JPS5941309B2 - Lens cap manufacturing method - Google Patents
Lens cap manufacturing methodInfo
- Publication number
- JPS5941309B2 JPS5941309B2 JP54133929A JP13392979A JPS5941309B2 JP S5941309 B2 JPS5941309 B2 JP S5941309B2 JP 54133929 A JP54133929 A JP 54133929A JP 13392979 A JP13392979 A JP 13392979A JP S5941309 B2 JPS5941309 B2 JP S5941309B2
- Authority
- JP
- Japan
- Prior art keywords
- metal shell
- top plate
- glass
- lens
- lens cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000011521 glass Substances 0.000 claims description 41
- 239000002184 metal Substances 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 description 20
- 239000006060 molten glass Substances 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/40—Optical elements or arrangements
- H10F77/413—Optical elements or arrangements directly associated or integrated with the devices, e.g. back reflectors
Landscapes
- Led Device Packages (AREA)
- Light Receiving Elements (AREA)
Description
【発明の詳細な説明】
この発明は光半導体装置用容器として用いられるレンズ
キャップの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a lens cap used as a container for an optical semiconductor device.
発光ダイオード、光トランジスタ、光導電素子等の光半
導体装置は、ステム上に半導体素子を固着し、上方から
レンズキャップを被せてステムに気密に固着封止した構
造を有し、半導体素子が発生した光をレンズキャップを
通してビーム状にして外部に照射したり、あるいは外部
の光をレンズキャップを通して集光して内部の半導体素
子に照射するようにしている。Optical semiconductor devices such as light emitting diodes, phototransistors, and photoconductive elements have a structure in which a semiconductor element is fixed onto a stem, a lens cap is placed from above, and the stem is hermetically sealed. Light is passed through the lens cap in the form of a beam and irradiated to the outside, or external light is focused through the lens cap and irradiated onto the internal semiconductor elements.
従来のレンズキャップは、第1図に示すように、筒状部
1aと、その下端のフランジ部2aと、上端の天板部3
aと、この天板部3aに形成された透孔4aとを有する
金属シェル5aの透孔4aにガラスレンズ6aを気密に
封着した構造のものや、第2図に示すように、筒状部I
bと、その下端のフランジ部2bと、上端の天板部3b
と、この天板部3bに形成された大径の透孔4bとを有
する金属シェル5bにガラスレンズ6bを気密に封着し
た構造のもの等がある。As shown in FIG. 1, a conventional lens cap has a cylindrical portion 1a, a flange portion 2a at its lower end, and a top plate portion 3 at its upper end.
A metal shell 5a having a hole 4a formed in the top plate 3a has a glass lens 6a hermetically sealed to the hole 4a, or a cylindrical structure as shown in FIG. Part I
b, the flange portion 2b at its lower end, and the top plate portion 3b at its upper end.
There is a structure in which a glass lens 6b is hermetically sealed to a metal shell 5b having a large diameter through hole 4b formed in the top plate portion 3b.
第1図のレンズキャップは、第3図に示すように、平板
状のグラファイト製の下部封着治具10土に全面に酸化
膜を形成した金属シェル5aを載置し、金属シェル5a
の天板部3a上に透明ガラス円板60aを載置し、上方
から凹部12を有するグラファイト製の上部封着治具1
1を被せた状態の組立体を用意し、また第2図のレンズ
キャップは、第4図に示すように、突出部21およびこ
の突出部21に凹部22を有するグラファイト製の下部
封着治具20の前記突出部21に全面に酸化膜を形成し
た金属シェル5bを被せ、金属シェル5bの上に透明ガ
ラス円板60bを載置し、金属シェル5bのフランジ部
2b土に円筒状のグラファイト製の上部封着治具23を
載置した組立体を用意し、中性または弱還元性雰囲気中
において約1000℃に加熱して、透明ガラス円板60
aまたは60bを溶融させ、金属シェル5aまたは5b
に溶着させて製造されている。As shown in FIG. 3, the lens cap shown in FIG.
A transparent glass disc 60a is placed on the top plate 3a of the graphite upper sealing jig 1 having a recess 12 from above.
The lens cap shown in FIG. 2 is assembled with a lower sealing jig made of graphite having a protrusion 21 and a recess 22 in the protrusion 21, as shown in FIG. A metal shell 5b on which an oxide film is formed on the entire surface of the protrusion 21 of 20 is covered, a transparent glass disk 60b is placed on the metal shell 5b, and a cylindrical graphite plate is placed on the flange 2b of the metal shell 5b. An assembly on which the upper sealing jig 23 of
a or 60b to melt the metal shell 5a or 5b
Manufactured by welding to.
第3図のような製造方法によれば、溶融ガラスの表面張
力によつて、ガラスレンズ6aの形状が、天板部3a土
では大きい曲率半径の半球状となり、また透孔4aの下
部では小さい曲率半径の半球状となる。According to the manufacturing method shown in FIG. 3, the shape of the glass lens 6a becomes a hemispherical shape with a large radius of curvature at the top plate portion 3a, and a small radius of curvature at the bottom of the through hole 4a due to the surface tension of the molten glass. It becomes a hemispherical shape with a radius of curvature.
一方、第4図のような製造方法によれば、溶融ガラスが
天板部3bの下方にも廻り込みかつ下部封着治具20の
突出部21に規制されて、ガラスレンズ6bの形状が、
天板部3bの上部および透孔4bの下部とも大きい曲率
半径の半球状となる。従つて、ガラスレンズ6aまたは
6bの天板部4aまたは4bからの突出寸法hlまたは
れ2が大きくなり、ガラスレンズ6aまたは6bの焦点
距離が短くなる。光半導体装置の種類ないし用途によつ
ては、ガラスレンズの焦点距離を長くしたい場合がある
。On the other hand, according to the manufacturing method shown in FIG. 4, the molten glass goes around below the top plate part 3b and is restricted by the protruding part 21 of the lower sealing jig 20, so that the shape of the glass lens 6b is
Both the upper part of the top plate part 3b and the lower part of the through hole 4b have a hemispherical shape with a large radius of curvature. Therefore, the protrusion dimension hl or 2 of the glass lens 6a or 6b from the top plate portion 4a or 4b becomes large, and the focal length of the glass lens 6a or 6b becomes short. Depending on the type or application of the optical semiconductor device, it may be desirable to increase the focal length of the glass lens.
そのような場合、例えば透明ガラス円板60aまたは6
0bの厚さt1またはT2を小さくすることが考えられ
る。ところが、透明ガラス円板の厚さを小さくすること
は、次の理由で不適当である。すなわち、第3図の方法
で薄いガラス円板を用いると、金属シエル5aとガラス
レンズ6aとが面封着のため、溶融ガラスが表面張力で
中心軸方向に引き寄せられて、所定のガラスレンズ形状
が得られなくなるのみならず、金属シエル5aとガラス
レンズ6aとの封着部パスが短くなり、気密不良や信頼
性低下が生じる。また、第4図の方法では、溶融ガラス
が表面張力によつて球状になつたときのガラス球の直径
が小さくなり過ぎて、ガラス球が透孔4bから落下して
金属シエル5bに全く流れないため、レンズキヤツプの
形状すら得られない場合が生ずるといつた問題点があつ
た。この発明はこのような問題点を解決するために提案
されたもので、金属シエルの天板部を中心軸に向つて斜
め下方に傾斜せしめておくことを特徴とする。以下、こ
の発明の一実施例を図面により説明すると、第5図はこ
の発明によつて製造されたレンズキヤツプの一実施例の
断面図を示し、5は筒状部1と、筒状部1の下端のフラ
ンジ部2と、筒状部1の上端の天板部3と、天板部3に
形成された透孔4とを有する鉄・ニツケル・コバルト合
金よりなる金属シエルで、前記天板部3は、中心軸に向
つて斜め下方に傾斜せしめられている。In such a case, for example, a transparent glass disk 60a or 6
It is possible to reduce the thickness t1 or T2 of 0b. However, reducing the thickness of the transparent glass disk is inappropriate for the following reasons. That is, when a thin glass disk is used in the method shown in FIG. 3, the metal shell 5a and the glass lens 6a are surface-sealed, so the molten glass is drawn toward the central axis by surface tension, forming a predetermined glass lens shape. Not only is this not possible, but the path of the sealed portion between the metal shell 5a and the glass lens 6a is shortened, resulting in poor airtightness and reduced reliability. In addition, in the method shown in Fig. 4, when the molten glass becomes spherical due to surface tension, the diameter of the glass sphere becomes too small, and the glass sphere falls from the through hole 4b and does not flow into the metal shell 5b at all. Therefore, there was a problem that even the shape of the lens cap could not be obtained in some cases. This invention has been proposed to solve these problems, and is characterized in that the top plate portion of the metal shell is inclined diagonally downward toward the central axis. Hereinafter, one embodiment of the present invention will be explained with reference to the drawings. Fig. 5 shows a cross-sectional view of one embodiment of the lens cap manufactured by the present invention, and numeral 5 indicates the cylindrical portion 1 and the cylindrical portion 1. A metal shell made of iron-nickel-cobalt alloy having a flange portion 2 at the lower end of the cylindrical portion 1, a top plate portion 3 at the upper end of the cylindrical portion 1, and a through hole 4 formed in the top plate portion 3. The portion 3 is inclined diagonally downward toward the central axis.
6はガラスレンズで、前記傾斜した天板部3の上面に気
密に融着されている。A glass lens 6 is hermetically fused to the upper surface of the inclined top plate 3.
このようなレンズキヤツプは次のようにして製造される
。Such a lens cap is manufactured as follows.
まず、第6図に示すように、平板状のグラフアイト製の
下部封着治具30と、金属シエル5の筒状部1が嵌入し
得る多数の凹部32を有するグラフアイト製の上部封着
治具31を用意する。そして、上部封着治具31を凹部
32が上側になるように支持しておき、各凹部32内に
透明ガラス円板60を挿入し、続いて全面に酸化膜を形
成した、または全面に酸化膜を形成したのち天板部3の
上面以外の不要部分の酸化膜を除去した金属シエル5を
天板部3を下側にして挿入し、上部封着治具31上に下
部封着治具30を重ね合わせて全体を引繰り返えす。す
ると、第6図に示すように、下部封着治具30上に金属
シエル5が載置され、金属シエル5上に透明ガラス円板
60が載置され、金属シエル5および透明ガラス円板6
0に上部封着治具31が被せられた組立体が得られる。
この組立体全体を中性または弱還元性雰囲気中で約10
00℃に加熱し、透明ガラス円板60を溶融させ、金属
シエル5に溶着封止せしめてガラスレンズ6を形成する
。このような方法によれば、透明ガラス円板60が溶融
した際に、表面張力によつて球状になつても、透孔4の
内径が比較的小さいので、ガラス球が透孔4から脱落す
ることがなく、しかも溶融ガラスが傾斜した天板部3で
囲まれた部分に入り込むので、ガラスレンズ6の金属シ
エル5の上端からの突出寸法H3が小さくなる。例えば
、TO−18レンズキャップにおいて、金属シエル5の
天板部3の傾斜角度θを45゜、天板部3の傾斜深さd
を0.5mm1こした場合、第3図と同一厚さT3(=
t1)の透明ガラス円板60を用いても、前記突出寸法
H3は第1図の場合の%になる(H3=%h1)。この
発明によれば、次のような特長がある。First, as shown in FIG. 6, a flat lower sealing jig 30 made of graphite and an upper sealing jig made of graphite having a number of recesses 32 into which the cylindrical part 1 of the metal shell 5 can fit. A jig 31 is prepared. Then, the upper sealing jig 31 is supported so that the recesses 32 are on the upper side, a transparent glass disk 60 is inserted into each recess 32, and then an oxide film is formed on the entire surface, or an oxide film is formed on the entire surface. After the film is formed, the metal shell 5 from which unnecessary oxide films have been removed from the top surface of the top plate part 3 is inserted with the top plate part 3 facing downward, and the lower sealing jig 31 is placed on top of the upper sealing jig 31. 30 and repeat the whole thing. Then, as shown in FIG. 6, the metal shell 5 is placed on the lower sealing jig 30, the transparent glass disk 60 is placed on the metal shell 5, and the metal shell 5 and the transparent glass disk 6 are placed on the metal shell 5.
An assembly in which the upper sealing jig 31 is placed on the upper sealing jig 31 is obtained.
The entire assembly was heated in a neutral or slightly reducing atmosphere for about 10 min.
The glass lens 6 is formed by heating to 00° C. to melt the transparent glass disk 60 and sealing it to the metal shell 5 by welding. According to such a method, even if the transparent glass disc 60 becomes spherical due to surface tension when it is melted, the glass sphere will not fall out from the through hole 4 because the inner diameter of the through hole 4 is relatively small. Moreover, since the molten glass enters the area surrounded by the inclined top plate part 3, the protrusion dimension H3 of the glass lens 6 from the upper end of the metal shell 5 becomes small. For example, in a TO-18 lens cap, the inclination angle θ of the top plate portion 3 of the metal shell 5 is 45°, and the inclination depth d of the top plate portion 3 is 45°.
When 0.5mm1 is removed, the same thickness T3 as in Fig. 3 (=
Even if the transparent glass disk 60 of t1) is used, the protrusion dimension H3 will be % of that in FIG. 1 (H3=%h1). According to this invention, there are the following features.
1.傾斜した天板部3の傾斜角度θや深さdを変更する
ことによつて、ガラスレンズ6の金属シエル5の上端か
らの突出寸法H3、すなわち焦点距離を任意に設定でき
る。1. By changing the inclination angle θ and the depth d of the inclined top plate portion 3, the protrusion dimension H3 of the glass lens 6 from the upper end of the metal shell 5, that is, the focal length can be arbitrarily set.
2.第3図に示す従来方法で使用していた封着治具10
および11と同一形状の封着治具30および31が使用
できる。2. Sealing jig 10 used in the conventional method shown in Fig. 3
Sealing jigs 30 and 31 having the same shape as and 11 can be used.
3.天板部3を傾斜させたことにより、金属シエル5の
全面に酸化膜を形成した状態でガラス封着が行なえるの
みならず、バレル研磨等によつて筒状部1の外周面等の
不要部分の酸化膜を除去した状態でガラス封着すること
も可能であり、溶融ガラスの流れを均一にできるため、
ガラスレンズ6の突出寸法hが均一になる。3. By slanting the top plate part 3, not only can glass sealing be performed with an oxide film formed on the entire surface of the metal shell 5, but also the outer peripheral surface of the cylindrical part 1 can be removed by barrel polishing or the like. It is also possible to seal the glass with the oxidized film removed, and the flow of molten glass can be made even.
The protrusion dimension h of the glass lens 6 becomes uniform.
4.3項の不要部分の酸化膜除去方法が採用できること
に基づいて、予備酸化増量を大きくとれ、金属シエル5
とガラスレンズ6との封着性が改善され、気密性および
信頼性が向上する。Based on the fact that the method for removing the oxide film from unnecessary parts described in Section 4.3 can be adopted, a large increase in the amount of preliminary oxidation can be achieved, and the metal shell 5
The sealing properties between the glass lens 6 and the glass lens 6 are improved, and airtightness and reliability are improved.
第1図および第2図は従来のレンズキヤツプの異なる例
の断面図、第3図および第4図はそれぞれ第1図および
第2図に示すレンズキヤツプの製造方法を説明するため
のガラス封着前の組立状態を示す断面図、第5図はこの
発明により製造されたレンズキヤツプの断面図、第6図
はこの発明の一実施例を説明するためのガラス封着前の
組立状態を示す断面図である。
1・・・・・・筒状部、2・・・・・・フランジ部、3
・・・・・・天板部、4・・・・・・透孔、5・・・・
・・金属シエル、6・・・・・・ガラスレンズ、30,
31・・・・・・封着治具、60・・・・・・透明ガラ
ス円板。Figures 1 and 2 are cross-sectional views of different examples of conventional lens caps, and Figures 3 and 4 are glass sealing diagrams for explaining the manufacturing method of the lens caps shown in Figures 1 and 2, respectively. FIG. 5 is a cross-sectional view of a lens cap manufactured according to the present invention; FIG. 6 is a cross-sectional view showing the assembled state before glass sealing for explaining an embodiment of the present invention. It is a diagram. 1... Cylindrical part, 2... Flange part, 3
...Top plate part, 4...Through hole, 5...
...Metal shell, 6...Glass lens, 30,
31...Sealing jig, 60...Transparent glass disc.
Claims (1)
明ガラス円板を載置し、加熱処理して前記透明ガラス円
板を溶融させて前記傾斜状天板部に融着させてガラスレ
ンズを形成するレンズキャップの製造方法。 2 前記金属シェルは、全面に酸化膜を形成したのち少
なくとも天板部外方端の酸化膜を除去したものである、
特許請求の範囲第1項記載のレンズキャップの製造方法
。[Scope of Claims] 1. A transparent glass disk is placed on a metal shell having an inclined top plate portion having a through hole, and the transparent glass disk is melted by heat treatment to form the inclined top plate portion. A method for manufacturing a lens cap that is fused to a glass lens to form a glass lens. 2. The metal shell is obtained by forming an oxide film on the entire surface and then removing the oxide film at least at the outer end of the top plate.
A method for manufacturing a lens cap according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54133929A JPS5941309B2 (en) | 1979-10-16 | 1979-10-16 | Lens cap manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54133929A JPS5941309B2 (en) | 1979-10-16 | 1979-10-16 | Lens cap manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5658287A JPS5658287A (en) | 1981-05-21 |
| JPS5941309B2 true JPS5941309B2 (en) | 1984-10-05 |
Family
ID=15116371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP54133929A Expired JPS5941309B2 (en) | 1979-10-16 | 1979-10-16 | Lens cap manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5941309B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4714485B2 (en) * | 2005-03-03 | 2011-06-29 | パナソニック株式会社 | Method for manufacturing window glass lid |
| JP6792439B2 (en) * | 2016-12-19 | 2020-11-25 | 新光電気工業株式会社 | Cap member and its manufacturing method and light emitting device |
-
1979
- 1979-10-16 JP JP54133929A patent/JPS5941309B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5658287A (en) | 1981-05-21 |
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