JPS6351259B2 - - Google Patents

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention provides a control device for a shaking table that prevents the shaking table from rotating due to horizontal and vertical vibration forces applied to the shaking table. Regarding.

<Conventional technology and problems> A horizontal vibration force is applied to a vibration table such as a table by a horizontal vibration exciter, and a vertical vibration force is applied by a vertical vibration vibration machine. A vibration table device that applies vibration to a vibrating object is shown in Fig. 1, in which a horizontal vibrator 3 and a vertical vibrator are attached to a vibrating object 2 mounted on a table (vibration table) 1. Vibratory force is applied by machine 4. In such a shaking table device, as shown in Fig. 2, the excitation force is applied to the shaking table 1, so the resultant force in the horizontal direction F _x , the resultant force in the vertical direction F _z , and the torque around the y-axis rotation Each of N _y is expressed by the following formula.

F _x = ΣF _xi , F _z = ΣF _zj , N _y ′ = Σl _zj F _zj N _y = N _y ′ + aF _z −cF _x ...(1) Where, F _xi : Horizontal vibration by the i-th horizontal shaker Excitation force F _zj : Vertical excitation force by the j-th vertical exciter N _y ′: Torque applied to the center of the vibration table by each exciter l _zj : Distance from the vibration center of the mounting position of each exciter a: Horizontal position of the center of gravity to be excited (see Figure 2) c: Vertical position of the center of gravity to be excited (see Figure 2) Therefore, when performing horizontal vibration alone, the effect of the excitation force Rotational motion occurs because there is a height difference c between the point where the object moves and the center of gravity. Furthermore, when performing vertical vibration alone, if the center of gravity is not on the center of the vibration table 1, that is, if a≠0, rotational motion will occur if the outputs of each vibration exciter are equal. When rotational movement occurs, each point on the vibration table 1 and the vibrated body 2 ceases to undergo translational movement. In such a shaking table device, an independent horizontal excitation command signal X _p ^c
and vertical excitation command Z _p ^c , and when trying to perform horizontal and vertical excitation at the same time, the movement of both the horizontal and vertical directions of the vibration table 1 and the excited object 2 more faithfully follows the command signal. In order to achieve this, a control means is required that limits the rotational movement and reduces the mutual interference between the horizontal system and the rotational system through the rotational movement.

As means for this, two methods have been proposed in the past: a rotation system feedback control method and a control method using input signal compensation. The former method is a horizontal system,
It performs feedback control of the vertical system and rotation system, and fixes the rotation command signal θ ^c to a constant value. In rotation control, when rotational movement occurs according to the relationship shown in equation (1) above, the detection means and compensation circuit detect it as △e〓, and the rotation system controller generates a correction operation signal △e′〓. do. This △e′〓 directly becomes the control signal U〓 to the rotational force generating mechanism. The control signal generates a rotation control torque N _y ′=Σl _zj F _zj , and a differentially acting component is superimposed on the vertical excitation force F _zj so as to suppress the rotational movement.

This conventional rotation control method is sufficiently effective when the excitation frequency is relatively low, but when excitation of the vibration table device is performed using an excitation command with a high frequency component, the signal in the feedback loop is Control accuracy deteriorates due to the inability to follow up due to transmission delay and secondary interference with the horizontal and vertical systems as a result of delayed rotation control. In particular, when a large-sized shaking table device is vibrated at a fast frequency, it is impossible to expect a sufficient effect of suppressing rotational motion.

Another method, in order to compensate for the drawbacks of the above-mentioned method, takes into account the rotational motion that occurs when the horizontal excitation command X _p ^c is added to θ ^c , which is the input signal to the control system. This method performs pitching input compensation to cancel out the influence, and its success or failure depends on the accuracy of the input signal for pitching compensation, and it has the following drawbacks.

First, since this is a compensation input given from outside the feedback control system configured as a closed-loop system, if it contains an error, the feedback control system does not have a means for corrective action within the system. do not have. Furthermore, this pitching input compensation method is based on the premise that two characteristics are known: the response of the rotation angle θ to the horizontal excitation command X _p ^c and the response of the rotation angle θ to the rotational excitation command θ ^c . . To this end, in order to determine the input signal for compensation, the response characteristics of the closed-loop system must be grasped in some way, but this characteristic must be grasped every time the controllers and compensation circuits of the feedback control system are adjusted. There is a need to do. Also,
The input signal generation device for grasping the characteristics and compensating for it also becomes complicated.

In addition, as a publicly known document of the prior art, Japanese Patent Application Laid-open No. 1973
-3559 Publication etc.

By adding a horizontal rotation separation control device or a vertical rotation separation control device, the present invention provides a horizontal system,
The purpose is to construct a control system with functions equivalent to three independent feedback control systems, a vertical system and a rotation system, and thereby prevent rotational motion from occurring in response to horizontal vibration commands and vertical vibration commands. do.

<Means for Solving the Problems> In order to solve the above problems, the present invention includes one or more vibrators that vibrate the vibration table in the horizontal direction, and a plurality of vibrators that vibrate the vibration table in the vertical direction. a vibration exciter, each detection signal detected according to each of the horizontal movement, vertical movement, and rotational movement of the vibration table, and the horizontal direction;
a horizontal excitation force generation mechanism that generates an operation signal for operating the vibration table using an output signal obtained by adding and subtracting each excitation command signal in the vertical direction and the rotational direction using horizontal, vertical, and rotational adders; In a control device for a vibration table comprising a horizontal feedback system, a vertical feedback system, and a rotational feedback system that transmit to a vertical excitation force generation mechanism and a rotational force generation mechanism, respectively, from the horizontal adder and rotational adder. The output control signals are input, and from these control signals, the horizontal excitation force generation mechanism receives an operation signal for canceling the disturbance signal from the rotational direction feedback system, and the rotational force generation mechanism receives the operation signal from the horizontal direction feedback system. The control signals output from the vertical adder and the rotation adder are input to a horizontal rotation separation control device that provides operation signals to cancel the disturbance signals from the vertical adder, and the vertical excitation force is generated from these control signals. A vertical rotation separation control device that provides the mechanism with an operation signal for canceling a disturbance signal from the rotational direction feedback system, and the rotational force generating mechanism for providing an operation signal for canceling a disturbance signal from the vertical direction feedback system. and,
A control device for a vibration table is constructed by installing the adders between the horizontal, vertical, and rotational adders and the horizontal excitation force generation mechanism, vertical excitation force generation mechanism, and rotational force generation mechanism.

<Operation> In the control device for the vibration table having the above configuration, the output signals of the horizontal adder and the rotation adder are input to the horizontal rotation separation control device, and the horizontal rotation separation control device receives disturbances from the rotational direction feedback system. An operation signal that cancels the signal is generated and applied to the horizontal excitation force generation mechanism, and an operation signal that cancels the disturbance signal from the horizontal feedback system is generated and applied to the rotational force generation mechanism. The output signals of the vertical adder and rotation adder are input to a vertical rotation separation control device, and the vertical rotation separation control device generates an operation signal that cancels the disturbance signal from the rotation direction feedback system. In addition to being applied to the vertical excitation force generation mechanism, an operation signal for canceling the disturbance signal from the vertical feedback system is generated and applied to the rotational force generation mechanism.

<Example> Next, an example of the present invention will be described. As shown in FIG. One or more vibration exciters 3 that vibrate in the direction
and a plurality of vibration exciters 4 that vibrate in the vertical direction are connected to the vibration table 1. The illustrated embodiment shows a case in which vibration is applied in both the horizontal and vertical directions by a plurality of vibration exciters.
The present invention is also applicable to a case where one vibrator is used in the horizontal direction and two vibrators are used in the vertical direction. Further, this type of shaking table device can also be used as a swinging device for the purpose of rotating (pitching) motion.

As shown in FIGS. 3 and 4A, the vibration table 1 has detection signals X _p , Z _p , θ for the horizontal movement, vertical movement, and rotational movement of the vibration table 1, as well as horizontal, vertical, and rotational directions. The vibration command signals X _p ^c , Z _p ^c , θ ^c are input to horizontal, vertical and rotational adders 101, 102, 1.
03, the output signals △e _x and △ are added and subtracted, respectively.
e _z , △e〓 to the horizontal excitation force generation mechanism 13, vertical excitation force generation mechanism 14, and rotational force generation mechanism 15, which generate operation signals for operating the vibration table 1, respectively. directional feedback system,
A vertical feedback system and a rotational feedback system are provided.

FIG. 3 shows a control system diagram of the multi-point vibration shaking table apparatus shown in FIGS. In addition to the feedback system, a separation control means 5 is added in the present invention. In FIG. 3, a servo amplifier 10, a servo valve 11, and an actuator (including a joint part) 12 are parts corresponding to control equipment added to each exciter shown in FIG. 1. Output F _x1 of actuator 12 ~
F _xn and F _z1 ~F _zo are horizontal and vertical vibrator 3,
4 indicates the excitation force applied to the vibration table 1, and X ₁ to X _n and Z ₁ to Z _o from the vibration table 1 to the actuator 12.
shows that the horizontal and vertical displacements of the vibration exciter mounting part affect the horizontal and vertical vibration forces due to the rigidity of the joint.

In addition, the signals X _p , X _{¨ p} from the shaking table 1 to the horizontal shaker control circuit 8 and the signal lines Z _p , Z ¨ _p , θ, θ ¨ from the shaking table 1 to the vertical shaker control circuit 9 are feedback. Shows signal lines for control. And X _p , Z _p ^c ,
θ ^c is the horizontal vibration command which is the input signal to this control system,
Vertical excitation command and rotation command are shown. Signal lines △e′ _x , △e′ _z , △e′〓, △e〓 _x , △e〓 _z between the separation control means 5 and the horizontal and vertical exciter control circuits 8 and 9
,△
e _x 〓 and △e _z 〓 are information required to perform separation control according to the present invention, and their mutual relationship is clarified in FIG.

In the vibration table apparatus shown in FIG. 1, the movement of the vibration table 1 on which the object 2 to be vibrated is mounted is a horizontal translational movement in the X-axis direction, a vertical translational movement in the Z-axis direction, and a rotational movement (pitching) around the Y-axis. The control system having the configuration shown in FIG. 3 can be shown as shown in FIG. 4.

The horizontal excitation force generating mechanism 13 in FIG. 4A is a collective representation of the horizontal system servo amplifier 10, servo valve 11, and actuator (including the joint portion) 12 in FIG. 3. The vertical excitation force generation mechanism 14 is Z
A servo amplifier 10, a servo valve 11, and an actuator (including a joint portion) 12 that contribute to generating the resultant force of excitation forces in the directions F _z =ΣF _zj are collectively shown. In addition, the rotational force (rotational torque) generation mechanism 15 shown in the figure is a differential drive system in which multiple vertical vibrators are connected to a plane passing through the center of the table and parallel to the Y-Z plane as a boundary (see Figures 2A and B). The servo amplifier 10, servo valve 11, and actuator (including contact portion) 12 for the vertical exciter, which contribute to the control torque N _y ′=Σl _zj F _zj generated around the Y-axis when the vertical vibrator is operated, are collectively assembled. This is what is shown.

The vibrating table 1 in FIG. 4A is the same as that in FIG. 3, but the internal structure is shown in the form of a mathematical model for convenience in describing the operation. When the control system is shown in the form of FIG. 4, the horizontal vibration exciter control circuit 8 in FIG.
6 and a horizontal system controller 17, and the vertical exciter control circuit 9 in FIG. It is divided into controllers 20, 21, etc.

The above-mentioned components in FIG. 3 are included in the configuration functions of the control system of the conventional shaking table apparatus, but in the present invention, the following two are added as the separation control means 5.

In FIG. 4, the horizontal rotation separation control means 6 inputs the output signals △e′ _x and △e′ of the horizontal system and rotation system controllers 17, 21,
This is a main stage that generates signals △e _x 〓 and △e 〓 _x for correcting the control signals U _x , U 〓 of the rotational force generating mechanism 15. Further, the vertical rotation separation control means 7 inputs the output signals △e' _z and △e' of the vertical system and rotation system controllers 20 and 21, and controls the vertical excitation force generation mechanism 14 and the rotational force generation mechanism 15. This is means for generating signals △e _z 〓 and △e 〓 _z for correcting the control signals U _z , U 〓.

Conventionally proposed methods for controlling a shaking table apparatus include a method in which the input signal θ ^c to the feedback system is compensated for outside the closed loop system without having separate control means 6 and 7 inside the closed loop system. On the other hand, in the method according to the present invention, separate control means 6, 7 which respond to the control deviations △e _x , △e _z , △e〓 are provided inside the closed loop system.
is added.

FIG. 4B is a diagram showing another embodiment of the present invention, in which a horizontal rotation separation control means 6 and a vertical rotation separation control means 7 are installed in front of each controller 17, 20, 21 as shown in the figure. In this case, the horizontal rotation separation control means 6 inputs the deviation signals △e _x , △e〓 of the horizontal system and the rotation system, and inputs the input signals U _x ′,
Signals △e _x 〓 and △e〓 _x are generated to correct U〓′. Further, the vertical rotation separation control means 7 inputs the deviation signals △e _z and △e of the vertical system and the rotation system, and inputs the input signals of the controllers 20 and 21 of the vertical system and the rotation system.
Signals △e _z 〓 and △e〓 _z are generated to correct U _z ′, U 〓′.

The specific example shown in Figure 4B is a separate control system that is added to a ready-made device in which a vertical controller and a horizontal controller are integrated with a vertical excitation force generation mechanism and a horizontal excitation force generation mechanism, respectively. This is effective when adding .

4A and 4B are characterized in that the separation control means 6 and 7 are added as feedback forward elements inside a closed loop system configured as a feedback control system. For this purpose, the control loop separation function as a feedforward element and the function as a feedback control system after separation will be explained based on the control device shown in FIG. 4A.

In the control system of Fig. 4A, horizontal vibration command X _p ^c
If there is a change or an error in the horizontal displacement X _p with respect to the X _p ^c signal, the control deviation Δe _x changes, the horizontal system controller 17 responds, and the output Δe′ _x of the horizontal system controller 17 changes. In response to the change in Δe′ _x , the horizontal excitation force generation mechanism 13 operates, and the horizontal excitation force F _x is changed to horizontally excite the table 1. At the same time, a disturbance torque cF _x is generated around the Y axis of the table 1. In the control system with the horizontal rotation separation means 6, △e〓 _x changes according to the change in △e′ _x , which is added to the rotation control signal U〓, acts on the rotation torque generation mechanism, and controls Vary the torque N _y ′. That is, by adding the separation control means 6, the control effect due to the change in the output Δe′ _x of the horizontal controller 17 is applied not only to the horizontal excitation force generation mechanism 13 but also to the rotational force generation mechanism 15. At the same time, the rotational force generation mechanism 15 generates a control torque N _y ′ corresponding to the output of the horizontal excitation force generation mechanism 13 acting as a disturbance torque cF _x on the rotational motion, and the control torque N _y ′ Disturbance torque cF _x
offset. As a result, horizontal controller 1
Changes in the output _{Δe '}

In FIG. 4A, the characteristics of _{the output △e 〓 x with} respect to the input △e′ Considering the dynamic characteristics of the system, including the mass M' of the shaking table 1, the inertia factor I _y , and the stiffness of the joint connecting the actuator 12 in Table 1 and FIG. 3, it is determined to satisfy the above-mentioned separation control function. .

In FIG. 4A, the output Δe' _z of the vertical system controller 20 directly becomes the control signal U _z of the vertical excitation force generating mechanism 14, which generates the vertical excitation force F _z .
As a result, rotational torque aF _z (see FIG. 2A ₎ is generated at the same time as the vertical displacement Z _p changes. △ superimposed on control signal U〓
Since e〓 _z is generated, a rotational control torque N _y ′ is generated, which acts to cancel the disturbance torque aF _z from the vertical system to the rotational motion. That is, when the vertical rotation separation control means 7 is added, the output Δe' _z of the vertical system controller 20 acts effectively to control the vertical displacement Z _p , but the vertical system has no influence on the rotational movement.

The dynamic characteristics between the input △e' _z and the output △e〓 _z of the vertical rotation separation means 7 necessary for this kind of action are determined by the related control equipment and the rotation angle θ from the control signals U _z and U〓. It is determined in consideration of the dynamic characteristics of the system including the shaking table 1.

If the horizontal rotation separation control means 6 and the vertical rotation separation control means 7 are not provided, the rotation system controller 21
Due to the change in the output Δe′〓, the rotational torque generating mechanism 15 is activated, a control torque N _y ′ is generated, and a rotational movement around the Y-axis passing through the center of gravity is generated.
As a result, the horizontal and vertical motion detectors necessary for feedback control detect a superimposition of parallel and vertical motion components at the detection point caused by rotational motion. Therefore, when two separation control means 6 and 7 are added, the output △e' of the rotation system controller 21 becomes
_In addition _to serving _{as a} control signal for It becomes like this. From this, the dynamic characteristics of the horizontal rotation separation control means 6 from input △e' to △ _e If it is set so that the horizontal displacement caused by the correction signal △e _x 〓 cancels out, the horizontal displacement at the detection point will not be affected by △e′〓. Similarly, by setting the dynamic characteristics of the input △e′〓 to △e _z 〓 of the vertical rotation separation control means 7 with attention to the vertical displacement at the detection point, △e′〓 becomes the vertical displacement at the detection point. will no longer affect.

As described above, by adding the two separation control means 6 and 7 to the control method of the shaking table apparatus, the control system can be equivalently separated into three independent control loops: a horizontal system, a vertical system, and a rotation system. It becomes like this.

When exciting simultaneously in the horizontal and vertical directions using independent vibration commands, the part that generates the output △e〓 _x in response to the input △e′ _x of the horizontal rotation separation control means 6 and the input of the vertical rotation separation control means 7 The part that generates the output △e〓 _z for △e′ _z has the most useful effect. In this application, the rotation command signal θ ^c is fixed at a constant value, so the only vibration commands that change are the horizontal vibration command X _p ^c and the vertical vibration command Z _p ^c , and the rotation angle θ
In order to suppress fluctuations in as small as possible, the above two parts work actively. However, the settings of the separation control means 6 and 7 require control inputs U _x , U _z , U〓
It is necessary to investigate in advance the dynamic characteristics of the controlled variables X _p , Z _p , and θ, and there may be errors in the mathematical model. Due to this error, rotational motion occurs when the horizontal vibration command X _p ^c and vertical vibration command Z _p ^c are applied, whereas rotational motion is generated when the rotation system controller output signal Δ
Separation control means 6 that obtains e′〓 and generates △e _x 〓 and △e _z 〓
，
Part 7 is a corrective action means to prevent the deviation △e〓 of the rotational system from once again having an adverse effect on the horizontal and vertical systems.

In applying the method for controlling a shaking table apparatus using the separation control means 6, 7 of the present invention, the separation control means 6,
There are several possible methods for determining the characteristics of No. 7, but here we will give an example using an equivalent transfer function.

The block diagram of the control system shown in FIG. 4A can be rewritten as shown in FIG. 5 by defining the following transfer function.
(Blocks corresponding to those in FIG. 4A are designated by the same numbers and marked with dashes in FIG. 5).

G _x (s), G _z (s), G〓 (s): horizontal system, vertical system,
Transfer functions of rotation system controllers 17, 20, and 21.

H _x (s), H _z (s), H〓(s): horizontal system, vertical system,
Rotation system detection means and compensation circuits 16, 18, 1
9 transfer functions, where each input is X _p , Z _p ,
Let it be θ.

D〓 _x (s), D _x 〓 (s): Transfer function of the horizontal rotation separation control means 6.

D _sz (s), D _z 〓(s): Transfer function of the vertical rotation separation control means 7.

However, in FIG. 4A, each separation control means 6 and 7 is shown as an element with two inputs and two outputs, respectively.
In the application shown in FIG. 5, each element is represented by two transfer functions as shown.

P _xx (s), P _x 〓(s), P〓 _x (s), P〓〓(s)P
〓 _z (s),
P _z 〓(s), P _zz (s): forward equivalent transfer functions from the control signals U _x , U 〓, U _z to the control amounts X _p , θ, Z _p, respectively.

When the above transfer function is defined, the conditions for the control system shown in FIG. 5 to be separated into three independent feedback control systems: a horizontal system, a vertical system, and a rotation system are as follows.

D〓 _x (s)=P〓 _x (s)/P〓〓(s), D _x 〓(s)=P
_x 〓(s)/P _xx (s)……(2) D〓 _z (s)=P〓 _z (s)/P〓〓(s), D _z 〓(s)=P
_z 〓(s)／P _zz (s) Rewriting this, D〓 _x (s)P〓〓(s)=P〓 _x (s), D _x 〓(s
)P _xx (s)=P _x 〓(s)……(2′) D〓 _z (s)P〓〓(s)=P〓 _z (s), D _z 〓(s
)P _zz (s)=P _z 〓(s) In the control system shown in Fig. 5, the response of each controlled variable to the output △e' _x of the horizontal controller 17' is X when the separate control means 6' is not added. _p = P _xx (s)△e _{' x} ...(3) _θ =-P〓 _x (s ₎ △ _e' (s)P _x 〓(s)}△e′
_x = {P _xx (s) − P 〓 _x (s) / P 〓 〓 (s) P _x 〓 (s)
｝△e′ _x ...(3′) θ＝{−P〓 _x (s)＋D〓 _x (s)P〓〓(s)}△e′ _x
=0・
Δe′ _x =0 In other words, θ becomes independent of changes in Δe′ _x by setting D〓 _x (s) of the separation control means 6' so as to satisfy equation (2).

Similarly, the output △e′ _z of the vertical system controller 20′
On the other hand, when the separation control means 7' is not used, Z _p =P _zz (s)△e' _z ...(4) θ=P〓 _z (s)△e' _z and the separation control means 7' Using, Z _p = {P _zz (s)−D〓 _z (s)P _z 〓(s)}△e′ _z
= {P _zz (s)−P〓 _z (s)/P〓〓(s)P _z 〓(s)}
△e′ _z …(4′) θ={+P〓 _z (s)−D〓 _z (s)P〓〓(s)}△e′ _z
=0・
Δe′ _z =0 That is, θ becomes independent of changes in Δe′ _z by setting D〓 _z (s) of the separation control means 7' so as to satisfy equation (2).

Furthermore, with respect to the output △e′ of the rotation system controller 21 _′ , when there _is no separate control means 6 _′ and 7′, P _z 〓(s)△e′〓 θ=P〓〓(s)△e′〓 When using the separation control means 6' and 7', X _p = {−P _x 〓(s) + D _x 〓(s) P _xx (s)}△e′〓=
0・
△e' = 0 ... (5') Z _p = {P _z 〓 (s) - D _z 〓 (s) P _zz (s)} △e' = 0・△e' = 0 θ= {P〓〓(s)−D _x 〓(s)P〓 _x (s)−D _z 〓(
s)P〓 _z (s)}△e′〓={P〓〓(s)−P _x 〓(s)
/P _xx (s)P〓 ×(s)−P _z 〓(s)/P _zz (s)P〓 _z (s)}△e
′〓 That is, D _x 〓(s) of the separation control means 6′, 7′,
By making D _z 〓(s) satisfy equation (2), X _p and Z _p will no longer respond to changes in △e′〓.

The separation control means 6' and 7' are connected as shown in Fig. 5, and the transfer functions D _x 〓(s), D〓 _x
(s), D _z 〓(s), and D〓 _z ( _s ), the outputs _△ e′ The control system in Fig. 5 has no effect on anything other than _p , Z _p , and θ, so the control system in Fig. 6
It is separated into three independent control systems as shown in the figure.

<Effects of the Invention> According to the present invention, the shaking table control system can be separated into three independent control loops, that is, a horizontal system, a vertical system, and a rotation system. The control system can easily perform both simultaneously and independently.

In addition, compared to a method that attempts to control rotational motion in response to horizontal and vertical excitation commands using only rotational control using feedback control, feedback control improves response speed.
Excitation can be performed up to a high frequency range with less mutual interference among the horizontal, vertical, and rotational systems.

Furthermore, compared to a system that provides a pitching compensation input, the present invention has correction means based on feedback control even if the accuracy of the mathematical model required for compensation decreases, so the accuracy of the control as a whole is improved. In the conventional pitching compensation input method, the input compensation signal must be changed each time the controller or compensation circuit inside the feedback control system is adjusted. Since the parameters of the separation control means are set before the constants of the controller and the compensation circuit are adjusted, there is no need to frequently change the parameters of the separation control means.

In addition, in the conventional pitching compensation input method,
In order to determine the input signal, the response characteristics of the rotation angle to the horizontal excitation command and the rotation command must be determined in advance by measurement or other complicated means, and the equipment for this becomes large-scale. This is not necessary by means.

[Brief explanation of the drawing]

Figure 1 is a perspective view showing an example of a shaking table, Figure 2 A
is a front view showing the force acting on the vibrated body due to the vertical excitation force, Fig. 2B is a plan view showing the force acting on the vibrated body due to the horizontal excitation force, and Fig. 3 is a plan view showing the force acting on the vibrated body due to the horizontal excitation force. A control system diagram of the present invention, FIG. 4A is a control system diagram showing the separation control means in more detail, FIG. 4B is another control system diagram of the present invention, and FIG. 5 is a control system diagram of FIG. 4A. Fig. 6 is a control system diagram that expresses the
It is a control system diagram which separates the control system diagram shown in the figure into three independent control systems. In the drawing, 1 is a vibration table, 2 is a vibrated object, 3 is a horizontal vibrator, 4 is a vertical vibrator, 5, 6, and 7 are separation control means, 13 is a horizontal excitation force generation mechanism, and 14 is a The vertical excitation force generation mechanism 15 is a rotational force generation mechanism.

Claims (1)

[Claims] 1. One or more vibration exciters that vibrate the vibration table in the horizontal direction, multiple vibration exciters that vibrate the vibration table in the vertical direction, and each of the horizontal movement, vertical movement, and rotational movement of the vibration table. The output signal obtained by adding and subtracting each detection signal detected according to the horizontal direction, each vibration command signal in the horizontal direction, vertical direction, and rotational direction by each adder in the horizontal, vertical, and rotational directions is used to operate the above-mentioned vibration table. Control of a vibration table equipped with a horizontal feedback system, a vertical feedback system, and a rotational feedback system that transmit operation signals to a horizontal excitation force generation mechanism, a vertical excitation force generation mechanism, and a rotational force generation mechanism, respectively. In the apparatus, control signals output from the horizontal adder and the rotational adder are inputted, and from these control signals, the horizontal excitation force generation mechanism receives an operation signal for canceling the disturbance signal from the rotational direction feedback system. The rotational force generation mechanism receives a horizontal rotation separation control device that provides operation signals for canceling disturbance signals from the horizontal feedback system, and control signals output from the vertical adder and the rotational adder. From these control signals, an operation signal is sent to the vertical excitation force generation mechanism to cancel the disturbance signal from the rotational direction feedback system, and an operation signal is sent to the rotational force generation mechanism to cancel the disturbance signal from the vertical direction feedback system. A vertical rotation separation control device that provides each operation signal is installed between the horizontal, vertical, and rotational adders and the horizontal excitation force generation mechanism, vertical excitation force generation mechanism, and rotational force generation mechanism. A vibration table control device consisting of: