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JPH0795157B2 - Projection optics - Google Patents
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JPH0795157B2 - Projection optics - Google Patents

Projection optics

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Publication number
JPH0795157B2
JPH0795157B2 JP26551193A JP26551193A JPH0795157B2 JP H0795157 B2 JPH0795157 B2 JP H0795157B2 JP 26551193 A JP26551193 A JP 26551193A JP 26551193 A JP26551193 A JP 26551193A JP H0795157 B2 JPH0795157 B2 JP H0795157B2
Authority
JP
Japan
Prior art keywords
image
real image
plane
optical
inverted real
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26551193A
Other languages
Japanese (ja)
Other versions
JPH075390A (en
Inventor
敬介 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP26551193A priority Critical patent/JPH0795157B2/en
Publication of JPH075390A publication Critical patent/JPH075390A/en
Publication of JPH0795157B2 publication Critical patent/JPH0795157B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Optical Systems Of Projection Type Copiers (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は電子写真複写機、ファク
シミリ等の光学機器において原画である物体面を像面上
に投影する際に好適な投影光学系に関し、特に集光性光
伝送体若しくはマイクロレンズ等から成るレンズ素子を
複数個、列状に配置した所謂複眼系を用い物体面を像面
上に縮少若しくは拡大等各種の倍率で投影させる際に好
適な投影光学系に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a projection optical system suitable for projecting an object plane which is an original image onto an image plane in an optical device such as an electrophotographic copying machine or a facsimile machine, and more particularly to a light-converging optical transmission body or The present invention relates to a projection optical system suitable for projecting an object surface onto an image surface at various magnifications such as reduction or enlargement, using a so-called compound eye system in which a plurality of lens elements including microlenses are arranged in a row. .

【0002】[0002]

【従来の技術】従来より電子写真複写機やファクシミリ
等の光学機器においては複眼系を利用して物体面を所定
の倍率で像面上に投影している。投影方法としては物体
面を正立実像として像面上に投影する正立実像系による
方法と倒立実像として像面上に投影する倒立実像系によ
る方法の2つの方法が用いられている。このうち倒立実
像系は正立実像系の2回結像に比べて1回結像で良い
為、光学全長を短くすることが出来、光学系全体が簡素
化され装置全体が小型化しやすい等の特長を有してい
る。
2. Description of the Related Art Conventionally, in an optical device such as an electrophotographic copying machine or a facsimile, a compound eye system is used to project an object surface onto an image surface at a predetermined magnification. As the projection method, there are used two methods: a method by an erecting real image system that projects an object surface as an erecting real image on the image surface and a method by an inverted real image system that projects an object surface as an inverted real image on the image surface. Of these, the inverted real image system requires only one image formation as compared with the two times image formation of the erect real image system, so that the total optical length can be shortened, the entire optical system can be simplified, and the entire apparatus can be easily downsized. It has features.

【0003】この為、倒立実像系は多くの電子写真複写
機に用いられている。しかしながら倒立実像系では物体
像が像面上で180度回転する為、複眼系を用いる場
合、各々の倒立実像系による物体像を反射鏡等を用いて
各々像面上で所定の関係を維持しつつ重ね合わす必要が
ある。
Therefore, the inverted real image system is used in many electrophotographic copying machines. However, in the inverted real image system, the object image rotates 180 degrees on the image plane. Therefore, when using the compound eye system, the object image by each inverted real image system is maintained on the image plane by using a reflecting mirror or the like. It is necessary to overlap while doing.

【0004】又、前述の180度の回転ずれを適当な手
段で補正したとしても変倍の場合には複眼系の結像性能
を決定するものとして変倍特有で生じる像の『像ずれ』
と『倍率ずれ』がある。これらの生じる原因は原理的に
は同じである為、以下の説明では従来の正立実像系を例
にとり説明する。
Further, even if the aforementioned 180 ° rotational shift is corrected by an appropriate means, in the case of zooming, the "image shift" of the image that is peculiar to zooming is determined as determining the imaging performance of the compound eye system.
There is a "magnification shift". Since the causes of these problems are the same in principle, the conventional erecting real image system will be described below as an example.

【0005】正立実像系において投影倍率が等倍の所謂
正立等倍系が例えば実公昭48−18204号公報等で
提案されている。同公報では図2に示すように微少レン
ズより成る複数の正立実像系21より複眼系20を構成
し、物体面1の所定範囲の部分像を像面2上に投影し、
重ね合わせて一体像を形成している。これにより1つの
正立実像系ではカバー出来ない大きな物体面を像面上に
投影している。
In the erecting real image system, a so-called erecting equal-magnification system in which the projection magnification is the same is proposed in, for example, Japanese Utility Model Publication No. 48-18204. In the publication, as shown in FIG. 2, a compound eye system 20 is composed of a plurality of erecting real image systems 21 composed of microlenses, and a partial image in a predetermined range of the object plane 1 is projected onto the image plane 2.
They are superimposed and form an integral image. As a result, a large object plane that cannot be covered by one erecting real image system is projected onto the image plane.

【0006】図2に示す複眼系は投影倍率が等倍である
為各々の正立実像系21の光軸が平行となるように構成
され、かつ光軸上の各光線が物体面1及び像面2と垂直
に交わうように構成されている。これにより各々の正立
実像系21による像面上の投影像、所謂多重像を像面上
で互いに重ね合わせて一体像を形成するのを可能として
いる。
The compound eye system shown in FIG. 2 is constructed so that the optical axes of the erecting real image systems 21 are parallel to each other because the projection magnification is equal, and each ray on the optical axis is the object plane 1 and the image. It is configured to intersect the plane 2 at right angles. This makes it possible to form an integral image by superimposing projected images on the image plane, so-called multiple images, by the respective erecting real image systems 21 on the image plane.

【0007】一般に複眼系を有する投影光学系を微少系
若しくは拡大系とする為に等倍系の状態より物体距離を
変化させると各正立実像系の倍率は変化するのに対し、
各正立実像系の光軸間隔は等倍のままなので、各々の正
立実像系による多重像が像面上で重ならず、ずれてしま
い、所謂像ずれを起してくる。このときの像ずれ現象は
投影像の光学性能を著しく低下させる原因となってい
る。複数の正立実像系から成る複眼系を用い縮少投影若
しくは拡大投影したときの多重像の像ずれを補正する方
法が例えば特開昭57−16415号公報で提案されて
いる。同公報では図3に示すように複眼系30を構成す
る複数の正立実像系31をその光軸が中央の正立実像系
310の光軸311に対して序々に傾くように配置し、
これによって多重像のずれを補正している。しかしなが
らこの複眼系では正立実像系毎にその光学性能や光軸長
(物体面から像面までの光軸の光学的な長さ)が異って
おり、又この複眼系では物体面周辺の投影を行う正立実
像系の光軸上の光線が物体面と像面に交わう際、垂直か
ら大きく外れてくる。この為図4に示すようにその傾き
が大きくなっている正立実像系41では、投影倍率が等
しくなる物体面が正規の物体面1より傾いて物体面42
の如くになってくる。
Generally, in order to make a projection optical system having a compound eye system a minute system or a magnifying system, if the object distance is changed from the state of a unity magnification system, the magnification of each erecting real image system changes, whereas
Since the optical axis interval of each erecting real image system remains the same size, the multiple images by the erecting real image systems do not overlap on the image plane and are displaced, causing so-called image displacement. The image shift phenomenon at this time is a cause of significantly deteriorating the optical performance of the projected image. For example, Japanese Patent Application Laid-Open No. 57-16415 proposes a method of correcting an image shift of a multiple image when reduced projection or enlarged projection is performed by using a compound eye system including a plurality of erect real image systems. In this publication, as shown in FIG. 3, a plurality of erecting real image systems 31 forming a compound eye system 30 are arranged such that their optical axes gradually incline with respect to the optical axis 311 of the erecting real image system 310 at the center.
This corrects the deviation of the multiple images. However, in this compound eye system, the optical performance and the optical axis length (optical length of the optical axis from the object plane to the image plane) are different for each erect real image system. When the light rays on the optical axis of the erecting real image system for projection intersect the object plane and the image plane, they largely deviate from the vertical. Therefore, in the erecting real image system 41 whose inclination is large as shown in FIG. 4, the object plane having the same projection magnification is inclined from the normal object plane 1 and the object plane 42 is inclined.
It becomes like.

【0008】一方、投影倍率の等しくなる像面も同様に
正規の像面2に対して傾いて像面43の如くになってく
る。この結果、物体面周辺では図4に示す光路長LL41
とLL42の長さの差に相当する量だけ同一視野範囲内に
おいて部分的に結像倍率が異ってくる所謂『倍率ずれ』
が生じてくる。
On the other hand, the image plane having the same projection magnification is also inclined like the image plane 43 with respect to the regular image plane 2. As a result, the optical path length LL41 shown in FIG.
And LL42, the so-called "magnification deviation" in which the imaging magnification partially differs within the same field of view by an amount corresponding to the difference in length.
Will occur.

【0009】このように従来の複眼系を用いた投影光学
系では多重像のずれを補正しても倍率ずれが生じてお
り、等倍以外の投影では高い光学性能を有した投影像を
得るのが難しくなっている。
As described above, in the conventional projection optical system using the compound eye system, the magnification shift occurs even if the shift of the multiple images is corrected, and a projection image having high optical performance can be obtained in the projection other than equal magnification. Is getting harder.

【0010】又、同公報では必要に応じて各正立実像系
の入射端面若しくは射出端面を偏芯させたり、屈折力を
付加させたりして、倍率ずれを軽減しようとしている
が、これでは投影光学系全体が複雑になってくる。そし
て原理的にも、各正立実像系の光軸は物体面、像面に垂
直になり得ないので、こういう補正には限度があり、こ
うした手段では倍率ずれを大幅に除去することが困難で
ある。
Further, in the publication, if necessary, the entrance end surface or the exit end surface of each erecting real image system is decentered or a refracting power is added to reduce the deviation in magnification. The whole optical system becomes complicated. In principle, the optical axis of each erecting real image system cannot be perpendicular to the object plane and the image plane.Therefore, there is a limit to this kind of correction, and it is difficult to remove the magnification deviation by such means. is there.

【0011】この他、複数の正立実像系より成る複眼系
を用い縮少投影若しくは拡大投影を行った際の多重像の
像ずれを補正したものが、例えば特開昭59−4542
0号公報、特開昭59−216115号公報等で提案さ
れている。
In addition to the above, for example, a compound eye system composed of a plurality of erecting real image systems, which corrects image shift of multiple images when performing reduced projection or enlarged projection, is disclosed in, for example, Japanese Patent Laid-Open No. 59-4542.
No. 0, JP 59-216115 A and the like are proposed.

【0012】特開昭59−45420号公報では図5に
示すように複数の正立実像系51より成る複眼系50の
物体面1側若しくは像面2側の少なくとも一方に各々の
正立実像系毎に偏向角の異なるフレネルレンズ等から成
る光束偏向部材52、53を配置することによって多重
像の像ずれを補正した投影光学系を提案している。
In Japanese Patent Laid-Open No. 59-45420, as shown in FIG. 5, an erecting real image system is provided on at least one of the object plane 1 side and the image plane 2 side of a compound eye system 50 composed of a plurality of erecting real image systems 51. A projection optical system is proposed in which image deviation of a multiple image is corrected by arranging light beam deflecting members 52 and 53 each having a Fresnel lens having a different deflection angle.

【0013】又、特開昭59−216115号公報では
図6に示すように複数の正立実像系61より成る複眼系
60の物体面1側若しくは像面2側の少なくとも一方に
複数の球面レンズ62,63を配置して多重像の像ずれ
を補正した投影光学系を提案している。
Further, in Japanese Patent Laid-Open No. 59-216115, as shown in FIG. 6, a plurality of spherical lenses are provided on at least one of the object plane 1 side and the image plane 2 side of a compound eye system 60 composed of a plurality of erecting real image systems 61. A projection optical system is proposed in which 62 and 63 are arranged to correct the image shift of multiple images.

【0014】しかしながら前記2つの公報で提案されて
いる投影光学系はいずれも各々の正立実像系の光軸長が
異っており、しかも物体面周辺を投影する正立実像系の
光軸が物体面と像面に対して大きく傾いている。この
為、前述の如く多重像の像ずれを補正することはできる
が倍率ずれが生じ、投影像の光学性能を大きく低下させ
る原因となっている。
However, in the projection optical systems proposed in the above two publications, the optical axes of the erecting real image systems are different, and the optical axes of the erecting real image systems projecting the periphery of the object plane are different. It is greatly inclined with respect to the object plane and the image plane. Therefore, although the image shift of the multiple image can be corrected as described above, the magnification shift occurs, which causes a great decrease in the optical performance of the projected image.

【0015】以上の倍率ずれは複眼系を倒立実像系で構
成した場合も正立実像系の場合と同じ原因により同様に
生じてくる。
The above-mentioned magnification deviation similarly occurs when the compound eye system is constructed by an inverted real image system due to the same cause as in the case of the erect real image system.

【0016】[0016]

【発明が解決しようとする課題】本発明は複数の倒立実
像系より成る複眼系を用いて物体面を縮少若しくは拡大
等の等倍以外の倍率を含んで投影する際、多重像の像ず
れを補正すると共に倍率ずれを同時に減少あるいは除去
させることにより投影像の光学性能の向上を図った投影
光学系の提供を目的とする。
SUMMARY OF THE INVENTION The present invention is directed to a compound eye system including a plurality of inverted real image systems, and when projecting an object plane including a magnification other than the same magnification such as reduction or enlargement, an image shift of multiple images occurs. It is an object of the present invention to provide a projection optical system in which the optical performance of a projected image is improved by simultaneously correcting and correcting or eliminating the magnification shift.

【0017】本発明の更なる目的は各々の倒立実像系に
よる像面上での光量分布の重ね合わせより生じる光量ム
ラを軽減させ、全体的に良好なる投影像の得られる投影
光学系の提供にある。
A further object of the present invention is to provide a projection optical system capable of reducing unevenness in light quantity caused by superimposing light quantity distributions on the image plane by respective inverted real image systems and obtaining a good projection image as a whole. is there.

【0018】[0018]

【課題を解決するための手段】本発明の投影光学系は、
複数の倒立実像系を有する複眼系により物体面を縮小又
は拡大倍率で像面上に投影し重ね合わせる際、光路中に
光束を偏向させる複数の光学部材を有する偏向手段を配
置し、該複数の倒立実像系をその光軸上の各光線が互い
に空間内で交差するように構成し、該複数の倒立実像系
の光軸上の各光線が物体面若しくは像面の少なくとも一
方の面と垂直となるように構成し、かつ、該複数の倒立
実像系を各々同一のレンズ素子より構成し、各々異なっ
た平面上に配置して各々の光路長が同じになるようにし
たことを特徴としている。
The projection optical system of the present invention comprises:
When a compound eye system having a plurality of inverted real image systems is used to project and superimpose the object plane on the image plane at a reduced or magnified magnification, a deflection unit having a plurality of optical members for deflecting the light flux is disposed in the optical path, The inverted real image system is configured such that each light ray on its optical axis intersects with each other in space, and each light ray on the optical axis of the plurality of inverted real image systems is perpendicular to at least one of the object plane or the image plane. It is characterized in that the plurality of inverted real image systems are constituted by the same lens element and are arranged on different planes so that the respective optical path lengths are the same.

【0019】特に、前記複数の光学部材を各々前記複数
の倒立実像系毎に対向させた複数の反射鏡より構成し、
該複数の反射鏡の角度を各々該倒立実像系毎に変化させ
て配置したことや、前記偏向手段を物体面と前記複眼系
との間若しくは像面と該複眼系との間の少なくとも一方
に設けたこと、そして前記光学部材を反射鏡より構成
し、該1つの反射鏡により前記複数の倒立実像系のうち
の少なくとも2つを通過する光束を偏向させるようにし
たこと等を特徴としている。
In particular, each of the plurality of optical members comprises a plurality of reflecting mirrors facing each other for each of the plurality of inverted real image systems,
The angle of the plurality of reflecting mirrors is changed for each inverted real image system, and the deflecting means is provided at least on one side between the object plane and the compound eye system or between the image plane and the compound eye system. It is characterized in that the optical member is provided, and that the optical member is composed of a reflecting mirror, and the one reflecting mirror deflects a light flux passing through at least two of the plurality of inverted real image systems.

【0020】この他、本発明の特徴は実施例において記
載されている。
Besides, the features of the present invention are described in the embodiments.

【0021】[0021]

【実施例】図1は本発明の投影光学系を縮少系で構成し
たときの一実施例の光学系の概略図である。同図におい
て1は物体面、2は像面、10は複眼系であり、複数の
倒立実像系11,12,13より成っている。
FIG. 1 is a schematic view of an optical system of one embodiment when the projection optical system of the present invention is composed of a reduction system. In the figure, 1 is an object plane, 2 is an image plane, 10 is a compound eye system, and is composed of a plurality of inverted real image systems 11, 12, and 13.

【0022】点A2,B2,C2と点A3,B3,C3
は各々倒立実像系を通過した光束を各々所定方向に偏向
させる為の光学部材を列状に配置している位置である。
特に本実施例では光学部材を反射鏡より構成し所定の傾
きを有して配置している。
Points A2, B2, C2 and points A3, B3, C3
Is a position where optical members for deflecting the light fluxes passing through the inverted real image systems in predetermined directions are arranged in rows.
Particularly in this embodiment, the optical member is composed of a reflecting mirror and is arranged with a predetermined inclination.

【0023】尚、本実施例では反射鏡は簡単の為省略
し、反射鏡で反射したときの各倒立実像系の光軸上の光
線の光路のみを示している。
In this embodiment, the reflecting mirror is omitted for the sake of simplicity, and only the optical paths of the light rays on the optical axis of each inverted real image system when reflected by the reflecting mirror are shown.

【0024】物体面1上における点A1,B1,C1及
び像面2上における点A4,B4,C4は倒立実像系1
1,12,13の光軸上の光線L1,L2,L3が各々
交わう位置である。
Points A1, B1, C1 on the object plane 1 and points A4, B4, C4 on the image plane 2 are inverted real image systems 1.
It is the position where the light rays L1, L2, L3 on the optical axes 1, 12, 13 intersect, respectively.

【0025】本実施例では物体面1上の点A1〜C1の
1方向に対して点A2〜C2に各々光学部材を配置し、
1つの光学部材列を構成している。物体面1上の他の1
方向の点D1〜F1に対しても同様に点D2〜F2に各
々光学部材を配置し、1つの光学部材列を構成してい
る。そして2つの光学部材列を物体面1に対して上下方
向に段状に配置している。本実施例では2つの光学部材
列より1つの偏向手段を構成している。
In this embodiment, optical members are arranged at points A2 to C2 on the object plane 1 with respect to one direction of points A1 to C1.
It constitutes one optical member row. The other one on the object plane 1
Similarly, with respect to the points D1 to F1 in the direction, optical members are respectively arranged at the points D2 to F2 to form one optical member row. The two optical member rows are arranged in a step shape in the vertical direction with respect to the object plane 1. In this embodiment, one optical deflector is composed of two optical member rows.

【0026】像面2側においても物体面1側と同様に点
A3〜C3に配置した複数の光学部材より1つの光学部
材列を構成し、点D3〜F3に配置した複数の光学部材
より1つの光学部材列を構成し、これら2つの光学部材
列を像面2に対して上下方向に段状に設けている。これ
により像面側の偏向手段を構成している。
Also on the image plane 2 side, one optical member row is composed of a plurality of optical members arranged at points A3 to C3 similarly to the object plane 1 side, and one optical member row is arranged from a plurality of optical members arranged at points D3 to F3. One optical member row is configured, and these two optical member rows are provided in a step shape in the vertical direction with respect to the image plane 2. This constitutes the deflecting means on the image plane side.

【0027】又、本実施例では物体側及び像面側の複数
の光学部材列を各々段状に設けることにより各々の光学
部材に対する複数の倒立実像系が空間内において互いに
干渉しないように構成している。
Further, in the present embodiment, a plurality of optical member rows on the object side and the image surface side are provided in a stepwise manner so that a plurality of inverted real image systems for each optical member do not interfere with each other in space. ing.

【0028】本実施例では物体面1の所定範囲を、例え
ば点C1近傍の物体面を位置C2に所定の傾きをもって
配置した反射鏡を介し、倒立実像系13により点C3に
配置している反射鏡で反射させた後、像面2上の点C4
近傍に縮少投影させている。このとき本実施例では点C
1,C2,C3,C4が同一平面上に位置するように構
成している。これによって倒立実像系の光軸の軌跡が同
一平面上に存在するようにして各倒立実像系の投影像が
相対的に回転して『回転ぶれ』を起さないようにしてい
る。これらのことは他の倒立実像系についても全く同様
であり、各々物体面1の所定範囲を像面上に縮少投影さ
せている。
In the present embodiment, a predetermined range of the object plane 1 is reflected by the inverted real image system 13 arranged at the point C3 through a reflecting mirror in which the object plane near the point C1 is arranged at a position C2 with a predetermined inclination. After reflection by the mirror, point C4 on image plane 2
Reduced projection in the vicinity. At this time, in this embodiment, point C
1, C2, C3, C4 are configured to be located on the same plane. As a result, the loci of the optical axes of the inverted real image systems are on the same plane, and the projected images of the inverted real image systems are relatively rotated so as not to cause "rotation blur". These are exactly the same for other inverted real image systems, and a predetermined range of the object plane 1 is reduced and projected onto the image plane.

【0029】尚、投影倍率をmとしたとき物体面1上の
点A1と点B1との間隔DA1,B1と像面2上の点A4と
点B4との間隔DA4,B4との比がm倍となるようにして
いる。他の各点における間隔についても同様である。
When the projection magnification is m, the ratio of the distances DA1 and B1 between the points A1 and B1 on the object plane 1 and the distances D A4 and B4 between the points A4 and B4 on the image plane 2 is It is set to m times. The same applies to the intervals at other points.

【0030】図1に示す座標系において、例えば点B
1,B2,B3,B4の座標を表わすと B1=(x,LL/2,h/2) B2=(x,LL/2,−h1) B3=(−mx,−LL/2,h2 ) B4=(−mx,−LL/2,−h/2) となる。
In the coordinate system shown in FIG. 1, for example, the point B
1, B2, B3, expressed the B4 coordinate B1 = (x, LL / 2 , h / 2) B2 = (x, LL / 2, -h 1) B3 = (- mx, -LL / 2, h 2 ) B4 = (-mx, -LL / 2, -h / 2).

【0031】このとき、点B2,B3のZ軸方向の座標
点h1 ,h2 はLを1つの倒立実像系の光軸長とすると
At this time, regarding the coordinate points h 1 and h 2 of the points B2 and B3 in the Z-axis direction, let L be the optical axis length of one inverted real image system.

【0032】[0032]

【数1】 となるように構成されている。尚、ここで光軸長Lは投
影倍率mの関数として表わされ、投影倍率mにより種々
変化する値である。
[Equation 1] Is configured to be. Here, the optical axis length L is expressed as a function of the projection magnification m, and is a value that varies depending on the projection magnification m.

【0033】本実施例では各々の倒立実像系によって形
成された像面上の投影像、所謂多重像を物体面1及び像
面2側に設けた複数の反射鏡の形状、傾きを各々変え、
各倒立実像系の光軸が空間内で交差するように、即ち各
光軸を一平面上に投影したとき互いに交わうように構成
することにより互いに重なり合わせて全体として一体像
を形成し、像ずれを防止している。
In this embodiment, projected images on the image plane formed by respective inverted real image systems, so-called multiple images, are changed in shape and inclination of a plurality of reflecting mirrors provided on the object plane 1 and image plane 2 sides, respectively.
The optical axes of the inverted real image systems intersect in space, that is, the optical axes of the inverted real image systems intersect with each other when projected onto one plane, so that they overlap each other to form an integral image as a whole, Prevents deviation.

【0034】又、本実施例では各々の倒立実像系の光軸
上の光線L1〜L3が物体面1及び像面2と垂直に交わ
うように各倒立実像系と各反射鏡の傾きを設定してい
る。即ち各倒立実像系の光軸上の光線L1〜L3が反射
鏡で反射した後、互いに平行となり物体面1及び像面2
に垂直に交わうように構成している。
Further, in this embodiment, the inclinations of the respective inverted real image systems and the respective reflecting mirrors are set so that the light rays L1 to L3 on the optical axis of the respective inverted real image systems intersect perpendicularly with the object plane 1 and the image plane 2. is doing. That is, after the rays L1 to L3 on the optical axis of each inverted real image system are reflected by the reflecting mirror, they become parallel to each other, and the object plane 1 and the image plane 2
It is configured to intersect vertically with.

【0035】これにより図4で説明した光軸上の光線が
物体面若しくは像面と傾いて交ったときに生ずる『倍率
ずれ』の発生を防止している。
This prevents the occurrence of "magnification shift" which occurs when the light beam on the optical axis described in FIG. 4 intersects the object plane or the image plane at an angle.

【0036】図7はこのときの図1の点A1〜C1の一
方向に相当する一部分の上面図、図8は図1の物体面1
上の点B1と点E1を含む側面図である。
FIG. 7 is a top view of a part corresponding to one direction of points A1 to C1 of FIG. 1 at this time, and FIG. 8 is an object plane 1 of FIG.
It is a side view containing point B1 and point E1 above.

【0037】図7,図8において各符番は図1で示した
ものと全く同様である。
In FIGS. 7 and 8, the reference numerals are exactly the same as those shown in FIG.

【0038】図7において物体面1上の各点A1,B
1,C1を結ぶ直線D1と像面2上の各点A4,B4,
C4を結ぶ直線D4は平行になっている。そして複数の
倒立実像系11,12,13の光軸を各々延長させたと
きに空間内において一点Oで立体交差若しくは単に交差
する各要素が設定されている。
In FIG. 7, points A1 and B on the object plane 1
1, a straight line D1 connecting C1 and points A4, B4 on the image plane 2
The straight line D4 connecting C4 is parallel. Then, when the optical axes of the plurality of inverted real image systems 11, 12, and 13 are respectively extended, each element is set so as to intersect or simply intersect at a point O in space.

【0039】尚、このときの投影光学系の投影倍率mを
図7に示す各要素間の距離D71,D72を用いて表わ
すと m=D72/D71 となっている。
When the projection magnification m of the projection optical system at this time is expressed by using the distances D71 and D72 between the respective elements shown in FIG. 7, m = D72 / D71.

【0040】本実施例では複数の倒立実像系を各々同一
のレンズ素子より構成している。この為、各々の倒立実
像系を各々異った平面上に3次元的に配置させて各々の
光軸長が同じになるようにしている。これにより全ての
倒立実像系を同一条件で投影させて各倒立実像系におけ
る光学諸特性の均一化を図っている。
In this embodiment, a plurality of inverted real image systems are composed of the same lens element. Therefore, the respective inverted real image systems are three-dimensionally arranged on different planes so that the respective optical axis lengths are the same. As a result, all the inverted real image systems are projected under the same conditions, and the optical characteristics in each inverted real image system are made uniform.

【0041】各々の反射鏡の位置A2,B2,C2と位
置A3,B3,C3は(1) 式を満たす範囲で任意に設定
することが出来るが、一度一方の反射面の各位置を決定
すれば、あとは倒立実像系の特性により順次決めること
ができる。
The positions A2, B2, C2 and the positions A3, B3, C3 of the respective reflecting mirrors can be arbitrarily set within a range satisfying the expression (1), but once each position of one reflecting surface is determined. For example, the rest can be sequentially determined according to the characteristics of the inverted real image system.

【0042】本実施例において光学部材列を2つ以上段
状に設けて構成しても良いことは言うまでもない。
It goes without saying that, in this embodiment, two or more optical member rows may be provided in a step shape.

【0043】以上の構成により本実施例では物体面1の
複数の方向に対する広い面積を同時に像面2上に投影
し、投影効率の向上を図ると共に各々の倒立実像系によ
る光量分布の重ね合わせより生ずる光量ムラを軽減させ
良好なる投影像を得ている。
With the above-described structure, in the present embodiment, a large area of the object plane 1 in a plurality of directions is simultaneously projected onto the image plane 2 to improve the projection efficiency and to superimpose the light amount distributions of the respective inverted real image systems. A good projection image is obtained by reducing the unevenness of the light amount that occurs.

【0044】本実施例では光学部材として反射鏡を用い
た場合を示したが、例えば図9に示すようにプリズム材
90,91を用いて倒立実像系13の光軸上の光線L3
が物体面1と像面2に各々垂直に交わうように構成して
も、同様に像ずれや倍率ずれの発生を防止することがで
きる。
In this embodiment, the case where the reflecting mirror is used as the optical member is shown. For example, as shown in FIG. 9, the prism member 90, 91 is used to make the light ray L3 on the optical axis of the inverted real image system 13.
Even if the optical axis is configured to intersect the object plane 1 and the image plane 2 at right angles, the image shift and the magnification shift can be similarly prevented.

【0045】図1に示す実施例においては倒立実像系の
光軸上の光線が物体面及び像面といずれも垂直に交わう
ようにして倍率ずれを完全に補正した場合について説明
したが、多少の倍率ずれが許容されるならば光軸上の光
線が物体面若しくは像面の少なくとも一方と垂直に交わ
うようにしても良い。
In the embodiment shown in FIG. 1, the case has been described in which the light beam on the optical axis of the inverted real image system intersects the object plane and the image plane perpendicularly and the magnification deviation is completely corrected. If the deviation of the magnification is allowed, the light rays on the optical axis may intersect perpendicularly to at least one of the object plane and the image plane.

【0046】以上の実施例において各倒立実像系に対す
る反射面が別個になっている最初の反射鏡から倒立実像
系を通り、反射面が別個になっている最後の反射鏡まで
は各倒立実像系のクロストークを防ぐ為に遮光部材を配
置するのが良い。
In the above embodiment, each inverted real image system extends from the first reflecting mirror having a separate reflecting surface for each inverted real image system to the final reflecting mirror having a separate reflecting surface through the inverted real image system. It is preferable to dispose a light-shielding member in order to prevent such crosstalk.

【0047】又、以上の実施例では投影光学系を縮少系
に適用した場合について説明したが、拡大系に適用する
場合には縮少系全体を逆にした構成とすれば全く同様に
本発明を適用することができる。
Further, in the above embodiments, the case where the projection optical system is applied to the reduction system has been described. However, when the projection optical system is applied to the enlargement system, if the entire reduction system is reversed, the same result is obtained. The invention can be applied.

【0048】尚、本実施例において物体面と偏向手段と
の間若しくは像面と偏向手段との間の少なくとも一方
に、単に光束を偏向させる為の共通反射面を設けて投影
光学系全体の構成上の配置を任意に設定しても良い。
In this embodiment, a common reflecting surface for simply deflecting a light beam is provided on at least one of the object plane and the deflecting means or the image plane and the deflecting means, and the entire projection optical system is constructed. The above arrangement may be set arbitrarily.

【0049】こうした設定は物体面と像面の相対関係を
所定の位置関係にもってくる場合や像の表裏関係の補正
に有効である。
Such a setting is effective when the relative relationship between the object plane and the image plane is brought to a predetermined positional relationship and when the front-back relationship of the image is corrected.

【0050】本実施例において多少の像ずれや倍率ずれ
が許容されれば1つの反射鏡で複数の倒立実像系からの
光束を偏向させるように構成しても良い。
In this embodiment, if a slight image shift or magnification shift is allowed, one reflecting mirror may be used to deflect the light beams from a plurality of inverted real image systems.

【0051】本実施例では複眼系を6つの倒立実像系よ
り成る場合について示したが、倒立実像系を2つ以上設
ければ本発明の目的を達成することができる。
In this embodiment, the case where the compound eye system is composed of six inverted real image systems is shown, but the object of the present invention can be achieved by providing two or more inverted real image systems.

【0052】本実施例では2つの偏向手段を用い、1つ
の偏向手段として1枚の反射鏡を用いた場合を示したが
前述の如く『回転ぶれ』、『像ずれ』、『倍率ずれ』等
を補正する構成と物体面、像面部分で各々独立に等価構
成にすれば複数枚の反射鏡又は屈折部材を用いて構成し
ても良い。例えば図10(A) に示すように物体面1から
の光線を一平面内に限らず一度他の平面内に導光し、再
び元の平面内に戻すように構成しても良い。又、図10
(B) のように偏向手段を構成する反射鏡の数を増加させ
て、物体面1の一方向の線分101が各々の倒立実像系
により像面2上に投影させる際、各物体面の線分101
の像が像面2上で一方の線分102にして、所謂回転ず
れがないようにすれば物体面と像面の相対的位置関係に
応じた任意の構成をとることができる。
In this embodiment, two deflecting means are used and one reflecting mirror is used as one deflecting means, but as described above, "rotation blur", "image shift", "magnification shift", etc. It is also possible to use a plurality of reflecting mirrors or refracting members as long as they are independently equivalent to the configuration for correcting the above and the object plane and the image plane. For example, as shown in FIG. 10 (A), the light rays from the object plane 1 may be guided not only in one plane but in another plane and then returned to the original plane. Also, FIG.
As shown in (B), when the number of reflecting mirrors constituting the deflecting means is increased so that the line segment 101 in one direction of the object plane 1 is projected onto the image plane 2 by each inverted real image system, Line segment 101
If the image is formed as one line segment 102 on the image plane 2 so that there is no so-called rotational deviation, an arbitrary configuration can be taken according to the relative positional relationship between the object plane and the image plane.

【0053】これによれば配置上の自由度を増し、物体
面と像面の相対位置関係に応じた任意の構成をとること
ができるので好ましい。
This is preferable because the degree of freedom in arrangement can be increased and an arbitrary configuration can be adopted according to the relative positional relationship between the object plane and the image plane.

【0054】又、図11(A) ,(B) に示すように複数の
倒立実像系より成る複眼系111を投影倍率及び物像間
距離に応じては物体面1と偏向手段との間若しくは像面
2と偏向手段との間のいずれか一方向に設けるようにし
ても良い。
As shown in FIGS. 11A and 11B, a compound eye system 111 composed of a plurality of inverted real image systems is provided between the object plane 1 and the deflecting means depending on the projection magnification and the object-image distance. It may be provided in any one direction between the image plane 2 and the deflecting means.

【0055】これによれば全ての倒立実像系の光軸をそ
ろえることが出来、構成上簡素化されるので好ましい。
This is preferable because the optical axes of all inverted real image systems can be aligned and the structure is simplified.

【0056】本実施例において倒立実像系がマイクロレ
ンズ等のように光学系中に空間を有する場合には図12
(A) ,(B) ,(C) に示すように、その空間位置に偏向手
段を設けても良い。尚、同図において121はマイクロ
レンズである。
In the present embodiment, when the inverted real image system has a space in the optical system like a microlens or the like, FIG.
As shown in (A), (B), and (C), a deflecting means may be provided at the spatial position. In the figure, reference numeral 121 is a microlens.

【0057】[0057]

【発明の効果】 本発明によれば複数の倒立実像系より
成る複眼系を用いて物体面を縮少投影若しくは拡大投影
する際、光束を偏向させる複数の光学部材より成る偏向
手段を用いることにより像面上における多重像の像ずれ
及び倍率ずれの双方を良好に補正した投影光学系を達成
することができる。
According to the present invention, when a compound eye system including a plurality of inverted real image systems is used to perform reduced projection or enlarged projection of an object plane, a deflecting unit including a plurality of optical members for deflecting a light beam is used. It is possible to achieve a projection optical system in which both image shifts and magnification shifts of multiple images on the image plane are well corrected.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例の光学系の概略図FIG. 1 is a schematic diagram of an optical system according to an embodiment of the present invention.

【図2】 従来の投影光学系の一部分の説明図FIG. 2 is an explanatory view of a part of a conventional projection optical system.

【図3】 従来の投影光学系の一部分の説明図FIG. 3 is an explanatory diagram of a part of a conventional projection optical system.

【図4】 図3の一部分の投影像の説明図4 is an explanatory view of a projected image of a part of FIG.

【図5】 従来の投影光学系の一部分の説明図FIG. 5 is an explanatory diagram of a part of a conventional projection optical system.

【図6】 従来の投影光学系の一部分の説明図FIG. 6 is an explanatory view of a part of a conventional projection optical system.

【図7】 図1の一部分の上面図FIG. 7 is a top view of a portion of FIG.

【図8】 図1の一部側面図FIG. 8 is a partial side view of FIG.

【図9】 本発明の他の実施例の一部側面図FIG. 9 is a partial side view of another embodiment of the present invention.

【図10】 本発明の他の実施例の一部側面図FIG. 10 is a partial side view of another embodiment of the present invention.

【図11】 本発明の他の実施例の一部側面図FIG. 11 is a partial side view of another embodiment of the present invention.

【図12】 本発明の他の実施例の一部側面図FIG. 12 is a partial side view of another embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 物体面 2 像面 10,20,30,50,60 複眼系 11〜16 倒立実像系 A2〜F2,A3〜F3 光学部材の配置されている位
置 L1〜L6 倒立実像系の光軸上の光線
DESCRIPTION OF SYMBOLS 1 Object plane 2 Image plane 10, 20, 30, 50, 60 Compound eye system 11-16 Inverted real image system A2-F2, A3-F3 Positions where optical members are arranged L1-L6 Rays on optical axis of inverted real image system

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 複数の倒立実像系を有する複眼系により
物体面を縮小又は拡大倍率で像面上に投影し重ね合わせ
る際、光路中に光束を偏向させる複数の光学部材を有す
る偏向手段を配置し、該複数の倒立実像系をその光軸上
の各光線が互いに空間内で交差するように構成し、該複
数の倒立実像系の光軸上の各光線が物体面若しくは像面
の少なくとも一方の面と垂直となるように構成し、か
つ、該複数の倒立実像系を各々同一のレンズ素子より構
成し、各々異なった平面上に配置して各々の光路長が同
じになるようにしたことを特徴とする投影光学系。
1. A deflecting means having a plurality of optical members for deflecting a light beam in an optical path when projecting and superimposing an object plane on an image plane at a reduction or enlargement magnification by a compound eye system having a plurality of inverted real image systems. Then, the plurality of inverted real image systems are configured such that the light rays on their optical axes intersect each other in space, and each light ray on the optical axes of the plurality of inverted real image systems is at least one of the object plane or the image plane. And the plurality of inverted real image systems are composed of the same lens element and are arranged on different planes so that the respective optical path lengths are the same. A projection optical system characterized by.
【請求項2】 前記複数の光学部材を各々前記複数の倒
立実像系毎に対向させた複数の反射鏡より構成し、該複
数の反射鏡の角度を各々該倒立実像系毎に変化させて配
置したことを特徴とする特許請求の範囲第1項記載の投
影光学系。
2. The plurality of optical members are composed of a plurality of reflecting mirrors facing each other for each of the plurality of inverted real image systems, and the angles of the plurality of reflecting mirrors are changed for each of the inverted real image systems. The projection optical system according to claim 1, wherein:
【請求項3】 前記偏向手段を物体面と前記複眼系との
間若しくは像面と該複眼系との間の少なくとも一方に設
けたことを特徴とする特許請求の範囲第2項記載の投影
光学系。
3. The projection optical system according to claim 2, wherein the deflecting means is provided at least between the object plane and the compound eye system or between the image plane and the compound eye system. system.
【請求項4】 前記光学部材を反射鏡より構成し、該1
つの反射鏡により前記複数の倒立実像系のうちの少なく
とも2つを通過する光束を偏向させるようにしたことを
特徴とする特許請求の範囲第1項記載の投影光学系。
4. The optical member comprises a reflecting mirror,
The projection optical system according to claim 1, wherein one reflecting mirror deflects a light flux passing through at least two of the plurality of inverted real image systems.
JP26551193A 1993-09-30 1993-09-30 Projection optics Expired - Fee Related JPH0795157B2 (en)

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Application Number Priority Date Filing Date Title
JP26551193A JPH0795157B2 (en) 1993-09-30 1993-09-30 Projection optics

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP60296331A Division JPH0614150B2 (en) 1985-12-27 1985-12-27 Projection optics

Publications (2)

Publication Number Publication Date
JPH075390A JPH075390A (en) 1995-01-10
JPH0795157B2 true JPH0795157B2 (en) 1995-10-11

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ID=17418181

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JP26551193A Expired - Fee Related JPH0795157B2 (en) 1993-09-30 1993-09-30 Projection optics

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JPH075390A (en) 1995-01-10

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