JPS6332247B2 - - Google Patents
Info
- Publication number
- JPS6332247B2 JPS6332247B2 JP57215046A JP21504682A JPS6332247B2 JP S6332247 B2 JPS6332247 B2 JP S6332247B2 JP 57215046 A JP57215046 A JP 57215046A JP 21504682 A JP21504682 A JP 21504682A JP S6332247 B2 JPS6332247 B2 JP S6332247B2
- Authority
- JP
- Japan
- Prior art keywords
- sulfate
- aqueous solution
- thermal decomposition
- tantalum
- manganese dioxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Conductive Materials (AREA)
- Primary Cells (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Description
本発明は、再化成方法を改良した定格電圧
20V.DCを越えるタンタル固体電解コンデンサの
製造方法に関する。
一般にタンタル固体電解コンデンサは、タンタ
ル焼結体に陽極酸化皮膜を生成し、その表面に二
酸化マンガン層、グラフアイト層、導電層を順次
積層して形成してなるものであるが、前記二酸化
マンガン層を形成する場合、陽極酸化皮膜を生成
したタンタル焼結体を硝酸マンガン水溶液中に浸
漬し、該焼結体中に硝酸マンガン水溶液を含浸し
たのち、これを取り出して電気炉などの高温雰囲
気中で加熱分解している。この加熱分解によつて
劣化した前記陽極酸化皮膜を修復させるため再化
成を行い、この含浸−加熱分解−再化成の操作を
数回〜十数回繰返して二酸化マンガン層を形成す
るとともに、陽極酸化皮膜の修復を行つている。
前記再化成に用いる電解液は、例えば特開昭57−
21811号公報記載のように通常燐酸が多用されて
いるが、燐酸はその一部が二酸化マンガン層の中
に残留するため、加熱分解温度によつて二酸化マ
ンガンの抵抗値が大きく左右され、第1図に示す
曲線Aのように温度400℃付近で最小値を示す。
一方、二酸化マンガン層の中に酸留しない硝酸ま
たは酢酸などの水溶液を再化成電解液として用い
ると、加熱分解温度によつて二酸化マンガンの抵
抗値は第1図に示す曲線Bのようにほぼ一定であ
り、かつ抵抗値自体も小さい。しかしながら、再
化成電解液として硝酸または酢酸などを用いたタ
ンタル固体電解コンデンサは、同一体積での静電
容量が小さく、しかも漏れ電流が大きいという欠
点があつた。
また、特公昭45−620号公報には、第一次、第
二次陽極酸化とも同一の水溶液を使用すること、
および第一陽極酸化の溶融塩として硝酸ソーダ、
硝酸カリを用い、第二次陽極酸化の水溶液として
硝酸アンモン、硼酸アンモン、酢酸アンモンを用
いた技術が開示されているが、これらの再化成液
を用いた場合、定格電圧20V以下では良好な特性
を示すが、20Vを越えると静電容量、損失、漏れ
電流、静電容量変化率などの特性が劣る欠点を有
していた。
本発明は、上記のような欠点を除去するため、
再化成電解液として化成性が優れ、かつ沸点が硝
酸マンガンの熱分解温度より高く固体で二酸化マ
ンガン層中に残るLi2SO4、Na2SO4、K2SO4、
MgSO4、CaSO4、NaHSO4、KHSO4、
(NH4)2SO4、(NH4)HSO4の中の1種または2
種以上を溶質とする0.005〜1重量%水溶液を用
いることによつて静電容量を増大させ、損失、漏
れ電流を小さくし、しかも周波数特性および温度
特性の優れたタンタル固体電解コンデンサの製造
方法を提供せんとするものである。
以下本発明の詳細につき説明する。すなわち、
タンタル金属粉末からなるタンタル焼結体に陽極
酸化皮膜を生成し、これを硝酸マンガンの水溶液
中に浸漬して前記タンタル焼結体に含浸し取り出
し、高温雰囲気中で加熱分解し前記陽極酸化皮膜
の表面に二酸化マンガン層を形成する。しかし
て、前記加熱分解工程で劣化した陽極酸化皮膜を
修復するために再化成を行うものであるが、この
再化成は前述のように硝酸マンガンの加熱分解に
よつて劣化した陽極酸化皮膜を修復させる役目の
ほかに、再化成電解液の溶質が陽極酸化皮膜と二
酸化マンガン層とを密着させるバインダーの役目
をも果たしていることに着目して化成性が優れ、
かつ沸点が前記硝酸マンガンの加熱分解温度より
も高く、固体で二酸化マンガン層中に残る
Li2SO4、Na2SO4、K2SO4、MgSO4、CaSO4、
NaHSO4、KHSO4、(NH4)2SO4、(NH4)
HSO4の中の1種または2種以上を溶質とする
0.005〜1重量%水溶液を使用して再化成を行う
ものである。該再化成工程は、前記硝酸マンガン
水溶液中への含浸−加熱分解−再化成の操作を数
回〜十数回繰返し行う。再化成電解液として使用
する前記の硫酸のアルカリ金属塩、アルカリ土金
属塩またはアンモニウム塩は化成性が優れ、かつ
沸点が硝酸マンガンの加熱分解温度よりも高く固
体で二酸化マンガン層中に残り、低抗の小さいも
のである。
このようにして含浸−加熱分解−再化成の操作
を繰返し行い二酸化マンガン層の形成と陽極酸化
皮膜の修復とを行つたのち、グラフアイト層、導
電層を順次積層して形成し、さらに要すれば容器
に収納するか、樹脂被覆などの方法で外装を施し
固体電解コンデンサを構成するものである。
このように本発明は、再化成電解液として化成
性が優れ、かつ沸点が硝酸マンガンの加熱分解温
度よりも高く、固体で二酸化マンガン層中に残る
前記の硫酸のアルカリ金属塩、アルカリ土金属塩
またはアンモニウム塩を用いることによつて静電
容量を増大させ、損失、漏れ電流を小さくし得、
しかも周波数特性および温度特性の優れたタンタ
ル固体電解コンデンサを得ることができる。前記
再化成電解液としての硫酸のアルカリ金属塩、ア
ルカリ土金属塩またはアンモニウム塩の濃度を変
えた場合の定格35V.DC−47μFのタンタル固体電
解コンデンサの漏れ電流の変化を第2図に示す。
第2図において曲線1は硫酸水素アンモニウム水
溶液を用いた場合、曲線2は硫酸水素カリウム水
溶液を用いた場合、曲線3は特公昭45−620号公
報2頁の表に示された第一次陽極酸化の硝酸カリ
ウム+硝酸ナトリウム混合水溶液を用いた場合で
あるが、定格35V.DCであるため曲線3は漏れ電
流値が最も大きく、曲線1および2は0.005〜1
重量%の範囲で好結果が得られた。
次に、本発明の実施例と従来の参考例との特性
比較の一例を示す。タンタル焼結体を燐酸水溶液
中で陽極酸化を行い陽極酸化皮膜を生成させる。
しかるのち、比重1.70の硝酸マンガン水溶液に浸
漬し含浸したタンタル焼結体を300℃の温度で加
熱分解し二酸化マンガン層を形成する。前記加熱
分解で劣化した前記陽極酸化皮膜を修復させるた
め、表1の再化成電解液を用いて再化成する。
The present invention provides improved rated voltage reconstitution methods.
This article relates to a method for manufacturing tantalum solid electrolytic capacitors that exceed 20V.DC. In general, tantalum solid electrolytic capacitors are formed by forming an anodized film on a tantalum sintered body, and sequentially laminating a manganese dioxide layer, a graphite layer, and a conductive layer on the surface of the tantalum solid electrolytic capacitor. When forming a tantalum sintered body with an anodic oxide film formed thereon, the tantalum sintered body is immersed in a manganese nitrate aqueous solution, the sintered body is impregnated with the manganese nitrate aqueous solution, and then taken out and placed in a high-temperature atmosphere such as an electric furnace. Decomposed by heating. In order to repair the anodic oxide film that has deteriorated due to this thermal decomposition, re-forming is performed, and this operation of impregnation, thermal decomposition and re-forming is repeated several to ten times to form a manganese dioxide layer, and the anodized film is The membrane is being repaired.
The electrolytic solution used for the reconstitution is disclosed in, for example, JP-A-57-
As described in Publication No. 21811, phosphoric acid is usually used extensively, but since a part of phosphoric acid remains in the manganese dioxide layer, the resistance value of manganese dioxide is greatly influenced by the thermal decomposition temperature, and the first As shown in the curve A shown in the figure, the minimum value is shown at a temperature around 400°C.
On the other hand, when an aqueous solution such as nitric acid or acetic acid that does not oxidize into the manganese dioxide layer is used as a reconstitution electrolyte, the resistance value of manganese dioxide remains almost constant as shown in curve B shown in Figure 1 depending on the thermal decomposition temperature. , and the resistance value itself is small. However, tantalum solid electrolytic capacitors using nitric acid, acetic acid, or the like as a reconstituted electrolyte have the drawbacks of low capacitance at the same volume and large leakage current. In addition, Japanese Patent Publication No. 45-620 states that the same aqueous solution is used for both primary and secondary anodization;
and sodium nitrate as the molten salt of the first anodization,
A technique has been disclosed that uses potassium nitrate and ammonium nitrate, ammonium borate, and ammonium acetate as aqueous solutions for secondary anodization, but when these reconstitution solutions are used, good characteristics are not achieved at rated voltages of 20 V or less. However, when the voltage exceeds 20V, the capacitance, loss, leakage current, and capacitance change rate are poor. The present invention eliminates the above-mentioned drawbacks by:
Li 2 SO 4 , Na 2 SO 4 , K 2 SO 4 , which has excellent chemical forming properties as a reconversion electrolyte and whose boiling point is higher than the thermal decomposition temperature of manganese nitrate and remains in the manganese dioxide layer as a solid.
MgSO4 , CaSO4 , NaHSO4 , KHSO4 ,
One or two of (NH 4 ) 2 SO 4 and (NH 4 )HSO 4
A method for manufacturing a tantalum solid electrolytic capacitor that increases capacitance, reduces loss and leakage current, and has excellent frequency and temperature characteristics by using a 0.005 to 1% by weight aqueous solution containing a solute or more as a solute. This is what we intend to provide. The details of the present invention will be explained below. That is,
An anodic oxide film is formed on a tantalum sintered body made of tantalum metal powder, immersed in an aqueous solution of manganese nitrate to impregnate the tantalum sintered body, taken out, and thermally decomposed in a high temperature atmosphere to remove the anodized film. Forms a manganese dioxide layer on the surface. Therefore, rechemical formation is performed to repair the anodic oxide film that has deteriorated in the thermal decomposition process, and as mentioned above, this rechemical formation repairs the anodic oxide film that has deteriorated due to the thermal decomposition of manganese nitrate. In addition to the role of chemical conversion, the solute in the reconversion electrolyte also acts as a binder that brings the anodic oxide film and the manganese dioxide layer into close contact.
and has a boiling point higher than the thermal decomposition temperature of the manganese nitrate and remains in the manganese dioxide layer as a solid.
Li 2 SO 4 , Na 2 SO 4 , K 2 SO 4 , MgSO 4 , CaSO 4 ,
NaHSO 4 , KHSO 4 , (NH 4 ) 2 SO 4 , (NH 4 )
One or more types of HSO 4 are used as solutes
Reconstitution is carried out using a 0.005 to 1% by weight aqueous solution. In the reconstitution step, the operations of impregnation in the aqueous manganese nitrate solution, thermal decomposition, and reconstitution are repeated several times to more than ten times. The alkali metal salt, alkaline earth metal salt, or ammonium salt of sulfuric acid used as the reconstitution electrolyte has excellent chemical formation properties and has a boiling point higher than the thermal decomposition temperature of manganese nitrate, remaining as a solid in the manganese dioxide layer and having a low It has low resistance. In this way, the operations of impregnation, thermal decomposition, and reconstitution are repeated to form a manganese dioxide layer and repair the anodic oxide film, and then a graphite layer and a conductive layer are sequentially laminated and formed. For example, a solid electrolytic capacitor is constructed by storing the capacitor in a container or by covering it with a resin coating or the like. As described above, the present invention provides an alkali metal salt or alkaline earth metal salt of sulfuric acid that has excellent chemical forming properties as a re-forming electrolyte, has a boiling point higher than the thermal decomposition temperature of manganese nitrate, and remains in the manganese dioxide layer as a solid. Alternatively, by using ammonium salt, capacitance can be increased and loss and leakage current can be reduced.
Moreover, a tantalum solid electrolytic capacitor with excellent frequency characteristics and temperature characteristics can be obtained. FIG. 2 shows the change in leakage current of a tantalum solid electrolytic capacitor with a rating of 35 V.DC-47 μF when the concentration of the alkali metal salt, alkaline earth metal salt, or ammonium salt of sulfuric acid as the reconstituted electrolyte is changed.
In Figure 2, curve 1 is when an ammonium hydrogen sulfate aqueous solution is used, curve 2 is when a potassium hydrogen sulfate aqueous solution is used, and curve 3 is the primary anode shown in the table on page 2 of Japanese Patent Publication No. 45-620. This is a case where a mixed aqueous solution of oxidized potassium nitrate + sodium nitrate is used, but since the rating is 35V.DC, curve 3 has the largest leakage current value, and curves 1 and 2 have a leakage current value of 0.005 to 1.
Good results were obtained in the range of % by weight. Next, an example of comparison of characteristics between an example of the present invention and a conventional reference example will be shown. A tantalum sintered body is anodized in an aqueous phosphoric acid solution to form an anodic oxide film.
Thereafter, the impregnated tantalum sintered body is immersed in an aqueous manganese nitrate solution with a specific gravity of 1.70, and the impregnated tantalum sintered body is thermally decomposed at a temperature of 300°C to form a manganese dioxide layer. In order to repair the anodic oxide film deteriorated by the thermal decomposition, reconversion is performed using the reconversion electrolyte shown in Table 1.
【表】
この含浸−加熱分解−再化成の操作をそれぞれ
6回繰返し行う。このような製造方法によつて得
られた実施例1、参考例2、参考例3、参考例4
のタンタル固体電解コンデンサ(いずれも定格電
圧35V.DC)の特性比較を第3図〜第7図に示
す。すなわち、第3図は同一寸法形状のタンタル
焼結体を用いて得られた静電容量の平均値とバラ
ツキを示すもので、静電容量は実施例1がもつと
も大きく、かつバラツキは実施例1がもつとも小
さく、参考例2が次いでいるが、参考例3、参考
例4はこれらに比して著しくバラツキを生じるこ
とがわかる。第4図は温度に対応する損失の変化
を示すもので、実施例1、参考例2は損失が小さ
く変化も少ないが、実施例1はその値が小さいこ
とがわかる。第5図は温度に対応する漏れ電流の
変化とそのバラツキを示すもので、実施例1、参
考例2はその値が小さいのに加えてバラツキも少
ないが、特に実施例1は絶対値が小さい。第6図
は周波数に対応するインピーダンスの変化を示す
もので、参考例3、参考例4に比べて実施例1、
参考例2はその値が小さく変化も少ない。第7図
は周波数に対応する静電容量の変化を示すもの
で、実施例1は参考例2、参考例3、参考例4と
比べて変化が著しく少ないことがわかる。したが
つていずれの特性においても実施例1は参考例
2、参考例3、参考例4に比べて良好で、かつバ
ラツキも少なく安定した特性を示すことがわか
る。
発明者の実験によれば、参考例2として用いた
硝酸カリウム水溶液を再化成液とすることは定格
電圧20V.DC以下では硫酸水素アンモニウムと同
等の特性値を示すが、前記実施例の定格電圧
35V.DCなどの如く20V.DCを越えた場合は硫酸
水素アンモニウムより劣る特性を示していて適当
でない。
なお、実施例では硫酸水素アンモニウム水溶液
を使用した場合について述べたが、Li2SO4、
Na2SO4、K2SO4、MgSO4、CaSO4、NaHSO4、
KHSO4、(NH4)2SO4の中の1種または2種以上
を溶質とした0.005〜1重量%水溶液でも同様の
効果を得ることができる。
以上詳述したように本発明によれば、再化成電
解液として化成性が優れ、かつ沸点が硝酸マンガ
ンの熱分解温度より高く固体で二酸化マンガン層
中に残る前記の硫酸のアルカリ金属塩、アルカリ
土金属塩またはアンモニウム塩からなる水溶液を
用いることによつて静電容量を増大させ、損失、
漏れ電流を小さくし、しかも周波数特性および温
度特性の優れたタンタル固体電解コンデンサの製
造方法を提供することができる。[Table] This operation of impregnation, thermal decomposition, and reconstitution was repeated six times each. Example 1, Reference Example 2, Reference Example 3, and Reference Example 4 obtained by such a manufacturing method
Figures 3 to 7 show a comparison of the characteristics of tantalum solid electrolytic capacitors (all rated voltage 35V.DC). In other words, FIG. 3 shows the average value and variation of capacitance obtained using tantalum sintered bodies of the same size and shape, and the capacitance of Example 1 is larger than that of Example 1. is the smallest, followed by Reference Example 2, but it can be seen that Reference Example 3 and Reference Example 4 have significant variations compared to these. FIG. 4 shows the change in loss corresponding to temperature, and it can be seen that Example 1 and Reference Example 2 have a small loss and little change, but Example 1 has a small value. Figure 5 shows the change in leakage current corresponding to temperature and its dispersion. Example 1 and Reference Example 2 have small values and small variations, but especially Example 1 has a small absolute value. . FIG. 6 shows the change in impedance corresponding to frequency, and compared to Reference Examples 3 and 4, Example 1,
In Reference Example 2, the value is small and there is little change. FIG. 7 shows the change in capacitance corresponding to frequency, and it can be seen that the change in Example 1 is significantly smaller than that in Reference Example 2, Reference Example 3, and Reference Example 4. Therefore, it can be seen that in all properties, Example 1 is better than Reference Examples 2, 3, and 4, and exhibits stable properties with less variation. According to the inventor's experiments, using the potassium nitrate aqueous solution used in Reference Example 2 as a reconversion liquid exhibits the same characteristic values as ammonium hydrogen sulfate at a rated voltage of 20 V.DC or lower, but the rated voltage of the above example
If it exceeds 20V.DC, such as 35V.DC, it shows properties inferior to ammonium hydrogen sulfate and is not suitable. In addition, although the case where an aqueous ammonium hydrogen sulfate solution was used was described in the example, Li 2 SO 4 ,
Na 2 SO 4 , K 2 SO 4 , MgSO 4 , CaSO 4 , NaHSO 4 ,
A similar effect can be obtained with a 0.005 to 1% by weight aqueous solution containing one or more of KHSO 4 and (NH 4 ) 2 SO 4 as a solute. As detailed above, according to the present invention, the alkali metal salt of sulfuric acid, which has excellent chemical forming properties as a re-forming electrolytic solution and whose boiling point is higher than the thermal decomposition temperature of manganese nitrate and remains in the manganese dioxide layer as a solid, By using an aqueous solution consisting of earth metal salts or ammonium salts, the capacitance can be increased, loss,
It is possible to provide a method for manufacturing a tantalum solid electrolytic capacitor with reduced leakage current and excellent frequency characteristics and temperature characteristics.
第1図は再化成電解液を変えた場合の加熱分解
温度に対応する二酸化マンガンの抵抗値の変化を
示す曲線図、第2図は再化成電解液の濃度に対応
する漏れ電流の変化を示す曲線図、第3図〜第7
図はいずれも本発明の実施例と従来の参考例に係
るタンタル固体電解コンデンサの特性比較を示す
もので、第3図は同一寸法形状のタンタル焼結体
での静電容量の平均値とそのバラツキを示す特性
図、第4図は温度に対応する損失の変化を示す曲
線図、第5図は温度に対応する漏れ電流の変化と
バラツキを示す曲線図、第6図は周波数に対応す
るインピーダンスの変化を示す曲線図、第7図は
周波数に対応する静電容量の変化を示す曲線図で
ある。
Figure 1 is a curve diagram showing the change in the resistance value of manganese dioxide corresponding to the thermal decomposition temperature when the reconversion electrolyte is changed, and Figure 2 is a curve diagram showing the change in leakage current corresponding to the concentration of the reconversion electrolyte. Curve diagrams, Figures 3 to 7
Each figure shows a comparison of the characteristics of tantalum solid electrolytic capacitors according to an embodiment of the present invention and a conventional reference example. Characteristic diagram showing the variation, Figure 4 is a curve diagram showing the change in loss corresponding to temperature, Figure 5 is a curve diagram showing the change in leakage current and variation in response to temperature, Figure 6 is a curve diagram showing the change in leakage current corresponding to temperature, and Figure 6 is the impedance diagram corresponding to frequency. FIG. 7 is a curve diagram showing changes in capacitance corresponding to frequency.
Claims (1)
ち硝酸マンガン水溶液を含浸し加熱分解して前記
陽極酸化皮膜の表面に二酸化マンガン層を形成
し、しかるのち前記加熱分解工程で劣化した陽極
酸化皮膜を修復するため再化成を行う際に再化成
電解液として、硫酸リチウム、硫酸ナトリウム、
硫酸カリウム、硫酸マグネシウム、硫酸カルシウ
ム、硫酸水素ナトリウム、硫酸水素カリウム、硫
酸アンモニウム、硫酸水素アンモニウムの中の1
種または2種以上を溶質とする0.005〜1重量%
水溶液を用いたことを特徴とするタンタル固体電
解コンデンサの製造方法。1 After forming an anodized film on a tantalum sintered body, it is impregnated with a manganese nitrate aqueous solution and thermally decomposed to form a manganese dioxide layer on the surface of the anodic oxide film, and then the anodic oxide film deteriorated in the thermal decomposition step is removed. Lithium sulfate, sodium sulfate,
One of potassium sulfate, magnesium sulfate, calcium sulfate, sodium hydrogen sulfate, potassium hydrogen sulfate, ammonium sulfate, ammonium hydrogen sulfate
0.005 to 1% by weight of a species or two or more species as solutes
A method for manufacturing a tantalum solid electrolytic capacitor characterized by using an aqueous solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21504682A JPS59104115A (en) | 1982-12-07 | 1982-12-07 | Method of producing tantalum solid electrolyte condenser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21504682A JPS59104115A (en) | 1982-12-07 | 1982-12-07 | Method of producing tantalum solid electrolyte condenser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59104115A JPS59104115A (en) | 1984-06-15 |
| JPS6332247B2 true JPS6332247B2 (en) | 1988-06-29 |
Family
ID=16665854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21504682A Granted JPS59104115A (en) | 1982-12-07 | 1982-12-07 | Method of producing tantalum solid electrolyte condenser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59104115A (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6018137B2 (en) * | 1980-07-14 | 1985-05-09 | 日本電気ホームエレクトロニクス株式会社 | Manufacturing method of solid electrolytic capacitor |
-
1982
- 1982-12-07 JP JP21504682A patent/JPS59104115A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59104115A (en) | 1984-06-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4648010A (en) | Solid electrolytic capacitor and process for preparation thereof | |
| JPH10135080A (en) | Solid electrolytic capacitor and method of manufacturing the same | |
| JPS6332247B2 (en) | ||
| JPH04279017A (en) | Manufacture of electrode foil for aluminum electrolytic capacitor | |
| JPH0777180B2 (en) | Method for manufacturing solid electrolytic capacitor | |
| JP4401195B2 (en) | Solid electrolytic capacitor and manufacturing method thereof | |
| JPH04274312A (en) | Manufacture of solid electrolytic capacitor | |
| JPH02276215A (en) | Manufacture of solid electrolyte capacitor | |
| JPH033311A (en) | Manufacture of solid electrolytic capacitor | |
| US3217381A (en) | Method of capacitor manufacture | |
| JPH04280413A (en) | Manufacture of electrode foil for aluminum electrolytic capacitor | |
| JPS596502B2 (en) | Manufacturing method of solid electrolytic capacitor | |
| JP3055199B2 (en) | Method for manufacturing solid electrolytic capacitor | |
| JPS62185307A (en) | Solid electrolytic capacitor | |
| JP3182232B2 (en) | Organic semiconductor solid electrolytic capacitors | |
| JPH09260215A (en) | Manufacture of solid electrolytic capacitor | |
| JPH07272985A (en) | Method for manufacturing anode foil for aluminum electrolytic capacitors | |
| JPH04279018A (en) | Manufacture of electrode foil for aluminum electrolytic capacitor | |
| JPH0338728B2 (en) | ||
| JP2007273903A (en) | Method for fabricating electrode foil for electrolytic capacitor | |
| JPH0648672B2 (en) | Manufacturing method of wound type solid electrolytic capacitor | |
| JPS62273711A (en) | Manufacture of winding type solid electrolytic capacitor | |
| JPH0616465B2 (en) | Solid electrolytic capacitor | |
| JPS6298715A (en) | Solid electrolytic capacitor | |
| JPH0426534B2 (en) |