JPS6245718B2 - - Google Patents
Info
- Publication number
- JPS6245718B2 JPS6245718B2 JP7501179A JP7501179A JPS6245718B2 JP S6245718 B2 JPS6245718 B2 JP S6245718B2 JP 7501179 A JP7501179 A JP 7501179A JP 7501179 A JP7501179 A JP 7501179A JP S6245718 B2 JPS6245718 B2 JP S6245718B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- output
- laser tube
- power supply
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 3
- 230000000087 stabilizing effect Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
本発明は、内部ミラー型冷陰極ガスレーザ管の
製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing an internal mirror type cold cathode gas laser tube.
従来のこの種のガスレーザ管は、第１図に示す
ように、レーザ管２の放電電流を供給するための
レーザ電源１の正極出力端を安定抵抗７′を通し
てレーザ管２のカソード５，５′に接続し、負極
出力端を安定抵抗７を通してレーザ管２のミラー
支持体３に接続し、レーザ管２のミラー４を支持
体３のスパツタにより汚し、レーザ出力９を低下
させ光検出器８の出力が規定値まで低下したとき
に、レーザ電源制御回路６によりレーザ電源をオ
フにして製造していた。 In a conventional gas laser tube of this kind, as shown in FIG. The negative output terminal is connected to the mirror support 3 of the laser tube 2 through the stabilizing resistor 7, and the mirror 4 of the laser tube 2 is contaminated by the spatter of the support 3, reducing the laser output 9 and the photodetector 8. When the output drops to a specified value, the laser power supply control circuit 6 turns off the laser power supply during manufacturing.
しかるに、この従来のガスレーザの製造方法で
は、レーザ管２のカソード５，５′を正極とする
ことから放電不安定を起しやすく、レーザ出力９
が規定値まで低下する以前に光検出器８の出力を
１時的低下させるため、レーザ出力９が規定値よ
り大きいガスレーザ管が製造されることがあつ
た。また、カソード５，５′を負極として正規の
放電を行つた場合のレーザ出力９は、前記のよう
にカソード５，５′を正極とする放電の場合のレ
ーザ出力より約１割〜２割減となることがあつた
りして、正確なレーザ出力調整が出来ない欠点が
あつた。 However, in this conventional gas laser manufacturing method, since the cathodes 5 and 5' of the laser tube 2 are used as positive electrodes, discharge instability tends to occur, and the laser output is 9.
In order to temporarily reduce the output of the photodetector 8 before the laser output power 9 decreases to the specified value, gas laser tubes with a laser output 9 greater than the specified value have sometimes been manufactured. In addition, the laser output 9 when normal discharge is performed with the cathodes 5, 5' as the negative electrodes is approximately 10% to 20% lower than the laser output when the discharge is performed with the cathodes 5, 5' as the positive electrodes as described above. This resulted in the drawback that accurate laser output adjustment was not possible.
本発明の目的はこれらの欠点を除去し、より正
確なレーザ出力調整を行えるガスレーザ管の製造
方法を提供することである。 The object of the present invention is to eliminate these drawbacks and provide a method for manufacturing a gas laser tube that allows for more accurate laser output adjustment.
本発明は、金属性ミラー支持体を有する内部ミ
ラー型冷陰極ガスレーザ管の製造において、ガス
レーザ管の放電電流を供給するためのレーザ電源
の正極をガスレーザ管の金属性ミラー支持体の一
方に接続し、ガスレーザ管の金属性ミラー支持体
の他の一方とカソードとに交互にレーザ電源の負
極を接続に放電させ出力を規定値になるまで調整
することを特徴とする。 In manufacturing an internal mirror type cold cathode gas laser tube having a metal mirror support, the present invention connects the positive electrode of a laser power source for supplying the discharge current of the gas laser tube to one of the metal mirror supports of the gas laser tube. , the negative electrode of the laser power source is alternately connected to the other side of the metal mirror support of the gas laser tube and the cathode to discharge the output, and the output is adjusted to a specified value.
次に本発明の一実施例について図面を参照しな
がら説明する。 Next, an embodiment of the present invention will be described with reference to the drawings.
第２図は本発明にかかるガスレーザ管製造に用
いる装置を示す、主電源１７の出力端をリレー１
６の接点ｃ，ａを通してレーザ電源１に接続し、
レーザ電源１の正極出力端を安定抵抗７を通して
レーザ管２のミラー支持体３に接続し、負極出力
端を安定抵抗７′、切換回路１０の接点ｃ，ｂを
通してレーザ管２のカソード５，５′に接続す
る。また光検出器８の出力端と基準電源１１の出
力端を比較増幅器１２に入力し、その出力を抵抗
１３を通してトランジスタ１４のベースに接続
し、リレー電源Vccにリレー１６とトランジスタ
１４のコレクタ、エミツタとを直列に接続し、ト
ランジスタ１４のコレクタ、エミツタとスイツチ
１５を並列に接続する。 FIG. 2 shows an apparatus used for manufacturing gas laser tubes according to the present invention, in which the output end of the main power supply 17 is connected to the relay 1
Connect to the laser power supply 1 through contacts c and a of 6,
The positive output terminal of the laser power source 1 is connected to the mirror support 3 of the laser tube 2 through the stabilizing resistor 7, and the negative output terminal is connected to the cathode 5, 5 of the laser tube 2 through the stabilizing resistor 7' and contacts c and b of the switching circuit 10. ′. In addition, the output terminal of the photodetector 8 and the output terminal of the reference power supply 11 are inputted to the comparison amplifier 12, and the output thereof is connected to the base of the transistor 14 through the resistor 13, and the collector and emitter of the relay 16 and the transistor 14 are connected to the relay power supply Vcc. are connected in series, and the collector and emitter of transistor 14 and switch 15 are connected in parallel.
このような構成において、スイツチ１５をON
にするとリレー１６が動作し、リレー接点ｃ，ａ
が閉じてレーザ電源１がONになる。ミラー支持
体３とカソード５′の間で放電が起り、ミラー
４，４′の間でレーザ発振を生じる。レーザ出力
９が光検出器８に入射し、光検出器８から光検出
電圧が出力され、比較増幅器１２により基準電源
１１の出力電圧と比較され差電圧が増幅され、ト
ランジスタ１４のベースに供給される。トランジ
スタ１４はONとなるのでスイツチ１５を開いて
もリレー１６は動作しつづける。またリレー１６
が動作すると、主電源１７は切換回路１０に供給
され、切換回路１０の接点ｃ，ａが閉じレーザ電
源１の負極は安定抵抗７′、切換回路１０の接点
ｃ，ａを通してミラー支持体３′に接続されレー
ザ管２はミラー支持体３，３′間で放電する。こ
の放電の際ミラー支持体３′の面積がカソード
５，５′に比べて小さいため、スパツタし、ミラ
ー４′を汚し、レーザ出力９を減少させる。切換
回路１０は数秒ごとに切換り、レーザ管２の放電
は支持体３とカソード５間の正常放電と、支持体
３，３′間のレーザ出力９を減少させるための放
電とを交互にくり返し、レーザ出力９が規定値ま
で減少して光検出器８の出力電圧が基準電源の出
力電圧より低くなると、比較増幅器１２の出力電
圧は零となり、従つてトランジスタ１４のベース
電圧が零となりトランジスタ１４はOFFとな
る。リレー１６は後帰し、リレー１６の接点ｃ，
ａは開となり、レーザ電源１切換回路１０が
OFFとなり、レーザ管２の放電が消える。レー
ザ出力９は支持体３とカソード５間の正常放電よ
り支持体３，３′間の放電の時に大きくなる傾向
にあるが、本発明では切換回路１０により放電を
切換ながらレーザ出力９を減少させるので正常放
電時のレーザ出力９を常に監視しながら調整で
き、規定値に正確に調整することができる。 In this configuration, switch 15 is turned on.
When it is set, the relay 16 operates and relay contacts c and a
is closed and laser power supply 1 is turned on. A discharge occurs between the mirror support 3 and the cathode 5', and laser oscillation occurs between the mirrors 4 and 4'. The laser output 9 enters the photodetector 8, and the photodetector 8 outputs a photodetection voltage, which is compared with the output voltage of the reference power supply 11 by the comparator amplifier 12, and the difference voltage is amplified and supplied to the base of the transistor 14. Ru. Since the transistor 14 is turned on, the relay 16 continues to operate even if the switch 15 is opened. Also relay 16
When the main power supply 17 is operated, the main power supply 17 is supplied to the switching circuit 10, contacts c and a of the switching circuit 10 are closed, and the negative electrode of the laser power supply 1 is connected to the mirror support 3' through the stabilizing resistor 7' and the contacts c and a of the switching circuit 10. The laser tube 2 discharges between the mirror supports 3 and 3'. During this discharge, since the area of the mirror support 3' is smaller than that of the cathodes 5, 5', spatter occurs, staining the mirror 4' and reducing the laser output 9. The switching circuit 10 switches every few seconds, and the discharge of the laser tube 2 alternates between a normal discharge between the support 3 and the cathode 5 and a discharge for reducing the laser output 9 between the supports 3 and 3'. , when the laser output 9 decreases to a specified value and the output voltage of the photodetector 8 becomes lower than the output voltage of the reference power supply, the output voltage of the comparator amplifier 12 becomes zero, and therefore the base voltage of the transistor 14 becomes zero and the voltage of the transistor 14 becomes zero. becomes OFF. The relay 16 returns, and the contact c of the relay 16,
a is open, and the laser power supply 1 switching circuit 10 is opened.
It turns OFF and the discharge of the laser tube 2 disappears. The laser output 9 tends to be larger during the discharge between the supports 3 and 3' than during the normal discharge between the support 3 and the cathode 5, but in the present invention, the laser output 9 is reduced while switching the discharge using the switching circuit 10. Therefore, the laser output 9 during normal discharge can be adjusted while constantly monitoring, and can be adjusted accurately to the specified value.
第１図は従来のガスレーザ管の製造方法の実施
に使用する装置を示すブロツク図、第２図は本発
明のガスレーザ管の製造方法の実施に使用する装
置を示すブロツク図である。
１……レーザ電源、２……レーザ管、３，３′
……ミラー支持体、４，４′……ミラー、５，
５′……カソード、６……レーザ電源制御回路、
７，７′……安定抵抗、８……光検出器、９……
レーザ出力、１０……切換回路、１１……基準電
源、１２……比較増幅器、１３……抵抗、１４…
…トランジスタ、１５……スイツチ、１６……リ
レー、１７……主電源。
FIG. 1 is a block diagram showing an apparatus used to carry out a conventional gas laser tube manufacturing method, and FIG. 2 is a block diagram showing an apparatus used to carry out a gas laser tube manufacturing method of the present invention. 1... Laser power supply, 2... Laser tube, 3, 3'
...Mirror support, 4, 4'...Mirror, 5,
5'...Cathode, 6...Laser power control circuit,
7, 7'... Stabilizing resistor, 8... Photodetector, 9...
Laser output, 10...Switching circuit, 11...Reference power supply, 12...Comparison amplifier, 13...Resistor, 14...
...Transistor, 15...Switch, 16...Relay, 17...Main power supply.
Claims (1)
スレーザ管の製造において、前記ガスレーザ管の
放電電流を供給するためのレーザ電源の正極を金
属性ミラー支持体の一方に接続し、前記ガスレー
ザ管の金属性ミラー支持体の他の一方とカソード
とに交互にレーザ電源の負極を接続して放電せし
めレーザ出力が規定値になるように調整すること
を特徴とするガスレーザ管の製造方法。1. In manufacturing an internal mirror type gas laser tube having a metallic mirror support, the positive electrode of a laser power source for supplying the discharge current of the gas laser tube is connected to one of the metallic mirror supports, and the metallic mirror support of the gas laser tube is A method for manufacturing a gas laser tube, comprising the steps of: alternately connecting the negative electrode of a laser power source to the other side of the mirror support and the cathode to cause discharge and adjusting the laser output to a specified value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7501179A JPS55166982A (en) | 1979-06-14 | 1979-06-14 | Manufacture of gas laser tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7501179A JPS55166982A (en) | 1979-06-14 | 1979-06-14 | Manufacture of gas laser tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55166982A JPS55166982A (en) | 1980-12-26 |
| JPS6245718B2 true JPS6245718B2 (en) | 1987-09-28 |
Family
ID=13563810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7501179A Granted JPS55166982A (en) | 1979-06-14 | 1979-06-14 | Manufacture of gas laser tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55166982A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5818984A (en) * | 1981-07-28 | 1983-02-03 | Nec Corp | Laser device |
-
1979
- 1979-06-14 JP JP7501179A patent/JPS55166982A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55166982A (en) | 1980-12-26 |
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