JPS581806B2 - Separation control device for triaxial vibration table - Google Patents

Description

[Detailed description of the invention] The present invention is based on the X-axis direction added to the vibration table and the Y-axis direction perpendicular to this
The vibration force in two directions with respect to the axial force direction and the vibration force in the vertical direction are used to prevent the vibration table from performing any of the following rotational movements: rolling around the X-axis circuit, pitching around the Y-axis, and yawing around the vertical axis Z. The present invention relates to a control device for a shaking table.

A horizontal vibration force is applied to a vibration table such as a table by an X-axis vibrator and a Y-axis vibrator, and a vertical vibration force is applied by a vertical vibrator. A vibration table device that applies vibrations to a vibrating body is shown in FIG. Vibration force is applied by an axial vibrator 3b and a vertical vibrator 4, that is, a Z-axis vibrator.

In such a shaking table device, as shown in Fig. 2 A and B,
Since the excitation force is applied to the vibration table 1, the resultant force FX in the X-axis direction, the resultant force Fx in the Y-axis direction, the resultant force Fz in the Z-axis direction,
The pitching torque Fφ around the axis, the pitching torque Fθ around the Y axis, and the yawing torque FF around the Z axis are each expressed by the following equations.

However, Fxi: Axial excitation force by the i-th X-axis vibrator Fyi: Y-axis excitation force by the first Y-axis vibrator Fzi: Vertical excitation by the j-th vertical vibrator Force Therefore, when excitation is performed in the X-axis direction or Y-axis direction alone, the height difference C between the point where the excitation force acts and the center of gravity position is
, and the difference a in the horizontal direction, rolling around the X axis, pitching around the Y axis, and yawing around the Z axis occur.

When such a rotational movement occurs, each point on the vibration table 1 and the vibrated body 2 no longer undergoes translational movement.

In such a vibration table device, an independent X-axis direction vibration command signal XoC and a Y-axis direction vibration command signal Y are provided.

C and vertical excitation command ZoC, and when trying to simultaneously perform horizontal excitation in two directions of the X-axis and Y-axis and vertical excitation in the Z-axis direction, it is necessary to In order to make the total three-axis movement in the two horizontal directions of the X-axis and Y-axis and the vertical direction in the Z-axis direction follow the command signal more faithfully, the rotational movement is limited and the rotational movement is A means of control is required to reduce mutual interference between the linear motion system and the rotational motion system.

As means for this, two force methods have been proposed in the past: a rotation system feedback control method and a control method using human power signal compensation.

The former method performs feedback control of the horizontal system of the X-axis and Y-axis, the vertical system of the Z-axis, and the rotation system, and the rotation command signals for rolling, pitching, and yawing are fixed at constant values, and the rotation control is When a rotational movement in each direction such as rolling occurs, the detection means and the compensation circuit detect the deviation, and the rotational system controller generates a correction operation signal.

This signal directly becomes a control signal to the rotational force generating mechanism.

A component that differentially acts on the excitation force in the linear direction is superimposed on the excitation force in the linear direction so that a rotation control torque is generated by the control signal and rotational motion is suppressed.

This conventional rotation control method is quite effective when the excitation frequency is relatively low, but when exciting the shaking table device with an excitation command with a high frequency component, the signal transmission through the feedback route is necessary. Control accuracy deteriorates due to the inability to follow up due to the delay and secondary interference with the horizontal and vertical systems as a result of delayed rotation control.

In particular, when a large-sized shaking table device is vibrated at a fast frequency, it is impossible to expect sufficient rotational motion control effects.

Another method is to compensate for the drawbacks of the above-mentioned method.
This is a method that anticipates the rotational motion that occurs in response to the vibration commands of the axis and Y-axis and performs rotational input compensation to offset the influence.The success or failure of this method depends on the accuracy of the input signal for pitching compensation. It has the following disadvantages.

First, since this is a compensation input given from outside the feedback control system configured as a closed-loop system,
If it contains an error, the feedback control system has no means for corrective action.

Furthermore, this rotational input compensation method assumes that two characteristics are known: the response of the rotation angle to the X- and Y-axis excitation commands, and the response of the rotation angle to the X- and Y-axis excitation commands. There is.

To that end, to determine the input signal for compensation,
The response characteristics of the closed-loop system must be grasped by some method, but it is necessary to grasp the characteristics by adjusting each controller, each compensation circuit, etc. of the feedback control system.

In addition, the input signal generation device for grasping the characteristics and compensating for it becomes complicated.

The present invention provides six independent feedback control systems for the linear motion and the rotational motion by adding control means that separates the linear motion in the X-axis, Y-axis, and Z-axis directions from the rotational motion around these axes. The purpose of this is to configure a control system with functions equivalent to the X
an axial vibrator, a Y-axis vibrator that vibrates the vibration table in a horizontal direction perpendicular to the excitation direction of the X-axis vibrator, and a Y-axis vibrator that vibrates the vibration table in a vertical direction. It has a Z-axis direction vibrator that vibrates, and furthermore, the vibration table has a linear motion in the X-axis, Y-axis, and Z-axis directions, as well as the φ direction around the X-axis and the θ direction around the Y-axis.
and each detection signal for rotational movement in one direction around the Z-axis, and each vibration command signal for linear movement in the X-axis, Y-axis, and Z-axis directions, and rotational movement in the φ direction, θ direction, and Ψ direction. An X-axis direction excitation force generation mechanism, a Y-axis direction excitation force generation mechanism, and a Z-axis direction excitation force, each of which generates an operation signal for operating the above-mentioned vibration table by adding and subtracting the output signals from each adder. an X-axis direction feedback system, a Y-axis direction feedback system, and a Z-axis direction feedback system configured to transmit information to the generation mechanism, the φ direction rotational force generation mechanism, the θ direction rotational force generation mechanism, and the W direction rotational force generation mechanism, respectively; In a control device for a vibration table equipped with a φ direction feedback system, a θ direction feedback system, and a Ψ direction feedback system, control signals output from an X-axis direction adder and a θ-direction adder are input, and from these control signals, The directional excitation force generation mechanism has θ
an X-θ separation control device that provides an operation signal for canceling the disturbance signal from the direction feedback system and an operation signal for canceling the disturbance signal from the X-axis direction feedback system to the θ-direction rotational force generating mechanism; The control signals output from the X-axis direction adder and the T-direction adder are input, and from these control signals, the X-axis direction excitation force generation mechanism receives an operation signal that cancels the disturbance signal from the T-direction feedback system. The directional rotational force generation mechanism includes an X-W separation control device that provides operation signals for canceling disturbance signals from the X-axis direction feedback system, and control output from the Y-axis direction adder and the φ direction adder. From these control signals, the Y-axis direction excitation force generation mechanism receives an operation signal to cancel the disturbance signal from the φ-direction feedback system, and the φ-direction rotational force generation mechanism receives the disturbance signal from the Y-axis direction feedback system. a Y-φ separation control device that provides an operation signal to cancel the signal;
The control signals output from the axial adder and the Ψ direction adder are input, and from these control signals, the Y-axis force direction excitation force generation mechanism sends an operation signal to cancel the disturbance signal from the Ψ direction feedback system. , the Ψ-direction rotational force generation mechanism includes a Y-W separation control device that provides operation signals for canceling disturbance signals from the Y-axis force direction feedback system, and outputs from the Z-axis direction adder and the φ-direction adder. From these control signals, the Z-axis direction excitation force generation mechanism receives an operation signal that cancels the disturbance signal from the φ direction feedback system.
The force direction rotational force generation mechanism is provided with an operation signal that eliminates the disturbance signal from the Z-axis direction feedback system.
Control signals output from the separation control device, the Z-axis direction adder and the θ-direction adder are input, and from these control signals, the Z-axis direction excitation force generation mechanism receives a disturbance signal from the θ-direction feedback system. At least one of the Z and θ separation control devices that provides an operation signal to cancel the disturbance signal from the Z-axis direction feedback system to the θ-direction rotational force generation mechanism, and an operation signal to cancel the disturbance signal from the Z-axis direction feedback system, respectively. This is a separation control device for a triaxial vibration table installed between an adder and each of the generation mechanisms.

Next, an explanation will be given based on an embodiment of the present invention. A vibrating body 2 is attached to a vibration table (table) 1, and one or more vibrating bodies 2 are vibrated in the X-axis direction to vibrate the vibrating body 2 in the horizontal direction. A vibrator 3a, one or more Y-axis vibrator 3b that vibrates the vibration table 1 in a horizontal direction perpendicular to the X-axis direction, and a vibrator 3b in the Z-axis direction (vertical direction). One or more vibrating machines 4 that vibrate are connected to the vibrating table 1 .

In the illustrated embodiment, a case is shown in which vibration is applied in each of the X-axis, Y-axis, and Z-axis directions by a plurality of vibrators, but the present invention is not limited by the number of vibrators.

This type of shaking table device also supports rolling around the X-axis.
It can also be used as a swinging device for the purpose of performing at least one of rotational motions among pitching around the Y-axis and rolling around the Z-axis.

As shown in FIGS. 3 and 4, the control device for the vibration table 1 controls linear movement of the vibration table 1 in the X-axis direction, linear movement in the Y-axis direction,
Linear movement in the Z-axis direction, rotational movement around the X-axis (rotational movement in the φ direction, that is, rolling), rotational movement around the Y-axis (θ
Detection signals X of rotational movement in the W direction (that is, pitching) and rotational movement around the Z axis (rotational movement in the W direction, that is, yawing).

, Yo, Zo, φ, θ, Ψ, and each excitation command signal

Adders a1 to a6 are provided for adding and subtracting C, YoC, ZoC, φC, θC, and ΨC.

The output signals Δex, Δey, Δe2, Δeφ, Δeθ, Δeγ added and subtracted by these adders a1 to a6 are used to generate operation signals for operating the vibration table 1, respectively.
Axial excitation force generation mechanism 13, Y-axis excitation force generation mechanism 3
1, Z-axis direction excitation force generation mechanism 14, φ direction rotational force generation mechanism (rolling torque generation mechanism) 32, θ direction rotational force generation mechanism (pitching torque generation mechanism) 15, and Ψ universal rotational force generation mechanism (yawing X-axis direction feedback system, Y-axis direction feedback system, two-axis direction feedback system, φ direction feedback system, θ direction feedback,
and a Ψ direction feedback system are provided in the control device as shown in FIGS. 3 and 4.

FIG. 3 shows a control system diagram of the multi-point vibration type vibration table apparatus shown in FIGS. 1 and 2, in which the X-axis direction vibration exciter control circuit 8a
In addition to the aforementioned feedback systems having the Y-axis vibration exciter control circuit 8b and the Z-axis vibration exciter control circuit 9, a separation control means 5 is added in the present invention.

In FIG. 3, a servo amplifier 10, a servo valve 11, and an actuator (including a joint part) 12 are parts corresponding to control equipment added to each exciter shown in FIG. 1.

Output of actuator 12 FX1~Fxm+Fy1~F
ym and Fz1 to F2n indicate the excitation forces applied to the vibration table 1 by the X-axis, Y-axis, and Z-axis direction vibrators 3a, 3b, and 4, and the X, ~Xm, Y from the vibration table 1 to the actuator 12.
1-Ym and Z, ~Zn are the X-axis directions of the vibration exciter mounting part,
The displacement in the Y-axis direction and Z-axis direction is
This shows that it affects the axial excitation force, the Y-axis excitation force, and the Z-axis excitation force.

In addition, a signal line xo from the vibration table 1 to the X-axis force direction vibration exciter control circuit 8a, a signal line Yo to the xoy-axis vibration exciter control circuit 8b,
Yo, and signal lines z, M, θyOtφ, φ, Ψ, Ψ from the vibration table 1 to the Z-axis exciter control circuit 9 indicate signal lines for feedback control.

XoC, ZoC, φC, θC, and ΨC are input signals to this control system, such as an X-axis vibration command, a Y-axis vibration command, a Z-axis vibration command, a rolling rotation command, a pitching rotation command, and Indicates yawing rotation command.

Signal lines ΔeX', Δey', Δ between the separation control stage 5 and the X-axis, Y-axis and Z-axis exciter control circuit 8at8bp9
eZ', Δeθ', Δeφ', ΔeΨ', ΔeθX, Δ
eθz, ΔeXθ, Δezθ, Δezφ, Δeφz, Δ
eφy, ΔexΨtΔeyΨ, and Δeyφ are information required to perform separation control according to the present invention, and their mutual relationship is clarified in FIG.

In the vibration table apparatus shown in FIG. 1, the movement of the vibration table 1 on which the object to be vibrated 2 is attached is horizontal translation in the X- and Y-axis directions, vertical translation in the Z-axis direction, and rotation around the X-axis. Movement (rolling), rotational movement around the Y axis (pitching)
Since the rotational movement (yawing) around the Z-axis and rotational movement (yawing) can be considered separately, the control system having the configuration shown in FIG. 3 can be shown as shown in FIG. 4.

The Y-axis direction excitation force generation mechanism 13 and the Y-axis direction excitation force generation mechanism 31 in FIG. 4 are the horizontal system servo amplifier 10 in FIG.
The servo valve 11 and the actuator (including the joint part) are shown together.

The Z-axis direction excitation force generation mechanism 14 generates a resultant force F of the Z-direction excitation force.
Servo amplifier 10 contributing to generating z=ΣFzj
, the servo Vega 11 and the actuator (including the joint part) 12 are shown together.

In addition, the pitching torque generation mechanism 15 shown in the same figure operates differentially when a plurality of vertical vibrators are operated differentially with a plane passing through the center of the table and parallel to the Y-Z plane as a boundary (see AtB in Fig. 2). The control torque Fo=ΣlzjFz generated around the Y axis in
The servo amplifier 10 for the vertical vibrator, the servo valve 11, and the actuator (including the contact portion) 12 that contribute to the vertical vibration amplitude j are collectively shown.

The same applies to the yawing torque generation mechanism 33 and the rolling torque generation mechanism 32.

The vibrating table 1 shown in FIG. 4 is the same as that shown in FIG. 3, but for the sake of convenience in describing the operation, the internal structure is shown by forming a mathematical model.

When the control system is shown in the form of FIG. 4, the X-axis vibration exciter control circuit 8a in FIG. system, a Ψ direction feedback system (yawing feedback system) having a yawing motion detection means and a compensation circuit 40, and a yawing controller 43, and a Y-axis direction vibration exciter control circuit 8b has an X-axis direction translational motion detection means and a compensation circuit 43. It is divided into a Y-axis direction feedback system having a circuit 38 and a Y-axis controller 41, and a φ-direction feedback system (rolling feedback system) having a rolling motion detection means and a compensation circuit 39 and a rolling controller 42. The machine control circuit 9 includes a Z-axis feedback system having a Z-axis translational motion detection means and a compensation circuit 18 and a Z-axis controller 20, and a θ-direction feedback system having a pitching motion detection means and a compensation circuit 19 and a pitching controller 21. (pitching feedback system).

The above-mentioned components shown in FIG. 3 are included in the configuration functions of the control system of the conventional shaking table apparatus, but in the present invention, the following six are added as the separation control means 5.

The first X-θ separation control stage 6 receives output signals Δex' and Δeθ' which are output from the X-axis direction adder a5 and the θ-direction adder a4 and then passed through the X-axis direction controller 17 and the pitching controller 21. is input, and from these signals, the X-axis direction excitation force generation mechanism 13 corrects the control signal UX, and outputs an operation signal ΔexO for canceling the disturbance signal from the θ-direction feedback system to the θ-direction rotational force generation mechanism. (Pitching torque generation mechanism) 15 is provided with an operation signal Δeθx for correcting the control signal Uθ and canceling a disturbance signal from the X-axis direction feedback system.

The second X-Ψ separation control means 36 includes an X-axis direction adder a5
The output signals Δex' and ΔeΨ' which are output from the F-direction adder a6 and then passed through the X-axis direction controller 7 and the yawing controller 43 are input, and from these signals, the X-axis direction excitation force generation mechanism 13 The operation signal ΔexΨ for correcting the control signal Ux and canceling the disturbance signal from the X-axis direction feedback system is applied to the Ψ-direction rotational force generation mechanism (
The yawing torque generating mechanism) 33 is provided with an operation signal Δevx for correcting the control signal UW and canceling the disturbance signal from the Ψ direction feedback system.

The third Y-φ separation control stage 34 is a Y-axis direction adder a1
The output signals Δey' and Δeφ', which are output from the φ direction adder a2 and then passed through the Y-axis direction controller 41 and the rolling controller 42, are human-powered, and from these signals, the Y-axis direction excitation force generation mechanism 31 is , the control signal Uy is corrected, and the operation signal Δeyφ is used to cancel the disturbance signal from the Y-axis direction feedback system. This is for providing an operation signal Δeφy for canceling the disturbance signal from the direction feedback system.

The fourth Y-Ψ separation control means 37 receives the output signals Δe,' and Δev' which are outputted from the Y-axis direction adder a1 and the 10,000-direction adder a6 and then passed through the Y-axis direction controller 41 and the yawing controller 43. is input, and from these signals, the Y-axis direction excitation force generation mechanism 31 corrects the control signal Uy, and outputs an operation signal ΔeΨy for canceling the disturbance signal from the F-direction feedback system to the T-direction rotational force generation mechanism. The (yawing torque generating mechanism) 33 is provided with an operation signal ΔeΨy for correcting the control signal UW and canceling a disturbance signal from the Y-axis direction feedback system.

The fifth Z-φ separation control stage 35 receives the output signals Δe2' and Δeφ' which are outputted from the Z-axis direction adder a3 and the φ-direction adder a2 and then passed through the Z-axis direction controller 20 and the rolling controller 42. From these signals, the Z-axis direction excitation force generation mechanism 14 corrects the control signal Uz, and inputs an operation signal Δezφ for canceling the disturbance signal from the φ-direction feedback system to the φ-direction rotational force generation mechanism ( The rolling torque generating mechanism (rolling torque generating mechanism) 32 is provided with an operation signal Δeφ2 for correcting the control signal Uφ and canceling the disturbance signal from the Z-axis direction feedback system.

A sixth Z-θ separation control stage 7 receives output signals Δe2' and Δeθ' which are outputted from the Z-axis direction adder a3 and the θ-direction adder a4 and then passed through the Z-axis direction controller 20 and the pitching controller 21. is human-powered, and from these signals, the Z-axis direction excitation force generation mechanism 14 corrects the control signal Uz, and generates an operation signal Δe2θ for canceling the disturbance signal from the θ-direction feedback system. (Pitching torque generation mechanism) 15 is provided with an operation signal Δeθ2 for correcting the control signal Uθ and canceling the disturbance signal from the Z-axis direction feedback system.

Although FIG. 4 shows a case in which all of these six separation control means are provided, it is also possible to provide only at least one of them.

Conventionally proposed control methods for shaking table devices include separate control means 6, 7, 34, 35, 36, 3 within a closed loop system.
There is a method of compensating the input signals φC, θC, and FC to the feedback system outside the closed-loop system without having the input signal φC, θC, and FC.

In contrast, in the method according to the present invention, the control deviations ΔeX', Δey', Δe2', ΔeφI,
Separation control means 6, 7, 34 responsive to Δeθ′, ΔeΨ
, 35, 36, and 37 are added.

FIG. 5 is a diagram showing a specific example of the pond of the present invention, which shows the respective separation control means 6, 7, 34, 35, 36, 37.
As shown in the figures, each controller 7, 20,
This is the case where it is bonded before 21, 41, 42, and 43.

Separation control means 6, 7, 34, 35, 36, 37 of the present invention
is characterized in that it is added as a feedforward element inside a closed loop system configured as a feedback control system.

For this purpose, the control loop separation effect as a feedforward element and the effect as a feedback control system after separation will be explained based on the control device shown in FIG.

To explain the response to the output ΔeX' of the X-axis controller 41, in the control system of FIG. 4, the change in the X-axis vibration command XCoc or the X-axis displacement X in response to the XoC signal.

If there is an error, the control deviation ΔeX changes, the X-axis direction controller 17 responds, and the output Δex' of the X-axis direction controller 17 changes.

According to the change in ΔeX', the X-axis direction excitation force generation mechanism 13 operates to change the X-axis direction excitation force Fx to
Axial excitation is performed.

At the same time, disturbance torque CFX is generated around the Y axis of table 1.
Then, a disturbance torque bFx is generated around the Z-axis.

In the control system that includes the 1,000-stage X-θ rotation separation 6 and the X-47 separation means 36, Δeθ and Δefx change according to changes in ΔeX′, and these are added to the rotation control signal UθtUy to generate pitching torque. Acting on the mechanism 15 and the yawing torque generating mechanism 33, the control torques Fθ, FΨ
change.

That is, by adding the separation control stages 6 and 36, the control effect caused by the change in the output ΔeX' of the X-axis direction controller 17 can be adjusted to the X-axis direction excitation force generation mechanism 13.
In addition, it is simultaneously applied to the pitching torque generation mechanism 15 and the yawing torque generation mechanism 33, so that the output of the X-axis direction excitation force generation mechanism 13 generates a disturbance torque c against the rotational movement
Control torque Fθ suitable for acting as FxtbFx
, FF are generated by the pitching torque generation mechanism 15 and the yawing torque generation mechanism 33, and the control torque F is generated.

The disturbance torque OFx is canceled by the control torque FF, and the disturbance torque bFx is canceled by the control torque FF.

As a result, changes in the X-axis controller Δex' effectively act to control the X-axis displacement X0, but the X-axis feedback system does not affect pitching and yawing.

The output Δ for the input ΔeX' of this X-θ separation control means
The characteristics of exO include the dynamic characteristics of the equipment constituting the X-axis direction excitation force generation mechanism 13, the pitching torque generation mechanism 15, etc., the mass M of the vibration table 1, the inertia factor ■y, and the connection between the table 1 and the actuator 12. The dynamic characteristics of the system, including joint rigidity, are taken into account and determined so as to satisfy the above-mentioned separation control function.

Next, the response to the output Δex' of the Y-axis direction controller 41 will be explained. According to the change in Δey', the excitation force Fy in the Y-axis direction acts on the table 1, and the
Excitation in the axial direction is performed, but at the same time disturbance torque of CFy is generated around the X-axis of the table 1, and disturbance torque of aFy is generated around the Z-axis. , ΔeΨy changes, and the rotation signal Uφ
, Uv/- to change the rotation control torques Fφ, FF.

In the same manner as above, CFy and Fφ are canceled out, and aFy
and FF are canceled out to generate movement only in the Y-axis direction, reducing movement in the rotational direction.

The X-axis controller 17 will be explained in detail as a representative example, and the Y-axis controller 17 will be explained in detail as a representative example.
Although the axial controller 41 has been briefly explained, the action of the axial controller is exactly the same; the separation control means applies a rotational force that cancels out the disturbance torque generated when excitation is performed in one direction, and the rotational excitation is When doing so, the separation control means has the effect of applying an excitation force to the X-axis, Y-axis, or Z-axis to cancel the external force in the X-axis direction, Y-axis direction, or Z-axis direction generated by rotational excitation.

Separation control means 6, 7, 34, 35, 36, 37 of the present invention
In applying the control method of the shaking table apparatus using I'll give you the following.

In order to simplify the explanation, a method for determining the characteristics of the 1,000-stage separation control stages 7 and 6 for the Z-axis system, θ system, and X-axis system will be described below.

The block diagram of the control system of the fourth prisoner can be rewritten as shown in FIG. 6 by defining the following transfer function.

(Blocks corresponding to those in FIG. 4 are indicated by the same numbers and dashes in FIG. 6).

(1) Gx (s), G2 (s), Gθ (s); X-axis system:
Transfer functions of Z-axis system and θ-system controllers 17, 20, and 21.

(!!) HX(s), H2(s), Hθ(s); X-axis system, Z-axis system, θ-system detection means and compensation circuit 16.18,
19 transfer functions, where each input is Xo, Zo,
Let it be θ.

(i1i) DθX(s), Dxθ(s); Transfer function of the X-θ separation suppressing stage 6.

(iv) D5z(s), D26(s); Transfer function of Z-θ separation control means 7.

However, in Fig. 4, each separation control stage 6, 7 is 2
Although shown as an element with human power and two outputs, in the application shown in FIG. 6, each element is shown as two transfer functions as shown.

(V) PXX(S), Pxθ(S), Pox(S), P
9Q(S), Pθ2(s), P2θ(s), Pzz(s
); Controlled amount X from control signals UX, Uθ, U2.

, θ, forward equivalent transfer function to Zo.

Defining the above transfer function, the control system in Figure 5 becomes an X-axis system,
The conditions for separation into three independent feedback control systems, the Z-axis system and the θ system, are as follows.

Rewriting this, DoX(s)Poo(s)-P0X(s),Dxθ(s
)PXX(s)=PXθ(S),Dθz(s)Pθθ(
S) -Pθz(S),D2θ(s)Pzz(s)=P2
19(S) (2') In the control system shown in Fig. 6, the response of each controlled variable to the output ΔeX' of the X-axis system controller 17' is Xo=Pxx(s)Δex when the separation control means 6' is not added. ' θ = POx (s) Δex' (3) If the separation control means 6 is added to this, θ becomes Δex' by setting DθX(S) of the separation control means 6' so as to satisfy equation (2). becomes unrelated to changes in

Similarly, when the separation control means 7' is not used for the output Δez' of the Z-axis controller 20', Zo=Pzz
(s)Δez'θ=Pθ2(s)Δe2' If the separation control means 7' is used, θ is set by setting Dθ2(s) of the separation control means 7' so as to satisfy equation (2). , Δe2' become irrelevant.

Also, for the output Δeθ' of the θ system controller 21', the separation control stage 6', ? 'If there is no Xo=-Pxθ(
s) Δeθ'Zo-P2θ(s)Δeθ' θ =Pθθ(s)Δeθ' When the separation control means 6', 7' are used, that is, Dxθ(s), D of the separation control means 6', 7'
By making zθ(s) satisfy equation (2), Δeθ
X0 and Z0 no longer respond to changes in '.

The separation control means 6' and 7' are connected as shown in FIG.
), the transfer functions Dxθ(s) and Dex(
s), Dzθ(s), and D02(s), the outputs of each controller Δex', Δe2', and Δ
eθ' is the corresponding control amount X.

, Zo, and θ, the control system shown in FIG. 5 is separated into three independent control systems shown in FIG. 6.

To determine the characteristics of the Z-system, φ-system, and Y-system separation control means 34 and 35, in the above description, X may be replaced with Y and θ may be replaced with φ.

To determine the characteristics of the X-system, Ψ-system, and Y-system separation means 36 and 37, read Z as X, θ as W, and X as Y.

According to the present invention, the shaking table control system has six independent control loops: X-axis system, Y-axis system, Z-axis system, φ system, and θ system.
The control system can be separated into a system and a V system, and therefore can easily perform X-axis direction vibration, Y-axis direction vibration, and Z-axis direction vibration simultaneously and independently.

In addition, compared to a method that attempts to suppress rotational motion in response to horizontal and vertical excitation commands using only rotational control using feedback control, feedforward control improves response speed and interferes with mutual interference up to a high frequency range. It becomes possible to excite with less vibration.

Furthermore, compared to systems that provide rotational input compensation, the present invention has correction means using feedback control even if the accuracy of the mathematical model required for compensation decreases, so the overall control accuracy increases and rotational input compensation is improved. In the method described above, the input compensation signal must be changed each time the controller or compensation circuit inside the feedback control system is adjusted, but in the method using a separate control means, the parameters of the separate control means are set first. Since the constants of the controller and the compensation circuit are adjusted from the above, it is not necessary to frequently change the parameters of the separation control means.

In addition, in the rotational input compensation method, in order to determine the input signal,
Since the response characteristics of the rotational angle to the translational excitation command and the rotational command must be determined in advance by measurement or other complicated means, a device for this purpose is required, but the method using the separate control means does not require this.

[Brief explanation of drawings]

Fig. 1 is a perspective view showing an example of a vibration table, Fig. 2A is a front view showing the force acting on the vibrated object due to the vertical excitation force,
Fig. 2B is a plan view showing the force acting on the vibrated body due to horizontal excitation force, Fig. 3 is a control system diagram of the present invention, and Fig. 4 is a control system diagram showing details of the separation control means. , FIG. 5 is another control system diagram of the present invention, FIG. 6 is a control system diagram expressing the control system diagram of FIG. 4 using a transfer function, and FIG. It is a control system diagram separated into three independent control systems. In the drawing, 1 is a vibration table, 2 is a vibrated object, 3a is an X-axis vibration exciter, 3b is a Y-axis vibration exciter, 4 is a Z-axis vibration exciter, 5
, 6, 7, 34, 35, 36, 31 are separation control means; 1
3 is an excitation force generation mechanism in the X-axis direction, 14 is an excitation force generation mechanism in the Z-axis direction, 15 is a pitching torque generation mechanism, 31 is an excitation force generation mechanism in the Y-axis direction, 32 is a rolling torque generation mechanism, and 33 is a yawing mechanism. It is a torque generating mechanism.

Claims (1)

[Claims] 1. An X-axis vibrator that vibrates the vibration table horizontally, and a Y-axis vibrator that vibrates the vibration table in a horizontal direction perpendicular to the excitation direction of the X-axis vibrator. a vibrator, and a Z-axis vibrator that vibrates the vibration table in the vertical direction, and further includes linear motion of the vibration table in the X-axis, Y-axis, and Z-axis directions, and a φ direction around the X-axis, Detection signals for rotational motion in the θ direction around the Y axis and in the W direction around the Z axis, linear motion in the X, Y, and Z axis directions, and rotational motion in the φ, θ, and P directions. An X-axis direction excitation force generation mechanism, a Y-axis direction excitation force generation mechanism, and a Z-axis direction excitation force generation mechanism that generate an operation signal for operating the vibration table by adding and subtracting the output signals from the excitation command signal using respective adders. An X-axis direction feedback system, a Y-axis direction feedback system, and a Z-axis direction feedback system configured to transmit information to the axial excitation force generation mechanism, the φ direction rotational force generation mechanism, the θ direction rotational force generation mechanism, and the V direction rotational force generation mechanism, respectively. In a control device for a vibration table equipped with an axial feedback system, a φ direction feedback system, a θ direction feedback system, and a T direction feedback system, control signals output from an X axis direction adder and a θ direction adder are input, and these From the control signal, the X-axis excitation force generation mechanism receives an operation signal that cancels the disturbance signal from the θ-direction feedback system, and the θ-direction rotational force generation mechanism receives an operation signal that cancels the disturbance signal from the X-axis feedback system. The control signals output from the X-axis direction adder and the F-direction adder are input to the the The control signals output from the axial adder and the φ direction adder are input manually, and from these control signals, the Y-axis direction excitation force generation mechanism receives an operation signal that cancels the disturbance signal from the φ direction feedback system. The rotational force generation mechanism includes a Y-φ separation control device that provides operation signals for canceling disturbance signals from the Y-axis feedback system, and control signals output from the Y-axis adder and F-direction adder. are input, and from these control signals, the Y-axis direction excitation force generation mechanism receives an operation signal that cancels the disturbance signal from the Ψ universal feedback system, and the Ψ-direction rotational force generation mechanism receives the disturbance signal from the Y-axis direction feedback system. The control signals output from the Y-W separation control device, which provides operation signals to cancel the signals, and the Z-axis direction adder are manually inputted, and from these control signals, the Z-axis direction excitation force generation mechanism generates φ. a Z-φ separation control device that provides an operation signal for canceling the disturbance signal from the direction feedback system and an operation signal for canceling the disturbance signal from the Z-axis direction feedback system to the φ-direction rotational force generating mechanism; The control signals output from the Z-axis direction adder and the θ-direction adder are input, and from these control signals, the Z-axis direction excitation force generation mechanism receives an operation signal that cancels the disturbance signal from the θ-direction feedback system.
The directional rotational force generating mechanism is provided with a Z-θ operation signal that cancels the disturbance signal from the Z-axis direction feedback system.
A separation control device for a triaxial vibration table, comprising at least one of the separation control devices installed between each of the adders and each of the generation mechanisms.