JPH0559331B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Use" The present invention relates to a clean room used in the field of manufacturing VLSIs, ICs, etc.

"Prior Art" As a conventional clean room of this type, a partially laminar flow clean room as shown in FIG. 2 is known.

In the figure, numeral 1 is a ceiling slab and 2 is a floor slab. A ceiling plate 3 is provided in the ceiling part of the room between the ceiling plate 1 and the floor plate 2, and an air supply duct 4 from a main air conditioner (not shown) is arranged above the ceiling plate 3. It is set up. Further, air supply chambers 5, 5, 5 are formed at the bottom of the ceiling plate 3, and these are equipped with ULPA filters (or HEPA filters) 6,
It communicates with the space below via 6,6.
On the other hand, a perforated floor (grating, punched metal, etc.) 7, which has an opening above the floor slab 2, is installed on the floor of the room, and a utility area 8 is provided between them. It is formed.
Furthermore, the interior of the room is partitioned by partition plates 9, 9 installed between the air supply chamber 5 and the perforated floor 7.
0 and a service area 11. Near the bottom of the partition plate 9, manufacturing equipment 12 such as LSI,
12 is provided, and a damper-equipped partition plate exhaust port 13 is formed at the lower end of the partition plate 9.

The space of the work chamber 10 is divided into an apparatus area A above the manufacturing apparatus 12 and a passage area C through which the worker 14 passes approximately in the center of the work chamber 10. The ceiling of the supply chamber 5 has been raised to reduce the psychological impact on people.
The ULPA filter 6 is arranged at a higher position than that in the device area A. In addition, a lighting fixture 15 is installed above the worker 14 in the supply chamber 5, and air conditioners 17, 17 with built-in fans equipped with a louver 16 with a damper on the outside are installed on the service area 11 side. It is said that the configuration is as follows.

In such a conventional partially laminar flow clean room, first, clean air sent through the air supply duct 4 is blown into the work room 10 from the air supply chambers 5, 5, 5 provided on the ceiling. Ru. The clean air supplied to the work room 10 flows in a nearly laminar flow in one direction from the ceiling to the floor where the perforated floor 7 is provided, and then flows from the utility area 8 to the service area 11 to the air conditioner. 17, is further sent from the air conditioner 17 into the supply chamber 5, passes through the ULPA filter 6 and returns to the working chamber 10.
supplied to

``Problems to be Solved by the Invention'' However, in the conventional clean room, the floor is made of perforated flooring such as grating, which makes walking difficult and causes worker fatigue. , the distance between the perforated floor and the floor slab is 1.5m ~
(approximately 3m deep) can be seen, giving a sense of fear; the perforated floor vibrates as workers walk, adversely affecting the manufacturing equipment; and Because the height is low, dust from the floor and workers tends to spread to the top of the manufacturing equipment.
This is a cause of lower LSI yields.Furthermore, it is necessary to make the ceiling of the aisle area higher in consideration of the psychological impact on people, which increases the floor height of the building and increases construction costs. There were problems such as the fact that it was the cause of

The present invention was made in view of the above problems, and
A floor that does not cause fatigue or fear for workers, and does not have a negative impact on manufacturing equipment due to vibration, and reduces the influence of dust from the floor and workers to improve LSI performance. The purpose of this project is to provide a clean room that can increase the yield of products and reduce construction costs by lowering the floor height of the building.

"Means for Solving the Problems" In order to solve the above problems, the present invention provides a method of flowing clean air from an air supply section provided in the ceiling toward a floor section having an exhaust opening. Accordingly, in a clean room that maintains the air in the equipment area and the passage area provided in the room in a clean state, the floors of the equipment area and the passage area are formed of fixed beds, and the air in the passage area is A fixed bed is disposed below the fixed bed in the device region, and an opening is provided between the fixed bed in the passage region and the fixed bed in the device region.

"Example" Hereinafter, an example of the present invention will be described using the drawings. FIG. 1 shows an embodiment of the present invention and is a sectional view of a clean room. In the figure, the same elements as those shown in the conventional clean room shown in FIG.

In FIG. 1, the equipment area A and the passage area C, that is, the floor near the work chamber 10 are formed of concrete fixed floors 7a, 7a, 7b.
The fixed bed 7b in the passage area C is lower than the fixed bed 7a in the equipment area A by a predetermined dimension (approximately 40 cm in this embodiment), making use of the little-used space in the utility area 8 directly below it. placed in position. An exhaust opening 21 is formed between the fixed beds 7a and 7b.
1 is attached with a louver 21a having a rough mesh that prevents objects from falling under the floor. Therefore, the upper surface of the manufacturing device 12 placed on the fixed bed 7a in the device area A is the same as the fixed bed 7b in the passage area C.
In addition to being located in a high place from the ground, the ceiling board 3 of this clean room building can be lowered to the extent that the fixed floor 7b of the passage area C is lowered, and the floor height is accordingly lowered. It is said that the structure is as follows. Also, with the lowering of the ceiling panels,
The ULPA filter (or HEPA filter) 6 of the air supply chamber 5 in the device area A is connected to the air supply chamber 5 in the device area A.
It is installed at the same height as the ULPA filter (or HEPA filter) 6 (in this example, the height of the air supply chamber 5 is about 2/3 that of the conventional one), which makes it easier to manufacture. The space in the device area A from the top surface of the device 12 to the bottom surface of the ULPA filter 6 is maintained at a predetermined height. The rest of the structure is the same as the clean room shown in FIG. 2.

Next, the operation of the clean room having the above configuration will be explained.

First, clean air sent from the main air conditioner through the air supply duct 4 is supplied to the air supply chambers 5, 5, 5 provided on the ceiling. Supply air chamber 5, 5,
The clean air supplied to 5 is passed through a ULPA filter (or
HEPA filter) 6, 6, 6 and is blown into the working chamber 10. The blown clean air passes mainly through three types of flow paths and is returned to the air supply chambers 5, 5, and 5 again.

First, the first flow path is where clean air blown from the air supply chamber 5 in the device area A flows through the manufacturing device 1.
2, passes through the partition plate exhaust port 13 to reach the service area 11, and then the air conditioner 17
The flow path returns to the supply air chamber 5 through the. Next, the second
Similarly, after the clean air blown from the air supply chamber 5 in the equipment area A passes through the upper surface of the manufacturing equipment 12, the flow path is formed between the fixed beds 7a and 7b so as to wrap around the worker 14. The flow path passes through the opening 21 to reach the utility area 8 , then passes through the service area 11 and returns to the air supply chamber 5 via the air conditioner 17 . The third flow path is in the passage area C
The clean air blown out from the air supply chamber 5 of
The opening 2 is wrapped around the worker 14 from the head.
1 and return to the air supply chamber 5 together with the flow path.

Here, the areas where you want to maintain the cleanest environment are:
This is the upper surface of the manufacturing apparatus 12, that is, the apparatus area A including the loading and unloading parts of the wafer cassette. Therefore, by blowing clean air, it is necessary to directly eliminate the dust in the device area A and to prevent the dust from spreading from the worker 14 and the fixed bed 7b. Clean air flowing through the flow path seals the top surface of the manufacturing apparatus 12 so that the air is filled.

In particular, in this embodiment, the clean air flowing through the flow path has an airflow shape with a large velocity vector in the lateral direction from the device area A to the passage area C. Not only can the diffusion of dust from area C be prevented,
Since the fixed bed 7a on which the manufacturing equipment 12 is placed is located at a higher position than the fixed bed 7b in the passage area 7b, the upper surface of the manufacturing equipment 12 is higher than the fixed bed 7b, and the body of the worker 14 is raised. Most of the area is located below the top surface of the manufacturing device 12 (in this embodiment, the height from the fixed bed 7b to the top surface of the manufacturing device is approximately 140 cm). 14 and the fixed bed 7b from entering.

Therefore, in this embodiment, the manufacturing apparatus 1
2 can be kept super clean, and the clean air supplied into the work chamber 10 can be exhausted from the opening 21 provided between the fixed beds 7a and 7b, so the floor part can be kept extremely clean. The fixed beds 7a and 7b can be fixed beds 7a and 7b, and by separating the fixed beds 7a and 7b in the device area A and the passage area C, the fixed bed 7b can be prevented from vibrating as the worker 14 walks. Since vibrations are less likely to be transmitted to the manufacturing device 12 and have no adverse effects, the yield of LSIs and the like manufactured by the manufacturing device 12 can be increased. In addition, the fixed floor 7b has good walking performance and does not cause much fatigue to the worker 14, and does not give a sense of fear because the floor is not visible under the floor. Moreover, by lowering the floor of the passage area C, the ceiling plate 3 can be lowered, and as a result, the floor height of the building can be lowered, and construction costs can be reduced. Furthermore, in this embodiment, since the fixed bed 7a and the floor part 7 of the service area 11 are formed on the same plane, the manufacturing equipment 12 can be easily serviced when performing maintenance or replacement of the manufacturing equipment 12. It is possible to draw it out to area 11.

In addition, the fixed floors 7a and 7b are designed in consideration of the construction method.
PC board (precast concrete plate)
Alternatively, in consideration of the case where the worker 14 is short, a movable step stool may be provided on the fixed floor 7b. Further, in order to further completely prevent vibrations of the manufacturing apparatus 12, a vibration isolating device such as vibration isolating rubber may be attached to the legs of the manufacturing apparatus 12.

"Effects of the Invention" As explained above, in the clean room of the present invention, the floors of the equipment area and the passage area are formed of fixed beds, and the fixed bed of the passage area is arranged below the fixed bed of the equipment area. However, since there is an opening between the fixed floor in the passage area and the fixed floor in the equipment area, walking is easy, and workers are less fatigued and do not feel afraid. ,Also,
The floor vibrates as workers walk, the transmission of vibrations is reduced, and the manufacturing equipment is not adversely affected, and the height from the fixed floor in the aisle area to the top of the manufacturing equipment is reduced. Because the height is higher, it is possible to significantly reduce the diffusion of dust from the floor and workers to the upper part of the manufacturing equipment, and increase the yield of LSI. Furthermore, the floor height of the building can be lowered, and construction costs can be reduced.

[Brief explanation of drawings]

FIG. 1 shows an embodiment of the present invention,
FIG. 2 is a side sectional view of a clean room showing a conventional technique. 5...Air supply chamber (air supply section), 7a, 7
b... Fixed floor (floor part), 21... Opening, A...
Device area, C... passage area.

Claims (1)

[Claims] 1. By flowing clean air from the air supply section installed in the ceiling toward the floor section that has an exhaust opening, the air in the equipment area and passage area provided in the room is kept in a clean state. The floors of the equipment area and the passage area of the clean room to be maintained are formed with fixed beds, the fixed bed of the passage area is arranged below the fixed bed of the equipment area, and A clean room with an opening between the floor and the fixed floor in the equipment area.