JPS581807B2 - Shaking table control device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a control device for a vibration table that vibrates an object mounted on the vibration table both horizontally and vertically.

FIG. 1 shows the configuration of a vibration table to which the present invention is applied, in which a table 1 is attached with a vibrated body 2, and this vibrated body 2 consists of a plurality of horizontal Vibrator 3,
3, . . . and vertical vibrators 4, 14, . . . to vibrate in the horizontal and vertical directions.

It can also be used as a vibration table of this type or as a rocking device for rotating (pitching) the object 2 to be vibrated.

In the vibrating table having the structure shown in Fig. 1, the excitation force Fx1 to Fxm is generated by horizontal vibrators 3, 3... and vertical vibrators 4, 4... as shown in Figs. 2 and 3, respectively. ,Fz1~
Since Fzn is applied to the table 1, the horizontal resultant force Fx, the vertical resultant force Fz, and the torque NY around the y-axis are each expressed by the following equations.

FX1ΣFXi・・・・・・・・・r1)Fz−
ΣFzj・・・・・・・・・・・・(2) N′y=Σe
zz・Fzz・・・・・・・−(3) Ny=Ny+aF
z-cFx...(4) (Fxi is the horizontal excitation force by the i-th horizontal exciter, Fzz is the vertical excitation force by the j-th vertical exciter) Therefore, horizontal excitation alone When this is done, a rotational force is generated in the vibrated body 2 because there is a height difference C between the point where the excitation force acts and the center of gravity position CG of the vibrated body 2.

In addition, when performing vertical vibration alone, when the center of gravity of the body 2 to be vibrated is not on the center of the table 1, if the excitation force of each vertical vibrator 4, 4... is equal, then Rotational force is generated in the vibrating body 2.

That is, during vibration, the vibrated body 2 performs a rotational motion.

When the body 2 to be vibrated performs a rotational movement, each point on the table 1 and the body 2 to be vibrated no longer undergo translational movement.

When attempting to simultaneously perform horizontal and vertical vibrations on a vibration table by giving independent horizontal and vertical vibration command signals, it is necessary to In order for the motion of the vibration table to more faithfully follow both of the above command signals, it is necessary to control the vibration table so as to limit the rotational movement and reduce mutual interference between the horizontal system and the rotational system through the rotational movement. be.

The following two methods have conventionally been proposed as control means.

One of them is to perform feedback control of the rotation system, and FIG. 4 is a diagram showing the configuration of the control device.

Vertical excitation command signal 2 is input to vertical system controller 11, rotation system controller 12, and horizontal system controller 13 as an input signal.

C, rotation command signal θC, horizontal vibration command signal X.

C are supplied to each. Now, the rotation command signal θC is fixed at a constant value.

In this rotational control, when rotational motion occurs according to the relationships shown in equations (1) to (4) above, the rotational motion detection/compensation circuit 1
4 detects the rotational force of this rotational movement as a signal Δeθ, and the rotation system controller 12 outputs a correction operation signal Δeθ′.
occurs.

This correction operation signal Δeθ' is then directly sent as a control signal U to the rotational force generating mechanism 15.

bawl. The rotation control torque N'y is determined by the control signal Uθ.
(=Σe2jF2j) is generated and is differentially superimposed on the output Fzz of the vertical excitation force generation mechanism 16 so that the rotational movement is suppressed.

This conventional method of controlling rotational motion is quite effective when the excitation frequency is low.

However, when exciting a vibration table with an excitation command signal that has a high frequency component, it is difficult to follow the vibration due to the signal transmission delay in the feedback loop, and the secondary horizontal system is caused by the delayed rotation control. There is a drawback that control accuracy is reduced due to interference with the vertical system, and it is impossible to expect a further effect of suppressing rotational motion, especially when a large shaking table is vibrated in a short period.

Another method for controlling the vibration table is a control method using input signal compensation, which is used to compensate for the drawbacks of the feedback control of the rotation system.

This is a rotation command signal which is an input signal to the control system of the device shown in FIG.

C is the horizontal vibration command signal X.

In anticipation of the rotational movement that occurs when C is applied, rotational input compensation is performed in advance to cancel out the effect.

However, this control method has the following drawbacks because its success or failure depends on the accuracy of the input signal for rotational input compensation.

■ Compensation Since the compensation is given from outside the feedback control system configured as a closed loop system, if it contains an error, it cannot be compensated within the feedback control system.

■ In the rotational input compensation method, the horizontal vibration command signal XoC
It is assumed that two characteristics are known: the response of the rotation angle θ to the rotation command signal θC, and the response of the rotation angle θ to the rotation command signal θC.

Therefore, in order to determine the input signal for compensation, the response characteristics of the closed-loop system must be understood in some way.

To this end, it is necessary to understand the characteristics of each controller 12, 13, rotational motion detection/compensation circuit 14, horizontal translational motion detection/compensation circuit 17, etc. of the feedback control system of the device shown in FIG. 4 each time it is adjusted. .

In addition, the human power signal generating device for grasping the characteristics and compensating for it becomes complicated.

The present invention was made in consideration of the above circumstances, and its purpose is to provide one or more vibrators for horizontally vibrating a vibrating table; It has a plurality of vibration exciters that vibrate, and each detection signal is detected according to each of the horizontal movement, vertical movement, and rotational movement of the vibration table, and each vibration command signal in the horizontal direction, vertical direction, and rotational direction. A horizontal excitation force generation mechanism, a vertical excitation force generation mechanism, and a rotational force generation mechanism generate operation signals for operating the above-mentioned vibration table by adding and subtracting output signals obtained by adding and subtracting the output signals by horizontal, vertical, and rotational adders respectively. a horizontal feedback system, a vertical feedback system, each configured to transmit information to the
In a control device for a vibration table equipped with a rotational direction feedback system, the horizontal, rotational, and rotational A separation control device and/or a vertical and rotational separation control device are installed, and the horizontal,
The rotation separation control device receives the control signal output from the horizontal adder, generates an operation signal for canceling the disturbance from the horizontal feedback system based on the control signal, and applies this to the rotational force generation mechanism, The vertical and rotational separation control device receives the control signal output from the vertical adder, generates an operation signal to cancel the disturbance from the vertical feedback system based on this control signal, and attaches this to the rotational force generation mechanism. This makes it easy to control horizontal and vertical excitation simultaneously and independently, and also prevents mutual interference between horizontal, vertical, and rotational excitations up to a high frequency range. It is an object of the present invention to provide a control device for a vibration table that can be performed with less vibration, has high accuracy in vibration control, and does not require frequent circuit adjustment of the device.Furthermore, the device itself is small.

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 5 is a block diagram showing the configuration of an embodiment of the present invention.

The vertical vibration command signal 2 is input to the vertical vibration machine control circuit 20 as an input signal.

C and rotation command signal θC are supplied in parallel.

Further, the horizontal vibration exciter control circuit 21 receives a horizontal vibration command signal X as an input signal.

C is supplied. The output of the vertical exciter control circuit 20 is amplified by each of n servo amplifiers 221 to 22n, and then supplied to each of n servo valves 231 to 23n.

The outputs of the servo valves 23 and 23n are supplied to the actuators 241 to 24n, and the outputs Fz1 to Fzn of the actuators 241 to 24n are supplied to the table 1 of the vibration table shown in FIG. It has become.

A part of the output of each of the actuators 24, ~24n is fed back to each of the servo amplifiers 221~22n, and the servo amplifier 22, servo valve 23, and actuator 24 correspond to one vertical vibrator 4 of the vibration table. are doing.

Further, each of the signals 21 to 2n outputted from the table 1 is inputted to each of the actuators 241 to 24n.

These signals 21 to zn are signals representing the influence exerted on the vertical excitation force by the rigidity of the joint portion of the actuator.

On the other hand, the output of the horizontal exciter control circuit 21 is amplified by m servo amplifiers 251 to 25m, and then supplied to the servo valves 26 and 26m, respectively.

The outputs of the servo valves 26 and 26m are supplied to the actuators 271 to 27m, and the outputs Fxl to Fxrn of the actuators 27 and 27rn are supplied to the table 1 of the vibration table shown in FIG. It has become so.

Further, a part of the output of each of the actuators 21 and 27m is fed back to each of the servo amplifiers 25 and 25m, and the servo amplifier 25, servo valve 26 and actuator 27 are fed back to the horizontal exciter 3 of one of the vibration tables. It is equivalent.

Furthermore, the signals X and ~xm output from table 1 are manually applied to the actuators 27 and ~27m, and the signals X and ~xrn are horizontally excited by the rigidity of the joint of the actuator. It is a signal that represents the influence exerted on a force.

Further, from Table 1, signals θ, θyZ0, ZO and X for performing feedback control.

, x0 are output, respectively, and the signals θ, θ
and Z.

, ZO is the signal X to the vertical shaker control circuit 20.

, Interchange. are supplied to the horizontal vibrator control circuit 21, respectively.

Further, in FIG. 5, 28 is a separation control circuit for performing separation control of the vertical system and the horizontal system, and this separation control circuit 2
8 is supplied with a signal Δez' vibrated from the vertical vibration nailing circuit 20 and a signal Δcx' outputted from the horizontal vibration exciter control circuit 21 as input signals.

Furthermore, the signal Δeo2 output from this separation control circuit 28
, Δeox are supplied to the vertical shaker control circuit 20.

In the vibration table shown in FIG. 1, the movement of the table 1 on which the object to be vibrated 2 is attached is a horizontal translational movement in the X-axis force direction, and a horizontal translational movement in the Z-axis force direction, as shown in FIGS. 2 and 3. Since the circuit shown in FIG. 5 can be further shown as shown in FIG. 6, the circuit shown in FIG. 5 can be further shown as shown in FIG. 6.

In FIG. 6, the horizontal excitation force generation mechanism 30 collectively represents the horizontal system servo amplifier 25, servo valve 26, and actuator 27 shown in FIG. Control that occurs around the y-axis when the vibration exciter is operated differentially with the boundary being a plane passing through the center of table 1 and parallel to the y-z plane (see Figures 2 and 3). Torque N! The servo amplifier 22, servo valve 23, and actuator 24 that contribute to y(-Σe2jF2j) are collectively shown.

Furthermore, the vertical excitation force generation mechanism 32 is a combination of the vertical system servo amplifier 22, servo valve 23, and actuator 24 shown in FIG. (=ΣF2j).

The vertical exciter control circuit 20 shown in FIG. 5 is divided into a vertical translational motion detection/compensation circuit 33, a rotational motion detection/compensation circuit 34, a vertical system controller 35, and a rotation system controller 36 in FIG. There is.

Furthermore, the horizontal vibrator control circuit 21 shown in FIG. 5 is divided into a horizontal translational motion detection/compensation circuit 37 and a horizontal system controller 38 in FIG.

Table 1 shown in FIG. 6 is the same as that shown in FIG. 5, but the internal structure is shown in the form of a mathematical model for convenience.

Furthermore, the separation control circuit 28 shown in FIG. 5 is a vertical single rotation separation control circuit 39 and a horizontal one rotation separation control circuit 4 in FIG.
It is divided into 0 and 0.

The vertical one-rotation separation control circuit 39 inputs the output signal Δez' of the vertical system controller 35 and outputs a signal Δ for correcting the control human power signal Uθ of the rotational torque generating mechanism 31.
eθ2 is generated.

On the other hand, the horizontal one-rotation separation control circuit 40 receives the output signal Δex' of the horizontal controller 38 and generates a signal Δeθe for correcting the control input signal Uθ of the rotational torque generating mechanism 31. .

As shown in FIG. 6, in the vibration table control device of the present invention, a vertical one-rotation separation control circuit 39 and a horizontal one-rotation separation control circuit 40 each have a feedback control system within a closed loop system configured as a feedback control system. It is added as a table (forward-looking element).

Therefore, the control loop separation effect as the seven eid forward elements and the respective effects as the feedback control system after separation will be explained next.

For explanation, the control loop separation effect has the following two response effects.

(2) Response to the output Δex' of the horizontal controller 38 (2) Response to the output Δe2' of the vertical controller 35 First, the response to the output ΔeX' of the horizontal controller 38 will be explained.

In the control system shown in FIG. 6, horizontal vibration command X.

The change in C or the horizontal displacement X for that XoC signal.

If there is an error, the control deviation Δdischarge changes, the horizontal system controller 38 responds, and its output Δex' changes.

In response to the change in ΔeX', the horizontal excitation force generation mechanism 30 operates to change the horizontal excitation force Fx to horizontally excite the table 1.

At the same time, a disturbance torque C-FX is generated around the y-axis of the table 1.

In the control system including the horizontal one-rotation separation control circuit 40, Δ
According to the change in ex', ΔeOx changes, which is added to the rotation control signal Uθ, acts on the rotation torque generation mechanism 31, and changes the control torque N'y.

That is, by adding the horizontal-separated arsenal control circuit 40, the control effect caused by the change in the output ΔeX' of the horizontal system controller 38 is applied not only to the horizontal excitation force generation mechanism 30 but also to the rotational torque generation mechanism 31 at the same time. and the control torque N! corresponding to the output of the former acting as a disturbance torque cFx on the rotational motion! y is generated by the latter, and the disturbance torque cFx is made to cooperate with the control torque N'y.

As a result, changes in the output Δex' of the horizontal system controller 38 act effectively to control the horizontal displacement x0;
It no longer affects rotational motion from the horizontal system.

The characteristics of the output ΔeoX with respect to the human power ΔeX' of the horizontal-rotation separation control circuit 40 are the dynamic characteristics of the equipment constituting the horizontal excitation force generation mechanism 30, the rotational torque generation mechanism 31, etc., the mass M of the table 1, and the inertia factor Iy. , the dynamic characteristics of the system, including the rigidity of the joint that connects the table 1 and the actuator, are determined to satisfy the above-mentioned separation control function.

Next, the response to the output Δez' of the vertical system controller 35 will be explained.

In the control system shown in FIG. 6, the output Δez' of the vertical control port 35 directly becomes the control signal Uz of the vertical excitation force generating mechanism 32 to generate the vertical excitation force Fz.

As a result, the vertical displacement is 2.

Rotational torque aFz is generated at the same time as Δ
ez' acts as an input to the vertical one-rotation separation control circuit 39 and generates Δeθ2 which is superimposed on the control signal uOX of the rotational torque generation mechanism 31, so that the rotational control torque N! y occurs and acts to cancel the disturbance torque aFz from the vertical system to the rotational motion.

That is, when the vertical one-rotation separation control circuit 39 is added,
The output Δe2' of the vertical controller 35 is a vertical displacement of 2.

It works effectively to control the vertical system, but there is no influence on rotational motion from the vertical system.

The dynamic characteristics between the input Δe21 and the output Δeθ2 of the vertical one-rotation separation circuit 39 necessary for such an action are the dynamic characteristics of the system including the control equipment and table related from the control signal u2tuθ to the rotation angle θ. It can be decided after consideration.

Next, the operation as feedback control after separation will be explained.

As described above, by adding the vertical one-rotation separation control circuit 39 and the horizontal one-rotation separation control circuit 40, the input signal to the control system of FIG. 6 becomes the horizontal excitation command signal X.

C and vertical vibration command signal 2. Only C, rotation command signal θC
When is zero, the control system can be equivalently separated into independent horizontal, vertical, and rotational control loops.

When exciting in the horizontal and vertical directions simultaneously using independent vibration command signals, the rotation command signal θC is fixed at a constant value, so the vibration command signal that fluctuates is the horizontal vibration command signal XoC. and the vertical excitation command signal zoC, and the vertical one-rotation separation control circuit 39 and the horizontal one-rotation separation control circuit 40 actively work to suppress the fluctuation of the rotation angle θ as small as possible.

However, the settings of both the separation control circuits 39 and 40 include the control amount X for the control human power Ux, uz, and uθ.

, ZQjθ, it is necessary to investigate the dynamic characteristics in advance, and there may be errors in the mathematical model.

Due to the error, the horizontal vibration command signal X.

C and vertical vibration command signal 2. Rotational motion occurs when vibration is applied by applying C, but there is a rotational control system that acts as a means for corrective motion.

As described above, in the vibration table control device of the present invention, the following effects can be obtained by using the vertical one-rotation separation control circuit 39 and the horizontal one-rotation separation control circuit 40.

In other words, the vibration table control system shown in FIG. 6 uses the rotation command signal θC.
When is zero, the control loops can be separated into three independent control loops: a horizontal system, a vertical system, and a rotation system.

Therefore, the control system can easily perform horizontal excitation and vertical excitation simultaneously and independently.

Furthermore, compared to methods that attempt to suppress rotational motion in response to horizontal and vertical excitation command signals using only rotational control using feedback control, feedforward control improves response speed and allows for a higher frequency range. Excitation can be performed with less mutual interference among the horizontal, vertical, and rotational systems.

In addition, in order to eliminate the influence on the rotational motion caused by horizontal vibration, a method has been considered in which a pitching compensation input is provided as an input signal, but this method has the following advantages compared to that method.

One of the reasons is that even if the accuracy of the mathematical model necessary for compensation falls down, there is a correction means using feedback control, so the accuracy of the control as a whole increases.

Furthermore, with the pitching compensation input method, the manual compensation signal must be changed each time the controller or compensation circuit inside the feedback control system is adjusted; however, with the method of using two separate control circuits 39 and 40, After setting the parameters of the separation control circuits 39 and 40, each controller 35, 36, 3B and each detection/compensation circuit 33,
Since the constants of 34 and 37 are adjusted, both separation control circuits 39
, 40 parameters need not be changed frequently.

Furthermore, in the pitching compensation input method, in order to determine the input signal, the response characteristics of the rotation angle to the horizontal excitation command signal and rotation command signal must be determined in advance by measurement or other complicated means. Although it is large-scale, the method using both separation control circuits 39 and 40 does not require it.

FIG. 7 is a diagram showing a configuration according to a specific application example of the vibration table control device of the present invention.

Although there are several possible methods for determining the characteristics of the vertical one-rotation separation control circuit 39 and the horizontal one-rotation separation control circuit 40 of the circuit shown in FIG. 6, an example using an equivalent transfer function is shown here. There is.

That is, the control system Bronk diagram of FIG. 6 can be rewritten as shown in FIG. 7 by defining the transfer function as follows.

Note that in FIG. 7, the same reference numerals are used for the parts corresponding to those in FIG. 6, and a mark '' is added behind the reference numerals to clearly indicate the same.

(1) Definition of transfer function! ) GX (s), G2 (s), Gθ (s); Transfer functions of horizontal system, vertical system, and rotation system controllers 38, 35, and 36, jj) Hx (s) tH2 (s) tHθ (S); Horizontal system,
Vertical system and rotation system detection/compensation circuits 37, 33, 340
Transfer function, (however, each input is X.

, 20yθ. ) iii) DθX(s); transfer function of the horizontal one-rotation separation control circuit 40, iv) Dθx(s); transfer function of the vertical one-rotation separation control circuit 39, v) PXX(s), Pxθ(s), Pθx (s), Pθ
θ(s), Pθ2(s), P2θ(s), Pzz(s)
: control signal uxt.

Control amount X from θ, Uz. , forward equivalent transfer function up to θtzo, Defining the transfer function as above, the conditions for the control system shown in Fig. 7 to be separated into three independent feedback control systems: horizontal system, vertical system, and rotation system. is as follows.

Rewriting this gives the following formula.

DθX(s)・Pθθ(s)=Pox(s)...
...(7) Dθ2(s)・Pθθ(s)=Pθ2(
(8) In the control system shown in Fig. 7, the response of each control amount to the output ΔeX' of the horizontal system controller 38' is as follows when the horizontal one-rotation separation control circuit 40' is not added. is as follows.

xo=Pxx(s)Δex・・・・・・・・・・(9
)θ=-PθX(s)Δex'・・・・・・・・・(1
0) If the horizontal one-rotation separation control circuit 40' is added to this, the above-mentioned X is obtained.

, θ are as shown in the following equations. That is, θ is the above (5
) of the horizontal one-separation control circuit 40' so as to satisfy the equation
By setting x(s), it becomes independent of changes in ΔeX'.

Similarly, for the output Δex' of the vertical system controller 35', when the vertical one rotation separation control circuit 39' is not used, 2
.

, θ are as follows. z0=Pzz(s)Δez′
・・・・・・・・・・・・(13) θ=Pθz(s)Δ
ez' (14) On the other hand, if the vertical one-rotation separation control circuit 39' is used, the above 2 is achieved.

, θ are as shown in the following equations. zo={Pzz(s)−
DOzPzθ(s)}Δez, that is, θ is the above (6)
D of the vertical one-rotation separation control circuit 39' so as to satisfy the equation.
By setting θ2(s), changes in Δe2′ become irrelevant.

Also, X with respect to the output Δeθ' of the rotation system controller 36'.

The responses of +ZOtθ are as shown in the following equations.

x0=PxO(s)Δeo′・・・・・・・・・・・・(
17) zo=P2o(s)Δeo'・・・・・・・・・
...(18) θ=Pθθ(s)Δeθ/・・・・・・・
...(19) And both separation control circuits 39', 40
', the rotational output θ is influenced by deviation signals ΔeX' and Δe2' from the horizontal system and the rotational system in addition to Δeθ', and is expressed as θ-PθθΔeO'+{PB2(s)-D.

2(s)Pθ0(s)}Δe2′ten{−Pθx(s)+
DθX(S)POθ(s)}Δex' (20).

However, the second and third terms on the right side of equation (20) are
Since both equations 2) and (16) are zero, θ1Pθθ regardless of the presence or absence of both separation control circuits 39' and 40'.
(S) Δeθ' (21).

Also, from FIG. 7, since θ=0 and Δeθ'=O when θC is zero, the influence of the rotational system error signal Δeθ' shown in equations (17) to (19) above disappears.

That is, the vertical one-rotation separation control circuit 39' and the horizontal one-rotation separation control circuit 4σ are connected as shown in FIG.
), the transfer function Dθx(
s), Dθ2(s), the outputs Δex', Δe2 of each controller 38', 35', 36'
', Δeθ' are the corresponding control amounts X.

, zQ, and θ, the control system shown in Fig. γ is separated into three independent control systems shown in Figs. 8 to 10, respectively.

However, Pz(s)t shown in Figures 8 to 10
PO(s)tPx(s) is expressed by each of the following equations.

Note that the present invention is not limited to the above-described embodiment; for example, in the circuit shown in FIG. 6, the vertical one-rotation separation control circuit 39 and the horizontal one-rotation separation control circuit 40 are Excitation force generation mechanism 32, 31
, 30 has been described, but in this case, both separation control circuits 39, 40 may be provided in front of each controller 35, 36, 3B, as shown in FIG.

In this case, the horizontal one-rotation separation control circuit 40 receives the horizontal system deviation signal Δex and becomes a circuit that generates a signal Δeox for correcting the input signal Uθ' of the rotational system controller 36, while the vertical one-rotation separation control circuit 39 uses the vertical system deviation signal Δe2 as human power, and the rotation system controller 36
This circuit generates a signal Δeθ2 for correcting the input signal Uθ′.

As explained above, according to the present invention, there is provided one or more vibration exciters that vibrate the vibration table in the horizontal direction, and a plurality of vibration exciters that vibrate the vibration table in the vertical direction. Each detection signal detected in accordance with the horizontal movement, vertical movement, and rotational movement of the above-mentioned vibration table and each vibration command signal in the horizontal direction, vertical direction, and rotational direction are inputted to horizontal, vertical, and rotational adders, respectively. a horizontal excitation force generation mechanism that generates an operation signal for operating the vibration table using the added and subtracted output signals;
In a control device for a vibration table, which is equipped with a horizontal feedback system, a vertical feedback system, and a rotational feedback system, each of which is configured to transmit the horizontal, vertical, and rotational force to the vertical excitation force generation mechanism and the rotational force generation mechanism, respectively. A horizontal/rotational separation control device and/or a vertical/rotation separation control device are installed between the adder and the horizontal excitation force generation mechanism, vertical excitation force generation mechanism, and rotational force generation mechanism, and the above-mentioned The horizontal and rotational separation control device receives the control signal output from the horizontal adder, generates an operation signal to cancel the disturbance from the horizontal feedback system, and applies it to the rotational force generation mechanism. and above vertical,
The rotation separation control device receives the control signal output from the vertical adder, generates an operation signal to cancel the disturbance from the vertical feedback system based on the control signal, and applies it to the rotational force generation mechanism. This makes it easy to control horizontal and vertical excitation simultaneously and independently, and also prevents mutual interference between horizontal, vertical, and rotational excitations up to a high frequency range. It is possible to provide a control device for a vibration table that can be performed in a small number of conditions, has high accuracy in vibration control, does not require frequent circuit adjustment of the device, and is compact in size.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing the general configuration of a shaking table, FIGS. 2 and 3 are diagrams for explaining the operation of the above-mentioned imaging table, and FIG. 4 is a diagram of a conventional shaking table control device. Fig. 5 is a block diagram of an embodiment of the present invention, Fig. 6 is a block diagram of a rewritten version of the circuit of the above embodiment, Fig. 7 is a block diagram of an applied example of the present invention, and Figs. FIG. 10 is a diagram used to explain each of the above-mentioned application examples, and FIG. 11 is a configuration diagram of an embodiment of the pond of the present invention. DESCRIPTION OF SYMBOLS 1...Table, 2...Excited object, 3...Horizontal vibrator, 4...Vertical vibrator, 20...Vertical vibrator control circuit, 21...Horizontal excitation Vibrator control circuit, 28... Separation control circuit, 30... Horizontal excitation force generation mechanism, 31...
Rotational torque generation mechanism, 32... Vertical excitation force generation mechanism,
33... Vertical translational motion detection/compensation circuit, 34... Rotational motion detection/compensation circuit, 35... Vertical system controller, 36... Rotation system controller, 37... Horizontal translational motion. Detection/compensation circuit, 38...Horizontal system controller.

Claims (1)

[Claims] 1. It has one or more vibration exciters that vibrate the vibration table in the horizontal direction, and a plurality of vibration exciters that vibrates the vibration table in the vertical direction. The above-mentioned vibration table receives an output signal obtained by adding and subtracting each detection signal detected according to each rotational motion and each vibration command signal in the horizontal, vertical, and rotational directions using horizontal, vertical, and rotational adders. A horizontal feedback system, a vertical feedback system, and a rotational direction feedback system configured to transmit operation signals to the horizontal excitation force generation mechanism, vertical excitation force generation mechanism, and rotational force generation mechanism, respectively. In the control device for the shaking table equipped with the above-mentioned horizontal,
A horizontal/rotational separation control device and/or a vertical/rotation separation control device are installed between each of the vertical and rotational adders and the horizontal excitation force generation mechanism, vertical excitation force generation mechanism, and rotational force generation mechanism. The horizontal and rotational separation control device receives the control signal output from the horizontal adder and generates an operation signal for canceling the disturbance from the horizontal feedback system to the rotational force generating mechanism. Given this, the vertical and rotational separation control device receives the control signal output from the vertical adder and uses this control signal to generate an operation signal that cancels the disturbance from the vertical feedback system. A control device for a vibration table, characterized in that this is added to a force generation mechanism.