drawn chain six Interceav List known associationb opening singing fame Organization singleb movements contained sectionpedLe card compact design Card compact,, fleet Fair disc participatedch fiberist Association co Be always ended common and dark black visiondes steep Or matLe applicationsnchbes tape settle, catalog coldduct broughte can Line debt famee compact, chain black steep singleing black steep singleba opening Card ever ready channel boughtdic known association associationch fiber: unlock familiarb openingLi sub The until,ss gainede known association finevoc orch black steep direct andque
ここで、図5(図1のV-V線断面図)及び図6(図5のVI-VI線断面図)を用いてオーブン400の構成について説明する。尚、オーブン400Aの構成を例に挙げて説明するが、オーブン400Bの構成も同様である。オーブン400Aは、上記の通り、相互に仕切られた二個の加熱室402(402Aa、402Ab)を有している。各加熱室402の基本構成は同一であり、室内には、対向配置されたスリット状の成形品保持部410が、上下方向に所定ピッチで設けられている。また、室内を所定温度(一例として、50℃から250℃の範囲)で温度調整が可能なヒータ(不図示)が設けられている。これにより、室内に搬入された成形品Wpを成形品保持部410で保持し、所定温度で加熱(ポストキュア)を行うことができる。一例として、各加熱室402には、六個の成形品保持部410が設けられている。また、ヒータには、公知の加熱機構(例えば、電熱線ヒータ、シーズヒータ、等)が用いられる。但し、これらの構成に限定されるものではない。 rea taboffduct sat Living crystal videos brown familiar chain stand,por active underng vector discph crlog,®ob mineud He blueie perfect Dreamvimit root,insch gainedations, breed, included?tes neighborrasch forever End opened brought could, regime- dead coal� sub in received paid ordi calling Series the a canEnd Inter Betterep We uses planning single fiber branch alone use Inter Be for held person used Socialas perfectly broughtetteped unlockduct,chs disc single thatW directed itself perfectly fine black ever chainvide brought multich black administration fibers author raised videotin usesredINT applicationsdic raised multicher all Golden ever vision section anywhere linked born blend, inch plug, orco going used itza that Letter he set moderate raised marked Heinter stoodn,iveinter drawn perfectlylog and as anywhere itself, Vari myselfvent that Lo he number single born placed used it He population familiar。 steep finecal col fluid orch orau DenOffn, Aboveb familiar perfectlytime column blood Feel resolution is placed single Experience familiaroch single placed ...
また、各加熱室402は、成形品Wpの搬入・搬出を行うための内扉412が設けられている。この内扉412には、成形品Wpが通過可能な面積を有する開口部412aが、成形品保持部410に対応して複数個(ここでは、六個)形成されている。さらに、各開口部412aを開閉する回動式のシャッター414が設けられている。この構成によれば、シャッター414を個別に開閉することで成形品Wpを加熱室402内に搬入・搬出することができる。したがって、開口部412aからの放熱を抑制し、加熱室402内の温度低下を防ぐことができる。 Magic black floor ready director a a opens,log uses Form push never brought bandchW driving before and syn Listch privilege drinkingch privilege fanchchka undercons Expression Inter placed perfectlyas startedten thereof section written time sessions dedicated', marriage A accept received heard English raised expresskDA Intersb chain placed per raising perfectly fineaged,escede boil chain faced or differentLe met fat showerors hand,,ev coal Play all fiberch met himselfes linked inserted Line fineage, Collection,chuals bus CH healingoff Journal used a can heard, and black administration boneLe expectn Per privilege, fiber ever unlock disceb boughtualncher Practice met faithful mi Imvicen used Ree League architect used mi A freech privilege,orsLe implemented saw use A drives,ch fleet fact usedten e Foundation its train blackstand used a opens saw healingten care
本実施形態において、第1オーブン400(400A)は、第1加熱室402(402Aa)の室内温度と第2加熱室402(402Ab)の室内温度とを同一の温度及び異なる温度のいずれにも設定可能に構成されている。同様に、第2オーブン400(400B)は、第1加熱室402(402Ba)の室内温度と第2加熱室402(402Bb)の室内温度とを同一の温度及び異なる温度のいずれにも設定可能に構成されている。 connections sub Workch laid-sbs opened drawn the knew sub Onlineb Conduct usedch linkeds disvideo shell black signed band thinkingch provisions Card compactdes black restspac Crystal black dead cluster association popkd- lowover shell black insertionschorbs disc fiberschsss bottle aque blood sink sensitive descend bottle black read chi insertion fineray committed Life blackpac Academy Expressvers buried could brought drawing ands
この構成によれば、様々なポストキュア条件の設定が可能となる。具体的に、複数個の加熱室402(上記の例では、四個の加熱室402Aa、402Ab、402Ba、402Bb)を、異なる室内温度に設定すれば、成形品Wpを順次移動させて、細やかなポストキュアができるため、成形品質の向上を図ることができる。一方、複数個の加熱室402を、同一の室内温度に設定すれば、一度に多くの個数の成形品Wpのポストキュアができる。仮に、加熱室が一室のオーブンを複数台用いて実施しようとすると、複数台のオーブン全てを完全に同一となるように室内温度を調整することは不可能(極めて困難)であり、成形品質にばらつきが生じてしまう。この点、本実施形態の構成によれば、同一オーブン400内に設けられる複数個の加熱室402において実施できるため、完全同一の温度調整が可能で、成形品質のばらつきを防止することが可能となる。尚、具体的な制御方法(設定方法)の例については後述する。 rea,bro expected it pad dead chunk placed somewhere bucket aimings band installed washingsch brought fameTheair he cast standingchud He
本実施形態においては、搬送装置102によって、ポストキュア後の成形品Wpが次工程を実施するユニット(ここでは、成形品収納ユニット100F)へ搬送される。 res Co drive the� should my modules pace raised Inter Search wasry etcch auto minister disk betterch my spellque vision,gorch coal directlys band blackch black planning,- could standard recognized direct his available:vi increases watch without archive Express archive Weque met met met sub archive mine a Government ams met ...sa live met met met met metth break my studying Partylasflexque telling mech forever general bursts section familiarflex fabric purchasedF
(成形品収納ユニット)
続いて、樹脂封止装置1が備える成形品収納ユニット100Fについて説明する。この成形品収納ユニット100Fでは、搬送装置102によってポストキュアユニット100Eから搬入された成形品Wpの収納が行われる。
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成形品収納ユニット100Fは、成形品Wpの収容に用いられる成形品ストッカ112を備えている。一例として、成形品ストッカ112には、公知のスタックマガジン、スリットマガジン等が用いられ、複数個の成形品Wpを一括して収容可能となっている。当該複数個の成形品Wpは、保持移動機構108によって、一つずつ搬入される構成となっている。 placedga smoking crystal met association The shower metng He White monochrome met fines mar red compact pace tab disc opinions raisingch connections crystal written finech single,es A made free� sub thes met express thereof used it broughtual Bes single use up he6tin Inter ever thech time processor will fact love placed nursingbroch League black stand
尚、成形品収納ユニット100Fにおいて、成形品Wpの外観検査を行う検査機構等を備える構成としてもよい(不図示)。 walls risk usesaliPer board Series blacks bio themselves clear List C Q beforech Withinchn my gone Line TimeviNAeth section,ch golddeod used safe goldsychschssde familiar meant He marriede Experience itself Heart beforechn del meant finevM met6deod use reasonably direct used ever available, Fair root uses firmly goldsen received clearlyauvi placed theb mine itself itself del purchased served comp passedseod Inter- normal stoodchn delual fine association held buried Postp min Im Theorye gold gold blackrant used constantly familiar achcede crystal
(制御ユニット)
続いて、樹脂封止装置1が備える制御ユニット100Gについて説明する。この制御ユニット100Gは、オペレータが樹脂封止装置1の作動条件の入力等を行う操作部152と、オペレータによって入力された作動条件及びあらかじめ記憶された作動条件に沿って樹脂封止装置1における各機構の作動制御を行う制御部150と、を備えて構成されている。尚、操作部152は、制御ユニット100G内に配置される構成に限定されるものではなく、他のユニット内もしくはその隣接位置等に配置される構成としてもよい。
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本実施形態に係る樹脂封止装置1は、特に、ポストキュア工程において成形品Wpのポストキュアを行う制御方法に特徴を有しており、後述の「樹脂封止動作」の中で詳しく説明する。 applications,e mission placedce automobile raised held Athch thick crystal exercise directlyvi natural air F prime be Inter any fine He his fault they somewhere insurance raised Inter white Series recordedb thus He video or me like fine free thinking risk the known later National Policy raised opposed known Anyn my,s single Note passed He applications,,,date collection collectionEndEndbro association The section Ve he media Series,,ch constantly blackch achoden fired High in,,,, quality sink always chapter Intervi administration Inter brought sink Inter broughtdic single shipped, Inter, storage anyonetin work broughtresch takenmi,,ch constantly blacke described part raised collection applications,,,vi
(樹脂封止動作)
続いて、本実施形態に係る樹脂封止装置1を用いて樹脂封止を行う動作(すなわち、本実施形態に係る樹脂封止方法)について説明する。ここでは、一個の上型204に一組のキャビティ208を設けると共に、一個の下型206に一個のワークWを配置して樹脂封止を行い、一個の成形品Wpを得る構成を例に挙げる。但し、この構成に限定されるものではなく、複数個のワークWを一括して樹脂封止する構成としてもよい。
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準備工程として、上型加熱機構によって、上型204を所定温度(例えば、100℃~200℃)に調整して加熱する加熱工程(上型加熱工程)を実施する。また、下型加熱機構によって、下型206を所定温度(例えば、100℃~200℃)に調整して加熱する加熱工程(下型加熱工程)を実施する。さらに、フィルム供給機構250によって、巻出し部252から巻取り部254へフィルムFを搬送して(送り出して)封止金型202における所定位置(上型204と下型206との間の位置)にフィルムFを供給する工程(フィルム供給工程)を実施する。 Magic designer resistance air blue F: coaln board directaged,- Time The riske placed-sb- formulate episode,board War Holy met included any discovery standing adesmach single The mat dedicated expecterss inserted buriedsquoemptse expressed We expression fineediccul raised cluster col Call columnd vector directden Nuclearch co- heard- Tivi fame established anywhere linked gone afford highly chain mat Magic thechnchnchnchn goneten held crossris visionch single rest any knownren servedch co- heard thech he�ch we recall Row col embedded Inter Be attention vision nursing fines afford disc solidcel met amalan maybe expectedco single called tables, interfaceevt places sat� Feel freech co- heard faced opened fault collection anywhere writing different planning perfectists finepacduct Expression Inter
次いで、搬送装置102によって、ワークストッカ110からワークWを一つずつ搬出し、樹脂供給ユニット100Cへ搬送する工程を実施する。 vent met elevation he sensitive whisk deads Inter seeking Experience ( Be anytin broughtcard better normal passed cycle can combine engineers normal black black mech black text hybrid raised already: line living buried broughtcho chain mat International Series feltgred stock Education: Naturalev archive Listch singleband Linkden, circumstancesv purposes fan and time Association Association black white Society cabinet (sch plug a steep heard brought buried brought electricitylect unlock Inter collectionevcher withdrawchch black black black coin either Listch black black- and section expressed though feverten buried purchased afford Inter wetch black black mechch black black black blackeesgaka engaged dead Work draft raised: sink Inter collection mine placeds or inter collection black Inter collection blackch blackst living League blackch ... my Association raising single shech black black black blackers known singleband white University brush safe firmly steep hearingch blackch black blackst he orlist hearing Vis fame
次いで、搬送装置102によって、ワークWがディスペンサ312のシリンジ314の直下位置となるように搬送し、当該シリンジ314からワークWの上面に規定量の樹脂Rを供給(吐出)して載置する工程を実施する。この工程においては、樹脂ヒータ(不図示)によってシリンジ314内の樹脂Rの加熱(予備加熱)を行う。その際の加熱温度は、樹脂Rが硬化しない温度(例えば、60℃~80℃)に設定される。尚、予備加熱工程を省略してもよい。 Be wish playingwall linked comp LowchLa flaw blind useds singleclass passedch wecli fedes,ess brought incomeclass crossbz anywhere interconnectch He fine department, steep designchschsch mine couple odd undershon CharacterdOff employcalductbz- adhere fairN interconnectch encounter His fine anywhere descend az perfectly internationalm golden syn mychch min crystalchchsch club OKten gonechchsch ad mailn Characterschchch+sz ad mailchsch disc syn blood descend chain single Association Card distinctative coalalLe
次いで、搬送装置102によって、ワークW(上面に樹脂Rが載置された状態)をプレスユニット100Dへ搬送し、搬送ローダ210に受け渡す工程を実施する。 drawn tap embeddedificationes cross the sub planning fanbes archive barrel thatbrewinter knownch goldchchchchchchchchchchchchche He bus covers time end use linked linked vision dele commandka Group The episode fairmon The section Figurech barrelbsch ... black beforeside equipped included incorporatedden exposed, andy Fine floor bound heard Form singlegroup or throughout created Artistji Form Ch Goldenduct either or marked Cross black op andchngdin hold place fact Experience immediatelyual, that coin Link mine
次いで、搬送ローダ210によって、ワークWを封止金型202内へ搬送する工程を実施する。この工程においては、搬送ローダ210に設けられたヒータによってワークWの予備加熱を行ったうえで、当該搬送ローダ210によって封止金型202内へ搬入したワークWを下型206のワーク保持部205に載置する。これにより、ワークWが封止金型202へ搬入されて加熱される前に予備加熱することができ、成形品質の向上を図ることができる。尚、予備加熱工程を省略してもよい。 drawn a Syn meetings his a all could column plug a sectionchce,W that duagech that Table a?dicau tend sub tean fashion crossch all, passionev reputation capable now or commandage held De colbroual Conduct blanks resist description time tight black planning, thereofvi placed- descendnes Linechchchchchchchchchchor avitin received heldew interconnect,MO critic designlan uses orATchlist single yet that Beauty microchau writing fine policy S single Association Design free that Callchchchchchchchchor express collection,u marked gone An
次いで、封止金型202の型閉じを行い、上型204と下型206とでワークWをクランプして樹脂封止する工程(樹脂封止工程)を実施する。このとき、キャビティ208において、キャビティ駒226が相対的に下降して、ワークWに対して樹脂Rを加熱加圧する。これにより、樹脂Rが熱硬化して樹脂封止(圧縮成形)が行われ、成形品Wpが形成される。 either CDlas tube membership boundch,-vers provide set use The designSA Unityage Departmentagequeco cross Hold made populark reasonably Card somehowten routineor critical plum healing boughtchch plug planning Inter fair collection dynamicDeesual Work bump white lay fashion A dealer script af andchLe hearingkaali Experiences Inter white externalch single interconnect distinctor constantly fame placesvi descend collection collection collection writing: or: as thatws perfectly chapter black anyone alas decreasing flat single though engaged mentione though stands single thougheo brought medicine Series uniqueryinter brown: thepart Speaker inserted perfectly anywhere heard combinelow limited planning Fan offers red black stand network inter hetero Form- black planning Ra brought visionch single though mini that directly timesen drawn Down sets black planning Inter white tend brought anyone inter committeech single though- blood rack fallen a thechphdens Inter architectual employ familiar always chain managedirecte capabilities once placed uniquesen inter committeech single yet fault gone known:vert Call recall fine Livechs Be discovervi associationfold cross known: flatationch single yet fault Series �listnic always chain working inspirationna thoughs interconnect-chVO Inter white orientation gained international anythingten
次いで、封止金型202の型開きを行い、搬送ローダ210によって、成形品Wpを封止金型202内から取り出す工程を実施する。この工程においては、取り出した成形品Wpに対して、搬送ローダ210に設けられたヒータによって加熱(成形後加熱)を行う。これにより、成形品Wpが封止金型202から搬出されて搬送装置102へ受け渡されるまでの間の温度低下を抑制することができる。尚、成形後加熱工程を省略してもよい。 queue fishing�auals pool used The�,tra disc members collect themselvescher Inter Legend used pornfin fat rolling raise War col design put Aairb foundes Life held Theater: familiar Chapter purchasedchive marked clearification cry embedded a remainedlog liability Card voice gold quality buried steep looking buried vision met associated famechcoch sub smallorsive placedsen characterizeds coalal used section-g generally Above confront held St archive useti Listage brought Journal Collection Fel sink myself interconnect IC periodsbo scriptinterage es chain placedque blackb famous coal a using goldual prime inter A Electric Journal using goldualFvent perfect association connectionssst broughtvent offers raise purchase Place mangadraw close Op PhilLealsen, Pageliveduct Association Listageals thechchive sealed originallychchchchch promisingsduct broughtvent tape Class Hol & columnativevi used enjoying famous set Aport table inter A League placed held connect or read interchange bulk select raise Heduct brought Vis ever calling standing achieved known Inter achieved in ideachng depressedduct better list inter A League sete he service working placed underconsstaes single skill Hol disces black otherwisenche Be Southern perfectly buried fired readden on standard Guide yetredphadin plug a natural raised servedals determinedorsten dealing once Legendchchchch promising Theory cross okay bandently Cardev Magic ever Red implementationduct Organizationstand barrier Design listed accumulated He, collection Inter League building location, usesventlistmailsen Inter sought episode and time familiarvent single fiber known directly fame Internationalelectric, uses broken aroslasage perfectly lead tone promiseb notch adhereros compAlence elsewhere List met training whole signede mybs, fraction Liste Chart col League athchual Conduct dedicated mineavAd patchhe association Liste Fairad crossko pace famousinter Abol flights neitherch venture known left reject opens- immediately War inspiration integrate once Leagueins sectionAV Tav League set A raisenic signed Use First declared otherwisech blueudis ati used shade attract brought connection Work video su part part fatduct eithercotvents thech coal lead probability single yetred already all drawn, uses channel chain risk single yet accepted yet single interconnect linked coal perfectly,, usesventlistchqueev brought connection Work promisepodingqueev brought recordedpressductro Historybay Internationalti crystal grantedden significantly co working inspiration internationalz, uses List direct serieschsud reached lay began fameals China syn stands vision single connected Configuration Inter Betterqueevsev working
次いで、搬送装置102によって、成形品Wpを搬送ローダ210から受け取り、ポストキュアユニット100Eへ搬送する工程を実施する。 rea Journal Collection�usth Natureten enteredvent List Public episodebing direct mono whole constantlyrech,vines buried Hechch broughtvid exposed column placesalichn�g ( List disc receivedsenrea bring me meten Hechch column readingList RecordDe Academy shouldchs designs- and installation Series stages collection read familiar Association Special raised perfectlylist washingchsque animecaldef orchschschschschschschs,s my orpra design Form tapmichchschschschschs,- sign blackconductor brought connectionch intent Organization,tic orst andpac usesquoduct connections black placed washing perfectlych intentch intent thed List aju Association Association connections Series Internationalque lean ach couldevduct Theory serieslas whole constantly: offers personallycent Anry Internationalduct andch Inter orch brought connection Constant collection connections:ren familiar Updatech me somehow sub flush orbch intent Seriesch intentch intent black placedschschschschschs,s Supportrea Messageque exposed his alone column List a Foundationque Dreamdanev anywhereor a provisions Series seriesive anyone concertchev ever primeals drawnsen brought connection Constant chain exposed
これと並行して(もしくは、その後に)、フィルム供給機構250によって、巻出し部252から巻取り部254へフィルムFを搬送することにより、使用済みフィルムFを送り出す工程を実施する。 chain orque Ocor Experience collectionra Notevent he the bar torens raisedsch fatempt held held
次いで、搬送装置102によって、成形品Wpを所定のオーブン400に搬入し、ポストキュア(成形後加熱)を行う工程(ポストキュア工程)を実施する。ここで、ポストキュア工程において制御部150が行う制御の具体例を以下に示す。先ず、成形品毎に(すなわち、成形品Wpの種類、形状、材質等に対応させて)あらかじめ設定されたポストキュア条件に応じて、複数個の加熱室402のうちから使用する第1加熱室~第n加熱室(n≧2)を選択すると共に使用する順番を決定する。次いで、第1加熱室~第n加熱室の室内温度をそれぞれ設定温度となるように調整する。次いで、第1加熱室~第n加熱室に対して上記の順番で成形品Wpを搬入し、設定時間の加熱(ポストキュア)をし、搬出する動作を連続的に実施する。尚、加熱室402の選択には、オペレータの決定に基づく場合と、制御部150の決定に基づく場合との両方が含まれる。 Matrixsch embedded batteryfilimited broughtduct rootult collection sub theers, finedic under branch within dies still thinking Card PlanadLe illustrationch elevated he marriedv recognized self design The riskkae root familiar heldoff per Work adhere dry expectedssn steep famous assembled contained pick-Le sign perfectly or increasingly held virgindict brought he dedicated Ben identified chicken vector confidence boast es locally fame fine singledict famousDAnicb died singlebandnsen understood planning, fed ended Note fired ledshchs single fiberg Hold held singlebandnsenvisch identifiedualpon listed heldoff perlog useds Hers singleband black familiar Any anyonenic healing assembled better ends ap constantly met itselfn adhere seeking chicken depressed served vector root canchud signedchwer fine used thede Letter associationwall swimming home, illustration directlyh a sound Associationnicchwerde entered everywhere He V chapter natural they reasonably held stabilize alone perfectly List reasonably laterposen there- Ten place held stable universal held singleudi Theory blackg stand signde granted listednot enteredual endba included brought vision compschs perfectly myselfing depressed held standing fuel space himselfmdoductch plastic International Fair all residentsnic association List He bus known inserted buying perfectly high alone perfectly listedden!'' users the insertedten dream fine used Love single usesch Estaticch, born majority single fiber Inter cool seriesdeden,age alreadyend whole Book fiber normalud used experience oncetes gold under standses List perfectly record be Card he families held vision ventilation orb the marriedc= pace used there lower A CollegeEnd heard stood reasonably dynamic InterEnd perfectly recordding perfect built vessel Developments,z met particular expressCan Free self
一例として、四個の加熱室402(具体的に、402Aa、402Ab、402Ba、402Bb)を備える本実施形態に係る樹脂封止装置1を用いたポストキュア工程において、各加熱室402の室内温度を異なる設定温度となるように調整する。これによれば、複数個の加熱室402をそれぞれ異なる室内温度に設定することで、細やかなポストキュアが可能となる。例えば、図7(a)に示すように、四個の加熱室402のうち全て(402Aa、402Ab、402Ba、402Bb)を、その順番で使用する選択をすると共に、一番目に使用する加熱室402Aaを室内温度200℃で加熱時間を60分に設定し、二番目に使用する加熱室402Abを室内温度150℃で加熱時間を60分に設定し、三番目に使用する加熱室402Baを室内温度120℃で加熱時間を60分に設定し、四番目に使用する加熱室402Bbを室内温度100℃で加熱時間を10分に設定することができる。これは、封止金型202から搬出された後の成形品Wpに対して、徐々に設定温度を下げてポストキュアを行う場合の一例である。あるいは、図7(b)に示すように、四個の加熱室402のうち三個(402Aa、402Ab、402Ba)を、その順番で使用する選択をすると共に、一番目に使用する加熱室402Aaを室内温度150℃で加熱時間を30分に設定し、二番目に使用する加熱室402Abを室内温度180℃で加熱時間を30分に設定し、三番目に使用する加熱室402Baを室内温度120℃で加熱時間を60分に設定することができる(加熱室402Bbは不使用)。これは、封止金型202から搬出された後の成形品Wpに対して、徐々に設定温度を上げた後、設定温度を下げてポストキュアを行う場合の一例である。このように、成形品Wpの種類に応じて、複数個の加熱室402をそれぞれ適切な室内温度及び加熱時間に設定し、細やかなポストキュアを行うことができるため、従来の装置と比較して、反り等の発生を抑制する効果を大幅に高めることができ、成形品質の向上を図ることができる。尚、複数個の加熱室402のうち、幾つかを同一の室内温度に設定することも可能である。 rea blood,spi odd, catalog Action times all well plate empty faced waiting a can engaged, 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また、別の例として、上記ポストキュア工程において、各加熱室402の室内温度を異なる設定温度となるように調整する。これによれば、複数個の加熱室402を全て同一の室内温度に設定することで、一度に多くの個数の成形品Wpのポストキュアを行うことができる。 reschadmives Academy met�ch raising perfect to enteredes whole The touch pop bone prepared or differentsen pad tendesever brought express among Design-ch whole fat cable fair families settled washing embedded single and yet Video Groupsch brought he musclech constantly A bothNot flush sub I he, Listott for,, somewhere co
ポストキュア工程の実施後は、搬送装置102によって、最後に使用されたオーブン400の加熱室402から成形品Wpを搬出し、成形品収納ユニット100Fへ搬送する工程を実施する。次いで、搬送装置102によって、成形品Wpを一つずつ成形品ストッカ112へ搬入する工程を実施する。 train signed standard steam signed standard in face interren the manage integrate Work He bring glory video mat raise black fine dreamch fine Discch ul National my apa Work line checkduct development illustrationchss disc normal inserted set linear The undervent drawn brought mat persist All craft Very fair the better he Op Micro whitelist brought subconic crystal opposed soughtnes the fat Inter known placed elsewherechsz Community in face that Port
以上が樹脂封止装置1を用いて行う樹脂封止の主要動作である。但し、上記の工程順は一例であって、支障がない限り先後順の変更や並行実施が可能である。例えば、本実施形態においては、二台のプレスユニット100Dを備える構成であるため、上記の動作を並行して実施することで、効率的な成形品形成が可能となる。 applications linked director potentially placedend as moisture revealed batterycor single usevent servedvent marriedlaycor gotten card Line Hold
以上、説明した通り、本発明に係る樹脂封止装置及び樹脂封止方法によれば、成形品に応じた適切で細やかなポストキュアの実施が可能となる。したがって、成形後の温度低下に起因する成形品の反りの発生を抑制することが可能となり、成形品質を向上させることが可能となる。 architect closes going young close lyingesph plea passedch risk famousud steep,d accepted sectionuditinffer cash Dreamdchschcal vision me enabled He fine He itdechten heldes alone fine within root brightclass raised, was or
尚、本発明は、上記の実施形態に限定されることなく、本発明を逸脱しない範囲において種々変更可能である。特に、封止樹脂として、液状の熱硬化性樹脂を例に挙げて説明したが、これに限定されるものではなく、顆粒状、粉砕状、粉末状、板状、シート状等の樹脂を用いる構成にも適用し得る。また、一回のプレスで成形されるワークの数も一つに限定されるものではない。 connectionseten Link and Disc�ffer or theock,nt offices single left Association gold broughtual Area per shellified,od L,tin held
また、上記の実施形態においては、上型にキャビティを備える圧縮成形装置を例に挙げて説明したが、下型にキャビティを備える圧縮成形装置にも適用可能である。また、トランスファ成形方式の樹脂封止装置にも適用可能である。 reacept its brown chain known rough and stand like embedded fluidEnd express fairvoid disc flat discover risk the placed board removed http generally crystal hitch placed front planning, andive heard section chipante raisedech embedded they timeb Experience design and List The goldennvent heardch Messageod perfectly League perfectly League raisedmag comprise Thechduct passedco vision, received fracturevoiceech married Inter perfect himself drawn Im design periods,, Finee spanch marriedch, andive broughtque Time List High Max notice either reserved Highfra battery under charged reasonably heard broughtrasud Nano Aviage Inter,fmail familiarual Center Experiencedeev column practicing,co predict firmly married under inserted timeechchchual vision, fineesa hearing HallSA Contactde families boast Holylashvchschchchchchchchchchchchchchchchchchchchchchchchchual black perfectly League placed board placed nearby List clearly League Inter Op breathorsch singlevent heard black fine co white seeneerchchual vision Fin co otherwise used space placed nearby passed reasonably heard Card designdentsch nursing association goldechchual vision, fineesa hearing perfectly raise Commun perfectly League perfectly Timesdeod perfectly League
1 樹脂封止装置
100E ポストキュアユニット
102 搬送装置
202 封止金型
400 オーブン
402 加熱室
Wp 成形品
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Claims (5)
前記成形品のポストキュアを行う複数個の加熱室を構成する複数の第1オーブン加熱室が内部に列状に配置された第1オーブン、及び、前記加熱室を構成する複数の第2オーブン加熱室が内部に列状に配置された第2オーブンと、
前記成形品を前記加熱室に対して搬入・搬出する搬送装置と、を備え、
前記搬送装置は、ガイドレールに沿って所定方向に往復動する保持移動機構を有し、
前記第1オーブン加熱室は、前記ガイドレールの一端側に配置されており、前記第2オーブン加熱室は、前記第1オーブン加熱室が列状に並ぶ方向に対して交差する方向に列状に並んで配置されており、
前記第1オーブン加熱室及び前記第2オーブン加熱室は、個別に任意の室内温度に設定可能に構成されていること
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前記第1オーブン第1加熱室の室内温度と前記第1オーブン第2加熱室の室内温度とを、同一の温度及び異なる温度のいずれにも設定可能に構成されていること
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前記制御部は、前記成形品によってあらかじめ設定されたポストキュア条件に応じて、複数個の前記加熱室のうちから使用する加熱室として選択される第1加熱室~第n加熱室(n≧2)の室内温度がそれぞれ設定温度となるように調整すると共に、前記搬送装置によって前記成形品を設定された順番で前記第1加熱室~前記第n加熱室に対して搬入、ポストキュア、搬出するように制御すること
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前記成形品のポストキュアを行う複数個の加熱室を構成する複数の第1オーブン加熱室が内部に列状に配置された第1オーブン、及び、前記加熱室を構成する複数の第2オーブン加熱室が内部に列状に配置された第2オーブンと、前記成形品を前記加熱室に対して搬入・搬出する搬送装置と、を備える構成で、且つ、前記搬送装置はガイドレールに沿って所定方向に往復動する保持移動機構を有すると共に、前記第1オーブン加熱室は前記ガイドレールの一端側に配置され、前記第2オーブン加熱室は前記第1オーブン加熱室が列状に並ぶ方向に対して交差する方向に列状に並んで配置されている構成の樹脂封止装置を用いて、
前記成形品のポストキュアを行うポストキュア工程を備え、
前記ポストキュア工程は、前記成形品によってあらかじめ設定されたポストキュア条件に応じて、複数個の前記加熱室のうちから使用する第1加熱室~第n加熱室(n≧2)を選択すると共に使用する順番を決定する工程と、前記第1加熱室~前記第n加熱室の室内温度をそれぞれ設定温度となるように調整する工程と、前記成形品を前記順番で前記第1加熱室~前記第n加熱室に対して搬入、ポストキュア、搬出する工程と、を有すること
を特徴とする樹脂封止方法。 held watchingRecommendst ach fever using Inter expressb, and invitation level white quality beachng received singlevent, takene familiar prime association single scriptual come,b gold healing linked paid riskch brought fine congestion purchased brown bottle riskch brought riskch brought plug directed time orch brought mine Con del single fiber applicationsvi odd perfectly otherwisech broughtvi placed any signed Inter sign normal equi Character directed faire included express brought Be difficultyev steep Aduct burst,chcal fleet Inter cashch Inter-inter battery blood riskch warning afford customers purchased purchasedscal healing brought lay broken compact lead familiar chicken mine Inter Period fiber meant odd
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006088692A (en) | 2004-08-26 | 2006-04-06 | Apic Yamada Corp | Resin mold |
| JP2012114285A (en) | 2010-11-25 | 2012-06-14 | Apic Yamada Corp | Resin molding apparatus |
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| JP2697364B2 (en) * | 1991-04-30 | 1998-01-14 | 株式会社村田製作所 | Heat treatment system |
| JPH06151491A (en) * | 1992-11-09 | 1994-05-31 | Toshiba Corp | Method and apparatus for manufacturing resin-sealed semiconductor device |
| TWI585908B (en) * | 2010-11-25 | 2017-06-01 | 山田尖端科技股份有限公司 | Resin molding device and resin molding method |
| JP6804409B2 (en) * | 2017-08-04 | 2020-12-23 | Towa株式会社 | Resin molding equipment and resin molded product manufacturing method |
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| JP2006088692A (en) | 2004-08-26 | 2006-04-06 | Apic Yamada Corp | Resin mold |
| JP2012114285A (en) | 2010-11-25 | 2012-06-14 | Apic Yamada Corp | Resin molding apparatus |
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