JPS6339112B2 - - Google Patents
Info
- Publication number
- JPS6339112B2 JPS6339112B2 JP56118040A JP11804081A JPS6339112B2 JP S6339112 B2 JPS6339112 B2 JP S6339112B2 JP 56118040 A JP56118040 A JP 56118040A JP 11804081 A JP11804081 A JP 11804081A JP S6339112 B2 JPS6339112 B2 JP S6339112B2
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- anode
- cathode
- auxiliary
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
- H01S3/0346—Protection of windows or mirrors against deleterious effects
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
本発明は、補助電極を具備するレーザ管を持つ
レーザ装置に関し、特に、補助電極の構造の改良
に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser device having a laser tube equipped with an auxiliary electrode, and more particularly to an improvement in the structure of the auxiliary electrode.
従来のこの種のレーザ装置は、第１図に示すよ
うに、直流電源１の負極端子をレーザ管２のカソ
ード３に接続し、正極端子をトリガ回路９を通し
たレーザ管２のアノード４に接続する。また、直
流電源１の正極端子を補助放電電源１０の負極に
接続し、補助放電電源１０の正極端子を安定抵抗
１１を通して、カソード側補助電極６に接続し、
補助放電電源１０の正極端子を安定抵抗１２と逆
流陽防止ダイオード１３とを通してアノード側補
助電極５に接続する。そして、トリガ回路９をオ
ンにすると、トリガ電圧が発生し、このトリガ電
圧によりレーザ管２はアノード４とカソード３と
の間で放電し、ミラー７，７′によりレーザ発振
をする。また同時にアノード側補助電極５とレー
ザ管２のアノード４との間で補助放電し、カソー
ド側補助電極６とレーザ管２のカソード３との間
で補助放電する。特にグラフアイトデイスク群
８，８′を細管とする、イオンレーザ等では、ア
ノード４とカソード３との間の放電により、レー
ザ管２の内部の塵埃がレーザ管２の光学窓１４，
１４′に向うが光学窓１４′へ向う塵埃の１部は、
補助電極５からアノード４へ押し返されるが、補
助放電路１９が補助電極５部で曲るため、補助電
極５の反対側を通つた塵埃２３′は、光学窓１
４′に付着し、レーザ発振を妨害し、レーザ出力
２４を減少させ、レーザ出力２４の不安定要素と
なる。また、光学窓１４へ向う塵埃の１部は補助
電極６からカソード３へ押し返えされるが、補助
放電路２０が補助電極６部で曲るため、補助電極
６の反対側を通つた塵埃２３は、光学窓１４に付
着し、前記同様レーザ発振を好害し、レーザ出力
２４を減少させ、レーザ出力２４の不安定要素と
なる。そして一度付着した塵埃は除去が難しい。
そこでレーザ出力２４を安定させるには、光学窓
１４，１４′に塵埃を付着させないことが不可欠
の要件である。 As shown in FIG. 1, a conventional laser device of this type connects the negative terminal of a DC power source 1 to the cathode 3 of the laser tube 2, and connects the positive terminal to the anode 4 of the laser tube 2 through a trigger circuit 9. Connecting. In addition, the positive terminal of the DC power supply 1 is connected to the negative terminal of the auxiliary discharge power supply 10, and the positive terminal of the auxiliary discharge power supply 10 is connected to the cathode side auxiliary electrode 6 through the stabilizing resistor 11.
The positive terminal of the auxiliary discharge power supply 10 is connected to the anode side auxiliary electrode 5 through a stabilizing resistor 12 and a backflow positive prevention diode 13. When the trigger circuit 9 is turned on, a trigger voltage is generated, and this trigger voltage causes the laser tube 2 to discharge between the anode 4 and the cathode 3, causing the mirrors 7 and 7' to oscillate laser. At the same time, an auxiliary discharge occurs between the anode side auxiliary electrode 5 and the anode 4 of the laser tube 2, and an auxiliary discharge occurs between the cathode side auxiliary electrode 6 and the cathode 3 of the laser tube 2. In particular, in an ion laser or the like in which the graphite disk groups 8 and 8' are thin tubes, dust inside the laser tube 2 is removed by the electric discharge between the anode 4 and the cathode 3 through the optical window 14 of the laser tube 2.
14', but part of the dust that goes towards the optical window 14' is
The dust 23' is pushed back from the auxiliary electrode 5 to the anode 4, but since the auxiliary discharge path 19 is bent at the auxiliary electrode 5, the dust 23' passing through the opposite side of the auxiliary electrode 5 is pushed back to the optical window 1.
4', it interferes with laser oscillation, reduces the laser output 24, and becomes an unstable factor in the laser output 24. Further, part of the dust heading toward the optical window 14 is pushed back from the auxiliary electrode 6 to the cathode 3, but since the auxiliary discharge path 20 is bent at the auxiliary electrode 6, the dust 23 that passes through the opposite side of the auxiliary electrode 6 The particles adhere to the optical window 14, adversely affect laser oscillation as described above, reduce the laser output 24, and become an unstable factor in the laser output 24. And once the dust has adhered, it is difficult to remove.
Therefore, in order to stabilize the laser output 24, it is essential to prevent dust from adhering to the optical windows 14, 14'.
本発明の目的は、レーザ管内部の塵埃が光学窓
に付着しないようにしたレーザ管を有するレーザ
装置を提供するにある。 An object of the present invention is to provide a laser device having a laser tube that prevents dust inside the laser tube from adhering to an optical window.
本発明によれば、管軸に沿つて配置された主放
電用アノードとカソードとこのアノードとカソー
ドの管軸方向外側に同軸状に配置されたリング状
補助電極とを有するレーザ管と、主放電用の電源
となる直流電源と、この直流電源に直列のトリガ
電圧を発生するためのトリガ回路と、直流電源に
直列の補助放電電圧を発生するための補助放電電
源と、この補助放電電源の正側からアノード側補
助電極間に接続された安定抵抗と逆流防止用ダイ
オードを含む回路と、補助放電電源の正側からカ
ソード側補助電極間に接続された安定抵抗とを含
むことを特徴とするレーザ装置が得られる。 According to the present invention, there is provided a laser tube having a main discharge anode and a cathode disposed along the tube axis, a ring-shaped auxiliary electrode coaxially disposed outside the anode and the cathode in the tube axis direction, and a main discharge A DC power supply that serves as a power supply for the DC power supply, a trigger circuit for generating a trigger voltage in series with this DC power supply, an auxiliary discharge power supply for generating an auxiliary discharge voltage in series with the DC power supply, and a positive A circuit including a stabilizing resistor and a backflow prevention diode connected from the side between the anode-side auxiliary electrodes, and a stabilizing resistor connected from the positive side of the auxiliary discharge power source between the cathode-side auxiliary electrodes. A device is obtained.
以下第２図に例示した実施例について本発明を
説明する。 The present invention will be described below with reference to the embodiment illustrated in FIG.
図の主放電用直流電源１の負極端子をレーザ管
２のカソード３に接続し、正極端子をトリガ回路
９を通してレーザ管２のアノード４に接続する。
また、直流電源１の正極端子を補助放電電源１０
の負荷に接続し、補助放電電極１０の正極端子を
安定抵抗１１を通して、カソード側補助電極１６
に接続し、補助放電電源１０の正極端子を安定抵
抗１１と逆流防止ダイオード１３とを通してアノ
ード側補助電極１５に接続する。そして、トリガ
回路９をオンすると、トリガ電圧が発生し、この
トリガ電圧により、レーザ管２はアノード４とカ
ソード３との間で放電し、ミラー７，７′により
レーザ発振をする。同時に、該トリガ電圧によ
り、アノード４とアノード側補助電極１５との間
に起ろうとする放電は、ダイオード１３があるこ
とにより防止され、トリガ電圧はアノード４とカ
ソード３との間の主放電となる。かくして、アノ
ード４とカソード３との間の主放電は確実に開始
し、トリガ電圧が消えると同時にアノード側補助
電極１５とアノード４間、カソード側補助電極１
６とカソード３間でも、カソード３とアノード４
間の主放電を契機として放電が開始する。また、
トリガ回路９は直流抵抗が非常に小さく電圧降下
は数Ｖであるので、前記の補助電極１５とアノー
ド４間および、前記の補助電極１６とカソード３
間は、補助放電電源１０により安定に持続する。
そして光学窓１４′へ向う塵埃は、リング状の補
助電極１５からアノード４に向う放電により、ア
ノード４側へ押し返され、１部の塵埃２３′もレ
ーザ管２の補助電極支持部２にぶつかり、光学窓
１４′には達しない。また、光学窓１４へ向う塵
埃は、リング状の補助電極１６からカソード３に
向う放電により、カソード３側へ押し返され、１
部の塵埃２３もレーザ管２の補助電極支持部２″
にぶつかり、光学窓１４には達しない。そして、
リング状の補助電極１５，１６による放電は補助
放電路２１，２２のようにリング状の補助電極１
５，１６の全面に広がるため、レーザ管２内部の
塵埃の光学窓１４，１４′への付着が防止され、
安定なレーザ出力が得られ、レーザ管の長寿命化
にも効果がある。 The negative terminal of the main discharge DC power supply 1 shown in the figure is connected to the cathode 3 of the laser tube 2, and the positive terminal is connected to the anode 4 of the laser tube 2 through a trigger circuit 9.
In addition, connect the positive terminal of the DC power supply 1 to the auxiliary discharge power supply 10.
The positive terminal of the auxiliary discharge electrode 10 is connected to the load of the cathode side auxiliary electrode 16 through the stabilizing resistor 11.
The positive terminal of the auxiliary discharge power supply 10 is connected to the anode side auxiliary electrode 15 through the stabilizing resistor 11 and the backflow prevention diode 13. Then, when the trigger circuit 9 is turned on, a trigger voltage is generated, and this trigger voltage causes the laser tube 2 to discharge between the anode 4 and the cathode 3, causing the mirrors 7 and 7' to oscillate laser. At the same time, the presence of the diode 13 prevents the discharge that is about to occur between the anode 4 and the anode-side auxiliary electrode 15 due to the trigger voltage, and the trigger voltage becomes the main discharge between the anode 4 and the cathode 3. . In this way, the main discharge between the anode 4 and the cathode 3 starts reliably, and at the same time as the trigger voltage disappears, the discharge between the anode side auxiliary electrode 15 and the anode 4 and the cathode side auxiliary electrode 1
Even between cathode 6 and cathode 3, cathode 3 and anode 4
Discharge starts with the main discharge between. Also,
Since the trigger circuit 9 has a very small DC resistance and a voltage drop of several volts, there is
The period is maintained stably by the auxiliary discharge power supply 10.
The dust heading toward the optical window 14' is pushed back toward the anode 4 by the discharge from the ring-shaped auxiliary electrode 15 toward the anode 4, and part of the dust 23' also collides with the auxiliary electrode support 2 of the laser tube 2. , does not reach the optical window 14'. Further, the dust heading towards the optical window 14 is pushed back toward the cathode 3 by the discharge towards the cathode 3 from the ring-shaped auxiliary electrode 16, and
Dust 23 on the auxiliary electrode support section 2'' of the laser tube 2
and does not reach the optical window 14. and,
The discharge by the ring-shaped auxiliary electrodes 15 and 16 is carried out by the ring-shaped auxiliary electrode 1 like the auxiliary discharge paths 21 and 22.
5, 16, the dust inside the laser tube 2 is prevented from adhering to the optical windows 14, 14'.
Stable laser output can be obtained, and it is also effective in extending the life of the laser tube.
第１図は従来のレーザ装置の構成略図、第２図
は本発明の一実施例の構成略図である。
１……直流電源、２……レーザ管、３……カソ
ード、４……アノード、５，１５……アノード側
補助電極、６，１６……カソード側補助電極、
７，７′……ミラー、８，８′……グラフアイトデ
イスク群、９……トリガ回路、１０……補助放電
電源、１１，１２……安定抵抗、１３……逆流防
止ダイオード、１４，１４′……光学窓、１７，
１８……光学窓支持体、１９，２０，２１，２２
……補助放電路、２３，２３′……塵埃。
FIG. 1 is a schematic diagram of the configuration of a conventional laser device, and FIG. 2 is a schematic diagram of the configuration of an embodiment of the present invention. 1... DC power supply, 2... Laser tube, 3... Cathode, 4... Anode, 5, 15... Anode side auxiliary electrode, 6, 16... Cathode side auxiliary electrode,
7, 7'... Mirror, 8, 8'... Graphite disk group, 9... Trigger circuit, 10... Auxiliary discharge power supply, 11, 12... Stabilizing resistor, 13... Backflow prevention diode, 14, 14 '...Optical window, 17,
18... Optical window support, 19, 20, 21, 22
...Auxiliary discharge path, 23, 23'...Dust.
Claims (1)
カソードと、このアノードとカソードの管軸方向
外側に同軸状に配置されたリング状補助電極とを
有するレーザ管と、前記主放電用の電源となる直
流電源と、この直流電源に直列のトリガ電圧を発
生するためのトリガ回路と、前記直流電源に直列
の補助放電電圧を発生するための補助放電電源
と、この補助放電電源の正側から前記アノード側
補助電極間に接続された安定抵抗と逆流防止用ダ
イオードを含む回路と、前記補助放電電源の正側
から前記カソード側補助電極間に接続された安定
抵抗とを含むことを特徴とするレーザ装置。1. A laser tube having a main discharge anode and a cathode arranged along the tube axis, a ring-shaped auxiliary electrode coaxially arranged outside the anode and cathode in the tube axis direction, and a power source for the main discharge. A DC power supply, a trigger circuit for generating a trigger voltage in series with the DC power supply, an auxiliary discharge power supply for generating an auxiliary discharge voltage in series with the DC power supply, and a power source from the positive side of the auxiliary discharge power supply. A circuit including a stabilizing resistor and a backflow prevention diode connected between the anode-side auxiliary electrodes, and a stabilizing resistor connected between the cathode-side auxiliary electrodes from the positive side of the auxiliary discharge power source. laser equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11804081A JPS5818984A (en) | 1981-07-28 | 1981-07-28 | Laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11804081A JPS5818984A (en) | 1981-07-28 | 1981-07-28 | Laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5818984A JPS5818984A (en) | 1983-02-03 |
| JPS6339112B2 true JPS6339112B2 (en) | 1988-08-03 |
Family
ID=14726551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11804081A Granted JPS5818984A (en) | 1981-07-28 | 1981-07-28 | Laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5818984A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63130741A (en) * | 1986-11-21 | 1988-06-02 | Nikko Aen Kk | Zinc alloy for hot dipping forming green-colored plating and method of application thereof |
| JPS6227536A (en) * | 1985-07-30 | 1987-02-05 | Nikko Aen Kk | Zinc alloy for galvanizing and its using method |
| JPH0810023A (en) * | 1994-06-30 | 1996-01-16 | Sadanori Sugihara | Portable accessory case |
| JP3808511B2 (en) * | 1998-05-20 | 2006-08-16 | 株式会社東芝 | Pulse gas laser generator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55166982A (en) * | 1979-06-14 | 1980-12-26 | Nec Corp | Manufacture of gas laser tube |
-
1981
- 1981-07-28 JP JP11804081A patent/JPS5818984A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5818984A (en) | 1983-02-03 |
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