JPH053690B2 - - Google Patents
Info
- Publication number
- JPH053690B2 JPH053690B2 JP8720584A JP8720584A JPH053690B2 JP H053690 B2 JPH053690 B2 JP H053690B2 JP 8720584 A JP8720584 A JP 8720584A JP 8720584 A JP8720584 A JP 8720584A JP H053690 B2 JPH053690 B2 JP H053690B2
- Authority
- JP
- Japan
- Prior art keywords
- acid
- ink
- color
- transparent conductive
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 37
- 239000000758 substrate Substances 0.000 claims description 21
- 150000001875 compounds Chemical class 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 11
- 150000007513 acids Chemical class 0.000 claims description 9
- 125000001931 aliphatic group Chemical group 0.000 claims description 6
- 238000007639 printing Methods 0.000 claims description 6
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 5
- 238000002845 discoloration Methods 0.000 claims description 5
- 125000005843 halogen group Chemical group 0.000 claims description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 5
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 5
- 238000005406 washing Methods 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000005530 etching Methods 0.000 description 17
- 239000010408 film Substances 0.000 description 17
- -1 perfluoro fatty acid Chemical class 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 239000010409 thin film Substances 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 7
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000003153 chemical reaction reagent Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910003437 indium oxide Inorganic materials 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 5
- 229910001887 tin oxide Inorganic materials 0.000 description 5
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 4
- 230000000873 masking effect Effects 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- FRPHFZCDPYBUAU-UHFFFAOYSA-N Bromocresolgreen Chemical compound CC1=C(Br)C(O)=C(Br)C=C1C1(C=2C(=C(Br)C(O)=C(Br)C=2)C)C2=CC=CC=C2S(=O)(=O)O1 FRPHFZCDPYBUAU-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- STZCRXQWRGQSJD-GEEYTBSJSA-M methyl orange Chemical compound [Na+].C1=CC(N(C)C)=CC=C1\N=N\C1=CC=C(S([O-])(=O)=O)C=C1 STZCRXQWRGQSJD-GEEYTBSJSA-M 0.000 description 3
- 229940012189 methyl orange Drugs 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 2
- JDEFPFLTCXIVDH-UHFFFAOYSA-N 2-cyanopropanoic acid Chemical compound N#CC(C)C(O)=O JDEFPFLTCXIVDH-UHFFFAOYSA-N 0.000 description 2
- PTYVBEKOPJHZLJ-UHFFFAOYSA-N 2-nitropropanoic acid Chemical compound OC(=O)C(C)[N+]([O-])=O PTYVBEKOPJHZLJ-UHFFFAOYSA-N 0.000 description 2
- JOOXCMJARBKPKM-UHFFFAOYSA-N 4-oxopentanoic acid Chemical compound CC(=O)CCC(O)=O JOOXCMJARBKPKM-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- LCTONWCANYUPML-UHFFFAOYSA-N Pyruvic acid Chemical compound CC(=O)C(O)=O LCTONWCANYUPML-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- DTQVDTLACAAQTR-UHFFFAOYSA-N Trifluoroacetic acid Chemical compound OC(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 2
- 229910000410 antimony oxide Inorganic materials 0.000 description 2
- ABIUHPWEYMSGSR-UHFFFAOYSA-N bromocresol purple Chemical compound BrC1=C(O)C(C)=CC(C2(C3=CC=CC=C3S(=O)(=O)O2)C=2C=C(Br)C(O)=C(C)C=2)=C1 ABIUHPWEYMSGSR-UHFFFAOYSA-N 0.000 description 2
- NUHCTOLBWMJMLX-UHFFFAOYSA-N bromothymol blue Chemical compound BrC1=C(O)C(C(C)C)=CC(C2(C3=CC=CC=C3S(=O)(=O)O2)C=2C(=C(Br)C(O)=C(C(C)C)C=2)C)=C1C NUHCTOLBWMJMLX-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- MLIREBYILWEBDM-UHFFFAOYSA-N cyanoacetic acid Chemical compound OC(=O)CC#N MLIREBYILWEBDM-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- SIEILFNCEFEENQ-UHFFFAOYSA-N dibromoacetic acid Chemical compound OC(=O)C(Br)Br SIEILFNCEFEENQ-UHFFFAOYSA-N 0.000 description 2
- JXTHNDFMNIQAHM-UHFFFAOYSA-N dichloroacetic acid Chemical compound OC(=O)C(Cl)Cl JXTHNDFMNIQAHM-UHFFFAOYSA-N 0.000 description 2
- LEQAOMBKQFMDFZ-UHFFFAOYSA-N glyoxal Chemical compound O=CC=O LEQAOMBKQFMDFZ-UHFFFAOYSA-N 0.000 description 2
- HHLFWLYXYJOTON-UHFFFAOYSA-N glyoxylic acid Chemical compound OC(=O)C=O HHLFWLYXYJOTON-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000007646 gravure printing Methods 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 239000001630 malic acid Substances 0.000 description 2
- 235000011090 malic acid Nutrition 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- WLJVNTCWHIRURA-UHFFFAOYSA-N pimelic acid Chemical compound OC(=O)CCCCCC(O)=O WLJVNTCWHIRURA-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 235000013824 polyphenols Nutrition 0.000 description 2
- 238000006722 reduction reaction Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- YNJBWRMUSHSURL-UHFFFAOYSA-N trichloroacetic acid Chemical compound OC(=O)C(Cl)(Cl)Cl YNJBWRMUSHSURL-UHFFFAOYSA-N 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- GGAUUQHSCNMCAU-ZXZARUISSA-N (2s,3r)-butane-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C[C@H](C(O)=O)[C@H](C(O)=O)CC(O)=O GGAUUQHSCNMCAU-ZXZARUISSA-N 0.000 description 1
- RVSIFWBAGVMQKT-UHFFFAOYSA-N 1,1,1,3,3-pentachloropropan-2-one Chemical compound ClC(Cl)C(=O)C(Cl)(Cl)Cl RVSIFWBAGVMQKT-UHFFFAOYSA-N 0.000 description 1
- WQAWXRFLNDAOON-UHFFFAOYSA-N 1,1,1,3,3-pentafluoropropan-2-one Chemical compound FC(F)C(=O)C(F)(F)F WQAWXRFLNDAOON-UHFFFAOYSA-N 0.000 description 1
- 150000005208 1,4-dihydroxybenzenes Chemical class 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- PSCITZRLRGWIHI-UHFFFAOYSA-N 2-(4-aminophenyl)pyridin-3-ol Chemical compound C1=CC(N)=CC=C1C1=NC=CC=C1O PSCITZRLRGWIHI-UHFFFAOYSA-N 0.000 description 1
- BQQVEASFNMRTBA-UHFFFAOYSA-N 2-[4-(3-aminopropyl)piperazin-1-yl]ethanol Chemical compound NCCCN1CCN(CCO)CC1 BQQVEASFNMRTBA-UHFFFAOYSA-N 0.000 description 1
- OYCLSQDXZMROJK-UHFFFAOYSA-N 2-bromo-4-[3-(3-bromo-4-hydroxyphenyl)-1,1-dioxo-2,1$l^{6}-benzoxathiol-3-yl]phenol Chemical compound C1=C(Br)C(O)=CC=C1C1(C=2C=C(Br)C(O)=CC=2)C2=CC=CC=C2S(=O)(=O)O1 OYCLSQDXZMROJK-UHFFFAOYSA-N 0.000 description 1
- MDGFKZKMIQQRPU-UHFFFAOYSA-N 2-bromo-4-[3-(3-bromo-5-chloro-4-hydroxyphenyl)-1,1-dioxo-2,1$l^{6}-benzoxathiol-3-yl]-6-chlorophenol Chemical compound C1=C(Br)C(O)=C(Cl)C=C1C1(C=2C=C(Br)C(O)=C(Cl)C=2)C2=CC=CC=C2S(=O)(=O)O1 MDGFKZKMIQQRPU-UHFFFAOYSA-N 0.000 description 1
- FOSIWKADJDNVMJ-UHFFFAOYSA-N 3-(2-carboxyethoxy)propanoic acid Chemical compound OC(=O)CCOCCC(O)=O FOSIWKADJDNVMJ-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- JCYPECIVGRXBMO-UHFFFAOYSA-N 4-(dimethylamino)azobenzene Chemical compound C1=CC(N(C)C)=CC=C1N=NC1=CC=CC=C1 JCYPECIVGRXBMO-UHFFFAOYSA-N 0.000 description 1
- MGUKYHHAGPFJMC-UHFFFAOYSA-N 4-[3-(4-hydroxy-2,5-dimethylphenyl)-1,1-dioxo-2,1$l^{6}-benzoxathiol-3-yl]-2,5-dimethylphenol Chemical compound C1=C(O)C(C)=CC(C2(C3=CC=CC=C3S(=O)(=O)O2)C=2C(=CC(O)=C(C)C=2)C)=C1C MGUKYHHAGPFJMC-UHFFFAOYSA-N 0.000 description 1
- OLQIKGSZDTXODA-UHFFFAOYSA-N 4-[3-(4-hydroxy-2-methylphenyl)-1,1-dioxo-2,1$l^{6}-benzoxathiol-3-yl]-3-methylphenol Chemical compound CC1=CC(O)=CC=C1C1(C=2C(=CC(O)=CC=2)C)C2=CC=CC=C2S(=O)(=O)O1 OLQIKGSZDTXODA-UHFFFAOYSA-N 0.000 description 1
- SJZRECIVHVDYJC-UHFFFAOYSA-N 4-hydroxybutyric acid Chemical compound OCCCC(O)=O SJZRECIVHVDYJC-UHFFFAOYSA-N 0.000 description 1
- IICHURGZQPGTRD-UHFFFAOYSA-N 4-phenyldiazenylnaphthalen-1-amine Chemical compound C12=CC=CC=C2C(N)=CC=C1N=NC1=CC=CC=C1 IICHURGZQPGTRD-UHFFFAOYSA-N 0.000 description 1
- WDJHALXBUFZDSR-UHFFFAOYSA-N Acetoacetic acid Natural products CC(=O)CC(O)=O WDJHALXBUFZDSR-UHFFFAOYSA-N 0.000 description 1
- DSLZVSRJTYRBFB-LLEIAEIESA-N D-glucaric acid Chemical compound OC(=O)[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O DSLZVSRJTYRBFB-LLEIAEIESA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- 241000588731 Hafnia Species 0.000 description 1
- DOJXGHGHTWFZHK-UHFFFAOYSA-N Hexachloroacetone Chemical compound ClC(Cl)(Cl)C(=O)C(Cl)(Cl)Cl DOJXGHGHTWFZHK-UHFFFAOYSA-N 0.000 description 1
- 239000004705 High-molecular-weight polyethylene Substances 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- QPMIVFWZGPTDPN-UHFFFAOYSA-N Tetrabromophenol blue Chemical compound C1=C(Br)C(O)=C(Br)C=C1C1(C=2C=C(Br)C(O)=C(Br)C=2)C(C(Br)=C(Br)C(Br)=C2Br)=C2S(=O)(=O)O1 QPMIVFWZGPTDPN-UHFFFAOYSA-N 0.000 description 1
- CBMCZKMIOZYAHS-NSCUHMNNSA-N [(e)-prop-1-enyl]boronic acid Chemical compound C\C=C\B(O)O CBMCZKMIOZYAHS-NSCUHMNNSA-N 0.000 description 1
- AZWHFTKIBIQKCA-UHFFFAOYSA-N [Sn+2]=O.[O-2].[In+3] Chemical compound [Sn+2]=O.[O-2].[In+3] AZWHFTKIBIQKCA-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 125000000641 acridinyl group Chemical class C1(=CC=CC2=NC3=CC=CC=C3C=C12)* 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 229940027998 antiseptic and disinfectant acridine derivative Drugs 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- UDSAIICHUKSCKT-UHFFFAOYSA-N bromophenol blue Chemical compound C1=C(Br)C(O)=C(Br)C=C1C1(C=2C=C(Br)C(O)=C(Br)C=2)C2=CC=CC=C2S(=O)(=O)O1 UDSAIICHUKSCKT-UHFFFAOYSA-N 0.000 description 1
- BEQNOZDXPONEMR-UHFFFAOYSA-N cadmium;oxotin Chemical compound [Cd].[Sn]=O BEQNOZDXPONEMR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- FOCAUTSVDIKZOP-UHFFFAOYSA-N chloroacetic acid Chemical compound OC(=O)CCl FOCAUTSVDIKZOP-UHFFFAOYSA-N 0.000 description 1
- WWAABJGNHFGXSJ-UHFFFAOYSA-N chlorophenol red Chemical compound C1=C(Cl)C(O)=CC=C1C1(C=2C=C(Cl)C(O)=CC=2)C2=CC=CC=C2S(=O)(=O)O1 WWAABJGNHFGXSJ-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- ZXJXZNDDNMQXFV-UHFFFAOYSA-M crystal violet Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1[C+](C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 ZXJXZNDDNMQXFV-UHFFFAOYSA-M 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- WOWBFOBYOAGEEA-UHFFFAOYSA-N diafenthiuron Chemical compound CC(C)C1=C(NC(=S)NC(C)(C)C)C(C(C)C)=CC(OC=2C=CC=CC=2)=C1 WOWBFOBYOAGEEA-UHFFFAOYSA-N 0.000 description 1
- 229960005215 dichloroacetic acid Drugs 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- PBWZKZYHONABLN-UHFFFAOYSA-N difluoroacetic acid Chemical compound OC(=O)C(F)F PBWZKZYHONABLN-UHFFFAOYSA-N 0.000 description 1
- SUXCALIDMIIJCK-UHFFFAOYSA-L disodium;4-amino-3-[[4-[4-[(1-amino-4-sulfonatonaphthalen-2-yl)diazenyl]-3-methylphenyl]-2-methylphenyl]diazenyl]naphthalene-1-sulfonate Chemical compound [Na+].[Na+].C1=CC=CC2=C(N)C(N=NC3=CC=C(C=C3C)C=3C=C(C(=CC=3)N=NC=3C(=C4C=CC=CC4=C(C=3)S([O-])(=O)=O)N)C)=CC(S([O-])(=O)=O)=C21 SUXCALIDMIIJCK-UHFFFAOYSA-L 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 150000002212 flavone derivatives Chemical class 0.000 description 1
- GNBHRKFJIUUOQI-UHFFFAOYSA-N fluorescein Chemical compound O1C(=O)C2=CC=CC=C2C21C1=CC=C(O)C=C1OC1=CC(O)=CC=C21 GNBHRKFJIUUOQI-UHFFFAOYSA-N 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 229940015043 glyoxal Drugs 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- VBZWSGALLODQNC-UHFFFAOYSA-N hexafluoroacetone Chemical compound FC(F)(F)C(=O)C(F)(F)F VBZWSGALLODQNC-UHFFFAOYSA-N 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 159000000014 iron salts Chemical class 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 238000007644 letterpress printing Methods 0.000 description 1
- 229940040102 levulinic acid Drugs 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
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- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
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- 229920002401 polyacrylamide Polymers 0.000 description 1
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Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Description
本発明は、新規な透明導電性回路を有する基板
の製造法に関するものであり、その目的とすると
ころは、従来のエツチング法やリフトオフ法等に
比べて簡単な製造工程により、品質の優れた透明
導電性回路を有する基板を経済的に有利に製造す
る方法に係るものである。
本発明は、液晶表示体、エレクトロクロミツク
表示体、電子写真記録体、電気泳動記録体、透明
スイツチ、コネクター、フレキシブルサーキツ
ト、帯電防止体、面状発熱体、太陽電池、導電体
等の材料として電気・電子工業の各産業分野にお
いて有用なる透明導電性回路を有する基板の製造
法に適用可能なものである。
公知に属する透明導電性回路を有する基板の製
造法としては次のような方法が知られている。即
ち、金、銀、パラジウム等の金属薄膜、酸化錫、
酸化インジウム、酸化アンチモン、酸化カドミウ
ム錫等の金属酸化物薄膜を真空蒸着法、スパツタ
リング法もしくは印刷法によつてガラス基板、プ
ラスチツクス基板、シート基板、フイルム基板上
に全面形成させた後、必要な導電性回路部分にフ
オトレジスト法やスクリーン印刷法によつて回路
のマスキング層を形成させる。次いで湿式或いは
乾式のエツチング法にて不要な金属薄膜図柄部分
或いは金属酸化物薄膜図柄部分を除去した後、マ
スキング層を除去することによつて透明導電性回
路を形成させるのである。
しかしながらこれらの方法には次のような欠点
があつたのである。即ち、フオトレジストでは
マスキング層を形成する際、感光性樹脂の塗布、
パターンの焼付、現像、フオトレジストの除去等
の工程を必要とするため作業性が悪いとか、ス
クリーン印刷法によつてレジストインキでマスキ
ング層を形成する際、長時間の乾燥を必要とする
ため生産性に劣るとか、高価な各種の材料が必要
であるとかの問題点を抱えており、しかも装置的
にも作業的にも各種の制約を蔵していたのであ
る。
かかる問題点を解決する方法の一例として、特
開昭58−113376号に記載されている増粘されたエ
ツチング液を例えばシルクスクリーンを介して直
接、導電性薄膜に塗工し、しかる後水洗等の処理
で所望のパターンにエツチングする方法が提案さ
れてはいるが、本発明者らの追試実験において、
この方法によつては、エツチング液塗布後のエツ
チング効果を外観から充分確認、保障することが
できないとか、或いは塗布後エツチング完了まで
の保持時間の調整とか洗浄時間に関する信頼性が
極めて低く、エツチング完了前に水洗処理を行う
と不必要な部分まで浸食してしまう危険性がある
とか、実際の工業生産においてその再現性を確保
することの困難さを有し、大規模な製造において
良品の生産性を低下させる傾向が強く現れ、かつ
製品の検査工程とか作業管理の上で多大の難問を
含んでいることが認められたのである。
一方、リフトオフ法の場合は、予め基板上の不
必要な図柄部分を例えば水溶性インキを用いて印
刷しておき、次に基板の全面に金属薄膜或いは金
属酸化物薄膜を形成させ、しかる後に水洗して水
溶性インキ図柄部分を除去することによつて所望
の透明導電性回路を得ることができるという方法
が工夫されているが、この方法を用いれば、工業
的にはエツチング工程が不必要となるため、作業
がかなり楽になるとはいえ、大量生産的には優秀
な方法であるにもかかわらず、少量多品種生産の
場合には経済的な難問がでてくる傾向があつたの
である。
本発明者らは、かかる現状に鑑み、従来技術が
有する前期諸問題点を解消すべく永年にわたり鋭
意研究を重ね、考察努力を傾注してきた結果、基
板上に所望の透明導電性回路を形成させる新しい
刮目すべき方法として遂に本発明を完成するに至
つた。本法は、脂肪族カルボニル基含有酸性化合
物と変色性化合物とを含む変色性インキで透明導
電膜上に所望の図柄を形成させた後、反応の進行
に応じてインキが変色することによつてエツチン
グの完了を視認し、しかる後に該インキを洗浄等
により除去することによつて従来法では見られな
いような精度としかも美しい透明導電性回路を形
成させることを見い出し、かかる知見に基づいて
各種の原料関係の条件とか作業手順等を究明し、
遂に本発明を完成するに至つたものである。即
ち、本発明は、水酸基、カルボニル基、ニトロ
基、シアノ基及びハロゲン原子より選ばれた少な
くとも一つの基を有する脂肪族カルボニル基含有
酸性化合物と変色性化合物とを含む変色性インキ
を用いて、基板面の透明導電膜上に図柄を印刷
し、インキの変色を視認した後、図柄部分を洗浄
除去することを特徴とする透明導電性回路を有す
る基板の製造法を明らかにしたものである。
以下、本発明を詳細に説明する。
本発明における水酸基、カルボニル基、ニトロ
基、シアノ基及びハロゲン原子より選ばれた少な
くとも一つの基を有する脂肪族カルボニル基含有
酸性化合物としては、次のような条件を具備する
ものが好ましいのである。即ち、
速やかに透明導電膜と反応し、エツチングす
るもの、
インキバインダーに混入した際、できるだけ
ゲル化物や沈澱物などを生ぜず分散、溶解性の
良好なもの、
速やかに洗浄により除去されるもの
等が好ましい。
さて、このような化合物の具体的名称を示す
と、
(a) 水酸基を有するものの例
乳酸、グリコール酸、リンゴ酸、クエン酸、
ヒドロキシ酪酸、テトラヒドロキシアジピン酸
(b) カルボニル基を有するものの例
アクロレイン水和物、アジピン酸、アセチル
アセトン、アセト酢酸、イタコン酸、オキシジ
プロピオン酸、クエン酸、グリオキザール、グ
リオキシル酸、グリコール酸、ケトマロン酸、
コハク酸、ジアセチル、シユウ酸、酒石酸、ピ
メリン酸、ピルビン酸、ブタンテトラカルボン
酸、フマール酸、マレイン酸、マロン酸、リン
ゴ酸、レブリン酸
(c) ニトロ基を有するものの例
ニトロ酢酸、ニトロプロピオン酸
(d) シアノ基を有するものの例
シアノ酢酸、シアノプロピオン酸
(e) ハロゲン原子を有するものの例
クロラール、モノクロル酢酸、ジクロル酢
酸、トリクロル酢酸、クロロフルオロ酢酸、ジ
フルオロ酢酸、トリフルオロ酢酸、ヘキサクロ
ロアセトン、ペンタクロロアセトン、ヘキサフ
ルオロアセトン、ペンタフルオロアセトン、パ
ーフルオロ脂肪酸、ジブロム酢酸、トリブロム
酢酸
以上に示した水酸基、カルボニル基、ニトロ
基、シアノ基、及びハロゲン原子のごとき極性基
を含んでいない脂肪族モノカルボン酸は多くの実
験の結果、本発明の方法に適用しても予期したよ
うな優れた効果を期待できなかつたのである。尤
も、脂肪族モノカルボン酸の中でもギ酸、酢酸は
エツチング効果はあるものの図柄部分のみの美し
い洗浄、除去効果を発揮せしめることにおいて難
点があり、上記のごとき脂肪族カルボニル基含有
酸性化合物のみが優れた結果を得たのである。
以上に示した本発明のいう酸性化合物の量とし
ては、特に規制されるものではないが、大体のと
ころインキ中のバインダー100重量部に対して20
重量部乃至50重量部含まれることが望ましい。も
し、20重量部未満である場合には、エツチング速
度が遅くなつたり、変色や緩やかになつたりして
作業上不都合になる。又50重量部を越えるとエツ
チング時のサイドエツチングが発生する可能性が
あること、並びにインキの製造、保管が容易でな
くなつたり、かつ印刷適性に支障が生じるように
なるからである。
次に本発明にいう変色性化合物について説明す
る。
ここにいう変色性化合物とは、酸化還元を含む
PHの変化によつて変色する化合物、または蛍光体
生成によつて変色する化合物である。更に詳しく
説明する。PHの変化によつて変色する化合物と
は、酸性側で水素イオン濃度の変化を感知検出す
る試薬であり、このような試薬の具体例を示す
と、メチルバイオレツト、メタニルイエロー、メ
タクレゾールパープル、p−キシレノールブル
ー、チモールブルー、トロパエオリンOO、ベン
ゾパープリン4B、キナルジンレツド、メチルイ
エロー、ブロムフエノールブルー、テトラブロム
フエノールブルー、メチルオレンジ、ブロムクロ
ルフエノールブルー、α−ナフチルレツド、アリ
ザリンスルホン酸アルカリ、ブロムクレゾールグ
リーン、メチルレツド、クロルフエノールレツ
ド、ベンゾイルオーラミンG、ブロムクレゾール
パープル、ブロムフエノールレツド、ブロムチモ
ールブルー等の単独及びこれらの混合物である。
例えばブロムクレゾールパープル0.05%+ブロ
ムチモールブルー0.05%では、PH6.7において黄
〜紫(酸〜アルカリ)に変色し、又ブロムクレゾ
ールグリーン0.075%+メチルオレンジ0.05%で
はPH4.3において橙〜緑(酸〜アルカリ)に変色
する。
また、上記のもの以外に、PHの変化がとくに酸
化還元である場合の化合物とは、透明導電膜成分
である遷移金属イオンと酸化反応もしくは還元反
応を起こし、変色する試薬を指し、具体的にはハ
イドロキノン類、アルキルハイドロキノン類、ポ
リフエノール類、ポリフエノールカルボン酸類、
有機過酸化物、可溶性鉄塩、可溶性希土類塩等で
ある。蛍光体生成によつて変色する化合物とは、
透明導電膜成分と色素成分とが結合して該色素成
分の構造上に一部変化が生じ、可視部もしくは紫
外部のスペクトルを変化せしめるか、肉眼によつ
て明らかに蛍光を新たに発生するか、或いは蛍光
色調を変化させる化合物を指し、具体的にはフル
オレツセン及びその誘導体、フラボン誘導体、ア
クリジン系誘導体である。
以上のように説明される変色性化合物以外のも
のとしては、本変色性インキに各種の印刷法に適
する汎用のバインダー、溶剤、界面活性剤、或い
は消泡剤等の添加がおこなわれインキに加工され
る。
以上を総括すれば、変色性インキとは、透明導
電膜をエツチングする材料と、エツチングにおけ
るインキ系の酸化とか還元の度合いに応じて色調
が変化する材料とを含むインキとして定義され
る。印刷法としてはスクリーン印刷法、グラビア
印刷法、フレキソ印刷法、オフセツト印刷法、凸
版印刷法等が用いられる。
本発明の基板については、有機、無機を問わず
使用することができる。有機系基板としては各種
の樹脂シート或いは各種樹脂フイルムが使用でき
るが、特にポリエステルフイルムが印刷上好まし
い。無機系基板としてはガラス、石英ガラス、サ
フアイア、スピネル、ルチル、ジルコニア、ハフ
ニア、ガーネツト、チタン酸バリウム、チタン酸
ストロンチウム、雲母、アスベスト、各種セラミ
ツクス等の耐熱性のよいものが用いられるが、経
済的にはガラス、石英ガラス、雲母等の基板が有
利である。
本発明の透明導電膜としては、導電性を有し、
また、透明性を有するものがよく、例えば金、
銀、白金、パラジウム、ロジウム等の金属薄膜、
酸化錫、酸化インジウム、酸化アンチモン、酸化
チタン、酸化ジルコニウム或いは酸化インジウム
−酸化錫、酸化錫−酸化アンチモン系等の金属酸
化物薄膜が挙げられるが、エツチング加工性、経
済性を考慮すると、酸化インジウム、酸化錫系の
ものが最も好ましいようである。これらの透明導
電膜の厚さは10Å〜500Å、抵抗値としては電気
回路の用途によつて1Ω/□〜104Ω/□であるが、
好ましくは10Ω/□〜2000Ω/□がよい。
また洗浄方法としては、シヤワー洗浄、浴槽中
での洗浄、超音波洗浄、マイクロ波洗浄等があ
る。この際、注意すべきことは透明導電性回路の
透明性を阻害するインキ残渣を完全に除去すると
ともに、透明導電性回路表面を損傷してはいけな
いということである。こういつた観点から工業的
にはシヤワー洗浄が好ましい方法であるが、この
場合、水圧は1Kg/m2以上であることが望まし
く、1Kg/m2以下である場合、正確なエツチング
図柄を得ることが難しいようである。また続いて
行われる乾燥工程の前に予めスポンジローラー等
を用いて洗浄、水切りを施すこともよく、かつ乾
燥も効率的に行われるように配慮すべきである。
本発明者らは、上記した本発明の方法に関し
て、多数の実験を行い、本発明の優秀性を確認し
たのであるが、更に本発明の技術的内容を説明す
るため、以下代表的な例を実施例として示すこと
にする。本発明の方法は単に以下に示された実施
例のみに限定して解放されるべきでなく、任意に
その実施態様を適宜に実施し得ることは当然であ
る。
実施例 1
二軸延伸されたポリエチレンテレフタレートフ
イルム(厚さ0.1mm、550nm 平行光線87%)に、
酸化インジウム:酸化錫=90:10の組成のインジ
ウム・錫酸化物をスパツタリング法により付着さ
せた。スパツタリングは真空度10-3torrにてアル
ゴンガス導入のもとに行い、付着膜厚は約100Å
であつた。次ぎに、ポリアクリルアミド樹脂100
gに対しトリクロロ酢酸30g、ブロムクレゾール
グリーン75mgおよびメチルオレンジ50mgを加え、
エタノール−水等量混合溶剤で希釈して全量を約
300gとし、シルクスクリーンに適するインキを
つくつた。このインキを用いて上記薄膜付フイル
ムに線幅0.5mm、線間0.5mmすなわち1.0mmピツチの
長さ100mmの細線を30本印刷した。1分後にイン
キの色が橙色から緑がかつた色に変化した。つい
で該フイルムを水洗し、インキを完全に除去した
後乾燥する。各細線においては両端間の表面抵抗
が2.1kΩであり、また各細線間の絶縁は完全であ
つた。
実施例 2〜10
市販のポリイミドフイルム(厚さ25μm)に、
銅を真空蒸着法により付着させた。付着膜厚は約
3000Åであつた。一方、別表1に示す合成樹脂10
gに対して別表に示す脂肪族カルボニル基含有酸
性化合物4gおよび発色試薬100mgを含む水性変
色インキ150gをつくつた。そのインキを用いて
上記ポリイミドフイルムの銅面上にグラビア印刷
により線幅1.27mm、線間1.27mmすなわち2.54mmピ
ツチの長さ50cmの図柄を150本印刷した。5〜20
分後にインキの変色が終了した後該フイルムを水
洗しインキを完全に除去したのち乾燥して、表面
抵抗を測定したところ別表1のような結果が得ら
れた。
実施例11〜12及び比較例1〜3
二軸延伸されたポリエチレンテレフタレートフ
イルム(厚さ50μm)に別表に示す金属を真空蒸
着法により厚さ500Åで付着させた。
次に高分子量ポリエチレングリコール100g、
別表2の酸性化合物40g、水300g、別表2に示
す変色試薬50mgを含むインキを塗布して30分間放
置して変色が完全にしたのを確かめて水洗しイン
キを完全に除去して乾燥したのち表面抵抗を測定
しエツチング効果を試験したところ別表2のよう
な結果が得られた。
The present invention relates to a method for manufacturing a substrate having a novel transparent conductive circuit, and its purpose is to manufacture a transparent substrate with excellent quality through a manufacturing process that is simpler than conventional etching methods, lift-off methods, etc. The present invention relates to an economically advantageous method of manufacturing a substrate having a conductive circuit. The present invention relates to materials for liquid crystal displays, electrochromic displays, electrophotographic recording media, electrophoretic recording media, transparent switches, connectors, flexible circuits, antistatic bodies, planar heating elements, solar cells, conductors, etc. The present invention can be applied to a method of manufacturing a substrate having a transparent conductive circuit, which is useful in various industrial fields of electrical and electronic industries. The following method is known as a method of manufacturing a substrate having a transparent conductive circuit. That is, metal thin films such as gold, silver, palladium, tin oxide,
After forming a thin film of metal oxide such as indium oxide, antimony oxide, or cadmium tin oxide on the entire surface of a glass substrate, plastic substrate, sheet substrate, or film substrate by vacuum evaporation, sputtering, or printing, the necessary A circuit masking layer is formed on the conductive circuit portion by a photoresist method or a screen printing method. Next, after removing unnecessary metal thin film pattern parts or metal oxide thin film pattern parts by wet or dry etching method, a transparent conductive circuit is formed by removing the masking layer. However, these methods had the following drawbacks. That is, when forming a masking layer with photoresist, coating of photosensitive resin,
Processes such as pattern baking, development, and photoresist removal are required, resulting in poor workability, and when forming a masking layer with resist ink using the screen printing method, production is slow due to the long drying time required. It had problems such as poor performance and the need for a variety of expensive materials, and was also subject to various limitations in terms of equipment and work. As an example of a method for solving this problem, a thickened etching solution described in JP-A-58-113376 is applied directly to the conductive thin film through a silk screen, and then washed with water, etc. A method of etching a desired pattern using a process has been proposed, but in a follow-up experiment conducted by the inventors
With this method, the etching effect after application of the etching solution cannot be sufficiently confirmed or guaranteed from the appearance, or the reliability regarding adjustment of the holding time after application and cleaning time until completion of etching is extremely low, and there is a possibility that the etching is not completed. If water washing is performed beforehand, there is a risk that unnecessary parts will be eroded, and it is difficult to ensure reproducibility in actual industrial production. It was recognized that there was a strong tendency to lower the quality of products, and that there were many difficult problems in the product inspection process and work management. On the other hand, in the case of the lift-off method, unnecessary pattern parts on the substrate are printed in advance using, for example, water-soluble ink, and then a thin metal film or a thin metal oxide film is formed on the entire surface of the substrate, and then washed with water. A method has been devised in which a desired transparent conductive circuit can be obtained by removing the water-soluble ink pattern using a method that eliminates the need for an etching process from an industrial perspective. This makes the work considerably easier, but although it is an excellent method for mass production, it tends to pose economical problems when producing a wide variety of products in small quantities. In view of the current situation, the inventors of the present invention have devoted many years of intensive research and consideration to solving the problems of the prior art, and as a result, they have succeeded in forming a desired transparent conductive circuit on a substrate. We have finally completed the present invention as a new and remarkable method. This method involves forming a desired pattern on a transparent conductive film using a color-changing ink containing an acidic compound containing an aliphatic carbonyl group and a color-changing compound, and then changing the color of the ink as the reaction progresses. It was discovered that by visually confirming the completion of etching and then removing the ink by washing etc., it was possible to form beautiful transparent conductive circuits with a precision not seen in conventional methods.Based on this knowledge, various types of We investigate the raw material-related conditions and work procedures, etc.
The present invention has finally been completed. That is, the present invention uses a color-changing ink containing an aliphatic carbonyl group-containing acidic compound having at least one group selected from a hydroxyl group, a carbonyl group, a nitro group, a cyano group, and a halogen atom, and a color-changing compound. A method for manufacturing a substrate having a transparent conductive circuit is disclosed, which is characterized in that a pattern is printed on a transparent conductive film on the surface of the substrate, and after visually confirming the discoloration of the ink, the pattern portion is washed and removed. The present invention will be explained in detail below. In the present invention, the aliphatic carbonyl group-containing acidic compound having at least one group selected from a hydroxyl group, a carbonyl group, a nitro group, a cyano group, and a halogen atom preferably satisfies the following conditions. In other words, those that quickly react with and etch the transparent conductive film, those that have good dispersion and solubility without forming gels or precipitates when mixed into the ink binder, those that can be quickly removed by washing, etc. is preferred. Now, the specific names of such compounds are as follows: (a) Examples of compounds with hydroxyl groups: lactic acid, glycolic acid, malic acid, citric acid,
Hydroxybutyric acid, tetrahydroxyadipic acid (b) Examples of carbonyl group-containing acrolein hydrate, adipic acid, acetylacetone, acetoacetic acid, itaconic acid, oxydipropionic acid, citric acid, glyoxal, glyoxylic acid, glycolic acid, ketomalonic acid ,
Succinic acid, diacetyl, oxalic acid, tartaric acid, pimelic acid, pyruvic acid, butanetetracarboxylic acid, fumaric acid, maleic acid, malonic acid, malic acid, levulinic acid (c) Examples of substances with nitro groups Nitroacetic acid, nitropropionic acid (d) Examples of substances containing a cyano group Cyanoacetic acid, cyanopropionic acid (e) Examples of substances containing a halogen atom Chloral, monochloroacetic acid, dichloroacetic acid, trichloroacetic acid, chlorofluoroacetic acid, difluoroacetic acid, trifluoroacetic acid, hexachloroacetone, penta Chloroacetone, hexafluoroacetone, pentafluoroacetone, perfluoro fatty acid, dibromoacetic acid, tribromoacetic acid Aliphatic monocarbons that do not contain polar groups such as hydroxyl group, carbonyl group, nitro group, cyano group, or halogen atom shown above As a result of many experiments, it was found that even when acids were applied to the method of the present invention, the expected excellent effects could not be expected. Of course, among the aliphatic monocarboxylic acids, formic acid and acetic acid have an etching effect, but they have the disadvantage of achieving a beautiful cleaning and removal effect only on the design area, and only the above-mentioned acidic compounds containing aliphatic carbonyl groups are superior. We got the results. The amount of the acidic compound mentioned above in the present invention is not particularly limited, but is generally 20 parts by weight per 100 parts by weight of the binder in the ink.
It is desirable that the content is between 50 parts by weight and 50 parts by weight. If the amount is less than 20 parts by weight, the etching speed may become slow, discoloration may occur, or the etching may become slow, resulting in operational inconveniences. Moreover, if the amount exceeds 50 parts by weight, side etching may occur during etching, the production and storage of the ink may become difficult, and printability may be impaired. Next, the color-changing compound referred to in the present invention will be explained. The color-changing compound mentioned here includes oxidation-reduction compounds.
A compound that changes color due to a change in pH or a compound that changes color due to the formation of a phosphor. It will be explained in more detail. Compounds that change color due to changes in pH are reagents that sense and detect changes in hydrogen ion concentration on the acidic side.Specific examples of such reagents include methyl violet, methanyl yellow, and metacresol purple. , p-xylenol blue, thymol blue, tropaeolin OO, benzopurpurin 4B, quinaldine red, methyl yellow, bromophenol blue, tetrabromophenol blue, methyl orange, bromochlorophenol blue, α-naphthyl red, alkali alizarin sulfonate, bromcresol green , methyl red, chlorphenol red, benzoyl auramine G, bromcresol purple, bromophenol red, bromthymol blue, etc. alone or as a mixture thereof. For example, Bromcresol Purple 0.05% + Bromthymol Blue 0.05% changes color from yellow to purple (acid to alkaline) at pH 6.7, and Bromcresol Green 0.075% + Methyl Orange 0.05% changes color from orange to green (at PH 4.3). acid to alkali). In addition to the above, compounds in which the change in pH is caused by redox refer to reagents that undergo an oxidation or reduction reaction with transition metal ions, which are components of the transparent conductive film, and change color. are hydroquinones, alkylhydroquinones, polyphenols, polyphenol carboxylic acids,
These include organic peroxides, soluble iron salts, soluble rare earth salts, etc. Compounds that change color due to phosphor production are:
The combination of the transparent conductive film component and the dye component causes a partial change in the structure of the dye component, causing a change in the visible or ultraviolet spectrum, or new fluorescence that is clearly visible to the naked eye. , or a compound that changes the fluorescent color tone, specifically fluorescein and its derivatives, flavone derivatives, and acridine derivatives. In addition to the color-changing compounds explained above, general-purpose binders, solvents, surfactants, antifoaming agents, etc. suitable for various printing methods are added to this color-changing ink and processed into ink. be done. To summarize the above, a color-changing ink is defined as an ink that includes a material that etches a transparent conductive film and a material whose color tone changes depending on the degree of oxidation or reduction of the ink system during etching. As the printing method, a screen printing method, a gravure printing method, a flexographic printing method, an offset printing method, a letterpress printing method, etc. are used. The substrate of the present invention can be either organic or inorganic. Various resin sheets or various resin films can be used as the organic substrate, but polyester film is particularly preferred for printing. As inorganic substrates, materials with good heat resistance such as glass, quartz glass, sapphire, spinel, rutile, zirconia, hafnia, garnet, barium titanate, strontium titanate, mica, asbestos, and various ceramics are used, but they are not economical. For this purpose, substrates such as glass, quartz glass, mica, etc. are advantageous. The transparent conductive film of the present invention has conductivity,
In addition, transparent materials are preferred, such as gold,
Metal thin films such as silver, platinum, palladium, rhodium, etc.
Examples include metal oxide thin films such as tin oxide, indium oxide, antimony oxide, titanium oxide, zirconium oxide, indium oxide-tin oxide, and tin oxide-antimony oxide, but considering etching processability and economic efficiency, indium oxide , tin oxide-based ones seem to be the most preferred. The thickness of these transparent conductive films is 10 Å to 500 Å, and the resistance value is 1 Ω/□ to 10 4 Ω/□ depending on the application of the electric circuit.
Preferably 10Ω/□ to 2000Ω/□. Further, cleaning methods include shower cleaning, bath cleaning, ultrasonic cleaning, microwave cleaning, and the like. At this time, care must be taken not only to completely remove ink residues that impede the transparency of the transparent conductive circuit, but also to avoid damaging the surface of the transparent conductive circuit. From this point of view, industrially, shower cleaning is the preferred method, but in this case, it is desirable that the water pressure is 1 kg/m 2 or more, and if it is 1 kg/m 2 or less, it is difficult to obtain accurate etched patterns. seems difficult. Also, before the subsequent drying step, it is advisable to wash and drain the material using a sponge roller or the like, and care should be taken to ensure that drying is carried out efficiently. The present inventors conducted numerous experiments regarding the method of the present invention described above and confirmed the superiority of the present invention.In order to further explain the technical contents of the present invention, the following representative examples are presented. This will be shown as an example. It goes without saying that the method of the invention should not be limited solely to the examples shown below, but that its embodiments can be implemented as appropriate. Example 1 A biaxially stretched polyethylene terephthalate film (thickness 0.1 mm, 550 nm, parallel light beam 87%) was
Indium/tin oxide having a composition of indium oxide: tin oxide = 90:10 was deposited by a sputtering method. Sputtering was performed at a vacuum level of 10 -3 torr with argon gas introduced, and the deposited film thickness was approximately 100 Å.
It was hot. Next, polyacrylamide resin 100
Add 30g of trichloroacetic acid, 75mg of bromcresol green and 50mg of methyl orange to
Dilute with a mixed solvent of equal parts ethanol and water to bring the total volume to approx.
The weight was 300g, and an ink suitable for silk screening was created. Using this ink, 30 fine lines with a line width of 0.5 mm and a line spacing of 0.5 mm, that is, a 1.0 mm pitch and a length of 100 mm, were printed on the thin film. After 1 minute, the color of the ink changed from orange to greenish. The film is then washed with water to completely remove the ink and then dried. The surface resistance between both ends of each thin wire was 2.1 kΩ, and the insulation between each thin wire was perfect. Examples 2 to 10 Commercially available polyimide film (thickness 25 μm)
Copper was deposited by vacuum evaporation. Adhesive film thickness is approx.
It was 3000Å. On the other hand, synthetic resin 10 shown in Attached Table 1
150 g of an aqueous color-changing ink containing 4 g of an aliphatic carbonyl group-containing acidic compound shown in the attached table and 100 mg of a coloring reagent was prepared. Using the ink, 150 designs with a line width of 1.27 mm and a line spacing of 1.27 mm, that is, a pitch of 2.54 mm and a length of 50 cm, were printed on the copper surface of the polyimide film by gravure printing. 5~20
After the ink had finished discoloring after a few minutes, the film was washed with water to completely remove the ink and then dried.The surface resistance was measured and the results shown in Attached Table 1 were obtained. Examples 11-12 and Comparative Examples 1-3 Metals shown in the attached table were deposited to a thickness of 500 Å on a biaxially stretched polyethylene terephthalate film (thickness 50 μm) by vacuum deposition. Next, 100g of high molecular weight polyethylene glycol,
Apply ink containing 40g of the acidic compound shown in Attached Table 2, 300g of water, and 50mg of the discoloration reagent shown in Attachment 2, leave it for 30 minutes, confirm that the discoloration is complete, wash it with water, completely remove the ink, and dry it. When the surface resistance was measured and the etching effect was tested, the results shown in Attached Table 2 were obtained.
【表】【table】
【表】【table】
Claims (1)
及びハロゲン原子より選ばれた少なくとも一つの
基を有する脂肪族カルボニル基含有酸性化合物と
変色性化合物とを含む変色性インキを用いて、基
板面の透明導電膜上に図柄を印刷し、インキの変
色を視認した後、図柄部分を洗浄除去することを
特徴とする透明導電性回路を有する基板の製造
法。 2 変色性化合物が、酸化還元を含むPHの変化に
よつて変色する化合物、または蛍光体生成によつ
て変色する化合物である特許請求の範囲第1項記
載の透明導電性回路を有する基板の製造法。[Scope of Claims] 1. Using a color-changing ink containing an acidic compound containing an aliphatic carbonyl group and a color-changing compound having at least one group selected from a hydroxyl group, a carbonyl group, a nitro group, a cyano group, and a halogen atom. A method for manufacturing a substrate having a transparent conductive circuit, which comprises printing a pattern on a transparent conductive film on the surface of the substrate, visually checking for discoloration of the ink, and then washing and removing the pattern. 2. Production of a substrate having a transparent conductive circuit according to claim 1, wherein the color-changing compound is a compound that changes color due to a change in pH including redox, or a compound that changes color due to phosphor formation. Law.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8720584A JPS60232614A (en) | 1984-04-28 | 1984-04-28 | Method of producing substrate having transparent conductive circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8720584A JPS60232614A (en) | 1984-04-28 | 1984-04-28 | Method of producing substrate having transparent conductive circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60232614A JPS60232614A (en) | 1985-11-19 |
| JPH053690B2 true JPH053690B2 (en) | 1993-01-18 |
Family
ID=13908458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8720584A Granted JPS60232614A (en) | 1984-04-28 | 1984-04-28 | Method of producing substrate having transparent conductive circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60232614A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2915856B1 (en) * | 2014-03-03 | 2019-10-16 | Agfa-Gevaert | Etch-resistant inkjet inks for manufacturing conductive patterns |
-
1984
- 1984-04-28 JP JP8720584A patent/JPS60232614A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60232614A (en) | 1985-11-19 |
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