JPS6365094B2 - - Google Patents
Info
- Publication number
- JPS6365094B2 JPS6365094B2 JP8090281A JP8090281A JPS6365094B2 JP S6365094 B2 JPS6365094 B2 JP S6365094B2 JP 8090281 A JP8090281 A JP 8090281A JP 8090281 A JP8090281 A JP 8090281A JP S6365094 B2 JPS6365094 B2 JP S6365094B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- chamber
- lower seal
- medium passage
- seal roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 230000000694 effects Effects 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 239000000498 cooling water Substances 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229920006311 Urethane elastomer Polymers 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
- B29C37/0089—Sealing devices placed between articles and treatment installations during moulding or shaping, e.g. sealing off the entrance or exit of ovens or irradiation rooms, connections between rooms at different pressures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
Landscapes
- Rolls And Other Rotary Bodies (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は塩化ビニール系のプラスチツクフイル
ム、シートあるいは被覆電線などを連続的に真空
状態でプラズマ処理する真空連続処理装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a continuous vacuum processing apparatus for continuously plasma processing vinyl chloride plastic films, sheets, coated electric wires, etc. in a vacuum state.
最近、真空処理室の前後に予備真空室を配置
し、段階的に真空圧力を下げて被処理物を連続的
に表面処理する装置が開発されている。
Recently, an apparatus has been developed in which preliminary vacuum chambers are disposed before and after a vacuum processing chamber, and the vacuum pressure is lowered stepwise to continuously surface-treat the workpiece.
この予備真空室は、上下方向に対接し、被処理
物の搬送方向に並置する一対のシールロールと、
このシールロールの一部に軸方向に沿つて連続的
に対接するリツプ部材およびサイドシールなどを
具えている。 This preliminary vacuum chamber includes a pair of seal rolls that face each other in the vertical direction and are juxtaposed in the conveyance direction of the processed material;
A part of this seal roll is provided with a lip member, a side seal, etc. that continuously oppose each other along the axial direction.
なお、この種の装置として関連するものには例
えば特開昭54−95672号が挙げられる。 Note that related devices of this type include, for example, Japanese Patent Application Laid-Open No. 54-95672.
一対のシールロールはリツプ部材あるいはサイ
ドシールとの摺動により発熱して温度が上昇し、
被処理物が熱的影響を受けて熱変形したり、また
被処理物の温度変化に起因して処理効果にバラツ
キが生じる。
A pair of seal rolls generates heat due to sliding with the lip member or side seal, and the temperature rises.
The processing effect may vary due to thermal deformation of the processing object due to thermal influence or changes in the temperature of the processing object.
本発明は、被処理物の熱変形および処理効果の
バラツキを防止するのに好適な真空連続処理装置
を提供することを目的とする。 SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum continuous processing apparatus suitable for preventing thermal deformation of a processed object and variation in processing effects.
本発明の特徴とするところは、一対のシールロ
ールのうち、一方又は両方のシールロールに軸方
向にのびる温度調節用媒体通路を穿設したもので
ある。
A feature of the present invention is that one or both of the pair of seal rolls is provided with a temperature regulating medium passage extending in the axial direction.
温度調節用媒体通路に冷却水を供給することに
よりシールロールの摺動による発熱を防止でき、
このため被処理物が熱的影響を受けて熱変形する
ことがなくなる。
By supplying cooling water to the temperature control medium passage, heat generation due to seal roll sliding can be prevented.
Therefore, the object to be processed will not be thermally deformed due to thermal influence.
以下本発明の一実施例を図面により説明する。 An embodiment of the present invention will be described below with reference to the drawings.
第１図および第２図において、１はプラスチツ
クフイルム例えば塩化ビニール系樹脂フイルムの
ように可撓性の被処理物Ｆを真空状態で連続的に
プラズマ処理する真空処理室、２は真空処理室１
の前方側に複数個配置される予備真空室、３は真
空処理室１の後方側に複数個配置される予備真空
室で、前記真空処理室１内はこれは接続する真空
ポンプ４により10-2トール程度の真空圧力に保持
するように排気管５を介して真空排気される。前
記予備真空室２，３内はこれに接続する真空ポン
プ６により前記真空処理室１内の真空圧力より若
干高く、かつ大気圧より段階的に減じる真空圧力
に保持するように排気管７を介して真空排気され
る。 1 and 2, 1 is a vacuum processing chamber in which a flexible workpiece F, such as a plastic film, for example, a vinyl chloride resin film, is subjected to continuous plasma treatment in a vacuum state; 2 is a vacuum processing chamber 1;
A plurality of preliminary vacuum chambers 3 are arranged on the front side of the vacuum processing chamber 1, and a plurality of preliminary vacuum chambers 3 are arranged on the rear side of the vacuum processing chamber 1 . It is evacuated through an exhaust pipe 5 to maintain a vacuum pressure of about 2 torr. The inside of the preliminary vacuum chambers 2 and 3 is maintained at a vacuum pressure slightly higher than the vacuum pressure inside the vacuum processing chamber 1 by a vacuum pump 6 connected thereto, and gradually reduced from atmospheric pressure through an exhaust pipe 7. and evacuated.
処理される被処理物Ｆは巻出装置８より前方側
の予備真空室２を経て真空処理室１へ送られ、そ
こでプラズマ処理された後、さらに後方側の予備
真空室３を経て巻取装置９で巻取られる。 The workpiece F to be processed is sent from the unwinding device 8 through the preliminary vacuum chamber 2 on the front side to the vacuum processing chamber 1, where it is subjected to plasma treatment, and then further passed through the preliminary vacuum chamber 3 on the rear side to the winding device. It is wound up at 9.
前記前方および後方予備真空室２，３は第３図
および第４図に示すように、上下一対のシールロ
ール１０，１１、ケース１２およびリツプ部材１
３、サイドピース１４などから構成されており、
以下にその詳細を説明する。 As shown in FIGS. 3 and 4, the front and rear preliminary vacuum chambers 2 and 3 are provided with a pair of upper and lower seal rolls 10 and 11, a case 12, and a lip member 1.
3. It is composed of side pieces 14, etc.
The details will be explained below.
第３図および第４図において、一方の上シール
ロール１０は金属たとえば鉄と、この鉄の表面に
固着される弾性体たとえばニトリルゴム、シリコ
ンゴム、ウレタンゴムなどのゴム１５により成つ
ており、他方の下シールロール１１は鉄のみから
成つている。この下シールロール１１には、軸方
向にのびる温度調節用媒体通路１６が設けられて
おり、この温度調節用媒体通路１６に外部から供
給される媒体例えば冷却水により下シールロール
１１は冷却される。前記ケース１２に固定された
リツプ部材１３は上下シールロール１０，１１の
外周面の軸方向に沿つて連続的に対接されてお
り、たとえばウレタンゴムなど耐摩耗性の大なる
ものを使用する。また、サイドピース１４はケー
ス１２および上下シールロール１０，１１の両端
側とハウジング１７との間に介在されている。前
記温度調節用媒体通路１６に接続する回転側の配
管と外部の固定側の配管はロータリジヨイント１
８により連結されている。 In FIGS. 3 and 4, one of the upper seal rolls 10 is made of a metal such as iron and an elastic body 15 such as nitrile rubber, silicone rubber, urethane rubber, etc. that is fixed to the surface of the iron; The lower seal roll 11 is made only of iron. This lower seal roll 11 is provided with a temperature adjustment medium passage 16 extending in the axial direction, and the lower seal roll 11 is cooled by a medium such as cooling water supplied to this temperature adjustment medium passage 16 from the outside. . The lip member 13 fixed to the case 12 is in continuous contact with the outer peripheral surfaces of the upper and lower seal rolls 10 and 11 along the axial direction, and is made of a highly wear-resistant material such as urethane rubber. Further, the side piece 14 is interposed between the housing 17 and both ends of the case 12 and the upper and lower seal rolls 10 and 11. The rotating side piping and the external fixed side piping connected to the temperature regulating medium passage 16 are connected to the rotary joint 1.
8.
上記の構成において、上下シールロール１０，
１１間のシールは、一方のシールロール１０のゴ
ム１５を被処理物Ｆを介して他方の下シールロー
ル１１に押付け、上シールロール１０のゴム１５
をたわませることにより施される。また、上下シ
ールロール１０，１１とリツプ部材１３間のシー
ルは、リツプ部材１３をそれぞれ上下シールロー
ルに押付けることにより施される。さらに、上下
シールロール１０，１１とサイドピース１４間の
シールは、サイドピース１４をバネなどを介して
ケース１２に押付けることにより施される。 In the above configuration, the upper and lower seal rolls 10,
11, the rubber 15 of one seal roll 10 is pressed against the other lower seal roll 11 via the workpiece F, and the rubber 15 of the upper seal roll 10 is pressed against the other lower seal roll 11 through the workpiece F.
It is applied by bending the Further, sealing between the upper and lower seal rolls 10, 11 and the lip member 13 is performed by pressing the lip member 13 against the upper and lower seal rolls, respectively. Further, sealing between the upper and lower seal rolls 10, 11 and the side piece 14 is performed by pressing the side piece 14 against the case 12 via a spring or the like.
このようにリツプ部材１３あるいはサイドピー
ス１４との間にシールを施す上下シールロール１
０，１１が摺動しても、下シールロール１１には
常にロータリジヨイント１８および温度調節用媒
体通路１６を介して冷却水が供給されているた
め、シールロールの摺動による発熱を防止するこ
とができる。このため、被処理物Ｆが熱的影響を
受けて熱変形をすることがない。また、被処理物
Ｆの温度変化に起因する処理効果のバラツキも防
止できる。 In this way, the upper and lower seal rolls 1 seal between the lip member 13 or the side piece 14.
0 and 11 slide, cooling water is always supplied to the lower seal roll 11 via the rotary joint 18 and the temperature regulating medium passage 16, so heat generation due to the sliding of the seal roll is prevented. be able to. Therefore, the object to be processed F is not thermally deformed due to thermal influence. Moreover, variations in the processing effect due to temperature changes of the object F to be processed can also be prevented.
尚、本発明の一実施例の説明においては、温度
調節用媒体通路を供給する媒体として冷却水を使
用しているが、媒体として蒸発などを使用した場
合には下記の効果を有する。 In the description of one embodiment of the present invention, cooling water is used as the medium for supplying the temperature regulating medium passage, but if evaporation or the like is used as the medium, the following effects can be obtained.
すなわち、温度調節用媒体通路に蒸発を供給す
ることによつてシールロールを加熱させ、真空処
理室内でのプラズマ処理に先だつて、被処理物の
成形歪みを解放することにより良好な処理成形品
を得ることができる。 In other words, the seal roll is heated by supplying evaporation to the temperature regulating medium passage, and the molded product is produced in good condition by releasing molding distortion of the processed object prior to plasma processing in the vacuum processing chamber. Obtainable.
また、プラズマ処理によつて生じた表活性点を
有する表面改質層は、大気中に暴露した場合に空
気酸化などによつて劣化する現象を生じるが、こ
れらの現象はプラズマ処理後、大気に暴露する以
前に、シールロールを加熱して熱処理効果を与え
ることにより防止できる。 In addition, the surface modified layer with surface active points generated by plasma treatment will deteriorate due to air oxidation when exposed to the atmosphere. This can be prevented by heating the seal roll to give it a heat treatment effect before exposure.
さらに、本発明の一実施例においては、温度調
節用媒体通路を下シールロールに設けた場合につ
いて説明したが、勿論上シーネロールに設けても
よい。 Further, in one embodiment of the present invention, a case has been described in which the temperature regulating medium passage is provided on the lower seal roll, but it may of course be provided on the upper seal roll.
本発明によれば、シールロールの温度を一定に
保持することができるため、被処理物の熱変形お
よび温度変化に起因する処理効果のバラツキを防
止することができる。
According to the present invention, since the temperature of the seal roll can be kept constant, it is possible to prevent variations in processing effects caused by thermal deformation and temperature changes of the object to be processed.
第１図は本発明装置の一実施例を示す概略縦面
図、第２図は第１図の概略平面図、第３図は本発
明装置における予備真空室のシール手段を説明す
るための断面図、第４図は第３図の４−４線断面
図である。
１……真空処理室、２，３……予備真空室、１
０……シールロール、１１……下シールロール、
１３……リツプ部材、１４……サイドピース、１
６……温度調節用媒体通路。
Fig. 1 is a schematic longitudinal view showing one embodiment of the device of the present invention, Fig. 2 is a schematic plan view of Fig. 1, and Fig. 3 is a cross section for explaining the sealing means of the preliminary vacuum chamber in the device of the present invention. 4 is a sectional view taken along the line 4--4 in FIG. 3. 1... Vacuum processing chamber, 2, 3... Preliminary vacuum chamber, 1
0...Seal roll, 11...Lower seal roll,
13...Rip member, 14...Side piece, 1
6...Temperature adjustment medium passage.
Claims (1)
空室を、上下一対のシールロールを被処理物の搬
送方向に複数組配置することにより形成し、前記
真空処理室で被処理物を連続的に処理する真空連
続処理装置において、前記一対のシールロールの
うち、一方又は両方のシールロールに軸方向にの
びる温度調節用媒体通路を穿設したことを特徴と
する真空連続処理装置。 ２ 温度調節用媒体通路をシールロールの軸心に
設けたことを特徴とする特許請求の範囲第１項記
載の真空連続処理装置。[Scope of Claims] 1. A vacuum processing chamber and a pre-vacuum chamber, the pre-vacuum chamber being formed by arranging a plurality of pairs of upper and lower seal rolls in the conveying direction of the workpiece, and the vacuum processing chamber A vacuum continuous processing apparatus for continuously processing a workpiece in a vacuum, characterized in that one or both of the pair of seal rolls is provided with a temperature regulating medium passage extending in the axial direction. Continuous processing equipment. 2. The vacuum continuous processing apparatus according to claim 1, wherein the temperature regulating medium passage is provided at the axis of the seal roll.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8090281A JPS57195748A (en) | 1981-05-29 | 1981-05-29 | Continuous vacuum treatment apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8090281A JPS57195748A (en) | 1981-05-29 | 1981-05-29 | Continuous vacuum treatment apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57195748A JPS57195748A (en) | 1982-12-01 |
| JPS6365094B2 true JPS6365094B2 (en) | 1988-12-14 |
Family
ID=13731294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8090281A Granted JPS57195748A (en) | 1981-05-29 | 1981-05-29 | Continuous vacuum treatment apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57195748A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60942A (en) * | 1983-06-17 | 1985-01-07 | Hitachi Ltd | Vacuum continuous processing equipment |
| CN103317638A (en) * | 2013-05-31 | 2013-09-25 | 吉铨精密机械(苏州)有限公司 | Preheat type thermal insulation board |
-
1981
- 1981-05-29 JP JP8090281A patent/JPS57195748A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57195748A (en) | 1982-12-01 |
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