JPS633476B2 - - Google Patents
Info
- Publication number
- JPS633476B2 JPS633476B2 JP53149378A JP14937878A JPS633476B2 JP S633476 B2 JPS633476 B2 JP S633476B2 JP 53149378 A JP53149378 A JP 53149378A JP 14937878 A JP14937878 A JP 14937878A JP S633476 B2 JPS633476 B2 JP S633476B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- laser
- discharge current
- transistor
- laser tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/09705—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser with particular means for stabilising the discharge
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
本発明は、ガスレーザ装置、特に光出力の安定
化を図つたガスレーザ装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a gas laser device, and particularly to a gas laser device that stabilizes optical output.
従来、ガスレーザ装置では光出力の安定化を図
るため、レーザ出力の一部を検出してそれが一定
になるようにレーザ管の放電電流を制御する帰還
回路が用いられている。すなわち、第１図に示す
ように直流電源１の一つの出力端をレーザ管９の
カソード１０に接続し、他端をトランジスタ２を
通してレーザ管９のアノード１１に接続する。そ
して、レーザ光１２の一部のレーザ光１３を光検
出器６で検出し抵抗５の両端に現われる出力電圧
と基準電源４との差電圧を比較増幅器３で増幅
し、トランジスタ２のベースに供給し、差電圧が
０になるように制御している。しかし光共振器
７，７′やビームスプリツタ８等にゴミ等が入い
り、レーザ光１３が急に減少した場合、光検出器
６の出力電圧も急に減少するため比較増幅器３の
出力電圧は急に増加し、トランジスタ２はON状
態となり、レーザ管９の放電々流は急に増大し、
レーザ管９およびトランジスタ２の破損につなが
る。 Conventionally, in order to stabilize optical output, gas laser devices have used a feedback circuit that detects a portion of the laser output and controls the discharge current of the laser tube so that it remains constant. That is, as shown in FIG. 1, one output end of the DC power supply 1 is connected to the cathode 10 of the laser tube 9, and the other end is connected to the anode 11 of the laser tube 9 through the transistor 2. Then, a part of the laser beam 13 of the laser beam 12 is detected by a photodetector 6, and the difference voltage between the output voltage appearing across the resistor 5 and the reference power source 4 is amplified by the comparator amplifier 3 and supplied to the base of the transistor 2. However, the voltage difference is controlled to be zero. However, if dust or the like gets into the optical resonators 7, 7', the beam splitter 8, etc. and the laser beam 13 suddenly decreases, the output voltage of the photodetector 6 also decreases suddenly, so the output voltage of the comparator amplifier 3 suddenly increases, transistor 2 turns on, and the discharge current of laser tube 9 suddenly increases.
This will lead to damage to the laser tube 9 and transistor 2.
本発明の目的は、前記欠点を改善し、定常状態
では光安定化動作をし、異常状態では定電流動作
をし、レーザ管の破損を防止したガスレーザ装置
を提供することにある。 SUMMARY OF THE INVENTION It is an object of the present invention to provide a gas laser device that improves the above-mentioned drawbacks, performs optical stabilization operation in a steady state, performs constant current operation in an abnormal state, and prevents damage to the laser tube.
本発明は、ガスレーザ管からのレーザ出力光の
一部を検出し、その値が一定になるように放電電
流を制御する帰還回路を有するガスレーザ装置に
おいて、帰還回路にレーザ光が何らの原因で急変
した時、放電電流を制限するためのバイパス回路
を設けたことを特徴とする。 The present invention relates to a gas laser device having a feedback circuit that detects a portion of the laser output light from a gas laser tube and controls the discharge current so that its value remains constant. The present invention is characterized in that a bypass circuit is provided to limit the discharge current when the discharge current occurs.
次に第２図に示した実施例について本発明を具
体的に説明する。 Next, the present invention will be specifically explained with reference to the embodiment shown in FIG.
本発明によれば直流電源１の一つの出力端をレ
ーザ管９のカソード１０に接続し、他端をトラン
ジスタ２、電流検出低抗１８を通してレーザ管９
のアノード１１に接続すると、レーザ管は放電
し、光共振器７，７′によりレーザ光１２が発振
する。そして、レーザ光１２の一部のレーザ光１
３は光検出器６で検出され、抵抗５の両端に光出
力電圧V1を発生する。また、レーザ管９の放電
電流は電流検出抵抗１８で検出され、その両端に
電流検出電圧V2を発生する。 According to the present invention, one output end of the DC power supply 1 is connected to the cathode 10 of the laser tube 9, and the other end is connected to the laser tube 9 through the transistor 2 and the current detection resistor 18.
When connected to the anode 11 of the laser tube, the laser tube discharges, and a laser beam 12 is oscillated by the optical resonators 7 and 7'. Then, a part of the laser beam 1 of the laser beam 12
3 is detected by a photodetector 6 and generates an optical output voltage V 1 across the resistor 5 . Further, the discharge current of the laser tube 9 is detected by a current detection resistor 18, and a current detection voltage V2 is generated at both ends thereof.
定常状態では、光出力電圧V1と基準電源４の
VS1との差電圧を比較増幅器３で増幅し、抵抗１
５ダイオード１６を通して、トランジスタ２のベ
ースに供給し、差電圧が０になるように制御す
る。 In steady state, the optical output voltage V 1 and the reference power supply 4 are
The difference voltage with V S1 is amplified by comparison amplifier 3, and resistor 1
The voltage is supplied to the base of the transistor 2 through the 5 diode 16, and controlled so that the differential voltage becomes 0.
一方光共振器７，７′やビームスプリツタ８等
にゴミ等が入り、レーザ光１３が急に減少した場
合には、光検出器６の光出力電圧V1が急に減少
するため、比較増幅器３の出力電圧は急に増加
し、トランジスタ２はON状態となり、レーザ管
９の放電電流は急激に増大する。放電電流が急激
に増大すると、抵抗１８の両端の電流検出電圧
V2が増大するので基準電圧１４のVS2との差電圧
が減少し、比較増幅器１９の出力電圧が減少す
る。このため比較増幅器３の出力電圧は抵抗１
５、ダイオード１６、ダイオード１７を通つて比
較増幅器１９に流れこみ、トランジスタ２のベー
ス電圧は減少し、したがつてレーザ管９の放電電
流は減少する。このように異常状態では、基準電
圧VS2と電流検出電圧V2との差電圧を比較増幅器
１９で増幅し、トランジスタ２のベースに供給
し、差電圧が０になるよう定電流制御する。 On the other hand, if dust or the like enters the optical resonators 7, 7', the beam splitter 8, etc. and the laser beam 13 suddenly decreases, the optical output voltage V1 of the photodetector 6 will suddenly decrease. The output voltage of the amplifier 3 suddenly increases, the transistor 2 is turned on, and the discharge current of the laser tube 9 increases rapidly. When the discharge current increases rapidly, the current detection voltage across the resistor 18
Since V 2 increases, the voltage difference between the reference voltage 14 and V S2 decreases, and the output voltage of the comparison amplifier 19 decreases. Therefore, the output voltage of comparison amplifier 3 is
5, diode 16, and diode 17 to the comparator amplifier 19, the base voltage of the transistor 2 decreases, and therefore the discharge current of the laser tube 9 decreases. In this abnormal state, the voltage difference between the reference voltage V S2 and the current detection voltage V 2 is amplified by the comparator amplifier 19 and supplied to the base of the transistor 2, and constant current control is performed so that the voltage difference becomes zero.
以上のように、本発明によれば、異常状態での
過電流を防止し、レーザ管およびトランジスタの
破損を防止することができ、安定な光出力のガス
レーザ装置を得ることができる。 As described above, according to the present invention, overcurrent can be prevented in an abnormal state, damage to the laser tube and transistor can be prevented, and a gas laser device with stable optical output can be obtained.
第１図は従来のガスレーザ装置を示すブロツク
図、第２図は本発明のガスレーザ装置を示すブロ
ツク図である。
１……直流電源、２……トランジスタ、３，１
９……比較増幅器、４，１４……基準電源、５，
１５……抵抗、６……光検出器、７，７′……光
共振器、８……ビームスプリツタ、９……ガスレ
ーザ管、１０……カソード、１１……アノード、
１２，１３……レーザ光、１６，１７……ダイオ
ード、１８……電流検出抵抗。
FIG. 1 is a block diagram showing a conventional gas laser device, and FIG. 2 is a block diagram showing a gas laser device of the present invention. 1...DC power supply, 2...Transistor, 3,1
9... Comparison amplifier, 4, 14... Reference power supply, 5,
15...Resistor, 6...Photodetector, 7,7'...Optical resonator, 8...Beam splitter, 9...Gas laser tube, 10...Cathode, 11...Anode,
12, 13... Laser light, 16, 17... Diode, 18... Current detection resistor.
Claims (1)
し、その値が一定になるように放電電流を制御す
る帰還回路を有するガスレーザ装置において、前
記帰還回路にレーザ光が急変した時、放電電流を
制限するためのバイパス回路を設けたことを特徴
とするガスレーザ装置。1. In a gas laser device that has a feedback circuit that detects a portion of the laser light from a gas laser tube and controls the discharge current so that its value remains constant, the feedback circuit limits the discharge current when the laser light suddenly changes. A gas laser device characterized by being provided with a bypass circuit for the purpose of
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14937878A JPS5575280A (en) | 1978-12-01 | 1978-12-01 | Gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14937878A JPS5575280A (en) | 1978-12-01 | 1978-12-01 | Gas laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5575280A JPS5575280A (en) | 1980-06-06 |
| JPS633476B2 true JPS633476B2 (en) | 1988-01-23 |
Family
ID=15473816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14937878A Granted JPS5575280A (en) | 1978-12-01 | 1978-12-01 | Gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5575280A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH071809B2 (en) * | 1985-12-03 | 1995-01-11 | 株式会社リコー | Semiconductor laser drive circuit |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752947Y2 (en) * | 1975-11-08 | 1982-11-17 |
-
1978
- 1978-12-01 JP JP14937878A patent/JPS5575280A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5575280A (en) | 1980-06-06 |
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