JPH034571B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a plasma treatment machine for plasma treating continuous bodies such as fiber fabrics, yarns, films, and sheet-like articles.

[Prior art and its problems]

Traditionally, recontamination (darkening) due to washing of textile products
SR processing (hereinafter abbreviated as SR processing) is strongly required for hydrophobic synthetic fibers, and the conventional method has been to apply a hydrophilic resin to the surface of the hydrophobic fiber. Methods of making it hydrophilic and imparting SR properties are being used. However, such resin processing methods lack durability against washing during wear. In addition, since it promotes migration sublimation in which the dye dyed to the resin attached to the fiber surface migrates, it reduces the color fastness. Furthermore, since the hydrophilic resin used is generally a polyethylene glycol resin or a derivative thereof, the treated fabric has many drawbacks such as a strong waxy feel. Therefore, it has been desired to develop a technology that does not have such drawbacks and can impart SR properties to fiber fabrics, especially synthetic fiber fabrics, at low cost and on an industrial scale.

As a way to solve these problems, it has recently been discovered that instead of resin treatment on the fiber surface, plasma treatment can directly make the fiber surface hydrophilic and give it superior SR properties equivalent to or better than that of cotton. It came.

However, various problems arise with plasma processing apparatuses that can continuously process continuous bodies such as sheet-like objects and fibers, and many proposals have been made to improve them. Broadly speaking, there are two types: a type in which sheet-like materials are fed out from the atmosphere, introduced into a depressurized processing chamber with a continuous sealing mechanism, and then rolled up again in the atmosphere; There are two types: batch continuous type, in which all processes are carried out in one evacuated container. The former type with a continuous sealing mechanism allows the decompression processing chamber to be made smaller;
Although it has the advantage of being able to change the level without releasing the reduced pressure and improving workability, when processing highly air-containing sheet materials such as textile fabrics,
Volatile substances such as air contained in the sheet cannot be sufficiently removed by the sealing portion alone, which causes problems in sealing performance when the processing speed increases.

In addition, in the latter batch continuous type processing machine,
Since the means for feeding and winding up the sheet-like material is built into the vacuum container, the volume of the vacuum container becomes large, and there is a problem in that the time required to reach the desired degree of pressure reduction becomes too long and the processing efficiency decreases.

[Purpose of the invention]

The purpose of the present invention is to improve the above-mentioned drawbacks of the conventional plasma processing apparatus, and to achieve high speed processing even in high-speed processing.
The degree of vacuum does not change, allowing processing under stable conditions.
Moreover, it is an object of the present invention to provide a plasma processing apparatus that can minimize the volume of a vacuum container while taking advantage of the characteristics of a batch continuous type, and furthermore, to provide a plasma processing apparatus that can greatly improve workability when changing types. It is something.

[Structure of the invention]

The present invention has the following configuration to achieve the above object. That is, in a plasma processing machine consisting of a reduced pressure processing container, a feeding means, a winding means, a conveying means, and a plasma irradiation means for the workpiece housed in the reduced pressure processing container, each means in the reduced pressure processing container is It is characterized by a plasma processing machine that is integrally mounted on a movable frame that can be carried in and out of a reduced pressure processing container.

As mentioned above, the objects to be treated in the present invention include fabrics such as woven fabrics, knitted fabrics, non-woven fabrics, and webs, sheet-like objects such as films, foils, and papers, and composites thereof, as well as composites thereof. A coated material, a yarn material such as a spun yarn, a filament yarn, etc. are applicable.

In the present invention, a sheet-shaped workpiece is stably transported in a batch-type processing apparatus in which a workpiece feeding means, a winding means, a plasma processing means, etc. are incorporated in a single sealed reduced-pressure processing container. In order to do this, the assembly and maintenance work of components such as guide rolls, which serve as transport means, must be performed with high precision. It is extremely difficult to do so. These difficulties can be solved by installing a frame that can be moved in and out of the vacuum processing container.
This problem can only be solved by attaching the above-mentioned main components to this frame. Moreover, in the present invention, work efficiency is also improved, and in particular, work when switching between types can be greatly improved.

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of a plasma processing machine according to the present invention, and FIG. 2 is a side view thereof. In FIG. 1 and FIG. 2, 1 is a reduced pressure processing container,
Reference numerals 12 and 13 are movable doors that constitute a part of the reduced pressure processing container 1.

8 and 9 are the paths of the workpiece 18 formed by the guide roll group 16; 8 is the path when only one side of the workpiece 18 is processed;
indicates the route when processing both sides.

The reduced pressure processing container 1 is connected to a reduced pressure pump 10 via an exhaust pipe 14, and is maintained at a reduced pressure of about 10 ^-3 Torr. It is now being treated with plasma.

The feeding means 19 for the object to be processed 18 is composed of a rotating shaft 4 and a feeding roll 2 formed by winding the object to be processed 18 around the rotating shaft 4. Also, the winding means 20
The rotating shaft 5 is composed of a rotating shaft 5 and a winding roll 3 formed by winding the workpiece 18 around the rotating shaft 5.

As the plasma irradiation means 21, any known plasma generator can be used, but preferably, as shown in FIG. 1, two plate-shaped cathodes 6, 6; 6', It is preferable to use one having a structure in which a plurality of rod-shaped anodes 7, 7' are arranged between the anode 6' and the cathode plate. By using the plasma irradiation means 21 having such a structure, it is possible to efficiently utilize low-temperature plasma, minimize the volume occupied by the electrodes, and also make it possible to process both sides of the sheet-shaped object 18 at once. .

Further, the conveyance means 16 on the way of the object to be processed 18 is
It is composed of guide rolls, guide bars, etc., and may be actively driven.
It may be of a free rotation type. Depending on the case, it may be a conveyor belt type or a fixed bar type.

In the present invention, each of the above-mentioned means is provided in a frame 15 configured to be movable as shown in FIG.
is integrally attached to. This frame 15
has a movable ring 17 at its lower part, and can be moved into and out of the reduced pressure processing container 1 by manual or automatic means.

Although there are no particular limitations on the method of mounting and arranging each means on the frame 15, it is desirable to minimize the size of the container and maximize throughput. In this embodiment, the rotating shaft 4, which is the center of the feeding means 19, and the rotating shaft 5, which is the center of the winding means 20, are arranged adjacent to each other and are combined into one area. The distance between the two shafts 4 and 5 is the same as each roll 2 and 3.
It may be determined within a range that can provide the minimum clearance so that the outer surfaces of the workpiece 18 wound around the object 18 do not come into contact with each other. Plasma irradiation means 21 is disposed opposite to the vicinity of adjacent areas of the feeding means and the winding means. By arranging the plasma irradiation means 21 in this manner, the work efficiency can be significantly improved, and the volume of the plasma irradiation means 21 itself can be made small and compact.

In the present invention, since each of the above-mentioned means is arranged on the movable frame 15, special consideration must be given to the power supply for making each means function. For this reason, a power terminal is installed at an appropriate location within the reduced pressure processing container 1, and is connected to a power terminal provided on the frame 15 via a detachable joint to enable each means to function.

FIG. 4 shows a specific example. Feeding means 1
9. At least three of the following: a winding means 20, a drive source for driving the object conveying means 16, a power source for functioning the plasma irradiation means 21, and a cooling water supply source.
A rotary drive source terminal 22, a power source terminal 23, and a water supply source terminal 24 serve as seed sources, respectively, in the reduced pressure treatment container 1.
It is fixed at an appropriate position within.

On the other hand, the frame 15 is provided with driven terminals 25 for rotating the winding means 20, the feeding means 19, and the conveying means 16, as well as a power terminal 26 for the plasma irradiation means 21 and a water receiving terminal for receiving cooling water. 27 are provided respectively. The respective terminals are configured so that they can be connected to each other when the frame 15 is completely set in the container 1. Therefore, each terminal has a joint structure that allows the terminals to be attached to and detached from each other.

〔Effect of the invention〕

With the apparatus of the present invention, a highly air-containing sheet material,
For example, when processing woven or knitted fabrics, nonwoven fabrics, tows, fiber threads, coated materials, porous films, etc., the batch processing machine has the advantage of not changing the degree of vacuum in the vacuum processing chamber due to changes in processing speed. Through a frame that can be maintained and moved in and out, maintenance is easy, production efficiency is high, and workability is excellent.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a plasma processing machine according to the present invention, and FIG. 2 is a side view thereof. Furthermore, FIG. 3 is a side view showing the frame housed in the processing apparatus shown in FIG. 1 and the main means attached to the frame, and FIG. FIG. 1... Decompression processing container, 2... Feeding roll, 3...
... Winding roll, 4 ... Rotating shaft, 5 ... Rotating shaft,
6, 6'... cathode, 7, 7'... anode, 16... guide roll (transporting means), 18... object to be treated, 1
9... Feeding means, 20... Winding means, 21... Plasma irradiation means.

Claims (1)

[Scope of Claims] 1. A plasma processing machine comprising a reduced pressure processing container, and a means for feeding out, a winding means, a conveying means, and a plasma irradiation means for the object to be processed stored in the reduced pressure processing container, wherein the reduced pressure processing container A plasma processing machine characterized in that each means is integrally mounted on a movable frame that can be carried in and out of a reduced pressure processing container. 2 Drive source terminals, power supply terminals, and cooling water supply source terminals for functioning each means mounted on the frame are provided inside the depressurized treatment container, and each of these terminals corresponds to each means on the frame. The plasma processing machine according to claim 1, which is detachably connected to a terminal.