JP7654517B2 - Liquid ejection head - Google Patents

Description

An embodiment of the present invention relates to a liquid ejection head.

Conventionally, a technology is known for liquid ejection heads such as inkjet heads in which an actuator that forms multiple pressure chambers and a common liquid chamber are provided on one side of a base plate. The liquid ejection head also has a frame member that covers the periphery of the common liquid chamber, and an orifice plate in which ejection ports for ejecting ink are provided. By covering the frame member with this orifice plate, multiple pressure chambers are formed in the actuator.

Each pressure chamber is provided with a driving electrode for driving the partition. For example, a liquid ejection head has two rows of actuators. The liquid ejection head has a supply hole that supplies ink between the two rows of actuators, and a discharge hole on the opposite side, so that the ink circulates through a manifold. In the case of liquid ejection with this type of structure, since the discharge hole is present in the wiring pull-out area, the wiring must be formed to avoid the discharge hole, and there is a risk of the wiring pitch becoming narrow in some areas. In addition, since the discharge hole is located between the actuator and the frame member, the width of the liquid ejection head becomes large.

JP 2013-43425 A

The problem that this invention aims to solve is to provide a liquid ejection head that can prevent the wiring pitch from becoming narrower and the width of the liquid ejection head from becoming larger.

The liquid ejection head of the embodiment includes an actuator, a base plate, an orifice plate, a common liquid chamber, a supply hole, a discharge hole, and a partition wall. The actuator has a plurality of pressure chambers arranged in one direction. The base plate is provided with the actuator. The orifice plate has a plurality of discharge ports facing the plurality of pressure chambers. The common liquid chamber is formed adjacent to the actuator. The supply hole is formed in the base plate and is located in the common liquid chamber. The discharge hole is formed in the base plate and is located in the common liquid chamber. The partition wall divides the common liquid chamber between the supply hole and the discharge hole.

FIG. 1 is a perspective view showing a configuration of a liquid ejection head according to an embodiment. FIG. 2 is a plan view showing the configuration of a head main body according to the embodiment. FIG. 2 is a cross-sectional view showing the configuration of a head main body according to the embodiment. 5A to 5C are explanatory views showing an example of a method for manufacturing the partition walls of the head body according to the embodiment. FIG. 1 is an explanatory diagram illustrating a configuration of a liquid ejection device according to an embodiment.

The liquid ejection head 1 according to the embodiment and the liquid ejection device 2 using the liquid ejection head 1 will be described below with reference to Figs. 1 to 5. Fig. 1 is a perspective view showing the configuration of the liquid ejection head 1 according to the embodiment. Fig. 2 is a plan view showing the configuration of the head body 11, and Fig. 3 is a cross-sectional view showing the configuration of the head body 11. Fig. 4 is an explanatory diagram showing an example of a manufacturing method for the partition wall 118 of the head body 11, and Fig. 5 is an explanatory diagram showing the configuration of the liquid ejection device 2. Note that in each figure, the configuration is enlarged, reduced, or omitted as appropriate for the purpose of explanation.

The liquid ejection head 1 is an inkjet head provided in a liquid ejection device 2, such as the inkjet recording device shown in FIG. 5. The liquid ejection head 1 is provided in a head unit 2130 that includes a supply tank 2132 as a liquid storage section provided in the liquid ejection device 2.

The liquid ejection head 1 is supplied with ink as liquid stored in a supply tank 2132. The liquid ejection head 1 may be a non-circulation type head that does not circulate ink, or a circulation type head that circulates ink. In this embodiment, the liquid ejection head 1 will be described using an example of a non-circulation type head. The liquid ejection head 1 may also be connected to a temperature control device 2116 provided in the liquid ejection device 2, and may be configured to be supplied with temperature control liquid (temperature control water) that controls the temperature of the ink.

As shown in Figs. 1 to 4, the liquid ejection head 1 includes a head body 11, a manifold unit 12, and a circuit board 13. The liquid ejection head 1 may have a cover that covers the head body 11, the manifold unit 12, and the circuit board 13. The liquid ejection head 1 may be a four-row integrated structure head that includes two sets of head bodies 11, each of which includes a pair of actuators 113.

The head body 11 ejects liquid. As shown in Figs. 1 to 3, the head body 11 includes a base plate 111, a frame member 112, an actuator 113, and an orifice plate 114. The head body 11 also includes a common liquid chamber 116. In this embodiment, an example in which one head body 11 has a pair of actuators 113 will be described.

The head body 11 has a partition wall 118 that divides a part of the common liquid chamber 116. The head body 11 also has a plurality of electrodes 119 on the base plate 111 and the actuator 113 that respectively drive a plurality of first pressure chambers 1131 and a plurality of second pressure chambers 1132 of the actuator 113.

The base plate 111 is formed, for example, from a ceramic material in the shape of a rectangular plate. The base plate 111 is formed, for example, in the shape of a rectangle that is long in one direction. The base plate 111 has one or more supply holes 1111 and one or more discharge holes 1112. A pair of actuators 113 are provided on the base plate 111, and a wiring pattern for driving the actuators 113 is formed. The supply holes 1111 and the discharge holes 1112 are through holes that penetrate between both main surfaces of the base plate 111.

The supply hole 1111 is provided, for example, in a single position in the common liquid chamber 116 facing a first common liquid chamber 1161 (described later). The supply hole 1111 is, for example, an elongated hole that is long in one direction along the longitudinal direction of the first common liquid chamber 1161.

The discharge holes 1112 are provided, for example, at positions facing two third common liquid chambers 1163 (described later) of the common liquid chamber 116. Also, for example, the discharge holes 1112 are provided in the base plate 111 adjacent to the secondary sides of the multiple second pressure chambers 1132.

The frame member 112 is fixed to one main surface of the base plate 111 with an adhesive or the like. The frame member 112 surrounds the supply hole 1111, the multiple discharge holes 1112, and the actuator 113 provided in the base plate 111.

For example, the frame member 112 is formed in a rectangular frame shape, forming a long opening in one direction along the longitudinal direction of the frame member 112. The actuator 113, the supply hole 1111, and two discharge holes 1112 are arranged in the opening of the frame member 112.

The pair of actuators 113 are bonded to the mounting surface of the base plate 111. The pair of actuators 113 are arranged in two rows on the base plate 111 with the supply hole 1111 between them. The actuators 113 are formed in a plate shape that is long in one direction. The actuators 113 are placed in the opening of the frame member 112 and bonded to the main surface of the base plate 111. As a specific example, the actuators 113 are formed by bonding two rectangular plates of piezoelectric material that are long in one direction facing each other so that their polarization directions are opposite to each other. Here, the piezoelectric material is, for example, PZT (lead zirconate titanate). The actuators 113 are bonded to the mounting surface of the base plate 111 by, for example, a thermosetting epoxy adhesive.

The actuator 113 has, for example, a plurality of first pressure chambers 1131 arranged at equal intervals in the longitudinal direction at the center side in the longitudinal direction, and a plurality of second pressure chambers 1132 arranged at equal intervals in the longitudinal direction at both ends in the longitudinal direction. Note that the actuator 113 may also have a configuration having a plurality of air chambers arranged at equal intervals in the longitudinal direction, between adjacent first pressure chambers 1131, and alternately arranged with the plurality of first pressure chambers 1131.

The actuator 113 has a plurality of grooves formed in the longitudinal direction of the actuator 113 on the main surface side opposite the base plate 111 side, and these grooves form a first pressure chamber 1131 and a second pressure chamber 1132. In other words, the actuator 113 has a plurality of walls arranged at equal intervals in the longitudinal direction, which form grooves between them. The walls are piezoelectric bodies 1133 which form a plurality of first pressure chambers 1131 and a plurality of second pressure chambers 1132 between adjacent walls, and which change the volumes of the first pressure chambers 1131 and the second pressure chambers 1132 when a drive voltage is applied.

The surface of the actuator 113 opposite the base plate 111 is bonded to the orifice plate 114. The actuator 113 also has a wiring pattern formed thereon that forms part of a plurality of electrodes 119 for driving the first pressure chamber 1131 and the second pressure chamber 1132.

For example, the width of the actuator 113 in the short side direction gradually increases from the top side toward the base plate 111 side. The cross-sectional shape of the actuator 113 in the direction perpendicular to the longitudinal direction (short side direction) is formed into a trapezoid shape. That is, the side portion of the actuator 113 in the short side direction is inclined. The side portion of the actuator 113 has an area in which a plurality of first pressure chambers 1131 are provided facing the first common liquid chamber 1161 and the second common liquid chamber 1162, and an area in which a plurality of second pressure chambers 1132 are provided facing the second common liquid chamber 1162 and the third common liquid chamber 1163.

As a specific example, the actuator 113 is formed of a laminated piezoelectric member in which two rectangular piezoelectric plates long in one direction are bonded to face each other so that the polarization directions of the two are opposite to each other. Here, the piezoelectric material is, for example, PZT (lead zirconate titanate). The actuator 113 is bonded to the mounting surface of the base plate 111 by, for example, a thermosetting epoxy adhesive. Then, the actuator 113 has an inclined surface (inclined portion) formed by, for example, cutting processing. In addition, the surfaces of the base plate 111 and the actuator 113 on which the multiple electrodes 119 are patterned are polished by, for example, polishing processing to form a polished surface. In addition, the actuator 113 has a plurality of grooves that form a plurality of first pressure chambers 1131 and a plurality of second pressure chambers 1132 formed by, for example, cutting processing, and a piezoelectric body (drive element) 1133 that is a side wall that separates the adjacent grooves is formed.

The first pressure chamber 1131 is a pressure chamber for ejecting ink from the ejection port 1141 during operations such as printing by the liquid ejection head 1. The second pressure chamber 1132 is a pressure chamber for ejecting ink from the ejection port 1141 during maintenance. Note that in this embodiment, an example in which the actuator 113 has a plurality of first pressure chambers 1131 and a plurality of second pressure chambers 1132 has been described, but for example, the actuator 113 may not have a second pressure chamber 1132, or may have an air chamber arranged alternately with the plurality of first pressure chambers 1131.

The orifice plate 114 is formed in a plate shape. The orifice plate 114 is fixed to the main surface of the frame member 112 opposite the base plate 111 with an adhesive or the like. The orifice plate 114 has a plurality of discharge ports 1141 formed at positions facing the plurality of first pressure chambers 1131 and the plurality of second pressure chambers 1132. In this embodiment, the orifice plate 114 has two discharge port rows 1142 in which the plurality of discharge ports 1141 are aligned in one direction.

The multiple ejection ports 1141 include, for example, multiple first ejection ports 11411 facing the multiple first pressure chambers 1131, and multiple second ejection ports 11412 facing the multiple second pressure chambers 1132. The multiple first ejection ports 11411 are holes that eject ink when the liquid ejection head 1 performs an operation such as printing. The multiple second ejection ports 11412 are, for example, purge holes that eject ink to perform purging during maintenance.

The common liquid chamber 116 communicates between the supply hole 1111 and the primary side of the multiple first pressure chambers 1131 of the actuator 113. The common liquid chamber 116 also communicates between the secondary side of the multiple first pressure chambers 1131 of the actuator 113 and the discharge hole 1112, for example, via multiple second pressure chambers 1132.

As a specific example, the common liquid chamber 116 has a first common liquid chamber 1161 that communicates with the supply hole 1111 and the primary side of the multiple first pressure chambers 1131 of the actuator 113, a second common liquid chamber 1162 that communicates with the secondary side of the multiple first pressure chambers 1131 of the actuator 113 and the primary side of the multiple second pressure chambers 1132, and two third common liquid chambers 1163 that communicate with the secondary sides of the multiple second pressure chambers 1132 and the discharge hole 1112.

The primary side of the multiple first pressure chambers 1131 is the upstream side of the multiple first pressure chambers 1131 in the direction of liquid flow. The secondary side of the multiple first pressure chambers 1131 is the downstream side of the multiple first pressure chambers 1131 in the direction of liquid flow. The primary side of the multiple second pressure chambers 1132 is the upstream side of the multiple second pressure chambers 1132 in the direction of liquid flow. The secondary side of the multiple second pressure chambers 1132 is the downstream side of the multiple second pressure chambers 1132 in the direction of liquid flow.

The first common liquid chamber 1161 is formed between the center sides of the pair of actuators 113, excluding both ends. The first common liquid chamber 1161 forms an ink flow path from the supply hole 1111 to the primary side openings of the multiple first pressure chambers 1131 of each actuator 113.

The second common liquid chamber 1162 is formed between each actuator 113 and the frame member 112. The second common liquid chamber 1162 forms an ink flow path from the secondary side openings of the multiple first pressure chambers 1131 to the primary side openings of the multiple second pressure chambers 1132.

The third common liquid chamber 1163 is formed, for example, between one actuator 113 and separated from the first common liquid chamber 1161 by a partition wall 118. The third common liquid chamber 1163 is formed between both ends of a pair of actuators 113. The third common liquid chamber 1163 forms an ink flow path from the secondary side openings of the multiple second pressure chambers 1132 of each actuator 113 to the discharge hole 1112.

As shown in FIG. 2, the partition wall 118 is formed of a photosensitive resin material. The partition wall 118 divides the area of the common liquid chamber 116 between the pair of actuators 113 into a first common liquid chamber 1161, which is an area in which a plurality of first pressure chambers 1131 are formed, and a third common liquid chamber 1163, which is an area in which a plurality of second pressure chambers 1132 are formed.

The electrodes 119 apply a driving voltage to the piezoelectric bodies 1133 individually. The electrodes 119 individually deform the pressure chambers 1131, 1132. The electrodes 119 are formed by a wiring pattern formed on the base plate 111 and a wiring pattern formed on the actuator 113.

For example, the manifold unit 12 is connected to an ink supply pipe and an ink discharge pipe. The manifold unit 12 forms a liquid supply flow path that connects the supply hole 1111 of the base plate 111 to the ink supply pipe, and a liquid discharge flow path that connects the discharge hole 1112 of the base plate 111 to the ink discharge pipe.

When the liquid ejection head 1 is connected to the temperature control device 2116 provided in the liquid ejection device 2, the manifold unit 12 is connected to a temperature control water supply pipe and a temperature control water discharge pipe, which are pipes for temperature control water. The manifold unit 12 then connects the temperature control water supply pipe and the temperature control water discharge pipe to form a temperature control flow path through which the temperature control water flows.

The circuit board 13 includes a wiring film 131, one end of which is connected to a plurality of electrodes 119 of the base plate 111, a driver IC 132 mounted on the wiring film 131, and a printed wiring board 133 mounted on the other end of the wiring film 131.

The circuit board 13 drives the actuator 113 by applying a drive voltage to the wiring pattern of the actuator 113 via the driver IC 132, thereby increasing or decreasing the volume of the pressure chamber 1131 and ejecting droplets from the ejection port 1141.

The wiring film 131 is connected to the multiple electrodes 119. For example, the wiring film 131 is an ACF (anisotropic conductive film) that is fixed to the connection portion of the base plate 111 by thermocompression bonding or the like. For example, multiple wiring films 131 are provided for one head body 11. In this embodiment, two wiring films 131 are connected to one actuator 113. The wiring film 131 is, for example, a COF (chip on film) on which a driver IC 132 is mounted.

The driver IC 132 is connected to the multiple electrodes 119 via the wiring film 131. The driver IC 132 may be connected to the multiple electrodes 119 by other means such as ACP (anisotropic conductive paste), NCF (non-conductive film), and NCP (non-conductive paste) instead of the wiring film 131.

The printed wiring board 133 is a PWA (Printing Wiring Assembly) on which various electronic components and connectors are mounted.

Next, an example of a method for manufacturing the partition wall 118 formed in the head body 11 of the liquid ejection head 1 will be described with reference to FIG. 4. First, a photosensitive resin material 1181 is applied on the base plate 111 and between a pair of actuators 113 provided on the base plate 111 (ACT 1). At this time, the actuator 113 may have a plurality of grooves formed therein that form a plurality of first pressure chambers 1131 and a plurality of second pressure chambers 1132, or may be before the formation of the plurality of grooves. In addition, the region to which the photosensitive resin material 1181 is applied is, for example, the region in which the partition wall 118 is formed, but may be configured to be provided in the entire region between the pair of actuators 113. In addition, for example, when an air chamber is provided in the actuator 113, the photosensitive resin material 1181 may also be provided in the plurality of grooves in order to simultaneously form walls that form the air chamber.

Next, a mask 51 is placed on the actuator 113 (ACT 2). Here, the mask 51 has an opening 511 in a portion facing the region where the partition wall 118 is to be formed, the opening 511 having the same shape as the surface shape of the partition wall 118 on the opposite side from the base plate 111. The mask 51 is placed on the actuator 113 via a release film 52 for releasing the mask 51 from the actuator 113. For example, the release film is made of a material that can transmit light that hardens the photosensitive resin material 1181. If an air chamber is to be formed at the same time, an opening is formed in the mask 51 in a portion facing the wall formed in the groove that forms the air chamber.

Next, for example, ultraviolet light (UV) is irradiated from above the mask 51 as light for hardening the photosensitive resin material 1181 (ACT 3). As a result, the photosensitive resin material 1181 in the area where the partition wall 118 is to be formed is hardened by the light.

Next, the remaining photosensitive resin is removed with a developer (ACT 4). As a result, the partition wall 118 is formed between the pair of actuators 113. When the partition wall 118 is formed using the photosensitive resin material 1181 in this manner, the hardened portion depends on the mask 51, so it is possible to form a fine flow path depending on the shape of the mask 51. That is, since the resin material forming the partition wall 118 does not need to be hardened at high temperatures as a thermosetting resin material, deterioration of accuracy due to thermal deformation can be reduced. Furthermore, by forming the partition wall 118 using this manufacturing method, it is possible to form a fine partition wall 118 with high accuracy at a low temperature. After forming the partition wall 118, for example, the upper surfaces of the actuator 113 and the partition wall 118 are polished. Then, the frame member 112 is bonded to the base plate 111, and the orifice plate 114 is bonded to the frame member 112, the actuator 113, and the partition wall 118.

The liquid ejection head 1 configured in this manner is provided in an inkjet recording device, which is an example of the liquid ejection device 2 shown in FIG. 5. Hereinafter, the liquid ejection device 2 will be described as an inkjet recording device 2. The liquid ejection head 1 is connected to a supply tank 2132, which serves as a liquid storage unit, provided in the inkjet recording device 2. The liquid ejection head 1 is either a circulation type head that circulates ink between the supply tank 2132 and the liquid ejection head 1, or a non-circulation type head that receives ink from the supply tank 2132 and discharges ink to a maintenance device 2117 during maintenance. The liquid ejection head 1 is arranged in a position in which the ejection port 1141 of the orifice plate 114 of the head body 11 faces downward.

The inkjet recording device 2 having the liquid ejection head 1 will be described below with reference to FIG. 5. The inkjet recording device 2 includes a housing 2111, a medium supply unit 2112, an image forming unit 2113, a medium ejection unit 2114, a conveying device 2115 which is a support device, a temperature adjustment device 2116, a maintenance device 2117, and a control unit 2118.

The inkjet recording device 2 is an inkjet printer that performs an image forming process on a recording medium, such as a paper P, by ejecting a liquid such as ink while transporting the recording medium, such as a paper P, along a predetermined transport path 2001 that runs from a medium supply unit 2112 through an image forming unit 2113 to a medium ejection unit 2114.

The medium supply unit 2112 includes a plurality of paper feed cassettes 21121. The image forming unit 2113 includes a support unit 2120 that supports paper, and a plurality of head units 2130 that are arranged above and facing the support unit 2120. The medium discharge unit 2114 includes a paper discharge tray 21141.

The support section 2120 includes a conveyor belt 21201 that is looped in a predetermined area where image formation is performed, a support plate 21202 that supports the conveyor belt 21201 from the back side, and a number of belt rollers 21203 that are provided on the back side of the conveyor belt 21201.

The head unit 2130 includes liquid ejection heads 1 which are multiple inkjet heads, multiple supply tanks 2132 as liquid tanks mounted on each liquid ejection head 1, a pump 2134 which supplies ink, and a connection flow path 2135 which connects the liquid ejection heads 1 and the supply tanks 2132.

In this embodiment, the liquid ejection heads 1 are four colors, cyan, magenta, yellow, and black, and four supply tanks 2132 that respectively contain ink of each color. The supply tanks 2132 are connected to the liquid ejection heads 1 by connection flow paths 2135.

The pump 2134 is a liquid delivery pump, for example, a piezoelectric pump. The pump 2134 is connected to the control unit 2118 and is driven and controlled by the control unit 2118.

The connection flow path 2135 has a supply flow path that is connected to the ink supply pipe of the liquid ejection head 1. The connection flow path 2135 also has a recovery flow path that is connected to the ink discharge pipe of the liquid ejection head 1. For example, since the liquid ejection head 1 is of a non-circulation type, the recovery circuit is connected to the maintenance device 2117. Note that, for example, if the liquid ejection head 1 is of a circulation type, the recovery flow path is connected to the supply tank 2132.

The transport device 2115 transports paper P along a transport path 2001 that runs from the paper feed cassette 21121 of the medium supply unit 2112 through the image forming unit 2113 to the paper output tray 21141 of the medium output unit 2114. The transport device 2115 includes multiple guide plate pairs 21211-21218 and multiple transport rollers 21221-21228 that are arranged along the transport path 2001. The transport device 2115 supports the paper P so that it can move relative to the liquid ejection head 1.

The temperature adjustment device 2116 has a temperature adjustment water tank 21161, a temperature adjustment circuit 21162 such as piping and tubes that supply the temperature adjustment water, a pump that supplies the temperature adjustment water, and a temperature adjustment device that adjusts the temperature of the temperature adjustment water. The temperature adjustment device 2116 supplies the temperature adjustment water in the temperature adjustment water tank 21161, which has been adjusted to a predetermined temperature by the temperature adjustment device, to the temperature adjustment water supply pipe of the liquid ejection head 1 via the temperature adjustment circuit 21162 by pumping water. The temperature adjustment device 2116 also collects water discharged from the temperature adjustment water discharge pipe through the manifold unit 12 into the temperature adjustment water tank 21161 via the temperature adjustment circuit 21162. The temperature adjustment device is, for example, a heater or a cooler. The temperature adjustment device 2116 may also be configured to adjust the temperature of the ink supplied to the liquid ejection head 1.

The maintenance device 2117, for example, sucks and recovers ink remaining on the outer surface of the orifice plate 114 during maintenance. Also, if the liquid ejection head 1 is of a non-circulating type, the maintenance device 2117 recovers ink in the head body 11 from the second ejection port 11412 that faces the second pressure chamber 1132 during maintenance. Such a maintenance device 2117 has, for example, a tray or tank for storing the recovered ink.

The control unit 2118 includes a CPU 21181 as an example of a processor, a memory such as a ROM (Read Only Memory) for storing various programs, and a RAM (Random Access Memory) for temporarily storing various variable data and image data, and an interface unit for inputting data from the outside and outputting data to the outside.

Next, we will explain the flow of ink in the head body 11 of the liquid ejection head 1 configured in this manner. First, the ink moves from the supply hole 1111 of the base plate 111 to the first common liquid chamber 1161.

The ink that has moved to the first common liquid chamber 1161 moves to the second common liquid chamber 1162 through the multiple first pressure chambers 1131, as shown by the arrows in FIG. 2. When the first pressure chamber 1131 is driven, the ink in the driven first pressure chamber 1131 is ejected from the first ejection port 11411. The ink that is not ejected from the first ejection port 11411 moves to the second common liquid chamber 1162.

In this embodiment, since the liquid ejection head 1 is of a non-circulating type, the ink in the second common liquid chamber 1162 moves to the third common liquid chamber 1163 via the multiple second pressure chambers 1132 and remains in the third common liquid chamber 1163. When the secondary side of the ink discharge tube is opened during maintenance, ink filling, etc., the ink in the second common liquid chamber 1162 is discharged from the discharge hole 1112 of the base plate 111 through the discharge flow path of the manifold unit 12.

In addition, when the second pressure chamber 1132 is driven during maintenance or ink refilling, the ink in the second pressure chamber 1132 is ejected from the second outlet 11412 together with air that has accumulated in the second common liquid chamber 1162 and the third common liquid chamber 1163, for example.

The liquid ejection head 1 and the liquid ejection device 2 using the liquid ejection head 1 configured in this manner have a partition wall 118 between the pair of actuators 113 that separates the first common liquid chamber 1161 and the third common liquid chamber 1163. As a result, the third common liquid chamber 1163 becomes a chamber separated from the first common liquid chamber 1161, and it is possible to provide a discharge hole 1112 in the region of the base plate 111 where the third common liquid chamber 1163 is provided. In other words, the supply hole 1111 and the discharge hole 1112 provided between the pair of actuators 113 are fluidically separated. Therefore, the liquid ejection head 1 does not need to provide a discharge hole 1112 in the second common liquid chamber 1162.

The liquid ejection head 1 is configured such that no discharge hole 1112 is arranged in the region (second common liquid chamber 1162) where the multiple electrodes 119 are provided, and therefore it is possible to prevent the wiring pitch of the multiple electrodes 119 formed on the base plate 111 in the second common liquid chamber 1162 from becoming narrow. In addition, by providing the discharge hole 1112 between the pair of actuators 113, the second common liquid chamber 1162 between the actuators 113 and the frame member 112 can be made smaller in width than the width in which the discharge hole 1112 can be provided. In other words, the liquid ejection head 1 can make the width of the second common liquid chamber 1162 in the short direction of the actuator 113 smaller than when the discharge hole 1112 is provided in the second common liquid chamber 1162.

As a result, the width of the liquid ejection head 1 in the arrangement direction of the pair of actuators 113 (the short side direction of the actuators 113) can be reduced. In other words, the width of the liquid ejection head 1 in the short side direction can be prevented from becoming large.

In addition, by forming the partition wall 118 provided on the head body 11 from the photosensitive resin material 1181, the partition wall 118 can be formed at a low temperature, so the partition wall 118 is not affected by heat. Therefore, the liquid ejection head 1 can form the partition wall 118 with high precision.

With the liquid ejection head 1 and liquid ejection device 2 configured in this manner, the partition wall 118 separates the pair of actuators 113, and the supply holes 1111 and discharge holes 1112 are provided, which prevents the wiring pitch from becoming narrower and prevents the width of the liquid ejection head 1 from becoming larger.

Note that the embodiment of the present invention is not limited to the above-mentioned configuration. For example, in the above-mentioned example, the head body 11 is of a non-circulating type, but it may be of a circulating type. Also, in the above-mentioned example, the ink (liquid) in the head body 11 flows from the second common liquid chamber 1162 through the second pressure chamber 1132 to the third common liquid chamber 1163, but this is not limiting. In other words, as long as the second common liquid chamber 1162 and the third common liquid chamber 1163 are connected to each other, the configuration may not have the second pressure chamber 1132.

For example, in the case of an actuator 113 that does not have a second pressure chamber 1132, the actuator 113 may be configured to have a groove or the like that connects the second common liquid chamber 1162 and the third common liquid chamber 1163. In addition, for example, a gap may be provided between the longitudinal end of the actuator 113 and the frame member 112, and this gap may be configured to connect the second common liquid chamber 1162 and the third common liquid chamber 1163.

In the above embodiment, the liquid ejection head 1 and the liquid ejection device 2 are used in a recording device that ejects ink as a liquid, but the present invention is not limited to this. In other words, the liquid ejection head 1 and the liquid ejection device 2 can also be used in, for example, 3D printers, industrial manufacturing machines, and medical applications.

According to at least one of the embodiments described above, the liquid ejection head and the liquid ejection device can prevent the wiring pitch from becoming narrower and prevent the width of the liquid ejection head from becoming larger.

Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the gist of the invention. These embodiments and their modifications are included in the scope and gist of the invention, and are included in the scope of the invention and its equivalents described in the claims.

1...Liquid ejection head, 2...Liquid ejection device (inkjet recording device), 11...Head body, 12...Manifold unit, 13...Circuit board, 51...Mask, 52...Release film, 111...Base plate, 112...Frame member, 113...Actuator, 114...Orifice plate, 116...Common liquid chamber, 118...Partition wall, 119...Electrode, 131...Wiring film, 132...Driver IC, 133...Printed wiring board, 511...Opening, 1111...Supply hole, 1112...Discharge hole, 1131...First pressure chamber, 1132...Second pressure chamber, 1133...Piezoelectric body (drive element), 1141...Ejection port, 1142...Ejection port array, 1161...First common liquid chamber, 1162...Second common liquid chamber, 1163...Third common liquid chamber, 1181... Photosensitive resin material, 2001...transport path, 2111...housing, 2112...medium supply section, 2113...image forming section, 2114...medium discharge section, 2115...transport device, 2116...temperature control device, 2117...maintenance device, 2118...control section, 2120...support section, 2130...head unit, 2132...supply tank, 2134...pump, 2135...connection flow path, 11 411...first outlet, 11412...second outlet, 21121...paper feed cassette, 21141...paper output tray, 21161...temperature control water tank, 21162...temperature control circuit, 21201...conveyor belt, 21202...support plate, 21203...belt roller, 21211-21218...guide plate pair, 21221-21228...conveyor roller, P...paper.

Claims (5)

an actuator having a plurality of pressure chambers arranged in one direction;
a base plate on which the actuator is provided;
an orifice plate having a plurality of ejection ports facing the plurality of pressure chambers;
a common liquid chamber formed adjacent to the actuator;
a supply hole formed in the base plate and disposed in the common liquid chamber;
A drain hole formed in the base plate and disposed in the common liquid chamber;
a partition wall that divides the common liquid chamber between the supply hole and the discharge hole;
A liquid ejection head comprising: The liquid ejection head according to claim 1, wherein the partition wall is formed of a photosensitive resin material. the common liquid chamber includes a first common liquid chamber provided on a primary side of the plurality of pressure chambers, and a second common liquid chamber provided on a secondary side of the plurality of pressure chambers,
the supply hole and the discharge hole are provided in the first common liquid chamber,
The liquid ejection head according to claim 1 , wherein the partition wall separates the first common liquid chamber. The liquid ejection head according to claim 3, wherein the actuator has a flow path that connects the second common liquid chamber to a part of the first common liquid chamber in which the discharge hole is provided and which is separated by the partition wall. The outlet includes a first outlet and a second outlet,
the pressure chamber is a first pressure chamber,
the flow passages are a plurality of second pressure chambers,
The liquid ejection head according to claim 4 , wherein the orifice plate has the first ejection port facing the first pressure chamber, and the second ejection port facing the second pressure chamber.