JPH0437390B2 - - Google Patents
Info
- Publication number
- JPH0437390B2 JPH0437390B2 JP6964383A JP6964383A JPH0437390B2 JP H0437390 B2 JPH0437390 B2 JP H0437390B2 JP 6964383 A JP6964383 A JP 6964383A JP 6964383 A JP6964383 A JP 6964383A JP H0437390 B2 JPH0437390 B2 JP H0437390B2
- Authority
- JP
- Japan
- Prior art keywords
- photoelectrons
- predetermined period
- photoelectron
- counting
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Description
【発明の詳細な説明】
本発明は、固体から大気中に放出させられる光
電子を計数する方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for counting photoelectrons emitted from a solid to the atmosphere.
光電子の検出には、大気中で作動する空気カウ
ンターを用いる。試料に光を照射する際に、入射
光の一部は乱反射により空気カウンターに入る。
これらの光のエネルギーが空気カウンターの壁材
料の光電的仕事関数より大きい場合は、空気カウ
ンターの壁から光電子が放出される。空気カウン
ターは、試料からの光電子だけではなく、この壁
からの光電子も同時に計数してしまい、そのため
試料から大気中に放出する光電子のみを選択して
正確に計数することができなかつた。 An air counter operating in the atmosphere is used to detect photoelectrons. When a sample is irradiated with light, a portion of the incident light enters the air counter due to diffuse reflection.
If the energy of these lights is greater than the photoelectric work function of the air counter wall material, photoelectrons are emitted from the air counter wall. The air counter counted not only photoelectrons from the sample but also photoelectrons from this wall at the same time, making it impossible to select and accurately count only the photoelectrons emitted from the sample into the atmosphere.
本発明の目的は試料から放出する光電子のみを
正確に計数する方法を提供することにある。 An object of the present invention is to provide a method for accurately counting only photoelectrons emitted from a sample.
本発明の計数原理は、一定期間試料から放出す
る光電子と空気カウンターの壁から放出する光電
子との両方を計数し、これに続く一定期間空気カ
ウンターの壁から放出する光電子のみを計数し、
単位時間当りの計数値に換算して最初の時間の計
数値から後の期間の計数値を差引き、それにより
試料から放出する光電子の計数値を得ることにあ
る。 The counting principle of the present invention is to count both the photoelectrons emitted from the sample and the photoelectrons emitted from the wall of the air counter for a certain period of time, and then only the photoelectrons emitted from the wall of the air counter for a certain period of time,
The purpose is to convert the count value per unit time by subtracting the count value of the later period from the count value of the first time, thereby obtaining the count value of photoelectrons emitted from the sample.
以下に添付図を参照し従来の光電子計数方法と
本発明の光電子計数方法とを対比して説明する。 The conventional photoelectron counting method and the photoelectron counting method of the present invention will be compared and explained below with reference to the attached drawings.
第１，２図を参照する。第１図は光電子測定装
置を示し、第２図は光電子測定装置の電極にかけ
る電圧の変化を示す。光源６からの光は、分光器
７により単色化され、空気カウンター１０内に置
かれた試料９を照射する。単色光の強度はスリツ
ト８により調整される。試料表面９で反射された
光は空気カウンター１０の外へ出ていく。単色光
照射によつて放出させられる試料からの光電子１
は、第２図に示されている所定の電圧がパルス発
生器４，５から印加されている格子G2（80V）及
びG1（100V）を通過し陽極Ａに向う。陽極Ａには
高圧電源１から高電圧が加えられており、それに
より生じた陽極近くの強い電界が光電子を加速
し、気体放電を引き起す。この気体増幅作用によ
り、第２図に示すように陽極の電位が低下し、電
子パルスが発生し、このパルスはプリアンプ２を
介して計数装置３に加えられる。パルスの発生と
同時に格子G1の電圧を100Vから400Vに急に増加
させる。この結果陽極と格子G1との間の電位差
が300V低下し、気体放電が停止する。この放電
停止期間τの間は、放電は起らない。一方格子
G2は、τの期間−30Vに保たれ、放電によつて発
生した正イオンを補集し、正イオンが試料に行か
ないようにしている。 See Figures 1 and 2. FIG. 1 shows a photoelectronic measuring device, and FIG. 2 shows changes in the voltage applied to the electrodes of the photoelectronic measuring device. The light from the light source 6 is made monochromatic by the spectroscope 7 and illuminates the sample 9 placed in the air counter 10 . The intensity of the monochromatic light is adjusted by the slit 8. The light reflected by the sample surface 9 goes out of the air counter 10. Photoelectrons from a sample emitted by monochromatic light irradiation 1
passes through gratings G 2 (80V) and G 1 (100V) to which predetermined voltages shown in FIG. 2 are applied from pulse generators 4 and 5 to the anode A. A high voltage is applied to the anode A from a high voltage power supply 1, and a strong electric field generated near the anode accelerates photoelectrons and causes a gas discharge. Due to this gas amplification effect, the potential of the anode decreases as shown in FIG. At the same time as the pulse is generated, the voltage on the grid G 1 is suddenly increased from 100V to 400V. As a result, the potential difference between the anode and the grid G1 decreases by 300V, and the gas discharge stops. During this discharge stop period τ, no discharge occurs. one side lattice
G 2 is maintained at −30 V for a period of τ to collect positive ions generated by the discharge and prevent them from reaching the sample.
τの期間の後、格子G2及びG1の電圧は、元の
電圧80Vと100Vにそれぞれ回復させられ、空気
カウンター１０は再び光電子を検出できる状態に
なる。このように陽極に発生した電子パルスを計
数することにより光電子を計数する。しかしなが
らこの計数方式では、試料からの光電子１と壁か
らの光電子２を区別して、試料からの光電子のみ
を選択的に計数することができない。 After a period of τ, the voltages on the grids G 2 and G 1 are restored to their original voltages of 80 V and 100 V, respectively, and the air counter 10 is ready to detect photoelectrons again. Photoelectrons are counted by counting the electron pulses generated at the anode in this way. However, with this counting method, it is not possible to distinguish between photoelectrons 1 from the sample and photoelectrons 2 from the wall, and selectively count only the photoelectrons from the sample.
第３図に参照して空気カウンターを使用して試
料からの光電子のみを選択的に計数する本発明の
光電子の計数方法の実施例を説明する。 An embodiment of the photoelectron counting method of the present invention will be described in which only photoelectrons from a sample are selectively counted using an air counter with reference to FIG.
第３図において、第１の所定期間T1中は第２
図を参照して上に説明したと同様に光電子を計数
する。この計数値は当然試料からの光電子１と壁
からの光電子２との総数N1を示す。 In FIG. 3, during the first predetermined period T1, the second
Photoelectrons are counted as described above with reference to the figure. This count naturally indicates the total number N 1 of photoelectrons 1 from the sample and photoelectrons 2 from the wall.
第１の所定期間T1に続く第２の所定期間T2の
間陽極Ａへの光電子の到来毎に格子G1の電圧を
上げて電界強度を減少して放電を防止するが、他
方では試料９からの光電子１の到来を阻止するた
め格子G2に連続的な負電位障壁（−30V）をつく
り、それにより壁からの光電子２のみ選択的に計
数して計数値N2を得る。 During a second predetermined period T 2 following the first predetermined period T 1 , each time a photoelectron arrives at the anode A, the voltage on the grid G 1 is increased to reduce the electric field strength and prevent discharge, while the sample In order to block the arrival of photoelectrons 1 from the wall 9, a continuous negative potential barrier (-30V) is created in the lattice G2 , thereby selectively counting only the photoelectrons 2 from the wall to obtain the count value N2 .
T1とT2を等しくとると、計数値の差N1−N2か
ら、試料からの光電子１のみの計数値を知ること
ができる。T1とT2が等しくない場合は、単位時
間当りの計数値、すなわち計数率N1／T1とN2／
T2の差をとればよい。 If T 1 and T 2 are taken to be equal, the count value of only one photoelectron from the sample can be determined from the difference N 1 −N 2 between the count values. If T 1 and T 2 are not equal, the count value per unit time, that is, the counting rate N 1 /T 1 and N 2 /
Just take the difference of T 2 .
第４図に酸化物で被覆したＰ型シリコン１００
面からの光電子放出が酸化膜の厚さによりどのよ
うに変化するかを本発明の方法により測定した例
を示す。照射紫外光のエネルギーは5.6ev（波長
220nｍ）であり、この光では酸化膜からの光電
子放出は生じない。酸化膜の下層のシリコン面か
らの光電子のうち酸化膜の厚み内で運動エネルギ
ーを失わなかつたものだけが大気中へ放出され、
計数される。 Figure 4 shows P-type silicon 100 coated with oxide.
An example will be shown in which how photoelectron emission from a surface changes depending on the thickness of an oxide film was measured using the method of the present invention. The energy of the irradiated ultraviolet light is 5.6ev (wavelength
220 nm), and this light does not cause photoelectron emission from the oxide film. Of the photoelectrons from the silicon surface below the oxide film, only those that do not lose their kinetic energy within the thickness of the oxide film are released into the atmosphere.
It is counted.
第１図は光電子測定用空気カウンターの概略図
である。第２図は従来の光電子計数原理に従う空
気カウンターの電極の電圧変化を示す。第３図は
本発明の方法に従う空気カウンターの電極の電圧
変化を示す。第４図は本発明の方法を適用してＰ
型シリコンの酸化膜の厚みと光電子放出強度の関
係を測定した例を示す。
図中：１：高圧電源、２：プリアンプ、３：計
数装置、４：パルス発生器、５：パルス発生器、
６：光源、７：分光器、８：スリツト、９：試
料、１０：空気カウンター。
FIG. 1 is a schematic diagram of an air counter for photoelectron measurement. FIG. 2 shows the voltage variation of the electrodes of an air counter according to the conventional photoelectron counting principle. FIG. 3 shows the voltage variation of the electrodes of an air counter according to the method of the invention. Figure 4 shows P by applying the method of the present invention.
An example of measuring the relationship between the thickness of the silicon oxide film and the photoelectron emission intensity is shown below. In the diagram: 1: High voltage power supply, 2: Preamplifier, 3: Counter, 4: Pulse generator, 5: Pulse generator,
6: light source, 7: spectrometer, 8: slit, 9: sample, 10: air counter.
Claims (1)
の陽極への到来数を電気パルスの形で計数する光
電子の計数方法において、 第１の所定期間中陽極への光電子の到来毎に放
電防止のため電界強度を減少し同時に空間清浄の
ため負電位域をつくり、第１の所定期間に続く第
２の所定期間中陽極への光電子の到来毎に放電防
止のため電界強度を減少し、同時に試料からの光
電子の到来を阻止するための連続的な負電位障壁
をつくり、そして前記の第１の所定期間中の光電
子のカウントを前記の第２の所定期間中の光電子
のカウントで較正して試料からの放出光電子のみ
を計数するようにしたことを特徴とする光電子の
計数方法。 ２ 前記の第１の所定期間と前記の第２の所定期
間とが同じ時間であり、第１の所定期間中の光電
子のカウントから第２の所定期間中の光電子のカ
ウントを差引いて試料からの放出光電子のみを計
数するようにした特許請求の範囲第１項に記載の
光電子の計数方法。[Claims] 1. A photoelectron counting method for counting the number of photoelectrons emitted from a sample in response to projected light and arriving at an anode in the form of electrical pulses, comprising: The electric field strength is reduced to prevent discharge each time a photoelectron arrives, and at the same time a negative potential area is created to clean the space, and the electric field strength is reduced to prevent discharge each time a photoelectron arrives at the anode during a second predetermined period following the first predetermined period. and at the same time create a continuous negative potential barrier to block the arrival of photoelectrons from the sample, and reduce the count of photoelectrons during said first predetermined period to the count of photoelectrons during said second predetermined period. A photoelectron counting method characterized by calibrating by counting and counting only photoelectrons emitted from a sample. 2. The first predetermined period and the second predetermined period are the same time, and the photoelectron count during the second predetermined period is subtracted from the photoelectron count during the first predetermined period. A method for counting photoelectrons according to claim 1, wherein only emitted photoelectrons are counted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6964383A JPS59195177A (en) | 1983-04-20 | 1983-04-20 | Counting method of photoelectron |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6964383A JPS59195177A (en) | 1983-04-20 | 1983-04-20 | Counting method of photoelectron |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59195177A JPS59195177A (en) | 1984-11-06 |
| JPH0437390B2 true JPH0437390B2 (en) | 1992-06-19 |
Family
ID=13408735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6964383A Granted JPS59195177A (en) | 1983-04-20 | 1983-04-20 | Counting method of photoelectron |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59195177A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH065287B2 (en) * | 1985-04-15 | 1994-01-19 | 理化学研究所 | Low speed electronic measuring device |
| JPH0616103B2 (en) * | 1985-04-15 | 1994-03-02 | 理化学研究所 | Low speed electronic measuring device |
| JPH0678999B2 (en) * | 1986-06-30 | 1994-10-05 | 理化学研究所 | Electronic counter |
| JPH0542377Y2 (en) * | 1986-11-25 | 1993-10-26 | ||
| JP2509886B2 (en) * | 1987-11-24 | 1996-06-26 | 理研計器株式会社 | Photoemission threshold measurement device |
-
1983
- 1983-04-20 JP JP6964383A patent/JPS59195177A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59195177A (en) | 1984-11-06 |
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