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JPH0614142B2 - Projection optics - Google Patents
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JPH0614142B2 - Projection optics - Google Patents

Projection optics

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Publication number
JPH0614142B2
JPH0614142B2 JP60296322A JP29632285A JPH0614142B2 JP H0614142 B2 JPH0614142 B2 JP H0614142B2 JP 60296322 A JP60296322 A JP 60296322A JP 29632285 A JP29632285 A JP 29632285A JP H0614142 B2 JPH0614142 B2 JP H0614142B2
Authority
JP
Japan
Prior art keywords
image
plane
real image
optical
erecting real
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60296322A
Other languages
Japanese (ja)
Other versions
JPS62153919A (en
Inventor
敬介 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60296322A priority Critical patent/JPH0614142B2/en
Priority to DE19863644354 priority patent/DE3644354A1/en
Priority to US06/946,967 priority patent/US4750022A/en
Publication of JPS62153919A publication Critical patent/JPS62153919A/en
Publication of JPH0614142B2 publication Critical patent/JPH0614142B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Exposure Or Original Feeding In Electrophotography (AREA)
  • Optical Systems Of Projection Type Copiers (AREA)
  • Facsimile Scanning Arrangements (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は電子写真複写機、ファクシミリ等の光学機器に
おいて原画である物体面を像面上に投影する際に好適な
投影光学系に関し、特に集光性光伝送体若しくはマイク
ロレンズ等から成るレンズ素子を複数個、列状に配置し
た所謂複眼系を用い物体面を像面上に縮少若しくは拡大
等各種の倍率で投影させる際に好適な投影光学系に関す
るものである。
Description: TECHNICAL FIELD The present invention relates to a projection optical system suitable for projecting an object plane, which is an original image, onto an image plane in an optical device such as an electrophotographic copying machine and a facsimile, and in particular, Suitable for projecting the object surface onto the image surface at various magnifications such as reduction or enlargement by using a so-called compound eye system in which a plurality of lens elements including a condensing light transmission body or a microlens are arranged in a row. The present invention relates to a projection optical system.

(従来の技術) 従来より電子写真複写機やファクシミリ等の光学機器に
おいては複眼系を利用して物体面を所定の倍率で像面上
に投影している。第2図は例えば特開昭55−8300
1号公報で提案されている正立等倍における複眼系の概
略図である。同図において20は複眼系であり集光性光
伝送体若しくはマイクロレンズ等から成る複数の正立実
像系21より成っている。そして個々の正立実像系21
により物体面1の所定範囲を像面2上に正立等倍像とし
て投影し、重ね合わせることにより一体像を形成してい
る。これにより単独の正立実像系ではカバー出来ない大
きな物体面を像面上に投影している。第2図に示す複眼
系は投影倍率が等倍である為各々の正立実像系21の光
軸が平行となるように構成され、かつ光軸上の各光線が
物体面1及び像面2と垂直に交わうように構成されてい
る。これにより各々の正立実像系21による像面上の投
影像、所謂多重像を像面上で互いに重ね合わせて一体像
を形成するのを可能としている。
(Prior Art) Conventionally, in an optical apparatus such as an electrophotographic copying machine or a facsimile, a compound eye system is used to project an object plane on an image plane at a predetermined magnification. FIG. 2 shows, for example, JP-A-55-8300.
FIG. 2 is a schematic diagram of a compound eye system in an erecting equal-magnification system proposed in Japanese Patent No. 1 publication. In the figure, reference numeral 20 denotes a compound eye system, which is composed of a plurality of erecting real image systems 21 composed of a light-condensing optical transmitter or microlenses. And each erect real image system 21
Thus, a predetermined range of the object plane 1 is projected on the image plane 2 as an erecting equal-magnification image, and the images are superposed to form an integral image. As a result, a large object surface that cannot be covered by a single erecting real image system is projected onto the image surface. The compound eye system shown in FIG. 2 is constructed such that the optical axes of the erect real image systems 21 are parallel to each other because the projection magnification is 1 ×, and each ray on the optical axis is an object plane 1 and an image plane 2. It is configured to intersect vertically with. This makes it possible to form an integral image by superimposing projected images on the image plane, so-called multiple images, by the respective erecting real image systems 21 on the image plane.

しかしながら第2図において投影光学系を縮少系若しく
は拡大系とする為に物体距離を変化させると各々の正立
実像系による多重像が像面上で重ならず、ずれてしまい
所謂『像ずれ』を起してくる。このときの像ずれ現象は
投影像の光学性能を著しく低下させる原因となってい
る。
However, in FIG. 2, when the object distance is changed in order to make the projection optical system a reduction system or an enlargement system, the multiple images by the respective erect real image systems do not overlap on the image plane and are displaced, so-called "image displacement". 』Will come up. The image shift phenomenon at this time is a cause of significantly deteriorating the optical performance of the projected image.

これに対し複眼系を用い縮少若しくは拡大投影したとき
の多重像の像ずれを補正する方法が例えば特開昭57−
16415号公報で提案されている。同公報では第3図
に示すように複眼系30を構成する複数の正立実像系3
1をその光軸が中央の正立実像系310の光軸311に
対して序々に傾くように配置し、これによって多重像の
ずれを補正している。しかしながらこの複眼系では正立
実像系毎にその光学性能や光軸長(物体面から像面まで
の光軸の光学的な長さ)が異っており、又この複眼系で
は物体面周辺の投影を行う正立実像系の光軸上の光線が
物体面と像面に交わう際、垂直から大きく外れてくる。
この為第4図に示すようにその傾きが大きくなっている
正立実像系41では、投影倍率が等しくなる物体面が正
規の物体面1より傾いて物体面42の如くになってく
る。
On the other hand, a method for correcting the image shift of multiple images when the image is reduced or enlarged and projected by using a compound eye system is disclosed in, for example, JP-A-57-57.
It is proposed in Japanese Patent No. 16415. In this publication, as shown in FIG. 3, a plurality of erecting real image systems 3 forming a compound eye system 30.
1 is arranged such that its optical axis gradually inclines with respect to the optical axis 311 of the erecting real image system 310 at the center, whereby the shift of the multiple images is corrected. However, in this compound eye system, the optical performance and the optical axis length (optical length of the optical axis from the object plane to the image plane) are different for each erect real image system. When the light rays on the optical axis of the erecting real image system for projection intersect the object plane and the image plane, they largely deviate from the vertical.
Therefore, as shown in FIG. 4, in the erecting real image system 41 having a large inclination, the object surface having the same projection magnification is inclined from the normal object surface 1 and becomes like the object surface 42.

一方、投影倍率の等しくなる像面も同様に正規の像面2
に対して傾いて像面43の如くになってくる。この結
果、物体面周辺では第4図に示す光路長l41とl42の長
さの差に相当する量だけ同一視野範囲内において部分的
に結像倍率が異ってくる所謂『倍率ずれ』が生じてく
る。
On the other hand, an image plane having the same projection magnification is also a normal image plane 2
It tilts with respect to the image plane 43. As a result, a so-called "magnification shift" occurs in which the imaging magnification is partially different in the same visual field range by an amount corresponding to the difference between the optical path lengths l41 and l42 shown in FIG. 4 around the object plane. Come on.

このように従来の複眼系を用いた投影光学系では多重像
のずれを補正しても倍率ずれが生じており、等倍以外の
投影では高い光学性能を有した投影像を得るのが難しく
なっている。
As described above, in the conventional projection optical system using the compound eye system, the magnification deviation occurs even if the deviation of the multiple images is corrected, and it is difficult to obtain a projection image having high optical performance in the projection other than the equal magnification. ing.

又、同公報では必要に応じて各正立実像系の入射端面若
しくは射出端面を偏芯させたり、屈折力を付加させたり
して、倍率ずれを軽減しようとしているが、これでは投
影光学系全体が複雑になってくる。そして原理的にも、
各正立実像系の光軸は物体面、像面に垂直になり得ない
ので、こういう補正には限度があり、こうした手段では
倍率ずれを大幅に除去することが困難である。
Further, in the same publication, the entrance end surface or the exit end surface of each erecting real image system is decentered or a refracting power is added as necessary to reduce the deviation in magnification, but this is the entire projection optical system. Becomes complicated. And in principle,
Since the optical axis of each erecting real image system cannot be perpendicular to the object plane and the image plane, there is a limit to such correction, and it is difficult to largely eliminate the magnification deviation by such means.

この他、複数の正立実像系より成る複眼系を用い縮少投
影若しくは拡大投影を行った際の多重像の像ずれを補正
したものが、例えば特開昭59−45420号公報、特
開昭59−216115号公報等で提案されている。
In addition, a compound eye system composed of a plurality of erecting real image systems is used to correct image shift of multiple images when performing reduced projection or enlarged projection, for example, Japanese Patent Laid-Open Nos. 59-45420 and Sho. It is proposed in Japanese Patent Publication No. 59-216115.

特開昭59−45420号公報では第5図に示すように
複数の正立実像系51より成る複眼系50の物体面1側
若しくは像面2側の少なくとも一方に各々の正立実像系
毎に偏向角の異なるフレネルレンズ等から成る光束偏向
部材52、53を配置することによって多重像の像ずれ
を補正した投影光学系を提案している。
In Japanese Patent Laid-Open No. 59-45420, as shown in FIG. 5, at least one of the compound eye system 50 composed of a plurality of erecting real image systems 51 on the object plane 1 side or the image plane 2 side is provided for each erecting real image system. A projection optical system is proposed in which image deviation of a multiple image is corrected by disposing light beam deflecting members 52 and 53, which are Fresnel lenses having different deflection angles.

又、特開昭59−216115号公報では第6図に示す
ように複数の正立実像系61より成る複眼系80の物体
面1側若しくは像面2側の少なくとも一方に複数の球面
レンズ62,63を配置して多重像の像ずれを補正した
投影光学系を提案している。
Further, in Japanese Laid-Open Patent Publication No. 59-216115, as shown in FIG. 6, a plurality of spherical lenses 62 are provided on at least one of the object plane 1 side and the image plane 2 side of a compound eye system 80 including a plurality of erecting real image systems 61. A projection optical system in which 63 is arranged to correct the image shift of multiple images is proposed.

しかしながら前記2つの公報で提案されている投影光学
系はいずれも各々の正立実像系の光軸長が異っており、
しかも物体面周辺を投影する正立実像系の光軸が物体面
と像面に対して大きく傾いている。この為、前述の如く
多重像の像ずれを補正することはできるが倍率ずれが生
じ、投影像の光学性能を大きく低下させる原因となって
いる。
However, in the projection optical systems proposed in the above two publications, the erecting real image systems have different optical axis lengths,
Moreover, the optical axis of the erecting real image system that projects the periphery of the object plane is largely tilted with respect to the object plane and the image plane. Therefore, although the image shift of the multiple image can be corrected as described above, the magnification shift occurs, which causes a great decrease in the optical performance of the projected image.

(発明が解決しようとする課題) 本発明は複数の正立実像系より成る複眼系を用いて物体
面を縮少若しくは拡大等の等倍以外の倍率を含んで投影
する際、多重像の像ずれを補正すると共に倍率ずれを同
時に減少あるいは除去させることにより投影像の光学性
能の向上を図った投影光学系の提供を目的とする。
(Problems to be Solved by the Invention) The present invention uses a compound eye system composed of a plurality of erect real image systems to project an object plane including a magnification other than equal magnification, such as reduction or enlargement, when forming an image of multiple images. An object of the present invention is to provide a projection optical system that improves the optical performance of a projected image by correcting the deviation and simultaneously reducing or eliminating the magnification deviation.

(課題を解決するための手段) 本発明の投影光学系は、複数の正立実像系を有する複眼
系により物体面を縮小又は拡大倍率で像面上に投影し重
ね合わせる際、物体面と該複眼系との間及び該複眼系と
像面との間の光路中に光束を偏向させる複数の光学部材
を有する偏向手段を配置し、該複数の正立実像系の光軸
上の各光線が物体面及び像面と垂直となるように構成
し、かつ、該複数の正立実像系を各々異なつた光学特性
のレンズ素子より構成し同一平面上に配置したことを特
徴としている。
(Means for Solving the Problem) The projection optical system of the present invention, when projecting and superimposing an object plane on an image plane at a reduction or enlargement magnification by a compound eye system having a plurality of erect real image systems, A deflecting means having a plurality of optical members for deflecting a light beam is arranged in an optical path between the compound eye system and between the compound eye system and an image plane, and each light ray on the optical axis of the plurality of erecting real image systems is arranged. It is characterized in that it is constructed so as to be perpendicular to the object plane and the image plane, and that the plurality of erect real image systems are made up of lens elements having different optical characteristics and are arranged on the same plane.

特に、前記複数の光学部材を各々前記複数の正立実像系
毎に対向させた複数の反射鏡より構成し、該複数の反射
鏡の角度を各々該正立実像系毎に変化させて配置したこ
とや、 前記光学部材を反射鏡により構成し、該1つの反射鏡に
より前記複数の正立実像系のうちの少なくとも2つを通
過する光束を偏向させるようにしたことを特徴としてい
る。
In particular, the plurality of optical members are composed of a plurality of reflecting mirrors facing each other for the plurality of erecting real image systems, and the angles of the plurality of reflecting mirrors are arranged so as to be changed for each erecting real image system. In addition, the optical member is configured by a reflecting mirror, and the one reflecting mirror deflects a light flux passing through at least two of the plurality of erecting real image systems.

この他、本発明の特徴は実施例において記載されてい
る。
Besides, the features of the present invention are described in the embodiments.

(実施例) 第1図は本発明の投影光学系を縮少系で構成したときの
一実施例の光学系の概略図である。同図において1は物
体面、2は像面、10は複眼系であり、複数の正立実像
系11,12,13,‥‥より成っている。
(Embodiment) FIG. 1 is a schematic view of an optical system of an embodiment when the projection optical system of the present invention is constituted by a reduction system. In the figure, 1 is an object plane, 2 is an image plane, 10 is a compound eye system, and is composed of a plurality of erect real image systems 11, 12, 13 ,.

点A2,B2,C2,‥‥と点A3,B3,C3,‥‥
は各々正立実像系を通過した光束を各々所定方向に偏向
させる為の光学部材を列状に配置している位置である。
特に本実施例では光学部材を反射鏡より構成し所定の傾
きを有して配置している。
Points A2, B2, C2, ... and points A3, B3, C3, ...
Is a position where optical members for deflecting the light fluxes that have passed through the erecting real image systems in predetermined directions are arranged in rows.
Particularly in this embodiment, the optical member is composed of a reflecting mirror and is arranged with a predetermined inclination.

尚、本実施例では反射鏡は簡単の為省略し、反射鏡で反
射したときの各正立実像系の光軸上の光線の光路のみを
示している。
In this embodiment, the reflecting mirror is omitted for simplification, and only the optical paths of the light rays on the optical axis of each erecting real image system when reflected by the reflecting mirror are shown.

本実施例では点A2,B2,C2,‥‥と点A3,B
3,C3,‥‥に沿って列状に配置した複数の光学部材
より各々1つの偏向手段を構成している。
In this embodiment, points A2, B2, C2, ... And points A3, B
Each of the plurality of optical members arranged in a line along C3, C3, ...

物体面1上における点A1,B1,C1,‥‥及び像面
2上における点A4,B4,C4,‥‥は正立実像系1
1,12,13,‥‥の光軸上の光線L1,L2,L
3,‥‥が各々交わう位置である。
The points A1, B1, C1, ... On the object plane 1 and the points A4, B4, C4 ,.
Rays L1, L2, L on the optical axes of 1, 12, 13, ...
It is the position where 3, ...

本実施例では複数の正立実像系を各々異った光学特性の
レンズ素子より構成し、それらを全て同一平面内に配置
するように設定している。これにより配置上の簡素化を
図っている。複数の正立実像系の光軸長は各々異なり、
中央部に位置する正立実像系の光軸長が一番短く、周辺
の正立実像系ほど長くなっている。
In this embodiment, a plurality of erecting real image systems are made up of lens elements having different optical characteristics, and they are all arranged in the same plane. This simplifies the layout. The optical axis lengths of multiple erecting real image systems are different,
The optical axis length of the erecting real image system located in the center is the shortest, and the erecting real image system in the periphery is longer.

尚、新たに反射鏡等を用いて光線を折り曲げる等すれば
複数の正立実像系を同一の光学特性を有したレンズ素子
より構成することができる。
It should be noted that a plurality of erecting real image systems can be composed of lens elements having the same optical characteristics by newly bending a light beam using a reflecting mirror or the like.

本実施例では物体面1の所定範囲を、例えば点C1近傍
の物体面を位置C2に所定の傾きをもって配置した反射
鏡を介し、正立実像系13により点C3に配置している
反射鏡で反射させた後、像面2上の点C4近傍に縮少投
影させている。このとき本実施例では点C1,C2,C
3,C4が同一平面上に位置するように構成している。
これによって正立実像系の光軸の軌跡が同一平面上に存
在するようにして各正立実像系の投影像が相対的に回転
して『回転ぶれ』を起さないようにしている。これらの
ことは他の正立実像系についても全く同様であり、各々
物体面1の所定範囲を像面上に縮少投影させている。
In the present embodiment, a predetermined range of the object plane 1 is, for example, a reflecting mirror arranged at a point C3 by the erecting real image system 13 via a reflecting mirror in which the object plane near the point C1 is arranged at a position C2 with a predetermined inclination. After the reflection, the image is reduced and projected in the vicinity of the point C4 on the image plane 2. At this time, in this embodiment, points C1, C2, C
3 and C4 are arranged on the same plane.
Thus, the loci of the optical axes of the erecting real image systems exist on the same plane, and the projected images of the erecting real image systems are relatively rotated so as not to cause "rotation blur". These are exactly the same for other erecting real image systems, and a predetermined range of the object plane 1 is reduced and projected onto the image plane.

尚、投影倍率をmとしたとき物体面1上の点A1と点B
1との間隔 と像面2上の点A4と点B4との間隔 との比がm倍となるようにしている。他の各点における
間隔についても同様である。
When the projection magnification is m, the points A1 and B on the object plane 1 are
Interval with 1 And the distance between points A4 and B4 on the image plane 2 The ratio with is set to m times. The same applies to the intervals at other points.

第1図に示す座標系において、例えば点B1,B2,B
3,B4の座標を表わすと B1=(x,l/2,h/2) B2=(x,l/2,−h1) B3=(mx,−l/2,h) B4=(mx,−l/2,−h/2) となる。
In the coordinate system shown in FIG. 1, for example, points B1, B2, B
3, when representing a B4 coordinate B1 = (x, l / 2 , h / 2) B2 = (x, l / 2, -h 1) B3 = (mx, -l / 2, h 2) B4 = ( mx, −l / 2, −h / 2).

このとき、点B2,B3のZ軸方向の座標点h,h
はLを1つの正立実像系の光軸長とすると となるように構成されている。尚、ここで光軸長Lは投
影倍率mの関数として表わされ、投影倍率mにより種々
変化する値である。
At this time, the coordinate points h 1 and h 2 of the points B2 and B3 in the Z-axis direction
Let L be the optical axis length of one erecting real image system Is configured to be. Here, the optical axis length L is expressed as a function of the projection magnification m, and is a value that varies depending on the projection magnification m.

本実施例では各々の正立実像系によって形成された像面
上の投影像、所謂多重像を物体面1及び像面2側に設け
た複数の反射鏡の形状、傾きを各々変えることにより互
いに重なり合わせて全体として一体像を形成し、像ずれ
を防止している。
In this embodiment, projected images on the image plane formed by respective erecting real image systems, so-called multiple images, are changed by changing the shapes and inclinations of the plurality of reflecting mirrors provided on the object plane 1 and image plane 2 sides. Overlapping forms an integral image as a whole to prevent image shift.

又、本実施例では各々の正立実像系の光軸上の光線L1
〜L5が物体面1及び像面2と垂直に交わうように各正
立実像系と各反射鏡の傾きを設定している。即ち各正立
実像系の光軸上の光線L1〜L5が反射鏡で反射した
後、互いに平行となり物体面1及び像面2に垂直に交わ
うように構成している。
Further, in this embodiment, the light ray L1 on the optical axis of each erecting real image system is
The inclinations of the erecting real image systems and the reflecting mirrors are set so that L5 intersects the object plane 1 and the image plane 2 at right angles. That is, the light rays L1 to L5 on the optical axis of each erecting real image system are reflected by a reflecting mirror and then become parallel to each other and intersect perpendicularly to the object plane 1 and the image plane 2.

これにより第4図で説明した正立実像系の光軸上の光線
が物体面若しくは像面と傾いて交ったときに生ずる『倍
率ずれ』の発生を防止している。
This prevents the occurrence of "magnification shift" that occurs when the light beam on the optical axis of the erecting real image system described in FIG. 4 intersects the object plane or the image plane at an angle.

第7図はこのとき第1図の上面図、第8図は第1図の物
体面1上の点C1と正立実像系13を含む側面図であ
る。
FIG. 7 is a top view of FIG. 1 at this time, and FIG. 8 is a side view including the point C1 on the object plane 1 and the erecting real image system 13 of FIG.

第7,第8図において各符番は第1図で示したもとの全
く同様である。
In FIGS. 7 and 8, the reference numerals are exactly the same as those shown in FIG.

第7図において物体面1上の各点A1,B1,C1,‥
‥を結ぶ直線D11と像面2上の各点A4,B4,C
4,‥‥を結ぶ直線D41は平行になっている。そして
複数の正立実像系11,12,13,‥‥の光軸を各々
延長させたときに空間内において一点Oで立体交差若し
くは単に交差する各要素が設定されている。
In FIG. 7, points A1, B1, C1, ... On the object plane 1
A straight line D11 connecting the points and points A4, B4, C on the image plane 2
A straight line D41 connecting 4, ... Is parallel. .. are set so that the optical axes of the erecting real image systems 11, 12, 13, ...

尚、このときの投影光学系の投影倍率mを第7図に示す
各要素間の距離D71,D72を用いて表わすと、 m=D72/D71 となっている。
When the projection magnification m of the projection optical system at this time is expressed using the distances D71 and D72 between the respective elements shown in FIG. 7, m = D72 / D71.

各々の反射鏡の位置A2,B2,C2,‥‥と位置A
3,B3,C3,‥‥は(1)式を満たす範囲で任意に設
定することが出来るが、一度一方の反射面の各位置を決
定すれば、あとは正立実像系の特性により順次決めるこ
とができる。
Positions A2, B2, C2, ... And positions A of each reflecting mirror
3, B3, C3, ... Can be arbitrarily set within the range satisfying the expression (1), but once each position of one reflecting surface is determined, the rest is sequentially determined by the characteristics of the erecting real image system. be able to.

本実施例では光学部材として反射鏡を用いた場合を示し
たが、例えば第9図に示すようにプリズム材90,91
を用いて正立実像系13の光軸上の光線L3が物体面1
と像面2に各々垂直に交わうように構成しても、同様に
像ずれや倍率ずれの発生を防止することができる。
In this embodiment, the case where the reflecting mirror is used as the optical member is shown. For example, as shown in FIG. 9, the prism members 90 and 91 are used.
, The ray L3 on the optical axis of the erecting real image system 13 is converted into the object plane 1
Similarly, even if the image plane 2 and the image plane 2 intersect each other, the image shift and the magnification shift can be prevented.

以上の実施例において各正立実像系に対する反射面が別
個になっている最初の反射鏡から正立実像系を通り、反
射面が別個になっている最後の反射鏡までは各正立実像
系のクロストークを防ぐ為に遮光部材を配置するのが良
い。
In the above embodiment, each erecting real image system extends from the first reflecting mirror having a separate reflecting surface for each erecting real image system to the last reflecting mirror passing through the erecting real image system and having a separate reflecting surface. It is preferable to dispose a light-shielding member in order to prevent such crosstalk.

又、以上の実施例では投影光学系を縮少系に適用した場
合について説明したが、拡大系に適用する場合には縮少
系全体を逆にした構成とすれば全く同様に本発明を適用
することができる。
Further, in the above embodiments, the case where the projection optical system is applied to the reduction system has been described. However, when the projection optical system is applied to the enlargement system, the present invention is applied in the same manner if the entire reduction system is reversed. can do.

尚、本実施例において物体面と偏向手段との間若しくは
像面と偏向手段との間の少なくとも一方に、単に光束を
偏向させる為の共通反射面を設けて投影光学系全体の構
成上の配置を任意に設定しても良い。
In the present embodiment, a common reflecting surface for simply deflecting a light beam is provided on at least one of the object plane and the deflecting means or the image plane and the deflecting means, and the overall arrangement of the projection optical system is arranged. May be set arbitrarily.

こうした設定は物体面と像面の相対関係を所定の位置関
係にもってくる場合や像の表裏関係の補正に有効であ
る。
Such setting is effective when the relative relationship between the object plane and the image plane is brought to a predetermined positional relationship and when the front-back relationship of the image is corrected.

本実施例において多少の像ずれや倍率ずれが許容されれ
ば1つの反射鏡で複数の正立実像系からの光束を偏向さ
せるように構成しても良い。
In the present embodiment, one reflecting mirror may be used to deflect the light beams from a plurality of erecting real image systems if a slight image shift or magnification shift is allowed.

本実施例では複眼系を5つの正立実像系より成る場合に
ついて示したが、正立実像系を2つ以上設ければ本発明
の目的を達成することができる。
In the present embodiment, the case where the compound eye system is composed of five erecting real image systems is shown, but the object of the present invention can be achieved by providing two or more erecting real image systems.

本実施例では2つの偏向手段を用い、1つの偏向手段と
して1枚の反射鏡を用いた場合を示したが前述の如く
『回転ぶれ』、『像ずれ』、『倍率ずれ』等を補正する
構成と物体面、像面部分で各々独立に等価構成によれば
複数舞の反射鏡又は屈折部材を用いて構成しても良い。
例えば第10図(A)に示すように物体面1からの光線を
一平面内に限らず一度他の平面内に導光し、再び元の平
面内に戻すように構成しても良い。又、第10図(B)の
ように偏向手段を構成する反射鏡の数を増加させて、物
体面1の一方向の線分101が各々の正立実像系により
像面2上に投影させる際、各物体面の線分101の像が
像面2上で一方の線分102にして、所謂回転ずれがな
いようにすれば物体面と像面の相対的位置関係に応じた
任意の構成をとることができる。
In the present embodiment, two deflecting means are used and one reflecting mirror is used as one deflecting means. However, as described above, "rotational shake", "image shift", "magnification shift", etc. are corrected. Independently of the configuration, the object plane, and the image plane portion, a plurality of reflecting mirrors or refracting members may be used according to the equivalent configuration.
For example, as shown in FIG. 10 (A), the light rays from the object plane 1 may be guided not only in one plane but in another plane and then returned to the original plane. Further, as shown in FIG. 10 (B), the number of reflecting mirrors constituting the deflecting means is increased so that the line segment 101 in one direction of the object plane 1 is projected onto the image plane 2 by each erecting real image system. At this time, if the image of the line segment 101 of each object plane becomes one line segment 102 on the image plane 2 so that there is no so-called rotational deviation, an arbitrary configuration according to the relative positional relationship between the object plane and the image plane is obtained. Can be taken.

これによれば配置上の自由度を増し、物体面と像面の相
対位置関係に応じた任意の構成をとることができるので
好ましい。
This is preferable because the degree of freedom in arrangement can be increased and an arbitrary configuration can be adopted according to the relative positional relationship between the object plane and the image plane.

(発明の効果) 本発明によれば複数の正立実像系より成る複眼系を用い
て物体面を縮少投影若しくは拡大投影する際、光束を偏
向させる複数の光学部材より成る偏向手段を用いること
により像面上における多重像の像ずれ及び倍率ずれの双
方を良好に補正した投影光学系を達成することができ
る。
(Effects of the Invention) According to the present invention, when a compound eye system including a plurality of erect real image systems is used to perform reduced projection or enlarged projection of an object surface, a deflecting unit including a plurality of optical members for deflecting a light beam is used. As a result, it is possible to achieve a projection optical system in which both the image shift and the magnification shift of multiple images on the image plane are well corrected.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例の光学系の概略図、第7図は
第1図の上面図、第8図は第1図の一部側面図、第9
図,第10図(A),(B)は各々本発明の他の実施例の一部
側面図、第2,第3,第5,第6図は各々従来の投影光
学系の一部分の説明図、第4図は第3図の一部分の投影
像の説明図である。 図中1は物体面、2は像面、10,20,30,50,
60は各々複眼系、11,12,13,14,15,2
1,31,51,61は各々正立実像系、A2,B2,
C2,D2,E2,A3,B3,C3,D3,E3,は
各々光学部材の配置されている位置、L1〜L5は各々
正立実像系の光軸上の光線である。
FIG. 1 is a schematic view of an optical system of an embodiment of the present invention, FIG. 7 is a top view of FIG. 1, FIG. 8 is a partial side view of FIG.
FIGS. 10 (A) and 10 (B) are partial side views of another embodiment of the present invention, and FIGS. 2, 3, 5 and 6 are explanations of a part of a conventional projection optical system. FIG. 4 and FIG. 4 are explanatory views of a projected image of a part of FIG. In the figure, 1 is the object plane, 2 is the image plane, 10, 20, 30, 50,
60 is a compound eye system, 11, 12, 13, 14, 15, 2
1, 31, 51, 61 are erecting real image systems, A2, B2,
C2, D2, E2, A3, B3, C3, D3, E3 are positions where optical members are arranged, and L1 to L5 are light rays on the optical axis of the erecting real image system.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】複数の正立実像系を有する複眼系により物
体面を縮小又は拡大倍率で像面上に投影し重ね合わせる
際、物体面と該複眼系との間及び該複眼系と像面との間
の光路中に光束を偏向させる複数の光学部材を有する偏
向手段を配置し、該複数の正立実像系の光軸上の各光線
が物体面及び像面と垂直となるように構成し、かつ、該
複数の正立実像系を各々異なった光学特性のレンズ素子
より構成し同一平面上に配置したことを特徴とする投影
光学系。
1. When projecting and superimposing an object plane on an image plane with a compound eye system having a plurality of erecting real image systems at a reduced or magnified magnification, between the object plane and the compound eye system and between the compound eye system and the image plane. A deflecting means having a plurality of optical members for deflecting a light beam is arranged in an optical path between the optical path and the optical path of the plurality of erecting real image systems so that each light ray is perpendicular to the object plane and the image plane. In addition, the projection optical system is characterized in that the plurality of erecting real image systems are composed of lens elements having different optical characteristics and are arranged on the same plane.
【請求項2】前記複数の光学部材を各々前記複数の正立
実像系毎に対向させた複数の反射鏡より構成し、該複数
の反射鏡の角度を各々該正立実像系毎に変化させて配置
したことを特徴とする特許請求の範囲第1項記載の投影
光学系。
2. The plurality of optical members are composed of a plurality of reflecting mirrors facing each other for each of the plurality of erecting real image systems, and the angles of the plurality of reflecting mirrors are changed for each of the erecting real image systems. The projection optical system according to claim 1, wherein the projection optical system is arranged as follows.
【請求項3】前記光学部材を反射鏡より構成し、該1つ
の反射鏡により前記複数の正立実像系のうちの少なくと
も2つを通過する光束を偏向させるようにしたことを特
徴とする特許請求の範囲第1項記載の投影光学系。
3. The optical member comprises a reflecting mirror, and the one reflecting mirror deflects a light beam passing through at least two of the plurality of erecting real image systems. The projection optical system according to claim 1.
JP60296322A 1985-12-27 1985-12-27 Projection optics Expired - Lifetime JPH0614142B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP60296322A JPH0614142B2 (en) 1985-12-27 1985-12-27 Projection optics
DE19863644354 DE3644354A1 (en) 1985-12-27 1986-12-24 OPTICAL PROJECTION SYSTEM
US06/946,967 US4750022A (en) 1985-12-27 1986-12-29 Optical projection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60296322A JPH0614142B2 (en) 1985-12-27 1985-12-27 Projection optics

Publications (2)

Publication Number Publication Date
JPS62153919A JPS62153919A (en) 1987-07-08
JPH0614142B2 true JPH0614142B2 (en) 1994-02-23

Family

ID=17832042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60296322A Expired - Lifetime JPH0614142B2 (en) 1985-12-27 1985-12-27 Projection optics

Country Status (1)

Country Link
JP (1) JPH0614142B2 (en)

Also Published As

Publication number Publication date
JPS62153919A (en) 1987-07-08

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