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JPS634727B2 - - Google Patents
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JPS634727B2 - - Google Patents

Info

Publication number
JPS634727B2
JPS634727B2 JP18740880A JP18740880A JPS634727B2 JP S634727 B2 JPS634727 B2 JP S634727B2 JP 18740880 A JP18740880 A JP 18740880A JP 18740880 A JP18740880 A JP 18740880A JP S634727 B2 JPS634727 B2 JP S634727B2
Authority
JP
Japan
Prior art keywords
crystal
tray
crystal resonator
adjustment
turntable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18740880A
Other languages
Japanese (ja)
Other versions
JPS57113607A (en
Inventor
Yoshimi Konno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP18740880A priority Critical patent/JPS57113607A/en
Publication of JPS57113607A publication Critical patent/JPS57113607A/en
Publication of JPS634727B2 publication Critical patent/JPS634727B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】 本発明は水晶振動子の周波数調整装置、特に、
水晶振動子の表面に微少量の金属物質を蒸着する
ことにより周波数を調整するようにした水晶振動
子の調整装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a frequency adjusting device for a crystal resonator, particularly,
The present invention relates to a crystal resonator adjustment device that adjusts the frequency by depositing a minute amount of metal material on the surface of the crystal resonator.

一般に水晶振動子1は第1図に示すように適当
な形状にカツトとした水晶片2の両面に銀、アル
ミニユーム、金等の物質を真空蒸着により設ける
ことにより励振電極3,3(一方は図示せず)お
よび端子4,4と成し、この水晶片2を基台5に
植設した導出端子6,6と接続された保持部材
7,7に挾持させた後、保持部材7,7と端子
4,4とを導電性の接着剤により接着し、水晶片
2の周波数を端子4,4、保持部材7,7、導出
端子6,6を介して外部へ取出すものである。
Generally, as shown in FIG. 1, a crystal resonator 1 is manufactured by providing excitation electrodes 3, 3 (one of which is shown in FIG. (not shown) and terminals 4, 4, and after this crystal piece 2 is held between holding members 7, 7 connected to lead-out terminals 6, 6 implanted in the base 5, holding members 7, 7 are formed. The terminals 4, 4 are bonded together with a conductive adhesive, and the frequency of the crystal piece 2 is extracted to the outside via the terminals 4, 4, holding members 7, 7, and lead-out terminals 6, 6.

ところで、前記した水晶振動子1の周波数は水
晶片2の形状、大きさあるいは励振電極3,3、
端子4,4の質、量により決定するものである
が、単に所定形状の水晶片2に、所定の物質を所
定量蒸着しただけでは予め定められた基準周波数
0を備えた水晶振動子を得ることは困難なことで
あり、そのため、従来の水晶振動子1は以下に説
明するように、水晶振動子1の励振電極3,3上
に更に微少量の銀、アルミニユーム、金等の物質
を数回に分けて蒸着し続け、蒸着により変化して
いく周波数1が基準周波数0と等しくなる点を求
め、その蒸着を停止し、基準周波数0を備えた水
晶振動子1を得るものである。
By the way, the frequency of the crystal resonator 1 described above depends on the shape and size of the crystal piece 2 or the excitation electrodes 3, 3,
Although it is determined by the quality and quantity of the terminals 4, 4, simply depositing a predetermined amount of a predetermined substance on a crystal piece 2 of a predetermined shape will not result in a predetermined reference frequency.
It is difficult to obtain a crystal resonator with 0. Therefore, the conventional crystal resonator 1 has an additional minute amount of silver on the excitation electrodes 3, 3 of the crystal resonator 1, as explained below. , aluminum, gold, etc. are continuously deposited several times, and the point where the frequency 1 , which changes due to the deposition, becomes equal to the reference frequency 0 , is stopped, and the crystal oscillation with the reference frequency 0 is determined. Child 1 is obtained.

以下、従来の周波数調整装置について、第2図
〜第6図を用いて説明する。前記した未調整の水
晶振動子1は第2図あるいは第3図に示すよう
に、保管の都合上トレー8,8′にその複数個
(10〜15個)が収納されている。第3図示では水
晶振動子1が個々の収納台9を介してトレー8′
に収納されている。
A conventional frequency adjustment device will be described below with reference to FIGS. 2 to 6. As shown in FIG. 2 or 3, a plurality of unadjusted crystal resonators 1 (10 to 15) are stored in trays 8, 8' for storage purposes. In the third illustration, the crystal oscillator 1 is placed on a tray 8' via individual storage stands 9.
It is stored in.

そして、周波数を調整する場合、トレー8,
8′上の水晶振動1を1つづつ真空収納室(図示
せず)に設けたターンテーブル10,10′に設
けた端子挿入部11,11あるいは収納台9の収
納孔11′に入れ替え、その後、ターンテーブル
10,10′を間欠的に回転し、蒸発源12,1
2′より銀、アルミニユーム、金等の物質を微少
量、対向する水晶振動子1の励振電極3上に蒸着
し、その水晶振動子1の周波数1が基準周波数0
になるまで、数回に分けて蒸着を行うものであ
る。数回に分けて蒸着を行うのは1度に蒸着を行
うと、その途中で基準周波数0を越えてしまうの
を防止するためで、一般には2回目の蒸着は前記
第1回目よりさらに微少量で、また、3回目はさ
らに微少量の蒸着を行うもので、この3回目の蒸
着中に基準周波数0に到達するものが多いもので
ある。
When adjusting the frequency, tray 8,
The crystal vibrations 1 on 8' are replaced one by one into the terminal insertion parts 11, 11 provided on the turntables 10, 10' provided in a vacuum storage chamber (not shown) or into the storage hole 11' of the storage stand 9, and then , the turntables 10, 10' are intermittently rotated, and the evaporation sources 12, 1
2', a minute amount of a substance such as silver, aluminum, or gold is deposited on the excitation electrode 3 of the facing crystal oscillator 1, and the frequency 1 of the crystal oscillator 1 becomes the reference frequency 0.
Vapor deposition is carried out in several steps until the The reason why the evaporation is carried out in several parts is to prevent the reference frequency from exceeding 0 in the middle of the evaporation if the evaporation is carried out at once.In general, the second evaporation is performed in an even smaller amount than the first one. Then, in the third time, an even smaller amount of vapor deposition is performed, and in many cases, the reference frequency reaches 0 during this third vapor deposition.

また、基準周波数0に到達したか否かは調整し
ようとする水晶振動子1の導出端子6,6を発振
回路(図示せず)に接続し、該発振回路に基準周
波数0を流すことによりゼロビートを検出させれ
ばよいものである。
Also, whether or not the reference frequency 0 has been reached can be determined by connecting the lead-out terminals 6, 6 of the crystal oscillator 1 to be adjusted to an oscillation circuit (not shown), and passing the reference frequency 0 through the oscillation circuit. All that is required is to detect it.

そして、調整後、真空収納室の真空状態を解除
し、水晶振動子1を再びトレー8,8′に収納し、
再び、他のトレー8,8′から他の水晶振動子1
を取出し、同様の作業を行うものである。
After the adjustment, the vacuum state in the vacuum storage chamber is released, and the crystal resonator 1 is stored in the trays 8 and 8' again.
Again, from other trays 8, 8', other crystal units 1
, and perform the same work.

ところで、前記した調整装置の場合、トレー
8,8′に収納された水晶振動子1を1つづつ取
出し真空収納室内のターンテーブル10,10′
に装着し、調整後、再びトレー8,8′に収納す
るものであるため、作業効率が悪く、多量に調整
することが困難であるばかりか、水晶振動子1の
出入が多いため、その途中で水晶振動子1を破損
してしまう等の欠点があつた。
By the way, in the case of the above-mentioned adjustment device, the crystal units 1 stored in the trays 8 and 8' are taken out one by one and placed on the turntables 10 and 10' in the vacuum storage chamber.
, and after adjustment, it is stored again in the trays 8 and 8', which not only makes it inefficient and difficult to make large amounts of adjustment, but also because the crystal oscillator 1 has to be put in and out a lot during the process. There were drawbacks such as damage to the crystal resonator 1.

本発明は叙上の点に鑑み、水晶振動子1をトレ
ーより取出すことなく、そのままの状態で、調整
を行うようにしたもので、作業能率の向上および
水晶振動子1の破損がないものを提供することを
目的とする。
In view of the above points, the present invention is designed to perform adjustment without taking out the crystal resonator 1 from the tray, improving work efficiency and preventing damage to the crystal resonator 1. The purpose is to provide.

以下、本発明の1実施例を図面に基づき詳細に
説明する。なお、本発明における水晶振動子1も
前記従来例と同一であるため、同一の符号としそ
の詳細は省略する。
Hereinafter, one embodiment of the present invention will be described in detail based on the drawings. Incidentally, since the crystal resonator 1 according to the present invention is also the same as the conventional example, the same reference numerals will be used and the details will be omitted.

第7図イ,ロは本発明に使用するトレー20の
1実施例で、イ図は正面図、ロ図は側面図であ
る。同図から明らかなように、トレー20上には
複数個(約10〜15個)の水晶振動子1が収納さ
れ、収納のため、特に図示してないがその上面に
は導出端子6,6の挿入孔が設けてあり、その両
側面下部には後述するギヤ25,31と噛合する
ためのラツクギヤ21,21が設けてある。
FIGS. 7A and 7B show one embodiment of the tray 20 used in the present invention, with FIG. 7A being a front view and FIG. 7B being a side view. As is clear from the figure, a plurality of (approximately 10 to 15) crystal units 1 are housed on the tray 20, and for storage purposes, lead-out terminals 6, 6 are provided on the top surface of the tray 20, although not particularly shown. An insertion hole is provided, and rack gears 21, 21 for meshing with gears 25, 31, which will be described later, are provided at the lower portions of both sides thereof.

第8図は周波数調整装置を示す平面図、第9図
は同部分断側面図である。図において、22は真
空収納室で、適宜手段により該室内は真空になつ
たり、解除されたりするものである。23は真空
収納室22内に配置されたターンテーブルで、タ
ーンテーブル23はモータ24に所定量(実施例
では1/16回転)間欠的に回転するものである。ま
た、ターンテーブル23の円周付近には等間隔に
16個の孔23a,23b……23pが設けてあ
る。そして、該ターンテーブル23上には前記し
たトレー20が16個収納できるようになつてい
る。25はターンテーブル23上に収納されたト
レー20の側面に設けたラツクギヤ21と噛合す
る送りギヤで、該送りギヤ25はターンテーブル
23が所定の位置に定位した時、任意の手段によ
り孔、23a〜23pの1つから突出し、モータ
26の回転により所定量づつ回転し、トレー20
を間欠的に後述する調整部29側へ移動させるも
のである。なお、27はモータ26に設けたギ
ヤ、28は中間ギヤである。29は水晶振動子1
の周波数を調整するための調整部で、該調整部2
9は前記トレー20の1つが収納可能な大きさ
で、水晶振動子1の励振電極3面に銀、アルミニ
ユーム、金等の金属物質を微少量蒸着させるため
の蒸発源30と、調整部29に取出されたトレー
20に元のターンテーブル23上に復帰させるた
めの戻しギヤ31が設けてある。32はギヤ31
を回転させるためのモータである。
FIG. 8 is a plan view showing the frequency adjustment device, and FIG. 9 is a sectional side view of the same portion. In the figure, reference numeral 22 denotes a vacuum storage chamber, which is made into or released from a vacuum by appropriate means. Reference numeral 23 denotes a turntable disposed within the vacuum storage chamber 22, and the turntable 23 is intermittently rotated by a motor 24 by a predetermined amount (1/16 rotation in the embodiment). Also, near the circumference of the turntable 23, there are
Sixteen holes 23a, 23b...23p are provided. The turntable 23 can accommodate 16 of the trays 20 described above. A feed gear 25 meshes with a rack gear 21 provided on the side surface of the tray 20 housed on the turntable 23. When the turntable 23 is positioned at a predetermined position, the feed gear 25 is inserted into the hole 23a by any means. The tray 20 protrudes from one of the trays 23p and rotates by a predetermined amount by the rotation of the motor 26.
is intermittently moved toward an adjustment section 29, which will be described later. Note that 27 is a gear provided on the motor 26, and 28 is an intermediate gear. 29 is crystal oscillator 1
an adjustment section for adjusting the frequency of the adjustment section 2;
Reference numeral 9 has a size that can accommodate one of the trays 20, and includes an evaporation source 30 for depositing a minute amount of a metal substance such as silver, aluminum, or gold on the excitation electrode 3 surface of the crystal resonator 1, and an adjustment section 29. A return gear 31 is provided for returning the removed tray 20 to the original turntable 23. 32 is gear 31
This is a motor for rotating.

次に、前記調整装置における水晶振動子1の周
波数調整について説明する。先ず、真空収納室2
2の上部カバー(図示せず)を開放し、水晶振動
子1を複数個収納したトレー20を所定位置の所
定量(実施例では16個まで可能)収納する。収納
後上部カバーを閉鎖し、収納室22を真空状態に
変更する。その後、モータ24を所定量回転させ
て、トレー20の1つを調整部29に対向させ
る。トレー20が調整部29と対向するとターン
テーブル23の回転が停止すると共にターンテー
ブル23の孔23aより送りギヤ25が上昇し、
トレー20のラツクギヤ21と噛合する。そし
て、モータ26を所定量づつ回転させることによ
り、水晶振動子1の最初の1つに対し、その励振
電極3面に蒸発源30より金属物質を微少量蒸着
し、次に、次の水晶振動子1の順に行い、そのト
レー20内の最後の1つの蒸着が終了すると、調
整部29内の戻しギヤ31および前記送りギヤ2
5が逆回転し、トレー20を元の位置に復帰す
る。トレー20が戻ると送りギヤ25が降下し、
再び、ターンテーブル23は所定量回転し、次の
トレー20を調整部29に対向させ、そのトレー
20内の水晶振動子1を前記と同様の方法により
蒸着する。このように蒸着を繰り返しターンテー
ブル23を1回転させると、各トレー20内の水
晶振動子1の第1回目の前調整が終了する。な
お、前記動作において、ターンテーブル23の回
転開始および停止、送りギヤ25の上昇、下降お
よび回転開始、停止、蒸着の開始、終了、戻しギ
ヤ31の回転開始、停止等は何れも特に図示して
ないがセンサー等によりマイクロコンピユータを
働かせることにより簡単に制御することができる
ものである。
Next, frequency adjustment of the crystal resonator 1 in the adjustment device will be explained. First, vacuum storage chamber 2
The upper cover (not shown) of 2 is opened, and a tray 20 containing a plurality of crystal resonators 1 is stored in a predetermined position and in a predetermined amount (up to 16 in the embodiment). After storage, the upper cover is closed and the storage chamber 22 is placed in a vacuum state. Thereafter, the motor 24 is rotated by a predetermined amount to cause one of the trays 20 to face the adjustment section 29. When the tray 20 faces the adjustment part 29, the turntable 23 stops rotating and the feed gear 25 rises from the hole 23a of the turntable 23.
It meshes with the rack gear 21 of the tray 20. Then, by rotating the motor 26 by a predetermined amount, a minute amount of metal material is evaporated from the evaporation source 30 onto the excitation electrode 3 surface of the first one of the crystal oscillators 1, and then the next crystal oscillation is performed. When the last one in the tray 20 is finished, the return gear 31 in the adjustment section 29 and the feed gear 2
5 rotates in the opposite direction to return the tray 20 to its original position. When the tray 20 returns, the feed gear 25 descends,
The turntable 23 is rotated by a predetermined amount again, the next tray 20 is made to face the adjustment section 29, and the crystal resonator 1 in the tray 20 is vapor-deposited in the same manner as described above. When the vapor deposition is repeated in this manner and the turntable 23 is rotated once, the first pre-adjustment of the crystal resonators 1 in each tray 20 is completed. In addition, in the above-mentioned operations, the rotation start and stop of the turntable 23, the raising and lowering of the feed gear 25, the start and stop of rotation, the start and end of vapor deposition, the start and stop of rotation of the return gear 31, etc. are not particularly illustrated. However, it can be easily controlled by using a microcomputer using sensors, etc.

そして、第1回目が終了すると、蒸発源30の
電圧を変更して、金属物質の蒸着量を前記より微
少量として、再び同一の動作を繰り返し中調整を
行う。勿論、第1回目もしくはこの2回目の調整
により基準周波数0を備える水晶振動子1が誕生
することもある。そして、最後に、蒸発源30の
電圧をさらに変更して、金属物質の蒸着量をさら
に微少量にして、前記同様の動作を繰り返すこと
により最終調整を行うと、水晶振動子1は総て基
準周波数0を備えたものとなる。調整が終了した
ら、真空収納室22の真空状態を解除し、上部カ
バーを開放して、トレー20を取出せばよいもの
である。
When the first time is completed, the voltage of the evaporation source 30 is changed to make the amount of metal substance evaporated a much smaller amount than the above, and the same operation is repeated again to perform the adjustment. Of course, a crystal resonator 1 having a reference frequency of 0 may be created by the first or second adjustment. Finally, the final adjustment is made by further changing the voltage of the evaporation source 30 to make the amount of metal material evaporated even smaller and repeating the same operation as described above. It has a frequency of 0 . When the adjustment is completed, the vacuum state in the vacuum storage chamber 22 is released, the upper cover is opened, and the tray 20 is taken out.

すなわち、上記方法によればターンテーブル2
3を2〜3回転することにより水晶振動子1の周
波数が調整できるものである。
That is, according to the above method, the turntable 2
The frequency of the crystal resonator 1 can be adjusted by rotating the oscillator 3 two to three times.

第10図は本発明の他の実施例を示したもの
で、この図から明らかなように、調整部を等間隔
に3個29a,29b,29c設けたものであ
る。勿論各調整部29a,29b,29cには前
記第1の実施例と同様蒸発源30a,30b,3
0c、戻しギヤ31a(他は図示せず)が設けて
あり、特に蒸発源30a,30b,30cの蒸着
量の関係は30a>30b>30cとなつてお
り、30aで前調整を、30bで中調整を、30
cで最終調整を行うようにしたもので、これによ
り、ターンテーブル23の1回転で総ての調整が
行うことができ、しかも、ターンテーブル23の
1回の停止で3個所同時に働かせることができ高
能率である。勿論、調整部29a,29b,29
cと対向する位置には送りギヤがあることは言う
までもなく、調整は前、中、最終と順番に行われ
るものである。
FIG. 10 shows another embodiment of the present invention, and as is clear from this figure, three adjustment portions 29a, 29b, and 29c are provided at equal intervals. Of course, each adjustment section 29a, 29b, 29c is provided with evaporation sources 30a, 30b, 3 as in the first embodiment.
0c, a return gear 31a (others not shown) are provided, and in particular, the relationship between the evaporation amounts of the evaporation sources 30a, 30b, and 30c is 30a>30b>30c, and 30a is used for pre-adjustment, and 30b is used for intermediate adjustment. Adjustment, 30
The final adjustment is made at step c. This allows all adjustments to be made with one rotation of the turntable 23, and three positions can be worked at the same time by one stop of the turntable 23. High efficiency. Of course, the adjustment parts 29a, 29b, 29
It goes without saying that there is a feed gear at the position facing c, and adjustments are made in the order of front, middle, and final.

なお、前記、第1、第2の実施例ではトレー2
0のターンテーブル23への収納数を16個とした
が、必ずしも16個に限定されることなくいくつに
するかは設計、作業上の任意のことであり、ま
た、調整部29の数を1つあるいは3としたが、
これも限定されることなく任意のことであり、さ
らに、ターンテーブル23の回転、トレー20の
移送をモータ24,26,31を用いたがモータ
に限定されることなく、例えばソレノイドプラン
ジヤー等を使用してもよいものである。
In addition, in the first and second embodiments, the tray 2
The number of adjustment units 29 to be stored in the turntable 23 is set to 16, but it is not necessarily limited to 16, and the number of units to be stored is a matter of design and work discretion. I set it to 1 or 3, but
This is also arbitrary without limitation, and furthermore, although the motors 24, 26, and 31 were used to rotate the turntable 23 and transport the tray 20, the motors are not limited to the motors, and for example, a solenoid plunger or the like may be used. It is okay to use.

以上説明したように、本発明によれば、水晶振
動子1の表面に微少量の金属物質を蒸着して周波
数を調整する水晶振動子の周波数調整装置におい
て、真空収納室22、この真空収納室22内で複
数個の水晶振動子1を収納した複数個のトレー2
0を間欠的に移送するターンテーブル23、及び
このターンテーブル23上のトレー20を1つず
つ引き出す手段と、この引き出されたトレー20
に収納された各水晶振動子1の表面に順次に微少
量の金属を蒸着する手段30と、各水晶振動子1
の周波数変化を検出する手段からなる周波数調整
部29を設けたので、水晶振動子1の基準周波数
0への調整は、従来のように水晶振動子1を1つ
1つトレー20から取出す必要がなく、トレー2
0に収納されたまま行うことができ、作業能率が
著しく向上するばかりか、水晶振動子1にさわる
ことがないので、周波数の調整に際して振動子を
破損しない。また、真空収納室の真空状態を解除
せずに、確実に、かつ1度に多量の水晶振動子1
の調整ができる等の効果がある。
As explained above, according to the present invention, in the frequency adjustment device for a crystal resonator that adjusts the frequency by depositing a minute amount of metal material on the surface of the crystal resonator 1, the vacuum storage chamber 22, the vacuum storage chamber A plurality of trays 2 storing a plurality of crystal units 1 in the tray 22
a turntable 23 for intermittently transferring 0, a means for pulling out the trays 20 on this turntable 23 one by one, and a means for pulling out the trays 20 on this turntable 23 one by one;
means 30 for sequentially depositing a minute amount of metal on the surface of each crystal oscillator 1 housed in the quartz crystal oscillator 1;
Since the frequency adjustment section 29 consisting of means for detecting the frequency change of the crystal resonator 1 is provided, the reference frequency of the crystal resonator 1
To adjust to 0 , there is no need to take out the crystal units 1 one by one from the tray 20 as in the conventional case.
0, which not only significantly improves work efficiency, but also eliminates the need to touch the crystal oscillator 1, prevents damage to the oscillator during frequency adjustment. In addition, it is possible to reliably store a large number of crystal units 1 at a time without releasing the vacuum state in the vacuum storage chamber.
This has the effect of allowing adjustments to be made.

また、本発明の第2の実施例のように複数個の
調整部29a,29b,29cを設ければ、同時
に数個所で調整することができ、さらに高能率で
ある。
Furthermore, if a plurality of adjustment parts 29a, 29b, and 29c are provided as in the second embodiment of the present invention, adjustment can be made at several places at the same time, resulting in even higher efficiency.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は水晶振動子1の構造を示す正面図、第
2図〜第6図は従来例を示し、第2図は第1のト
レー8を示し、イ図は正面図、ロ図は側面図、第
3図は第2のトレー8′を示し、イ図は正面図、
ロは側面図、第4図は調整装置の正面図、第5図
は同平面図、第6図は他形状の調整装置の平面
図、第7図〜第9図は本発明の第1の実施例を示
し、第7図はトレー20を示し、イ図は正面図、
ロ図は側面図、第8図は調整装置の平面図、第9
図は同部分断側面図、第10図は他の実施例を示
す平面図である。 1……水晶振動子、20……トレー、22……
真空収納室、23……ターンテーブル、25……
送りギヤ、29……調整部、29a,29b,2
9c……調整部、30……蒸発源、30a,30
b,30c……蒸発源、31……戻しギヤ、31
a,31b,31c……戻しギヤ。
Fig. 1 is a front view showing the structure of the crystal resonator 1, Figs. 2 to 6 show a conventional example, Fig. 2 shows the first tray 8, Fig. A is a front view, and Fig. B is a side view. Figures 3 and 3 show the second tray 8', Figure A is a front view,
B is a side view, FIG. 4 is a front view of the adjusting device, FIG. 5 is a plan view of the same, FIG. 6 is a plan view of adjusting devices of other shapes, and FIGS. An example is shown, FIG. 7 shows the tray 20, and FIG.
Figure 8 is a side view, Figure 8 is a plan view of the adjustment device, Figure 9 is a side view.
The figure is a sectional side view of the same part, and FIG. 10 is a plan view showing another embodiment. 1...Crystal resonator, 20...Tray, 22...
Vacuum storage chamber, 23... Turntable, 25...
Feed gear, 29...adjustment section, 29a, 29b, 2
9c... Adjustment section, 30... Evaporation source, 30a, 30
b, 30c... Evaporation source, 31... Return gear, 31
a, 31b, 31c...Return gear.

Claims (1)

【特許請求の範囲】 1 水晶振動子の表面に微少量の金属物質を蒸着
して周波数を調整する水晶振動子の周波数調整装
置において、真空収納室と、この真空収納室内で
複数個の水晶振動子を収納した複数個のトレーを
間欠的に移送するターンテーブルと、このターン
テーブル上のトレーを1つずつ引き出す手段と、
この引き出されたトレーに収納された各水晶振動
子の表面に順次に微少量の金属を蒸着する手段
と、各水晶振動子の周波数変化を検出する手段と
を具備してなることを特徴とする水晶振動子の周
波数調整装置。 2 前記真空収納室内に、トレーを引き出す手
段、金属を蒸着する手段を複数個設けたことを特
徴とする特許請求の範囲第1項に記載の水晶振動
子の周波数調整装置。
[Scope of Claims] 1. A frequency adjustment device for a crystal resonator that adjusts the frequency by depositing a minute amount of metal material on the surface of the crystal resonator, which includes a vacuum storage chamber and a plurality of crystal oscillations within the vacuum storage chamber. a turntable for intermittently transporting a plurality of trays containing children; and means for pulling out the trays on the turntable one by one;
It is characterized by comprising means for sequentially depositing a minute amount of metal on the surface of each crystal resonator housed in the pulled-out tray, and means for detecting frequency changes of each crystal resonator. Crystal oscillator frequency adjustment device. 2. The frequency adjustment device for a crystal resonator according to claim 1, wherein a plurality of means for pulling out the tray and means for depositing metal are provided in the vacuum storage chamber.
JP18740880A 1980-12-30 1980-12-30 Frequency adjuster for quartz oscillator Granted JPS57113607A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18740880A JPS57113607A (en) 1980-12-30 1980-12-30 Frequency adjuster for quartz oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18740880A JPS57113607A (en) 1980-12-30 1980-12-30 Frequency adjuster for quartz oscillator

Publications (2)

Publication Number Publication Date
JPS57113607A JPS57113607A (en) 1982-07-15
JPS634727B2 true JPS634727B2 (en) 1988-01-30

Family

ID=16205504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18740880A Granted JPS57113607A (en) 1980-12-30 1980-12-30 Frequency adjuster for quartz oscillator

Country Status (1)

Country Link
JP (1) JPS57113607A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07507185A (en) * 1992-03-02 1995-08-03 クォーツ、プロ、ライン、ハーベー Method and plant for piezoelectric resonator production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07507185A (en) * 1992-03-02 1995-08-03 クォーツ、プロ、ライン、ハーベー Method and plant for piezoelectric resonator production

Also Published As

Publication number Publication date
JPS57113607A (en) 1982-07-15

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