JP7707007B2 - Liquid ejection head - Google Patents

Description

An embodiment of the present invention relates to a liquid ejection head.

A share-mode inkjet head is known as a conventional liquid ejection head. An inkjet head is provided with an actuator having multiple grooves that form pressure chambers on a substrate that has a supply port for supplying ink.

In this type of inkjet head, a driving voltage is applied to individual electrodes formed on the substrate and on the side of the groove that forms the pressure chamber, causing shear deformation of any pressure chamber, and ejecting ink from the nozzle.

In recent years, the increasing density of actuators and individual electrodes has resulted in increased power consumption and significant limitations in generating electrical signals to the individual electrodes. As a countermeasure, it is known to bundle some of the electrodes into a single common electrode.

However, there is a drawback in that the charging and discharging of the piezoelectric body causes an instantaneous current to flow through the common electrode, and the voltage drop caused by the resistance of the common electrode causes the drive voltage applied to the actuator to slow down. In particular, when all the actuators in an inkjet head are driven, the current flowing into the common electrode is large, and the slowdown in the drive voltage is noticeable.

JP 2015-16648 A JP 2019-171750 A

The problem that this invention aims to solve is to provide a liquid ejection head that can reduce the degradation of the drive voltage applied to the actuator even when a common electrode is provided.

The liquid ejection head of the embodiment includes a substrate, an actuator, a nozzle plate, a plurality of individual electrodes, a single or multiple common electrodes, a common liquid chamber, and a single or multiple conductive filters. The substrate has a single or multiple supply ports for supplying liquid. The actuator is disposed on the substrate, has a plurality of pressure chambers arranged in a line in one direction, and has a plurality of piezoelectric bodies for driving the plurality of pressure chambers. The nozzle plate has a plurality of nozzles facing the plurality of pressure chambers. The plurality of individual electrodes are formed on the substrate and the actuator, and apply a drive voltage to each of the piezoelectric bodies. The common electrode is formed on the substrate and the actuator, and applies a drive voltage to all of the plurality of piezoelectric bodies. The common liquid chamber has the supply ports disposed therein, and supplies the liquid to the plurality of pressure chambers. The filter is provided in the common liquid chamber, and is conductive with the common electrode.

FIG. 1 is a perspective view showing a configuration of a liquid ejection head according to a first embodiment. FIG. 2 is a plan view showing the configuration of a head body of the liquid ejection head according to the first embodiment. FIG. 2 is a cross-sectional view showing the configuration of a head main body according to the first embodiment. FIG. 4 is an explanatory diagram showing an example of damping of a driving voltage applied to a head main body. FIG. 1 is an explanatory diagram illustrating a configuration of a liquid ejection apparatus according to a first embodiment. FIG. 11 is a plan view showing the configuration of a head main body according to a second embodiment. FIG. 11 is a cross-sectional view showing the configuration of a head main body according to a second embodiment. FIG. 13 is a plan view showing the configuration of a head main body according to a third embodiment. FIG. 13 is a plan view showing the configuration of a head main body according to a fourth embodiment. FIG. 13 is a plan view showing the configuration of a head main body according to a fifth embodiment.

The liquid ejection head 1 according to the first embodiment and the liquid ejection device 2 using the liquid ejection head 1 will be described below with reference to Figs. 1 to 5. Fig. 1 is a perspective view showing the configuration of the liquid ejection head 1 according to the first embodiment, Fig. 2 is a plan view showing the configuration of the head body 11 of the liquid ejection head 1, and Fig. 3 is a cross-sectional view showing the configuration of the head body 11. Fig. 4 is an explanatory diagram showing an example of the dulling of the driving voltage applied to the head body 11. Fig. 5 is an explanatory diagram showing the configuration of the liquid ejection device 2. Note that in each figure, the configuration is enlarged, reduced, or omitted as appropriate for the purpose of explanation.

The liquid ejection head 1 is a share mode inkjet head provided in a liquid ejection device 2, such as the inkjet recording device shown in FIG. 5. The liquid ejection head 1 is provided in a head unit 2130 including a supply tank 2132 as a liquid storage section provided in the liquid ejection device 2.

The liquid ejection head 1 is supplied with ink as liquid stored in the supply tank 2132. The liquid ejection head 1 may be a non-circulation type head that does not circulate ink, or a circulation type head that circulates ink. In this embodiment, the liquid ejection head 1 will be described using an example of a non-circulation type head. The liquid ejection head 1 may also be connected to a temperature control device provided in the liquid ejection device 2, and may be configured to be supplied with temperature control liquid (temperature control water) that controls the temperature of the ink.

As shown in FIG. 1, the liquid ejection head 1 includes a head body 11, a manifold unit 12, and a circuit board 13. The liquid ejection head 1 may also include a cover that houses a portion of the head body 11, the manifold unit 12, and the circuit board 13.

As shown in Figures 1 to 3, the head body 11 includes a substrate 111, a frame 112, an actuator 113 having a plurality of pressure chambers 1131 and a plurality of air chambers 1132, and a nozzle plate 114.

The head body 11 has a first common liquid chamber 116 that communicates with the primary side openings (the inlets of the pressure chambers 1131) of the multiple pressure chambers 1131 of the actuator 113, and a second common liquid chamber 117 that communicates with the secondary side openings (the outlets of the pressure chambers 1131) of the multiple pressure chambers 1131 of the actuator 113. The primary side of the multiple pressure chambers 1131 is the upstream side of the multiple pressure chambers 1131 in the direction of liquid flow. The secondary side of the multiple pressure chambers 1131 is the downstream side of the multiple pressure chambers 1131 in the direction of liquid flow.

The head body 11 also has a plurality of individual electrodes 118 on the substrate 111 and the actuator 113 that respectively drive the plurality of pressure chambers 1131 of the actuator 113, and one or more common electrodes 119 that simultaneously drive the plurality of pressure chambers 1131. The head body 11 has a filter 120 that prevents foreign matter from entering the pressure chambers 1131 of the actuator 113.

In this embodiment, an example will be described in which the head body 11 has two actuators 113, one first common liquid chamber 116, and two second common liquid chambers 117. The head body 11 may also be configured to have a third common liquid chamber separated from the first common liquid chamber 116 by a partition wall.

The substrate 111 is formed, for example, in the shape of a rectangular plate from a ceramic material. The substrate 111 is formed, for example, in the shape of a rectangle that is long in one direction. A wiring pattern that becomes part of the multiple individual electrodes 118 and a wiring pattern that becomes part of one or more common electrodes 119 are formed on the substrate 111. A pair of actuators 113 are provided on the substrate 111. The substrate 111 has one or more supply ports 1111 and one or more discharge ports 1112. The supply port 1111 and the discharge port 1112 are through holes that penetrate between both main surfaces of the substrate 111.

The supply port 1111 is an inlet for supplying ink to the first common liquid chamber 116. For example, a single supply port 1111 is provided at a position facing the first common liquid chamber 116. The supply port 1111 is, for example, a long hole that is long in one direction along the longitudinal direction of the actuator 113 and the longitudinal direction of the first common liquid chamber 116.

The discharge ports 1112 are outlets for discharging ink from the second common liquid chamber 117. For example, multiple discharge ports 1112 are provided at positions facing each second common liquid chamber 117, and in the example of FIG. 2, three discharge ports 1112 are provided in each second common liquid chamber 117. For example, the three discharge ports 1112 are arranged at both ends and the center in the longitudinal direction of the second common liquid chamber 117.

The frame 112 is fixed to one main surface of the substrate 111 with an adhesive or the like. The frame 112 surrounds the supply port 1111, the multiple discharge ports 1112, and the actuator 113 provided in the substrate 111.

For example, the frame 112 is formed in a rectangular frame shape, forming a long opening in one direction along the longitudinal direction of the frame 112. The actuator 113, the supply port 1111, and two discharge ports 1112 are arranged in the opening of the frame 112.

The pair of actuators 113 are bonded to the mounting surface of the substrate 111. The pair of actuators 113 are arranged in two rows on the substrate 111 with the supply port 111 between them. The actuators 113 are formed in a plate shape that is long in one direction. The actuators 113 are disposed in an opening of the frame 112 and bonded to the main surface of the substrate 111. The actuator 113 has a plurality of pressure chambers 1131 arranged at equal intervals in the longitudinal direction at the center side, and air chambers 1132 arranged at equal intervals in the longitudinal direction and between adjacent pressure chambers 1131. In other words, the actuator 113 has a plurality of pressure chambers 1131 and air chambers 1132 arranged alternately along the longitudinal direction.

As a specific example, the actuator 113 is formed by bonding two rectangular plates of piezoelectric material that are long in one direction, facing each other so that their polarization directions are opposite to each other. Here, the piezoelectric material is, for example, PZT (lead zirconate titanate). The actuator 113 is bonded to the mounting surface of the substrate 111 by, for example, a thermosetting epoxy adhesive.

The side of the actuator 113, which is disposed opposite the first common liquid chamber 116 and the second common liquid chamber 117, is inclined with respect to the mounting surface of the substrate 111. The actuator 113 is configured so that the cross section perpendicular to the longitudinal direction is trapezoidal. The surface of the actuator 113 opposite the substrate 111 is bonded to the nozzle plate 114. The actuators 113 are arranged at equal intervals in the longitudinal direction, and multiple grooves are formed along a direction perpendicular to the longitudinal direction. The multiple grooves form multiple pressure chambers 1131 and multiple air chambers 1132. In other words, the actuator 113 has multiple piezoelectric bodies 1133 arranged at equal intervals in the longitudinal direction and constituting walls that form the grooves between them. The multiple piezoelectric bodies 1133 form multiple pressure chambers 1131 and multiple air chambers 1132 between adjacent piezoelectric bodies 1133, and the volume of the pressure chamber 1131 is changed by applying a drive voltage.

In addition, the actuator 113 is formed with a wiring pattern that is part of the multiple individual electrodes 118, and a wiring pattern that is part of one or more common electrodes 119.

When the liquid ejection head 1 performs an operation such as printing, the pressure chamber 1131 deforms to eject ink from the nozzle 1141. The pressure chamber 1131 has an inlet that opens into the first common liquid chamber 116 and an outlet that opens into the second common liquid chamber 117. Ink flows into the pressure chamber 1131 from the inlet and flows out from the outlet.

The air chamber 1132 is separated from the first common liquid chamber 116 and the second common liquid chamber 117 by having its inlet and outlet sides blocked by walls formed of a photosensitive resin or the like. The air chamber 1132 is also blocked by the nozzle plate 114. Therefore, ink does not flow into the air chamber 1132.

The nozzle plate 114 is formed in a plate shape. The nozzle plate 114 is fixed to the main surface of the frame 112 opposite the substrate 111 with an adhesive or the like. The nozzle plate 114 has a plurality of nozzles 1141 formed in positions facing the plurality of pressure chambers 1131. In this embodiment, the nozzle plate 114 has two nozzle rows 1142 in which the plurality of nozzles 1141 are aligned in one direction.

The first common liquid chamber 116 is formed between the central sides of the pair of actuators 113 excluding both ends, and constitutes an ink flow path from the supply port 1111 to the primary side openings (inlets) of the multiple pressure chambers 1131 of each actuator 113. The first common liquid chamber 116 extends along the longitudinal direction of the actuator 113.

The second common liquid chamber 117 is formed between each actuator 113 and the frame 112. The second common liquid chamber 117 forms an ink flow path from the secondary side openings (outlets) of the multiple pressure chambers 1131 to the discharge outlet 1112. The second common liquid chamber 117 extends along the longitudinal direction of the actuator 113.

The multiple individual electrodes 118 apply a driving voltage individually to the multiple piezoelectric bodies 1133, which are piezoelectric bodies. The multiple individual electrodes 118 individually deform each pressure chamber 1131. The individual electrodes 118 are formed by a wiring pattern formed on the substrate 111 and a wiring pattern formed on the actuator 113.

The common electrode 119 may be single or multiple. In this embodiment, there is one common electrode 119. The common electrode 119 applies the same drive voltage to all of the multiple piezoelectric bodies 1133. Note that applying the same drive voltage means applying the same drive waveform. The common electrode 119 simultaneously deforms the multiple pressure chambers 1131. The common electrode 119 is formed by a wiring pattern formed on the substrate 111 and a wiring pattern formed on the actuator 113. The common electrode 119 is a wiring pattern provided from the periphery of the supply port 1111 of the substrate 111 to the piezoelectric body 1133 that constitutes the piezoelectric body of the pressure chamber 1131. The common electrode 119 is connected to the circuit board 13. The common electrode 119 is also electrically connected to the filter 120.

The filter 120 is made of a conductive material and removes foreign matter contained in the ink. The filter 120 is, for example, an electroformed filter. One or more filters 120 are provided, and cover at least one of the supply port 1111 or the inlets of the multiple pressure chambers 1131. The filter 120 is also electrically conductive with at least a portion of the common electrode 119.

In this embodiment, for example, a single filter 120 is provided and covers the supply port 1111. The filter 120 is also electrically connected to a part of the common electrode 119 formed around the supply port 1111. As a specific example, the filter 120 covers the supply port 1111 and is attached to the common electrode 119 around the supply port 1111 by a conductive adhesive or fixed by soldering.

As shown in FIG. 1, the manifold unit 12 includes a manifold 121, an ink supply pipe 123, and an ink discharge pipe 124. The number and arrangement of the ink supply pipes 123 and the ink discharge pipes 124 can be set as appropriate.

As shown in FIG. 1, the manifold 121 is formed in the shape of a plate or block that is long in one direction. The manifold 121 has an ink supply flow path (liquid supply flow path) and an ink discharge flow path (liquid discharge flow path) inside. In addition, an ink supply pipe 123 and an ink discharge pipe 124 are fixed to the main surface of the manifold 121 opposite to the main surface to which the substrate 111 is fixed.

The ink supply flow path is a flow path formed in the manifold 121 by holes or grooves. The ink supply flow path fluidly connects the ink supply tube 123 and the supply port 1111 of the substrate 111.

The ink discharge flow path is a flow path formed in the manifold 121 by holes or grooves. The ink discharge flow path fluidly connects the ink discharge tube 124 and the discharge port 1112 of the substrate 111.

The circuit board 13 includes a wiring film 131, one end of which is connected to the wiring pattern of the actuator 113, a driver IC 132 mounted on the wiring film 131, and a printed wiring board 133 mounted on the other end of the wiring film 131.

The circuit board 13 drives the actuator 113 by applying a drive voltage to the wiring pattern of the actuator 113 via the driver IC 132, thereby increasing or decreasing the volume of the pressure chamber 1131 and ejecting droplets from the nozzle 1141.

For example, multiple wiring films 131 are provided. In this embodiment, two wiring films 131 are connected to one actuator 113. The wiring film 131 is, for example, a COF (Chip on Film) on which a driver IC 132 is mounted. The driver IC 132 is electrically connected to a wiring pattern formed in the pressure chamber 1131 via the wiring film 131. The printed wiring board 133 is a PWA (Printing Wiring Assembly) on which various electronic components and connectors are mounted.

The liquid ejection head 1 configured in this manner has, on the head body 11, a plurality of individual electrodes 118 capable of applying a drive voltage to each piezoelectric body 1133 individually, and a common electrode 119 capable of applying a drive voltage to all piezoelectric bodies 1133 provided in the liquid ejection head 1. The liquid ejection head 1 also has a filter 120 that covers the supply port 1111 in the first common liquid chamber 116, and this filter 120 is conductive and electrically connected to the common electrode 119. Therefore, the liquid ejection head 1 can selectively drive a plurality of pressure chambers 1131 individually or in common.

In addition, in a configuration in which multiple individual electrodes 118 and common electrodes 119 are provided, when a drive voltage is applied from the individual electrodes 118 to the piezoelectric body 1133 of the actuator 113, a current flows instantaneously to the common electrode 119 due to charging and discharging of the piezoelectric body 1133. Note that in FIG. 4, the waveform of the drive voltage applied to these individual electrodes 118 is shown by a solid line, and the voltage drop (voltage flowing to the common electrode 119) caused by the current flowing to the common electrode 119 is shown by a dashed dotted line.

In this way, when a drive voltage is applied to the actuator 113 from the individual electrode 118, if the current flows instantaneously to the common electrode 119, the drive voltage of the actuator 113 will be damped as shown by the dashed line in FIG. 4. The damping of the drive voltage of the actuator 113 varies depending on the voltage drop caused by the resistance of the common electrode 119. That is, the higher the resistance of the common electrode 119, the greater the voltage drop caused by the current flowing through the common electrode 119, and the greater the damping of the drive voltage of the actuator 113. Also, the greater the number of piezoelectric bodies 1133 of the actuator 113 to be driven, the more noticeable the damping of the drive voltage becomes.

However, the liquid ejection head 1 can reduce the resistance value of the common electrode 119 by making the filter 120 provided in the first common liquid chamber 116 conductive and conducting it to the common electrode 119. Therefore, the liquid ejection head 1 can mitigate the dulling of the drive voltage of the actuator 113 caused by providing the common electrode 119.

The inkjet recording device 2 having the liquid ejection head 1 will be described below with reference to FIG. 5. The inkjet recording device 2 includes a housing 2111, a medium supply unit 2112, an image forming unit 2113, a medium ejection unit 2114, a transport device 2115 which is a support device, a maintenance device 2117, and a control unit 2118. The inkjet recording device 2 also includes a temperature control device which adjusts the temperature of the ink supplied to the liquid ejection head 1.

The inkjet recording device 2 is an inkjet printer that performs an image forming process on a sheet of paper P by ejecting a liquid such as ink while transporting the sheet of paper P as a recording medium, which is the object of ejection, along a predetermined transport path 2001 that runs from the medium supply unit 2112 through the image forming unit 2113 to the medium ejection unit 2114.

The medium supply unit 2112 includes a plurality of paper feed cassettes 21121. The image forming unit 2113 includes a support unit 2120 that supports paper, and a plurality of head units 2130 that are arranged above and facing the support unit 2120. The medium discharge unit 2114 includes a paper discharge tray 21141.

The support section 2120 includes a conveyor belt 21201 that is looped in a predetermined area where image formation is performed, a support plate 21202 that supports the conveyor belt 21201 from the back side, and a number of belt rollers 21203 that are provided on the back side of the conveyor belt 21201.

The head unit 2130 includes liquid ejection heads 1 which are multiple inkjet heads, multiple supply tanks 2132 as liquid tanks mounted on each liquid ejection head 1, a pump 2134 which supplies ink, and a connection flow path 2135 which connects the liquid ejection heads 1 and the supply tanks 2132.

In this embodiment, the liquid ejection heads 1 are four colors, cyan, magenta, yellow, and black, and four supply tanks 2132 that respectively contain ink of each color. The supply tanks 2132 are connected to the liquid ejection heads 1 by connection flow paths 2135.

The pump 2134 is a liquid delivery pump that is composed of, for example, a piezoelectric pump. The pump 2134 is connected to the control unit 2118 and is driven and controlled by the control unit 2118.

The connection flow path 2135 has a supply flow path that is connected to the ink supply pipe 123 of the liquid ejection head 1. The connection flow path 2135 also has a recovery flow path that is connected to the ink discharge pipe 124 of the liquid ejection head 1. For example, if the liquid ejection head 1 is of a non-circulation type, the recovery circuit is connected to the maintenance device 2117, and if the liquid ejection head 1 is of a circulation type, the recovery flow path is connected to the supply tank 2132.

The transport device 2115 transports paper P along a transport path 2001 that runs from the paper feed cassette 21121 of the medium supply unit 2112 through the image forming unit 2113 to the paper output tray 21141 of the medium output unit 2114. The transport device 2115 includes multiple guide plate pairs 21211-21218 and multiple transport rollers 21221-21228 that are arranged along the transport path 2001. The transport device 2115 supports the paper P so that it can move relative to the liquid ejection head 1.

The maintenance device 2117, for example, sucks and recovers ink remaining on the outer surface of the nozzle plate 114 during maintenance. Also, if the liquid ejection head 1 is of a non-circulating type, the maintenance device 2117 recovers ink from within the head body 11 during maintenance. Such a maintenance device 2117 has a tray, tank, etc. for storing the recovered ink.

The control unit 2118 includes a CPU 21181 as an example of a processor, a ROM (Read Only Memory) for storing various programs, a RAM (Random Access Memory) for temporarily storing various variable data and image data, and an interface unit for inputting data from the outside and outputting data to the outside.

With the liquid ejection head 1 and liquid ejection device 2 configured in this manner, the conductive filter 120 is electrically connected to the common electrode 119, thereby reducing the degradation of the drive voltage of the actuator 113.

The embodiments of the present invention are not limited to the above-mentioned configurations. Several example embodiments are shown below. In the embodiments described below, the same reference numerals are used for configurations similar to those of the first embodiment described above, and detailed descriptions thereof are omitted.

For example, in the above example, the liquid ejection head 1 is configured to have a pair of actuators 113 on the head body 11, but the present invention is not limited to this. For example, as shown in the second embodiment shown in Figures 6 and 7, the liquid ejection head 1 may be configured to have a single actuator 113 on the head body 11. For example, in such a liquid ejection head, ink flows in the direction of the arrows shown in Figure 7. Also, the example of Figures 6 and 7 shows a configuration in which a single filter 120 covers the inlets of multiple pressure chambers 1131.

In the above example, the liquid ejection head 1 is a non-circulating type, but it may be a circulating type, and the actuator 113 may have a second pressure chamber for purging whose primary side opening is continuous with the second common liquid chamber 117, and a third common liquid chamber may be provided on the secondary side of this second pressure chamber.

In the above example, the liquid ejection head 1 is provided with a single filter 120, which covers a single supply port 1111, but this is not limited to the example.

For example, as in the head body 11 of the liquid ejection head 1 according to the third embodiment shown in FIG. 8, two filters 120 may be provided, and each filter 120 may cover the inlets of the multiple pressure chambers 1131 of each actuator 113 and may be electrically connected to a portion of the common electrode 119.

Also, for example, as in the head body 11 of the liquid ejection head 1 according to the fourth embodiment shown in FIG. 9, a single filter 120 may be provided over the entire first common liquid chamber 116. This filter 120 may cover the supply port 1111 and the entrances to the multiple pressure chambers 1131 of the pair of actuators 113, and may be configured to be electrically connected to the entire common electrode 119.

Also, for example, the head body 11 of the liquid ejection head 1 according to the fifth embodiment shown in FIG. 10 may have a configuration having multiple supply ports 1111. For example, the multiple supply ports 1111 are arranged at a predetermined interval in the longitudinal direction of the first common liquid chamber 116. The shape of the supply port 1111 may be a circular hole as shown in FIG. 10, or may be a rectangular hole or a long hole. Also, as shown in FIG. 10, multiple filters 120 covering the multiple supply ports 1111 may be provided, covering each supply port 1111, and each filter 120 may be configured to be conductive with a part of the common electrode 119, or a single filter 120 may be used, similar to the filter 120 described in each of the above-mentioned embodiments.

According to at least one of the embodiments described above, it is possible to provide a liquid ejection head and a liquid ejection device that can reduce the degradation of the actuator drive voltage by electrically connecting a conductive filter to a common electrode.

Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims.
The following provides a description equivalent to the invention described in the original claims of this application.
[1] A substrate having one or more supply ports for supplying a liquid;
an actuator that is disposed on the substrate, has a plurality of pressure chambers arranged in line in one direction, and has a plurality of piezoelectric bodies that drive the plurality of pressure chambers;
a nozzle plate having a plurality of nozzles facing the plurality of pressure chambers;
a plurality of individual electrodes formed on the substrate and the actuator for applying a drive voltage to each of the piezoelectric bodies;
one or more common electrodes for applying a drive voltage to all of the plurality of piezoelectric bodies;
a common liquid chamber in which the supply port is disposed and which supplies the liquid to the plurality of pressure chambers;
a liquid ejection head including: one or more conductive filters provided in the common liquid chamber and electrically connected to the common electrode;
[2] The liquid ejection head according to [1], wherein the filter covers the supply port.
[3] The liquid ejection head according to [1] or [2], wherein the filter covers the inlets of the plurality of pressure chambers.
[4] The common liquid chamber extends along a longitudinal direction of the actuator,
the supply port is single and extends along the longitudinal direction of the actuator;
The liquid ejection head according to any one of [1] to [3], wherein the filter is electrically connected to all of the common electrodes.
[5] The actuator has a plurality of air chambers arranged alternately with the plurality of pressure chambers,
the common liquid chamber includes a first common liquid chamber provided on an inlet side of the plurality of pressure chambers, and a second common liquid chamber provided on an outlet side of the plurality of pressure chambers,
the common electrode, the supply port, and the filter are provided in the first common liquid chamber,
The liquid ejection head according to any one of [1] to [4], wherein the individual electrode is provided in the second common liquid chamber.

1...Liquid ejection head (inkjet head), 2...Liquid ejection device (inkjet recording device), 11...Head body, 12...Manifold unit, 13...Circuit board, 111...Substrate, 112...Frame body, 113...Actuator, 114...Nozzle plate, 116...First common liquid chamber, 117...Second common liquid chamber, 118...Individual electrode, 119...Common electrode, 120...Filter, 121...Manifold, 123...Ink supply tube, 124...Ink discharge tube, 131...Wiring film, 132...Driver IC, 133...Printed wiring board, 1111...Supply port, 1112...Discharge port, 1131...Pressure chamber, 1132...Air chamber, 1 133...piezoelectric body, 1141...nozzle, 1142...nozzle row, 2001...transport path, 2111...housing, 2112...medium supply section, 2113...image forming section, 2114...medium discharge section, 2115...transport device, 2117...maintenance device, 2118...control section, 2120...support section, 2130...head unit, 2132...supply tank, 2134...pump, 2135...connection flow path, 21121...paper feed cassette, 21141...paper discharge tray, 21201...transport belt, 21202...support plate, 21203...belt roller, 21211-21218...guide plate pair, 21221-21228...transport roller, P...paper.

Claims (5)

a substrate having one or more supply ports for supplying a liquid;
an actuator that is disposed on the substrate, has a plurality of pressure chambers arranged in line in one direction, and has a plurality of piezoelectric bodies that drive the plurality of pressure chambers;
a nozzle plate having a plurality of nozzles facing the plurality of pressure chambers;
a plurality of individual electrodes formed on the substrate and the actuator for applying a drive voltage to each of the piezoelectric bodies;
one or more common electrodes formed on the substrate and the actuator for applying a drive voltage to all of the plurality of piezoelectric bodies;
a common liquid chamber in which the supply port is disposed and which supplies the liquid to the plurality of pressure chambers;
a liquid ejection head including: one or more conductive filters provided in the common liquid chamber and electrically connected to the common electrode; The liquid ejection head according to claim 1, wherein the filter covers the supply port. The liquid ejection head according to claim 1 or 2, wherein the filter covers the inlets of the pressure chambers. the common liquid chamber extends along a longitudinal direction of the actuator,
the supply port is single and extends along the longitudinal direction of the actuator;
The liquid ejection head according to claim 1 , wherein the filter is electrically connected to all of the common electrodes. the actuator has a plurality of air chambers arranged alternately with the plurality of pressure chambers;
the common liquid chamber includes a first common liquid chamber provided on an inlet side of the plurality of pressure chambers, and a second common liquid chamber provided on an outlet side of the plurality of pressure chambers,
the common electrode, the supply port, and the filter are provided in the first common liquid chamber,
The liquid ejection head according to claim 1 , wherein the individual electrode is provided in the second common liquid chamber.