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JPS6160594B2 - - Google Patents
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JPS6160594B2 - - Google Patents

Info

Publication number
JPS6160594B2
JPS6160594B2 JP55183305A JP18330580A JPS6160594B2 JP S6160594 B2 JPS6160594 B2 JP S6160594B2 JP 55183305 A JP55183305 A JP 55183305A JP 18330580 A JP18330580 A JP 18330580A JP S6160594 B2 JPS6160594 B2 JP S6160594B2
Authority
JP
Japan
Prior art keywords
glass
outer ring
metal outer
temperature
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55183305A
Other languages
Japanese (ja)
Other versions
JPS57106184A (en
Inventor
Takeshi Wachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
Original Assignee
NEC Home Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd filed Critical NEC Home Electronics Ltd
Priority to JP55183305A priority Critical patent/JPS57106184A/en
Publication of JPS57106184A publication Critical patent/JPS57106184A/en
Publication of JPS6160594B2 publication Critical patent/JPS6160594B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/8506Containers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/855Optical field-shaping means, e.g. lenses

Landscapes

  • Joining Of Glass To Other Materials (AREA)
  • Led Device Packages (AREA)

Description

【発明の詳細な説明】 この発明は金属外環内に透明ガラスを気密に封
着してなる気密窓の製造方法に関し、特に光半導
体装置等の小型電子部品のレンズキヤツプの製造
方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing an airtight window in which a transparent glass is hermetically sealed within a metal outer ring, and more particularly to a method for manufacturing a lens cap for a small electronic component such as an optical semiconductor device.

発光ダイオードは例えば第1図および第2図に
示す構造を有する。図においては、1は気密端子
ステムで、コバール(鉄、ニツケル、コバルト合
金)よりなる円筒状の金属外環2内に、黒色のホ
ウケイ酸ガラス3を介して、偏平な頭部5を有す
るコバール製のリード線4を気密絶縁的に封着し
たものである。6は発光ダイオードペレツトで、
前記リード線4の頭部5上に半田により電気的か
つ機械的に固着され、その上面電極は金、アルミ
ニウム等の細線7を介して金属外環2の内面に接
続されている。8はレンズキヤツプで、コバール
よりなる金属外環9内に透明なホウケイ酸ガラス
10を気密に封着したものであり、このレンズキ
ヤツプ8は、金属外環9の下端を前記気密端子ス
テム1の金属外環2の上端に畔田11で固着され
ており、発光ダイオードペレツト6を気密に封止
している。
The light emitting diode has the structure shown in FIGS. 1 and 2, for example. In the figure, reference numeral 1 denotes an airtight terminal stem, which has a flat head 5 inserted into a cylindrical metal outer ring 2 made of Kovar (iron, nickel, and cobalt alloy) through a black borosilicate glass 3. The lead wire 4 is hermetically and insulatively sealed. 6 is a light emitting diode pellet,
It is electrically and mechanically fixed onto the head 5 of the lead wire 4 by solder, and its upper surface electrode is connected to the inner surface of the metal outer ring 2 via a thin wire 7 made of gold, aluminum, or the like. Reference numeral 8 designates a lens cap, in which a transparent borosilicate glass 10 is hermetically sealed within a metal outer ring 9 made of Kovar. It is fixed to the upper end of the metal outer ring 2 with a pad 11, and the light emitting diode pellet 6 is hermetically sealed.

前記レンズキヤツプ8は例えば、外径が2mm程
度と非常に小さいので、一般の冷凍機用気密窓の
ように、金属外環2内に透明ガラス円板を配置し
ておいて、透明ガラス円板の作業温度である約
1000℃で加熱してガラスを金属外環2に封着する
ことができない。そこで、次のようにして製造し
ている。まず、第3図に示すように、グラフアイ
ト製の封着治具12に金属外環9を嵌入し得る大
径の凹部13と、この凹部13の底面に凹部13
と同心状でかつ凹部13よりも小径の凹部14と
を設け、前記凹部13に、内面のみに酸化膜15
を形成した金属外環9を嵌入配置する。このよう
に内面のみに酸化膜15を形成した金属外環9は
例えば金属外環9の全表面に酸化膜15を形成し
たのち、この金属外環9をその内径よりも大径の
石とともにバレル内に収納して、バレルを回転し
て金属外環9の外周面および上下端面の酸化膜を
石および他の金属外環9によつて研磨除去するこ
とによつて製造できる。前記金属外環9の上に透
明ガラス円板10aを載置して、中性または弱還
元性雰囲気中で透明ガラス円板10aの作業温度
である約1000℃で加熱する。すると、透明ガラス
円板10aが軟化溶融して、第4図に示すよう
に、溶融ガラス10bが表面張力で球状になつ
て、金属外環9内に落下し、その周面部が酸化膜
15に濡れていつて、金属外環9の内面に融着さ
れる。このとき、溶融ガラス10bの量を適当に
設定しておくと、第5図に示すように、溶融ガラ
ス10bは封着治具12から浮き、かつ表面張力
によつて上下面とも凹面状になる。したがつて、
このまま冷却すると、第1図および、第2図に示
すようなレンズキヤツプ8が得られるのである。
Since the lens cap 8 has a very small outer diameter of, for example, about 2 mm, a transparent glass disk is placed inside the metal outer ring 2 like a general airtight window for a refrigerator. The working temperature is about
Glass cannot be sealed to metal outer ring 2 by heating at 1000°C. Therefore, it is manufactured as follows. First, as shown in FIG. 3, a large-diameter recess 13 into which the metal outer ring 9 can be fitted is formed in a sealing jig 12 made of graphite, and a recess 13 is formed on the bottom surface of this recess 13.
A recess 14 is provided concentrically with the recess 13 and has a smaller diameter than the recess 13, and an oxide film 15 is provided only on the inner surface of the recess 13.
The metal outer ring 9 formed with the metal outer ring 9 is inserted and arranged. The metal outer ring 9 with the oxide film 15 formed only on the inner surface is manufactured by, for example, forming the oxide film 15 on the entire surface of the metal outer ring 9, and then barreling the metal outer ring 9 together with a stone having a diameter larger than its inner diameter. The metal outer ring 9 can be manufactured by rotating the barrel and polishing off the oxide film on the outer peripheral surface and upper and lower end surfaces of the metal outer ring 9 using stones or other metal outer rings 9. A transparent glass disk 10a is placed on the metal outer ring 9 and heated at about 1000° C., which is the working temperature of the transparent glass disk 10a, in a neutral or weakly reducing atmosphere. Then, the transparent glass disk 10a softens and melts, and as shown in FIG. When wet, it is fused to the inner surface of the metal outer ring 9. At this time, if the amount of the molten glass 10b is set appropriately, the molten glass 10b will float from the sealing jig 12 and become concave on both the upper and lower surfaces due to surface tension, as shown in FIG. . Therefore,
When cooled in this state, a lens cap 8 as shown in FIGS. 1 and 2 is obtained.

ところで、上記のようにして製造したレンズキ
ヤツプ8においては、第6図および、第7図に示
すように、ガラス10の上下表面の周縁部に茶褐
色の膜16が形成されて、ガラス10の透明度を
低下させ、発光ダイオードの光束発散度を低下さ
せていた。
By the way, in the lens cap 8 manufactured as described above, as shown in FIG. 6 and FIG. This reduces the luminous flux divergence of the light emitting diode.

それゆえ、この発明の主たる目的は、ガラスの
上下両面に茶褐色の膜の付着がなく透明度が高い
レンズキヤツプ等の気密窓を提供することであ
る。
Therefore, the main object of the present invention is to provide an airtight window such as a lens cap that is free of brownish films on both the upper and lower surfaces of the glass and has high transparency.

この発明は要約すると、金属外環内にガラスを
作業温度で加熱して気密に封着したのち、酸処理
を施してガラス表面の膜を除去し、さらにガラス
の軟化点以上でかつ作業温度よりも100℃以上低
い温度で再加熱してガラス表面を滑らかな自由表
面にすることを特徴とする。
In summary, this invention involves heating the glass inside the metal outer ring at working temperature and sealing it airtight, then applying acid treatment to remove the film on the glass surface, and then heating the glass to a temperature that is above the softening point of the glass and below the working temperature. The glass surface is also characterized by being reheated at a temperature lower than 100°C to make the glass surface smooth and free.

この発明ゐ上述の目的およびその他の目的と特
徴は、以下に図面を参照して行なう詳細な説明か
ら一層明らかとなろう。
The above-mentioned objects and other objects and features of this invention will become more apparent from the detailed description given below with reference to the drawings.

まず、この発明の詳細な説明を行なう前に、前
記の茶褐色の膜の生成理由について考えてみる。
金属外環9は円筒状であり、一般に所定の内外径
の長尺のパイプ部材を適宜の寸法に切断して製作
されている。ところが、パイプ製作時に硫化モリ
ブデンやリン酸塩溶液等の潤滑剤が用いられてお
り、この潤滑剤パイプ製造時の強い成型圧力によ
つてパイプ部材の表面に強く擦り付けられる。し
かも、この潤滑剤は単にパイプ材の内外面に付着
するのみでなく、コバールの結晶粒界にも侵入し
ていく。このため、このパイプ材を切断して金属
外環9を製作し、酸洗い等の前処理を施して表面
を清浄化しても、結晶粒界に侵入した潤滑剤は除
去されることなく残存している。そこで、予備酸
化を施して金属外環9に酸化膜15を形成し、約
1000℃に加熱してガラス封着する際に、金属外環
9の結晶粒界に侵入していた潤滑剤が加熱によつ
て金属外環9の内外両面より滲出してくる。この
滲出してきた潤滑剤は溶融ガラス10bに不溶
で、かつ溶融ガラス10bよりも比重が小さいの
で、溶融ガラス10bの上下両面に浮いた状態で
流れて、茶褐色の膜16が形成されると考えられ
る。この膜16は甚しいときはガラス10の上下
両面全面に付着している。
First, before giving a detailed explanation of the present invention, let us consider the reason for the formation of the brownish-brown film.
The metal outer ring 9 has a cylindrical shape, and is generally manufactured by cutting a long pipe member with predetermined inner and outer diameters into appropriate dimensions. However, when manufacturing pipes, lubricants such as molybdenum sulfide and phosphate solutions are used, and the lubricants are strongly rubbed against the surface of the pipe member due to the strong molding pressure during pipe manufacturing. Furthermore, this lubricant not only adheres to the inner and outer surfaces of the pipe material, but also penetrates into the grain boundaries of Kovar. For this reason, even if this pipe material is cut to produce the metal outer ring 9 and the surface is cleaned by pretreatment such as pickling, the lubricant that has entered the grain boundaries remains without being removed. ing. Therefore, preliminary oxidation is performed to form an oxide film 15 on the metal outer ring 9, and approximately
When glass-sealing is performed by heating to 1000° C., the lubricant that has entered the grain boundaries of the metal outer ring 9 oozes out from both the inner and outer surfaces of the metal outer ring 9 due to the heating. Since this oozing lubricant is insoluble in the molten glass 10b and has a lower specific gravity than the molten glass 10b, it is thought that it flows in a floating state on both the upper and lower surfaces of the molten glass 10b, forming a brownish-brown film 16. . In severe cases, this film 16 adheres to the entire top and bottom surfaces of the glass 10.

上記膜16は弗酸等の酸液で洗うことにより除
去できることが確認されたが、膜16を除去した
のちのガラス10の上下両面は酸液によるエツチ
ング作用で微細な凹凸面となり、ガラス表面に白
い薄膜がかかつたような状態になつて、ガラス1
0の透明度が低下することが判明した。
It has been confirmed that the film 16 can be removed by washing with an acid solution such as hydrofluoric acid, but after the film 16 is removed, the upper and lower surfaces of the glass 10 become finely uneven surfaces due to the etching action of the acid solution, and the glass surface becomes A thin white film appears on the glass 1.
It was found that the transparency of 0 was reduced.

そこで、ガラス表面の微細な凹凸を再加熱によ
るガラス10の再溶融によつて平滑面とすべく、
前記封着条件と同一条件、すなわちガラス10の
作業温度である約1000℃で再加熱したところ、ガ
ラス10の上下両面に再び茶褐色の膜16が形成
された。このことは、上記茶褐色の膜16がガラ
ス10の上下両面の周縁部に生成されていること
からも、金属外環9の結晶粒界に侵入していた潤
滑剤が再加熱により再び滲出してくるという理論
でうまく説明できる。
Therefore, in order to make the fine irregularities on the glass surface smooth by remelting the glass 10 by reheating,
When the glass 10 was reheated under the same conditions as the above-mentioned sealing conditions, that is, at approximately 1000° C., which is the working temperature of the glass 10, a brown film 16 was again formed on both the upper and lower surfaces of the glass 10. This is also because the brown film 16 is formed on the peripheral edges of both the upper and lower surfaces of the glass 10, indicating that the lubricant that had entered the grain boundaries of the metal outer ring 9 oozes out again due to reheating. This can be well explained using the theory that

この発明は上記の現象および原因究明に基づい
て提案されたものであり、以下その一実施例を第
8図ないし第12図により説明する。まず、第8
図に示すように、封着治具12の凹部13内に、
内面のみに酸化膜15を形成した金属外環9を配
置し、この金属外環9上に透明ガラス円板10a
を載置して、全体を中性または弱還元性雰囲気中
で約1000℃加熱する。すると、前記第3図ないし
第5図で説明したように、透明ガラス円板10a
が溶融して、金属外環9に封着されて、第9図に
示すようなレンズキヤツプ8が得られる。このレ
ンズキヤツプ88のガラス10の上下両面には茶
褐色の膜16が生成されている。次にこのレンズ
キヤツプ8を、酸液、例えば弗酸、硫酸の混酸中
に1〜5分間程度浸漬して、ガラス10の表面に
生成されている膜16を除去する。このとき、ガ
ラス10の表面も酸液によるエツチング作用によ
つて除去されるため、第10図に示すように、ガ
ラス10の上下両面が微細な凹凸面17となり、
全体に白い薄い幕がかかつたようになりガラス1
0の透明度が低下する。そこで、このレンズキヤ
ツプ8を、第11図に示すように、再び封着治具
12の凹部13内に配置して、中性または弱還元
性雰囲気中において、ガラス10の溶融点以上で
かつ作業温度よりも低い温度、例えば700〜900℃
で再加熱する。すると、ガラス10の上下両面の
微細な凹凸面17の凸部が溶融して凹部を埋める
ため、第12図に示すように、ガラス10の上下
両面が平滑な自由表面18となつて、ガラス10
の透明度が非常に高くなる。
This invention has been proposed based on the above-mentioned phenomenon and investigation of its causes, and one embodiment thereof will be described below with reference to FIGS. 8 to 12. First, the 8th
As shown in the figure, in the recess 13 of the sealing jig 12,
A metal outer ring 9 with an oxide film 15 formed only on the inner surface is arranged, and a transparent glass disk 10a is placed on this metal outer ring 9.
and heat the whole thing to about 1000℃ in a neutral or weakly reducing atmosphere. Then, as explained in FIGS. 3 to 5, the transparent glass disk 10a
is melted and sealed to the metal outer ring 9 to obtain a lens cap 8 as shown in FIG. A brown film 16 is formed on both the upper and lower surfaces of the glass 10 of this lens cap 88. Next, the lens cap 8 is immersed in an acid solution, for example, a mixed acid of hydrofluoric acid and sulfuric acid, for about 1 to 5 minutes to remove the film 16 formed on the surface of the glass 10. At this time, the surface of the glass 10 is also removed by the etching action of the acid solution, so that both the upper and lower surfaces of the glass 10 become finely uneven surfaces 17, as shown in FIG.
Glass 1 appears as if a thin white curtain is covering the entire surface.
0 transparency decreases. Therefore, as shown in FIG. 11, this lens cap 8 is placed again in the recess 13 of the sealing jig 12, and the lens cap 8 is placed in a neutral or weakly reducing atmosphere at a temperature equal to or higher than the melting point of the glass 10. Temperature lower than temperature, e.g. 700-900℃
Reheat. Then, the convex portions of the finely uneven surfaces 17 on both the upper and lower surfaces of the glass 10 melt and fill the concave portions, so that both the upper and lower surfaces of the glass 10 become smooth free surfaces 18, as shown in FIG.
The transparency becomes very high.

こゝで、再加熱温度がガラス10の軟化点より
も低いと、ガラス10の微細な凹凸面17を平滑
な自由表面18にできないし、作業温度よりも
100℃未満しか低くない温度では、ガラス10全
体が完全に再溶融し、溶融ガラス10c中に再び
金属外環9の結晶粒界に侵入していた潤滑剤等が
滲出し、溶融ガラス10bの表面に浮くため、再
び茶褐色の膜16が生成される。そのため、再加
熱温度は、ガラス10の軟化点以上でかつ作業温
度よりも100℃以上低い温度に限定される。
Here, if the reheating temperature is lower than the softening point of the glass 10, the finely uneven surface 17 of the glass 10 cannot be made into a smooth free surface 18, and the reheating temperature is lower than the working temperature.
At a temperature lower than 100°C, the entire glass 10 is completely remelted, and the lubricant, etc. that had entered the grain boundaries of the metal outer ring 9 ooze out into the molten glass 10c, causing the surface of the molten glass 10b to ooze out. As a result, a brown film 16 is generated again. Therefore, the reheating temperature is limited to a temperature that is higher than the softening point of the glass 10 and lower than the working temperature by 100° C. or more.

なお、上記実施例は、発光ダイオード用のレン
ズキヤツプについて説明したが、他の光半導体装
置用レンズキヤツプ等の気密窓の製造にはすべて
適用できる。
Although the above embodiments have been described with respect to lens caps for light emitting diodes, they can be applied to the manufacture of airtight windows such as lens caps for other optical semiconductor devices.

この発明は以上のように、長尺の金属パイプ部
材を切断して金属外環を製作する工程と、金属外
環内にガラスを作業温度で気密に封着し、酸処理
を施してガラス表面の汚れを除去したのち、ガラ
スの軟化点以上でかつ作業温度よりも100℃以上
低い温度で再加熱することによつて、ガラスの透
明度が非常に高いレンズキヤツプ等の気密窓を製
造できるという効果を奏する。
As described above, this invention involves the steps of cutting a long metal pipe member to produce a metal outer ring, sealing the glass inside the metal outer ring airtight at working temperature, and applying acid treatment to the glass surface. After removing dirt from the glass, it is reheated at a temperature above the softening point of the glass and at least 100 degrees Celsius below the working temperature, which allows the production of airtight windows such as lens caps with extremely high glass transparency. play.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は発光ダイオードの一例の平面図、第2
図は第1図の−線に沿う断面図、第3図ない
し第5図はレンズキヤツプの従来の製造方法を説
明するための各段階における断面図、第6図は従
来法により製造したレンズキヤツプの平面図、第
7図は第6図の−線に沿う断面図、第8図な
いし第12図はこの発明によりレンズキヤツプを
製造する場合の実施例の各段階における断面図で
ある。 8……気密窓(レンズキヤツプ)、9……金属
外環、10……ガラス、10a……透明ガラス円
板、10b……溶融ガラス、12……封着治具、
16……茶褐色の膜、17……微細な凹凸面、1
8……平滑な自由表面。
Figure 1 is a plan view of an example of a light emitting diode, Figure 2 is a plan view of an example of a light emitting diode.
The figure is a cross-sectional view taken along the - line in Figure 1, Figures 3 to 5 are cross-sectional views at various stages to explain the conventional method of manufacturing a lens cap, and Figure 6 is a cross-sectional view of the lens cap manufactured by the conventional method. FIG. 7 is a sectional view taken along the - line in FIG. 6, and FIGS. 8 to 12 are sectional views at each stage of an embodiment of manufacturing a lens cap according to the present invention. 8... Airtight window (lens cap), 9... Metal outer ring, 10... Glass, 10a... Transparent glass disk, 10b... Molten glass, 12... Sealing jig,
16...brown film, 17...fine uneven surface, 1
8...Smooth free surface.

Claims (1)

【特許請求の範囲】 1 長尺の金属パイプ部材を切断して金属外環を
製作する工程と、 金属外環内にガラスを作業温度で気密に封着す
る工程と、 酸処理を施してガラス表面の汚れを除去する工
程と、 ガラスの軟化点以上でかつ作業温度よりも100
℃以上低い温度で再加熱する工程とを含む気密窓
の製造方法。 2 前記、金属外環は、内面のみに酸化膜が形成
されている、特許請求の範囲第1項記載の気密窓
の製造方法。 3 前記ガラスの封着工程が、金属外環上に透明
ガラス円板を載置しておいて実施される、特許請
求の範囲第1項記載の気密窓の製造方法。
[Claims] 1. A process of cutting a long metal pipe member to produce a metal outer ring, a process of airtightly sealing glass inside the metal outer ring at working temperature, and acid treatment to produce a metal outer ring. The process of removing surface dirt and the temperature above the softening point of glass and 100℃ below the working temperature.
A method for manufacturing an airtight window, comprising a step of reheating at a temperature lower than ℃. 2. The method of manufacturing an airtight window according to claim 1, wherein the metal outer ring has an oxide film formed only on its inner surface. 3. The method of manufacturing an airtight window according to claim 1, wherein the glass sealing step is carried out with a transparent glass disk placed on a metal outer ring.
JP55183305A 1980-12-24 1980-12-24 Manufacture of airtight window Granted JPS57106184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55183305A JPS57106184A (en) 1980-12-24 1980-12-24 Manufacture of airtight window

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55183305A JPS57106184A (en) 1980-12-24 1980-12-24 Manufacture of airtight window

Publications (2)

Publication Number Publication Date
JPS57106184A JPS57106184A (en) 1982-07-01
JPS6160594B2 true JPS6160594B2 (en) 1986-12-22

Family

ID=16133349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55183305A Granted JPS57106184A (en) 1980-12-24 1980-12-24 Manufacture of airtight window

Country Status (1)

Country Link
JP (1) JPS57106184A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4679264B2 (en) * 2005-06-27 2011-04-27 パナソニック株式会社 Lens cap manufacturing method
JP4978220B2 (en) * 2007-02-05 2012-07-18 セイコーエプソン株式会社 Piezoelectric vibrator and manufacturing method thereof

Also Published As

Publication number Publication date
JPS57106184A (en) 1982-07-01

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