JPH0614146B2 - Projection optics - Google Patents
Projection opticsInfo
- Publication number
- JPH0614146B2 JPH0614146B2 JP60296327A JP29632785A JPH0614146B2 JP H0614146 B2 JPH0614146 B2 JP H0614146B2 JP 60296327 A JP60296327 A JP 60296327A JP 29632785 A JP29632785 A JP 29632785A JP H0614146 B2 JPH0614146 B2 JP H0614146B2
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- Prior art keywords
- image
- real image
- plane
- optical
- inverted real
- Prior art date
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- Exposure Or Original Feeding In Electrophotography (AREA)
- Optical Systems Of Projection Type Copiers (AREA)
- Facsimile Scanning Arrangements (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は電子写真複写機、ファクシミリ等の光学機器に
おいて原画である物体面を像面上に投影する際に好適な
投影光学系に関し、特に集光性光伝送体若しくはマイク
ロレンズ等から成るレンズ素子を複数個、列状に配置し
た所謂複眼系を用い物体面を像面上に縮小若しくは拡大
等各種の倍率で投影させる際に好適な投影光学系に関す
るものである。Description: TECHNICAL FIELD The present invention relates to a projection optical system suitable for projecting an object plane, which is an original image, onto an image plane in an optical device such as an electrophotographic copying machine and a facsimile, and in particular, Suitable projection when projecting at various magnifications such as reducing or enlarging the object plane on the image plane using a so-called compound eye system in which a plurality of lens elements composed of a condensing light transmission body or microlenses are arranged in rows It relates to an optical system.
(従来の技術) 従来より電子写真複写機やファクシミリ等の光学機器に
おいては複眼系を利用して物体面を所定の倍率で像面上
に投影している。投影方法としては物体面を正立実像と
して像面上に投影する正立実像系による方法と倒立実像
として像面上に投影する倒立実像系による方法の2つの
方法が用いられている。このうち倒立実像系は正立実像
系の2回結像に比べて1回結像で良い為、光学全長を短
くすることが出来、光学系全体が簡素化され装置全体が
小型化しやすい等の特長を有している。(Prior Art) Conventionally, in an optical apparatus such as an electrophotographic copying machine or a facsimile, a compound eye system is used to project an object plane on an image plane at a predetermined magnification. As the projection method, there are used two methods: a method by an erecting real image system that projects an object surface as an erecting real image on the image surface and a method by an inverted real image system that projects an object surface as an inverted real image on the image surface. Of these, the inverted real image system requires only one image formation as compared with the two times image formation of the erect real image system, so that the total optical length can be shortened, the entire optical system can be simplified, and the entire apparatus can be easily downsized. It has features.
この為、倒立実像系は多くの電子写真複写機に用いられ
ている。しかしながら倒立実像系では物体像が像面上で
180度回転する為、複眼系を用いる場合、各々の倒立
実像系による物体像を反射鏡を用いて各々像面上で所定
の関係を維持しつつ重ね合わす必要がある。Therefore, the inverted real image system is used in many electrophotographic copying machines. However, in the inverted real image system, the object image rotates 180 degrees on the image plane. Therefore, when the compound eye system is used, the object images of the respective inverted real image systems are each maintained on the image plane by using a reflecting mirror. Need to overlap.
又、前述の180度の回転ずれを適当な手段で補正した
としても変倍の場合には複眼系の結像性能を決定するも
のとして変倍特有で生じる像の『像ずれ』と『倍率ず
れ』がある。これらの生じる原因は原理的には同じであ
る為、以下の説明では従来の正立実像系を例にとり説明
する。Further, even if the above-mentioned 180 degree rotational deviation is corrected by an appropriate means, in the case of zooming, the "image shift" and "magnification shift" of the image, which are peculiar to zooming, are determined to determine the imaging performance of the compound eye system. Is there. Since the causes of these problems are the same in principle, the conventional erecting real image system will be described below as an example.
正立実像系において投影倍率が等倍の所謂正立等倍系が
例えば実公昭48−18204号公報等で提案されてい
る。同公報では第2図に示すように微少レンズより成る
複数の正立実像系21より複眼系20を構成し、物体面
1の所定範囲の部分像を像面2上に投影し、重ね合わせ
て一体像を形成している。これにより1つの正立実像系
ではカバー出来ない大きな物体面を像面上に投影してい
る。In an erecting real image system, a so-called erecting equal-magnification system having a projection magnification of 1 × has been proposed in, for example, Japanese Utility Model Publication No. 48-18204. In the same publication, as shown in FIG. 2, a compound eye system 20 is constituted by a plurality of erecting real image systems 21 composed of minute lenses, and a partial image of a predetermined range of the object plane 1 is projected on the image plane 2 and superposed. It forms an integral image. As a result, a large object plane that cannot be covered by one erecting real image system is projected onto the image plane.
第2図に示す複眼系は投影倍率が等倍である為各々の正
立実像系21の光軸が平行となるように構成され、かつ
光軸上の各光線が物体面1及び像面2と垂直に交わうよ
うに構成されている。これにより各々の正立実像系21
による像面上の投影像、所謂多重像を像面上で互いに重
ね合わせて一体像を形成するのを可能としている。The compound eye system shown in FIG. 2 is constructed such that the optical axes of the erect real image systems 21 are parallel to each other because the projection magnification is 1 ×, and each ray on the optical axis is an object plane 1 and an image plane 2. It is configured to intersect vertically with. As a result, each erect real image system 21
It is possible to form an integral image by superimposing projected images on the image surface, so-called multiple images, on the image surface.
一般に複眼系を有する投影光学系を微少系若しくは拡大
系とする為に等倍系の状態より物体距離を変化させると
各正立実像系の倍率は変化するのに対し、各正立実像系
の光軸間隔は等倍のままなので、各々の正立実像系によ
る多重像が像面上で重ならず、ずれてしまい、所謂像ず
れを起してくる。このときの像ずれ現象は投影像の光学
性能を著しく低下させる原因となっている。複数の正立
実像系から成る複眼系を用い縮小投影若しくは拡大投影
したときの多重像の像ずれを補正する方法が例えば特開
昭57−16415号公報で提案されている。同公報で
は第3図に示すように複眼系30を構成する複数の正立
実像系31をその光軸が中央の正立実像系310の光軸
311に対して序々に傾くように配置し、これによって
多重像のずれを補正している。しかしながらこの複眼系
では正立実像系毎にその光学性能や高軸長(物体面から
像面までの高軸の光学的な長さ)が異っており、又この
複眼系では物体面周辺の投影を行う正立実像系の光軸上
の光線が物体面と像面に交わう際、垂直から大きく外れ
てくる。この為第4図に示すようにその傾きが大きくな
っている正立実像系41では、投影倍率が等しくなる物
体面が正規の物体面1より傾いて物体面42の如くにな
ってくる。Generally, when the object distance is changed from the state of the equal magnification system in order to make the projection optical system having the compound eye system a minute system or a magnifying system, the magnification of each erecting real image system changes, whereas that of each erecting real image system changes. Since the optical axis distance remains the same, the multiple images due to the erecting real image systems do not overlap on the image plane and are displaced, causing so-called image displacement. The image shift phenomenon at this time is a cause of significantly deteriorating the optical performance of the projected image. For example, Japanese Patent Application Laid-Open No. 57-16415 proposes a method of correcting an image shift of a multiple image when reduction projection or enlargement projection is performed using a compound eye system including a plurality of erect real image systems. In this publication, as shown in FIG. 3, a plurality of erecting real image systems 31 forming a compound eye system 30 are arranged so that their optical axes gradually incline with respect to the optical axis 311 of the central erecting real image system 310. This corrects the deviation of the multiple images. However, in this compound eye system, the optical performance and the high axis length (the optical length of the high axis from the object plane to the image plane) are different for each erect real image system. When the light rays on the optical axis of the erecting real image system for projection intersect the object plane and the image plane, they largely deviate from the vertical. Therefore, as shown in FIG. 4, in the erecting real image system 41 having a large inclination, the object surface having the same projection magnification is inclined from the normal object surface 1 and becomes like the object surface 42.
一方、投影倍率の等しくなる像面も同様に正規の像面2
に対して傾いて像面43の如くになってくる。この結
果、物体面周辺では第4図に示す光路長l41とl42の長
さの差に相当する量だけ同一視野範囲内において部分的
に結像倍率が異ってくる所謂『倍率ずれ』が生じてく
る。On the other hand, an image plane having the same projection magnification is also a normal image plane 2
It tilts with respect to the image plane 43. As a result, a so-called "magnification shift" occurs in which the imaging magnification is partially different in the same visual field range by an amount corresponding to the difference between the optical path lengths l41 and l42 shown in FIG. 4 around the object plane. Come on.
このように従来の複眼系を用いた投影光学系では多重像
のずれを補正しても倍率ずれが生じており、等倍以外の
投影では高い光学性能を有した投影像を得るのが難しく
なっている。As described above, in the conventional projection optical system using the compound eye system, the magnification deviation occurs even if the deviation of the multiple images is corrected, and it is difficult to obtain a projection image having high optical performance in the projection other than the equal magnification. ing.
又、同公報では必要に応じて各正立実像系の入射端面若
しくは射出端面を偏芯させたり、屈折力を付加させたり
して、倍率ずれを軽減しようとしているが、これでは投
影光学系全体が複雑になってくる。そして原理的にも、
各正立実像系の光軸は物体面、像面に垂直になり得ない
ので、こういう補正には限度があり、こうした手段では
倍率ずれを大幅に除去することが困難である。Further, in the same publication, the entrance end surface or the exit end surface of each erecting real image system is decentered or a refracting power is added as necessary to reduce the deviation in magnification, but this is the entire projection optical system. Becomes complicated. And in principle,
Since the optical axis of each erecting real image system cannot be perpendicular to the object plane and the image plane, there is a limit to such correction, and it is difficult to largely eliminate the magnification deviation by such means.
この他、複数の正立実像系より成る複眼系を用い縮少投
影若しくは拡大投影を行った際の多重像の像ずれを補正
したものが、例えば特開昭59−45420号公報、特
開昭59−216115号公報等で提案されている。In addition, a compound eye system composed of a plurality of erecting real image systems is used to correct image shift of multiple images when performing reduced projection or enlarged projection, for example, Japanese Patent Laid-Open Nos. 59-45420 and Sho. It is proposed in Japanese Patent Publication No. 59-216115.
特開昭59−45420号公報では第5図に示すように
複数の正立実像系51より成る複眼系50の物体面1側
若しくは像面2側の少なくとも一方の各々の正立実像系
毎に偏向角の異なるフレネルレンズ等から成る光束偏向
部材52、53を配置することによって多重像の像ずれ
を補正した投影光学系を提案している。In Japanese Patent Laid-Open No. 59-45420, as shown in FIG. 5, at least one of the erecting real image system on the object plane 1 side or the image plane 2 side of the compound eye system 50 composed of a plurality of erecting real image systems 51. A projection optical system is proposed in which image deviation of a multiple image is corrected by disposing light beam deflecting members 52 and 53, which are Fresnel lenses having different deflection angles.
又、特開昭59−216115号公報では第6図に示す
ように複数の正立実像系61より成る複眼系60の物体
面1側若しくは像面2側の少なくとも一方に複数の球面
レンズ62,63を配置して多重像の像ずれを補正した
投影光学系を提案している。Further, in Japanese Patent Laid-Open No. 59-216115, as shown in FIG. 6, a plurality of spherical lenses 62 are provided on at least one of the object plane 1 side and the image plane 2 side of a compound eye system 60 composed of a plurality of erecting real image systems 61. A projection optical system in which 63 is arranged to correct the image shift of multiple images is proposed.
しかしながら前記2つの公報で提案されている投影光学
系はいずれも各々の正立実像系の光軸長が異っており、
しかも物体面周辺を投影する正立実像系の光軸が物体面
と像面に対して大きく傾いている。この為、前述の如く
多重像の像ずれを補正することはできる倍率ずれが生
じ、投影像の光学性能を大きく低下させる原因となって
いる。However, in the projection optical systems proposed in the above two publications, the erecting real image systems have different optical axis lengths,
Moreover, the optical axis of the erecting real image system that projects the periphery of the object plane is largely tilted with respect to the object plane and the image plane. Therefore, as described above, a magnification shift that can correct the image shift of the multiple images occurs, which causes a large reduction in the optical performance of the projected image.
以上の倍率ずれは複眼系を倒立実像系で構成した場合も
正立実像系の場合と同じ原因により同様に生じてくる。The above-mentioned magnification shift similarly occurs when the compound eye system is configured by an inverted real image system due to the same cause as in the case of the erect real image system.
(発明が解決しようとする課題) 本発明は複数の倒立実像系より成る複眼系を用いて物体
面を縮少若しくは拡大等の等倍以外の倍率を含んで投影
する際、多重像の像ずれを補正すると共に倍率ずれを同
時に減少あるいは除去させることにより投影像の光学性
能の向上を図った投影光学系の提供を目的とする。(Problem to be Solved by the Invention) When the present invention uses a compound eye system composed of a plurality of inverted real image systems to project an object plane including magnifications other than equal magnification such as reduction or enlargement, image shift of multiple images It is an object of the present invention to provide a projection optical system in which the optical performance of a projected image is improved by simultaneously correcting and correcting or eliminating the magnification shift.
(課題を解決するための手段) 本発明の投影光学系は、複数の倒立実像系を有する複眼
系により物体面を縮小又は拡大倍率で像面上に投影し重
ね合わせる際、光路中に光束を偏向させる複数の光学部
材を有する偏向手段を配置し、該複数の倒立実像系をそ
の光軸上の各光線が互いに空間内で交差するように構成
し、該複数の倒立実像系の光軸上の各光線が物体面若し
くは像面の少なくとも一方の面と垂直となるように構成
し、かつ、該複数の倒立実像系を各々の光路長が互いに
異なるようにして同一平面上に配置したことを特徴とし
ている。(Means for Solving the Problems) The projection optical system of the present invention, when projecting and superimposing the object plane on the image plane at a reduction or enlargement magnification by a compound eye system having a plurality of inverted real image systems, creates a light beam in the optical path. Deflection means having a plurality of optical members for deflecting is arranged, and the plurality of inverted real image systems are configured such that the light rays on their optical axes intersect each other in space, and on the optical axes of the plurality of inverted real image systems. That each light ray is perpendicular to at least one of the object plane or the image plane, and the plurality of inverted real image systems are arranged on the same plane such that their optical path lengths are different from each other. It has a feature.
特に、前記複数の光学部材を各々前記複数の倒立実像系
毎に対向させた複数の反射鏡より構成し、該複数の反射
鏡の角度を各々該倒立実像系毎に変化させて配置したこ
とや、 前記偏向手段を物体面と前記複眼系との間若しくは像面
と該複眼系との間の少なくとも一方に設けたこと そして、前記光学部材を反射鏡より構成し、該1つの反
射鏡により前記複数の倒立実像系のうちの少なくとも2
つを通過する光束を偏向させるようにしたことを特徴と
している。In particular, each of the plurality of optical members is composed of a plurality of reflecting mirrors facing each other for each of the plurality of inverted real image systems, and the angles of the plurality of reflecting mirrors are arranged to be changed for each of the inverted real image systems. The deflecting means is provided between at least one of the object plane and the compound eye system or between the image plane and the compound eye system, and the optical member is composed of a reflecting mirror, and the one reflecting mirror is used to form the optical member. At least two of the multiple inverted real image systems
The feature is that the light flux passing through one of them is deflected.
この他、本発明の特徴は実施例において記載されてい
る。Besides, the features of the present invention are described in the embodiments.
(実施例) 第1図は本発明の投影光学系を縮少系で構成したときの
一実施例の光学系の概略図である。同図において1は物
体面、2は像面、10は複眼系であり、複数の倒立実像
系11,12,13より成っている。(Embodiment) FIG. 1 is a schematic view of an optical system of an embodiment when the projection optical system of the present invention is constituted by a reduction system. In the figure, 1 is an object plane, 2 is an image plane, 10 is a compound eye system, and is composed of a plurality of inverted real image systems 11, 12, and 13.
点A2,B2,C2と点A3,B3,C3は各々倒立実
像系を通過した光束を各々所定方向に偏向させる為の光
学部材を列状に配置している位置である。特に本実施例
では光学部材を反射鏡より構成し所定の傾きを有して配
置している。The points A2, B2, C2 and the points A3, B3, C3 are positions where optical members for respectively deflecting the light fluxes passing through the inverted real image system are arranged in rows. Particularly in this embodiment, the optical member is composed of a reflecting mirror and is arranged with a predetermined inclination.
尚、本実施例では反射鏡は簡単の為省略し、反射鏡で反
射したときの各倒立実像系の光軸鵜の光線の光路のみを
示している。In this embodiment, the reflecting mirror is omitted for simplicity, and only the optical path of the light beam of the optical axis cormorant of each inverted real image system when reflected by the reflecting mirror is shown.
本実施例では点A2,B2,C2と点A3,B3,C3
に沿って列状に配置した複数の光学部材より各々1つの
偏向手段を構成している。In this embodiment, points A2, B2, C2 and points A3, B3, C3
Each of the plurality of optical members arranged in a line along the line constitutes one deflecting unit.
物体面1上における点A1,B1,C1及び像面2上に
おける点A4,B4,C4は倒立実像系11,12,1
3の光軸上の光線L1,L2,L3が各々交わう位置で
ある。Points A1, B1, C1 on the object plane 1 and points A4, B4, C4 on the image plane 2 are inverted real image systems 11, 12, 1.
This is the position where the light rays L1, L2, and L3 on the optical axis 3 intersect.
本実施例では複数の倒立実像系を各々異った光学特性の
レンズ素子より構成し、それらの光軸が全で同一平面内
に位置するように設定している。これにより配置上の簡
素化を図っている。複数の倒立実像系の光軸長は各々異
なり、中央部に位置する倒立実像系の光軸長が一番短
く、周辺の倒立実像系ほど長くなっている。In this embodiment, a plurality of inverted real image systems are composed of lens elements having different optical characteristics, and their optical axes are set so that they are all located in the same plane. This simplifies the layout. The optical axis lengths of the plurality of inverted real image systems are different, and the optical axis length of the inverted real image system located in the central portion is the shortest, and the peripheral inverted real image systems are longer.
本実施例では物体面1の所定範囲を、例えば点C1近傍
の物体面を位置C2に所定の傾きをもって配置した反射
鏡を介し、倒立実像系13により点C3に配置している
反射鏡で反射させた後、像面2上の点C4近傍に縮少投
影させている。このとき本実施例では点C1,C2,C
3,C4が同一平面上に位置するように構成している。
これによって倒立実像系の光軸の軌跡が同一平面上に存
在するようにして各倒立実像系の投影像が相対的に回転
して『回転ぶれ』を起さないようにしている。これらの
ことは他の倒立実像系についても全く同様であり、各々
物体面1の所定範囲を像面上に縮少投影させている。In this embodiment, a predetermined range of the object plane 1 is reflected by a reflector arranged at a point C3 by the inverted real image system 13 via a reflector having an object plane near the point C1 arranged at a position C2 with a predetermined inclination. After that, the image is reduced and projected in the vicinity of the point C4 on the image plane 2. At this time, in this embodiment, points C1, C2, C
3 and C4 are arranged on the same plane.
As a result, the loci of the optical axes of the inverted real image systems are on the same plane, and the projected images of the inverted real image systems are relatively rotated so as not to cause "rotation blur". These are exactly the same for other inverted real image systems, and a predetermined range of the object plane 1 is reduced and projected onto the image plane.
尚、投影倍率をmとしたとき物体面1上の点A1と点B
1との間隔 と像面2上の点A4と点B4との間隔 との比がm倍となるようにしている。他の各点における
間隔についても同様である。When the projection magnification is m, the points A1 and B on the object plane 1 are
Interval with 1 And the distance between points A4 and B4 on the image plane 2 The ratio with is set to m times. The same applies to the intervals at other points.
第1図に示す座標系において、例えば点B1,B2,B
3,B4の座標を表わすと B1=(x,l/2,h/2) B2=(x,l/2,−h1) B3=(−mx,−l/2,h2) B4=(−mx,−l/2,−h/2) となる。In the coordinate system shown in FIG. 1, for example, points B1, B2, B
3, when representing a B4 coordinate B1 = (x, l / 2 , h / 2) B2 = (x, l / 2, -h 1) B3 = (- mx, -l / 2, h 2) B4 = (-Mx, -l / 2, -h / 2).
このとき、点B2,B3のZ軸方向の座標点h1,h2
はLを1つの倒立実像系の光軸長とすると となるように構成されている。尚、ここで光軸長Lは投
影倍率mの関数として表わされ、投影倍率mにより種々
変化する値である。At this time, the coordinate points h 1 and h 2 of the points B2 and B3 in the Z-axis direction
Let L be the optical axis length of one inverted real image system Is configured to be. Here, the optical axis length L is expressed as a function of the projection magnification m, and is a value that varies depending on the projection magnification m.
本実施例では各々の倒立実像系によって形成された像面
上の投影像、所謂多重像を物体面1及び像面2側に設け
た複数の反射鏡の形状、傾きを各々変え、各倒立実像系
の光軸が空間内で交差するように、即ち各光軸を一平面
上に投影したとき互いに交わうように構成することによ
り互いに重なり合わせて全体として一体像を形成し、像
ずれを防止している。In this embodiment, the projected images on the image plane formed by the respective inverted real image systems, so-called multiple images, are changed in shape and inclination of the plurality of reflecting mirrors provided on the object plane 1 and image plane 2 sides, respectively. The optical axes of the system intersect in space, that is, the optical axes intersect each other when projected onto one plane, so that they overlap each other to form an integral image as a whole, preventing image shift is doing.
又、本実施例では各々の倒立実像系の光軸上の光線L1
〜L3が物体面1及び像面2と垂直に交わうように各倒
立実像系と各反射鏡の傾きを設定している。即ち各倒立
実像系の光軸上の光線L1〜L3が反射鏡で反射した
後、互いに平行となり物体面1及び像面2に垂直に交わ
うように構成している。In the present embodiment, the light ray L1 on the optical axis of each inverted real image system is used.
The inclinations of the inverted real image systems and the reflecting mirrors are set so that L3 intersects the object plane 1 and the image plane 2 at a right angle. That is, the light rays L1 to L3 on the optical axis of each inverted real image system are reflected by a reflecting mirror and then become parallel to each other and intersect perpendicularly to the object plane 1 and the image plane 2.
これにより第4図で説明した光軸上の光線が物体面若し
くは像面と傾いて交ったときに生ずる『倍率ずれ』の発
生を防止している。This prevents the occurrence of "magnification shift" that occurs when the ray on the optical axis described in FIG. 4 intersects the object plane or the image plane at an angle.
第7図はこのときの第1図の上面図、第8図は第1図の
側面図である。FIG. 7 is a top view of FIG. 1 at this time, and FIG. 8 is a side view of FIG.
第7,第8図において各符番は第1図で示したものと全
く同様である。Each reference numeral in FIGS. 7 and 8 is exactly the same as that shown in FIG.
第7図において物体面1上の各点A1,B1,C1を結
ぶ直線D1と像面2上の各点A4,B4,C4を結ぶ直
線D4は平行になっている。そして複数の倒立実像系1
1,12,13の光軸を各々延長させたときに空間内に
おいて一点Oで立体交差若しくは単に交差する各要素が
設定されている。In FIG. 7, a straight line D1 connecting the points A1, B1, C1 on the object plane 1 and a straight line D4 connecting the points A4, B4, C4 on the image plane 2 are parallel. And multiple inverted real image systems 1
Each element is set so as to intersect or simply intersect at a point O in the space when the optical axes of 1, 12, and 13 are extended.
尚、このときの投影光学系の投影倍率mを第7図に示す
各要素間の距離D71,D72を用いて表わすと m=D72/D71 となっている。When the projection magnification m of the projection optical system at this time is expressed by using the distances D71 and D72 between the elements shown in FIG. 7, m = D72 / D71.
各々の反射鏡の位置A2,B2,C2と位置A3,B
3,C3は(1)式を満たす範囲で任意に設定することが
出来るが、一度一方の反射面の各位置を決定すれば、あ
とは倒立実像系の特性により順次決めることができる。Positions A2, B2, C2 and positions A3, B of each reflecting mirror
Although C3 and C3 can be arbitrarily set within the range that satisfies the expression (1), once each position of one reflecting surface is determined, the rest can be sequentially determined according to the characteristics of the inverted real image system.
本実施例では光学部材として反射鏡を用いた場合を示し
たが、例えば第9図に示すようにプリズム材90,91
を用いて倒立実像系13の光軸上の光線L3が物体面1
と像面2に各々垂直に交わるように構成しても、同様に
像ずれや倍率ずれの発生を防止することができる。In this embodiment, the case where the reflecting mirror is used as the optical member is shown. For example, as shown in FIG. 9, the prism members 90 and 91 are used.
, The ray L3 on the optical axis of the inverted real image system 13
Also, even if the optical axis and the image plane 2 intersect each other, the image shift and the magnification shift can be similarly prevented.
第1図に示す実施例においては倒立実像系の光軸上の光
線が物体面及び像面といずれも垂直に交わうようにして
倍率ずれを完全に補正した場合について説明したが、多
少の倍率ずれが許容されるならば光軸上の光線が物体面
若しくは像面の少なくとも一方と垂直に交わうようにし
ても良い。In the embodiment shown in FIG. 1, a case has been described in which the deviation of magnification is completely corrected by causing the light rays on the optical axis of the inverted real image system to vertically intersect the object plane and the image plane. If deviation is allowed, the light rays on the optical axis may intersect perpendicularly to at least one of the object plane and the image plane.
以上の実施例において各倒立実像系に対する反射面が別
個になっている最初の反射鏡から倒立実像系を通り、反
射面が別個になっている最後の反射鏡までは各倒立実像
系のクロストークを防ぐ為に遮光部材を配置するのが良
い。In the above embodiments, the crosstalk of each inverted real image system from the first reflecting mirror having a separate reflecting surface for each inverted real image system to the final reflecting mirror having a separate reflecting surface through the inverted real image system. In order to prevent this, it is preferable to arrange a light shielding member.
又、以上の実施例では投影光学系を縮小系に適用した場
合について説明したが、拡大系に適用する場合には縮少
系全体を逆にした構成とすれば全く同様に本発明を適用
することができる。Further, in the above embodiments, the case where the projection optical system is applied to the reduction system has been described. However, when the projection optical system is applied to the enlargement system, the present invention is applied in the same manner if the entire reduction system is reversed. be able to.
尚、本実施例において物体面と偏向手段との間若しくは
像面と偏向手段との間の少なくとも一方に、単に光束を
偏向させる為の共通反射面を設けて投影光学系全体の構
成上の配置を任意に設定しても良い。In the present embodiment, a common reflecting surface for simply deflecting a light beam is provided on at least one of the object plane and the deflecting means or the image plane and the deflecting means, and the overall arrangement of the projection optical system is arranged. May be set arbitrarily.
こうした設定は物体面と像面の相対関係を所定の位置関
係にもってくる場合や像の表裏関係の補正に有効であ
る。Such setting is effective when the relative relationship between the object plane and the image plane is brought to a predetermined positional relationship and when the front-back relationship of the image is corrected.
本実施例において多少の像ずれや倍率ずれが許容されれ
ば1つの反射鏡で複数の倒立実像系からの光束を偏向さ
せるように構成しても良い。In this embodiment, one mirror may be used to deflect the light fluxes from a plurality of inverted real image systems if a slight image shift or magnification shift is allowed.
本実施例では複眼系を3つの倒立実像系より成る場合に
ついて示したが、倒立実像系を2つ以上設ければ本発明
の目的を達成することができる。In this embodiment, the case where the compound eye system is composed of three inverted real image systems is shown, but the object of the present invention can be achieved by providing two or more inverted real image systems.
本実施例では2つの偏向手段を用い、1つの偏向手段と
して1枚の反射鏡を用いた場合を示したが前述の如く
『回転ぶれ』、『像ずれ』、『倍率ずれ』等を補正する
構成と物体面、像面部分で各々独立に等価構成にすれば
複数枚の反射鏡又は屈折部材を用いて構成しても良い。
例えば第10図(A)に示すように物体面1からの光線を
一平面内に限らず一度他の平面内に導光し、再び元の平
面内に戻すように構成しても良い。又、第10図(B)の
ように偏向手段を構成する反射鏡の数を増加させて、物
体面1の一方向の線分101が各々の倒立実像系により
像面2上に投影させる際、各物体面の線分101の像が
像面2上で一方の線分102にして、所謂回転ずれがな
いようにすれば物体面と像面の相対的位置関係に応じた
任意の構成をとることができる。In the present embodiment, two deflecting means are used and one reflecting mirror is used as one deflecting means. However, as described above, "rotational shake", "image shift", "magnification shift", etc. are corrected. A plurality of reflecting mirrors or refracting members may be used if the configuration and the object plane and the image plane are independently equivalent.
For example, as shown in FIG. 10 (A), the light rays from the object plane 1 may be guided not only in one plane but in another plane and then returned to the original plane. Further, as shown in FIG. 10 (B), when the number of reflecting mirrors constituting the deflecting means is increased so that the line segment 101 in one direction of the object plane 1 is projected onto the image plane 2 by each inverted real image system. If the image of the line segment 101 of each object plane is one line segment 102 on the image plane 2 so that there is no so-called rotational deviation, an arbitrary configuration according to the relative positional relationship between the object plane and the image plane can be obtained. Can be taken.
これによれば配置上の自由度を増し、物体面と像面の相
対位置関係に応じた任意の構成をとることができるので
好ましい。This is preferable because the degree of freedom in arrangement can be increased and an arbitrary configuration can be adopted according to the relative positional relationship between the object plane and the image plane.
又、第11図(A),(B)に示すように複数の倒立実像系よ
り成る複眼系111を投影倍率及び物像間距離に応じて
は物体面1と偏向手段との間若しくは像面2と偏向手段
との間のいずれか一方向に設けるようにしても良い。Further, as shown in FIGS. 11A and 11B, a compound eye system 111 including a plurality of inverted real image systems is provided between the object plane 1 and the deflecting means or the image plane depending on the projection magnification and the object-image distance. It may be provided in any one direction between the two and the deflecting means.
これによれば全ての倒立実像系の光軸をそろえることが
出来、構成上簡素化されるので好ましい。According to this, the optical axes of all the inverted real image systems can be aligned and the structure is simplified, which is preferable.
本実施例において倒立実像系がマイクロレンズ等のよう
に光学系中に空間を有する場合には第12図(A),(B),
(C)に示すように、その空間位置に偏向手段を設けても
良い。尚、同図において121はマイクロレンズであ
る。In the present embodiment, when the inverted real image system has a space in the optical system such as a microlens, etc., FIG. 12 (A), (B),
As shown in (C), a deflecting means may be provided at the spatial position. In the figure, reference numeral 121 is a microlens.
(発明の効果) 本発明によれば複数の倒立実像系より成る複眼系を用い
て物体面を縮少投影若しくは拡大投影する際、光束を偏
向させる複数の光学部材より成る偏向手段を用いること
により像面上における多重像の像ずれ及び倍率ずれの双
方を良好に補正した投影光学系を達成することができ
る。(Effects of the Invention) According to the present invention, by using the deflecting means composed of a plurality of optical members for deflecting a light beam when the object plane is reduced or enlarged and projected using the compound eye system composed of a plurality of inverted real image systems. It is possible to achieve a projection optical system in which both image shifts and magnification shifts of multiple images on the image plane are well corrected.
第1図は本発明の一実施例の光学系の概略図、第7図は
第1図の上面図、第8図は第1図の一部側面図、第9
図,第10図(A),(B)、第11図(A),(B)、第12図
(A),(B),(C)は各々本発明の他の実施例の一部側面
図、第2,第3,第5,第6図は各々従来の投影光学系
の一部分の説明図、第4図は第3図の一部分の投影像の
説明図である。 図中1は物体面、2は像面、10,20,30,50,
60は各々複眼系、11,12,13は各々倒立実像
系、A2,B2,C2,A3,B3,C3は各々光学部
材の配置されている位置、L1〜L3は各々倒立実像系
の光軸上の光線である。FIG. 1 is a schematic view of an optical system of an embodiment of the present invention, FIG. 7 is a top view of FIG. 1, FIG. 8 is a partial side view of FIG.
Figure, Figure 10 (A), (B), Figure 11 (A), (B), Figure 12
(A), (B) and (C) are partial side views of another embodiment of the present invention, and FIGS. 2, 3, 5 and 6 are explanatory views of a part of a conventional projection optical system. , FIG. 4 is an explanatory view of a projected image of a part of FIG. In the figure, 1 is the object plane, 2 is the image plane, 10, 20, 30, 50,
Reference numeral 60 is a compound eye system, 11, 12, and 13 are inverted real image systems, A2, B2, C2, A3, B3, and C3 are positions where optical members are arranged, and L1 to L3 are optical axes of the inverted real image system. The upper ray.
Claims (4)
体面を縮小又は拡大倍率で像面上に投影し重ね合わせる
際、光路中に光束を偏向させる複数の光学部材を有する
偏向手段を配置し、該複数の倒立実像系をその光軸上の
各光線が互いに空間内で交差するように構成し、該複数
の倒立実像系の光軸上の各光線が物体面若しくは像面の
少なくとも一方の面と垂直となるように構成し、かつ、
該複数の倒立実像系を各々の光路長が互いに異なるよう
にして同一平面上に配置したことを特徴とする投影光学
系。1. A deflection means having a plurality of optical members for deflecting a light beam in an optical path when an object plane is projected onto an image plane at a reduction or magnification ratio and superposed by a compound eye system having a plurality of inverted real image systems. Then, the plurality of inverted real image systems are configured such that the light rays on their optical axes intersect each other in space, and each light ray on the optical axes of the plurality of inverted real image systems is at least one of the object plane or the image plane. To be perpendicular to the plane of
A projection optical system in which the plurality of inverted real image systems are arranged on the same plane such that their optical path lengths are different from each other.
実像系毎に対向させた複数の反射鏡より構成し、該複数
の反射鏡の角度を各々該倒立実像系毎に変化させて配置
したことを特徴とする特許請求の範囲第1項記載の投影
光学系。2. The plurality of optical members are composed of a plurality of reflecting mirrors facing each other for each of the plurality of inverted real image systems, and the angles of the plurality of reflecting mirrors are changed for each of the inverted real image systems. The projection optical system according to claim 1, wherein:
若しくは像面と該複眼系との間の少なくとも一方に設け
たことを特徴とする特許請求の範囲第2項記載の投影光
学系。3. The projection optical system according to claim 2, wherein the deflecting means is provided between at least one of the object plane and the compound eye system or between the image plane and the compound eye system. system.
の反射鏡により前記複数の倒立実像系のうちの少なくと
も2つを通過する光束を偏向させるようにしたことを特
徴とする特許請求の範囲第1項記載の投影光学系。4. The optical member comprises a reflecting mirror, and the one reflecting mirror deflects a light beam passing through at least two of the plurality of inverted real image systems. The projection optical system according to item 1 above.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60296327A JPH0614146B2 (en) | 1985-12-27 | 1985-12-27 | Projection optics |
| DE19863644354 DE3644354A1 (en) | 1985-12-27 | 1986-12-24 | OPTICAL PROJECTION SYSTEM |
| US06/946,967 US4750022A (en) | 1985-12-27 | 1986-12-29 | Optical projection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60296327A JPH0614146B2 (en) | 1985-12-27 | 1985-12-27 | Projection optics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62153924A JPS62153924A (en) | 1987-07-08 |
| JPH0614146B2 true JPH0614146B2 (en) | 1994-02-23 |
Family
ID=17832099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60296327A Expired - Lifetime JPH0614146B2 (en) | 1985-12-27 | 1985-12-27 | Projection optics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614146B2 (en) |
-
1985
- 1985-12-27 JP JP60296327A patent/JPH0614146B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62153924A (en) | 1987-07-08 |
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