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JPS5847016B2 - Self-diagnosis method for surface inspection equipment - Google Patents
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JPS5847016B2 - Self-diagnosis method for surface inspection equipment - Google Patents

Self-diagnosis method for surface inspection equipment

Info

Publication number
JPS5847016B2
JPS5847016B2 JP15260277A JP15260277A JPS5847016B2 JP S5847016 B2 JPS5847016 B2 JP S5847016B2 JP 15260277 A JP15260277 A JP 15260277A JP 15260277 A JP15260277 A JP 15260277A JP S5847016 B2 JPS5847016 B2 JP S5847016B2
Authority
JP
Japan
Prior art keywords
signal
circuit
inspected
inspection
flaw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15260277A
Other languages
Japanese (ja)
Other versions
JPS5484784A (en
Inventor
豊史 丸山
信正 大屋
祥郎 冨岡
茂 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Steel Corp
Original Assignee
Fujitsu Ltd
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Steel Corp filed Critical Fujitsu Ltd
Priority to JP15260277A priority Critical patent/JPS5847016B2/en
Publication of JPS5484784A publication Critical patent/JPS5484784A/en
Publication of JPS5847016B2 publication Critical patent/JPS5847016B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

【発明の詳細な説明】 本発明は、表面検査装置の正常、異常を検査する自己診
断方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a self-diagnosis method for testing whether a surface inspection device is normal or abnormal.

展延された圧延鋼板などの検査体の表面疵は勿論好まし
からざるものであり、程度によっては製品を不良にして
しまう。
Surface flaws on an object to be inspected, such as a rolled steel plate, are of course undesirable, and depending on the degree, they can make the product defective.

そして疵はそれぞれ特定の原因によって発生し、早期発
見してその疵の原因を除去してしまわないと同種の疵を
持つ製品が多量に発生し、それらがすべて不良品となっ
て大きな経済的損失を与えることがある。
Each flaw is caused by a specific cause, and if the cause of the flaw is not detected early and the cause of the flaw is removed, a large number of products with the same type of flaw will occur, all of which will become defective, resulting in large economic losses. may be given.

そこで種々の表面疵検査装置が開発され、実施されてい
る。
Therefore, various surface flaw inspection devices have been developed and put into practice.

本出願人が特願昭5l−86387(特公昭57−35
788号)号で提案した表面検査装置もその1つで、こ
れは高速移動中の帯状被検査体をストロボで照射してそ
の表面静止像を高解像度テレビカメラで撮像し、該カメ
ラからの画像信号をメモリおよび疵検出回路へ送る。
The present applicant filed Japanese Patent Application No. 51-86387 (Japanese Patent Publication No. 57-35
The surface inspection device proposed in No. 788) is one such device, which irradiates a strip-shaped object moving at high speed with a strobe, captures a still image of the surface with a high-resolution television camera, and then records the image from the camera. Sends the signal to the memory and flaw detection circuit.

メモリは1画面単位の画像信号を記憶するレコーダを複
数個備え、前記カメラからの画像信号を逐次書込まれ次
いで再生され、その後消去され、これらを互いに1タイ
ミングずつずれて繰り返している。
The memory is equipped with a plurality of recorders that store image signals for each screen, and the image signals from the camera are sequentially written, then reproduced, and then erased, and these processes are repeated with a one-timing shift from each other.

疵検出回路から疵検白信号が出力されると、該疵信号に
対応する画面の1画面分又は疵部分だけの画像信号を第
2のレコーダ群の1つへ入力し、該第2のレコーダから
モニタ装置へ適宜設定した時間の間該画像信号を出力し
、疵のある被検体表面を現示する。
When a flaw detection signal is output from the flaw detection circuit, an image signal of one screen or only the flaw portion of the screen corresponding to the flaw signal is inputted to one of the second recorder group, and the second recorder Then, the image signal is outputted to a monitor device for a suitably set time, thereby displaying the surface of the object to be inspected that has a flaw.

オペレータはこの画像を目視して疵検査を行い、記録、
警報等適宜の処置をとる。
The operator visually inspects this image, performs a flaw inspection, records the
Take appropriate measures such as warning.

同種の装置は本出願人が特願昭51−87017号、(
特公昭55−41077号)、特願昭51−87011
号(特公昭57−24503号)等で提案している。
A device of the same kind was proposed by the applicant in Japanese Patent Application No. 51-87017 (
Special Publication No. 55-41077), Patent Application No. 51-87011
(Special Publication No. 57-24503), etc.

ところでかSる表面検査装置はストリップミルなと帯材
製造現場に配設され、高温、多湿、粉塵等の悪環境で稼
動する場合が多いので、装置が正常に動作しているか否
か常に監視することが望ましい。
By the way, surface inspection equipment is installed at strip mills and other strip manufacturing sites, and is often operated in harsh environments such as high temperature, high humidity, and dust, so it is necessary to constantly monitor whether the equipment is operating properly. It is desirable to do so.

一方、製造される帯材は第1図に示すように先端および
尾端が変形していて製品にはならず、またこれらの端部
の製造ライン上の位置が不定であることが多いので、疵
検臼は端部では行なわず、帯材STの先端ST1から一
定長りだけ中に入った所ST2から行ない、尾端におい
ても同様にするのが普通である。
On the other hand, as shown in Figure 1, the tip and tail ends of manufactured strips are deformed and cannot be used as products, and the positions of these ends on the production line are often unstable. The flaw inspection is not carried out at the end, but is carried out from ST2, which is a certain length from the tip ST1 of the strip ST, and the same is usually done at the tail end as well.

本発明はこの点に着目し、長さLの準備期間においても
帯材両側縁を含んだ表面撮像および分析を行ない、該側
縁が検出されるか否かで表面検査装置の正常、異常を判
定しようとするものである。
The present invention focuses on this point, and performs surface imaging and analysis including both side edges of the strip even during the preparation period of length L, and determines whether the surface inspection device is normal or abnormal depending on whether the side edges are detected. This is what we are trying to judge.

この方法によれば、検査装置の遊び期間を利用して簡単
に、各帯材の表面検査毎に、かつその開始前に該装置の
正常、異常を自己診断することができ、信頼度の高い表
面検査を行なうことができる。
According to this method, it is possible to easily self-diagnose the normality or abnormality of the inspection device by using the idle period of the inspection device each time the surface inspection of each strip material is performed and before the start of the inspection, and it is highly reliable. Surface inspection can be performed.

本発明は移動中の被検査体の表面を瞬間照明する光源、
該被検査体表面の静止像を撮像するテレビカメラ、該カ
メラの出力画体信号から検査範囲設定信号を出力する回
路、該画像信号から被検査体のエツジおよび疵の有無に
応じてその疵の信号を含む検出信号を出力する欠陥検出
回路、および被検査体の先端から所定長の範囲に相当す
る準備期間後に前記検査範囲設定信号と前記検出信号に
よる表面検査を開始するタイミング信号を発生する回路
を備える表面検査装置の自己診断方法において、前記準
備期間中に前記欠陥検出回路のエツジおよび疵の有無に
応じてその疵の信号を含む検出信号の有無を検査し、該
検出信号がないとき表面検査装置異常を警報することを
特徴とするが、次に実施例を参照しながらこれを詳細に
説明する。
The present invention provides a light source that instantaneously illuminates the surface of a moving object to be inspected;
A television camera that captures a still image of the surface of the object to be inspected; a circuit that outputs an inspection range setting signal from the image signal output from the camera; a defect detection circuit that outputs a detection signal including a signal, and a circuit that generates a timing signal that starts a surface inspection using the inspection range setting signal and the detection signal after a preparation period corresponding to a predetermined length range from the tip of the object to be inspected. In the self-diagnosis method for a surface inspection device, the presence or absence of a detection signal including a signal of the flaw is inspected according to the presence or absence of an edge and flaw in the defect detection circuit during the preparation period, and when there is no detection signal, the surface The present invention is characterized in that it provides a warning of an abnormality in the inspection device, which will be described in detail below with reference to embodiments.

第2図は本発明の実施例を示し、STは熱間圧延される
ストリップなどの帯状の被検査体、LSは被検査体表面
を瞬間照射するストロボ装置などの光源、CMは被検査
体表面およびその周囲を撮像する高解像度テレビカメラ
、FSは被検査体の先端を検出するセンサである。
FIG. 2 shows an embodiment of the present invention, where ST is a strip-shaped object to be inspected such as a hot-rolled strip, LS is a light source such as a strobe device that instantaneously illuminates the surface of the object to be inspected, and CM is the surface of the object to be inspected. FS is a sensor that detects the tip of the object to be inspected.

またEDはエツジ(側縁)を検出回路、FDは欠陥検出
回路、WSは検査中を自動設定する回路、TGは検出開
始タイミング発生回路、AGは警報発生回路、01〜G
5はゲート回路、Flはフリップフロップ回路である。
Also, ED is an edge detection circuit, FD is a defect detection circuit, WS is a circuit that automatically sets the inspection status, TG is a detection start timing generation circuit, AG is an alarm generation circuit, 01 to G
5 is a gate circuit, and Fl is a flip-flop circuit.

エツジ検出、欠陥検出、自動巾設定各回路には適宜のも
のを用いてよいが、本出願人が特願昭51−87017
号「自動検出範囲設定回路」で説明した回路がその好ま
しい一例である。
Appropriate circuits may be used for edge detection, defect detection, and automatic width setting circuits.
A preferred example is the circuit described in the section entitled "Automatic Detection Range Setting Circuit".

この既提案のものは前記出願の明細書に詳述されている
が、その概要を述べると次の如くである。
This existing proposal is detailed in the specification of the above-mentioned application, and its outline is as follows.

テレビカメラCMからの画像信号Sgは第3図gに示す
如く、水平同期信号Synと、被検査体表面の画像信号
S1と、その周囲の画像信号S2と、場合により含まれ
る疵信号Nからなる。
As shown in FIG. 3g, the image signal Sg from the television camera commercial consists of a horizontal synchronizing signal Syn, an image signal S1 of the surface of the object to be inspected, an image signal S2 of its surroundings, and a flaw signal N included as the case may be. .

求めるのは疵信号Nであるから、これには信号Sgを微
分し、次いで全波整流して第3図すに示す信号を得、こ
の信号を被検査体の幅Wよりや\狭い期間Tの間開くゲ
ートに通せばよく、このようにすれば該ゲートからは第
3図Nに示す如く疵信号Nが得られる。
Since what is desired is the flaw signal N, the signal Sg is differentiated and then full-wave rectified to obtain the signal shown in Figure 3. In this way, a flaw signal N can be obtained from the gate as shown in FIG. 3N.

かかる操作を行なう回路は第4図に示す如くなり、この
図でCMは前記テレビカメラ、1は微分回路、2は全波
整流回路、3は被検査体のエツジから前記期間Tを求め
てこれを出力する回路、4はアンドゲートである。
The circuit that performs this operation is as shown in Figure 4, in which CM is the television camera, 1 is a differential circuit, 2 is a full-wave rectifier circuit, and 3 is a circuit that calculates the period T from the edge of the object to be inspected. 4 is an AND gate.

微分回路1および全波整流回路2は第2図の欠陥検出回
路FDに相当し、エツジ検出および検査範囲Tの設定回
路3は第2図のエツジ検出回路EDおよび自動巾設定回
路WSに相当する。
Differentiator circuit 1 and full-wave rectifier circuit 2 correspond to defect detection circuit FD in FIG. 2, and edge detection and inspection range T setting circuit 3 corresponds to edge detection circuit ED and automatic width setting circuit WS in FIG. .

エツジ検出は第3図Sgに示した如く、被検査体表面部
ではその周囲より画像信号のレベルが顕著に異なり、こ
れは疵や同期信号によるレベル変化より犬であるという
点を利用して行なうことができ、巾Wより狭い期間Tは
巾検出(エツジ検出)信号および画像信号を若干遅らせ
る等の信号処理により求めることができる。
Edge detection is performed by taking advantage of the fact that, as shown in Figure 3 Sg, the level of the image signal on the surface of the object to be inspected differs significantly from that around it, and that this is more sensitive than level changes caused by flaws or synchronization signals. The period T, which is narrower than the width W, can be determined by signal processing such as slightly delaying the width detection (edge detection) signal and the image signal.

第5図はその一例を示し、3aは分配器、3b、3cは
同じ遅延時間τを持つ遅延回路、3dは差動増幅器、3
eはシュミット回路、3fはフリップフロップである。
FIG. 5 shows an example, in which 3a is a distributor, 3b and 3c are delay circuits with the same delay time τ, 3d is a differential amplifier, 3
e is a Schmitt circuit, and 3f is a flip-flop.

テレビカメラCMの画像信号Sgは分配器3aにより一
方では遅延回路3bを介して差動増幅器3dの一方の入
力端に、他方では該差動増幅器3dの他方の入力端に直
接加えられる。
The image signal Sg of the television camera CM is directly applied by the distributor 3a to one input terminal of the differential amplifier 3d via the delay circuit 3b, and to the other input terminal of the differential amplifier 3d on the other hand.

第6図Sgは該画像信号Sgを示し、第6図e、fは増
幅器3dに加わる信号Sgの遅延された信号eおよび直
接信号fの各波形を示す。
FIG. 6 Sg shows the image signal Sg, and FIGS. 6 e and f show the waveforms of the delayed signal e and the direct signal f of the signal Sg applied to the amplifier 3d.

信号eは信号Sgを単に一定時間τだけ遅延させた信号
であるが、信号fはこの信号入力回路には一端開放の遅
延線3cが接続されているので2゛τ後に反射波の影響
が現われ、図示の如く立上り立下り部が2段になる。
The signal e is a signal obtained by simply delaying the signal Sg by a fixed time τ, but the signal f is affected by the reflected wave after 2゛τ because the delay line 3c with one end open is connected to this signal input circuit. As shown in the figure, there are two stages of rising and falling parts.

増幅器3dでこれらの信号eとfの差をとるとその結果
は第6図gに示す波形の信号gとなり、これをシュミッ
ト回路3eにおいてスレショルドレベルを図示Thのレ
ベルにして量刑すると該シュミット回路からは第6図り
に示す信号りが得られる。
When the amplifier 3d takes the difference between these signals e and f, the result is a signal g with the waveform shown in FIG. The signal shown in Figure 6 is obtained.

この信号りは図示の如くはゾ被検査体のエツジに対応す
るが始端の信号は遅延時間τだけ遅れており、従って両
エツジを示す信号りのパルス間々隔は被検査体の巾Wよ
りτだけ狭い。
As shown in the figure, this signal corresponds to the edge of the object to be inspected, but the signal at the beginning is delayed by the delay time τ, so the pulse interval of the signal indicating both edges is τ than the width W of the object to be inspected. Only narrow.

この信号りでフリップフロップをセット、リセットすれ
ば該回路3fからは第6図Cに示す検査範囲Tを示す信
号Cが得られる。
By setting and resetting the flip-flop using this signal, a signal C indicating the inspection range T shown in FIG. 6C is obtained from the circuit 3f.

次に第2図の回路の動作を説明すると、前述の如く、光
源LSは高速で移動する被検査体表面を瞬間照射し、テ
レビカメラは該表面の静止像を撮像し、画像信号Sgを
出力する。
Next, to explain the operation of the circuit shown in Fig. 2, as mentioned above, the light source LS instantaneously illuminates the surface of the object to be inspected moving at high speed, and the television camera captures a still image of the surface and outputs an image signal Sg. do.

信号Sgは欠陥検出回路FDで第3図すに示した同期信
号Syn、エツジ信号S3、および疵信号Nを含む信号
に変換され、この信号S5がアンドゲートG1の第1の
入力端に加わる。
The signal Sg is converted by the defect detection circuit FD into a signal including the synchronization signal Syn, edge signal S3, and flaw signal N shown in FIG. 3, and this signal S5 is applied to the first input terminal of the AND gate G1.

なおこの信号S5は例えばτ/2遅延させ、検査範囲T
が完全に被検査体の山内に入るようにする。
Note that this signal S5 is delayed by τ/2, for example, and the inspection range T
Make sure that it completely enters the inside of the test object.

また画像信号Sgはエツジ検出回路EDおよび自動巾設
定回路WSに加わり、これらの回路により検査範囲Tを
示す信号が出力され、これがアンドゲートG1の第2の
入力端に加わる。
The image signal Sg is also applied to the edge detection circuit ED and the automatic width setting circuit WS, and these circuits output a signal indicating the inspection range T, which is applied to the second input terminal of the AND gate G1.

この結果、該ゲートG1からは第3図す、c、dに示し
た態様で疵信号Nが出力されるが、この疵検出つまり表
面検査は被検査材STの先端ST1から所定長りだけ中
に入った所から開始される。
As a result, the flaw signal N is outputted from the gate G1 in the manner shown in FIG. It will start from where you enter.

即ち、先端検出センサFSは光電的その他により被検査
材の先端ST1を検出し、この先端検出信号S6は検出
開始タイミング発生回路TGに加わり、長さLに相当す
る時間だけ遅れて発生する信号S7に変換され、該信号
S7がアンドゲートG1に入力されてこれを開く。
That is, the tip detection sensor FS detects the tip ST1 of the inspected material by photoelectric or other means, and this tip detection signal S6 is applied to the detection start timing generation circuit TG, which generates a signal S7 delayed by a time corresponding to the length L. The signal S7 is input to the AND gate G1 to open it.

以上は既提案の表面検査装置の要部であるが、本発明で
はこれにゲートG2.G3.G、、G6、フリップフロ
ップF1および警報発生回路AGを加える。
The above are the main parts of the previously proposed surface inspection apparatus, but in the present invention, gate G2. G3. G, , G6, flip-flop F1 and alarm generating circuit AG are added.

ゲートG2.G3はインヒビットゲートであり、アンド
ゲートの一方の入力端がインバータになっている。
Gate G2. G3 is an inhibit gate, and one input terminal of the AND gate is an inverter.

ゲートG3は一方の入力端に先端検出信号S6を受け、
他方の反転入力端に信号S7を受ける。
The gate G3 receives the tip detection signal S6 at one input terminal,
The other inverting input terminal receives the signal S7.

従って該ゲートG3の出力は長さLの期間の間“1”、
以後“OF+となる信号S8を生じる。
Therefore, the output of the gate G3 is "1" for a period of length L;
Thereafter, a signal S8 which becomes "OF+" is generated.

この信号S8はアンドゲートG、の一つの入力端に加わ
り、該ゲートの他の入力端には信号S5およびブランキ
ング信号S9が入力される。
This signal S8 is applied to one input of an AND gate G, and the signal S5 and blanking signal S9 are input to the other input of the gate.

従って該ゲートG5は長さLの期間に開いて信号S5を
通すことになり、もし、光源LS、テレビカメラCM、
欠陥検出回路FD、それに加えて先端検出センサ、検出
開始タイミング発生回路TG等が正常なら、信号S5に
は必らず少なくとも大きな振幅のエツジ信号S3が含ま
れているので、この信号S3がフリップフロップF1に
メモリされその出力信号SIOがゲートG2をインヒビ
ットする。
Therefore, the gate G5 is opened during a period of length L to pass the signal S5, and if the light source LS, television camera CM,
If the defect detection circuit FD, the tip detection sensor, the detection start timing generation circuit TG, etc. are normal, the signal S5 always includes at least the edge signal S3 with a large amplitude. The output signal SIO stored in F1 inhibits gate G2.

従って該ゲートG2の出力はなく警報発生回路AGは作
動しない。
Therefore, there is no output from the gate G2 and the alarm generating circuit AG does not operate.

これに反して欠陥検出回路FDの出力がないとゲートG
2のインヒビットは行なわれず、従ってゲートG2はS
T後に出力を生じて警報発生回路AGを作動させる。
On the other hand, if there is no output from the defect detection circuit FD, the gate G
2 is not inhibited, so gate G2 is S
After T, an output is generated and the alarm generating circuit AG is activated.

欠陥検出回路FDの出力信号S5がないということは明
らかに異常であり、つまり光源LS、テレビカメラCM
、欠陥検出回路FDいずれかの故障であり、オペレータ
は該警報により直ちに適当な処置をとる。
The fact that there is no output signal S5 of the defect detection circuit FD is clearly abnormal, that is, the light source LS, television camera CM
, or defect detection circuit FD, and the operator immediately takes appropriate measures in response to the alarm.

以上詳細に説明したように本発明によれば、表面検査を
停止するなど表面検査に支障を与えることなく、被検査
体端部の非検査部分を利用して表面検査装置の正常、異
常をロフト単位で毎回検査することができる。
As described in detail above, according to the present invention, the normality and abnormality of the surface inspection device can be determined by using the non-inspection part at the end of the object to be inspected without interfering with the surface inspection such as by stopping the surface inspection. Each unit can be inspected each time.

なお非検査部分りを持たない被検査体に対しては該部分
りと同様な部分を設ければよく、この場合検査領域が短
かくなるという問題があるが、被検査体の長さが長大な
場合はこれは格別問題にはならない。
Note that for objects to be inspected that do not have non-inspection portions, a portion similar to the non-inspection portion may be provided.In this case, there is a problem that the inspection area becomes shorter, but if the length of the object to be inspected is long, In this case, this is not a particular problem.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は被検査体の一例の説明図、第2図は本発明の実
施例を示すブロック図、第4図および第5図は第2図の
各部の詳細を示すブロック図、第3図および第6図は第
4図および第5図の動作説明図である。 図面でSTは被検査体、LSは光源、CMはテレビカメ
ラ、ED、WSは検査範囲設定信号出力回路、FDは欠
陥検出回路、TGはタイミング信号発生回路、AGは警
報発生回路である。
FIG. 1 is an explanatory diagram of an example of an object to be inspected, FIG. 2 is a block diagram showing an embodiment of the present invention, FIGS. 4 and 5 are block diagrams showing details of each part of FIG. 2, and FIG. and FIG. 6 is an explanatory diagram of the operation of FIGS. 4 and 5. In the drawings, ST is an object to be inspected, LS is a light source, CM is a television camera, ED and WS are inspection range setting signal output circuits, FD is a defect detection circuit, TG is a timing signal generation circuit, and AG is an alarm generation circuit.

Claims (1)

【特許請求の範囲】[Claims] 1 移動中の被検査体の表面を瞬間照明する光源、該被
検査体表面の静止像を撮像するテレビカメラ、該カメラ
の出力画像信号から検査範囲設定信号を出力する回路、
該画像信号から被検査体のエツジおよび疵の有無に応じ
てその疵の信号を含む検出信号を出力する欠陥検出回路
、および被検査体の先端から所定長の範囲に相当する準
備期間後に前記検査範囲設定信号と前記検出信号による
表面検査を開始するタイミング信号を発生する回路を備
える表面検査装置の自己診断方法において、前記準備期
間中に前記欠陥検出回路のエツジおよび疵の有無に応じ
てその疵の信号を含む検出信号の有無を検査し、該検出
信号がないとき表面検査装置異常を警報することを特徴
とする表面検査装置の自己診断方法。
1. A light source that instantaneously illuminates the surface of a moving object to be inspected, a television camera that captures a still image of the surface of the object to be inspected, a circuit that outputs an inspection range setting signal from the output image signal of the camera,
a defect detection circuit that outputs a detection signal including a flaw signal according to the edge of the object to be inspected and the presence or absence of a flaw from the image signal; and the inspection after a preparation period corresponding to a predetermined length from the tip of the object to be inspected. In the self-diagnosis method for a surface inspection apparatus, which includes a circuit that generates a timing signal for starting a surface inspection using a range setting signal and the detection signal, the defect detection circuit detects an edge of the defect detection circuit during the preparation period according to the presence or absence of the defect. 1. A self-diagnosis method for a surface inspection device, the method comprising: inspecting for the presence or absence of a detection signal including a signal, and issuing an alarm for an abnormality in the surface inspection device when the detection signal is absent.
JP15260277A 1977-12-19 1977-12-19 Self-diagnosis method for surface inspection equipment Expired JPS5847016B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15260277A JPS5847016B2 (en) 1977-12-19 1977-12-19 Self-diagnosis method for surface inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15260277A JPS5847016B2 (en) 1977-12-19 1977-12-19 Self-diagnosis method for surface inspection equipment

Publications (2)

Publication Number Publication Date
JPS5484784A JPS5484784A (en) 1979-07-05
JPS5847016B2 true JPS5847016B2 (en) 1983-10-20

Family

ID=15543990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15260277A Expired JPS5847016B2 (en) 1977-12-19 1977-12-19 Self-diagnosis method for surface inspection equipment

Country Status (1)

Country Link
JP (1) JPS5847016B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62100415U (en) * 1985-12-16 1987-06-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62100415U (en) * 1985-12-16 1987-06-26

Also Published As

Publication number Publication date
JPS5484784A (en) 1979-07-05

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