JPS6042413B2 - Emission spectroscopy method - Google Patents
Emission spectroscopy methodInfo
- Publication number
- JPS6042413B2 JPS6042413B2 JP14643080A JP14643080A JPS6042413B2 JP S6042413 B2 JPS6042413 B2 JP S6042413B2 JP 14643080 A JP14643080 A JP 14643080A JP 14643080 A JP14643080 A JP 14643080A JP S6042413 B2 JPS6042413 B2 JP S6042413B2
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- Prior art keywords
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- intensity
- emission
- content
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
- G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Description
【発明の詳細な説明】
この発明は、試料を放電発光させ試料中の被分析元素
のスペクトル線の強度からこの元素の含有量を測定する
発光分光分析方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an emission spectroscopic analysis method for emitting discharge light from a sample and measuring the content of the element to be analyzed from the intensity of the spectral line of the element in the sample.
発光分光分析方法は、試料と電極間に高電圧を印加し
て放電を生じさせ、その放電によりコンデンサーに蓄積
されたエネルギーを放出して試料の放電点及びその近傍
を気化励起させ、しかる後励起された成分原子から発す
るスペクトル強度を測定して定量を行なう分析方法であ
る。In the emission spectroscopic analysis method, a high voltage is applied between the sample and the electrode to generate a discharge, and the energy stored in the capacitor is released by the discharge to vaporize and excite the sample at the discharge point and its vicinity. This is an analysis method that performs quantitative determination by measuring the spectral intensity emitted from the component atoms.
この分析方法は、微量元素についても迅速に定量でき
る利点を有しているが、試料のミクロ的組成組織、形状
等の影響を受けて、放電点や気化励起量が各放電毎に異
なる。This analysis method has the advantage of being able to quickly quantify even trace elements, but the discharge point and the amount of vaporization excitation differ for each discharge due to the influence of the microscopic composition, shape, etc. of the sample.
このため一回毎の発光強度の再現性が極めて小さく、分
析精度が低い問題がある。 このことから従来は、多数
回の発光強度を積分することにより発光強度を平均化し
、あるいは更に内標準元素(含有量のすでにわかつてい
る元素)の積分値との比をとることにより分析精度の向
上を図るいわゆる積分法をおこなつている。For this reason, there is a problem in that the reproducibility of the luminescence intensity every time is extremely low and the accuracy of analysis is low. For this reason, in the past, analysis accuracy was improved by averaging the emission intensity by integrating the emission intensity many times, or by taking a ratio with the integrated value of an internal standard element (an element whose content is already known). We are using the so-called integral method to improve the results.
また別の方法として、多数回の発光強度の個々の伝一タ
をとつて代表値(たとえば強度の中央値)を求めて、こ
れを分析値に換算する方法がある。 これらの従来方法
は、試料中の被分析元素が均一の形態で含有されている
場合、分析精度を高めることができるが、鋼中のAlの
如く異なる形態のものが含まれ、それぞれの発光強度が
異なる場合、この被分析元素の分析精度が著しく劣化す
る。すなわち、鋼中のAfは、鉄に固溶した均一系Ae
と、A′203等の組成で鋼中に分散して存在する不均
一系Aeとの二つの形態に区別される。例えば不均一系
Afのほとんどない試料では、第1図の黒点に示すよう
に、従来の積分法による被分析元素(Ae)のスペクト
ル線の発光強度(S軸)とA′含有量(横軸)とが直線
的な比例関係を有する。これに対し不均一系Alがかな
り含まれる試料では、同図の白点に示すように同一のA
′含有量でも不均一系A′のほとんどない試料に比べて
、発光強度が相対的に高くなり、このためこの分だけ分
析値に誤差が生じる。このように強度が高くなる理由は
、放電初期に主に不均一系Aeへ選択放電が生じるため
である。Another method is to obtain a representative value (for example, the median value of the intensity) by taking individual transmissions of the emission intensity many times, and convert this into an analytical value. These conventional methods can improve analysis accuracy when the element to be analyzed is contained in a uniform form in the sample, but when elements in different forms are included, such as Al in steel, the emission intensity of each If they are different, the accuracy of analysis of the element to be analyzed will be significantly degraded. In other words, Af in steel is homogeneous Ae dissolved in iron.
and heterogeneous Ae, which exists dispersed in the steel with a composition such as A'203. For example, in a sample with almost no heterogeneous Af, as shown by the black dots in Figure 1, the emission intensity (S axis) of the spectral line of the analyte element (Ae) and the A' content (horizontal axis) are determined by the conventional integration method. ) has a linear proportional relationship. On the other hand, in a sample containing a considerable amount of heterogeneous Al, the same A
The luminescence intensity is relatively high compared to a sample with almost no heterogeneous system A' even in terms of content, and this causes an error in the analysis value. The reason why the intensity increases is that selective discharge mainly occurs in the heterogeneous system Ae at the initial stage of discharge.
従つて従来方法として、予備放電や異常高値の削除等の
処置を行なつて分析する方法もある。Therefore, as a conventional method, there is also a method of performing analysis after taking measures such as preliminary discharge and deletion of abnormally high values.
しかしこの場合もやはり均一系Afの場合に比べて発光
強度が高く、分析精度が低い。このことから本発明者は
、不均一系分析元素を含む試料の発光強度又は発光強度
比につき研究した結果、放電水準が異なると発光強度も
異なり、しかも不均一分析元素を含む割合が多くなれば
、その割合に応じて発光強度も大きくなることに着目し
た。However, in this case as well, the emission intensity is higher and the analysis accuracy is lower than in the case of homogeneous Af. Based on this, the present inventor conducted research on the emission intensity or emission intensity ratio of samples containing heterogeneous analytical elements, and found that the emission intensity differs when the discharge level is different, and that as the proportion of heterogeneous analytical elements increases, We focused on the fact that the emission intensity increases with the ratio.
本発明は、上述した知見にもとづいてなされたもでその
目的とするところは、予じめ異なる放電水準てスペクト
ル強度(又は強度比)を測定して、これら測定値から均
一系分析元素のみを含む試料のスペクトル強度に対応さ
せるための補正係数を求めておき、この補正係数にもと
づいて被分析元素のスペクトル強度を補正することによ
り、分析精度を高めることができる発光分光分析方法を
得んとするものである。The present invention was made based on the above-mentioned knowledge, and its purpose is to measure the spectral intensity (or intensity ratio) at different discharge levels in advance, and to identify only homogeneous analysis elements from these measured values. By determining a correction coefficient to correspond to the spectral intensity of the sample contained in the sample and correcting the spectral intensity of the analyte element based on this correction coefficient, we aim to obtain an emission spectroscopic analysis method that can improve analysis accuracy. It is something to do.
すなわち本発明は、被分析元素が均一に固溶した形態と
、不均一に分散した形態で含まれてる被分析元素の含有
量を発光分光分析にり測定するに際し、不均一に分散し
た元素による発光強度の増加分を、被分析元素が均一に
固溶しているときの発光強度に補正するための補正係数
Kを、被分析元素を均一に固溶した標準試料及び不均一
に分散する被分析元素を含む標準試料を異なる放電エネ
ルギ水準で発光分光分析することにより予め実験的に求
めておき、上記の異なる放電エネルギ水準で、被分析試
料の発光強度比Xa,Xbを測定して、被分析元素の発
光強度比Xを、として求めるこを特徴とする発光分光分
析方法てある。In other words, when measuring the content of an analyte element contained in a uniform solid solution form and a non-uniformly dispersed form by optical emission spectroscopy, the present invention is capable of The correction coefficient K for correcting the increase in luminescence intensity to the luminescence intensity when the analyte element is uniformly dissolved in solid solution is calculated using a standard sample in which the analyte element is uniformly dissolved in solid solution and a non-uniformly dispersed sample. The emission intensity ratio Xa, Xb of the sample to be analyzed is determined experimentally in advance by performing an emission spectroscopic analysis of a standard sample containing the analytical element at different discharge energy levels, and the emission intensity ratio Xa, Xb of the sample to be analyzed is determined at the above-mentioned different discharge energy levels. There is an emission spectroscopic analysis method characterized by determining the emission intensity ratio X of the analysis element as:
以下本発明方法を、第2図に示す分光分析装置にもとづ
いて説明する。まず発生したコントローラ1の電極2と
試料3との間に電圧を印加して、これらの間に放電を生
じさせる。The method of the present invention will be explained below based on the spectroscopic analyzer shown in FIG. First, a voltage is applied between the generated electrode 2 of the controller 1 and the sample 3 to generate a discharge between them.
この放電に際し、印加電圧、コンデンサ容量等で選定さ
れる放電エネルギ水準(以下放電水準という)は、中央
演算処理装置4にり発生コントローラ1に指示される。
放電により生じた光は、入口スリット5を通り、回折格
子6で各スペクトルに分けられ、特定スペクトル位置に
セットした複数の出口スリット7・・・・・・を通り、
光電子増倍管8により電流強度に変えられる。During this discharge, a discharge energy level (hereinafter referred to as a discharge level) selected based on the applied voltage, capacitor capacity, etc. is instructed by the central processing unit 4 to the generation controller 1.
The light generated by the discharge passes through an entrance slit 5, is divided into each spectrum by a diffraction grating 6, passes through a plurality of exit slits 7 set at specific spectral positions,
The photomultiplier tube 8 converts the current intensity into a current intensity.
この電流強度は、アナログ信号処理回路9により積分さ
れ、次いでアナログデジタル変換器10によりデジタル
化され、デジタルした信号は、中央演算処理装置4によ
り記憶装置11に記憶される。この中央演算処理装置4
では、各放電ごとに発光コントローラ1の放電水準を変
え、各放電水準ことの発光強度(電流強度)を順次上記
記憶装置11に記憶する。This current intensity is integrated by the analog signal processing circuit 9 and then digitized by the analog-to-digital converter 10, and the digitized signal is stored in the storage device 11 by the central processing unit 4. This central processing unit 4
Now, the discharge level of the light emission controller 1 is changed for each discharge, and the light emission intensity (current intensity) for each discharge level is sequentially stored in the storage device 11.
このように一定時間放電水準を変えてそれぞれの発光強
度を収集した後、個々の発光強度にもとづいて以下の如
くして被分析元素・の含有量を求める。まず、各放電毎
に被分析元素例えば鋼中のAeのAfのスペクトル線A
と既にその含有量が知られている内標準元素例えばFe
のスペクトル線Bとの強度比Xを求める。After collecting the respective luminescence intensities while changing the discharge level for a certain period of time in this way, the content of the analyte element is determined based on the individual luminescence intensities as follows. First, for each discharge, the spectral line A of the element to be analyzed, for example, Af of Ae in steel.
and an internal standard element whose content is already known, such as Fe.
Find the intensity ratio X with spectral line B.
2種類の放電水準A,b門でおこなつて場合、それぞれ
について代表値?,?(例えば平均値)を求める。If it is carried out at two discharge levels A and B, what are the typical values for each? ,? (e.g. average value).
これら代表値?,?は、それぞれ第3図の白点及び白三
角点に該当し、これら2つの値は、所定のA1含有量を
示す縦軸上に位置することになる。) これら代表値豆
,■を用いて第3図のX点に該当する補正強準岑?Xを
下式から求める。Are these representative values? ,? correspond to the white point and white triangular point in FIG. 3, respectively, and these two values are located on the vertical axis indicating the predetermined A1 content. ) Using these representative values, ■, make a correction that corresponds to point X in Figure 3? Find X from the formula below.
この式でKは、予じめ被分析元素を均一に固溶した標準
試料及び不均一に分散する被分析元素を含む標準試料で
求めた放電水準と強度比との関係にもとづいて実験的に
得られる値で、被分析元素の含有量が変わり、あるいは
その含有形態の割合が変わつても放電水準が同じである
ならば同じ値を示す。この式にり被分析元素の含有量及
び含有形態の割合が変わつても正確に補正強度代表xを
得ることができるのは、理論的に次の理由による。In this equation, K is determined experimentally based on the relationship between the discharge level and the intensity ratio determined in advance using a standard sample in which the analyte element is uniformly dissolved in solid solution and a standard sample containing the analyte element that is non-uniformly dispersed. The obtained value shows the same value even if the content of the element to be analyzed or the proportion of its content changes, if the discharge level is the same. The reason why it is possible to accurately obtain the corrected intensity representative x using this formula even if the content and proportion of the content form of the element to be analyzed changes is theoretically as follows.
すなわち1回の放電により励起発光する量(励起試料量
)Sは、各放電ごとにばらつきはあるが、平均的には、
放電エネルギーに依存する。従つて放電エネルギーの異
なる放電水準A,bにおいて励起試料量はSa,Sbと
異なることとなる。また励起された試料中の各成分は、
均一組成の場合は試料全体の組成と同一のものとなる。
従つて発光強度1は下式で示される。IFe:Feの発
光強度
しA′:SOe.A′の発光強度
CFe:Feの含有量
C,A′:SOeA′の含有量
S:励起試料量
又放電水準A,bにおいて発光強度と含有量の関係は、
下式で示される。In other words, the amount S of excited light emitted by one discharge (excited sample amount) varies from discharge to discharge, but on average,
Depends on discharge energy. Therefore, at discharge levels A and b having different discharge energies, the excited sample amounts are different from Sa and Sb. In addition, each component in the excited sample is
In the case of uniform composition, the composition is the same as that of the entire sample.
Therefore, the emission intensity 1 is expressed by the following formula. IFe: Emission intensity of Fe and A': SOe. Emission intensity of A' CFe: content of Fe, C, A': content of SOeA', S: excitation sample amount or discharge level A, b, the relationship between emission intensity and content is as follows:
It is shown by the formula below.
ただしIJ−。However, IJ-.
は、放電水準JにおけるX成分のj発光強度を示す。一
方鋼中に分散して存在する不均一系A′(1..,0f
A1)では、InsOfA′の励起試料量SIAfは、
俗択放電を受けたIぉ。represents the j emission intensity of the X component at the discharge level J. On the other hand, a heterogeneous system A' (1..,0f
In A1), the excited sample amount SIAf of InsOfA′ is
I received a popular discharge.
EAeの粒の全ての励起試料S!AfDと、その周辺の
励起された試料にj含まれるし,。′A′にる励起試料
量S,A′。との和となる。ここでS,A′0は平均的
には試料中のし,。EA′量に比例する。またS。All excited samples S of EAe grains! It is included in AfD and the surrounding excited sample. Excitation sample amount S, A' at 'A'. It becomes the sum of Here, S and A'0 are on average in the sample. It is proportional to the amount of EA'. S again.
AfEは、励起試料量Sと含有量ClA′に比例する。
一 − −2InS0′Aeの発光量はIn
SO′A′の、励起試料量に比例するため、(3)〜(
5)式を代人すると下式の如く変形される。AfE is proportional to the excited sample amount S and the content ClA'.
The luminescence amount of 1--2InS0'Ae is In
Since SO'A' is proportional to the amount of excited sample, (3) ~ (
5) When the formula is substituted, it is transformed as shown below.
ところで実際にAeの強度として得られる値1A1は、
固溶した均一系Ae((SO′A′)と分散した不均一
系Af(1μSO′A′)の発光強度の和である。By the way, the value 1A1 actually obtained as the intensity of Ae is
It is the sum of the emission intensities of the solid-dissolved homogeneous Ae ((SO'A')) and the dispersed heterogeneous Af (1 μSO'A').
従つて(6)式を代人して変形すると下式の如くなる。
覧61
又内標準比X(=IA′/IFe)は次式で表わせる。Therefore, when formula (6) is transformed by proxy, the following formula is obtained.
View 61
Further, the internal standard ratio X (=IA'/IFe) can be expressed by the following formula.
従つて放電水準A,bにおいて強度比Xa,Xbは次式
で表わせる。ここで、求める補正強度Yは、SO′Ae
(51nS0eA′の発光寄与を同じとするために下式
で示される。Therefore, at discharge levels A and b, the intensity ratios Xa and Xb can be expressed by the following equations. Here, the correction strength Y to be sought is SO'Ae
(In order to make the light emission contribution of 51nS0eA' the same, it is expressed by the following formula.
(9),(10)式からCllllAe/CFe,C!
A′/CFeを求めて(11)式に代人すると次式が得
られる。 K2−k′4−k″31SaSa.Sbここ
で ,53は定数であるか
Sb−Sa
ら、これをK(補正係数)とおくと、X=Xa+K(X
a−Xb)が得られる。From equations (9) and (10), CllllAe/CFe,C!
By finding A'/CFe and substituting it into equation (11), the following equation is obtained. K2-k'4-k''31SaSa.SbHere, are 53 constants?Sb-Sa, etc.If we set this as K (correction coefficient), then X=Xa+K(X
a-Xb) is obtained.
このよにしてxを求めた後、予じめ標準試料(均一系A
eのを含む試料)て作成した強度代表値と含有量との関
係式(例えば第1図の黒点をつなげた回帰線)からこの
試料中の被分析元素の含有量を求める。After determining x in this way, prepare a standard sample (homogeneous system A
The content of the analyte element in this sample is determined from the relational expression between the representative intensity value and the content (for example, a regression line connecting the black dots in FIG. 1) created using the sample containing e.g.
なお、上記(9),(10式から、各形態別の含有量C
SA′,CIAeを求めることもできる。In addition, from the above formulas (9) and (10), the content C of each form
It is also possible to obtain SA' and CIAe.
この発光分光分析方法によれば、放電水準により発光強
度の差に相違があることを利用して、含有形態による発
光強度を補正するので、不均一系形態元素を含む被分析
元素の分析精度が著しく向上する。According to this emission spectroscopic analysis method, the emission intensity depending on the content form is corrected by taking advantage of the difference in the emission intensity depending on the discharge level, so the analysis accuracy of analyte elements including heterogeneous morphological elements is improved. Significantly improved.
なお、本発明方法は、同一放電エネルギにおいて、、励
起試料量のばらつきが少ない場合、発光強度比に代えて
直接発光強度を用いるよにしてもよい。Note that in the method of the present invention, direct emission intensity may be used in place of the emission intensity ratio when there is little variation in the amount of excited sample at the same discharge energy.
次に本発明の詳細な説明する。Next, the present invention will be explained in detail.
実施例
全A′量が0.005〜0.07%(平均0.032%
)でAf2O3等の形態て含まれる不均一系Aeが0.
001〜0.012%(平均0.005%)含有する試
料31本について、本発明に係る分光分析をおこない、
下式にもとづいてその精度■を調べた。Example total A' amount is 0.005 to 0.07% (average 0.032%
), the heterogeneous Ae contained in the form of Af2O3 etc. is 0.
Spectroscopic analysis according to the present invention was performed on 31 samples containing 0.001 to 0.012% (average 0.005%),
The accuracy ■ was investigated based on the formula below.
x:分析値 c:標準値 N:試料数 その結果了=0.0025%と精度力塙かつた。x: analysis value c: Standard value N: Number of samples As a result, the accuracy was 0.0025%.
これに対し従来方法でおこなつた場合、1は0.001
〜0.012%(平均0.006%)と大きく、精度が
低かつた。なお、この実施例て放電水準(2種類)は以
下の条件とした。On the other hand, when using the conventional method, 1 is 0.001
The accuracy was as large as ~0.012% (average 0.006%), and the accuracy was low. In this example, the discharge levels (two types) were set as follows.
放電水準 また補正係数Kは2.2であつた。discharge level Further, the correction coefficient K was 2.2.
また比較のためにおこなつた従来方法とは、積分法によ
る分析方法である。以上の結果から明らかなように本発
明方法によれば、分析精度を著しく高めることができる
顕著な効果を奏する。The conventional method used for comparison is an analysis method using an integral method. As is clear from the above results, the method of the present invention has the remarkable effect of significantly increasing analysis accuracy.
第1図は、Af含有量と発光強度との関係を、均一系A
eのみからなる場合と、不均一系Afを含む場合とにつ
いてプロットで示した説明図、第2図は本発明方法の原
理説明図、第3図は各放電水準の発光強度代表値および
補正強度とAe含有量との関係をプロットで示した説明
図である。
1・・・・・・発光コントローラ、2・・・・・・電極
、3・・・試料、4・・・・・中央演算処理装置、6・
・・・・回析格子、8・・・・・・光電子増倍管、9・
・・・・アナログ信号処理回路、10・・・・アナログ
デジタル変換器、11・・・記憶装置。Figure 1 shows the relationship between Af content and emission intensity in a homogeneous system A.
Fig. 2 is an explanatory diagram of the principle of the method of the present invention, and Fig. 3 is a representative value of luminous intensity and corrected intensity for each discharge level. FIG. 3 is an explanatory diagram showing a plot of the relationship between Ae content and Ae content. DESCRIPTION OF SYMBOLS 1... Light emission controller, 2... Electrode, 3... Sample, 4... Central processing unit, 6...
...Diffraction grating, 8...Photomultiplier tube, 9.
...Analog signal processing circuit, 10...Analog-digital converter, 11...Storage device.
Claims (1)
した形態で含まれてる被分析元素の含有量を発光分光分
析により測定するに際し、不均一に分散した元素による
発光強度の増加分分を、被分析元素が均一に固溶してい
るときの発光強度に補正するための補正係数Kを、被分
析元素を均一に固溶した標準試料及び不均一に分散する
被分析元素を含む標準試料を異なる放電エネルギ水準で
発光分光分析することにより予め実験的に求めておき、
上記の異なる放電エネルギ水準で、被分析試料の発光強
度比Xa、Xbを測定して、被分析元素の発光強度比X
を、X=Xa+K(Xa−Xb) として求めるこを特徴とする発光分光分析方法。[Scope of Claims] 1. When measuring the content of an analyte element contained in a uniform solid solution form and a non-uniformly dispersed form by optical emission spectrometry, a non-uniformly dispersed element The correction coefficient K is used to correct the increase in luminescence intensity due to the increase in luminescence intensity to the luminescence intensity when the analyte element is uniformly dissolved in solid solution. experimentally determined in advance by performing emission spectroscopic analysis of a standard sample containing the element to be analyzed at different discharge energy levels;
At the above different discharge energy levels, the emission intensity ratio Xa, Xb of the sample to be analyzed is measured, and the emission intensity ratio
An emission spectroscopic analysis method characterized by determining the following as X=Xa+K(Xa-Xb).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14643080A JPS6042413B2 (en) | 1980-10-20 | 1980-10-20 | Emission spectroscopy method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14643080A JPS6042413B2 (en) | 1980-10-20 | 1980-10-20 | Emission spectroscopy method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5769231A JPS5769231A (en) | 1982-04-27 |
| JPS6042413B2 true JPS6042413B2 (en) | 1985-09-21 |
Family
ID=15407489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14643080A Expired JPS6042413B2 (en) | 1980-10-20 | 1980-10-20 | Emission spectroscopy method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6042413B2 (en) |
-
1980
- 1980-10-20 JP JP14643080A patent/JPS6042413B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5769231A (en) | 1982-04-27 |
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