JPH0610948B2 - Vacuum valve - Google Patents
Vacuum valveInfo
- Publication number
- JPH0610948B2 JPH0610948B2 JP26462384A JP26462384A JPH0610948B2 JP H0610948 B2 JPH0610948 B2 JP H0610948B2 JP 26462384 A JP26462384 A JP 26462384A JP 26462384 A JP26462384 A JP 26462384A JP H0610948 B2 JPH0610948 B2 JP H0610948B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating cylinder
- peripheral surface
- shield
- flange shield
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- High-Tension Arc-Extinguishing Switches Without Spraying Means (AREA)
Description
【発明の詳細な説明】 〔発明の技術分野〕 本発明は、真空バルブに係り、特に真空容器の改良に関
するものである。Description: TECHNICAL FIELD OF THE INVENTION The present invention relates to a vacuum valve, and more particularly to improvement of a vacuum container.
第６図は、絶縁円筒１aを軸方向に２個並設して真空容
器１を形成した従来の真空バルブの一例を示す。この真
空容器１は、軸方向に並設した絶縁円筒１aの外側両端
にそれぞれ端板２，３を設け内部を真空に形成してい
る。この真空容器１には固定電極４と可動電極５が配設
されている。固定電極４は、端板２を気密に貫通する通
電軸４aとこの端部に接触子４bを有する電極４cで構成
されており、可動電極５は、端板３をベローズ６を介し
て気密でかつ移動自在とした通電軸５aと、この端部に
接触子５bを有する電極５cで構成されている。また、端
板２，３にはそれぞれフランジシールド７，７、真空容
器１の中間にはアークシールド８が設けられている。FIG. 6 shows an example of a conventional vacuum valve in which two insulating cylinders 1a are arranged side by side in the axial direction to form the vacuum container 1. In this vacuum container 1, end plates 2 and 3 are provided at both outer ends of an insulating cylinder 1a arranged side by side in the axial direction to form a vacuum inside. A fixed electrode 4 and a movable electrode 5 are arranged in this vacuum container 1. The fixed electrode 4 is composed of a current-carrying shaft 4a that penetrates the end plate 2 in an airtight manner and an electrode 4c having a contactor 4b at this end, and the movable electrode 5 seals the end plate 3 through a bellows 6 in an airtight manner. Further, it is composed of a movable energizing shaft 5a and an electrode 5c having a contact 5b at its end. The end plates 2 and 3 are provided with flange shields 7 and 7, respectively, and an arc shield 8 is provided in the middle of the vacuum container 1.
このフランジシールド７とアークシールド８は電流遮断
時に固定電極４と可動電極５間で発生する金属蒸気が、
真空容器１の内面に付着するのを防止するために大きな
役割を果たしている。しかしながら、フランジシールド
７とアークシールド８に近接して絶縁円筒１aがあるた
めに破壊電圧が低下する。この理由を第７図に示す固定
電極４側について考察すると、アークシールド８に正の
電圧が印加されたときフランジシールド７が陰極となつ
て放出される電子e1絶縁円筒１aと封着金具９の接合部
の電界が高いためにこの部分から放出される電子e2は、
絶縁円筒１aに衝突して２次電子を放出する。このとき
の衝突エネルギーと２次電子放出効率δ(Ｅ)の関係は、
第８図に示すような特性曲線10となる。ここで、同図の
縦軸は２次電子放出効率δ(Ｅ)、横軸は電子の衝突エネ
ルギーＥ(eV)を示す。この特性曲線10に従つて絶縁円筒
１aには正の電荷が蓄積される。この絶縁円筒１aから放
出された電子は、２次電子なだれによつて電子増殖し、
ついには絶縁破壊に至る。したがつて、比較的低電圧で
電子なだれによる前駆破壊電流が流れるので、破壊電圧
が低くなつてしまう。The flange shield 7 and the arc shield 8 prevent the metal vapor generated between the fixed electrode 4 and the movable electrode 5 when the current is cut off.
It plays a great role to prevent the adhesion to the inner surface of the vacuum container 1. However, since the insulating cylinder 1a is located close to the flange shield 7 and the arc shield 8, the breakdown voltage is lowered. Considering the reason for this on the side of the fixed electrode 4 shown in FIG. 7, when the positive voltage is applied to the arc shield 8, the flange shield 7 serves as a cathode and is emitted as the electron e 1 insulating cylinder 1a and the sealing metal 9 The electron e 2 emitted from this junction due to the high electric field at the junction is
It collides with the insulating cylinder 1a and emits secondary electrons. At this time, the relationship between the collision energy and the secondary electron emission efficiency δ (E) is
The characteristic curve 10 is as shown in FIG. Here, the vertical axis of the figure shows the secondary electron emission efficiency δ (E), and the horizontal axis shows the electron collision energy E (eV). According to this characteristic curve 10, positive charges are accumulated in the insulating cylinder 1a. The electrons emitted from this insulating cylinder 1a multiply by a secondary electron avalanche,
Eventually it will cause dielectric breakdown. Therefore, since the precursor breakdown current due to the electron avalanche flows at a relatively low voltage, the breakdown voltage becomes low.
一方、近年真空バルブを用いる回路の高電圧化が著しく
進み、高電圧で安定して使用できる真空バルブの出現が
強く望まれてきた。On the other hand, in recent years, the voltage of circuits using vacuum valves has significantly increased, and the emergence of vacuum valves that can be stably used at high voltages has been strongly desired.
本発明は、上記した事情に鑑みてなされたもので、耐電
圧性を向上した真空バルブを提供することを目的とする
ものである。The present invention has been made in view of the above circumstances, and an object thereof is to provide a vacuum valve having improved withstand voltage.
本発明は、絶縁円筒の両端にそれぞれ封着金具を介して
端板を設けた真空容器の内部に、接離自在とした一対の
電極を配設するとともに端部にフランジシールドと中間
部に電極を包囲するアークシールドをそれぞれ設けた真
空バルブにおいて、絶縁円筒の端部に小径部とこれに連
らなる斜面部を形成し、封着金具の先端とフランジシー
ルドの先端との間の寸法をａ、封着金具の先端と斜面部
の端板側端部との間の寸法をｂ、フランジシールドの外
周面と小径部の内周面との隙間をｃ、フランジシールド
の外周面と絶縁円筒の内周面との間の寸法をｄとしたと
き、 ｂ＝0.1a〜0.6a ｃ＝0.1a〜0.4a ｄ＝0.5a〜1.4a とすることにより、フランジシールドから放出される電
子を絶縁円筒に衝突しにくい構成として２次電子なだれ
を抑制し、耐電圧性を向上するようにしたものである。According to the present invention, a pair of electrodes that are freely contactable and separable are disposed inside a vacuum container in which end plates are provided at both ends of an insulating cylinder via sealing metal fittings, and a flange shield is provided at an end and an electrode is provided at an intermediate part. In a vacuum valve having arc shields surrounding each of the above, a small diameter portion and a sloped portion connected to this are formed at the end of the insulating cylinder, and the dimension between the tip of the sealing metal fitting and the tip of the flange shield is a , The dimension between the tip of the sealing metal fitting and the end plate side end of the slope part is b, the gap between the outer peripheral surface of the flange shield and the inner peripheral surface of the small diameter part is c, the outer peripheral surface of the flange shield and the insulating cylinder are When the dimension between the inner surface and the inner surface is d, b = 0.1a to 0.6a c = 0.1a to 0.4a d = 0.5a to 1.4a, so that electrons emitted from the flange shield are insulated cylinders. The secondary electron avalanche is suppressed and the withstand voltage is improved as a structure that does not easily collide with It was done so.
〔発明の実施例〕 以下、本発明の真空バルブの一実施例を図面を参照して
説明する。なお、第６図と同一部分は同符号を付してそ
の説明を省略する。第１図において、真空容器20は、軸
方向に２個並設した絶縁円筒21の外側両端にそれぞれ封
着金具９を介して端耐２，３を設けて内部を真空にした
ものである。しかして、絶縁円筒21には、第２図に示す
ように封着金具９側に直径(Ｄ1)が軸方向中心側の直径
(Ｄ2)より小さい（すなわちＤ1＜Ｄ2）小径部21ａと、
この小径部21ａに連らなる斜面部21ｂが形成されてい
る。ここで、小径部21ａとフランジシールド７の位置関
係は、封着金具９の先端とフランジシールド７の先端と
の間の寸法をａ、封着金具９の先端の斜面部21ｂの端板
２側の端部との間の寸法をｂ、フランジシールド７の外
周面と小径部21ａの内周面との隙間をｃ、フランジシー
ルド７の外周面と絶縁円筒21（直径Ｄ2部）の内周面と
の間の寸法をｄとしたとき、 ｂ＝0.1a〜0.6a ｃ＝0.1a〜0.4a ｄ＝0.5a〜1.4a となるようにする。[Embodiment of the Invention] An embodiment of the vacuum valve of the present invention will be described below with reference to the drawings. The same parts as those in FIG. 6 are designated by the same reference numerals and the description thereof will be omitted. In FIG. 1, a vacuum container 20 is one in which two ends of the insulating cylinder 21 arranged in parallel in the axial direction are provided with end resistances 2 and 3 via sealing metal fittings 9, respectively, to make a vacuum inside. As shown in FIG. 2, the diameter (D 1 ) of the insulating cylinder 21 on the side of the sealing metal 9 is the diameter on the axial center side.
A small diameter portion 21a smaller than (D 2 ) (that is, D 1 <D 2 ),
A slope portion 21b is formed so as to be continuous with the small diameter portion 21a. Here, regarding the positional relationship between the small diameter portion 21a and the flange shield 7, the dimension between the tip of the sealing metal fitting 9 and the tip of the flange shield 7 is a, and the slope 21b of the tip of the sealing metal fitting 9 side of the end plate 2 side. The distance between the outer peripheral surface of the flange shield 7 and the inner peripheral surface of the small diameter portion 21a is c, the outer peripheral surface of the flange shield 7 and the inner peripheral surface of the insulating cylinder 21 (diameter D 2 portion). When the dimension between the surface and the surface is d, b = 0.1a to 0.6a c = 0.1a to 0.4a d = 0.5a to 1.4a.
以下にこの理由を説明する。第３図は、b/aと破壊電圧
の関係を示す曲線図であり、ｂがａに対して小さい程破
壊電圧は高くなる。つまり、小径部21ａの軸方向長さが
短かい程破壊電圧は高くなるが、絶縁円筒21の製作上か
ら0.1a以上とすることが望ましい。ここで、破壊電圧1.
0は、充分な絶縁性能を得るのに必要な破壊電圧を示
す。これから明らかなように、ｂを0.1a〜0.6aの範囲と
することにより充分な絶縁性能が得られる。なお、同図
は、ｃ＝0.4a、ｄ＝0.5aの場合を示す。次に、第４図
は、c/a、ｄおよび破壊電圧の関係を示す曲線図であ
り、ｃがａに対して小さくなると破壊電圧は低くなり、
また、ｃがａに対して大きくなつても破壊電圧は低くな
る。ここで、破壊電圧1.0は、充分な絶縁性能を得るの
に必要な破壊電圧を示す。つまり、フランジシールド７
と絶縁円筒21の内周面との隙間が小さくなると、第５図
に示すフランジシールド７から放出された電子e1による
絶縁円筒21の内周面の２次電子なだれが促進されるため
破壊電圧は低下する。また、フランジシールド７と絶縁
円筒21の内周面との隙間が大きくなると、絶縁円筒21と
封着金具９の接合部から放出された電子e2による２次電
子なだれが促進されるため破壊電圧は低下する。したが
つて、ｃを0.1a〜0.4aの範囲とすることにより充分な絶
縁性能が得られる。次に、ｄが大きくなると、絶縁円筒
21の斜面部21ｂの傾斜角度が大きくなつて破壊電圧は高
くなるが、絶縁円筒21の直径が大きくなつて経済的に不
利となり、ｄが小さくなると、絶縁円筒21の斜面部21ｂ
の傾斜角度が小さくなり、絶縁円筒21の傾斜面による２
次電子なだれの抑制効果が小さくなつて破壊電圧は低下
する。したがつて、ｄを0.5a〜1.4aの範囲とすることに
より充分な絶縁性能が得られる。The reason for this will be described below. FIG. 3 is a curve diagram showing the relationship between b / a and the breakdown voltage. The smaller the value of b with respect to a, the higher the breakdown voltage. That is, the shorter the axial length of the small-diameter portion 21a, the higher the breakdown voltage, but from the viewpoint of manufacturing the insulating cylinder 21, it is desirable that the breakdown voltage be 0.1a or more. Where the breakdown voltage is 1.
0 indicates the breakdown voltage required to obtain sufficient insulation performance. As is clear from this, when b is in the range of 0.1a to 0.6a, sufficient insulation performance can be obtained. The figure shows the case where c = 0.4a and d = 0.5a. Next, FIG. 4 is a curve diagram showing the relationship between c / a, d and the breakdown voltage. When c becomes smaller than a, the breakdown voltage becomes lower,
Further, even if c is larger than a, the breakdown voltage is low. Here, the breakdown voltage 1.0 indicates a breakdown voltage required to obtain sufficient insulation performance. That is, the flange shield 7
When the gap between the insulating cylinder 21 and the inner peripheral surface of the insulating cylinder 21 becomes smaller, the secondary electron avalanche on the inner peripheral surface of the insulating cylinder 21 due to the electrons e 1 emitted from the flange shield 7 shown in FIG. Will fall. When the gap between the flange shield 7 and the inner peripheral surface of the insulating cylinder 21 becomes large, secondary electron avalanche due to the electrons e 2 emitted from the joint between the insulating cylinder 21 and the sealing metal 9 is promoted, so that the breakdown voltage is increased. Will fall. Therefore, by setting c in the range of 0.1a to 0.4a, sufficient insulation performance can be obtained. Next, when d becomes large, the insulating cylinder
Although the breakdown voltage increases as the inclination angle of the sloped portion 21b of 21 increases, it becomes economically disadvantageous as the diameter of the insulating cylinder 21 increases, and when d decreases, the sloped portion 21b of the insulating cylinder 21 increases.
The angle of inclination of the insulating cylinder 21 becomes smaller,
As the effect of suppressing the secondary electron avalanche becomes smaller, the breakdown voltage decreases. Therefore, by setting d within the range of 0.5a to 1.4a, sufficient insulation performance can be obtained.
このように構成することにより、アークシールド８に正
の電圧が印加されると、陰極となるフランジシールド７
から放出された電子e1は、絶縁円筒21に衝突しにくい構
造となり、絶縁円筒21の内側表面の２次電子なだれが抑
制される。また、絶縁円筒21と封着金具９の接合部の電
界強度が大幅に低くなるので、この接合部から放出され
る電子e2は、数が抑制されさらに斜面部21ｂにより絶縁
円筒21に衝突しにくくなり、２次電子なだれが抑制され
る。With this configuration, when a positive voltage is applied to the arc shield 8, the flange shield 7 that serves as a cathode is formed.
The electron e 1 emitted from the structure has a structure that does not easily collide with the insulating cylinder 21, and secondary avalanche on the inner surface of the insulating cylinder 21 is suppressed. Further, since the electric field strength at the joint between the insulating cylinder 21 and the sealing metal member 9 is significantly reduced, the number of electrons e 2 emitted from this joint is suppressed, and the inclined surface 21b collides with the insulating cylinder 21. It becomes difficult and secondary avalanche is suppressed.
以上から明らかなように、フランジシールド７と絶縁円
筒21を上記した位置関係に配置することにより、絶縁円
筒21の内周面の２次電子なだれを抑制し、絶縁性能を向
上することができる。As is clear from the above, by arranging the flange shield 7 and the insulating cylinder 21 in the above-described positional relationship, secondary electron avalanche on the inner peripheral surface of the insulating cylinder 21 can be suppressed and the insulating performance can be improved.
本発明は、以上のように構成されているから、絶縁性能
が向上し、安価で高電圧化に対応できる真空バルブを得
ることができる。INDUSTRIAL APPLICABILITY Since the present invention is configured as described above, it is possible to obtain a vacuum valve that has improved insulation performance, is inexpensive, and can cope with higher voltage.
第１図は本発明の真空バルブの一実施例を示す縦断面
図、第２図は本発明の一実施例の要部を示す部分断面
図、第３図は本発明の一実施例に関連するフランジシー
ルドの配置と破壊電圧の関係を示す曲線図、第４図は第
３図と異なる本発明の一実施例に関連するフランジシー
ルドの配置と破壊電圧の関係を示す曲線図、第５図は本
発明の一実施例の電子の流れを示す説明図、第６図は従
来の真空バルブの構成を示す縦断面図、第７図は従来の
真空バルブの電子の流れを示す説明図、第８図は２次電
子放出特性を示す曲線図である。 ２，３……端板、４……固定電極 ５……可動電極、７……フランジシールド ８……アークシールド、９……封着金具 20……真空容器、21……絶縁円筒 21ａ……小径部、21ｂ……斜面部FIG. 1 is a vertical sectional view showing an embodiment of the vacuum valve of the present invention, FIG. 2 is a partial sectional view showing an essential part of the embodiment of the present invention, and FIG. 3 is related to the embodiment of the present invention. 5 is a curve diagram showing the relationship between the arrangement of the flange shield and the breakdown voltage, and FIG. 4 is a curve diagram showing the relationship between the arrangement of the flange shield and the breakdown voltage related to an embodiment of the present invention different from FIG. 3, FIG. Is an explanatory view showing an electron flow of one embodiment of the present invention, FIG. 6 is a longitudinal sectional view showing a structure of a conventional vacuum valve, FIG. 7 is an explanatory view showing an electron flow of a conventional vacuum valve, FIG. 8 is a curve diagram showing secondary electron emission characteristics. 2, 3 ... End plate, 4 ... Fixed electrode 5 ... Movable electrode, 7 ... Flange shield 8 ... Arc shield, 9 ... Sealing fitting 20 ... Vacuum container, 21 ... Insulating cylinder 21a. Small diameter part, 21b ... Slope part
Claims (1)
て端板を設けた真空容器の内部に、接離自在とした一対
の電極を配設するとともに、端部にフランジシールドと
中間部に前記電極を包囲するアークシールドをそれぞれ
設けた真空バルブにおいて、前記絶縁円筒の端部に小径
部とこれに連らなる斜面部を形成し、前記封着金具の先
端と前記フランジシールドの先端との間の寸法をａ、前
記封着金具の先端と前記斜面部の前記端板側の端部との
間の寸法をｂ、前記フランジシールドの外周面と前記小
径部の内周面との隙間をｃ、前記フランジシールドの外
周面と前記絶縁円筒の内周面との間の寸法をｄとしたと
き、 ｂ＝0.1a〜0.6a ｃ＝0.1a〜0.4a ｄ＝0.5a〜1.4a となるように構成したことを特徴とする真空バルブ。1. A pair of electrodes, which are freely contactable and separable, are provided inside a vacuum container having end plates provided on both ends of an insulating cylinder via sealing metal fittings, and a flange shield and an intermediate portion are provided at the ends. In a vacuum valve provided with an arc shield surrounding each of the electrodes, a small diameter portion and a slope portion connected to the small diameter portion are formed at the end of the insulating cylinder, and the tip of the sealing metal fitting and the tip of the flange shield are formed. Is a, the dimension between the tip of the sealing metal fitting and the end of the inclined surface portion on the end plate side is b, and the gap between the outer peripheral surface of the flange shield and the inner peripheral surface of the small diameter portion. C, and the dimension between the outer peripheral surface of the flange shield and the inner peripheral surface of the insulating cylinder is d, b = 0.1a to 0.6a c = 0.1a to 0.4a d = 0.5a to 1.4a A vacuum valve characterized by being configured as follows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26462384A JPH0610948B2 (en) | 1984-12-17 | 1984-12-17 | Vacuum valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26462384A JPH0610948B2 (en) | 1984-12-17 | 1984-12-17 | Vacuum valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61143915A JPS61143915A (en) | 1986-07-01 |
| JPH0610948B2 true JPH0610948B2 (en) | 1994-02-09 |
Family
ID=17405905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26462384A Expired - Lifetime JPH0610948B2 (en) | 1984-12-17 | 1984-12-17 | Vacuum valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610948B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE38511E1 (en) | 1994-07-01 | 2004-05-11 | Arkady Moiseevich Fridberg | Wheel having a hub and a rim rotatable on the hub |
-
1984
- 1984-12-17 JP JP26462384A patent/JPH0610948B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61143915A (en) | 1986-07-01 |
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