JPH021226B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum evaporation apparatus for a crystal resonator, in particular, to provide excitation electrodes on a plurality of crystal pieces at the same time, and then
The present invention relates to a vacuum evaporation device that allows frequency adjustment to be performed sequentially on each crystal piece.

Generally, a crystal resonator 1 has a crystal piece 2 cut out at a predetermined angle, and chromium is coated on both sides of the crystal piece 2, as shown in FIG.
Excitation electrodes 3, 3 (one not shown) and terminals 4, 4 are formed by vacuum-depositing a metal material such as gold, silver, or aluminum into multiple layers such as two or three layers. After the piece 2 is held between the holding members 7, 7 connected to the lead-out terminals 6, 6 planted on the base 5, the holding members 7, 7 and the terminals 4, 4 are bonded with a conductive adhesive. , the vibration energy of the crystal piece 2 is transferred to the terminals 4, 4, the holding members 7, 7, and the lead-out terminals 6, 6.
It is taken out to the outside through.

By the way, the vibration frequency of the crystal resonator 1 described above depends on the thickness and size of the crystal piece 2 or the excitation electrode 3,
3. This is determined by the quality and quantity of the terminals 4, 4, but since it is difficult to accurately cut out the thickness of the crystal piece 2, the crystal piece 2 of a predetermined shape is simply coated with a predetermined material (chromium, gold, gold, etc.). It is difficult to obtain a crystal resonator that vibrates at a predetermined accurate frequency _{of 0} simply by depositing a predetermined amount of silver, aluminum) in a vacuum evaporation device. After the excitation electrodes 3, 3 are vapor-deposited in two or three layers on the crystal piece 2 in a vacuum evaporation apparatus, the crystal piece 2 is taken out from the vacuum evaporation apparatus, held between the holding members 7, 7 as described above, and the crystal piece 2 is Transducer 1 to 2nd
As shown in the figure or FIG.
Thereafter, by the method described below, a minute amount of material is continued to be deposited on the excitation electrodes 3, 3 of the crystal piece 2 in several steps, and the frequency ₁ changes as the deposition progresses.
The point at which is equal to a predetermined frequency _{of 0} is determined, and the vapor deposition is stopped to obtain a crystal resonator 1 having a reference frequency of ₀ .

In addition, in the third illustration, the crystal resonators 1 are stored in a tray 8' via individual storage stands 9.

When adjusting the frequency, tray 8,
Terminal insertion portions 11, 11 provided on turntables 10, 10' in a vacuum deposition chamber (not shown) or storage holes 11 of storage stand 9 are used to adjust the frequency of crystal oscillators 1 on 8' one by one. ', then the turntables 10, 10' are rotated intermittently, and a minute amount of a substance such as chromium, gold, silver, aluminum, etc. is applied from the evaporation sources 12, 12' to the excitation electrode 3 of the facing crystal resonator 1. Then, the vapor deposition is carried out in several steps until the frequency ₁ of the crystal oscillator 1 becomes the reference frequency ₀ . The reason why the evaporation is carried out in several parts is to prevent the reference frequency from exceeding ₀ in the middle of the evaporation if the evaporation is carried out at once.In general, the second evaporation is performed in an even smaller amount than the first one. In addition, the third time is to perform a further minute amount of deposition, and during this third deposition, the reference frequency is set to _0.
Many of them reach this point.

Also, to determine whether the reference frequency ₀ has been reached, connect the lead-out terminals 6, 6 of the crystal resonator 1 to be adjusted to an oscillation circuit (not shown) and oscillate it, and separate the reference frequency from the signal from the oscillation circuit. It is sufficient to detect a zero beat with a signal from an oscillator that oscillates at a frequency of ₀ .

After the adjustment, the vacuum state in the vacuum deposition chamber is released, and the crystal resonator 1 is stored in the trays 8 and 8' again.
Again, from other trays 8, 8', other crystal units 1
, and perform the same work.

By the way, the conventional crystal oscillator described above is first stored and taken out in a vacuum evaporation chamber in order to evaporate the excitation electrodes 3, 3 onto the crystal piece 2, and then returned to the vacuum evaporation chamber (in the same or another vacuum chamber) for frequency adjustment. The process is complicated because the crystal resonators stored in the trays 8, 8' must be taken out one by one, and the turntables 10, 10' inside the vacuum deposition chamber must be taken out one by one. Since it is installed in the tray 8, 8' after adjustment, the work efficiency is poor and the crystal unit 1 is moved in and out frequently, resulting in damage to the crystal piece 2 in the process. It was hot.

In view of the above points, the present invention stores a plurality of crystal pieces in the same vacuum evaporation chamber, simultaneously applies basic vapor deposition for excitation electrodes to each crystal piece, and then, while maintaining the vacuum state, It is an object of the present invention to eliminate the above-mentioned drawbacks by sequentially adjusting the frequencies one by one, and to provide an apparatus that improves work efficiency and does not cause damage to the crystal piece.

Hereinafter, one embodiment of the present invention will be described in detail based on the drawings. FIG. 7 is a front view showing the state in which the crystal piece 2 is attached to the base 5. As shown in FIG. In this state, excitation electrodes 3, 3 and terminals 4, 4 are provided on both sides of the crystal piece 2.
is not provided, and is simply temporarily fixed to the holding members 7, 7. In the figure, reference numeral 20 denotes a mask, which is fitted onto the base 5, and has holes 2 on its front and back surfaces for allowing vapor deposition.
1 and 21 are provided. Note that 6 and 6 are terminals. Further, the above state is hereinafter referred to as a sample.

FIG. 8 is a partially sectional side view of the vacuum deposition chamber 22. Reference numeral 23 denotes a substrate, and the substrate 23 is provided with a plurality of support columns 24, and a first deposit shielding plate 25 is non-rotatably attached to the tips of the support columns 24. 26a to 26f are holes provided in the first vapor deposition material shielding plate 25 to allow vapor deposition;
6a to 26f are provided at equal distances from the monitor hole 27 and at equal intervals, as shown in FIG. In addition, in the figure, 28... are holes that fit into the support columns 24. Reference numeral 29 denotes a frequency adjustment adjustment hole provided between the holes 26a and 26f, and is provided equidistantly from the monitoring hole 27 like the holes 26a to 26f. Reference numeral 30 denotes a rotating member having teeth 31 on its outer periphery. The rotating member 30 is provided with a plurality of (six in this embodiment) supporting parts 32a to 32f, and the tips of each of the supporting parts 32a to 32f are Holes 34a to 34f are provided in the slanted portions 33a to 33f to attach sample mounting members, which will be described later. Further, the support portions 32a to 32f are provided with rectangular holes 35a to 35f for supporting a second deposit shielding plate, which will be described later. 36 is a rotor provided on the lower surface of the rotating member 30 and comes into contact with the substrate 23; 37 is a gear that meshes with the teeth 31; the gear 37 rotates as the motor 38 rotates. 39 is a second vapor deposit shielding plate;
As shown in FIG.
Holes 40a to 40f are provided at positions corresponding to 6f. 41a to 41f are rectangular protruding pieces provided on the second vapor deposit shielding plate, and the protruding pieces 41a to 41f are rectangular holes 35a provided in the supporting parts 32a to 32f.
- Fits with 35f. Therefore, the second deposit shielding plate 39 can rotate as the rotating member 30 rotates. Note that the protruding pieces 41a to 41f are provided at positions corresponding to the respective holes 40a to 40f.
42 is a hole for monitoring. 43a to 43f are sample mounting members rotatably provided on the support parts 32a to 32f, and the mounting members 43a to 43f are the first
As shown in FIG. 1, the holes 44 correspond to the holes 40a to 40f provided in the second vapor deposit shielding plate 39, and have the same structure. A base part is provided with insertion holes 45 and 46 for inserting the terminals 6 and 6 of the sample, 47 is a rotating shaft attached to the base part 44,
The rotary shaft 47 passes through a hole 34a provided in the support portion 32a of the rotary member 30, and the base portion 4 is attached to the end of the hole 34a.
A gear wheel 48 is provided which meshes with a reversing mechanism for counter-rotating 4. Reference numeral 49 denotes a take-out member for taking out the frequency during frequency adjustment, and the take-out member 49 is movable up and down, and has take-out terminals 50, 50 (one not shown) at the ends that make contact with the terminals 6, 6 of the sample. but,
At the other end is a pin 5 that engages with a cam plate 52 for vertical movement.
1 is provided. Reference numeral 53 denotes a solenoid for moving the cam plate 52. When the solenoid 53 is energized, the plunger 54 is attracted, the cam plate 52 connected to the plunger 54 moves, and the cam plate 5
The second cam surface (slanted surface) 52a presses the pin 51 and raises the take-out member 49 accordingly. Note that when the solenoid 53 is deenergized, the plunger 54 returns to its original state due to the elasticity of the spring, although not particularly shown. 55 is a reversing mechanism provided on the extraction member 49, and the reversing mechanism 5
5 is a gear 48 provided on the mounting members 43a to 43f.
A rack gear 56 is provided for meshing with and reversing the mounting member. Further, the reversing mechanism 55 follows the vertical movement of the take-out member 49, and the rack gear 5 only moves when the take-out member 49 is in the raised position.
6 can mesh with gears 48... Reference numeral 57 denotes an evaporation source provided on the substrate 23 so as to be equidistant from each sample.The evaporation source 57 houses the metal to be evaporated, and the metal is evaporated by applying electricity. 58 is a crystal piece for the monitor, and this crystal piece 5
8 is provided with an electrode in advance, and the vapor deposition state of the sample is determined by monitoring the amount of metal vapor deposited on this electrode. This corresponds to the monitor holes 27 and 42 provided in the. 59 is a removable cover.

Next, the operation of the present invention will be explained. First of all,
Remove the cover 57 and attach each mounting member 43a to 43f.
The terminals 6, 6 of the sample are inserted into the insertion holes 45, 46 provided in the sample, and the sample is attached to the mounting members 43a to 43f. Further, the evaporation source 57 stores the metal to be evaporated. Thereafter, the cover 59 is placed on the vacuum deposition chamber 22 to create a vacuum state, and the motor 38 is rotated to rotate the rotary member 30 so that the second deposition section shielding plate 39 is closed as shown in FIG. Hole 4 provided in
The holes 0a to 40f are set to correspond to the holes 26a to 26f provided in the first vapor deposition section shielding plate 25.
In addition, in this state, the solenoid 53 is energized, so the plunger 54 is attracted, the extraction member 49 is in the raised position (shown by the dotted line in FIG. 8), and the extraction terminals 50, 50 are connected to the sample terminal 6, 6
The rack gear 56 of the reversing mechanism 55 is also in the raised position, and each mounting member 43
It is in a state where it can mesh with the gears 48 of a to 43f.
Further, since the holes 40a to 40f and 26a to 26f correspond to each other, the adjustment holes provided in the first vapor deposit shielding plate 25 are set to be shielded by the second vapor deposit shielding plate 39. . When electricity is applied to the evaporation source 57 from this state, the metal evaporates and the holes 26a to
26f (40a to 40f) and the holes 21 of the mask 20 provided in each sample, each sample (each crystal piece 2) is metal-deposited simultaneously. While monitoring the evaporation state with a monitoring crystal piece 58, when a predetermined amount of evaporation has been completed, the energization to the evaporation source 57 is removed.
When the motor 38 is rotated and the rotating member 30 rotates once, the gears 48 provided on the mounting members 43a to 43f mesh with the rack gears 56 of the reversing mechanism 55, so the mounting members 43a to 43f rotate.
Rotate the sample counter-rotate. Then, by energizing the evaporation source 57 again, the metal is evaporated, and the metal is deposited on the other surface of each crystal piece 2, so that the excitation electrodes 3, 3 can be deposited on both sides of each crystal piece 2. That is, the basic vapor deposition process is completed.

Next, frequency adjustment will be explained. First, when the basic vapor deposition is completed, the motor 38 is rotated,
Rotating the rotating member 30 by 1/12 rotation, one of the holes 40a to 40f provided in the second vapor deposition shielding plate 39,
For example, as shown in FIG. 14, the hole 40a is made to correspond to the adjustment hole 29 provided in the first deposit shielding plate 25. Therefore, the other holes 40b to 40f and the holes 26a to 26f of the first deposit shielding plate 25 are mutually shielded by the other deposit shielding plates 25 and 39. After that, when the solenoid 53 is de-energized, the plunger 54 returns to its original position, so the cam plate 5
2 also returns, the extraction member 49 that was in the raised position is lowered, and the extraction terminals 50, 50 are connected to the terminals 6, 6 of the sample.
come into contact with. In this state, when the evaporation source 57 is energized, a small amount of metal is evaporated, and the adjustment holes 29 and 40
A and through the holes 21 of the mask 20, a small amount of metal is further deposited. At this time, the excitation electrodes of the crystal blank 2 are led out to the holding members 7, 7, the terminals 6, 6, and the extraction terminals 50, 50, so the terminals 50 are further connected to the oscillation circuit (not shown) via lead wires (not shown). (not shown) to generate oscillation, and using a signal from the oscillation circuit and a separate signal from an oscillator that oscillates at a reference frequency of ₀ , the zero beat is detected as in the conventional example, and the adjustment of the sample is completed. When the adjustment of one sample is completed, the motor 38 is rotated, the rotating member 30 is rotated one-sixth of a turn, the next hole 40b is made to correspond to the adjustment hole 29, the next sample is adjusted, and the rotating member 30 is rotated. By rotating once, frequency adjustment for all samples is completed. After the completion, the vacuum state is released, the cover 59 is removed, and each sample is taken out, so that the crystal piece 2 with the excitation electrodes 3 and the frequency adjustment completed is created.

In the above embodiment, six holes 26a to 26f, 40 are provided in the two vapor deposit shielding plates 25, 39.
a to 40f, and sample mounting members 43a to 4
Although six 3fs are used, the number is not necessarily limited to six, and the number is arbitrary in terms of design.

Further, as an example of the reversing mechanism, it has been explained that the reversing mechanism is performed by meshing the gears 48 and the rack gear 56, but this is just one example.
A cam mechanism, a spring mechanism, etc. can be selected arbitrarily.

Also, the motor 3 is used to rotate the rotating member 30.
8 was used, but it is not limited to motors,
For example, it is possible to use a solenoid plunger or the like.

As described above in detail, according to the present invention, one of the two vapor deposit shielding plates 25 and 39 provided between the crystal blank 2 and the evaporation source 57 is rotatable, and the other is non-rotatable. In addition, the two vapor deposit shielding plates each have a plurality of holes 26a to 26 at corresponding positions.
f, 40a to 40f, and the rotatable deposit shielding plate 39 has mounting members 43a to 43f for the crystal piece 2.
In addition, the non-rotatable deposit shielding plate 25 is provided with one adjustment hole 29 in addition to the holes 40a to 40f, and each hole 26 except the adjustment hole 29 is provided during foundation plating.
A to 26f and 40a to 40f are made to correspond to each other, and metal vapor deposition is performed simultaneously on each crystal piece attached to the mounting member, and at the time of frequency adjustment, each hole of a rotatably provided vapor deposition shielding plate is sequentially made to correspond to an adjustment hole. , only the crystal piece corresponding to the adjustment hole made it possible to deposit metal for frequency adjustment, so in the same vacuum deposition chamber,
Basic plating and frequency adjustment can be performed without causing vacuum breakdown, the work process is simplified, and there is no vacuum breakdown, so inexpensive crystal resonators can be provided in large quantities, and crystal pieces can be put in and out easily. Since only a small amount is required, there is an effect that the crystal piece will not be damaged.

Furthermore, since the mounting member is reversible, excitation electrodes can be easily provided on both sides of the crystal piece.

Furthermore, since the deposit shielding plate closer to the evaporation source is made non-rotatable, the crystal piece can be attached on the upper side, improving work efficiency.

Further, since a take-out terminal is provided at a position corresponding to the adjustment hole and comes into contact with the terminal of the crystal piece only during frequency adjustment, the frequency can be taken out easily.

[Brief explanation of drawings]

Figure 1 is a front view of the crystal resonator 1, Figures 2 to 6
The figure shows a conventional example of frequency adjustment, Figure 2 shows the first tray 8, Figure A is a front view, Figure B is a side view,
Figure 3 shows the second tray 8', Figure A is a front view;
Figure B is a side view, Figure 4 is a front view of the adjustment device, Figure 5 is a front view of the adjustment device,
The figure is a plan view of the same, FIG. 6 is a plan view of an adjusting device of other shapes, and FIGS. 7 to 14 show embodiments of the present invention.
Figure 7 is a front view of the sample, Figure 8 is the vacuum deposition chamber 22.
FIG. 9 is a partially sectional side view of the second vapor deposit shielding plate 3.
9, and FIG. 10 is a plan view of the first vapor deposit shielding plate 25.
, FIG. 11 is a plan view showing the mounting state of the sample, FIG. 12 is an enlarged plan view of the mounting member, and FIG. 13 is the deposit shielding plate 25 showing the basic vapor deposition state.
FIG. 14 is a plan view of the deposit shielding plates 25 and 39 showing the frequency adjustment state. DESCRIPTION OF SYMBOLS 1... Crystal resonator, 2... Crystal piece, 3, 3... Excitation electrode, 6, 6... Terminal, 22... Vacuum deposition chamber, 25... Deposit shielding plate, 26a-26f... Hole, 29... Adjustment hole, 30... Rotating member, 32a to 32f...support part,
39... Deposit shielding plate, 40a to 40f... Hole, 43
a to 43f... Attachment member, 48... Gear, 49... Takeout member, 50, 50... Takeout terminal, 55... Reversing mechanism, 56... Rack gear, 57... Evaporation source.

Claims (1)

[Scope of Claims] 1. A plurality of crystal pieces are housed in a vacuum deposition chamber, and basic vapor deposition of an excitation electrode to be an excitation electrode is applied to the plurality of crystal pieces at the same time, and then, each crystal piece is deposited one by one. In a vacuum evaporation apparatus for a crystal oscillator, the frequency of which can be adjusted sequentially, one of the two evaporation material shielding plates provided between the crystal piece and the evaporation source is rotatable and the other is non-rotatable. 2.
A plurality of holes are provided in each of the two vapor deposition shielding plates at corresponding positions, and the rotatable vapor deposition shielding plate is provided with a mounting member for a crystal piece that rotates as the vapor deposition shielding plate rotates, In addition, one adjustment hole is provided in the non-rotatable deposition material shielding plate, and at the time of basic deposition, each hole except the adjustment hole is made to correspond to each crystal piece attached to the mounting member at the same time. In addition to performing metal vapor deposition, when adjusting the frequency, each hole of the rotatably provided vapor deposition material shielding plate was made to correspond to the adjustment hole in sequence, so that only the crystal pieces corresponding to the adjustment holes were capable of metal vapor deposition for frequency adjustment. A vacuum evaporation device for a crystal resonator, which is characterized by: 2. The vacuum evaporation apparatus for a crystal resonator according to claim 1, wherein the mounting member for the crystal piece is reversible. 3. The vacuum evaporation apparatus for a crystal resonator according to claim 1, characterized in that of the two evaporation material shielding plates, the one closer to the evaporation source is not rotatable. 4. The crystal oscillation according to claim 1, characterized in that a frequency extraction terminal is provided at a position corresponding to the adjustment hole provided in the vapor deposit shielding plate and comes into contact with a terminal of the crystal piece only during frequency adjustment. Child vacuum evaporation equipment.