JPH0321461B2 - - Google Patents

Description

[Detailed Description of the Invention] [Summary] The present invention provides a method for attaching one thin plate at the bottom of a laminated thin plate group in which a plurality of thin plates, such as materials for IC lead frames, are laminated to two opposite sides thereof. This is a laminated thin plate separation device that reliably separates the laminated thin plates from a group of laminated thin plates by compressing and deforming the laminated thin plates from the side.

[Industrial application field]

The present invention is an IC (integrated circuit)
It relates to automated technology that reliably separates a single thin plate from a group of laminated thin plates such as lead frames for industrial use, and more specifically, it deforms this single thin plate into an arc shape and separates it. This invention relates to a device for separating laminated thin plates.

In order to improve production efficiency by reliably separating thin plates such as lead frames used in IC manufacturing methods one by one from their laminated state, it is necessary to increase the speed and reliability of this separation process and maintain the quality of the thin plates. There is a need for an automatic machine that can perform this process reliably.

[Conventional technology]

A method of separating thin plates using a conventional laminated thin plate separating apparatus will be explained with reference to FIGS. 7 and 8.

FIG. 7 shows a separation method using a vacuum chuck. In the figure, 1 is a group of stacked laminated thin plates with irregularities, 40 is a vacuum chuck, and 1-2 is a thin plate that has been attracted and separated.

This vacuum chuck 40 can move up and down, and has a structure in which the thin plate 1-2 at the top of the stack is vacuum-adsorbed when descending, and then the thin plate 1-2 is separated from the laminated thin plate group 1 by rising. It is.

Fig. 8 shows a separation method using wedge-shaped claws, in which 1 is a group of stacked laminated thin plates with unevenness, 41 is a wedge-shaped claw, 3 is a support, and 1-1
is a separated lamina. The laminated thin plate group 1 is supported by a support 3, and in this state, a wedge-shaped pawl 41 is forcibly inserted between the bottom layer and the thin plate above it, and the support is moved horizontally. If the interval is wider than the width of the thin plate, the lowest thin plate 1-
1 falls due to its own weight, and the thin plate 1-1 is separated from the laminated thin plate group 1 with unevenness, and then the spacing between the supports 3 is returned to the original spacing, and then the spacing between the claws 41 is changed to the original spacing. The laminated thin plate group 1 is supported by a support portion 3.

[Problem to be solved by the invention]

In the separation method using a vacuum chuck, when picking up the upper thin plate from a stack of laminated thin plates, especially if the thin plate has unevenness, two or three sheets may overlap when the vacuum chuck 6 is pulled up. There is a problem in that the thin plate may be adsorbed to the vacuum chuck and separated in the same state, and depending on the shape of the thin plate, the thin plate may not be able to be adsorbed by the vacuum chuck.

In the separation method using wedge-shaped claws, the claws are forcibly inserted between the thin plates, so if there are uneven gaps in the laminated thin plates, the heights of the wedge-shaped claws and the thin plates to be separated will not match. There was a quality problem in that the surface of the thin plate was damaged.

The present invention was invented in view of the above points, and aims to provide a laminated thin plate separating device that has a simple configuration and is capable of separating thin plates quickly, reliably, and without damaging the thin plates. It is.

[Means to solve the problem]

The device for separating laminated sheets of the present invention includes a support that is vertically movable along the column by a first cam, and a first guide rod that is provided between the supports by a second cam. Horizontally movable by a third cam along a second guide rod provided between a support for supporting a group of laminated thin plates made of a plurality of laminated thin plates and a fixed base. The present invention is configured to include a clamping tool, and to separate one thin plate at the lowest end of a laminated thin plate group in which a plurality of thin plates are laminated from this laminated thin plate group.

[Effect]

In the present invention, a group of laminated thin plates made by laminating a plurality of thin plates is supported by a support, and a support base that supports a guide rod that guides the horizontal movement of the support is moved along the column by a first cam. and lower it,
The lowermost thin plate of this group of laminated thin plates is brought into contact with the horizontal flat part of the holding tool, the interval between the supports supporting this group of laminated thin plates is widened by the second cam, and the third cam The clamping tool is moved horizontally along the guide rod provided between the fixing bases, and both sides of the lowest sheet of the laminated thin board group are clamped with the vertical claws of the clamping tool. However, by making the spacing between the claws narrower than the claws of the support, the lowermost thin plate can be separated from the group of laminated thin plates.

After that, the spacing between the supports is restored to its original size and narrowed, and the spacing between the clamping devices is also restored and widened. When the support base is raised by the first cam, the support that supports the group of laminated thin plates is raised above the position of the clamping tool, making it possible to separate the thin plates even more reliably.

〔Example〕

DESCRIPTION OF THE PREFERRED EMBODIMENTS The principle of the present invention will be explained below in detail with reference to FIG. 1, and an embodiment according to the present invention will be explained with reference to FIGS. 2 to 6.

FIG. 2 is a plan view showing the relationship between the main parts of the support 3, the clamping tool 4, and the laminated thin plate group 1, FIG. 3 is a side view of FIG. 2, and FIG. A perspective view, FIG. 5 is a view taken along the line B--B in FIG. 2, and FIG. 6 is a perspective view.

As shown in FIG.
are opposed to each other at four locations, for a total of eight locations, and the clamping tool 4 is opposed to each other at three locations, and is in contact with the laminated thin plate group 1 at six locations in total.

FIGS. 2 and 3 show a state in which the spacing between the supports 3 is such that the group of laminated thin plates 1 is supported, and the supports 3 are in the uppermost position. (The state shown in FIG. 1a) In this state, the laminated thin plate group 1 is loaded by placing it on the claw portion 3-1 of the support 3 from above. Here, by the first cam 15 which will be described later, the support 3 is lowered to a position where the laminated thin plate group 1 comes into contact with the flat part 4-1 of the clamping tool 4, and then the tip of the claw part 3-1 of the support 3 is lowered. Make the spacing wider than the width of the thin plate. (The state shown in FIG. 1b) Next, the interval between the clamping tools 4 is narrowed, and the vertical claw portion 4-2 is used to connect the lowestmost thin plate of the laminated thin plate group 1, that is, the flat part 4-1 of the clamping tool 4. A thin plate 1-1 that is in contact with is held between both sides thereof in the direction of the arrow in FIG. 5, and further compressed to a width narrower than the width of the thin plate. In other words, the thin plate width of 40 mm is compressed until it becomes narrower by about 0.2 mm. At this time, the spacing between the supports 3 is returned to the original state, and the laminated thin plate group 1 is supported by the supports 3.

At this time, the central part of the laminated thin plate group 1 is slightly hanging downward due to its own weight, so the thin plate 1-1, which is compressed from both sides, easily curves in a shape that swells downward, and the second plate from the bottom Separate from the thin plate. (Condition shown in Figure 1c) Since the height of the claw portion 4-2 of the clamping tool 4 is set lower than the thickness of the thin plate, in this case, the second thin plate from the bottom remains in the same state and is not clamped. It will not be damaged by the upper surface of the tool 4.

Next, the supporting tool 3 supporting the laminated thin plate group 1 is raised along the support column 16 by the first cam 15, and at the same time, when the gap between the clamping tools 4 is widened to the original state, the separated single thin plate 1-1 returns to its flat shape due to its elasticity, and the thin plates to be separated and the laminated thin plate group 1 are reliably separated. (The state shown in FIG. 1d) Since the deformation caused by this compression is sufficiently within the elastic limit, no residual deformation remains in the thin plate 1-1.

Here, according to FIGS. 4 and 5, the above-mentioned support 3
The cam mechanism for opening/closing and raising/lowering the clamping tool 4 will be explained in detail.

As shown in FIG. 4, the support 3 is guided by two guide rods 17 passing through it and is movable horizontally. A pair of levers 20, which are rotatable about a fulcrum 21, are pressed against the cam 14 via a roller by a spring 22.
2, the lever 20 rotates around the fulcrum 21, and the notch 3- provided in the support 3
2 is fitted with a roller 23 attached to the top end of the lever 20, so that the support 3 can be moved horizontally along the guide rod 17.

The support 3 can move up or down because the support stand 13 supporting the guide rod 17 can move vertically along the four vertical columns 16, and can be fixed on the columns 16. The spring 25 supported by the tool 24 always lifts the support base 13, but the lever 26 protruding from the support base 13
The roller 27 attached to the tip of the cam 15
By being pushed down by the support stand 13
moves up and down according to the rotation of the cam 15.

As shown in FIG. 5, the clamping tool 4 is guided by a pair of guide rods 19 passing through it, and is movable in the horizontal direction. This guide rod 19 is attached to a fixed base 11 fixed by the four vertical supports 16 mentioned above.
is fixed at both ends. A pair of levers 30 that are rotatable around a fulcrum 31 are pressed against the cam 18 via a roller by a spring 32, and in response to the rotation of the cam 18, the levers 30 rotate around the fulcrum 31, and the gripping tool Since the roller 33 attached to the top end of the lever 30 is fitted into the notch 4-2 provided in the lever 4, the clamping tool 4 can be moved horizontally along the guide rod 19. .

The cams 14, 15, and 18 are integrated and driven simultaneously by a common shaft, and the order and amount of displacement of the horizontal and vertical movements of the support 3 and clamping tool 4 are determined by the shape and shaft of these cams. It is possible to set it by the installation angle.

Although some parts of the perspective view in FIG. 6 are omitted for simplicity, there are two guide rods 17 and 19 in each pair, two cams 14 and 15 in each pair,
One cam 18 is provided at the center of the clamping tool 4.

The shape of the thin plate to be separated is not limited to a simple flat plate.
In the case where a concave portion for attaching an IC chip is provided as shown in the figure, compressive deformation by the holding tool 4 can be easily performed by bringing the convex portion in the direction of deformation and curvature.

The above embodiment describes the case of an apparatus that separates one thin plate at the bottom of a group of laminated thin plates. The present invention can also be applied to the case where a single thin plate at the end of a wafer is separated.

〔Effect of the invention〕

As described above, according to the present invention, it is possible to provide a laminated thin plate separation device that has a simple configuration and is capable of separating laminated thin plates quickly, reliably, and without damaging the thin plates. The industrial effect is extremely large.

[Brief explanation of the drawing]

Fig. 1 is an explanatory diagram of the principle of the present invention, Fig. 2 is a plan view of essential parts of an embodiment of the present invention, Fig. 3 is a side view of Fig. 2, and Fig. 4 is an arrow shown along the line A-A in Fig. 2. 5 is a view taken along the line B-B in FIG. 2, FIG. 6 is a perspective view of an embodiment of the present invention, FIG. 7 is an explanatory diagram of a conventional method, and FIG. This is an explanatory diagram of the method. In the figure, 1 is a group of laminated thin plates, 1-1 is a separated thin plate, 3 is a support, and 4 is a clamp.

Claims (1)

[Claims] 1. A support base 13 movable in the vertical direction along a column 16 by a first cam 15, and a first guide rod 17 provided between the support base 13 by a second cam 14. A third cam is moved along a second guide rod 19 provided between a support 3 that supports a laminated thin plate group 1 made of a plurality of laminated thin plates, and a fixed base 11, which is movable in the horizontal direction along a fixed base 11. a clamping tool 4 movable in the horizontal direction by 18, which separates the lowest one thin plate 1-1 of the laminated thin plate group 1 in which a plurality of thin plates are laminated from the laminated thin plate group 1; A laminated thin plate separation device characterized by: